Lower chamber liner
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The upper chamber liner is shown broken away in
All surfaces not shown, form no part of the claimed design.
Claims
The ornamental design for a lower chamber liner, as shown and described.
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Type: Grant
Filed: Nov 6, 2013
Date of Patent: Nov 18, 2014
Assignee: Applied Materials, Inc. (Santa Clara, CA)
Inventors: Shu-Kwan Lau (Sunnyvale, CA), Mehmet Tugrul Samir (Mountain View, CA)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/471,943