Outer tube for process tube for manufacturing semiconductor wafers

- Tokyo Electron Limited
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Description

FIG. 1 is perspective view of an outer tube for process tube for manufacturing semiconductor wafers showing our new design;

FIG. 2 is a front view thereof;

FIG. 3 is a rear view thereof;

FIG. 4 is a right side thereof;

FIG. 5 is a left side view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof; and,

FIG. 8 is a cross-sectional view taken along line 8-8 of FIG. 6.

The broken lines shown in the drawings represent portions of the outer tube for process tube for manufacturing semiconductor wafers that form no part of the claimed design.

Claims

The ornamental design for an outer tube for process tube for manufacturing semiconductor wafers, as shown and described.

Referenced Cited
U.S. Patent Documents
4950870 August 21, 1990 Mitsuhashi et al.
5037502 August 6, 1991 Suzuki et al.
5352293 October 4, 1994 Yang et al.
5618349 April 8, 1997 Yuuki
D404368 January 19, 1999 Shimazu
D405062 February 2, 1999 Shimazu
D405429 February 9, 1999 Hanagata et al.
D405431 February 9, 1999 Shimazu
D406113 February 23, 1999 Hanagata et al.
5897311 April 27, 1999 Nishi
5948300 September 7, 1999 Gero et al.
5968593 October 19, 1999 Sakamoto et al.
D417438 December 7, 1999 Matsushima
D423463 April 25, 2000 Hanagata et al.
D424024 May 2, 2000 Hanagata et al.
6251189 June 26, 2001 Odake et al.
D521464 May 23, 2006 Ishii et al.
D521465 May 23, 2006 Ishii et al.
D556704 December 4, 2007 Nakamura et al.
7311520 December 25, 2007 Saito et al.
D586768 February 17, 2009 Inoue et al.
D590359 April 14, 2009 Kaneko
D600659 September 22, 2009 Matsuura et al.
D611013 March 2, 2010 Takahashi
D616396 May 25, 2010 Sato
D618638 June 29, 2010 Nakashima
D619630 July 13, 2010 Kaneko
20020014483 February 7, 2002 Suzuki et al.
20030221779 December 4, 2003 Okuda et al.
20080083372 April 10, 2008 Inoue et al.
20080132079 June 5, 2008 Okada et al.
Patent History
Patent number: D725053
Type: Grant
Filed: May 10, 2012
Date of Patent: Mar 24, 2015
Assignee: Tokyo Electron Limited (Minato-Ku)
Inventors: Hirofumi Kaneko (Oshu), Atsushi Endo (Nirasaki)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/420,534