Field Effect Device Patents (Class 257/24)
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Publication number: 20130221328Abstract: A method for forming a nanowire field effect transistor (FET) device, the method includes forming a suspended nanowire over a semiconductor substrate, forming a gate structure around a portion of the nanowire, forming a protective spacer adjacent to sidewalls of the gate and around portions of nanowire extending from the gate, removing exposed portions of the nanowire left unprotected by the spacer structure, and epitaxially growing a doped semiconductor material on exposed cross sections of the nanowire to form a source region and a drain region.Type: ApplicationFiled: February 27, 2012Publication date: August 29, 2013Applicant: International Business Machines CorporationInventors: Jeffrey W. Sleight, Josephine B. Chang, Isaac Lauer, Shreesh Narasimha
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Patent number: 8513646Abstract: Thin film transistor devices comprising a dielectric component and an inorganic semiconductor component coupled thereto, wherein said coupled inorganic semiconductor component is obtainable by a process that comprises contact of said dielectric component and a fluid medium comprising said inorganic semiconductor component.Type: GrantFiled: September 1, 2011Date of Patent: August 20, 2013Assignee: Northwestern UniversityInventors: Tobin J. Marks, Antonio Facchetti, Paul D. Byrne, Hyun Sung Kim
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Publication number: 20130207080Abstract: A silicon nitride layer is provided on an uppermost surface of a graphene layer and then a hafnium dioxide layer is provided on an uppermost surface of the silicon nitride layer. The silicon nitride layer acts as a wetting agent for the hafnium dioxide layer and thus prevents the formation of discontinuous columns of hafnium dioxide atop the graphene layer. The silicon nitride layer and the hafnium dioxide layer, which collectively form a low EOT bilayer gate dielectric, exhibit continuous morphology atop the graphene layer.Type: ApplicationFiled: February 9, 2012Publication date: August 15, 2013Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Christos D. Dimitrakopoulos, Damon B. Farmer, Alfred Grill, Yu-Ming Lin, Deborah A. Neumayer, Dirk Pfeiffer, Wenjuan Zhu
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Publication number: 20130207079Abstract: Non-planar semiconductor devices including at least one semiconductor nanowire having a tapered profile which widens from the source side of the device towards the drain side of the device are provided which have reduced gate to drain coupling and therefore reduced gate induced drain tunneling currents.Type: ApplicationFiled: February 9, 2012Publication date: August 15, 2013Applicant: International Business Machines CorporationInventors: Jeffrey W. Sleight, Sarunya Bangsaruntip
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Patent number: 8507892Abstract: A method for forming a nanowire tunnel field effect transistor device includes forming a nanowire connected to a first pad region and a second pad region, the nanowire including a core portion and a dielectric layer, forming a gate structure on the dielectric layer of the nanowire, forming a first protective spacer on portions of the nanowire, implanting ions in a first portion of the exposed nanowire and the first pad region, implanting in the dielectric layer of a second portion of the exposed nanowire and the second pad region, removing the dielectric layer from the second pad region and the second portion, removing the core portion of the second portion of the exposed nanowire to form a cavity, and epitaxially growing a doped semiconductor material in the cavity to connect the exposed cross sections of the nanowire to the second pad region.Type: GrantFiled: February 14, 2012Date of Patent: August 13, 2013Assignee: International Business Machines CorporationInventors: Sarunya Bangsaruntip, Josephine B. Chang, Isaac Lauer, Jeffrey W. Sleight
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Patent number: 8497499Abstract: A gated electrical device includes a non-conductive substrate and a graphene structure disposed on the non-conductive substrate. A metal gate is disposed directly on a portion of the graphene structure. The metal gate includes a first metal that has a high contact resistance with graphene. Two electrical contacts are each placed on the graphene structure so that the metal gate is disposed between the two electrical contacts. In a method of making a gated electrical device, a graphene structure is placed onto a non-conductive substrate. A metal gate is deposited directly on a portion of the graphene structure. Two electrical contacts are deposited on the graphene structure so that the metal gate is disposed between the two electrical contacts.Type: GrantFiled: October 12, 2010Date of Patent: July 30, 2013Assignee: Georgia Tech Research CorporationInventors: Dragomir Davidovic, Walter A. de Heer, Christopher E. Malec
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Publication number: 20130187129Abstract: A method of forming a semiconductor device is provided, in which the dopant for the source and drain regions is introduced from a doped dielectric layer. In one example, a gate structure is formed on a semiconductor layer of an SOI substrate, in which the thickness of the semiconductor layer is less than 10 nm. A doped dielectric layer is formed over at least the portion of the semiconductor layer that is adjacent to the gate structure. The dopant from the doped dielectric layer is driven into the portion of the semiconductor layer that is adjacent to the gate structure. The dopant diffused into the semiconductor provides source and drain extension regions.Type: ApplicationFiled: March 8, 2013Publication date: July 25, 2013Applicant: International Business Machines CorporationInventor: International Business Machines Corporation
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Patent number: 8487385Abstract: We describe the use of a high-quality-factor torsional resonator of microscale dimensions. The resonator has a paddle that is supported by two nanoscale torsion rods made of a very low thermal conductivity material, such as amorphous (“a-”) silicon. The body of the torsion paddle is coated with an infrared-absorbing material that is thin and light weight, but provides sufficient IR absorption for the applications. It may be placed above a reflecting material of similar dimensions to form a quarter wave cavity. Sensing of the response of the paddle to applied electromagnetic radiation provides a measure of the intensity of the radiation as detected by absorption, and the resulting temperature change, in the paddle.Type: GrantFiled: August 5, 2009Date of Patent: July 16, 2013Assignee: California Institute of TechnologyInventor: Michael L. Roukes
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Patent number: 8472239Abstract: Nanowire-based field-effect transistors (FETs) and techniques for the fabrication thereof are provided. In one aspect, a FET is provided having a plurality of device layers oriented vertically in a stack, each device layer having a source region, a drain region and a plurality of nanowire channels connecting the source region and the drain region, wherein one or more of the device layers are configured to have a different threshold voltage from one or more other of the device layers; and a gate common to each of the device layers surrounding the nanowire channels.Type: GrantFiled: May 9, 2012Date of Patent: June 25, 2013Assignee: International Business Machines CorporationInventors: Josephine Chang, Paul Chang, Michael A. Guillorn, Jeffrey Sleight
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Patent number: 8466451Abstract: A FET inverter is provided that includes a plurality of device layers oriented vertically in a stack, each device layer having a source region, a drain region and a plurality of nanowire channels, wherein the source and drain regions of one or more of the device layers are doped with an n-type dopant and the source and drain regions of one or more other of the device layers are doped with a p-type dopant; a gate common to each of the device layers surrounding the nanowire channels; a first contact to the source regions of the one or more device layers doped with an n-type dopant; a second contact to the source regions of the one or more device layers doped with a p-type dopant; and a third contact common to the drain regions of each of the device layers. Techniques for fabricating a FET inverter are also provided.Type: GrantFiled: December 11, 2011Date of Patent: June 18, 2013Assignee: International Business Machines CorporationInventors: Josephine Chang, Paul Chang, Michael A. Guillorn, Jeffrey Sleight
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Publication number: 20130146845Abstract: Techniques are disclosed for providing a low resistance self-aligned contacts to devices formed in a semiconductor heterostructure. The techniques can be used, for example, for forming contacts to the gate, source and drain regions of a quantum well transistor fabricated in III-V and SiGe/Ge material systems. Unlike conventional contact process flows which result in a relatively large space between the source/drain contacts to gate, the resulting source and drain contacts provided by the techniques described herein are self-aligned, in that each contact is aligned to the gate electrode and isolated therefrom via spacer material.Type: ApplicationFiled: February 4, 2013Publication date: June 13, 2013Inventors: Ravi Pillarisetty, Benjamin Chu-Kung, Mantu K. Hudait, Marko Radiosavljevic, Jack T. Kavalieros, Willy Rachmady, Niloy Mukherjee, Robert S. Chau
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Patent number: 8455860Abstract: An integrated circuit structure includes a substrate; a channel layer over the substrate, wherein the channel layer is formed of a first III-V compound semiconductor material; a highly doped semiconductor layer over the channel layer; a gate dielectric penetrating through and contacting a sidewall of the highly doped semiconductor layer; and a gate electrode on a bottom portion of the gate dielectric. The gate dielectric includes a sidewall portion on a sidewall of the gate electrode.Type: GrantFiled: November 10, 2009Date of Patent: June 4, 2013Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chih-Hsin Ko, Clement Hsingjen Wann
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Patent number: 8450721Abstract: A III-nitride semiconductor device which includes a barrier body between the gate electrode and the gate dielectric thereof.Type: GrantFiled: June 14, 2011Date of Patent: May 28, 2013Assignee: International Rectifier CorporationInventors: Robert Beach, Zhi He, Jianjun Cao
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Publication number: 20130126830Abstract: A fin structure including a vertical alternating stack of a first isoelectric point material layer having a first isoelectric point and a second isoelectric material layer having a second isoelectric point less than the first isoelectric point is formed. The first and second isoelectric point material layers become oppositely charged in a solution with a pH between the first and second isoelectric points. Negative electrical charges are imparted onto carbon nanotubes by an anionic surfactant to the solution. The electrostatic attraction causes the carbon nanotubes to be selectively attached to the surfaces of the first isoelectric point material layer. Carbon nanotubes are attached to the first isoelectric point material layer in self-alignment along horizontal lengthwise directions of the fin structure. A transistor can be formed, which employs a plurality of vertically aligned horizontal carbon nanotubes as the channel.Type: ApplicationFiled: November 23, 2011Publication date: May 23, 2013Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Qing Cao, Dechao Guo, Shu-Jen Han, Yu Lu, Keith Kwong Hon Wong
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Patent number: 8445892Abstract: Techniques for embedding silicon germanium (e-SiGe) source and drain stressors in nanoscale channel-based field effect transistors (FETs) are provided. In one aspect, a method of fabricating a FET includes the following steps. A doped substrate having a dielectric thereon is provided. At least one silicon (Si) nanowire is placed on the dielectric. One or more portions of the nanowire are masked off leaving other portions of the nanowire exposed. Epitaxial germanium (Ge) is grown on the exposed portions of the nanowire. The epitaxial Ge is interdiffused with Si in the nanowire to form SiGe regions embedded in the nanowire that introduce compressive strain in the nanowire. The doped substrate serves as a gate of the FET, the masked off portions of the nanowire serve as channels of the FET and the embedded SiGe regions serve as source and drain regions of the FET.Type: GrantFiled: July 20, 2012Date of Patent: May 21, 2013Assignee: International Business Machines CorporationInventors: Guy Cohen, Conal E. Murray, Michael J. Rooks
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Publication number: 20130119347Abstract: A semiconductor device including a group III-V barrier and a method of manufacturing the semiconductor device, the semiconductor device including: a substrate, insulation layers formed to be spaced apart on the substrate, a group III-V material layer for filling the space between the insulation layers and having a portion protruding higher than the insulation layers, a barrier layer for covering the side and upper surfaces of the protruding portion of the group III-V material layer and having a bandgap larger than that of the group III-V material layer, a gate insulation film for covering the surface of the barrier layer, a gate electrode formed on the gate insulation film, and source and drain electrodes formed apart from the gate electrode. The overall composition of the group III-V material layer is uniform. The barrier layer may include a group III-V material for forming a quantum well.Type: ApplicationFiled: September 12, 2012Publication date: May 16, 2013Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: Young-jin CHO, Kyoung-yeon KIM, Sang-moon LEE, Ki-ha HONG, Eui-chul HWANG
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Publication number: 20130119345Abstract: A thin film transistor includes a gate electrode configured to receive a control voltage, a source electrode insulated from the gate electrode, and configured to receive an input voltage, a drain electrode insulated from the gate electrode, and configured to receive an output voltage, at least two carbon nanotube patterns formed in a channel region between the source electrode and the drain electrode, wherein the carbon nanotube patterns are separated from each other, and at least one floating electrode connecting the two carbon nanotube patterns to each other.Type: ApplicationFiled: June 13, 2012Publication date: May 16, 2013Inventors: Sang Ho PARK, Young Ki SHIN, Yoon Ho KHANG, Joo Hyung LEE, Hyung Woo LEE, Seung Hun HONG
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Patent number: 8440993Abstract: A reconfigurable device and a method of creating, erasing, or reconfiguring the device are provided. At an interface between a first insulating layer and a second insulating layer, an electrically conductive, quasi one- or zero-dimensional electron gas is present such that the interface presents an electrically conductive region that is non-volatile. The second insulating layer is of a thickness to allow metal-insulator transitions upon the application of a first external electric field. The electrically conductive region is subject to erasing upon application of a second external electric field.Type: GrantFiled: June 30, 2011Date of Patent: May 14, 2013Assignee: University of Pittsburgh—Of the Commonwealth System of Higher EducationInventor: Jeremy Levy
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Patent number: 8440994Abstract: Carbon nanotube (CNT)-based devices and technology for their fabrication are disclosed. The discussed electronic and photonic devices and circuits rely on the nanotube arrays grown on a variety of substrates, such as glass or Si wafer. The planar, multiple layer deposition technique and simple methods of change of the nanotube conductivity type during the device processing are utilized to provide a simple and cost effective technology for a large scale circuit integration. Such devices as p-n diode, CMOS-like circuit, bipolar transistor, light emitting diode and laser are disclosed, all of them are expected to have superior performance then their semiconductor-based counterparts due to excellent CNT electrical and optical properties. When fabricated on Si-wafers, the CNT-based devices can be combined with the Si circuit elements, thus producing hybrid Si-CNT devices and circuits.Type: GrantFiled: January 24, 2008Date of Patent: May 14, 2013Assignee: Nano-Electronic and Photonic Devices and Circuits, LLCInventor: Alexander Kastalsky
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Patent number: 8440998Abstract: Embodiments of the present disclosure describe structures and techniques to increase carrier injection velocity for integrated circuit devices. An integrated circuit device includes a semiconductor substrate, a first barrier film coupled with the semiconductor substrate, a quantum well channel coupled to the first barrier film, the quantum well channel comprising a first material having a first bandgap energy, and a source structure coupled to launch mobile charge carriers into the quantum well channel, the source structure comprising a second material having a second bandgap energy, wherein the second bandgap energy is greater than the first bandgap energy. Other embodiments may be described and/or claimed.Type: GrantFiled: December 21, 2009Date of Patent: May 14, 2013Assignee: Intel CorporationInventors: Marko Radosavljevic, Benjamin Chu-Kung, Gilbert Dewey, Niloy Mukherjee
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Patent number: 8440992Abstract: A reconfigurable device and a method of creating, erasing, or reconfiguring the device are provided. At an interface between a first insulating layer and a second insulating layer, an electrically conductive, quasi one- or zero-dimensional electron gas is present such that the interface presents an electrically conductive region that is non-volatile. The second insulating layer is of a thickness to allow metal-insulator transitions upon the application of a first external electric field. The electrically conductive region is subject to erasing upon application of a second external electric field.Type: GrantFiled: May 13, 2011Date of Patent: May 14, 2013Assignee: University of Pittsburgh—of the Commonwealth System of Higher EducationInventor: Jeremy Levy
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Patent number: 8440999Abstract: A semiconductor structure includes a first dielectric material including at least one first conductive region contained therein. The structure also includes at least one graphene containing semiconductor device located atop the first dielectric material. The at least one graphene containing semiconductor device includes a graphene layer that overlies and is in direct with the first conductive region. The structure further includes a second dielectric material covering the at least one graphene containing semiconductor device and portions of the first dielectric material. The second dielectric material includes at least one second conductive region contained therein, and the at least one second conductive region is in contact with a conductive element of the at least one graphene containing semiconductor device.Type: GrantFiled: February 15, 2011Date of Patent: May 14, 2013Assignee: International Business Machines CorporationInventors: Christos D. Dimitrakopoulos, Guy M. Cohen, Stephen M. Gates, Alfred Grill, Timothy J. McArdle, Chun-yung Sung
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Patent number: 8441043Abstract: Semiconductor-based electronic devices and techniques for fabrication thereof are provided. In one aspect, a device is provided comprising a first pad; a second pad and a plurality of nanowires connecting the first pad and the second pad in a ladder-like configuration formed in a silicon-on-insulator (SOI) layer over a buried oxide (BOX) layer, the nanowires having one or more dimensions defined by a re-distribution of silicon from the nanowires to the pads. The device can comprise a field-effect transistor (FET) having a gate surrounding the nanowires wherein portions of the nanowires surrounded by the gate form channels of the FET, the first pad and portions of the nanowires extending out from the gate adjacent to the first pad form a source region of the FET and the second pad and portions of the nanowires extending out from the gate adjacent to the second pad form a drain region of the FET.Type: GrantFiled: January 14, 2011Date of Patent: May 14, 2013Assignee: International Business Machines CorporationInventors: Sarunya Bangsaruntip, Guy Cohen, Jeffrey W. Sleight
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Publication number: 20130105763Abstract: A semiconductor device, which comprises: a semiconductor substrate; a channel region on the semiconductor substrate, said channel region including a quantum well structure; a source region and a drain region on the sides of the channel region; a gate structure on the channel region; wherein the materials for the channel region, the source region and the drain region have different energy bands, and a tunneling barrier structure exists between the source region and the channel region.Type: ApplicationFiled: November 25, 2011Publication date: May 2, 2013Inventors: Huaxiang Yin, Jun Luo, Chao Zhao, Honggang Liu, Dapeng Chen
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Publication number: 20130099204Abstract: Carbon nanotubes can be aligned with compatibility with semiconductor manufacturing processes, with scalability for forming smaller devices, and without performance degradation related to structural damages. A planar structure including a buried gate electrode and two embedded electrodes are formed. After forming a gate dielectric, carbon nanotubes are assembled in a solution on a surface of the gate dielectric along the direction of an alternating current (AC) electrical field generated by applying a voltage between the two embedded electrodes. A source contact electrode and a drain contact electrode are formed by depositing a conductive material on both ends of the carbon nanotubes. Each of the source and drain contact electrodes can be electrically shorted to an underlying embedded electrode to reduce parasitic capacitance.Type: ApplicationFiled: October 21, 2011Publication date: April 25, 2013Applicants: KARLSRUHER INSTITUT FUER TECHNOLOGIE, INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Phaedon Avouris, Yu-Ming Lin, Mathias B. Steiner, Michael Engel, Ralph Krupke
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Patent number: 8426320Abstract: The method for forming wavelike coherent nanostructures by irradiating a surface of a material by a homogeneous flow of ions is disclosed. The rate of coherency is increased by applying preliminary preprocessing steps.Type: GrantFiled: June 20, 2011Date of Patent: April 23, 2013Assignee: Wostec, Inc.Inventors: Valery K. Smirnov, Dmitry S. Kibalov
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Patent number: 8421060Abstract: A logic device includes: a substrate having a channel layer; two input terminal patterns of ferromagnetic material formed on the substrate and spaced apart from each other along a longitudinal direction of the channel layer so as to serve as the input terminals of a logic gate; and an output terminal pattern of ferromagnetic material formed on the substrate and disposed between the two input terminal patterns to serve as an output terminal of the logic gate. The output terminal pattern reads an output voltage by using spin accumulation and diffusion of electron spins which are injected into the channel layer from the input terminal patterns.Type: GrantFiled: January 8, 2010Date of Patent: April 16, 2013Assignee: Korea Institute of Science and TechnologyInventors: Hyun Cheol Koo, Suk Hee Han, Joon Yeon Chang, Hyung Jun Kim, Jang Hae Ku
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Patent number: 8422273Abstract: Nanowire-based field-effect transistors (FETs) and techniques for the fabrication thereof are provided. In one aspect, a FET is provided having a plurality of device layers oriented vertically in a stack, each device layer having a source region, a drain region and a plurality of nanowire channels connecting the source region and the drain region, wherein one or more of the device layers are configured to have a different threshold voltage from one or more other of the device layers; and a gate common to each of the device layers surrounding the nanowire channels.Type: GrantFiled: May 21, 2009Date of Patent: April 16, 2013Assignee: International Business Machines CorporationInventors: Josephine Chang, Paul Chang, Michael A. Guillorn, Jeffrey Sleight
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Patent number: 8421052Abstract: An electrical device includes an insulating substrate; an elongated piezoelectric semiconductor structure, a first electrode and a second electrode. A first portion of the elongated piezoelectric semiconductor structure is affixed to the substrate and a second portion of the elongated piezoelectric semiconductor structure extends outwardly from the substrate. The first electrode is electrically coupled to a first end of the first portion of the elongated piezoelectric semiconductor structure. The second electrode is electrically coupled to a second end of the first portion of the elongated piezoelectric semiconductor structure.Type: GrantFiled: August 13, 2010Date of Patent: April 16, 2013Assignee: Georgia Tech Research CorporationInventors: Zhong L. Wang, Peng Fei
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Patent number: 8409882Abstract: A method and apparatus for determining overlay includes an array of electronic devices having structures formed in a plurality of layers and such that a device on a first end of the array includes an offset from a position of a device on a second end of the array. A measurement device is configured to measure electrical characteristics of the devices in the array to determine a transition position between the electrical characteristics. A comparison device is configured to determine an overlay between the layers based on a device associated with the transition position.Type: GrantFiled: November 13, 2009Date of Patent: April 2, 2013Assignee: International Business Machines CorporationInventors: Emrah Acar, Aditya Bansal, Amith Singhee
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Patent number: 8405133Abstract: In a semiconductor device including graphene, a gate insulating layer may be formed between a gate electrode and a graphene layer, and an interlayer insulating layer may be formed under a portion of the graphene layer under which the gate insulating layer is not formed. The gate insulating layer may include a material that has higher dielectric permittivity than the interlayer insulating layer.Type: GrantFiled: November 1, 2011Date of Patent: March 26, 2013Assignee: Samsung Electronics Co., Ltd.Inventors: Hyun-jong Chung, Jae-ho Lee, Jae-hong Lee, Hyung-cheol Shin, Sun-ae Seo, Sung-hoon Lee, Jin-seong Heo, Hee-jun Yang
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Publication number: 20130069040Abstract: An organic nanofiber including a gelled organic semiconductor compound. Also disclosed is an organic semiconductor transistor and a method of manufacturing an organic semiconductor transistor.Type: ApplicationFiled: November 7, 2012Publication date: March 21, 2013Applicants: SEOUL NATIONAL UNIVERSITY R&DB FOUNDATION, SAMSUNG ELECTRONICS CO., LTD.Inventors: SAMSUNG ELECTRONICS CO., LTD., SEOUL NATIONAL UNIVERSITY R&DB FOUNDA
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Patent number: 8399879Abstract: Provided is a method for fabricating a nano-wire field effect transistor including steps of: preparing an SOI substrate having a (100) surface orientation, and nano-wire field effect transistor where two triangular columnar members configuring the nano-wires and being made of a silicon crystal layer are arranged one above the other on an SOI substrate having a (100) surface such a way that the ridge lines of the triangular columnar members face via an insulator; processing the silicon crystal configuring the SOI substrate into a standing plate-shaped member having a rectangular cross-section; and as a nanowire, processing the silicon crystal by orientation dependent wet etching into a shape where two triangular columnar members are arranged one above the other in such a way that the ridge lines of the triangular columnar members configuring the nano-wires face through the ridge lines thereof, and an integrated circuit including the nano-wire field effect transistor.Type: GrantFiled: June 5, 2009Date of Patent: March 19, 2013Assignee: National Institute of Advanced Industrial Science and TechnologyInventors: Yongxun Liu, Takashi Matsukawa, Kazuhiko Endo, Shinichi Ouchi, Kunihiro Sakamoto, Meishoku Masahara
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Patent number: 8395142Abstract: Provided is an infrared light detector 100 with a plurality of first electronic regions 10 which are electrically independent from each other and arranged in a specific direction, formed by dividing a single first electronic region. An outer electron system which is electrically connected to each of the plurality of first electronic regions 10 in a connected status is configured such that an electron energy level of excited sub-bands of each of the plurality of first electron regions 10 in a disconnected status is sufficiently higher than a Fermi level of each of second electronic regions 20 opposed to each of the first electronic regions 10 in a conduction channel 120.Type: GrantFiled: April 16, 2010Date of Patent: March 12, 2013Assignee: Japan Science and Technology AgencyInventors: Susumu Komiyama, Patrick Nickels
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Patent number: 8395774Abstract: A method of using an optical sensor, the optical sensor comprising a sensing surface comprising graphene layer, the sensing surface located on a substrate, includes determining a first optical absorption spectrum for the graphene layer by a spectrophotometer; adding an analyte, the analyte selected to cause a shift in the first optical absorption spectrum, to the graphene layer; determining a second optical absorption spectrum for the modified graphene layer by a spectrophotometer; determining a shift between the first optical absorption spectrum and the second optical absorption spectrum; and determining a makeup of the analyte based on the determined shift.Type: GrantFiled: September 21, 2010Date of Patent: March 12, 2013Assignees: International Business Machines Corporation, Egypt Nanotechnology CenterInventors: Ali Afzali, Ageeth A. Bol, Amal Kasry, George S. Tulevski
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Patent number: 8389973Abstract: A memory includes a first tunneling field effect transistor including a first drain and a first source, the first drain coupled to a first resistive memory element. The memory includes a second tunneling field effect transistor including a second drain and sharing the first source, the second drain coupled to a second resistive memory element. The memory includes a first region coupled to the first source for providing a source node.Type: GrantFiled: December 22, 2010Date of Patent: March 5, 2013Assignee: Qimonda AGInventor: Thomas Nirschl
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Patent number: 8389977Abstract: Group III-nitride devices are described that include a stack of III-nitride layers, passivation layers, and conductive contacts. The stack includes a channel layer with a 2DEG channel, a barrier layer and a spacer layer. One passivation layer directly contacts a surface of the spacer layer on a side opposite to the channel layer and is an electrical insulator. The stack of III-nitride layers and the first passivation layer form a structure with a reverse side proximate to the first passivation layer and an obverse side proximate to the barrier layer. Another passivation layer is on the obverse side of the structure. Defected nucleation and stress management layers that form a buffer layer during the formation process can be partially or entirely removed.Type: GrantFiled: December 10, 2009Date of Patent: March 5, 2013Assignee: Transphorm Inc.Inventors: Rongming Chu, Umesh Mishra, Rakesh K. Lal
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Patent number: 8389976Abstract: Methods and associated structures of forming a microelectronic device are described. Those methods may comprise forming a channel region on a substrate, wherein the channel region comprises at least one CNT, forming at least one source/drain region adjacent the channel region, and then forming a gate electrode on the channel region, wherein a width of the gate electrode comprises about 50 percent to about 90 percent of a width of the contact region.Type: GrantFiled: December 29, 2006Date of Patent: March 5, 2013Assignee: Intel CorporationInventors: Arijit Raychowdhury, Ali Keshavarzi, Juanita Kurtin, Vivek De
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Patent number: 8390005Abstract: An optical emitter includes at least one nanowire connected in a circuit such that current selectively flows into the nanowire. The nanowire has a length-to-diameter ratio of ten or less. A method for generating optical emission includes applying a voltage across a nanowire to inject charge carriers into the nanowire, the nanowire having a length-to-diameter ratio of ten or less; and confining the charge carriers within the nanowire by placing a high bandgap material at each end of the nanowire, wherein the charge carriers recombine to emit optical energy.Type: GrantFiled: October 1, 2008Date of Patent: March 5, 2013Assignee: Hewlett-Packard Development Company, L.P.Inventors: Shih-Yuan Wang, Nobuhiko Kobayashi
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Publication number: 20130049738Abstract: Photo-field-effect transistor devices and associated methods are disclosed in which a photogate, consisting of a quantum dot sensitizing layer, transfers photoelectrons to a semiconductor channel across a charge-separating (type-II) heterointerface, producing a sustained primary and secondary flow of carriers between source and drain electrodes. The light-absorbing photogate thus modulates the flow of current along the channel, forming a photo-field effect transistor.Type: ApplicationFiled: August 28, 2012Publication date: February 28, 2013Inventor: Edward Hartley Sargent
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Patent number: 8384065Abstract: A method for forming a nanowire field effect transistor (FET) device, the method includes forming a suspended nanowire over a semiconductor substrate, forming a gate structure around a portion of the nanowire, forming a protective spacer adjacent to sidewalls of the gate and around portions of nanowire extending from the gate, removing exposed portions of the nanowire left unprotected by the spacer structure, and epitaxially growing a doped semiconductor material on exposed cross sections of the nanowire to form a source region and a drain region.Type: GrantFiled: December 4, 2009Date of Patent: February 26, 2013Assignee: International Business Machines CorporationInventors: Sarunya Bangsaruntip, Josephine B. Chang, Guy M. Cohen, Jeffrey W. Sleight
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Patent number: 8384069Abstract: A semiconductor structure includes a support and at least one block provided on the support. The block includes a stack including alternating layers based on a first semiconductor material and layers based on a second semiconductor material different from the first material, the layers presenting greater dimensions than layers such that the stack has a lateral tooth profile and a plurality of spacers filling the spaces formed by the tooth profile, the spacers being made of a third material different from the first material such that each of the lateral faces of the block presents alternating lateral bands based on the first material and alternating lateral bands based on the third material. At least one of the lateral faces of the block is partially coated with a material promoting the growth of nanotubes or nanowires, the catalyst material exclusively coating the lateral bands based on the first material or exclusively coating the lateral bands based on the third material.Type: GrantFiled: May 18, 2010Date of Patent: February 26, 2013Assignee: Commissariat à l'Énergie Atomique et aux Énergies AlternativesInventors: Carole Pernel, Cécilia Dupre
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Patent number: 8384075Abstract: A thin film transistor includes a multi-coaxial silicon nanowire unit including a plurality of coaxial silicon nanowires on a substrate, the multi-coaxial silicon nanowire unit including a central portion and end portions of the central portion; a gate electrode on the central portion; and a source electrode and a drain electrode on the respective end portions, respectively, so as to electrically connect to the multi-coaxial silicon nanowire unit.Type: GrantFiled: June 13, 2012Date of Patent: February 26, 2013Assignee: LG Display Co., Ltd.Inventors: Gee-Sung Chae, Mi-Kyung Park
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Publication number: 20130032783Abstract: Techniques are disclosed for forming a non-planar germanium quantum well structure. In particular, the quantum well structure can be implemented with group IV or III-V semiconductor materials and includes a germanium fin structure. In one example case, a non-planar quantum well device is provided, which includes a quantum well structure having a substrate (e.g. SiGe or GaAs buffer on silicon), a IV or III-V material barrier layer (e.g., SiGe or GaAs or AlGaAs), a doping layer (e.g., delta/modulation doped), and an undoped germanium quantum well layer. An undoped germanium fin structure is formed in the quantum well structure, and a top barrier layer deposited over the fin structure. A gate metal can be deposited across the fin structure. Drain/source regions can be formed at respective ends of the fin structure.Type: ApplicationFiled: October 9, 2012Publication date: February 7, 2013Inventors: Ravi Pillarisetty, Jack T. Kavalieros, Willy Rachmady, Uday Shah, Benjamin Chu-Kung, Mark Radosavljevic, Niloy Mukherjee, Gilbert Dewey, Been Y. Jin, Robert S. Chau
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Patent number: 8368052Abstract: Techniques are disclosed for providing a low resistance self-aligned contacts to devices formed in a semiconductor heterostructure. The techniques can be used, for example, for forming contacts to the gate, source and drain regions of a quantum well transistor fabricated in III-V and SiGe/Ge material systems. Unlike conventional contact process flows which result in a relatively large space between the source/drain contacts to gate, the resulting source and drain contacts provided by the techniques described herein are self-aligned, in that each contact is aligned to the gate electrode and isolated therefrom via spacer material.Type: GrantFiled: December 23, 2009Date of Patent: February 5, 2013Assignee: Intel CorporationInventors: Ravi Pillarisetty, Benjamin Chu-Kung, Mantu K. Hudait, Marko Radosavljevic, Jack T. Kavalieros, Willy Rachmady, Niloy Mukherjee, Robert S. Chau
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Patent number: 8368053Abstract: Integrated circuit multilayer integration techniques are provided. In one aspect, a method of fabricating an integrated circuit is provided. The method includes the following steps. A substrate is provided. A plurality of interconnect layers are formed on the substrate arranged in a stack, each interconnect layer comprising one or more metal lines, wherein the metal lines in a given one of the interconnect layers are larger than the metal lines in the interconnect layers, if present, above the given interconnect layer in the stack and wherein the metal lines in the given interconnect layer are smaller than the metal lines in the interconnect layers, if present, below the given interconnect layer in the stack. At least one transistor is formed on a top-most layer of the stack.Type: GrantFiled: March 3, 2011Date of Patent: February 5, 2013Assignee: International Business Machines CorporationInventors: Zihong Liu, Ghavam G. Shahidi
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Patent number: 8368990Abstract: Devices, methods, and techniques for frequency-dependent optical switching are provided. In one embodiment, a device includes a substrate, a first optical-field confining structure located on the substrate, a second optical-field confining structure located on the substrate, and a composite structure located between the first and second optical-field confining structures. The second optical-field confining structure may be spaced apart from the first optical-field confining structure. The composite structure may include an embedding structure with a surface to receive photons and multiple quantum structures located in the embedding structure.Type: GrantFiled: August 21, 2009Date of Patent: February 5, 2013Assignee: University of Seoul Industry Cooperation FoundationInventor: Doyeol Ahn
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Publication number: 20130026451Abstract: A substrate includes a first source region and a first drain region each having a first semiconductor layer disposed on a second semiconductor layer and a surface parallel to {110} crystalline planes and opposing sidewall surfaces parallel to the {110} crystalline planes; nanowire channel members suspended by the first source region and the first drain region, where the nanowire channel members include the first semiconductor layer, and opposing sidewall surfaces parallel to {100} crystalline planes and opposing faces parallel to the {110} crystalline planes. The substrate further includes a second source and drain regions having the characteristics of the first source and drain regions, and a single channel member suspended by the second source region and the second drain region and having the same characteristics as the nanowire channel members. A width of the single channel member is at least several times a width of a single nanowire member.Type: ApplicationFiled: September 6, 2012Publication date: January 31, 2013Applicant: International Business Machines CorporationInventors: Sarunya Bangsaruntip, Josephine B. Chang, Leland Chang, Jeffrey W. Sleight
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Publication number: 20130026450Abstract: Disclosed is a semiconductor device. More specifically, disclosed are a nitride-based heterojunction semiconductor device and a method for producing the same. The nitride-based heterojunction semiconductor device includes a nitride semiconductor buffer layer, a barrier layer disposed on the buffer layer, a cap layer discontinuously disposed on the barrier layer, a source electrode and a drain electrode that contact at least one of the barrier layer and the cap layer, and a gate electrode that Schottky-contacts at least one of the barrier layer and the cap layer and is disposed between the source electrode and the drain electrode.Type: ApplicationFiled: July 20, 2012Publication date: January 31, 2013Inventors: Jinhong Park, Kwangchoong Kim, Taehoon Jang
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Publication number: 20130026449Abstract: A substrate includes a first source region and a first drain region each having a first semiconductor layer disposed on a second semiconductor layer and a surface parallel to {110} crystalline planes and opposing sidewall surfaces parallel to the {110} crystalline planes; nanowire channel members suspended by the first source region and the first drain region, where the nanowire channel members include the first semiconductor layer, and opposing sidewall surfaces parallel to {100} crystalline planes and opposing faces parallel to the {110} crystalline planes. The substrate further includes a second source and drain regions having the characteristics of the first source and drain regions, and a single channel member suspended by the second source region and the second drain region and having the same characteristics as the nanowire channel members. A width of the single channel member is at least several times a width of a single nanowire member.Type: ApplicationFiled: July 25, 2011Publication date: January 31, 2013Applicant: International Business Machines CorporationInventors: Sarunya BANGSARUNTIP, Josephine B. CHANG, Leland CHANG, Jeffrey W. SLEIGHT