Insulated Electrode Device Is Combined With Diverse Type Device (e.g., Complementary Mosfets, Fet With Resistor, Etc.) Patents (Class 257/350)
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Patent number: 8766410Abstract: Integrated circuits having combined memory and logic functions are provided. In one aspect, an integrated circuit is provided. The integrated circuit comprises: a substrate comprising a silicon layer over a BOX layer, wherein a select region of the silicon layer has a thickness of between about three nanometers and about 20 nanometers; at least one eDRAM cell comprising: at least one pass transistor having a pass transistor source region, a pass transistor drain region and a pass transistor channel region formed in the select region of the silicon layer; and a capacitor electrically connected to the pass transistor.Type: GrantFiled: June 6, 2011Date of Patent: July 1, 2014Assignee: International Business Machines CorporationInventors: Jin Cai, Josephine Chang, Leland Chang, Brian L. Ji, Steven John Koester, Amlan Majumdar
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Patent number: 8766334Abstract: A semiconductor device of an embodiment includes: a substrate formed of a single-crystal first semiconductor; a gate insulating film on the substrate; a gate electrode including a layered structure of a semiconductor layer formed of a polycrystalline second semiconductor and a metal semiconductor compound layer formed of a first metal semiconductor compound that is a reaction product of a metal and the second semiconductor; and electrodes formed of a second metal semiconductor compound that is a reaction product of the metal and the first semiconductor, and formed on the substrate with the gate electrode interposed therebetween, and an aggregation temperature of the first metal semiconductor compound on the polycrystalline second semiconductor is lower than an aggregation temperature of the second metal semiconductor compound on the single-crystal first semiconductor, and a cluster-state high carbon concentration region is included in an interface between the semiconductor layer and the metal semiconductor coType: GrantFiled: September 4, 2012Date of Patent: July 1, 2014Assignee: Kabushiki Kaisha ToshibaInventor: Yoshinori Tsuchiya
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Patent number: 8759904Abstract: Electronic devices (20, 20?) of superior design flexibility that avoid channel-width quantization effects common with prior art fin-type (FIN) field effect transistors (FIN-FETS) (22) are obtained by providing multiple FIN-FETs (22) and at least one planar FET (32, 32?) on a common substrate (21), wherein the multiple FIN-FETs (22) have fins (231, 232) of at least fin heights H1 and H2, with H2<H1. The multiple FIN-FETs (22) and the at least one planar FET (32, 32?) are separated vertically as well as laterally, which aids electrical isolation therebetween. Such electrical isolation can be enhanced by forming the planar FET (32) in a semiconductor region (441) insulated from the common substrate (21).Type: GrantFiled: August 24, 2011Date of Patent: June 24, 2014Assignee: GlobalFoundries, Inc.Inventors: Jeremy A. Wahl, Kingsuk Maitra
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Publication number: 20140167167Abstract: An integrated cell may include an nMOS transistor, and an pMOS transistor. The cell may be produced in fully depleted silicon-on-insulator technology, and it is possible for the substrates of the transistors of the cell to be biased with the same adjustable biasing voltage.Type: ApplicationFiled: December 4, 2013Publication date: June 19, 2014Applicant: STMICROELECTRONICS SAInventors: Frederic HASBANI, Eric Remond
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Publication number: 20140167166Abstract: Semiconductor devices and fabrication methods for simultaneously forming a 3T-FinFET and a 4T-FinFET on a same substrate are provided. A first fin and a second fin can be formed on a semiconductor substrate. The first fin has a top surface higher than the second fin. A first gate dielectric layer and a first gate can be formed across the first fin. A second gate dielectric layer and a second gate can be formed across the second fin. An interlayer dielectric layer can be formed to cover the first gate, the second gate, and the semiconductor substrate. A first portion of the interlayer dielectric layer, a portion of the first gate, and a portion of the first gate dielectric layer, over the first fin, and a second portion of the interlayer dielectric layer over the second fin can be removed to expose the second gate.Type: ApplicationFiled: October 23, 2013Publication date: June 19, 2014Applicant: Semiconductor Manufacturing International (Shanghai) CorporationInventor: WAYNE BAO
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Patent number: 8753967Abstract: It is an object to solve inhibition of miniaturization of an element and complexity of a manufacturing process thereof. It is another object to provide a nonvolatile memory device and a semiconductor device having the memory device, in which data can be additionally written at a time besides the manufacturing time and in which forgery caused by rewriting of data can be prevented. It is further another object to provide an inexpensive nonvolatile memory device and semiconductor device. A memory element is manufactured in which a first conductive layer, a second conductive layer that is beside the first conductive layer, and conductive fine particles of each surface which is covered with an organic film are deposited over an insulating film. The conductive fine particles are deposited between the first conductive layer and the second conductive layer.Type: GrantFiled: March 18, 2013Date of Patent: June 17, 2014Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Yoshiharu Hirakata
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Patent number: 8748258Abstract: An ETSOI transistor and a capacitor are formed respectively in a transistor and capacitor region thereof by etching through an ETSOI and thin BOX layers in a replacement gate HK/MG flow. The capacitor formation is compatible with an ETSOI replacement gate CMOS flow. A low resistance capacitor electrode makes it possible to obtain a high quality capacitor or varactor. The lack of topography during dummy gate patterning are achieved by lithography in combination accompanied with appropriate etch.Type: GrantFiled: December 12, 2011Date of Patent: June 10, 2014Assignee: International Business Machines CorporationInventors: Kangguo Cheng, Bruce B. Doris, Ali Khakifirooz, Ghavam Shahidi
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Patent number: 8742500Abstract: A semiconductor device is disclosed wherein a peripheral region with a high breakdown voltage and high robustness against induced surface charge is manufactured using a process with high mass productivity. The device has n-type drift region and p-type partition region of layer-shape deposited in a vertical direction to one main surface of n-type semiconductor substrate with high impurity concentration form as drift layer, alternately adjacent parallel pn layers in a direction along one main surface. Active region through which current flows and peripheral region enclosing the active region include parallel pn layers.Type: GrantFiled: October 14, 2011Date of Patent: June 3, 2014Assignee: Fuji Electric Co., LtdInventor: Yasuhiko Onishi
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Patent number: 8735975Abstract: A method and structures are provided for implementing metal via gate node high performance stacked vertical transistors in a back end of line (BEOL) on a semiconductor System on Chip (SoC). The high performance stacked vertical transistors include a pair of stacked vertical field effect transistors (FETs) formed by polycrystalline depositions in a stack between planes of a respective global signal routing wire. A channel length of each of the stacked vertical FETs is delineated by the polycrystalline depositions with sequential source deposition, channel deposition and drain deposition; and a wire via defines the gate node.Type: GrantFiled: January 9, 2013Date of Patent: May 27, 2014Assignee: International Business Machines CorporationInventors: Karl R. Erickson, Phil C. Paone, David P. Paulsen, John E. Sheets, II, Gregory J. Uhlmann, Kelly L. Williams
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Patent number: 8735986Abstract: A substrate includes a first region having a first resistivity, for optimizing a field effect transistor, a second region having a second resistivity, for optimizing an npn subcollector of a bipolar transistor device and triple well, a third region having a third resistivity, with a high resistivity for a passive device, a fourth region, substantially without implantation, to provide low perimeter capacitance for devices.Type: GrantFiled: December 6, 2011Date of Patent: May 27, 2014Assignee: International Business Machines CorporationInventors: Alan B. Botula, Renata Camillo-Castillo, James S. Dunn, Jeffrey P. Gambino, Douglas B. Hershberger, Alvin J. Joseph, Robert M. Rassel, Mark E. Stidham
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Patent number: 8729632Abstract: A semiconductor structure comprising a semiconductor unit, a first conductive structure, a first conductive plug, and a second conductive structure is provided. The semiconductor unit has a substrate on a first side of the semiconductor unit. The substrate has at least a hole. The first conductive plug is in the hole and the hole may be full of the conductive plug. The first conductive structure is on the surface of the semiconductor unit. The surface is at the first side of the semiconductor unit. The second conductive structure is on a surface at a second side of the substrate of the semiconductor unit.Type: GrantFiled: November 29, 2011Date of Patent: May 20, 2014Assignee: Niko Semiconductor Co., Ltd.Inventors: Hsiu Wen Hsu, Chih Cheng Hsieh
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Publication number: 20140131802Abstract: Techniques for fabricating passive devices in an extremely-thin silicon-on-insulator (ETSOI) wafer are provided. In one aspect, a method for fabricating one or more passive devices in an ETSOI wafer is provided. The method includes the following steps. The ETSOI wafer having a substrate and an ETSOI layer separated from the substrate by a buried oxide (BOX) is provided. The ETSOI layer is coated with a protective layer. At least one trench is formed that extends through the protective layer, the ETSOI layer and the BOX, and wherein a portion of the substrate is exposed within the trench. Spacers are formed lining sidewalls of the trench. Epitaxial silicon templated from the substrate is grown in the trench. The protective layer is removed from the ETSOI layer. The passive devices are formed in the epitaxial silicon.Type: ApplicationFiled: January 20, 2014Publication date: May 15, 2014Applicant: International Business Machines CorporationInventors: Ming Cai, Dechao Guo, Chun-Chen Yeh
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Patent number: 8723278Abstract: A sensor element array and method of fabricating the same are provided. The sensor element array is disposed on a substrate and includes a first patterned conductive layer, a channel layer, a first insulation layer, a second patterned conductive layer, a second insulation layer, and a third patterned conductive layer. The first patterned conductive layer includes a sensing line, a first power line, a source/drain pattern and a branch pattern. The channel layer includes a first channel and a second channel. Margins of the first insulation layer and the second patterned conductive layer are substantially overlapped. The second patterned conductive layer includes a selecting line, a gate pattern, and a gate connecting pattern. The second insulation layer has a first connecting opening for exposing the gate connecting pattern. The third patterned conductive layer includes a sensing electrode electrically connected to the gate connecting pattern.Type: GrantFiled: March 4, 2012Date of Patent: May 13, 2014Assignee: Industrial Technology Research InstituteInventors: Chih-Ming Lai, Yung-Hui Yeh
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Publication number: 20140124863Abstract: Methods and structures for forming a localized silicon-on-insulator (SOI) finFET are disclosed. Fins are formed on a bulk substrate. Nitride spacers protect the fin sidewalls. A shallow trench isolation region is deposited over the fins. An oxidation process causes oxygen to diffuse through the shallow trench isolation region and into the underlying silicon. The oxygen reacts with the silicon to form oxide, which provides electrical isolation for the fins. The shallow trench isolation region is in direct physical contact with the fins and/or the nitride spacers that are disposed on the fins. Structures comprising bulk-type fins, SOI-type fins, and planar regions are also disclosed.Type: ApplicationFiled: February 20, 2013Publication date: May 8, 2014Applicant: International Business Machines CorporationInventors: Kangguo Cheng, Ali Khakifirooz, Kern Rim, Ramachandra Divakaruni
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Patent number: 8716810Abstract: A memory cell has N?6 transistors, in which two are access transistors, at least one pair [say (N?2)/2] are pull-up transistors, and at least another pair [say (N?2)/2] are pull-down transistors. The pull-up and pull-down transistors are all coupled between the two access transistors. Each of the access transistors and the pull-up transistors are the same type, p-type or n-type. Each of the pull-down transistors is the other type, p-type or n-type. The access transistors are floating body devices. The pull-down transistors are non-floating body devices. The pull-up transistors may be floating or non-floating body devices. Various specific implementations and methods of making the memory cell are also detailed.Type: GrantFiled: December 14, 2012Date of Patent: May 6, 2014Assignee: International Business Machines CorporationInventors: Josephine B. Chang, Leland Chang, Steven J. Koester, Jeffrey W. Sleight
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Patent number: 8716103Abstract: A semiconductor device having a core device with a high-k gate dielectric and an I/O device with a silicon dioxide or other non-high-k gate dielectric, and a method of fabricating such a device. A core well and an I/O well are created in a semiconductor substrate and separated by an isolation structure. An I/O device is formed over the I/O well and has a silicon dioxide or a low-k gate dielectric. A resistor may be formed on an isolation structure adjacent to the core well. A core-well device such as a transistor is formed over the core well, and has a high-k gate dielectric. In some embodiments, a p-type I/O well and an n-type I/O well are created. In a preferred embodiment, the I/O device or devices are formed prior to forming the core device and protected with a sacrificial layer until the core device is fabricated.Type: GrantFiled: May 10, 2013Date of Patent: May 6, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chung Long Cheng, Sheng-Chen Chung, Kong-Beng Thei, Harry-Hak-Lay Chuang, Mong-Song Liang
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Patent number: 8716752Abstract: A graded SiGe sacrificial layer is epitaxially grown overlying a silicon substrate. A single crystal silicon layer is then grown by an epitaxial process overlying the graded SiGe layer. A SiGe layer is next grown by an epitaxial process as a single crystal layer overlying the silicon layer. A subsequent silicon layer, which becomes the active silicon layer for the transistors, is epitaxially grown overlying the second silicon germanium layer. Together the epitaxially grown Si, SiGe and Si layers form a laminate semiconductor structure. A MOS transistor is then formed on the active area of the single crystal silicon. The graded SiGe sacrificial layer is removed by an etch process to electrically isolate the laminate semiconductor structure from the substrate.Type: GrantFiled: December 1, 2010Date of Patent: May 6, 2014Assignee: STMicroelectronics, Inc.Inventor: Barry Dove
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Patent number: 8703553Abstract: Methods for capacitor fabrication include doping a capacitor region of a semiconductor layer in a semiconductor-on-insulator substrate; partially etching the semiconductor layer to produce a first terminal layer comprising doped semiconductor fins on a remaining base of doped semiconductor; forming a dielectric layer over the first terminal layer; and forming a second terminal layer over the dielectric layer in a finFET process.Type: GrantFiled: May 15, 2012Date of Patent: April 22, 2014Assignee: International Business Machines CorporationInventors: Kangguo Cheng, Balasubramanian S. Haran, Shom Ponoth, Theodorus E. Standaert, Tenko Yamashita
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Patent number: 8704305Abstract: A thin film transistor of the present invention comprises, an active layer formed on an insulating substrate and having a channel region and source/drain regions; a gate electrode formed corresponding to the channel region of the active region; a body contact region separately formed with the source/drain regions in the active layer; source/drain electrodes each connected to the source/drain regions; and a conductive wiring for connecting the body contact region and the gate electrode.Type: GrantFiled: October 8, 2004Date of Patent: April 22, 2014Assignee: Samsung Display Co., Ltd.Inventors: Jae-Bon Koo, Byoung-Deog Choi, Myeong-Seob So, Won-Sik Kim
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Patent number: 8698156Abstract: It is an object of the invention to improve the production efficiency in sealing a thin film integrated circuit and to prevent the damage and break. Further, it is another object of the invention to prevent a thin film integrated circuit from being damaged in shipment and to make it easier to handle the thin film integrated circuit. The invention provides a laminating system in which rollers are used for supplying a substrate for sealing, receiving IC chips, separating, and sealing. The separation, sealing, and reception of a plurality of thin film integrated circuits can be carried out continuously by rotating the rollers; thus, the production efficiency can be extremely improved. Further, the thin film integrated circuits can be easily sealed since a pair of rollers opposite to each other is used.Type: GrantFiled: March 13, 2009Date of Patent: April 15, 2014Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Ryosuke Watanabe, Hidekazu Takahashi, Takuya Tsurume
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Patent number: 8698242Abstract: A LDMOS transistor is implemented in a first impurity region on a substrate. The LDMOS transistor has a source that includes a second impurity region. The second impurity region is implanted into the surface of the substrate within the first impurity region. Additionally, the LDMOS transistor has a drain that includes a third impurity region. The third impurity region is implanted into the surface of the substrate within the first impurity region. The third impurity region is spaced a predetermined distance away from a gate of the LDMOS transistor. The drain of the LDMOS transistor further includes a fourth impurity region within the third impurity region. The fourth impurity region provides an ohmic contact for the drain.Type: GrantFiled: January 14, 2013Date of Patent: April 15, 2014Assignee: Volterra Semiconductor CorporationInventors: Budong You, Marco A. Zuniga
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Patent number: 8697522Abstract: A fin Field Effect Transistor (finFET), an array of finFETs, and methods of production thereof. The finFETs are provided on an insulating region, which may optionally contain dopants. Further, the finFETs are optionally capped with a pad. The finFETs provided in an array are of uniform height.Type: GrantFiled: July 5, 2011Date of Patent: April 15, 2014Assignee: International Business Machines CorporationInventors: Kangguo Cheng, Bruce B. Doris
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Patent number: 8692317Abstract: An SRAM cell using a vertical MISFET is provided, wherein underside source/drain areas of a first access transistor, a first driving transistor and a first load transistor are connected together, and further connected to gates of a second driving transistor and a second load transistor. Underside source/drain areas of a second access transistor, the second driving transistor and the second load transistor are connected together, and further connected to gates of the first driving transistor and the first load transistor. A first arrangement of the first access transistor, the first driving transistor and the first load transistor, and a second arrangement of the second access transistor, the second driving transistor and the second load transistor are symmetric to each other.Type: GrantFiled: April 14, 2009Date of Patent: April 8, 2014Assignee: NEC CorporationInventor: Kiyoshi Takeuchi
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Patent number: 8680618Abstract: An integrated circuit having a replacement HiK metal gate transistor and a front end SiCr resistor. The SiCr resistor replaces the conventional polysilicon resistor in front end processing and is integrated into the contact module. The first level of metal interconnect is located above the SiCr resistor. First contacts connect to source/drain regions. Second contacts electrically connect the first level of interconnect to either the SiCr resistor or the metal replacement gate.Type: GrantFiled: October 17, 2012Date of Patent: March 25, 2014Assignee: Texas Instruments IncorporatedInventor: Ebenezer Eshun
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Patent number: 8673699Abstract: A method of forming a semiconductor structure which includes an extremely thin silicon-on-insulator (ETSOI) semiconductor structure having a PFET portion and an NFET portion, a gate structure in the PFET portion and the NFET portion, a high quality nitride spacer adjacent to the gate structures in the PFET portion and the NFET portion and a doped faceted epitaxial silicon germanium raised source/drain (RSD) in the PFET portion. An amorphous silicon layer is formed on the RSD in the PFET portion. A faceted epitaxial silicon RSD is formed on the ETSOI adjacent to the high quality nitride in the NFET portion. The amorphous layer in the PFET portion prevents epitaxial growth in the PFET portion during formation of the RSD in the NFET portion. Extensions are ion implanted into the ETSOI underneath the gate structure in the NFET portion.Type: GrantFiled: July 17, 2012Date of Patent: March 18, 2014Assignee: International Business Machines CorporationInventors: Thomas N. Adam, Kangguo Cheng, Bruce B. Doris, Bala S. Haran, Pranita Kulkarni, Amlan Majumdar, Stefan Schmitz
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Patent number: 8674371Abstract: The protective circuit is formed using a non-linear element which includes a gate insulating film covering a gate electrode; a first wiring layer and a second wiring layer which are over the gate insulating film and whose end portions overlap with the gate electrode; and an oxide semiconductor layer which is over the gate electrode and in contact with the gate insulating film and the end portions of the first wiring layer and the second wiring layer. The gate electrode of the non-linear element and a scan line or a signal line is included in a wiring, the first or second wiring layer of the non-linear element is directly connected to the wiring so as to apply the potential of the gate electrode.Type: GrantFiled: December 6, 2012Date of Patent: March 18, 2014Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Kengo Akimoto, Shigeki Komori, Hideki Uochi, Tomoya Futamura, Takahiro Kasahara
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Patent number: 8674468Abstract: A method of fabricating an imaging array includes providing a single crystal silicon substrate and bonding the single crystal silicon substrate to an insulating substrate. One or more portions of an exposed surface of the single-crystal silicon substrate are removed to form a pattern of first areas having a first height measured from the insulating substrate and second areas having a second height measured from the insulating substrate. Photosensitive elements are formed on the first areas and readout elements are formed on the second areas. The single-crystal silicon substrate is treated by hydrogen implantation to form an internal separation boundary and a portion of the single-crystal silicon substrate is removed at the internal separation boundary to form the exposed surface.Type: GrantFiled: May 29, 2009Date of Patent: March 18, 2014Assignee: Carestream Health, Inc.Inventors: Timothy J. Tredwell, Jackson Lai
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Patent number: 8673704Abstract: A FinFET and a method for manufacturing the same are disclosed. The FinFET comprises an etching stop layer on a semiconductor substrate; a semiconductor fin on the etching stop layer; a gate conductor extending in a direction perpendicular to a length direction of the semiconductor fin and covering at least two side surfaces of the semiconductor fin; a gate dielectric layer between the gate conductor and the semiconductor fin; a source region and a drain region which are provided at two ends of the semiconductor fin respectively; and an interlayer insulating layer adjoining the etching stop layer below the gate dielectric layer, and separating the gate conductor from the etching stop layer and the semiconductor fin. A height of the fin of the FinFET is approximately equal to a thickness of a semiconductor layer for forming the semiconductor fin.Type: GrantFiled: May 14, 2012Date of Patent: March 18, 2014Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventors: Huilong Zhu, Wei He, Qingqing Liang, Haizhou Yin, Zhijiong Luo
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Patent number: 8664660Abstract: A p channel IFT of a driving circuit has a single drain structure and its n channel TFT, a GOLD structure or an LDD structure. A pixel TFT has the LDD structure. A pixel electrode disposed in a pixel portion is connected to the pixel TFT through a hole bored in at least a protective insulation film formed of an inorganic insulating material and formed above a gate electrode of the pixel TFT, and in an interlayer insulating film disposed on the insulation film in close contact therewith. These process steps use 6 to 8 photo-masks.Type: GrantFiled: July 23, 2012Date of Patent: March 4, 2014Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Yasuyuki Arai, Jun Koyama
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Patent number: 8664741Abstract: Provided is a high voltage semiconductor device that includes a PIN diode structure formed in a substrate. The PIN diode includes an intrinsic region located between a first doped well and a second doped well. The first and second doped wells have opposite doping polarities and greater doping concentration levels than the intrinsic region. The semiconductor device includes an insulating structure formed over a portion of the first doped well. The semiconductor device includes an elongate resistor device formed over the insulating structure. The resistor device has first and second portions disposed at opposite ends of the resistor device, respectively. The semiconductor device includes an interconnect structure formed over the resistor device. The interconnect structure includes: a first contact that is electrically coupled to the first doped well and a second contact that is electrically coupled to a third portion of the resistor located between the first and second portions.Type: GrantFiled: June 14, 2011Date of Patent: March 4, 2014Assignee: Taiwan Semiconductor Manufacturing Company Ltd.Inventors: Ru-Yi Su, Fu-Chih Yang, Chun Lin Tsai, Chih-Chang Cheng, Ruey-Hsin Liu
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Patent number: 8659068Abstract: A DRAM memory structure at least includes a strip semiconductive material disposed on a substrate and extending along a first direction, a split gate disposed on the substrate and extending along a second direction, a dielectric layer at least sandwiched between the split gate and the substrate, a gate dielectric layer at least sandwiched between the split gate and the strip semiconductive material, and a capacitor unit. The split gate independently includes a first block and a second block to divide the strip semiconductive material into a source terminal, a drain terminal and a channel. The capacitor unit is electrically connected to the source terminal.Type: GrantFiled: October 4, 2012Date of Patent: February 25, 2014Assignee: Etron Technology, Inc.Inventor: Ming-Hong Kuo
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Patent number: 8653522Abstract: There is provided an electric device which can prevent a deterioration in a frequency characteristic due to a large electric power external switch connected to an opposite electrode and can prevent a decrease in the number of gradations. The electric device includes a plurality of source signal lines, a plurality of gate signal lines, a plurality of power source supply lines, a plurality of power source control lines, and a plurality of pixels. Each of the plurality of pixels includes a switching TFT, an EL driving TFT, a power source controlling TFT, and an EL element, and the power source controlling TFT controls a potential difference between a cathode and an anode of the EL element.Type: GrantFiled: September 9, 2011Date of Patent: February 18, 2014Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Jun Koyama
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Patent number: 8653598Abstract: An electrical switch using a gated resistor structure includes an isolation layer, a doped silicon layer arranged on the isolation layer and having a recessed portion with reduced thickness, the doped silicon layer having a predetermined doping type and a predetermined doping profile; a gate layer arranged corresponding to the recessed portion. The recessed portion in the doped silicon layer has such thickness that a channel defined under the gate can be fully depleted to form a high resistivity region. The recessed channel gated resistor structure can be advantageously used to achieve high interconnect density with low thermal budget for 3D integration.Type: GrantFiled: September 6, 2011Date of Patent: February 18, 2014Inventor: Shu-Lu Chen
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Patent number: 8648418Abstract: Controlled localized defect paths for resistive memories are described, including a method for forming controlled localized defect paths including forming a first electrode forming a metal oxide layer on the first electrode, masking the metal oxide to create exposed regions and concealed regions of a surface of the metal oxide, and altering the exposed regions of the metal oxide to create localized defect paths beneath the exposed regions.Type: GrantFiled: March 15, 2013Date of Patent: February 11, 2014Assignee: Intermolecular, Inc.Inventors: Michael Miller, Tony P. Chiang, Prashant B. Phatak
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Patent number: 8648345Abstract: There is provided an electronic device having high reliability and high color reproducibility. A pixel structure is made such that a switching FET (201) and an electric current controlling FET (202) are formed on a single crystal semiconductor substrate (11), and an EL element (203) is electrically connected to the electric current controlling FET (202). The fluctuation in characteristics of the electric current controlling FET (202) is very low among pixels, and an image with high color reproducibility can be obtained. By taking hot carrier measures in the electric current controlling FET (202), the electronic device having high reliability can be obtained.Type: GrantFiled: September 12, 2011Date of Patent: February 11, 2014Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Toshimitsu Konuma, Jun Koyama, Kazutaka Inukai, Mayumi Mizukami
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Patent number: 8643018Abstract: An object is to improve the aperture ratio of a semiconductor device. The semiconductor device includes a driver circuit portion and a display portion (also referred to as a pixel portion) over the same substrate. The driver circuit includes a channel-etched thin film transistor for driver circuit and a driver circuit wiring formed using metal. Source and drain electrodes of the thin film transistor for the driver circuit are formed using a metal. A channel layer of the thin film transistor for the driver circuit is formed using an oxide semiconductor. The display portion includes a bottom-contact thin film transistor for a pixel and a display portion wiring formed using an oxide conductor. Source and drain electrode layers of the thin film transistor for the pixel are formed using an oxide conductor. A semiconductor layer of the thin film transistor for the pixel is formed using an oxide semiconductor.Type: GrantFiled: September 14, 2012Date of Patent: February 4, 2014Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Junichiro Sakata, Hiroyuki Miyake, Hideaki Kuwabara, Hideki Uochi
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Patent number: 8643110Abstract: A silicon-on-insulator device has a localized biasing structure formed in the insulator layer of the SOI. The localized biasing structure includes a patterned conductor that provides a biasing signal to distinct regions of the silicon layer of the SOI. The conductor is recessed into the insulator layer to provide a substantially planar interface with the silicon layer. The conductor is connected to a bias voltage source. In an embodiment, a plurality of conductor is provided that respectively connected to a plurality of voltage sources. Thus, different regions of the silicon layer are biased by different bias signals.Type: GrantFiled: April 13, 2012Date of Patent: February 4, 2014Assignee: Micron Technology, Inc.Inventors: Fernando Gonzalez, John K. Zahurak
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Patent number: 8637936Abstract: A resistor is disclosed. The resistor is disposed on a substrate, in which the resistor includes: a dielectric layer disposed on the substrate; a polysilicon structure disposed on the dielectric layer; two primary resistance structures disposed on the dielectric layer and at two ends of the polysilicon structure; and a plurality of secondary resistance structures disposed on the dielectric layer and interlaced with the polysilicon structures.Type: GrantFiled: September 25, 2009Date of Patent: January 28, 2014Assignee: United Microelectronics Corp.Inventors: Kai-Ling Chiu, Victor-Chiang Liang, Chih-Yu Tseng, Kun-Szu Tseng, Cheng-Wen Fan, Hsin-Kai Chiang, Chih-Chen Hsueh
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Patent number: 8637931Abstract: A finFET device is provided. The finFET device includes a BOX layer, fin structures located over the BOX layer, a gate stack located over the fin structures, gate spacers located on vertical sidewalls of the gate stack, an epi layer covering the fin structures, source and drain regions located in the semiconductor layers of the fin structures, and silicide regions abutting the source and drain regions. The fin structures each comprise a semiconductor layer and extend in a first direction, and the gate stack extends in a second direction that is perpendicular. The gate stack comprises a high-K dielectric layer and a metal gate, and the epi layer merges the fin structures together. The silicide regions each include a vertical portion located on the vertical sidewall of the source or drain region.Type: GrantFiled: December 27, 2011Date of Patent: January 28, 2014Assignee: International Business Machines CorporationInventors: Veeraraghavan S. Basker, Andres Bryant, Huiming Bu, Wilfried Haensch, Effendi Leobandung, Chung-Hsun Lin, Theodorus E. Standaert, Tenko Yamashita, Chun-chen Yeh
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Publication number: 20140015053Abstract: Device structures, design structures, and fabrication methods for a metal-oxide-semiconductor field-effect transistor. A gate structure is formed on a top surface of a substrate. First and second trenches are formed in the substrate adjacent to a sidewall of the gate structure. The second trench is formed laterally between the first trench and the first sidewall. First and second epitaxial layers are respectively formed in the first and second trenches. A contact is formed to the first epitaxial layer, which serves as a drain. The second epitaxial layer in the second trench is not contacted so that the second epitaxial layer serves as a ballasting resistor.Type: ApplicationFiled: July 11, 2012Publication date: January 16, 2014Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: James P. Di Sarro, Robert J. Gauthier, JR., Junjun Li
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Patent number: 8629504Abstract: An electrical device is provided that in one embodiment includes a semiconductor-on-insulator (SOI) substrate having a semiconductor layer with a thickness of less than 10 nm. A semiconductor device having a raised source region and a raised drain region of a single crystal semiconductor material of a first conductivity is present on a first surface of the semiconductor layer. A resistor composed of the single crystal semiconductor material of the first conductivity is present on a second surface of the semiconductor layer. A method of forming the aforementioned electrical device is also provided.Type: GrantFiled: March 29, 2012Date of Patent: January 14, 2014Assignee: International Business Machines CorporationInventors: Bruce B. Doris, Kangguo Cheng, Ali Khakifirooz, Ghavam G. Shahidi
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Patent number: 8629009Abstract: A method of fabricating a memory device is provided that may begin with forming a layered gate stack atop a semiconductor substrate and patterning a metal electrode layer stopping on the high-k gate dielectric layer of the layered gate stack to provide a first metal gate electrode and a second metal gate electrode on the semiconductor substrate. In a next process sequence, at least one spacer is formed on the first metal gate electrode atop a portion of the high-k gate dielectric layer, wherein a remaining portion of the high-k gate dielectric is exposed. The remaining portion of the high-k gate dielectric layer is etched to provide a first high-k gate dielectric having a portion that extends beyond a sidewall of the first metal gate electrode and a second high-k gate dielectric having an edge that is aligned to a sidewall of the second metal gate electrode.Type: GrantFiled: March 29, 2012Date of Patent: January 14, 2014Assignee: International Business Machines CorporationInventors: Roger A. Booth, Jr., Kangguo Cheng, Chandrasekharan Kothandaraman, Chengwen Pei
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Patent number: 8624321Abstract: A thin film transistor is provided, which includes a gate insulating layer covering a gate electrode, a microcrystalline semiconductor layer provided over the gate insulating layer, an amorphous semiconductor layer overlapping the microcrystalline semiconductor layer and the gate insulating layer, and a pair of impurity semiconductor layers which are provided over the amorphous semiconductor layer and to which an impurity element imparting one conductivity type is added to form a source region and a drain region. The gate insulating layer has a step adjacent to a portion in contact with an end portion of the microcrystalline semiconductor layer. A second thickness of the gate insulating layer in a portion outside the microcrystalline semiconductor layer is smaller than a first thickness thereof in a portion in contact with the microcrystalline semiconductor layer.Type: GrantFiled: March 5, 2009Date of Patent: January 7, 2014Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Yoshiyuki Kurokawa, Hiromichi Godo, Hidekazu Miyairi
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Patent number: 8624252Abstract: The invention provides a manufacturing method of a substrate having a film pattern including an insulating film, a semiconductor film, a conductive film and the like by simple steps, and also a manufacturing method of a semiconductor device which is low in cost with high throughput and yield. According to the invention, after forming a first protective film which has low wettability on a substrate, a material which has high wettability is applied or discharged on an outer edge of a first mask pattern, thereby a film pattern and a substrate having the film pattern are formed.Type: GrantFiled: September 12, 2012Date of Patent: January 7, 2014Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shinji Maekawa, Gen Fujii, Hiroko Shiroguchi, Masafumi Morisue
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Patent number: 8624318Abstract: A semiconductor circuit includes a plurality of semiconductor devices, each including a semiconductor islands having at least one electrical dopant atom and located on an insulator layer. Each semiconductor island is encapsulated by dielectric materials including at least one dielectric material portion. Conductive material portions, at least one of which abut two dielectric material portions that abut two distinct semiconductor islands, are located directly on the at least one dielectric material layer. At least one gate conductor is provided which overlies at least two semiconductor islands. Conduction across a dielectric material portion between a semiconductor island and a conductive material portion is effected by quantum tunneling. The conductive material portions and the at least one gate conductor are employed to form a semiconductor circuit having a low leakage current. A design structure for the semiconductor circuit is also provided.Type: GrantFiled: April 26, 2012Date of Patent: January 7, 2014Assignee: International Business Machines CorporationInventors: Zhong-Xiang He, Qizhi Liu
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Patent number: 8614462Abstract: A method of fabricating an array substrate for an organic electroluminescent device includes forming a semiconductor layer of polysilicon in an element region, and a semiconductor pattern of polysilicon in a storage region on a substrate; forming a multiple-layered gate electrode corresponding to a center portion of the semiconductor layer and a first storage electrode corresponding to the semiconductor pattern; performing an impurity-doping to make a portion of the semiconductor layer not covered by the gate electrode into an ohmic contact layer and make the semiconductor pattern into a second storage electrode; forming source and drain electrodes and a third storage electrode corresponding to the first storage electrode; forming a first electrode contacting the drain electrode and a fourth storage electrode corresponding to the third storage electrode.Type: GrantFiled: October 31, 2011Date of Patent: December 24, 2013Assignee: LG Display Co., Ltd.Inventors: Hee-Dong Choi, Ki-Sul Cho, Seong-Moh Seo
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Publication number: 20130334604Abstract: When forming sophisticated SOI devices, a substrate diode and a film diode are formed by using one and the same implantation mask for determining the well dopant concentration in the corresponding well regions. Consequently, during the further processing, the well dopant concentration of any transistor elements may be achieved independently from the well regions of the diode in the semiconductor layer.Type: ApplicationFiled: August 16, 2013Publication date: December 19, 2013Applicant: GLOBAL FOUNDRIES Inc.Inventors: Thilo Scheiper, Stefan Flachowsky
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Patent number: 8610213Abstract: A semiconductor device capable of ensuring a withstand voltage of a transistor and reducing a forward voltage of a Schottky barrier diode in a package with the transistor and the Schottky barrier diode formed on chip, and a semiconductor package formed by a resin package covering the semiconductor device are provided. The semiconductor device 1 includes a semiconductor layer 22, a transistor area D formed on the semiconductor layer 22 and constituting the transistor 11, and a diode area C formed on the semiconductor layer 22 and constituting the Schottky barrier diode 10. The semiconductor layer 22 in the diode area C is thinner than the semiconductor layer 22 in the transistor area D.Type: GrantFiled: December 9, 2011Date of Patent: December 17, 2013Assignee: Rohm Co., Ltd.Inventor: Yoshimochi Kenichi
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Patent number: 8604547Abstract: It is an object of the present invention to provide a nonvolatile memory device, in which additional writing is possible other than in manufacturing and forgery and the like due to rewriting can be prevented, and a semiconductor device having the memory device. It is another object of the present invention to provide an inexpensive and nonvolatile memory device with high reliability and a semiconductor device. According to one feature of the present invention, a memory device includes a first conductive layer formed over an insulating surface, a second conductive layer, a first insulating layer interposed between the first conductive layer and the second conductive layer, and a second insulating layer which covers a part of the first conductive layer, wherein the first insulating layer covers an edge portion of the first conductive layer, the insulating surface, and the second insulating layer.Type: GrantFiled: February 7, 2006Date of Patent: December 10, 2013Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Mikio Yukawa, Tamae Takano, Yoshinobu Asami, Shunpei Yamazaki, Takehisa Sato
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Patent number: 8598006Abstract: An embedded epitaxial semiconductor portion having a different composition than matrix of the semiconductor substrate is formed with a lattice mismatch and epitaxial alignment with the matrix of the semiconductor substrate. The temperature of subsequent ion implantation steps is manipulated depending on the amorphizing or non-amorphizing nature of the ion implantation process. For a non-amorphizing ion implantation process, the ion implantation processing step is performed at an elevated temperature, i.e., a temperature greater than nominal room temperature range. For an amorphizing ion implantation process, the ion implantation processing step is performed at nominal room temperature range or a temperature lower than nominal room temperature range. By manipulating the temperature of ion implantation, the loss of strain in a strained semiconductor alloy material is minimized.Type: GrantFiled: March 16, 2010Date of Patent: December 3, 2013Assignees: International Business Machines Corporation, Toshiba America Electronic Components, Inc.Inventors: Joel P. de Souza, Masafumi Hamaguchi, Ahmet S. Ozcan, Devendra K. Sadana, Katherine L. Saenger, Donald R. Wall