Lower chamber liner
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The upper chamber liner is shown broken away in
All surfaces not shown, form no part of the claimed design.
Claims
The ornamental design for a lower chamber liner, as shown and described.
4340462 | July 20, 1982 | Koch |
D404370 | January 19, 1999 | Kimura |
D404372 | January 19, 1999 | Ishii |
6170429 | January 9, 2001 | Schoepp et al. |
6277237 | August 21, 2001 | Schoepp et al. |
6884297 | April 26, 2005 | Park et al. |
7011039 | March 14, 2006 | Mohn et al. |
7234412 | June 26, 2007 | Carpenter et al. |
D556704 | December 4, 2007 | Nakamura et al. |
D557226 | December 11, 2007 | Uchino et al. |
D593969 | June 9, 2009 | Li |
D600221 | September 15, 2009 | Sato |
D600222 | September 15, 2009 | Sato |
7942969 | May 17, 2011 | Riker et al. |
7987814 | August 2, 2011 | Carducci et al. |
8118938 | February 21, 2012 | Carducci et al. |
D658691 | May 1, 2012 | Suzuki et al. |
D658692 | May 1, 2012 | Suzuki et al. |
D658693 | May 1, 2012 | Suzuki et al. |
8282736 | October 9, 2012 | Carducci et al. |
8313578 | November 20, 2012 | Carducci et al. |
D678228 | March 19, 2013 | Suzuki et al. |
D699692 | February 18, 2014 | Yousif |
20020069970 | June 13, 2002 | Noorbakhsh et al. |
20050229849 | October 20, 2005 | Silvetti et al. |
20080041820 | February 21, 2008 | Tong et al. |
20080121620 | May 29, 2008 | Guo et al. |
Type: Grant
Filed: Nov 6, 2013
Date of Patent: Nov 18, 2014
Assignee: Applied Materials, Inc. (Santa Clara, CA)
Inventors: Shu-Kwan Lau (Sunnyvale, CA), Mehmet Tugrul Samir (Mountain View, CA)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/471,943