Combined With Bipolar Transistor Patents (Class 257/370)
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Patent number: 9209095Abstract: In one aspect, a method of fabricating a bipolar transistor device on a wafer includes the following steps. Fin hardmasks are formed on the wafer. A dummy gate is formed on the wafer, over the fin hardmasks. The wafer is doped to form emitter and collector regions on both sides of the dummy gate. A dielectric filler layer is deposited onto the wafer and the dummy gate is removed selective to the dielectric filler layer so as to form a trench in the filler layer. Fins are patterned in the wafer using the fin hardmasks exposed within the trench, wherein the fins will serve as a base region of the bipolar transistor device. The fins are recessed in the base region. The base region is re-grown from an epitaxial SiGe, Ge or III-V semiconductor material. A contact is formed to the base region.Type: GrantFiled: April 4, 2014Date of Patent: December 8, 2015Assignee: International Business Machines CorporationInventors: Josephine B. Chang, Gen P. Lauer, Isaac Lauer, Jeffrey W. Sleight
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Patent number: 9202885Abstract: Methods and devices associated with a phase change memory include Schottky diodes operating as selectors having a low turn-on voltage, low sneak current and high switching speed. A method of forming a semiconductor device includes providing a semiconductor substrate having a diode array region and a peripheral device region, forming an N+ buried layer in the diode array region, forming a semiconductor epitaxial layer on the N+ buried layer, and forming deep trench isolations through the epitaxial layer and the N+ buried layer along a first direction. The method also includes forming shallow trench isolations in the diode array region and in the peripheral region along a second line direction. The method also includes forming an N? doped region between the deep and shallow trench isolations and forming a metal silicide on a surface of the N? doped region.Type: GrantFiled: March 7, 2014Date of Patent: December 1, 2015Assignees: Semiconductor Manufacturing International (Beijing) Corporation, Semiconductor Manufacturing International (Shanghai) CorporationInventor: Chao Zhang
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Patent number: 9196488Abstract: A semiconductor device includes: a layer of a first conductivity type; a well of a second conductivity type on the layer of the first conductivity type in an active region; and a flat RESURF layer of the second conductivity type on the layer of the first conductivity type on an outer circumference of the well as a termination structure. The RESURF layer includes a low concentration layer arranged at an inner end on the well side and an outer end on the outer circumferential side, and a high concentration layer arranged between the inner end and the outer end and having a higher impurity concentration than the low concentration layer.Type: GrantFiled: January 8, 2014Date of Patent: November 24, 2015Assignee: Mitsubishi Electric CorporationInventor: Tetsuo Takahashi
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Patent number: 9123558Abstract: In accordance with one embodiment, the present invention provides a bipolar junction transistor including an emitter region; a base region; a first isolation between the emitter region and the base region; a gate on the first isolation region and overlapping at least a portion of a periphery of the emitter region; a collector region; and a second isolation between the base region and the collector region.Type: GrantFiled: June 20, 2011Date of Patent: September 1, 2015Assignee: MEDIATEK INC.Inventors: Sheng-Hung Fan, Chu-Wei Hu, Chien-Chih Lin, Chih-Chung Chiu, Zheng Zeng, Wei-Li Tsao
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Patent number: 9111752Abstract: An electrostatic discharge protection device having a P-type substrate, a common N-well formed in the P-type substrate, a common N-doped region formed in the first common N-well, wherein the common N-doped region is electrically connected to a reference voltage node. The device further has a common P-doped region formed in the common N-well, wherein the common P-doped region surrounds the common N-doped region, the common P-doped region and the common N-well form a common diode, a plurality of peripheral N-wells formed in the P-type substrate and surrounding the common N-well, each of the peripheral N-wells comprising a P-type doped region and a N-type doped region, wherein the P-type doped region is electrically connected to one of a plurality of I/O terminals, and a circular P-doped region formed in the P-type substrate and disposed between the common N-well and the peripheral N-wells, and the circular P-doped region surrounding the common N-well.Type: GrantFiled: April 27, 2015Date of Patent: August 18, 2015Assignee: VIA TECHNOLOGIES, INC.Inventors: Ke-Yuan Chen, Jyh-Fong Lin
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Patent number: 9105491Abstract: The invention provides a semiconductor structure and a semiconductor device having such semiconductor structure. The semiconductor structure includes: a substrate; a first well having a first conductivity type, which is provided on the substrate; a second well having a second conductivity type and contacting the first well at a boundary in between in a lateral direction; and a plurality of mitigation regions having the first conductivity type or the second conductivity type, provided in the first well and being close to the boundary in a lateral direction and penetrating the first well in a vertical direction.Type: GrantFiled: September 30, 2013Date of Patent: August 11, 2015Assignee: Richtek Technology CorporationInventor: Tsung-Yi Huang
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Patent number: 9087708Abstract: An integrated circuit (IC) includes a substrate having a p-type semiconductor surface. A first nwell includes an area surrounding a first plurality of semiconductor devices formed in the semiconductor surface having a first n-buried layer (NBL) thereunder. A vertical diode formed in the semiconductor surface surrounds the first nwell including a pwell on top of a floating NBL ring. A second nwell formed in the semiconductor surface includes an area surrounding the floating NBL ring and surrounds a second plurality of semiconductor devices having a second NBL thereunder.Type: GrantFiled: August 6, 2013Date of Patent: July 21, 2015Assignee: TEXAS INSTRUMENTS INCORPORATEDInventors: John Lin, Philip L. Hower
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Patent number: 9059232Abstract: A base region extends upward from a recessed semiconductor surface of a semiconductor material portion present on an insulator. The base region includes a vertical stack of, an extrinsic base region and an intrinsic base region. The extrinsic base region includes a first compound semiconductor material portion of a first conductivity type and a first dopant concentration. The intrinsic base region includes another first compound semiconductor material portion of the first conductivity type and a second dopant concentration which is less than the first dopant concentration. A collector region including a second compound semiconductor material portion of a second conductivity type opposite of the first conductivity type is located on one side on the base region. An emitter region including another second compound semiconductor material portion of the second conductivity type is located on another side on the base region.Type: GrantFiled: September 6, 2013Date of Patent: June 16, 2015Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Cheng-Wei Cheng, Tak H. Ning, Ghavam G. Shahidi, Kuen-Ting Shiu
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Patent number: 9059231Abstract: A base region extends upward from a recessed semiconductor surface of a semiconductor material portion present on an insulator. The base region includes a vertical stack of, an extrinsic base region and an intrinsic base region. The extrinsic base region includes a first compound semiconductor material portion of a first conductivity type and a first dopant concentration. The intrinsic base region includes another first compound semiconductor material portion of the first conductivity type and a second dopant concentration which is less than the first dopant concentration. A collector region including a second compound semiconductor material portion of a second conductivity type opposite of the first conductivity type is located on one side on the base region. An emitter region including another second compound semiconductor material portion of the second conductivity type is located on another side on the base region.Type: GrantFiled: June 13, 2013Date of Patent: June 16, 2015Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Cheng-Wei Cheng, Tak H. Ning, Ghavam G. Shahidi, Kuen-Ting Shiu
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Integrated circuit on SOI comprising a bipolar transistor with isolating trenches of distinct depths
Patent number: 9029955Abstract: An integrated circuit includes a semiconductor substrate, a silicon layer, a buried isolating layer arranged between the substrate and the layer, a bipolar transistor comprising a collector and emitter having a first doping, and a base and a base contact having a second doping, the base forming a junction with the collector and emitter, the collector, emitter, base contact, and the base being coplanar, a well having the second doping and plumb with the collector, emitter, base contact and base, the well separating the collector, emitter and base contact from the substrate, having the second doping and extending between the base contact and base, a isolating trench plumb with the base and extending beyond the layer but without reaching a bottom of the emitter and collector, and another isolating trench arranged between the base contact, collector, and emitter, the trench extending beyond the buried layer into the well.Type: GrantFiled: July 2, 2013Date of Patent: May 12, 2015Assignees: Commissariat á l'énergie atomique et aux énergies alternatives, STMicroelectronics SAInventors: Claire Fenouillet-Beranger, Pascal Fonteneau -
Publication number: 20150097247Abstract: A method of forming a semiconductor structure includes depositing a high-k dielectric layer within a first recess located between sidewall spacers of a first CMOS device and within a second recess located between sidewall spacers of a second CMOS device. A dummy titanium nitride layer is deposited on the high-k dielectric layer. Next, the high-k dielectric layer and the dummy titanium nitride layer are removed from the second recess in the second CMOS device. A silicon cap layer is deposited within the first recess and the second recess, the silicon cap layer is located above the high-k dielectric layer and dummy titanium nitride layer in the first CMOS device. Subsequently, dopants are implanted into the silicon cap layer located in the second recess of the second CMOS device.Type: ApplicationFiled: October 8, 2013Publication date: April 9, 2015Applicant: International Business Machines CorporationInventors: Jin Cai, Effendi Leobandung, Tak H. Ning
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Patent number: 8993393Abstract: A structure and method for providing a multiple silicide integration is provided. An embodiment comprises forming a first transistor and a second transistor on a substrate. The first transistor is masked and a first silicide region is formed on the second transistor. The second transistor is then masked and a second silicide region is formed on the first transistor, thereby allowing for device specific silicide regions to be formed on the separate devices.Type: GrantFiled: February 11, 2010Date of Patent: March 31, 2015Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Der-Chyang Yeh, Hsing-Kuo Hsia, Hao-Hsun Lin, Chih-Ping Chao, Chin-Hao Su, Hsi-Kuei Cheng
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Patent number: 8969969Abstract: Transistors exhibiting different electrical characteristics such as different switching threshold voltage or different leakage characteristics are formed on the same chip or wafer by selectively removing a film or layer which can serve as an out-diffusion sink for an impurity region such as a halo implant and out-diffusing an impurity such as boron into the out-diffusion sink, leaving the impurity region substantially intact where the out-diffusion sink has been removed. In forming CMOS integrated circuits, such a process allows substantially optimal design for both low-leakage and low threshold transistors and allows a mask and additional associated processes to be eliminated, particularly where a tensile film is employed to increase electron mobility since the tensile film can be removed from selected NMOS transistors concurrently with removal of the tensile film from PMOS transistors.Type: GrantFiled: March 19, 2010Date of Patent: March 3, 2015Assignee: International Business Machines CorporationInventors: Victor W. C. Chan, Narasimhulu Kanike, Huiling Shang, Varadarajan Vidya, Jun Yuan, Roger Allen Booth, Jr.
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Publication number: 20150048459Abstract: A device for detecting a laser attack made on an integrated circuit chip comprises a bipolar transistor of a first type formed in a semiconductor substrate, that bipolar transistor comprising a parasitic bipolar transistor of a second type. A buried region, forming the base of the parasitic bipolar transistor, operates as a detector of the variations in current flowing caused by impingement of laser light on the substrate.Type: ApplicationFiled: November 3, 2014Publication date: February 19, 2015Applicant: STMicroelectronics (Rousset) SASInventors: Fabrice Marinet, Jimmy Fort, Alexandre Sarafianos, Julien Mercier
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Patent number: 8916440Abstract: Semiconductor structures and methods of manufacture are disclosed herein. Specifically, disclosed herein are methods of manufacturing a high-voltage metal-oxide-semiconductor field-effect transistor and respective structures. A method includes forming a field-effect transistor (FET) on a substrate in a FET region, forming a high-voltage FET (HVFET) on a dielectric stack over a over lightly-doped diffusion (LDD) drain in a HVFET region, and forming an NPN on the substrate in an NPN region.Type: GrantFiled: August 3, 2012Date of Patent: December 23, 2014Assignee: International Business Machines CorporationInventors: William F. Clark, Jr., Qizhi Liu, John J. Pekarik, Yun Shi, Yanli Zhang
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Patent number: 8907450Abstract: Methods and apparatus for metal semiconductor wafer bonding for high-Q devices are provided. An exemplary capacitor includes a first plate formed on a glass substrate, a second plate, and a dielectric layer. No organic bonding agent is used between the first plate and the glass substrate, and the dielectric layer can be an intrinsic semiconductor. A extrinsic semiconductor layer that is heavily doped contacts the dielectric layer. The dielectric and extrinsic semiconductor layers are sandwiched between the first and second plates. An intermetallic layer is formed between the first plate and the dielectric layer. The intermetallic layer is thermo compression bonded to the first plate and the dielectric layer. The capacitor can be coupled in a circuit as a high-Q capacitor and/or a varactor, and can be integrated with a mobile device.Type: GrantFiled: November 9, 2011Date of Patent: December 9, 2014Assignee: QUALCOMM IncorporatedInventors: Changhan Yun, Chengjie Zuo, Chi Shun Lo, Jonghae Kim, Mario F. Velez
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Patent number: 8901669Abstract: A method of manufacturing an integrated circuit comprising bipolar transistors including first and second type bipolar transistors, the method comprising providing a substrate comprising first isolation regions each separated from a second isolation region by an active region comprising a collector impurity of one of the bipolar transistors; forming a base layer stack over the substrate; forming a first emitter cap layer of a first effective thickness over the base layer stack in the areas of the first type bipolar transistor; forming a second emitter cap layer of a second effective thickness different from the first effective thickness over the base layer stack in the areas of the second type bipolar transistor; and forming an emitter over the emitter cap layer of each of the bipolar transistors. An IC in accordance with this method.Type: GrantFiled: July 27, 2012Date of Patent: December 2, 2014Assignee: NXP, B.V.Inventors: Hans Mertens, Johannes Theodorus Marinus Donkers, Evelyne Gridelet, Tony Vanhoucke, Petrus Hubertus Cornelis Magnee
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Publication number: 20140327083Abstract: Disclosed is a combination-type transistor including a first MOSFET that includes a gate, a first source formed on one side of the gate, and a first drain formed on the other side of the gate; a second MOSFET that includes the gate, a second drain formed on the one side of the gate, and a second source formed on the other side of the gate; a first BJT that is formed such that the first source of the first MOSFET is used as an emitter, the second drain of the second MOSFET is used as a collector, and the substrate is used as a base; and a second BJT that is formed such that the second source of the second MOSFET is used as an emitter, the first drain of the first MOSFET is used as a collector, and the substrate is used as a base.Type: ApplicationFiled: May 15, 2012Publication date: November 6, 2014Applicant: SOONGSIL UNIVERSITY RESEARCH CONSORTIUM TECHNO-PARKInventors: Jong Hoon Park, Chang Kun Park
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Patent number: 8872222Abstract: A semiconductor structure and a method for forming the same are provided. The semiconductor structure comprises a first doped region, a second doped region, a doped strip and a top doped region. The first doped region has a first type conductivity. The second doped region is formed in the first doped region and has a second type conductivity opposite to the first type conductivity. The doped strip is formed in the first doped region and has the second type conductivity. The top doped region is formed in the doped strip and has the first type conductivity. The top doped region has a first sidewall and a second sidewall opposite to the first sidewall. The doped strip is extended beyond the first sidewall or the second sidewall.Type: GrantFiled: February 24, 2012Date of Patent: October 28, 2014Assignee: Macronix International Co., Ltd.Inventors: Ching-Lin Chan, Chen-Yuan Lin, Cheng-Chi Lin, Shih-Chin Lien
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Patent number: 8871643Abstract: A manufacturing method for manufacturing a lateral semiconductor device having an SOI (Silicon on Insulator) substrate, the lateral semiconductor device comprising a semiconductor layer that includes a buried oxide layer and a drift region, the manufacturing method comprising an etching process of etching, by a predetermined depth, a LOCOS oxide that projects from a surface of the semiconductor layer by a predetermined thickness and is embedded in the semiconductor layer by a predetermined thickness, and a trench forming process of simultaneously forming a first trench extending from the drift region toward the buried oxide layer, and a second trench extending from a portion obtained by the etching in the etching process toward the buried oxide layer, at a same etching rate, and stopping forming the first trench and the second trench at a time when the second trench reaches the buried oxide layer.Type: GrantFiled: February 8, 2011Date of Patent: October 28, 2014Assignee: Toyota Jidosha Kabushiki KaishaInventors: Hiroomi Eguchi, Takashi Okawa, Atsushi Onogi
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Patent number: 8866194Abstract: A semiconductor device (npn bipolar transistor) includes an n-type collector layer, a base layer constituted by a p+ diffusion layer, a SiGe layer and a p-type silicon film, an n-type emitter layer and a charge transport prevention film formed between the n-type collector layer and the n-type emitter layer and having an effect as a potential barrier with respect to either electrons or holes.Type: GrantFiled: September 24, 2007Date of Patent: October 21, 2014Assignee: Semiconductor Components Industries, LLCInventors: Shinya Naito, Hideaki Fujiwara, Toru Dan
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Patent number: 8847278Abstract: A semiconductor device includes an active section for a main current flow and a breakdown withstanding section for breakdown voltage. An external peripheral portion surrounds the active section on one major surface of an n-type semiconductor substrate. The breakdown withstanding section has a ring-shaped semiconductor protrusion, with a rectangular planar pattern including a curved section in each of four corners thereof, as a guard ring. The ring-shaped semiconductor protrusion has a p-type region therein, is sandwiched between a plurality of concavities deeper than the p-type region, and has an electrically conductive film across an insulator film on the surface thereof. Because of this, it is possible to manufacture at low cost a breakdown withstanding structure with which a high breakdown voltage is obtained in a narrow width, wherein there is little drop in breakdown voltage, even when there are variations in a patterning process of a field oxide film.Type: GrantFiled: January 16, 2012Date of Patent: September 30, 2014Assignee: Fuji Electric Co., Ltd.Inventors: Manabu Takei, Yusuke Kobayashi
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Patent number: 8836042Abstract: A semiconductor device includes an IGBT, a constant voltage circuit, and protection Zener diodes. The IGBT makes/breaks a low-voltage current flowing in a primary coil. The constant voltage circuit and the protection Zener diodes are provided between an external gate terminal and an external collector terminal. The constant voltage circuit supplies a constant gate voltage to the IGBT to thereby set a saturation current value of the IGBT to a predetermined limiting current value. The IGBT has the saturation current value in a limiting current value range of the semiconductor device.Type: GrantFiled: August 11, 2009Date of Patent: September 16, 2014Assignee: Fuji Electric Co., Ltd.Inventor: Katsunori Ueno
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Patent number: 8836043Abstract: A lateral bipolar junction transistor includes an emitter region; a base region surrounding the emitter region; a gate disposed at least over a portion of the base region; and a collector region surrounding the base region; wherein the portion of the base region under the gate does not under go a threshold voltage implant process.Type: GrantFiled: January 22, 2014Date of Patent: September 16, 2014Assignee: Mediatek Inc.Inventors: Ching-Chung Ko, Tung-Hsing Lee
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Patent number: 8822987Abstract: An electro-optical device includes a first pixel circuit having a first light emitting element; a second pixel circuit having a second light emitting element arranged adjacent to the first light emitting element along a first direction; a first data line arranged along a second direction crossing the first direction, the first data line being electrically connected to the first pixel circuit; a second constant potential wiring line arranged along the second direction, the second constant potential wiring line being electrically connected to the second pixel circuit; a wiring line connected to the second constant potential wiring line. The first data line and the wiring line overlap when seen from a third direction perpendicular to the first direction and to the second direction.Type: GrantFiled: November 28, 2012Date of Patent: September 2, 2014Assignee: Seiko Epson CorporationInventors: Shin Fujita, Takayuki Kitazawa
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Patent number: 8817435Abstract: A method for making a semiconductor device includes providing a substrate of a first conductivity type and having a surface region, forming a well region of a second conductivity type and having a first depth in the substrate, adding a gate dielectric layer overlying the surface region, adding a gate layer overlying the gate dielectric layer, forming a first LDD region of the first conductivity type and having a second depth within the well region, forming an emitter region of the second conductivity type within the first LDD region, and forming a second LDD region of the first conductivity type with the well region, a channel region separates the first and second LDD regions. The method further includes forming a source region being of the first conductivity type within the second LDD region and adding an output pad coupled to both the drain and emitter regions.Type: GrantFiled: November 7, 2011Date of Patent: August 26, 2014Assignee: Semiconductor Manufacturing International (Shanghai) Corp.Inventors: Chi Kang Liu, Ta Lee Yu, Quan Li
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Patent number: 8796763Abstract: In a vertical transistor, to raise a drain withstand voltage while lowering an on-resistance. A drift layer 120 is formed above a drain layer 110, and has a first conductivity type. A gate insulating film 170 is formed on a side wall of a concave portion 142. A bottom surface insulating film 172 is formed on a bottom surface of the concave portion 142. A gate electrode 180 is buried in the concave portion 142. A source layer 150 is formed in a channel layer 140. A first conductivity type layer 130 is located between the channel layer 140 and the drift layer 120. An impurity concentration of the first conductivity type layer 130 is higher than an impurity concentration of the drift layer 120.Type: GrantFiled: February 13, 2013Date of Patent: August 5, 2014Assignee: Renesas Electronics CorporationInventor: Hiroshi Takeda
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Patent number: 8796795Abstract: BEOL memory cells are described that include one or more sidewall protection layers on the memory device (including, for example, an MTJ element) deposited prior to interconnect via etching to prevent the formation of electrical shorts between layers. One embodiment uses a single layer sidewall protection sleeve that is deposited after the memory device has been patterned. The layer material is vertically etched down to expose the upper surface of the top electrode while leaving a residual layer of protective material surrounding the rest of the memory device. The material for the protection layer is selected to resist the etchant used to remove the first dielectric material from the via in the subsequent interconnect process. A second embodiment uses dual-layer sidewall protection in which the first layer covers the memory element is preferably an oxygen-free dielectric and the second layer protects the first layer during via etching.Type: GrantFiled: August 1, 2011Date of Patent: August 5, 2014Assignee: Avalanche Technology Inc.Inventors: Kimihiro Satoh, Yiming Huai, Jing Zhang, Ebrahim Abedifard
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Patent number: 8786024Abstract: A combined switching device includes a MOSFET disposed in a MOSFET area and IGBTs disposed in IGBT areas of a SiC substrate. The MOSFET and the IGBTs have gate electrodes respectively connected, a source electrode and emitter electrodes respectively connected, and a drain electrode and a collector electrode respectively connected. The MOSFET and the IGBTs are disposed with a common n-buffer layer. A top surface element structure of the MOSFET and top surface element structures of the IGBTs are disposed on the first principal surface side of the SiC substrate. Concave portions and convex portions are disposed on the second principal surface side of the SiC substrate. The MOSFET is disposed at a position corresponding to the convex portion of the SiC substrate. The IGBTs are disposed at positions corresponding to the concave portions of the SiC substrate.Type: GrantFiled: April 15, 2011Date of Patent: July 22, 2014Assignees: Yoshitaka Sugawara, Fuji Electric Co., Ltd.Inventor: Yoshitaka Sugawara
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Patent number: 8772056Abstract: The present disclosure provides a semiconductor structure including a semiconductor substrate having a device region and a dummy region adjacent the device region; a plurality of active regions in the device region; and a plurality of dummy active regions in the dummy region, where each of the active regions has a first dimension in a first direction and a second dimension in a second direction perpendicular to the first direction, and the first dimension is substantially greater than the second dimension; and each of the dummy active regions has a third dimension in the first direction and a fourth dimension in the second direction, and the third dimension is substantially greater than the fourth dimension. The plurality of dummy active regions are configured such that thermal annealing effect in the dummy region is substantially equal to that of the device region.Type: GrantFiled: December 19, 2013Date of Patent: July 8, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Li-Ting Wang, Jiunn-Ren Hwang
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Publication number: 20140183655Abstract: A CMOS integrated circuit containing an isolated n-channel DEMOS transistor and an isolated vertical PNP transistor has deep n-type wells and surrounding shallow n-type wells providing isolation from the p-type substrate. The isolated n-channel DEMOS transistor has an upper n-type layer providing an extended drain, and a lower p-type layer isolating the extended drain from the underlying deep n-type well. The isolated vertical PNP transistor has an upper n-type layer providing a base and a lower p-type layer providing a collector. A CMOS integrated circuit having opposite polarities of the transistors may be formed by appropriate reversals in dopant types.Type: ApplicationFiled: December 19, 2013Publication date: July 3, 2014Applicant: Texas Instruments IncorporatedInventors: Derek W. ROBINSON, Amitava CHATTERJEE
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Publication number: 20140167179Abstract: A semiconductor device includes a semiconductor substrate having an active layer in which an element region and a contact region are formed, a support substrate supporting the active layer, and a buried insulation layer interposed between the active layer and the support substrate. A transistor element is formed in the element region, the transistor element having a transistor buried impurity layer formed within the active layer. The semiconductor device further includes a substrate contact having a contact buried impurity layer formed within the contact region and a through contact extending from the surface of the active layer to the support substrate through the contact buried impurity and the buried insulation layer, the contact buried impurity layer being in the same layer as the transistor buried impurity layer.Type: ApplicationFiled: February 20, 2014Publication date: June 19, 2014Applicant: ROHM CO., LTD.Inventor: Hiroshi KUMANO
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Patent number: 8735989Abstract: According to one embodiment, a semiconductor device includes a main element and a sense element. The main element is connected between a collector terminal and an emitter terminal. The main element has an insulated gate bipolar transistor structure. The sense element is connected in parallel with the main element via a sense resistor between the collector terminal and the emitter terminal. The sense element has an insulated gate bipolar transistor structure with a feedback capacitance larger than a feedback capacitance of the main element.Type: GrantFiled: November 7, 2011Date of Patent: May 27, 2014Assignee: Kabushiki Kaisha ToshibaInventor: Kenichi Matsushita
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Patent number: 8674454Abstract: A lateral bipolar junction transistor includes an emitter region; a base region surrounding the emitter region; a gate disposed at least over a portion of the base region; and a collector region surrounding the base region; wherein the portion of the base region under the gate does not under go a threshold voltage implant process.Type: GrantFiled: February 20, 2009Date of Patent: March 18, 2014Assignee: Mediatek Inc.Inventors: Ching-Chung Ko, Tung-Hsing Lee
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Patent number: 8669621Abstract: A semiconductor device includes a first insulated gate field effect transistor, a second insulated gate field effect transistor, a bipolar transistor, a first element isolation structure formed on a main surface above a pn junction formed between an emitter region and a base region, a second element isolation structure formed on the main surface above a pn junction formed between the base region and a collector region, and a third element isolation structure formed on the main surface opposite to the second element isolation structure relative to the collector region, in which the semiconductor device further includes a bipolar dummy electrode formed on at least one of the first element isolation structure, the second element isolation structure and the third element isolation structure and having a floating potential.Type: GrantFiled: June 24, 2010Date of Patent: March 11, 2014Assignee: Renesas Electronics CorporationInventor: Keiichi Yamada
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Patent number: 8659052Abstract: A semiconductor device including a semiconductor substrate in which a diode region and an IGBT region are formed is provided. The diode region includes a first layer embedded in a diode trench reaching a diode drift layer from an upper surface side of the semiconductor substrate, and a second layer which is buried in the first layer and which has a lower end located deeper than a boundary between a diode body layer and the diode drift layer. The second layer pressures the first layer in a direction from inside to outside of the diode trench. A lifetime control region is formed in the diode drift layer at least at the depth of the lower end of the second layer, and a crystal defect density inside the lifetime control region is higher than a crystal defect density outside the lifetime control region.Type: GrantFiled: September 14, 2012Date of Patent: February 25, 2014Assignee: Toyota Jidosha Kabushiki KaishaInventor: Tomoharu Ikeda
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Patent number: 8653556Abstract: A vertical semiconductor device includes a semiconductor body, and first and second contacts on opposite sides of the semiconductor body. A plurality of regions are formed in the semiconductor body including, in a direction from the first contact to the second contact, a first region of a first conductivity type, a second region of a second conductivity type; and a third region of the first conductivity type. The third region is electrically connected to the second contact. A semiconductor zone of the second conductivity type and increased doping density is arranged in the second region. The semiconductor zone separates a first part of the second region from a second part of the second region. The semiconductor zone has a maximum doping density exceeding about 1016 cm?3 and a thickness along the direction from the first contact to the second contact of less than about 3 ?m.Type: GrantFiled: May 7, 2009Date of Patent: February 18, 2014Assignee: Infineon Technologies Austria AGInventors: Franz Josef Niedernostheide, Hans-Joachim Schulze
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Publication number: 20140035063Abstract: A configuration of a lateral transistor suited for the hybrid-integration (BiCMOS) of a high-performance lateral transistor (HCBT) and a CMOS transistor, and a method for manufacturing the lateral transistor. A semiconductor device includes a HCBT 100 and a CMOS transistor 200 hybrid-integrated. The HCBT 100 has an open region 21 opened by etching a device isolating oxide film 6 surrounding an n-hill layer 11. An emitter electrode 31A and a collector electrode 31B are formed in the open region 21 and are composed of a polysilicon film having such a thickness as to expose the n-hill layer 11 exposed by etching the device isolating oxide film, and an ultrathin oxide film 24 covering at least a part of the n-hill layer 11. The ultrathin oxide film 24 functions as a protective film for protecting the n-hill layer 11 from being etched when the polysilicon film is etched.Type: ApplicationFiled: September 20, 2013Publication date: February 6, 2014Applicant: Asahi Kasei Microdevices CorporationInventors: Tomislav SULIGOJ, Marko KORICIC, Hidenori MOCHIZUKI, Soichi MORITA
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Patent number: 8618610Abstract: The present disclosure provides a semiconductor structure including a semiconductor substrate having a device region and a dummy region adjacent the device region; a plurality of active regions in the device region; and a plurality of dummy active regions in the dummy region, where each of the active regions has a first dimension in a first direction and a second dimension in a second direction perpendicular to the first direction, and the first dimension is substantially greater than the second dimension; and each of the dummy active regions has a third dimension in the first direction and a fourth dimension in the second direction, and the third dimension is substantially greater than the fourth dimension. The plurality of dummy active regions are configured such that thermal annealing effect in the dummy region is substantially equal to that of the device region.Type: GrantFiled: December 31, 2009Date of Patent: December 31, 2013Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Li-Ting Wang, Jiunn-Ren Hwang
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Patent number: 8609502Abstract: In a method of manufacturing a semiconductor device, a semiconductor substrate of a first conductivity type having first and second surfaces is prepared. Second conductivity type impurities for forming a collector layer are implanted to the second surface using a mask that has an opening at a portion where the collector layer will be formed. An oxide layer is formed by enhanced-oxidizing the collector layer. First conductivity type impurities for forming a first conductivity type layer are implanted to the second surface using the oxide layer as a mask. A support base is attached to the second surface and a thickness of the semiconductor substrate is reduced from the first surface. An element part including a base region, an emitter region, a plurality of trenches, a gate insulating layer, a gate electrode, and a first electrode is formed on the first surface of the semiconductor substrate.Type: GrantFiled: June 18, 2013Date of Patent: December 17, 2013Assignee: DENSO CORPORATIONInventors: Masaki Koyama, Yutaka Fukuda
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Patent number: 8574982Abstract: A method and circuit for implementing an embedded dynamic random access memory (eDRAM), and a design structure on which the subject circuit resides are provided. The embedded dynamic random access memory (eDRAM) circuit includes a stacked field effect transistor (FET) and capacitor. The capacitor is fabricated directly on top of the FET to build the eDRAM.Type: GrantFiled: February 25, 2010Date of Patent: November 5, 2013Assignee: International Business Machines CorporationInventors: Karl Robert Erickson, David Paul Paulsen, John Edward Sheets, II, Kelly L. Williams
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Patent number: 8569866Abstract: A configuration of a lateral transistor suited for the hybrid-integration (BiCMOS) of a high-performance lateral transistor (HCBT) and a CMOS transistor, and a method for manufacturing the lateral transistor are provided. A semiconductor device includes a HCBT 100 and a CMOS transistor 200 hybrid-integrated therein. The HCBT 100 has an open region 21 opened by etching a device isolating oxide film 6 surrounding an n-hill layer 11, an emitter electrode 31A and a collector electrode 31B each of which is formed in the open region 21 and is composed of a polysilicon film having such a thickness as to expose the n-hill layer 11 exposed by etching the device isolating oxide film, and an ultrathin oxide film 24 covering at least a part of the n-hill layer 11. The ultrathin oxide film 24 functions as a protective film for protecting the n-hill layer 11 from being etched when the polysilicon film is etched to form the emitter electrode 31A and the collector electrode 31B.Type: GrantFiled: December 19, 2008Date of Patent: October 29, 2013Assignee: Asahi Kasei Microdevices CorporationInventors: Tomislav Suligoj, Marko Koricic, Hidenori Mochizuki, Soichi Morita
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Patent number: 8507352Abstract: In a method of manufacturing a semiconductor device, a semiconductor substrate of a first conductivity type having first and second surfaces is prepared. Second conductivity type impurities for forming a collector layer are implanted to the second surface using a mask that has an opening at a portion where the collector layer will be formed. An oxide layer is formed by enhanced-oxidizing the collector layer. First conductivity type impurities for forming a first conductivity type layer are implanted to the second surface using the oxide layer as a mask. A support base is attached to the second surface and a thickness of the semiconductor substrate is reduced from the first surface. An element part including a base region, an emitter region, a plurality of trenches, a gate insulating layer, a gate electrode, and a first electrode is formed on the first surface of the semiconductor substrate.Type: GrantFiled: November 30, 2009Date of Patent: August 13, 2013Assignee: DENSO CORPORATIONInventors: Masaki Koyama, Yutaka Fukuda
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Patent number: 8497529Abstract: Trench-generated device structures fabricated using a semiconductor-on-insulator (SOI) wafer, design structures embodied in a machine readable medium for designing, manufacturing, or testing an integrated circuit, as well as methods for fabricating trench-generated device structures. The device structure includes a trench extending through the semiconductor and insulator layers of the SOI wafer and into the underlying semiconductor substrate, and a first doped region in the semiconductor substrate. The doped region, which extends about the trench, has a second conductivity type opposite to the first conductivity type. The device structure further includes a first contact extending from the top surface through the semiconductor and insulator layers to a portion of the semiconductor substrate outside of the doped region, and a second contact extending from the top surface through the semiconductor and insulator layers to the doped region in the semiconductor substrate.Type: GrantFiled: September 2, 2009Date of Patent: July 30, 2013Assignee: International Business Machines CorporationInventors: Brent A. Anderson, Edward J. Nowak
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Patent number: 8492794Abstract: A vertical heterojunction bipolar transistor (HBT) includes doped polysilicon having a doping of a first conductivity type as a wide-gap-emitter with an energy bandgap of about 1.12 eV and doped single crystalline Ge having a doping of the second conductivity type as the base having the energy bandgap of about 0.66 eV. Doped single crystalline Ge having of doping of the first conductivity type is employed as the collector. Because the base and the collector include the same semiconductor material, i.e., Ge, having the same lattice constant, there is no lattice mismatch issue between the collector and the base. Further, because the emitter is polycrystalline and the base is single crystalline, there is no lattice mismatch issue between the base and the emitter.Type: GrantFiled: March 15, 2011Date of Patent: July 23, 2013Assignee: International Business Machines CorporationInventors: Jin Cai, Kevin K. Chan, Wilfried E. Haensch, Tak H. Ning
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Patent number: 8476139Abstract: A semiconductor structure which exhibits high device performance and improved short channel effects is provided. In particular, a metal oxide semiconductor field effect transistor (MOFET) is provided that includes a low dopant concentration within an inversion layer of the structure; the inversion layer is an epitaxial semiconductor layer that is formed atop a portion of the semiconductor substrate. The structure also includes a well region of a first conductivity type beneath the inversion layer, wherein the well region has a central portion and two horizontally abutting end portions. The central portion has a higher concentration of a first conductivity type dopant than the two horizontally abutting end portions.Type: GrantFiled: September 13, 2012Date of Patent: July 2, 2013Assignee: International Business Machines CorporationInventors: Huilong Zhu, Jing Wang
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Patent number: 8471291Abstract: In a semiconductor device in which a diode and an IGBT are formed in a main region of a same semiconductor substrate, in order to obtain a sufficiently large sense IGBT current in a stable manner, a sense region is provided with a first region in which a distance from an end of a main cathode region on a side of the sense region in a plan view of the semiconductor substrate is equal to or longer than 615 ?m. Alternatively, in order to obtain a sufficiently large sense diode current in a stable manner, the sense region is provided with a second region in which a distance from the main cathode region in a plan view of the semiconductor substrate is equal to or shorter than 298 ?m. The sense region may be provided with both the first region and the second region.Type: GrantFiled: May 7, 2010Date of Patent: June 25, 2013Assignee: Toyota Jidosha Kabushiki KaishaInventor: Akitaka Soeno
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Patent number: 8445970Abstract: The present invention discloses a bipolar device. An emitter is formed in a semiconductor substrate. A collector is laterally spaced from the emitter in the substrate. A gate terminal is formed on the substrate, defining a space between the emitter and the collector. An extrinsic base is formed on the substrate with a predetermined distance from either the emitter or the collector, wherein the base, the emitter, the collector and the gate terminal are located in an active area defined by a hole in a surrounding isolation structure in the substrate.Type: GrantFiled: September 16, 2011Date of Patent: May 21, 2013Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventor: Shine Chung
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Patent number: 8441075Abstract: A power semiconductor apparatus which is provided with a first power semiconductor device using Si as a base substance and a second power semiconductor device using a semiconductor having an energy bandgap wider than the energy bandgap of Si as a base substance, and includes a first insulated metal substrate on which the first power semiconductor device is mounted, a first heat dissipation metal base on which the first insulated metal substrate is mounted, a second insulated metal substrate on which the second power semiconductor device is mounted, and a second heat dissipation metal base on which the second insulated metal substrate is mounted.Type: GrantFiled: February 18, 2010Date of Patent: May 14, 2013Assignee: Hitachi, Ltd.Inventors: Katsumi Ishikawa, Kazutoshi Ogawa
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Patent number: 8431991Abstract: A semiconductor device includes a peripheral voltage withstanding structure, which includes an n? SiC layer, an n SiC layer and a p SiC layer are provided successively on an n+ SiC layer. A trench is formed in the peripheral voltage withstanding structure portion so that the trench passes through the p SiC layer 15 and the n SiC layer 14 and reaches the n? SiC layer. This trench is wider than a trench having a trench gate structure in the active region portion. A p+ SiC region is provided along a bottom of the trench so as to be located under the trench. A sidewall and the bottom of the trench are covered with an oxide film and an insulating film having a total thickness not smaller than 1.1 ?m. The oxide film and insulating film absorb a large part of a voltage applied between a source and a drain.Type: GrantFiled: November 5, 2008Date of Patent: April 30, 2013Assignee: Fuji Electric Co., Ltd.Inventor: Noriyuki Iwamuro