Insulated Electrode Device Is Combined With Diverse Type Device (e.g., Complementary Mosfets, Fet With Resistor, Etc.) Patents (Class 257/350)
-
Patent number: 9166041Abstract: In an SOI substrate having a semiconductor layer formed on the semiconductor substrate via an insulating layer, a MISFET is formed in each of the semiconductor layer in an nMIS formation region and a pMIS formation region. In power feeding regions, the semiconductor layer and the insulating layer are removed. In the semiconductor substrate, a p-type semiconductor region is formed so as to include the nMIS formation region and one of the power feeding regions, and an n-type semiconductor region is formed so as to include a pMIS formation region and the other one of the power feeding regions. In the semiconductor substrate, a p-type well having lower impurity concentration than the p-type semiconductor region is formed so as to contain the p-type semiconductor region, and an n-type well having lower impurity concentration than the n-type semiconductor region is formed so as to contain the n-type semiconductor region.Type: GrantFiled: August 14, 2014Date of Patent: October 20, 2015Assignee: RENESAS ELECTRONICS CORPORATIONInventors: Hirofumi Shinohara, Hidekazu Oda, Toshiaki Iwamatsu
-
Patent number: 9165927Abstract: In a semiconductor device, each of a first connection metal member, a second connection metal member, a third connection metal member, and a fourth connection metal member electrically connects a corresponding line to a corresponding one of main electrodes formed on lower surfaces and upper surfaces of first and second semiconductor elements. A cross-sectional area of each of the first connection metal member, the second connection metal member, the third connection metal member, and the fourth connection metal member is larger than a cross-sectional area of a fifth connection metal member that is disposed at a region located outside regions of the first and second semiconductor elements in a plan view.Type: GrantFiled: July 3, 2014Date of Patent: October 20, 2015Assignees: JTEKT Corporation, Denso CorporationInventors: Shigeki Nagase, Kazuo Tada
-
Patent number: 9159723Abstract: A novel method for manufacturing a semiconductor device and a semiconductor device are provided. The semiconductor device includes a substrate, a trench capacitor, a contact pad, an inter-layer dielectric (ILD) layer and contact elements. The trench capacitor includes a doped region, a first dielectric layer, a bottom electrode, a second dielectric layer and a top electrode, in which the contact pad is positioned on the doped region. The ILD layer has contact windows, and the contact elements are disposed therein. Because of the presence of the contact pad positioned on the doped region, the thickness of the ILD layer over the top electrode is increased but still satisfying the requirement of the maximum depth limit to the contact windows of etching the ILD layer.Type: GrantFiled: September 16, 2013Date of Patent: October 13, 2015Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chung-Yen Chou, Po-Ken Lin, Chia-Shiung Tsai, Xiao-Meng Chen
-
Patent number: 9153638Abstract: A semiconductor device may include a through substrate via (TSV) conductive structure that may extend vertically through two or more layers of the semiconductor device. The TSV conductive structure may be coupled to a first voltage supply. The semiconductor device may include substrate layer. The substrate layer may include a first dopant region and a second dopant region. The first dopant region may be coupled to a second voltage supply. The second dopant region may be in electrical communication with the TSV conductive structure. The semiconductor device may include a first metal layer and a first insulator layer disposed between the substrate layer and the first metal layer. The first metal layer may laterally contact the TSV conductive structure. The first and second voltage supply may be adapted to create a capacitance at a junction between the first dopant region and the second dopant region.Type: GrantFiled: February 11, 2013Date of Patent: October 6, 2015Assignee: International Business Machines CorporationInventors: Derick G. Behrends, Todd A. Christensen, Travis R. Hebig, Michael Launsbach, John E. Sheets, II
-
Patent number: 9129985Abstract: A manufacturing method of semiconductor devices having metal gate includes following steps. A substrate having a first semiconductor device and a second semiconductor device formed thereon is provided. The first semiconductor device includes a first gate trench and the second semiconductor device includes a second gate trench. A first work function metal layer is formed in the first gate trench and the second gate trench. A portion of the first work function metal layer is removed from the second gate trench. A second work function metal layer is formed in the first gate trench and the second gate trench. The second work function metal layer and the first work function metal layer include the same metal material. A third work function metal layer and a gap-filling metal layer are sequentially formed in the first gate trench and the second gate trench.Type: GrantFiled: March 5, 2013Date of Patent: September 8, 2015Assignee: UNITED MICROELECTRONICS CORP.Inventors: Po-Chao Tsao, Chien-Ting Lin, Chien-Ming Lai, Chi-Mao Hsu
-
Patent number: 9123817Abstract: Example embodiments disclose transistors and electronic devices including the transistors. A transistor may include a charge blocking layer between a gate insulating layer and a gate. An energy barrier between the gate insulating layer and the gate may be increased by the charge blocking layer. The transistor may be an oxide transistor including a channel layer formed of an oxide semiconductor.Type: GrantFiled: April 28, 2011Date of Patent: September 1, 2015Assignees: Samsung Electronics Co., Ltd., SNU R&DB FoundationInventors: Dae-woong Kwon, Jae-chul Park, Byung-gook Park, Sang-wan Kim, Jang-hyun Kim, Ji-soo Chang
-
Patent number: 9123813Abstract: A thin film transistor, an array substrate including the thin film transistor and a display device. The thin film transistor includes: a gate electrode (100), a gate insulating layer (200), an active layer (300) and a source/drain layer (400) that are successively stacked. The source/drain layer (400) comprises a source electrode (401) and a drain electrode (402) with a gap therebetween, and the active layer (300) forms a channel (301) in a region corresponding to the gap. The gate electrode (100) has a gate electrode protrusion (101) on at least one side of the channel (301) in its width direction; and the gate insulating layer (200) covers the gate electrode (100) and the gate electrode protrusion (101).Type: GrantFiled: February 27, 2013Date of Patent: September 1, 2015Assignees: BOE TECHNOLOGY GROUP CO., LTD., BEIJING BOE DISPLAY TECHNOLOGY CO., LTD.Inventor: Yu Ma
-
Patent number: 9117706Abstract: A pixel structure includes a flexible substrate, an active device, a conductive pattern, a first insulation layer, and a pixel electrode. The active device is disposed on the flexible substrate and includes a gate, a channel, a source, and a drain. The source and the drain are connected to the channel and are separated from each other. The channel and the gate are stacked in a thickness direction. The active device is disposed between the conductive pattern and the flexible substrate. The conductive pattern is electrically connected to the drain of the active device. The first insulation layer covers the conductive pattern and has first contact holes separated from one another, and the first contact holes expose the conductive pattern. The first insulation layer is disposed between the pixel electrode and the conductive pattern. The pixel electrode is electrically connected to the conductive pattern through the first contact holes.Type: GrantFiled: January 22, 2014Date of Patent: August 25, 2015Assignee: E Ink Holdings Inc.Inventors: Ming-Sheng Chiang, Huai-Cheng Lin, Chih-Cheng Wang
-
Patent number: 9111768Abstract: Semiconductor devices, methods of manufacture thereof, and methods of forming resistors are disclosed. In one embodiment, a method of manufacturing a semiconductor device includes forming a first insulating material over a workpiece, and forming a conductive chemical compound material over the first insulating material. The conductive chemical compound material is patterned to form a resistor. A second insulating material is formed over the resistor, and the second insulating material is patterned. The patterned second insulating material is filled with a conductive material to form a first contact coupled to a first end of the resistor and to form a second contact coupled to a second end of the resistor.Type: GrantFiled: September 15, 2014Date of Patent: August 18, 2015Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chia-Yu Lu, Shyue-Shyh Lin, Chin-Shan Hou, Kuo-Feng Yu, Tung-Heng Hsieh, Chih-Hung Wang, Jian-Hao Chen
-
Patent number: 9111919Abstract: A vertically oriented field effect device has a body and an enhance gate structure. The body includes a JFET (junction field effect transistor) region disposed between junction implants that extend into the body from a top surface of the body. The gate structure includes a supplemental gate dielectric, a primary gate dielectric, and a gate contact. The supplemental gate dielectric is formed over the top surface of the body above the JFET region, such that the supplemental dielectric is separated from the junction implants by a gap. The primary gate dielectric is formed over the supplemental gate dielectric, above the gap over the top surface of the body, and over at least a portion of the junction implants. The gate contact is formed over the primary gate dielectric.Type: GrantFiled: October 3, 2013Date of Patent: August 18, 2015Assignee: Cree, Inc.Inventors: Daniel Jenner Lichtenwalner, Anant Kumar Agarwal, Lin Cheng, Vipindas Pala, John Williams Palmour
-
Patent number: 9087810Abstract: A thin film transistor structure includes a substrate, a gate layer, a gate insulator layer, a first semiconductor island, a second semiconductor island and a source and drain layer. The gate layer is disposed on the substrate, and includes a first gate electrode and a second electrode electrically connected to the first gate electrode. The gate insulator layer is disposed on the substrate and covers the first and second gate electrodes. The first semiconductor island is disposed on the gate insulator layer and corresponding to the first gate electrode. The second semiconductor island is disposed on the gate insulator layer and corresponding to the second electrode. The source and drain layer is disposed on the gate insulator layer and next to the first semiconductor island and the second semiconductor island. A display device using the above thin film transistor structure is also provided.Type: GrantFiled: February 15, 2012Date of Patent: July 21, 2015Assignee: E INK HOLDINGS INC.Inventors: Chao-Jung Chen, I-Hsuan Chiang
-
Patent number: 9087476Abstract: A display system in which the luminance of light-emitting elements in a light-emitting device is adjusted based on information on an environment. A sensor obtains information on an environment as an electrical signal. A CPU converts, based on comparison data set in advance, the information signal into a correction signal for correcting the luminance of EL elements. Upon receiving this correction signal, a voltage changer applies a predetermined corrected potential to the EL elements. Thus, this display system enables control of the luminance of the EL elements.Type: GrantFiled: May 13, 2014Date of Patent: July 21, 2015Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Jun Koyama, Noriko Shibata
-
Patent number: 9076787Abstract: A semiconductor device with an n-type transistor and a p-type transistor having an active region is provided. The active region further includes two adjacent gate structures. A portion of a dielectric layer between the two adjacent gate structures is selectively removed to form a contact opening having a bottom and sidewalls over the active region. A bilayer liner is selectively provided within the contact opening in the n-type transistor and a monolayer liner is provided within the contact opening in the p-type transistor. The contact opening in the n-type transistor and p-type transistor is filled with contact material. The monolayer liner is treated to form a silicide lacking nickel in the p-type transistor.Type: GrantFiled: November 10, 2014Date of Patent: July 7, 2015Assignee: GLOBALFOUNDRIES INC.Inventor: Derya Deniz
-
Patent number: 9064743Abstract: Fabrication methods are disclosed that facilitate the production of electronic structures that are both flexible and stretchable to conform to non-planar (e.g. curved) surfaces without suffering functional damage due to excessive strain. Electronic structures including CMOS devices are provided that can be stretched or squeezed within acceptable limits without failing or breaking. The methods disclosed herein further facilitate the production of flexible, stretchable electronic structures having multiple levels of intra-chip connectors. Such connectors are formed through deposition and photolithographic patterning (back end of the line processing) and can be released following transfer of the electronic structures to flexible substrates.Type: GrantFiled: November 30, 2014Date of Patent: June 23, 2015Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Stephen W. Bedell, Wilfried E. Haensch, Bahman Hekmatshoartabari, Ghavam G. Shahidi, Davood Shahrjerdi
-
Publication number: 20150145047Abstract: A method and circuit for implementing an enhanced transistor topology with a buried field effect transistor (FET) utilizing the drain of a FinFET as the gate of the new buried FET and a design structure on which the subject circuit resides are provided. A drain area of the fin area of a FinFET over a buried dielectric layer provides both the drain of the FinFET as well as the gate node of a second field effect transistor. This second field effect transistor is buried in the carrier semiconductor substrate under the buried dielectric layer.Type: ApplicationFiled: November 27, 2013Publication date: May 28, 2015Applicant: International Business Machines CorporationInventors: Karl R. Erickson, Phil C. Paone, David P. Paulsen, John E. Sheets, II, Gregory J. Uhlmann, Kelly L. Williams
-
Publication number: 20150137246Abstract: Embodiments of systems, methods, and apparatus for improving ESD performance and switching time for semiconductor devices including metal-oxide-semiconductor (MOS) field effect transistors (FETs), and particularly to MOSFETs fabricated on Semiconductor-On-Insulator (“SOT”) and Silicon-On-Sapphire (“SOS”) substrates.Type: ApplicationFiled: October 22, 2014Publication date: May 21, 2015Inventors: Eric S. Shapiro, Matt Allison
-
Patent number: 9035384Abstract: A semiconductor device includes a first fin-shaped silicon layer on a substrate and a second fin-shaped silicon layer on the substrate, each corresponding to the dimensions of a sidewall pattern around a dummy pattern. A silicide in upper portions of n-type and p-type diffusion layers in the upper portions of the first and second fin-shaped silicon layers. A metal gate line is connected to first and second metal gate electrodes and extends in a direction perpendicular to the first fin-shaped silicon layer and the second fin-shaped silicon layer. A first contact is in direct contact with the n-type diffusion layer in the upper portion of the first pillar-shaped silicon layer, and a second contact is in direct contact with the p-type diffusion layer in the upper portion of the second pillar-shaped silicon layer.Type: GrantFiled: May 29, 2014Date of Patent: May 19, 2015Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.Inventors: Fujio Masuoka, Hiroki Nakamura
-
Patent number: 9035316Abstract: A multi-layered gate electrode of a crystalline TFT is constructed as a clad structure formed by deposition of a first gate electrode, a second gate electrode and a third gate electrode, to thereby to enhance the thermal resistance of the gate electrode. Additionally, an n-channel TFT is formed by selective doping to form a low-concentration impunty region which adjoins a channel forming region, and a sub-region overlapped by the gate electrode and a sub-region not overlapped by the gate electrode, to also mitigate a high electric field near the drain of the TFT and to simultaneously prevent the OFF current of the TFT from increasing.Type: GrantFiled: January 23, 2013Date of Patent: May 19, 2015Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Shunpei Yamazaki
-
Patent number: 9035385Abstract: A thin-film semiconductor device having two thin-film transistors, wherein each of the two thin-film transistors includes: a gate electrode; a gate insulating film; a semiconductor layer; a channel protection layer; an intrinsic semiconductor layer; a contact layer in contact with a portion of sides of the channel region; a source electrode on the contact layer; and a drain electrode opposite to the source electrode on the contact layer, wherein the contact layer of one of the two thin-film transistors has a conductivity type different from a conductivity type of the contact layer of the other of the two thin-film transistors.Type: GrantFiled: December 28, 2012Date of Patent: May 19, 2015Assignee: JOLED INC.Inventors: Arinobu Kanegae, Kenichirou Nishida
-
Publication number: 20150129968Abstract: A multilayer semiconductor device structure having different circuit functions on different semiconductor device layers is provided. The semiconductor structure comprises a first semiconductor device layer fabricated on a bulk substrate. The first semiconductor device layer comprises a first semiconductor device for performing a first circuit function. The first semiconductor device layer includes a patterned top surface of different materials. The semiconductor structure further comprises a second semiconductor device layer fabricated on a semiconductor-on-insulator (“SOI”) substrate. The second semiconductor device layer comprises a second semiconductor device for performing a second circuit function. The second circuit function is different from the first circuit function. A bonding surface coupled between the patterned top surface of the first semiconductor device layer and a bottom surface of the SOI substrate is included.Type: ApplicationFiled: November 13, 2013Publication date: May 14, 2015Applicant: Taiwan Semiconductor Manufacturing Company LimitedInventors: YI-TANG LIN, CHUN-HSIUNG TSAI, Clement HSINGJEN WANN
-
Publication number: 20150129967Abstract: Circuit module designs that incorporate dual gate field effect transistors are implemented with fully depleted silicon-on-insulator (FD-SOI) technology. Lowering the threshold voltages of the transistors can be accomplished through dynamic secondary gate control in which a back-biasing technique is used to operate the dual gate FD-SOI transistors with enhanced switching performance. Consequently, such transistors can operate at very low core voltage supply levels, down to as low as about 0.4 V, which allows the transistors to respond quickly and to switch at higher speeds. Performance improvements are shown in circuit simulations of an inverter, an amplifier, a level shifter, and a voltage detection circuit module.Type: ApplicationFiled: March 31, 2014Publication date: May 14, 2015Applicant: STMicroelectronics International N.V.Inventors: Anand Kumar, Ankit Agrawal
-
Patent number: 9029950Abstract: A semiconductor structure and a method for forming the same are provided. The semiconductor structure comprises a substrate, a first source/drain region, a second source/drain region, a first stack structure and a second stack structure. The first source/drain region is formed in the substrate. The second source/drain region is formed in the substrate. The first stack structure is on the substrate between the first source/drain region and the second source/drain region. The first stack structure comprises a first dielectric layer and a first conductive layer on the first dielectric layer. The second stack structure is on the first stack structure. The second stack structure comprises a second dielectric layer and a second conductive layer on the second dielectric layer.Type: GrantFiled: March 20, 2012Date of Patent: May 12, 2015Assignee: Macronix International Co., Ltd.Inventors: Chien-Wen Chu, Wing-Chor Chan, Shyi-Yuan Wu
-
Patent number: 9029951Abstract: A semiconductor device with an SRAM memory cell having improved characteristics. Below an active region in which a driver transistor including a SRAM is placed, an n type back gate region surrounded by an element isolation region is provided via an insulating layer. It is coupled to the gate electrode of the driver transistor. A p well region is provided below the n type back gate region and at least partially extends to a position deeper than the element isolation region. It is fixed at a grounding potential. Such a configuration makes it possible to control the threshold potential of the transistor to be high when the transistor is ON and to be low when the transistor is OFF; and control so as not to apply a forward bias to the PN junction between the p well region and the n type back gate region.Type: GrantFiled: July 22, 2012Date of Patent: May 12, 2015Assignee: Renesas Electronics CorporationInventors: Katsuyuki Horita, Toshiaki Iwamatsu, Hideki Makiyama
-
Publication number: 20150115365Abstract: Arbitrarily and continuously scalable on-currents can be provided for fin field effect transistors by providing two independent variables for physical dimensions for semiconductor fins that are employed for the fin field effect transistors. A recessed region is formed on a semiconductor layer over a buried insulator layer. A dielectric cap layer is formed over the semiconductor layer. Disposable mandrel structures are formed over the dielectric cap layer and spacer structures are formed around the disposable mandrel structures. Selected spacer structures can be structurally damaged during a masked ion implantation. An etch is employed to remove structurally damaged spacer structures at a greater etch rate than undamaged spacer structures. After removal of the disposable mandrel structures, the semiconductor layer is patterned into a plurality of semiconductor fins having different heights and/or different width. Fin field effect transistors having different widths and/or heights can be subsequently formed.Type: ApplicationFiled: January 5, 2015Publication date: April 30, 2015Inventors: Dechao Guo, Yang Liu, Chengwen Pei, Yue Tan
-
Patent number: 9012881Abstract: Resistive-switching memory elements having improved switching characteristics are described, including a memory element having a first electrode and a second electrode, a switching layer between the first electrode and the second electrode comprising hafnium oxide and having a first thickness, and a coupling layer between the switching layer and the second electrode, the coupling layer comprising a material including metal titanium and having a second thickness that is less than 25 percent of the first thickness.Type: GrantFiled: April 17, 2014Date of Patent: April 21, 2015Assignee: Intermolecular, Inc.Inventors: Ronald J. Kuse, Tony P. Chiang, Imran Hashim
-
Patent number: 9006024Abstract: In a semiconductor device in which transistors are formed in a plurality of layers to form a stack structure, a method for manufacturing the semiconductor device formed by controlling the threshold voltage of the transistors formed in the layers selectively is provided. Further, a method for manufacturing the semiconductor device by which oxygen supplying treatment is effectively performed is provided. First oxygen supplying treatment is performed on a first oxide semiconductor film including a first channel formation region of a transistor in the lower layer. Then, an interlayer insulating film including an opening which is formed so that the first channel formation region is exposed is formed over the first oxide semiconductor film and second oxygen supplying treatment is performed on a second oxide semiconductor film including a second channel formation region over the interlayer insulating film and the exposed first channel formation region.Type: GrantFiled: April 18, 2013Date of Patent: April 14, 2015Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Kengo Akimoto
-
Patent number: 9006054Abstract: A method to fabricate a diode device includes providing a fin structure formed in a SOI layer. The fin structure has a sacrificial gate structure disposed on the fin structure between a first end of the fin structure and a second end of the fin structure. The method further includes depositing first doped semiconductor material on the first and second ends of the fin structure, where the first doped semiconductor material on the first end of the fin structure has one of the same doping polarity or an opposite doping polarity as the first doped semiconductor material on the second end of the fin structure. The method further includes removing the sacrificial gate structure to form a gap between the deposited first doped semiconductor material; depositing a second doped semiconductor material within the gap and forming first and second electrical contacts conductively connected to the first doped semiconductor material.Type: GrantFiled: June 13, 2013Date of Patent: April 14, 2015Assignee: International Business Machines CorporationInventors: Kangguo Cheng, Bruce B. Doris, Ali Khakifirooz, Alexander Reznicek
-
Publication number: 20150097243Abstract: A semiconductor device comprises first and second gate stacks formed on a semiconductor-on-insulator (SOI) substrate. The SOI substrate includes a dielectric layer interposed between a bulk substrate layer and an active semiconductor layer. A first extension implant portion is disposed adjacent to the first gate stack and a second extension implant portion is disposed adjacent to the second gate stack. A halo implant extends continuously about the trench. A butting implant extends between the trench and the dielectric layer. An epitaxial layer is formed at the exposed region such that the butting implant is interposed between the epitaxial layer and the dielectric layer.Type: ApplicationFiled: October 7, 2013Publication date: April 9, 2015Applicant: International Business Machines CorporationInventors: Viorel Ontalus, Robert R. Robison, Xin Wang
-
Patent number: 9000444Abstract: A thin film transistor (TFT) array substrate is provided that includes a TFT on a substrate. The TFT can include an active layer, gate electrode, source electrode, drain electrode, first insulating layer between the active layer and the gate electrode, and second insulating layer between the gate electrode and the source and drain electrodes. A pixel electrode is disposed on the first and second insulating layers. A capacitor including a lower electrode is disposed on a same layer as the gate electrode and an upper electrode. A third insulating layer directly between the second insulating layer and the pixel electrode and between the lower electrode and the upper electrode. A fourth insulating layer covers the source electrode, the drain electrode, and the upper electrode, and exposes the pixel electrode and can further expose a pad electrode.Type: GrantFiled: December 12, 2011Date of Patent: April 7, 2015Assignee: Samsung Display Co., Ltd.Inventors: June-Woo Lee, Jae-Beom Choi, Kwan-Wook Jung, Jae-Hwan Oh, Seong-Hyun Jin, Kwang-Hae Kim, Jong-Hyun Choi
-
Patent number: 9000523Abstract: An organic light-emitting display device including a TFT comprising an active layer, a gate electrode comprising a lower gate electrode and an upper gate electrode, and source and drain electrodes insulated from the gate electrode and contacting the active layer; an organic light-emitting device electrically connected to the TFT and comprising a pixel electrode formed in the same layer as where the lower gate electrode is formed; and a pad electrode electrically coupled to the TFT or the organic light emitting device and comprising a first pad electrode formed in the same layer as in which the lower gate electrode is formed, a second pad electrode formed in the same layer as in which the upper gate electrode is formed, and a third pad electrode comprising a transparent conductive oxide, the first, second, and third pad electrodes being sequentially stacked.Type: GrantFiled: December 1, 2011Date of Patent: April 7, 2015Assignee: Samsung Display Co., Ltd.Inventors: Jong-Hyun Choi, Jae-Hwan Oh
-
Patent number: 9000491Abstract: Insulating layers can be formed over a semiconductor device region and etched in a manner that substantially reduces or prevents the amount of etching of the underlying channel region. A first insulating layer can be formed over a gate region and a semiconductor device region. A second insulating layer can be formed over the first insulating layer. A third insulating layer can be formed over the second insulating layer. A portion of the third insulating layer can be etched using a first etching process. A portion of the first and second insulating layers beneath the etched portion of the third insulating layer can be etched using at least a second etching process different from the first etching process.Type: GrantFiled: June 19, 2014Date of Patent: April 7, 2015Assignee: STMicroelectronics, Inc.Inventors: Nicolas Loubet, Qing Liu, Prasanna Khare
-
Patent number: 8999793Abstract: A Multi-Gate Field-Effect Transistor includes a fin-shaped structure, a gate structure, at least an epitaxial structure and a gradient cap layer. The fin-shaped structure is located on a substrate. The gate structure is disposed across a part of the fin-shaped structure and the substrate. The epitaxial structure is located on the fin-shaped structure beside the gate structure. The gradient cap layer is located on each of the epitaxial structures. The gradient cap layer is a compound semiconductor, and the concentration of one of the ingredients of the compound semiconductor has a gradient distribution decreasing from inner to outer. Moreover, the present invention also provides a Multi-Gate Field-Effect Transistor process forming said Multi-Gate Field-Effect Transistor.Type: GrantFiled: June 17, 2014Date of Patent: April 7, 2015Assignee: United Microelectronics Corp.Inventors: Chin-I Liao, Chia-Lin Hsu, Ming-Yen Li, Yung-Lun Hsieh, Chien-Hao Chen, Bo-Syuan Lee
-
Publication number: 20150091090Abstract: A semiconductor device structure and a method of fabricating a semiconductor device structure are provided. A first device layer is formed over a substrate, where an alignment structure is patterned in the first device layer. A dielectric layer is provided over the first device layer. The dielectric layer is patterned to include an opening over the alignment structure. A second device layer is formed over the dielectric layer. The second device layer is patterned using a mask layer, where the mask layer includes a structure that is aligned relative to the alignment structure. The alignment structure is visible via the opening during the patterning of the second device layer.Type: ApplicationFiled: October 2, 2013Publication date: April 2, 2015Applicant: Taiwan Semiconductor Manufacturing Company LimitedInventors: YASUTOSHI OKUNO, YI-TANG LIN
-
Patent number: 8994106Abstract: A transistor structure includes a p-type substrate, an n-well implanted in the substrate, a p-doped p-body implanted in the n-well, first and second transistors, an input line, and an output line. The first transistor includes a first gate, a first source, and a first drain, and the second transistor includes a second gate, a second source, and a second drain. The first source includes a first p+ region and a first n+ region, and the first drain includes a second n+ region. The second source includes a third n+ region and a second p+ region, and the second drain includes a third p+ region. The input line connects the first gate and the second gate, and the output line connects the second n+ region and the third p+ region.Type: GrantFiled: February 7, 2014Date of Patent: March 31, 2015Assignee: Volterra Semiconductor LLCInventors: Budong You, Marco A. Zuniga
-
Patent number: 8994711Abstract: An EL display having high operating performance and reliability is provided. LDD regions 15a through 15d of a switching TFT 201 formed in a pixel are formed such that they do not overlap gate electrodes 19a and 19b to provide a structure which is primarily intended for the reduction of an off-current. An LDD region 22 of a current control TFT 202 is formed such that it partially overlaps a gate electrode 35 to provide a structure which is primarily intended for the prevention of hot carrier injection and the reduction of an off-current. Appropriate TFT structures are thus provided depending on required functions to improve operational performance and reliability.Type: GrantFiled: November 29, 2010Date of Patent: March 31, 2015Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Yukio Yamauchi, Takeshi Fukunaga
-
Patent number: 8987083Abstract: In a non-planar based semiconductor process where the structure includes both N and P type raised structures (e.g., fins), and where a different type of epitaxy is to be grown on each of the N and P type raised structures, prior to the growing, a lithographic blocking material over one of the N and P type raised structure portions is selectively etched to expose and planarize a gate cap. After the first type of epitaxy is grown, the process is repeated for the other of the N and P type epitaxy.Type: GrantFiled: March 10, 2014Date of Patent: March 24, 2015Assignee: GLOBALFOUNDRIES Inc.Inventors: Zhenyu Hu, Zhao Lun, Xing Zhang
-
Patent number: 8987730Abstract: An object of one embodiment of the present invention is to provide a highly reliable semiconductor device by giving stable electric characteristics to a transistor including an oxide semiconductor film. The semiconductor device includes a gate electrode layer over a substrate, a gate insulating film over the gate electrode layer, an oxide semiconductor film over the gate insulating film, a drain electrode layer provided over the oxide semiconductor film to overlap with the gate electrode layer, and a source electrode layer provided to cover an outer edge portion of the oxide semiconductor film. The outer edge portion of the drain electrode layer is positioned on the inner side than the outer edge portion of the gate electrode layer.Type: GrantFiled: January 28, 2013Date of Patent: March 24, 2015Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Jun Koyama, Satoru Saito, Terumasa Ikeyama
-
Patent number: 8987141Abstract: A method can include: growing a Ge layer on a Si substrate; growing a low-temperature nucleation GaAs layer, a high-temperature GaAs layer, a semi-insulating InGaP layer and a GaAs cap layer sequentially on the Ge layer after a first annealing, forming a sample; polishing the sample's GaAs cap layer, and growing an nMOSFET structure after a second annealing on the sample; performing selective ICP etching on a surface of the nMOSFET structure to form a groove, and growing a SiO2 layer in the groove and the surface of the nMOSFET structure using PECVD; performing the ICP etching again to etch the SiO2 layer till the Ge layer, forming a trench; cleaning the sample and growing a Ge nucleation layer and a Ge top layer in the trench by UHVCVD; polishing the Ge top layer and removing a part of the SiO2 layer on the nMOSFET structure; performing a CMOS process.Type: GrantFiled: March 21, 2014Date of Patent: March 24, 2015Assignee: Institute of Semiconductors, Chinese Academy of SciencesInventors: Xuliang Zhou, Hongyan Yu, Shiyan Li, Jiaoqing Pan, Wei Wang
-
Patent number: 8987823Abstract: Methods and structures for forming a localized silicon-on-insulator (SOI) finFET are disclosed. Fins are formed on a bulk substrate. Nitride spacers protect the fin sidewalls. A shallow trench isolation region is deposited over the fins. An oxidation process causes oxygen to diffuse through the shallow trench isolation region and into the underlying silicon. The oxygen reacts with the silicon to form oxide, which provides electrical isolation for the fins. The shallow trench isolation region is in direct physical contact with the fins and/or the nitride spacers that are disposed on the fins. Structures comprising bulk-type fins, SOI-type fins, and planar regions are also disclosed.Type: GrantFiled: February 20, 2013Date of Patent: March 24, 2015Assignee: International Business Machines CorporationInventors: Kangguo Cheng, Ali Khakifirooz, Kern Rim, Ramachandra Divakaruni
-
Patent number: 8981481Abstract: High voltage three-dimensional devices having dielectric liners and methods of forming high voltage three-dimensional devices having dielectric liners are described. For example, a semiconductor structure includes a first fin active region and a second fin active region disposed above a substrate. A first gate structure is disposed above a top surface of, and along sidewalls of, the first fin active region. The first gate structure includes a first gate dielectric composed of a first dielectric layer disposed on the first fin active region, and a second, different, dielectric layer disposed on the first dielectric layer. The semiconductor structure also includes a second gate structure disposed above a top surface of, and along sidewalls of, the second fin active region. The second gate structure includes a second gate dielectric composed of the second dielectric layer disposed on the second fin active region.Type: GrantFiled: June 28, 2012Date of Patent: March 17, 2015Assignee: Intel CorporationInventors: Walid M. Hafez, Jeng-Ya D. Yeh, Curtis Tsai, Joodong Park, Chia-Hong Jan, Gopinath Bhimarasetti
-
Publication number: 20150069514Abstract: MMIC circuits with thin film transistors are provided without the need of grinding and etching of the substrate after the fabrication of active and passive components. Furthermore, technology for active devices based on non-toxic compound semiconductors is provided. The success in the MMIC methods and structures without substrate grinding/etching and the use of semiconductors without toxic elements for active components will reduce manufacturing time, decrease economic cost and environmental burden. MMIC structures are provided where the requirements for die or chip attachment, alignment and wire bonding are eliminated completely or minimized. This will increase the reproducibility and reduce the manufacturing time for the MMIC circuits and modules.Type: ApplicationFiled: September 9, 2013Publication date: March 12, 2015Inventors: Ishiang Shih, Cindy X. Qiu, Chunong Qiu, Yi-Chi Shih
-
Patent number: 8975699Abstract: Improvements are achieved in the characteristics of a semiconductor device including SRAM memory cells. Under an active region in which an access transistor forming an SRAM is disposed, a p-type semiconductor region is disposed via an insulating layer such that the bottom portion and side portions thereof come in contact with an n-type semiconductor region. Thus, the p-type semiconductor region is pn-isolated from the n-type semiconductor region, and the gate electrode of the access transistor is coupled to the p-type semiconductor region. The coupling is achieved by a shared plug which is an indiscrete conductive film extending from over the gate electrode of the access transistor to over the p-type semiconductor region. As a result, when the access transistor is in an ON state, a potential in the p-type semiconductor region serving as a back gate simultaneously increases to allow an increase in an ON current for the transistor.Type: GrantFiled: September 24, 2014Date of Patent: March 10, 2015Assignee: Renesas Electronics CorporationInventors: Toshiaki Iwamatsu, Katsuyuki Horita, Hideki Makiyama
-
Publication number: 20150054082Abstract: Diodes and resistors for integrated circuits are provided. Deep trenches (DTs) are integrated into the diodes and resistors for the purposes of thermal conduction. The deep trenches facilitate conduction of heat from a semiconductor-on-insulator substrate to a bulk substrate. Semiconductor fins may be formed to align with the deep trenches.Type: ApplicationFiled: October 31, 2014Publication date: February 26, 2015Applicant: Intemational Business Machines CorporationInventors: Kangguo Cheng, Balasubramanian Pranatharthi Haran, Junjun Li, Shom Ponoth, Theodorus Eduardus Standaert, Tenko Yamashita
-
Publication number: 20150054081Abstract: An electrical device is provided that includes a substrate having an upper semiconductor layer, a buried dielectric layer and a base semiconductor layer. At least one isolation region is present in the substrate that defines a semiconductor device region and a resistor device region. The semiconductor device region includes a semiconductor device having a back gate structure that is present in the base semiconductor layer. Electrical contact to the back gate structure is provided by doped epitaxial semiconductor pillars that extend through the buried dielectric layer. An epitaxial semiconductor resistor is present in the resistor device region. Undoped epitaxial semiconductor pillars extending from the epitaxial semiconductor resistor to the base semiconductor layer provide a pathway for heat generated by the epitaxial semiconductor resistor to be dissipated to the base semiconductor layer. The undoped and doped epitaxial semiconductor pillars are composed of the same epitaxial semiconductor material.Type: ApplicationFiled: October 29, 2014Publication date: February 26, 2015Inventors: Thomas N. Adam, Kangguo Cheng, Ali Khakifirooz, Alexander Reznicek
-
Patent number: 8963254Abstract: A method and structure comprise a field effect transistor structure that includes a first rectangular fin structure positioned on a substrate. The first rectangular fin structure has a bottom contacting the substrate, a top opposite the bottom, and sides between the top and the bottom. The structure additionally includes a second rectangular fin structure positioned on the substrate. Similarly, the second rectangular fin structure also has a bottom contacting the substrate, a top opposite the bottom, and sides between the top and the bottom. The sides of the second rectangular fin structure are parallel to the sides of the first rectangular fin structure. Further, a trench insulator is positioned on the substrate and is positioned between a side of the first rectangular fin structure and a side of the second rectangular fin structure.Type: GrantFiled: July 2, 2013Date of Patent: February 24, 2015Assignee: International Business Machines CorporationInventors: Brent A. Anderson, Edward J. Nowak, Jed H. Rankin
-
Patent number: 8957479Abstract: A method and structure comprise a field effect transistor structure that includes a first rectangular fin structure and a second rectangular fin structure, both positioned on a substrate. The sides of the second rectangular fin structure are parallel to the sides of the first rectangular fin structure. Further, a trench insulator is positioned on the substrate and positioned between a side of the first rectangular fin structure and a side of the second rectangular fin structure. A gate conductor is positioned on the trench insulator, positioned over the sides and the top of the first rectangular fin structure, and positioned over the sides and the top of the second rectangular fin structure. The gate conductor runs perpendicular to the sides of the first rectangular fin structure and the sides of the second rectangular fin structure. Also, a gate insulator is positioned between the gate conductor and the first rectangular fin structure and between the gate conductor and the second rectangular fin structure.Type: GrantFiled: July 2, 2013Date of Patent: February 17, 2015Assignee: International Business Machines CorporationInventors: Brent A. Anderson, Edward J. Nowak, Jed H. Rankin
-
Patent number: 8946821Abstract: SRAM integrated circuits are provided having pull up and pull down transistors of an SRAM cell fabricated in and on a silicon substrate. A layer of insulating material overlies the pull up and pull down transistors. Pass gate transistors of the SRAM cell are fabricated in a semiconducting layer overlying the layer of insulating material.Type: GrantFiled: January 11, 2012Date of Patent: February 3, 2015Assignee: Globalfoundries, Inc.Inventors: Matthias Goldbach, Peter Baars
-
Patent number: 8933455Abstract: To provide a liquid crystal display device having high quality display by obtaining a high aperture ratio while securing a sufficient storage capacitor (Cs), and at the same time, by dispersing a load (a pixel writing-in electric current) of a capacitor wiring in a timely manner to effectively reduce the load. A scanning line is formed on a different layer from a gate electrode and the capacitor wiring is arranged so as to be parallel with a signal line. Each pixel is connected to the individually independent capacitor wiring via a dielectric. Therefore, variations in the electric potential of the capacitor wiring caused by a writing-in electric current of a neighboring pixel can be avoided, whereby obtaining satisfactory display images.Type: GrantFiled: September 5, 2013Date of Patent: January 13, 2015Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Hiroshi Shibata, Atsuo Isobe
-
Patent number: 8928083Abstract: A method of fabricating an electronic device includes the following steps. A SOI wafer is provided having a SOI layer over a BOX. An oxide layer is formed over the SOI layer. At least one first set and at least one second set of fins are patterned in the SOI layer and the oxide layer. A conformal gate dielectric layer is selectively formed on a portion of each of the first set of fins that serves as a channel region of a transistor device. A first metal gate stack is formed on the conformal gate dielectric layer over the portion of each of the first set of fins that serves as the channel region of the transistor device. A second metal gate stack is formed on a portion of each of the second set of fins that serves as a channel region of a diode device.Type: GrantFiled: August 15, 2013Date of Patent: January 6, 2015Assignee: International Business Machines CorporationInventors: Josephine B. Chang, Isaac Lauer, Chung-Hsun Lin, Jeffrey W. Sleight
-
Patent number: 8921901Abstract: A stacked wafer structure includes a CIS wafer, an ISP wafer, a lamination layer, a through silicon via and a pixel device. The CIS wafer bonds to the ISP wafer through the lamination layer. The pixel device is disposed on the CIS wafer. The through silicon via penetrates either the CIS wafer or the ISP wafer to connect devices in CIS wafer to the devices in ISP wafer electrically.Type: GrantFiled: June 10, 2013Date of Patent: December 30, 2014Assignee: United Microelectronics Corp.Inventor: Ching-Hung Kao