Combined With Bipolar Transistor Patents (Class 257/370)
  • Patent number: 7879639
    Abstract: A method to fabricate an image sensor includes providing a semiconductor substrate having a pixel area and a logic area, forming a light sensing element in the pixel area, and forming a first transistor in the pixel area and a second transistor in the logic area. The step of forming the first transistor in the pixel area and the second transistor in the logic area includes performing a first implant process in the pixel area and the logic area, performing a second implant process in the pixel area and the logic area, and performing a third implant process only in the logic area.
    Type: Grant
    Filed: April 13, 2007
    Date of Patent: February 1, 2011
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chun-Yao Ko, Chung-Wei Chang, Han-Chi Liu, Shou-Gwo Wuu
  • Publication number: 20100289058
    Abstract: A lateral bipolar junction transistor includes an emitter region; a base region surrounding the emitter region; a gate disposed at least over a portion of the base region; a collector region surrounding the base region with an offset between an edge of the gate and the collector region; a lightly doped drain region between the edge of the gate and the collector region; a salicide block layer disposed on or over the lightly doped drain region; and a collector salicide formed on at least a portion of the collector region.
    Type: Application
    Filed: May 12, 2009
    Publication date: November 18, 2010
    Inventors: Ming-Tzong Yang, Ching-Chung Ko, Tung-Hsing Lee, Zheng Zeng
  • Patent number: 7834403
    Abstract: This document discusses, among other things, apparatus having at least one CMOS transistor overlying a substrate; and at least one finned bipolar transistor overlying the substrate and methods for making the apparatus.
    Type: Grant
    Filed: August 13, 2007
    Date of Patent: November 16, 2010
    Assignee: Infineon Technologies AG
    Inventors: Ronald Kakoschke, Klaus Schrüfer
  • Patent number: 7829955
    Abstract: A horizontal semiconductor device having multiple unit semiconductor elements, each of said unit semiconductor element formed by an IGBT including: a semiconductor substrate of a first conductivity type; a semiconductor region of a second conductivity type formed on the semiconductor substrate; a collector layer of the first conductivity type formed within the semiconductor region; a ring-shaped base layer of the first conductivity type formed within the semiconductor region such that the base layer is off said collector layer but surrounds said collector layer; and a ring-shaped first emitter layer of the second conductivity type formed in said base layer, wherein movement of carriers between the first emitter layer and the collector layer is controlled in a channel region formed in the base layer, and the unit semiconductor elements are disposed adjacent to each other.
    Type: Grant
    Filed: October 31, 2006
    Date of Patent: November 9, 2010
    Assignee: Mitsubishi Electric Corporation
    Inventor: Kazunari Hatade
  • Patent number: 7821043
    Abstract: An insulated gate bipolar transistor has a p-type emitter layer; an n-type buffer layer provided on the p-type emitter layer; an n-type base layer provided on the n-type buffer layer and having a higher resistivity than the n-type buffer layer; a p-type base layer provided in part of an upper surface of the n-type base layer; an n-type source layer provided in part of an upper surface of the p-type base layer; a trench extending through the n-type source layer and the p-type base layer to the n-type base layer; a gate electrode provided in the trench; and a gate insulating film provided between the gate electrode and an inner surface of the trench. The p-type emitter layer has a thickness of 5 to 50 ?m and a dopant concentration of 2×1016 to 1×1018 cm?3.
    Type: Grant
    Filed: June 15, 2007
    Date of Patent: October 26, 2010
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Akio Nakagawa
  • Patent number: 7816741
    Abstract: The semiconductor device of the present invention has a body layer of a P-type impurity region formed on an N? layer of an N-type impurity region. A plurality of trenches is formed through the body layer from the main surface thereof. A gate insulating film and a gate electrode are formed in each trench. A contact layer of a P-type impurity region and an emitter layer of an N-type impurity region are formed on the main surface of the body layer. A plurality of floating ring layers of P-type impurity regions is formed on the main surface of the N? layer, being spaced apart from the body layer. A well layer of an N-type impurity region is formed between the body layer and N? layer in an area contained in the body layer in plane view.
    Type: Grant
    Filed: April 17, 2008
    Date of Patent: October 19, 2010
    Assignee: Panasonic Corporation
    Inventors: Masaaki Noda, Tomonari Oota
  • Patent number: 7811879
    Abstract: Techniques for forming a memory cell. An aspect of the invention includes forming FET gate stacks and sacrificial cell gate stacks over the substrate. Spacer layers are then formed around the FET gate stacks and around the sacrificial cell gate stacks. The sacrificial cell gate stacks are then removed such that the spacer layers around the sacrificial cell gate stacks are still intact. BJT cell stacks are then formed in the space between the spacer layers where the sacrificial cell gate stacks were formed and removed, the BJT cell stacks including an emitter layer. A phase change layer above the emitter contacts and an electrode above the phase change layer are then formed.
    Type: Grant
    Filed: May 16, 2008
    Date of Patent: October 12, 2010
    Assignee: International Business Machines Corporation
    Inventors: Chung Hon Lam, Bipin Rajendran
  • Publication number: 20100252883
    Abstract: This invention provides a lateral high-voltage semiconductor device, which is a three-terminal one with two types of carriers for conduction and consists of a highest voltage region and a lowest voltage region referring to the substrate and a surface voltage-sustaining region between the highest voltage region and the lowest voltage region. The highest voltage region and the lowest region have an outer control terminal and an inner control terminal respectively, where one terminal is for controlling the flow of majorities of one conductivity type and another for controlling the flow of majorities of the other conductivity type. The potential of the inner control terminal is regulated by the voltage applied to the outer control terminal.
    Type: Application
    Filed: April 2, 2010
    Publication date: October 7, 2010
    Applicant: UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY
    Inventor: Xingbi Chen
  • Publication number: 20100244143
    Abstract: A semiconductor structure contains a bipolar transistor (101) and a spacing structure (265-1 or 265-2). The transistor has an emitter (241), a base (243), and a collector (245). The base is formed with an intrinsic base portion (243I), a base link portion (243L), and a base contact portion (245C). The intrinsic base portion is situated below the emitter and above material of the collector. The base link portion extends between the intrinsic base portion and the base contact portions. The spacing structure includes an isolating dielectric layer (267-1 or 267-2) and a spacing component. The dielectric layer extends along the upper semiconductor surface. The spacing component includes a lateral spacing portion (269-1 or 269-2) of largely non-monocrystalline semiconductor material, preferably polycrystalline semiconductor material, situated on the dielectric layer above the base link portion.
    Type: Application
    Filed: March 27, 2009
    Publication date: September 30, 2010
    Inventors: Jeng-Jiun Yang, Constantin Bulucea
  • Patent number: 7800183
    Abstract: A semiconductor device includes a substrate of a first conductivity type, a base region of a second conductivity type, a source region of the first conductivity type, a collector region of the second conductivity type, a trench gate, which is formed in a trench via a gate insulation film, an electrically conductive layer, which is formed within a contact trench that is formed through the source region, a source electrode, which is in contact with the electrically conductive layer and the source region, and a latch-up suppression region of the second conductivity type, which is formed within the base region, in contact with the electrically conductive layer, and higher in impurity concentration than the base region. The distance between the gate insulation film and the latch-up suppression region is not less than the maximum width of a depletion layer that is formed in the base layer by the trench gate.
    Type: Grant
    Filed: May 12, 2009
    Date of Patent: September 21, 2010
    Assignee: Mitsubishi Electric Corporation
    Inventors: Takahiro Okuno, Shigeru Kusunoki
  • Patent number: 7800143
    Abstract: A memory cell and methods of making and operating the same are provided. In one aspect, a method of forming a memory cell is provided that includes forming a MOS transistor that has a gate, a source region and a drain region. A bipolar transistor is formed that has a collector, a base and an emitter. The emitter of the bipolar transistor is formed to serve as the source region for the MOS transistor and the base of the bipolar transistor is formed to serve as a capacitive charge storage region for the memory cell.
    Type: Grant
    Filed: December 24, 2006
    Date of Patent: September 21, 2010
    Assignee: GlobalFoundries Inc.
    Inventor: Hyun-Jin Cho
  • Patent number: 7786532
    Abstract: The relationship between a distance Ls between a base layer and an n type buffer layer formed on the surface of a drift layer and the thickness t of a semiconductor substrate in contact with the drift layer is set to Ls?t?2×Ls. A loss upon turn-off of a high breakdown voltage semiconductor device can be reduced without deteriorating breakdown voltage characteristics.
    Type: Grant
    Filed: October 30, 2008
    Date of Patent: August 31, 2010
    Assignee: Mitsubishi Electric Corporation
    Inventor: Tomohide Terashima
  • Patent number: 7776678
    Abstract: A method for forming BiCMOS integrated circuits and structures formed according to the method. After forming doped wells and gate stacks for the CMOS devices and collector and base regions for the bipolar junction transistor, an emitter layer is formed within an emitter window. A dielectric material layer is formed over the emitter layer and remains in place during etching of the emitter layer and removal of the etch mask. The dielectric material layer further remains in place during source/drain implant doping and activation of the implanted source/drain dopants. The dielectric material layer functions as a thermal barrier, to limit out-diffusion of the emitter dopants during the activation step.
    Type: Grant
    Filed: September 11, 2008
    Date of Patent: August 17, 2010
    Assignee: Agere Systems Inc.
    Inventors: Arun K. Nanda, Venkat Raghavan, Nace Rossi
  • Patent number: 7772060
    Abstract: A method of fabricating an integrated BiCMOS circuit is provided, the circuit including bipolar transistors 10 and CMOS transistors 12 on a substrate. The method comprises the step of forming an epitaxial layer 28 to form a channel region of a MOS transistor and a base region of a bipolar transistor. Growing of the epitaxial layer includes growing a first sublayer of silicon 28a, a first sublayer of silicon-germanium 28b onto the first sublayer of silicon, a second sublayer of silicon 28c onto the first sublayer of silicon-germanium, and a second sublayer of silicon-germanium 28d onto the second sublayer of silicon. Furthermore, an integrated BiCMOS circuit is provided, which includes an epitaxial layer 28 as described above.
    Type: Grant
    Filed: June 11, 2007
    Date of Patent: August 10, 2010
    Assignee: Texas Instruments Deutschland GmbH
    Inventors: Reiner Jumpertz, Klaus Schimpf
  • Patent number: 7772653
    Abstract: A method for manufacturing a semiconductor apparatus is disclosed. The apparatus comprises double poly bipolar transistors and double poly metal oxide semiconductor (MOS) transistors. The bipolar transistors and the MOS transistors are manufactured in a unified process in which a first polysilicon layer (Poly1) is doped to form the extrinsic bases in the bipolar transistors and to form the gates in the MOS transistors. A second polysilicon layer (Poly2) is doped to form emitters in the bipolar transistors and to form the sources and drains in the MOS transistors. The method of the invention minimizes the number of manufacturing process steps.
    Type: Grant
    Filed: February 11, 2004
    Date of Patent: August 10, 2010
    Assignee: National Semiconductor Corporation
    Inventors: Richard W. Foote, Robert Oliver
  • Publication number: 20100187637
    Abstract: The present invention discloses a bipolar device. An emitter is formed in a semiconductor substrate. A collector is laterally spaced from the emitter in the substrate. A gate terminal is formed on the substrate, defining a space between the emitter and the collector. An extrinsic base is formed on the substrate with a predetermined distance from either the emitter or the collector, wherein the base, the emitter, the collector and the gate terminal are located in an active area defined by a hole in a surrounding isolation structure in the substrate.
    Type: Application
    Filed: April 1, 2010
    Publication date: July 29, 2010
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventor: Shine CHUNG
  • Patent number: 7763915
    Abstract: The three-dimensional integrated CMOS circuit is formed in a hybrid substrate. n-MOS type transistors are formed, at a bottom level, in a first semi-conducting layer of silicon having a (100) orientation, which layer may be tension strained. p-MOS transistors are formed, at a top level, in a preferably monocrystalline and compression strained second semi-conducting layer of germanium having a (110) orientation. The second semi-conducting layer is transferred onto a first block in which the n-MOS transistors were previously formed, and the p-MOS transistors are then formed.
    Type: Grant
    Filed: January 18, 2007
    Date of Patent: July 27, 2010
    Assignee: Commissariat a l'Energie Atomique
    Inventors: Jean-Pierre Joly, Olivier Faynot, Laurent Clavelier
  • Patent number: 7759172
    Abstract: A planar combined structure of a bipolar junction transistor (BJT) and n-type/p-type metal semiconductor field-effect transistors (MESFETs) and a method for forming the structure. The n-type GaN MESFET is formed at the same time when an inversion region (an emitter region) of the GaN BJT is formed by an ion implantation or impurity diffusion method by using a particular mask design, while a p-type GaN region is at the same time is formed as the p-type GaN MESFET. Namely, the n-type channel of the n-type MESFET is formed by the ion implantation or impurity diffusion method when the BJT is formed with the same ion implantation or impurity diffusion method performed, while a region of the p-type GaN without being subject to the ion implantation or impurity diffusion method is formed as the p-type MESFET. As such, the BJT is formed currently with the n-type/p-type MESFETs on the same GaN crystal growth layer as a planar structure.
    Type: Grant
    Filed: August 12, 2008
    Date of Patent: July 20, 2010
    Assignee: National Central University
    Inventors: Yue-Ming Hsin, Jinn-Kong Sheu, Kuang-Po Hsueh
  • Patent number: 7755146
    Abstract: Wells are formed in a substrate where standard Vt and low Vt devices of both a first and second type are to be fabricated. Wells defining the locations of first type standard Vt devices are masked, and a first voltage threshold implant adjustment is performed within wells defining the second type standard Vt devices, and each of the first and second type low Vt devices. Wells that define the locations of second type standard Vt devices are masked, and a second voltage threshold implant adjustment is performed to the wells defining the first type standard Vt devices, and each of the first and second type low Vt devices. Doped polysilicon gate stacks are then formed over the wells. Performance characteristics and control of each device Vt is controlled by regulating at least one of the first and second voltage threshold implant adjustments, and the polysilicon gate stack doping.
    Type: Grant
    Filed: July 30, 2009
    Date of Patent: July 13, 2010
    Assignee: Round Rock Research, LLC
    Inventors: Mark Helm, Xianfeng Zhou
  • Publication number: 20100164012
    Abstract: A semiconductor device includes a semiconductor substrate including a CMOS region and a bipolar region, a first N well and a first P well in the CMOS region, a PMOS device in the first N well and an NMOS device in the first P well, a deep P well in the bipolar region, a second N well in the deep P, a second isolation layer between the deep P well and the second N well, a third isolation in the second N well, a collector in the second N well between the second and third isolation layers, and a base formed in the second N well and having a bottom surface including first type impurities to contact the emitter.
    Type: Application
    Filed: December 29, 2009
    Publication date: July 1, 2010
    Inventor: Yeo-Cho Yoon
  • Patent number: 7745882
    Abstract: A method for forming a bipolar junction transistor comprises forming a first well of a second conductive type for forming a collector region in a substrate including device isolation layers, wherein the substrate comprises a first conductive type, forming a second well of the first conductive type for a metal-oxide-semiconductor transistor of the second conductive type within the first well of the second conductive type, wherein the second well of the first conductive type is formed deeper than the device isolation layers, forming a shallow third well of the first conductive type for a base region within the first well of the second conductive type, wherein the shallow third well of the first conductive type is formed shallower than the device isolation layers, and simultaneously forming an emitter region within the shallow third well of the first conductive type and a plurality of collector contacts within the first well of the second conductive type by performing an ion implantation process for forming sour
    Type: Grant
    Filed: December 16, 2005
    Date of Patent: June 29, 2010
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Je-Don Kim
  • Publication number: 20100148276
    Abstract: The invention relates to a BiMOS semiconductor component having a semiconductor substrate wherein, in a first active region, a depletion-type MOS transistor is formed comprising additional source and drain doping regions of the first conductivity type extending in the downward direction past the depletion region into the body doping region while, in a second active region, (101), a bipolar transistor (100) is formed, the base of which comprises a body doping region (112) and the collector of which comprises a deep pan (110), wherein an emitter doping region (114) of the first conductivity type and a base connection doping region (118) of the second conductivity type are formed in the body doping region. The semiconductor element can be produced with a particularly low process expenditure because it uses the same basic structure for the doping regions in the bipolar transistor as are used in the MOS transistor of the same semiconductor component.
    Type: Application
    Filed: March 26, 2008
    Publication date: June 17, 2010
    Applicant: X-FAB SEMICONDUCTOR FOUNDRIES
    Inventors: Thomas Uhlig, Felix Fuernhammer, Christoph Ellmers
  • Patent number: 7737490
    Abstract: A vertical and trench type insulated gate MOS semiconductor device is provided in which the surfaces of p-type channel regions and the surfaces of portions of an n-type semiconductor substrate alternate in the longitudinal direction of the trench between the trenches arranged in parallel, and an n+-type emitter region selectively formed on the surface of the p-type channel region is wide by the side of the trench and becomes narrow toward the center point between the trenches. This enables the device to achieve low on-resistance and enhanced turn-off capability.
    Type: Grant
    Filed: April 27, 2007
    Date of Patent: June 15, 2010
    Assignee: Fuji Electric Systems Co., Ltd.
    Inventors: Koh Yoshikawa, Hiroki Wakimoto, Masahito Otsuki
  • Publication number: 20100127318
    Abstract: A BiCMOS substrate includes a bipolar area having a buried carrier layer, and a deep trench isolation (DTI) trench extending into the buried carrier layer to form a surface well implant above a buried well implant within the DTI trench, the buried well implant being the buried carrier layer portion within the DTI trench. A floating gate is disposed on the carrier well. Optionally, a high voltage control gate is formed of a stack of the buried well implant and the surface well implant within the DTI trench. Optionally, a poly layer formed of a bipolar process base poly layer is disposed on the floating gate. Optionally, a shallow well isolation region is formed on the substrate, a floating gate is disposed on the shallow well region, and an overlaying control gate, formed of a bipolar process base poly, is disposed above the floating gate.
    Type: Application
    Filed: November 24, 2008
    Publication date: May 27, 2010
    Applicant: NXP B.V.
    Inventors: Wibo Van NOORT, Theodore James Letavic, Francis Zaato, Charudatta Mandhare
  • Patent number: 7709925
    Abstract: A semiconductor device, including: a semiconductor substrate of a first conductivity type; a semiconductor layer of a second conductivity type formed on the semiconductor substrate; a trench formed in the semiconductor region; a trench diffusion layer of the first conductivity type formed along wall surfaces of the trench; and a buried conductor buried in the trench, wherein an insulation film is further disposed between the wall surfaces of the trench and the buried conductor.
    Type: Grant
    Filed: January 12, 2007
    Date of Patent: May 4, 2010
    Assignee: Mitsubishi Electric Corporation
    Inventors: Tetsuo Takahashi, Tomohide Terashima
  • Patent number: 7701015
    Abstract: Disclosed is a method and structure for an integrated circuit structure that includes a plurality of complementary metal oxide semiconductor (CMOS) transistors and a plurality of vertical bipolar transistors positioned on a single substrate. The vertical bipolar transistors are taller devices than the CMOS transistors. In this structure, a passivating layer is positioned above the substrate, and between the vertical bipolar transistors and the CMOS transistors. A wiring layer is above the passivating layer. The vertical bipolar transistors are in direct contact with the wiring layer and the CMOS transistors are connected to the wiring layer by contacts extending through the passivating layer.
    Type: Grant
    Filed: December 16, 2003
    Date of Patent: April 20, 2010
    Assignee: International Business Machines Corporation
    Inventors: Zhong-Xiang He, Bradley A. Orner, Vidhya Ramachandran, Alvin J. Joseph, Stephen A. St. Onge, Ping-Chuan Wang
  • Patent number: 7696580
    Abstract: A diode with low substrate current leakage and suitable for BiCMOS process technology. A buried layer is formed on a semiconductor substrate. A connection region and well contact the buried layer. Isolation regions are adjacent to two sides of the buried layer, each deeper than the buried layer. The isolation regions and the buried layer isolate the connection zone and the well from the substrate. The first doped region in the well is a first electrode. The well and the connection region are electrically connected, acting as a second electrode.
    Type: Grant
    Filed: May 9, 2008
    Date of Patent: April 13, 2010
    Inventors: Zi-Ping Chen, Ming-Dou Ker
  • Patent number: 7696579
    Abstract: Wells are formed in a substrate where standard Vt and low Vt devices of both a first and second type are to be fabricated. Wells defining the locations of first type standard Vt devices are masked, and a first voltage threshold implant adjustment is performed within wells defining the second type standard Vt devices, and each of the first and second type low Vt devices. Wells that define the locations of second type standard Vt devices are masked, and a second voltage threshold implant adjustment is performed to the wells defining the first type standard Vt devices, and each of the first and second type low Vt devices. Doped polysilicon gate stacks are then formed over the wells. Performance characteristics and control of each device Vt is controlled by regulating at least one of the first and second voltage threshold implant adjustments, and the polysilicon gate stack doping.
    Type: Grant
    Filed: October 24, 2007
    Date of Patent: April 13, 2010
    Assignee: Micron Technology, Inc.
    Inventors: Mark Helm, Xianfeng Zhou
  • Publication number: 20100059829
    Abstract: A bipolar selection transistor and a circuitry MOS transistor for a memory device are formed in a semiconductor body. The bipolar selection transistor is formed by implanting a buried collector, implanting a base region on the buried collector, forming a silicide protection mask on the semiconductor body, and implanting an emitter region and a control contact region. The circuitry MOS transistor is formed by defining a gate on the semiconductor body, forming lateral spacers on the sides of the gate and implanting source and drain regions on the sides of the lateral spacers. Then, a silicide region is formed on the emitter, base contact, source and drain regions and the gate, in a self-aligned way. The lateral spacers are multilayer structures including at least two different layers, one of which is used to form the silicide protection mask on the bipolar selection transistor. Thereby, the dimensions of the lateral spacers are decoupled from the thickness of the silicide protection mask.
    Type: Application
    Filed: September 10, 2009
    Publication date: March 11, 2010
    Applicant: STMICROELECTRONICS S.R.L.
    Inventors: Fabio Pellizzer, Cristina Casellato, Michele Magistretti, Roberto Colombo, Lucilla Brattico
  • Publication number: 20100051946
    Abstract: A poly-emitter type bipolar transistor includes a buried layer formed over an upper portion of a semiconductor substrate, an epitaxial layer formed on the semiconductor substrate, a collector area formed on the epitaxial layer and connected to the buried layer, a base area formed at a part of an upper portion of the epitaxial layer, and a poly-emitter area formed on a surface of the semiconductor substrate in the base area and including a polysilicon material. A BCD device includes a poly-emitter type bipolar transistor having a poly-emitter area including a polysilicon material and at least one of a CMOS and a DMOS formed on a single wafer together with the poly-emitter type bipolar transistor.
    Type: Application
    Filed: August 24, 2009
    Publication date: March 4, 2010
    Inventor: Bon-Keun Jun
  • Publication number: 20100032766
    Abstract: A process for forming a bipolar junction transistor (BJT) in a semiconductor substrate and a BJT formed according to the process. A buried isolation region is formed underlying BJT structures to isolate the BJT structures from the p-type semi-conductor substrate. To reduce capacitance between a BJT subcollector and the buried isolation region, prior to implanting the subcollector spaced-apart structures are formed on a surface of the substrate. The subcollector is formed by implanting ions through the spaced-apart structures and through a region intermediate the spaced-apart structures. The formed BJT subcollector therefore comprises a body portion and end portions extending therefrom, with the end portions disposed at a shallower depth than the body portion, since the ions implanting the end portions must pass through the spaced-apart structures. The shallower depth of the end portions reduces the capacitance.
    Type: Application
    Filed: June 2, 2006
    Publication date: February 11, 2010
    Applicant: Agere Systems Inc.
    Inventors: Alan Sangone Chen, Mark Victor Dyson, Edward Belden Harris, Daniel Charles Kerr, William John Nagy
  • Patent number: 7659583
    Abstract: An oxynitride pad layer and a masking layer are formed on an ultrathin semiconductor-on-insulator substrate containing a top semiconductor layer comprising silicon. A first portion of a shallow trench is patterned in a top semiconductor layer by lithographic masking of an NFET region and an etch, in which exposed portions of the buried insulator layer is recessed and the top semiconductor layer is undercut. A thick thermal silicon oxide liner is formed on the exposed sidewalls and bottom peripheral surfaces of a PFET active area to apply a high laterally compressive stress. A second portion of the shallow trench is formed by lithographic masking of a PFET region including the PFET active area. A thin thermal silicon oxide or no thermal silicon oxide is formed on exposed sidewalls of the NFET active area, which is subjected to a low lateral compressive stress or no lateral compressive stress.
    Type: Grant
    Filed: August 15, 2007
    Date of Patent: February 9, 2010
    Assignee: International Business Machines Corporation
    Inventors: Zhibin Ren, Ghavam Shahidi, Dinkar V. Singh, Jeffrey W. Sleight, Xinhui Wang
  • Patent number: 7656002
    Abstract: The present invention relates to a microelectronic device having a bipolar epitaxial structure that provides at least one bipolar transistor element formed over at least one field effect transistor (FET) epitaxial structure that provides at least one FET element. The epitaxial structures are separated with at least one separation layer. Additional embodiments of the present invention may use different epitaxial layers, epitaxial sub-layers, metallization layers, isolation layers, layer materials, doping materials, isolation materials, implant materials, or any combination thereof.
    Type: Grant
    Filed: November 30, 2007
    Date of Patent: February 2, 2010
    Assignee: RF Micro Devices, Inc.
    Inventors: Curtis A. Barratt, Michael T. Fresina, Brian G. Moser, Dain C. Miller, Walter A. Wohlmuth
  • Publication number: 20100019326
    Abstract: A complementary bipolar semiconductor device (CBi semiconductor device) comprising a substrate of a first conductivity type, active bipolar transistor regions in the substrate, in which the base, emitter and collector of vertical bipolar transistors are arranged, vertical epitaxial-base npn bipolar transistors in a first subset of the active bipolar transistor regions, vertical epitaxial-base pnp bipolar transistors in a second subset of the active bipolar transistor regions, collector contact regions which are respectively arranged adjoining an active bipolar transistor region, and shallow field insulation regions which respectively laterally delimit the active bipolar transistor regions and the collector contact regions, wherein arranged between the first or the second or both the first and also the second subset of active bipolar transistor regions on the one hand and the adjoining collector contact regions on the other hand is a respective shallow field insulation region of a first type with a first depth
    Type: Application
    Filed: December 7, 2007
    Publication date: January 28, 2010
    Inventors: Dieter Knoll, Bernd Heinemann, Karl-Ernst Ehwald
  • Patent number: 7652339
    Abstract: An ambipolar transistor, including a p-type semiconductor region and an n-type semiconductor region near the p-type semiconductor region. Also a first terminal and second terminal contact both the p-type semiconductor region and the n-type semiconductor region. Furthermore, the p-type semiconductor region and the n-type semiconductor region substantially do not overlap each other. A method of manufacturing an ambipolar transistor is also disclosed, including forming a p-type semiconductor region, forming an n-type semiconductor region near the p-type semiconductor region, forming a first terminal contacting both the p-type semiconductor region and n-type semiconductor region, forming a second terminal contacting both the p-type semiconductor region and n-type semiconductor region; and wherein the p-type semiconductor region and the n-type semiconductor region substantially do not overlap, and have substantially no interfacial area.
    Type: Grant
    Filed: April 6, 2007
    Date of Patent: January 26, 2010
    Assignee: Xerox Corporation
    Inventors: Yiliang Wu, Beng S. Ong, Alphonsus Hon-Chung Ng
  • Patent number: 7642154
    Abstract: A biCMOS device including a bipolar transistor and a Polysilicon/Insulator/Polysilicon (PIP) capacitor is disclosed. A biCMOS device may have a relatively low series resistance at a bipolar transistor. A bipolar transistor may have a desirable amplification rate.
    Type: Grant
    Filed: October 27, 2006
    Date of Patent: January 5, 2010
    Assignee: Dongbu HiTek Co., Ltd.
    Inventor: Kwang Young Ko
  • Patent number: 7636256
    Abstract: A semiconductor memory device includes a memory cell string provided on a semiconductor substrate, and a first select transistor including a gate insulation film, which is provided on the semiconductor substrate having a recess structure which is lower, only at a central portion thereof, than the semiconductor substrate on which the memory cell string is provided, and a gate electrode provided on the gate insulation film, the first select transistor selecting the memory cell string.
    Type: Grant
    Filed: October 9, 2007
    Date of Patent: December 22, 2009
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Kenji Gomikawa, Kenji Sawamura, Mitsuhiro Noguchi
  • Publication number: 20090309167
    Abstract: Embodiments relate to a bipolar transistor that includes a body region having a fin structure. At least one terminal region may be formed over at least a portion of the body region. The at least one terminal region may be formed as an epitaxially grown region. Embodiments also relate to a vertically integrated electronic device that includes a first terminal region, a second terminal region and a third terminal region. The second terminal region may be arranged over at least a portion of the third terminal region, and at least two of the first, second and third terminal regions may be formed as epitaxially grown regions.
    Type: Application
    Filed: June 12, 2008
    Publication date: December 17, 2009
    Inventors: Christian Russ, Christian Pacha, Snezana Jenei, Klaus Schruefer
  • Publication number: 20090278205
    Abstract: A high voltage BICMOS device and a method for manufacturing the same, which may improve the reliability of the device by securing a distance between adjacent DUF regions, are provided. The high voltage BICMOS device includes: a reverse diffusion under field (DUF) region formed by patterning a predetermined region of a semiconductor substrate; a diffusion under field (DUF) region formed in the substrate adjacent to the reverse DUF region; a spacer formed at a sidewall of the reverse DUF region; an epitaxial layer formed on an entire surface of the substrate; and a well region formed in contact with the DUF region.
    Type: Application
    Filed: July 20, 2009
    Publication date: November 12, 2009
    Inventor: Kwang Young KO
  • Patent number: 7605431
    Abstract: The present invention provides several embodiments with layout patterns for ESD protection. An apparatus with a layout pattern may be configured to protect I/O pads or the power rail. The layout pattern may designed to increase the current paths for ESD stress currents. For example, more rings may be applied. The present invention also provides circuit embodiments for ESD protection. According to one embodiment, an ESD protection circuit comprising four parasitic BJTs may be configured to protect the I/O pads or the power rail. More BJTs or resistors may be used to increase the current paths for ESD stress currents. Several variations and modifications may be made by changing the doping profiles of the doped regions.
    Type: Grant
    Filed: September 20, 2006
    Date of Patent: October 20, 2009
    Assignee: Himax Technologies Limited
    Inventor: Tung-Yang Chen
  • Patent number: 7569894
    Abstract: A semiconductor device includes a plurality of PMOS transistors formed on a semiconductor substrate; and a plurality of NMOS transistors formed on the semiconductor substrate. The plurality of PMOS transistors are electrically isolated from each other by a device isolation structure formed in the semiconductor substrate. The plurality of NMOS transistors are continuously formed in a first direction such that a sequence of N-type diffusion layers of the plurality of NMOS transistors extends in the first direction. One of the plurality of PMOS transistors and one of the plurality of NMOS transistors share a gate electrode.
    Type: Grant
    Filed: May 16, 2006
    Date of Patent: August 4, 2009
    Assignee: NEC Electronics Corporation
    Inventor: Fumiaki Suzuki
  • Patent number: 7560782
    Abstract: An integrated transistor device is formed in a chip of semiconductor material having an electrical-insulation region delimiting an active area accommodating a bipolar transistor of vertical type and a MOSFET of planar type, contiguous to one another. The active area accommodates a collector region; a bipolar base region contiguous to the collector region; an emitter region within the bipolar base region; a source region, arranged at a distance from the bipolar base region; a drain region; a channel region arranged between the source region and the drain region; and a well region. The drain region and the bipolar base region are contiguous and form a common base structure shared by the bipolar transistor and the MOSFET. Thereby, the integrated transistor device has a high input impedance and is capable of driving high currents, while only requiring a small integration area.
    Type: Grant
    Filed: November 27, 2006
    Date of Patent: July 14, 2009
    Inventors: Fabio Pellizzer, Paolo Giuseppe Cappelletti
  • Publication number: 20090159982
    Abstract: A Bi-CMOS semiconductor device and method for manufacturing the same are provided. An n-well can be formed in a semiconductor substrate, and an NMOS transistor can be provided on the substrate separated from the n-well by a device isolation layer. An NPN bipolar transistor can be formed using the n-well. In particular, a collector contact region and a p-base region can be provided in the n-well. In addition, a base contact region and an emitter contact region can be disposed in the p-base region. A silicide is provided on the source and drain regions and the gate of the NMOS transistor, and the base contact region of the NPN bipolar transistor.
    Type: Application
    Filed: October 3, 2008
    Publication date: June 25, 2009
    Inventor: Yeo Cho YOON
  • Publication number: 20090152643
    Abstract: A semiconductor structure is provided. The semiconductor structure comprises a substrate, a first metal-oxide-semiconductor (MOS), a second MOS, a first semiconductor region, and a second semiconductor region. The first and the second MOSs are formed on the substrate. The first semiconductor region is formed between the substrate and the first MOS. The second semiconductor region is formed between the substrate and the second MOS. The first semiconductor region and the second semiconductor region isolate the first MOS from the second MOS.
    Type: Application
    Filed: March 10, 2008
    Publication date: June 18, 2009
    Inventors: Mine-Yuan Huang, Li-Hung Chi
  • Patent number: 7547948
    Abstract: A method of manufacturing a CMOS-BJT semiconductor device comprises the steps of: forming a collector region of a first conductivity type and a first well of the first conductivity type, simultaneously in a semiconductor substrate; forming a second well of a second conductivity type opposite to said first conductivity type, in the semiconductor substrate; forming a base region of the second conductivity type in the collector region; forming first and second insulated gate structure on said first and second wells, and a junction protection structure having same constituent elements as said insulated gate structures on said base region; and forming second source/drain regions of the first conductivity type in said second well, and an emitter region of the first conductivity type in the base region, simultaneously, with an emitter-base junction reaching the principal surface below said junction protection structure.
    Type: Grant
    Filed: March 8, 2005
    Date of Patent: June 16, 2009
    Assignee: Yamaha Corporation
    Inventors: Takayuki Kamiya, Kunihiko Mitsuoka
  • Publication number: 20090127631
    Abstract: An n-type buried diffusion layer is formed on the surface layer of the prescribed area of a p-type silicon substrate, and a p-type first high-concentration isolation diffusion layer is formed in the silicon substrate so as to surround the buried diffusion layer. An n-type epitaxial layer is formed on the silicon substrate, the buried diffusion layer, and the first high-concentration isolation diffusion layer. A p-type second high-concentration isolation diffusion layer is formed in the epitaxial layer on the first high-concentration isolation diffusion layer. A p-type low-concentration isolation diffusion layer for isolating the epitaxial layer into a plurality of island regions is formed in the epitaxial layer on the second high-concentration isolation diffusion layer.
    Type: Application
    Filed: November 18, 2008
    Publication date: May 21, 2009
    Applicant: RENESAS TECHNOLOGY CORP.
    Inventor: Satoshi RITTAKU
  • Publication number: 20090127629
    Abstract: NPN and PNP bipolar junction transistors are formed in a semiconductor substrate material in a double polysilicon CMOS process flow in a manner that allows the collectors of both of the npn and pnp bipolar transistors to be biased differently than the bias that is placed on the semiconductor substrate material.
    Type: Application
    Filed: November 15, 2007
    Publication date: May 21, 2009
    Inventor: Zia Alan Shafi
  • Publication number: 20090127630
    Abstract: An integrated semiconductor structure and a method for fabricating an integrated semiconductor structure in a bulk semiconductor wafer.
    Type: Application
    Filed: June 12, 2008
    Publication date: May 21, 2009
    Applicant: Texas Instruments Incorporated
    Inventors: Scott Balster, Badih El-Kareh, Hiroshi Yasuda
  • Patent number: 7521757
    Abstract: A semiconductor device includes a semiconductor substrate which has first and second principal surface regions; an insulated gate structure which is formed in the first principal surface region; a back surface region semiconductor layer which is formed in the second principal surface region and has a thickness of at most 5 ?m; an outermost metal film; and a back surface electrode which is formed in the second principal surface region between the back surface region semiconductor layer and the outermost metal film and which is composed of a plurality of films which are laminated and include a stress relaxation film so that false judgment of chip quality based on leakage current measurements during manufacturing is reduced particularly when dust is present and skews leakage current measurements due to strain on the wafer and the piezoelectric effect produced.
    Type: Grant
    Filed: June 21, 2007
    Date of Patent: April 21, 2009
    Assignee: Fuji Electric Device Technology Co., Ltd.
    Inventors: Takashi Kobayashi, Koji Sasaki, Yasuharu Mikoshiba, Masahiro Kato
  • Patent number: RE41477
    Abstract: An N type buried layer is formed, in one embodiment, by a non selective implant on the surface of a wafer and later diffusion. Subsequently, the wafer is masked and a selective P type buried layer is formed by implant and diffusion. The coefficient of diffusion of the P type buried layer dopant is greater than the N type buried layer dopant so that connections can be made to the P type buried layer by P wells which have a lower dopant concentration than the N buried layer.
    Type: Grant
    Filed: October 5, 2004
    Date of Patent: August 10, 2010
    Inventor: James D. Beasom