Focusing ring
Latest Tokyo Electron Limited Patents:
- ETCHING METHOD AND PLASMA PROCESSING SYSTEM
- Apparatus and methods for beam processing of substrates
- Purification processing apparatus, substrate processing system, and processing method
- Plasma processing apparatus, analysis apparatus, and storage medium
- Method of transporting workpiece and processing apparatus
Description
The rear view is the same as the front view.
The left side view is the same as the right side view.
Claims
The ornamental design for a focusing ring, as shown and described.
Referenced Cited
U.S. Patent Documents
Foreign Patent Documents
Other references
| D363464 | October 24, 1995 | Fukasawa |
| D404370 | January 19, 1999 | Kimura |
| D404372 | January 19, 1999 | Ishii |
| 6068441 | May 30, 2000 | Raaijmakers et al. |
| D494552 | August 17, 2004 | Tezuka et al. |
| D496008 | September 14, 2004 | Takahashi et al. |
| 6815352 | November 9, 2004 | Tamura et al. |
| 6818097 | November 16, 2004 | Yamaguchi et al. |
| 7001482 | February 21, 2006 | Landis et al. |
| D546784 | July 17, 2007 | Hayashi |
| D548705 | August 14, 2007 | Hayashi |
| D556704 | December 4, 2007 | Nakamura et al. |
| D557226 | December 11, 2007 | Uchino et al. |
| D559993 | January 15, 2008 | Nagakubo et al. |
| D559994 | January 15, 2008 | Nagakubo et al. |
| D568693 | May 13, 2008 | Furlong |
| 7479304 | January 20, 2009 | Sun et al. |
| D606952 | December 29, 2009 | Lee et al. |
| D609652 | February 9, 2010 | Nagasaka et al. |
| D609655 | February 9, 2010 | Sugimoto |
| D614593 | April 27, 2010 | Lee et al. |
| D648289 | November 8, 2011 | Mayer et al. |
| D654883 | February 28, 2012 | Honma et al. |
| D654884 | February 28, 2012 | Honma et al. |
| D655257 | March 6, 2012 | Honma et al. |
| D655259 | March 6, 2012 | Honma et al. |
| 8357263 | January 22, 2013 | Berkoh et al. |
| D694790 | December 3, 2013 | Matsumoto et al. |
| D697038 | January 7, 2014 | Matsumoto et al. |
| 20030066484 | April 10, 2003 | Morikage et al. |
| 20040025788 | February 12, 2004 | Ogasawara et al. |
| 20040056017 | March 25, 2004 | Renken |
| 471052 | January 2002 | TW |
| 201001525 | January 2010 | TW |
- Taiwan Office Action, Application D101301750, mailed Oct. 24, 2012.
Patent History
Patent number: D709537
Type: Grant
Filed: Mar 29, 2012
Date of Patent: Jul 22, 2014
Assignee: Tokyo Electron Limited (Tokyo)
Inventors: Yusei Kuwabara (Miyagi), Keiichi Nagakubo (Nirasaki)
Primary Examiner: Patricia Palasik
Application Number: 29/417,075
Type: Grant
Filed: Mar 29, 2012
Date of Patent: Jul 22, 2014
Assignee: Tokyo Electron Limited (Tokyo)
Inventors: Yusei Kuwabara (Miyagi), Keiichi Nagakubo (Nirasaki)
Primary Examiner: Patricia Palasik
Application Number: 29/417,075
Classifications
Current U.S. Class:
Element Or Attachment (D15/138)