Chemical vapor deposition wafer carrier with thermal cover
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In each of the figures, portions or features shown in broken lines form no part of the claimed design.
Claims
The ornamental design for a chemical vapor deposition wafer carrier with thermal cover, as shown and described.
3461537 | August 1969 | Lotz |
3783822 | January 1974 | Wollam |
3845738 | November 1974 | Berkman et al. |
3895967 | July 1975 | Anthony et al. |
4165584 | August 28, 1979 | Scherrer |
D320361 | October 1, 1991 | Karasawa |
D325934 | May 5, 1992 | Ramljak |
5152842 | October 6, 1992 | Urata et al. |
5191738 | March 9, 1993 | Nakazato |
5242501 | September 7, 1993 | McDiarmid |
5690742 | November 25, 1997 | Ogata et al. |
6001183 | December 14, 1999 | Gurary et al. |
6436796 | August 20, 2002 | Mailho et al. |
6492625 | December 10, 2002 | Boguslavskiy et al. |
6506252 | January 14, 2003 | Boguslavskiy et al. |
6666756 | December 23, 2003 | Travis |
6902623 | June 7, 2005 | Gurary et al. |
D517073 | March 14, 2006 | McDonald et al. |
7101272 | September 5, 2006 | Chen et al. |
7122844 | October 17, 2006 | Nakamura et al. |
7276124 | October 2, 2007 | Gurary et al. |
8021487 | September 20, 2011 | Boguslavskiy et al. |
8092599 | January 10, 2012 | Sferlazzo et al. |
8093696 | January 10, 2012 | Yoon et al. |
8182315 | May 22, 2012 | Nguyen |
8216379 | July 10, 2012 | Ishikawa |
D674759 | January 22, 2013 | Chang |
8366830 | February 5, 2013 | Nakamura et al. |
8367477 | February 5, 2013 | Chien et al. |
8372204 | February 12, 2013 | Nakamura et al. |
D686175 | July 16, 2013 | Gurary |
D686582 | July 23, 2013 | Krishnan |
8486726 | July 16, 2013 | Mangum et al. |
8518753 | August 27, 2013 | Wu et al. |
8535445 | September 17, 2013 | Volf et al. |
D690671 | October 1, 2013 | Gurary |
8552547 | October 8, 2013 | Chien et al. |
8562746 | October 22, 2013 | Gurary et al. |
D695241 | December 10, 2013 | Gurary |
D695242 | December 10, 2013 | Gurary |
8603248 | December 10, 2013 | Gurary et al. |
D704155 | May 6, 2014 | Chang |
D721417 | January 20, 2015 | Sawchuk |
9017483 | April 28, 2015 | Fujikawa et al. |
D731409 | June 9, 2015 | Erlich et al. |
D754785 | April 26, 2016 | Gibson |
D778247 | February 7, 2017 | Gurary |
D793971 | August 8, 2017 | Krishnan |
D793972 | August 8, 2017 | Krishnan |
D797067 | September 12, 2017 | Zhang |
D806046 | December 26, 2017 | Gurary |
D813181 | March 20, 2018 | Okajima |
20020027762 | March 7, 2002 | Yamaguchi |
20030057089 | March 27, 2003 | Nguyen |
20040179323 | September 16, 2004 | Litman et al. |
20050011436 | January 20, 2005 | Liu |
20050274374 | December 15, 2005 | Boguslavskiy et al. |
20060102081 | May 18, 2006 | Ueno et al. |
20070186853 | August 16, 2007 | Gurary et al. |
20090155028 | June 18, 2009 | Boguslavskiy |
20090224175 | September 10, 2009 | Lee et al. |
20100055318 | March 4, 2010 | Volf et al. |
20100055320 | March 4, 2010 | Honma |
20100162957 | July 1, 2010 | Boyd et al. |
20100190418 | July 29, 2010 | Yasuoka et al. |
20110049779 | March 3, 2011 | Egami et al. |
20110290175 | December 1, 2011 | Paranjpe et al. |
20110300297 | December 8, 2011 | Celaru et al. |
20120040097 | February 16, 2012 | Volf et al. |
20120156374 | June 21, 2012 | Gurary et al. |
20120234229 | September 20, 2012 | Nguyen et al. |
20120240859 | September 27, 2012 | Chen |
20120272892 | November 1, 2012 | Paranjpe et al. |
20130175005 | July 11, 2013 | Gowdaru et al. |
20130276704 | October 24, 2013 | Krishnan |
20130291798 | November 7, 2013 | Lee et al. |
20140110894 | April 24, 2014 | Lee et al. |
20140261187 | September 18, 2014 | Krishnan et al. |
20140261698 | September 18, 2014 | Krishnan |
20140360430 | December 11, 2014 | Armour |
20150118009 | April 30, 2015 | Hsieh |
20150187620 | July 2, 2015 | Gurary et al. |
20150330601 | November 19, 2015 | Jungwirth |
20160251758 | September 1, 2016 | Mitrovic et al. |
20170076972 | March 16, 2017 | Krishnan |
20170121847 | May 4, 2017 | Armour et al. |
102130035 | July 2011 | CN |
202492576 | October 2012 | CN |
103258763 | August 2013 | CN |
203569185 | April 2014 | CN |
203569186 | April 2014 | CN |
203715721 | July 2014 | CN |
204982132 | January 2016 | CN |
105369348 | March 2016 | CN |
105810625 | July 2016 | CN |
105810626 | July 2016 | CN |
206127421 | April 2017 | CN |
10261362 | July 2004 | DE |
0795624 | September 1997 | EP |
1096549 | May 2001 | EP |
S58128724 | August 1983 | JP |
H04110466 | April 1992 | JP |
H10167885 | June 1998 | JP |
H10167886 | June 1998 | JP |
2004128271 | April 2004 | JP |
2006066417 | March 2006 | JP |
5156240 | March 2013 | JP |
100854974 | August 2008 | KR |
1020090036722 | April 2009 | KR |
1020090038606 | April 2009 | KR |
101235928 | February 2013 | KR |
D142257 | September 2011 | TW |
D152296 | March 2013 | TW |
M496228 | February 2015 | TW |
201624596 | July 2016 | TW |
201624605 | July 2016 | TW |
M531049 | October 2016 | TW |
D181305 | February 2017 | TW |
D181306 | February 2017 | TW |
WO 1999/018599 | April 1999 | WO |
WO 2003/069029 | August 2003 | WO |
WO 2012/021370 | February 2012 | WO |
WO 2013/123859 | August 2013 | WO |
- Gurary et al., “Investigation of the Wafer Temperature Uniformity in an OMVPE Vertical Rotating Disk Reactor,” Journal of Electronic Material, Nov. 1995, vol. 24, Issue 11, Abstract, 1 page.
- International Written Opinion and Search Report for International Application No. PCT/US2011/061615 dated May 18, 2012, 9 pages.
- Application No. PCT/US2014/072425, filed Dec. 26, 2014, International Search Report dated Apr. 29, 2015, 3 pages.
- Application No. PCT/US2014/072425, filed Dec. 26, 2014, Written Opinion dated Apr. 29, 2015, 7 pages.
- Application No. PCT/US2011/0456567, Search Report dated Dec. 21, 2011, 6 pages.
- Application No. PCT/US2014/041134, Written Opinion and Search Report dated Oct. 7, 2014, 11 pages.
- Taiwan Application No. 103145394, Search Report dated Jan. 9, 2018, 9 page.
- Taiwan Application No. 106307693, Office Action dated Jun. 8, 2018, 2 pages.
- Taiwan Application No. 106307693D01, Search Report dated May 5, 2018, 1 page.
- Application and file history for U.S. Appl. No. 14/297,244, filed Jun. 5, 2014. Inventors: Armour et al.
- Application and file history for U.S. Appl. No. 15/403,709, filed Jan. 11, 2017. Inventors: Armour et al.
- Application and file history for U.S. Appl. No. 14/583,346, filed Dec. 26, 2014. Inventors: Guruary et al.
- Application and file history for Design U.S. Appl. No. 29/627,938, filed Nov. 30, 2017. Inventors: Rashkovsky et al.
- Application and file history for Design U.S. Appl. No. 29/627,940, filed Nov. 30, 2017. Inventors: Rashkovsky et al.
- Application and file history for Design U.S. Appl. No. 29/641,925, filed Mar. 26, 2018. Inventors Krishnan et al.
- Application and file history for Design U.S. Appl. No. 29/641,927, filed Mar. 26, 2018. Inventors: Krishnan et al.
- Application and file history for Design U.S. Appl. No. 29/641,928, filed Mar. 16, 2018. Inventors: Krishnan et al.
- Application and file history for Design U.S. Appl. No. 29/641,930, filed Mar. 26, 2018. Inventors: Krishnan et al.
- Application and file history for Design U.S. Appl. No. 29/641,931, filed Mar. 26, 2018. Inventors: Krishnan et al.
- Application and file history for Design U.S. Appl. No. 29/641,933, filed Mar. 26, 2018. Inventors: Krishnan et al.
Type: Grant
Filed: Mar 26, 2018
Date of Patent: Nov 12, 2019
Assignee: Veeco Instruments Inc. (Plainview, NY)
Inventors: Sandeep Krishnan (Jersey City, NJ), Yuliy Rashkovsky (Millburn, NJ), Alexander Gurary (Bridgewater, NJ), Leo Chin (Poughquag, NY), Mandar Deshpande (Bridgewater, NJ)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/641,924