Chemical vapor deposition wafer carrier with thermal cover

- Veeco Instruments Inc.
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Description

FIG. 1 is a perspective view of a first embodiment of a chemical vapor deposition wafer carrier with thermal cover showing our new design.

FIG. 2 is a top plan view thereof.

FIG. 3 is a right side view thereof, with the left side view, front view, and rear view being identical.

FIG. 4 is a bottom plan view thereof.

FIG. 5 is a perspective view of a second embodiment of a chemical vapor deposition wafer carrier with thermal cover, showing our new design, which differs from the embodiment shown in FIG. 1 in that it includes staples extending through the thickness of the chemical vapor deposition wafer carrier with thermal cover; and,

FIG. 6 is a perspective view of the thermal cover of the chemical vapor deposition wafer carrier with thermal cover, shown separately from the base without staples for ease of illustration.

In each of the figures, portions or features shown in broken lines form no part of the claimed design.

Claims

The ornamental design for a chemical vapor deposition wafer carrier with thermal cover, as shown and described.

Referenced Cited
U.S. Patent Documents
3461537 August 1969 Lotz
3783822 January 1974 Wollam
3845738 November 1974 Berkman et al.
3895967 July 1975 Anthony et al.
4165584 August 28, 1979 Scherrer
D320361 October 1, 1991 Karasawa
D325934 May 5, 1992 Ramljak
5152842 October 6, 1992 Urata et al.
5191738 March 9, 1993 Nakazato
5242501 September 7, 1993 McDiarmid
5690742 November 25, 1997 Ogata et al.
6001183 December 14, 1999 Gurary et al.
6436796 August 20, 2002 Mailho et al.
6492625 December 10, 2002 Boguslayskiy et al.
6506252 January 14, 2003 Boguslayskiy et al.
6666756 December 23, 2003 Travis
6902623 June 7, 2005 Gurary et al.
D517073 March 14, 2006 McDonald et al.
7101272 September 5, 2006 Chen et al.
7122844 October 17, 2006 Nakamura et al.
7276124 October 2, 2007 Gurary et al.
8021487 September 20, 2011 Boguslayskiy et al.
8092599 January 10, 2012 Sferlazzo et al.
8093696 January 10, 2012 Yoon et al.
8182315 May 22, 2012 Nguyen
8216379 July 10, 2012 Ishikawa
D674759 January 22, 2013 Chang
8366830 February 5, 2013 Nakamura et al.
8367477 February 5, 2013 Chien et al.
8372204 February 12, 2013 Nakamura et al.
D686175 July 16, 2013 Gurary
D686582 July 23, 2013 Krishnan
8486726 July 16, 2013 Mangum et al.
8518753 August 27, 2013 Wu et al.
8535445 September 17, 2013 Volf et al.
D690671 October 1, 2013 Gurary
8552547 October 8, 2013 Chien et al.
8562746 October 22, 2013 Gurary et al.
D695241 December 10, 2013 Gurary
D695242 December 10, 2013 Gurary
8603248 December 10, 2013 Gurary et al.
D704155 May 6, 2014 Chang
D721417 January 20, 2015 Sawchuk
9017483 April 28, 2015 Fujikawa et al.
D731409 June 9, 2015 Erlich et al.
D754785 April 26, 2016 Gibson
D778247 February 7, 2017 Gurary
D793971 August 8, 2017 Krishnan
D793972 August 8, 2017 Krishnan
D797067 September 12, 2017 Zhang
D806046 December 26, 2017 Gurary
D813181 March 20, 2018 Okajima
20020027762 March 7, 2002 Yamaguchi
20030057089 March 27, 2003 Nguyen
20040179323 September 16, 2004 Litman et al.
20050011436 January 20, 2005 Liu
20050274374 December 15, 2005 Boguslayskiy et al.
20060102081 May 18, 2006 Ueno et al.
20070186853 August 16, 2007 Gurary et al.
20090155028 June 18, 2009 Boguslavskiy
20090224175 September 10, 2009 Lee et al.
20100055318 March 4, 2010 Volf et al.
20100055320 March 4, 2010 Honma
20100162957 July 1, 2010 Boyd et al.
20100190418 July 29, 2010 Yasuoka et al.
20110049779 March 3, 2011 Egami et al.
20110290175 December 1, 2011 Paranjpe et al.
20110300297 December 8, 2011 Celaru et al.
20120040097 February 16, 2012 Volf et al.
20120156374 June 21, 2012 Gurary et al.
20120234229 September 20, 2012 Nguyen et al.
20120240859 September 27, 2012 Chen
20120272892 November 1, 2012 Paranjpe et al.
20130175005 July 11, 2013 Gowdaru et al.
20130276704 October 24, 2013 Krishnan
20130291798 November 7, 2013 Lee et al.
20140110894 April 24, 2014 Lee et al.
20140261187 September 18, 2014 Krishnan et al.
20140261698 September 18, 2014 Krishnan
20140360430 December 11, 2014 Armour
20150118009 April 30, 2015 Hsieh
20150187620 July 2, 2015 Gurary et al.
20150330601 November 19, 2015 Jungwirth
20160251758 September 1, 2016 Mitrovic et al.
20170076972 March 16, 2017 Krishnan
20170121847 May 4, 2017 Armour et al.
Foreign Patent Documents
102130035 July 2011 CN
202492576 October 2012 CN
103258763 August 2013 CN
203569185 April 2014 CN
203569186 April 2014 CN
203715721 July 2014 CN
204982132 January 2016 CN
105369348 March 2016 CN
105810625 July 2016 CN
105810626 July 2016 CN
206127421 April 2017 CN
10261362 July 2004 DE
0795624 September 1997 EP
1096549 May 2001 EP
S58128724 August 1983 JP
H04110466 April 1992 JP
H10167885 June 1998 JP
H10167886 June 1998 JP
2004128271 April 2004 JP
2006066417 March 2006 JP
5156240 March 2013 JP
100854974 August 2008 KR
1020090036722 April 2009 KR
1020090038606 April 2009 KR
101235928 February 2013 KR
D142257 September 2011 TW
D152296 March 2013 TW
M496228 February 2015 TW
201624596 July 2016 TW
201624605 July 2016 TW
M531049 October 2016 TW
D181305 February 2017 TW
D181306 February 2017 TW
WO 1999/018599 April 1999 WO
WO 2003/069029 August 2003 WO
WO 2012/021370 February 2012 WO
WO 2013/123859 August 2013 WO
Other references
  • Gurary et al., “Investigation of the Wafer Temperature Uniformity in an OMVPE Vertical Rotating Disk Reactor,” Journal of Electronic Material, Nov. 1995, vol. 24, Issue 11, Abstract, 1 page.
  • International Written Opinion and Search Report for International Application No. PCT/US2011/061615 dated May 18, 2012, 9 pages.
  • Application No. PCT/US2014/072425, filed Dec. 26, 2014, International Search Report dated Apr. 29, 2015, 3 pages.
  • Application No. PCT/US2014/072425, filed Dec. 26, 2014, Written Opinion dated Apr. 29, 2015, 7 pages.
  • Application No. PCT/US2011/0456567, Search Report dated Dec. 21, 2011, 6 pages.
  • Application No. PCT/US2014/041134, Written Opinion and Search Report dated Oct. 7, 2014, 11 pages.
  • Taiwan Application No. 103145394, Search Report dated Jan. 9, 2018, 9 page.
  • Taiwan Application No. 106307693, Office Action dated Jun. 8, 2018, 2 pages.
  • Taiwan Application No. 106307693D01, Search Report dated May 5, 2018, 1 page.
  • Application and file history for U.S. Appl. No. 14/297,244, filed Jun. 5, 2014. Inventors: Armour et al.
  • Application and file history for U.S. Appl. No. 15/403,709, filed Jan. 11, 2017. Inventors: Armour et al.
  • Application and file history for U.S. Appl. No. 14/583,346, filed Dec. 26, 2014. Inventors: Guruary et al.
  • Application and file history for Design U.S. Appl. No. 29/641,924, filed Mar. 26, 2018. Inventors: Krishnan et al.
  • Application and file history for Design U.S. Appl. No. 29/627,938, filed Nov. 30, 2017. Inventors: Rashkovsky et al.
  • Application and file history for Design U.S. Appl. No. 29/627,940, filed Nov. 30, 2017. Inventors: Rashkovsky et al.
  • Application and file history for Design U.S. Appl. No. 29/641,925, filed Mar. 26, 2018. Inventors Krishnan et al.
  • Application and file history for Design U.S. Appl. No. 29/641,927, filed Mar. 26, 2018. Inventors: Krishnan et al.
  • Application and file history for Design U.S. Appl. No. 29/641,928, filed Mar. 16, 2018. Inventors: Krishnan et al.
  • Application and file history for Design U.S. Appl. No. 29/641,930, filed Mar. 26, 2018. Inventors: Krishnan et al.
  • Application and file history for Design U.S. Appl. No. 29/641,933, filed Mar. 26, 2018. Inventors: Krishnan et al.
Patent History
Patent number: D863239
Type: Grant
Filed: Mar 26, 2018
Date of Patent: Oct 15, 2019
Assignee: Veeco Instruments Inc. (Plainview, NY)
Inventors: Sandeep Krishnan (Jersey City, NJ), Yuliy Rashkovsky (Millburn, NJ), Alexander Gurary (Bridgewater, NJ), Leo Chin (Poughquag, NY), Mandar Deshpande (Bridgewater, NJ)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/641,931