Wafer carrier with a 31-pocket configuration

- Veeco Instruments Inc.
Skip to: Description  ·  Claims  ·  References Cited  · Patent History  ·  Patent History
Description

FIG. 1 is a perspective view of a wafer carrier with a 31-pocket configuration according to the new design of the first embodiment.

FIG. 2 is a top plan view of a wafer carrier with a 31-pocket configuration according to the new design thereof.

FIG. 3 is a right side view of a wafer carrier with a 31-pocket configuration according to the new design, with the left side, front, and rear views being the same as the right side view thereof.

FIG. 4 is a bottom plan view of a wafer carrier with a 31-pocket configuration according to the new design thereof.

FIG. 5 is a perspective view of a wafer carrier with a 31-pocket configuration according to the new design of the second embodiment.

FIG. 6 is a right side view of a wafer carrier with a 31-pocket configuration according to the new design, with the left side, front, and rear views being the same as the right side view thereof.

FIG. 7 is a bottom plan view of a wafer carrier with a 31-pocket configuration according to the new design thereof; and,

FIG. 8 is a detail view of a portion of the wafer carrier with a 31-pocket configuration shown in FIG. 1 according to the new design showing a single pocket from a perspective view of the first embodiment.

The broken lines, where present, in FIGS. 1, 2, 3, 4, and 8, illustrate portions of the wafer carrier with a 31-pocket configuration that represent environment of the claimed design and form no part of the claimed design. The broken lines of FIG. 1 that define the area corresponding to the enlarged portion shown in FIG. 8 form no part of the claimed design. The broken lines in FIG. 8 that represent the edge of the enlarged portion of the design form no part of the claimed design.

Claims

We claim the ornamental design for a wafer carrier with a 31-pocket configuration, as shown and described.

Referenced Cited
U.S. Patent Documents
3461537 August 1969 Lotz
3731435 May 1973 Boettcher et al.
3783822 January 1974 Wollam
3845738 November 1974 Berkman et al.
4165584 August 28, 1979 Scherrer
D265069 June 22, 1982 LeVan
D280803 October 1, 1985 Peterson
D296029 May 31, 1988 Knox
D302204 July 11, 1989 Gatton
D310874 September 25, 1990 Utley, Jr.
D325934 May 5, 1992 Ramljak
5152842 October 6, 1992 Urata et al.
5191738 March 9, 1993 Nakazato
D344788 March 1, 1994 Castro et al.
5422316 June 6, 1995 Desai et al.
D365541 December 26, 1995 Hirsch et al.
5573448 November 12, 1996 Nakazima et al.
5647789 July 15, 1997 Kitta et al.
D383377 September 9, 1997 Sellers
5674107 October 7, 1997 Graebner et al.
5690742 November 25, 1997 Ogata et al.
D388123 December 23, 1997 Sukumoda et al.
5788560 August 4, 1998 Hashimoto
D398997 September 29, 1998 Taylor
5800622 September 1, 1998 Takemi et al.
5840124 November 24, 1998 Gurary et al.
D410408 June 1, 1999 Green
6080042 June 27, 2000 McGregor et al.
D428133 July 11, 2000 Chen
6331136 December 18, 2001 Bass
6454635 September 24, 2002 Zhang et al.
D464420 October 15, 2002 Tolar
D466597 December 3, 2002 Carr et al.
6492625 December 10, 2002 Boguslavskiy et al.
6500059 December 31, 2002 Chang et al.
6514424 February 4, 2003 Wenski et al.
D475023 May 27, 2003 Maushard et al.
6645049 November 11, 2003 Nguyen
6666948 December 23, 2003 Nguyen
D485613 January 20, 2004 Xiao et al.
D486906 February 17, 2004 Xiao et al.
6709981 March 23, 2004 Grabbe et al.
6710611 March 23, 2004 Saulnier
D490183 May 18, 2004 Benensohn et al.
D490511 May 25, 2004 Campbell
6733367 May 11, 2004 Nguyen
D491098 June 8, 2004 Buzzelli
D493246 July 20, 2004 Benensohn
D502990 March 15, 2005 Morris, III
D504666 May 3, 2005 Cockburn
D510988 October 25, 2005 Blateri
D511827 November 22, 2005 Wilson, Jr.
D512500 December 6, 2005 Wilson, Jr.
D512501 December 6, 2005 Wilson, Jr.
6988942 January 24, 2006 Chen et al.
D517073 March 14, 2006 McDonald et al.
7008308 March 7, 2006 Bjelopavlic
D523825 June 27, 2006 Egawa
D544452 June 12, 2007 Nakamura et al.
7235139 June 26, 2007 Boguslavskiy et al.
D552565 October 9, 2007 Nakamura
D566880 April 15, 2008 Silver
D570075 May 27, 2008 Wood et al.
D571436 June 17, 2008 Genord et al.
D577159 September 16, 2008 Hasapoglou
D591695 May 5, 2009 Oh et al.
D597639 August 4, 2009 Chen Lee
D606952 December 29, 2009 Lee
D609655 February 9, 2010 Sugimoto
D610290 February 16, 2010 Yoshinobu et al.
D611042 March 2, 2010 Ferrari et al.
D614593 April 27, 2010 Lee
D618328 June 22, 2010 Chan
D621804 August 17, 2010 Sip et al.
D624692 September 28, 2010 Mackin et al.
D629547 December 21, 2010 Salm
D633452 March 1, 2011 Namiki et al.
D648289 November 8, 2011 Mayer
D649126 November 22, 2011 Takahashi
8177993 May 15, 2012 Seah et al.
8182315 May 22, 2012 Nguyen
8183315 May 22, 2012 Nugyen
D664285 July 24, 2012 Toft
D664708 July 31, 2012 Toft
8216379 July 10, 2012 Ishikawa et al.
D668211 October 2, 2012 Feng et al.
D668577 October 9, 2012 Musk
D672915 December 18, 2012 Toft
D673113 December 25, 2012 Fowler
D674759 January 22, 2013 Chang et al.
D674961 January 22, 2013 Baran et al.
D675171 January 29, 2013 Tanaka
D677422 March 5, 2013 Lin et al.
D678294 March 19, 2013 Weaver, II et al.
D679446 April 2, 2013 Harrington, Jr.
8414361 April 9, 2013 Nguyen
D681867 May 7, 2013 Wegger et al.
D682028 May 14, 2013 Preisler
D686175 July 16, 2013 Gurary et al.
D686354 July 16, 2013 Feigenbaum
D686582 July 23, 2013 Krishnan et al.
D686713 July 23, 2013 Kimpara
D687788 August 13, 2013 Chen
D687790 August 13, 2013 Krishnan et al.
D687791 August 13, 2013 Krishnan et al.
8535445 September 17, 2013 Volf et al.
D690671 October 1, 2013 Gurary et al.
D690840 October 1, 2013 Feigenbaum
D690841 October 1, 2013 Feigenbaum
D693782 November 19, 2013 Mori
D695241 December 10, 2013 Gurary et al.
D695242 December 10, 2013 Gurary et al.
D697038 January 7, 2014 Matsumoto
D697581 January 14, 2014 Sawchuk et al.
D698434 January 28, 2014 Wolff
D699199 February 11, 2014 Kuwabara et al.
D699201 February 11, 2014 Petsch
D699691 February 18, 2014 Yang
D700987 March 11, 2014 Nepple et al.
D701939 April 1, 2014 Sawchuk et al.
D702356 April 8, 2014 Vosch et al.
D702357 April 8, 2014 Vosch et al.
D703162 April 22, 2014 Tamaso
D704155 May 6, 2014 Chang et al.
D708346 July 1, 2014 Harder
D708728 July 8, 2014 Yoo et al.
8795480 August 5, 2014 Mayer
D713492 September 16, 2014 Sawchuk et al.
D714488 September 30, 2014 Chen et al.
D716742 November 4, 2014 Jang et al.
D717086 November 11, 2014 Pendletone
D720309 December 30, 2014 Kaneko et al.
D720313 December 30, 2014 Flynn et al.
D721417 January 20, 2015 Sawchuk et al.
D722150 February 3, 2015 Heine
D723077 February 24, 2015 Sakata
D724553 March 17, 2015 Choi et al.
9000605 April 7, 2015 Glass
D731409 June 9, 2015 Erlich et al.
D732647 June 23, 2015 McPhilliamy et al.
9068264 June 30, 2015 Yang et al.
D736941 August 18, 2015 Nicholson et al.
D746437 December 29, 2015 Blomberg et al.
D747454 January 12, 2016 Stewart et al.
D748593 February 2, 2016 Dempster et al.
D751380 March 15, 2016 Torrison et al.
D751381 March 15, 2016 Torrison et al.
D751382 March 15, 2016 Torrison et al.
D751383 March 15, 2016 Torrison et al.
D751384 March 15, 2016 Torrison et al.
D751773 March 15, 2016 Gailen
D751999 March 22, 2016 Sharma et al.
D752199 March 22, 2016 Berkman et al.
D752202 March 22, 2016 Berkman et al.
D752728 March 29, 2016 McPhilliamy et al.
D753269 April 5, 2016 Yamagishi et al.
D754785 April 26, 2016 Gibson
D756907 May 24, 2016 Secard
9328908 May 3, 2016 Clifford
D758905 June 14, 2016 Evans
D760180 June 28, 2016 Dempster
D760883 July 5, 2016 Mann
D761746 July 19, 2016 Toyoshima
9388493 July 12, 2016 Chang
D762506 August 2, 2016 Windstrup
D764957 August 30, 2016 Bhattacharya
D765608 September 6, 2016 Park
D766850 September 20, 2016 Morisaki
D768538 October 11, 2016 Chen
D771622 November 15, 2016 Akana
D771785 November 15, 2016 Huang
D772334 November 22, 2016 Nishi
D772735 November 29, 2016 Mansueto
9490157 November 8, 2016 Goela
9500341 November 22, 2016 Jungwirth
D774128 December 13, 2016 Young
D774934 December 27, 2016 Akana
D778247 February 7, 2017 Gurary
D778416 February 7, 2017 Bu
D778422 February 7, 2017 Gajewski
D778423 February 7, 2017 Buzanowski
D778651 February 14, 2017 Jackson
20020027762 March 7, 2002 Yamaguchi
20020185068 December 12, 2002 Gurary et al.
20030029570 February 13, 2003 Kawamura
20030036341 February 20, 2003 Myoung
20030057089 March 27, 2003 Nguyen
20040124413 July 1, 2004 Arai
20040259332 December 23, 2004 Fukuoka
20060186096 August 24, 2006 Schramm
20070269684 November 22, 2007 Machida et al.
20070281592 December 6, 2007 Benner
20080170396 July 17, 2008 Yuan
20090155028 June 18, 2009 Boguslavskiy et al.
20090194026 August 6, 2009 Burrows et al.
20090224175 September 10, 2009 Lee et al.
20090247057 October 1, 2009 Kobayashi et al.
20100162951 July 1, 2010 Pinotti
20100162957 July 1, 2010 Boyd et al.
20100190418 July 29, 2010 Yasuoka et al.
20110120376 May 26, 2011 Yang et al.
20110159786 June 30, 2011 Joseph
20110265723 November 3, 2011 Chiang
20110265724 November 3, 2011 Chiang
20110303154 December 15, 2011 Kim et al.
20120037927 February 16, 2012 Lai
20120156374 June 21, 2012 Gurary et al.
20120240859 September 27, 2012 Chen et al.
20130009179 January 10, 2013 Bhat
20130043493 February 21, 2013 Wang
20130276704 October 24, 2013 Krishnan et al.
20140190405 July 10, 2014 Chang et al.
20140261698 September 18, 2014 Krishnan et al.
20140326186 November 6, 2014 Paranjpe et al.
20140360430 December 11, 2014 Armour et al.
20150118009 April 30, 2015 Hsieh et al.
20150187620 July 2, 2015 Gurary et al.
20150330601 November 19, 2015 Jungwirth
20160372321 December 22, 2016 Krishnan
Foreign Patent Documents
203007414 June 2003 CN
201942749 August 2011 CN
102014100024 July 2015 DE
102010114947 November 2015 DE
2009088088 April 2009 JP
3020110006713 August 2012 KR
3020110006715 August 2012 KR
3020110006717 August 2012 KR
3006565580001 December 2012 KR
3020110006714 December 2012 KR
3020110006716 December 2012 KR
3020110006718 December 2012 KR
3006909570001 September 2013 KR
3007655720000 October 2014 KR
M420823 January 2012 TW
WO7900510 August 1979 WO
WO 7900510 August 1979 WO
WO 2013/133204 September 2013 WO
WO2013133204 September 2013 WO
Other references
  • Rotary-Planetary-Tilting and Rotary-Tilting Stages, image post date Nov. 7, 2014, site visited Feb. 14, 2017, (online), <http://web.archive.org/web/20141107184242/http://www.tedpella.com/cressington—html/Cressington-Rotary-Tilting-Stages.htm>.
  • Silicon wafer with mirror finish, image post date Jan. 28, 2014, site visited Feb. 14, 2017, (online), <http://web.archive.org/web/20140108222104/http://en.wikipedia.org/wiki/Silicon>.
  • Examiner's Notice, for Japanese Patent Application No. 2015-021231, dated Jan. 22, 2016, 1 page.
  • Application and File History for Design U.S. Appl. No. 29/522,212, filed Mar. 27, 2015, Inventors Krishnan et al.
  • Application and File History for Design U.S. Appl. No. 29/524,104, filed Apr. 16, 2015, Inventors Gurary et al.
  • Office Action, for Korean Design Application No. 30-2015-49043, dated Mar. 4, 2016, 2 pages.
  • Notification to Make Rectification, for Chinese Utility Model Application No. 201520873877.1, dated Dec. 31, 2015, 2 pages.
  • Notice of Rejection, for Japanese Design Application No. 2015-21232, dated Jun. 24, 2016, 2 pages.
  • Office Action, for Korean Design Application No. 30-2015-49042, dated Mar. 4, 2016, 2 pages.
  • Office Action, for Taiwan Utility Model Patent Application No. 105208619, dated Aug. 18, 2016, 2 pages.
  • Office Action, for Taiwan Utility Model Patent Application No. 105208621, dated Aug. 18, 2016, 2 pages.
  • AIX G5 HT, image post date Jan. 31, 2011, site visited Apr. 30, 2016.
Patent History
Patent number: D793972
Type: Grant
Filed: Mar 27, 2015
Date of Patent: Aug 8, 2017
Assignee: Veeco Instruments Inc. (Plainview, NY)
Inventors: Sandeep Krishnan (Princeton, NJ), Keng Moy (Basking Ridge, NJ)
Primary Examiner: Kevin Rudzinski
Assistant Examiner: Sean D Lough
Application Number: 29/522,214