Combined With Bipolar Transistor Patents (Class 257/370)
  • Patent number: 7109551
    Abstract: A semiconductor structure with device trench and a semiconductor device in the device trench, that enables realization of high integration, lowered on-resistance, reduction in switching losses and a high operation speed in a semiconductor device provided with a lateral IGBT, and that prevents malfunctions such as latchup when IGBTs or an IGBT and CMOS devices are integrated together. The structure includes an SOI substrate having a supporting substrate, an oxide film and a p?-semiconductor layer. An island-like element-forming region is isolated by a trench isolation region from surroundings. The trench isolation region includes an isolation trench with an insulation film on its inner wall. The device trench is formed in the element-forming region. A gate electrode is formed with a gate insulator film in the device trench. A collector region and an emitter region outside are provided respectively on the bottom and the outside of the device trench.
    Type: Grant
    Filed: August 27, 2004
    Date of Patent: September 19, 2006
    Assignee: Fuji Electric Holdings Co., Ltd.
    Inventors: Akio Sugi, Naoto Fujishima
  • Patent number: 7091554
    Abstract: A semiconductor device with high turn off capability includes a plurality of stripe trench lines which are provided in each of adjacent cell regions of a semiconductor layer in parallel and extended from one cell region toward the other cell region, a gate insulating film formed in each of the trench lines, and a gate electrode embedded in each of the trench lines with the gate insulating film interposed therebetween. In this semiconductor device, in each of the cell regions, part of adjacent ends of the plurality of trench lines on a side of the other cell region are connected to each other by connecting portions, and portions between the remaining adjacent ends are open. Moreover, at least one of the connecting portions of one cell region faces one of the open portions of the other cell region.
    Type: Grant
    Filed: December 22, 2003
    Date of Patent: August 15, 2006
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Hiroki Muraoka, Hidetoshi Nakanishi, Tetsujiro Tsunoda, Shinichi Umekawa
  • Patent number: 7071516
    Abstract: A PMOS transistor (Q2) provided for developing a short circuit between the base and emitter of an N-type IGBT during turn-OFF includes a P diffusion region (5), a P diffusion region (6), and a conductive film (10) and a second gate electrode (15) provided via a gate oxide film (21) on a surface of an N? epitaxial layer (2) between the P diffusion regions (5 and 6). The gate oxide film (21) is formed in a thickness having a gate breakdown voltage higher than the element breakdown voltage of a typical field oxide film and the like.
    Type: Grant
    Filed: June 15, 2004
    Date of Patent: July 4, 2006
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventor: Tomohide Terashima
  • Patent number: 7057240
    Abstract: A semiconductor circuit configuration is described, in particular for ignition applications, having a semiconductor power switching device which has a first main terminal, a second main terminal and a control terminal; a clamping diode device which is switched between the first main terminal and the control terminal for clamping an external voltage (VA) which is applied at the first main terminal; the clamping diode device having a first part with a first clamp voltage and a second part with a second clamp voltage (VKL?), the second part being connected in series with the first part; a controllable semiconductor switching device which is connected in parallel with the first part for controllable bridging of the first part, so that either the sum (VKL) of the first and the second clamp voltages, or the second clamp voltage (VKL?) is provided for clamping the external voltage (VA) applied at the first main terminal; and a control circuit for controlling the controllable semiconductor switching device as a funct
    Type: Grant
    Filed: September 30, 2002
    Date of Patent: June 6, 2006
    Assignee: Robert Bosch GmbH
    Inventors: Rainer Topp, Horst Meinders, Wolfgang Feiler
  • Patent number: 7026690
    Abstract: The invention includes BIFETRAM devices. Such devices comprise a bipolar transistor in combination with a field effect transistor (FET) in a three-dimensional stacked configuration. The memory devices can be incorporated within semiconductor-on-insulator (SOI) constructions. The base region of the bipolar device can be physically and electrically connected to one of the source/drain regions of the FET to act as a storage node for the memory cell. The semiconductor material of the SOI constructions can comprise Si/Ge, and the active region of the FET can extend into the Si/Ge. The SOI constructions can be formed over any of a number of substrates, including, for example, semiconductive materials, glass, aluminum oxide, silicon dioxide, metals and/or plastics.
    Type: Grant
    Filed: February 12, 2003
    Date of Patent: April 11, 2006
    Assignee: Micron Technology, Inc.
    Inventor: Arup Bhattacharyya
  • Patent number: 7026211
    Abstract: A semiconductor component having smooth, void-free conductive layers and a method for manufacturing the semiconductor component. Surface features such as gate structures are formed on a semiconductor substrate. A layer of insulating material is formed on the gate structures and a layer of polysilicon is formed on the layer of insulating material. The layer of polysilicon is annealed in a hydrogen ambient to redistribute the silicon atoms of the polysilicon layer. Redistribution of the atoms fills voids that may be present in the layer of polysilicon and smoothes the surface of the layer of polysilicon. Another layer of polysilicon is formed over the annealed layer of polysilicon. This polysilicon layer is annealed in a hydrogen ambient to redistribute the silicon atoms and smooth the surface of the polysilicon layer, thereby forming a subsequently annealed polysilicon layer. Control gate structures are formed from the subsequently annealed polysilicon layer.
    Type: Grant
    Filed: March 8, 2004
    Date of Patent: April 11, 2006
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Rinji Sugino, Joong S. Jeon, Robert B. Ogle, Jr.
  • Patent number: 7023055
    Abstract: A method in which semiconductor-to-semiconductor direct wafer bonding is employed to provide a hybrid substrate having semiconductor layers of different crystallographic orientations that are separated by a conductive interface is provided. Also provided are the hybrid substrate produced by the method as well as using the direct bonding method to provide an integrated semiconductor structure in which various CMOS devices are built upon a surface orientation that enhances device performance.
    Type: Grant
    Filed: October 29, 2003
    Date of Patent: April 4, 2006
    Assignee: International Business Machines Corporation
    Inventors: Meikei Ieong, Alexander Reznicek, Min Yang
  • Patent number: 7023053
    Abstract: A differential transistor pair comprises a plurality of transistor cells in a substrate. Each cell comprises first drain regions at the respective edge of the cell, and a second drain region in between. Source regions are located between the respective first drain region and the second drain region. First gate regions are located between the respective first drain region and the source regions, and second gate regions are located between the source regions and the second drain region. The first drain regions of all cells are interconnected to a common first drain terminal, and the second drain region of all cells are interconnected to a common second drain terminal. The first gate regions of all cells are interconnected to a common first gate terminal, and the second gate regions of all cells are interconnected to a common second gate terminal.
    Type: Grant
    Filed: May 19, 2004
    Date of Patent: April 4, 2006
    Assignee: Infineon Technologies AG
    Inventors: Johan Sjöström, Torkel Arnborg
  • Patent number: 7015551
    Abstract: A semiconductor device (100) according to the present invention comprises a vertical PNP bipolar transistor (20), an NMOS transistor (50) and a PMOS transistor (60) that are of high dielectric strength, and a P-type semiconductor substrate 1, as shown in FIG. 2. A substrate isolation layer (21) of the PNP bipolar transistor (20), a drain buried layer (51) of the NMOS transistor (50), and a back gate buried layer (61) of the PMOS transistor (60) are formed simultaneously by selectively implanting N-type impurities, such as phosphorous, in the semiconductor substrate (1). This invention greatly contributes to curtailing the processes of fabricating BiCMOS ICs and the like including vertical bipolar transistors with easily controllable performance characteristics, such as a current amplification factor, and MOS transistors with high dielectric strength and makes even more miniaturization of such ICs achievable.
    Type: Grant
    Filed: April 7, 2005
    Date of Patent: March 21, 2006
    Assignee: Sony Corporation
    Inventors: Kenichi Ookubo, Hideki Mori, Shigeru Kanematsu
  • Patent number: 7009259
    Abstract: A semiconductor device (100) according to the present invention comprises a vertical PNP bipolar transistor (20), an NMOS transistor (50) and a PMOS transistor (60) that are of high dielectric strength, and a P-type semiconductor substrate 1, as shown in FIG. 2. A substrate isolation layer (21) of the PNP bipolar transistor (20), a drain buried layer (51) of the NMOS transistor (50), and a back gate buried layer (61) of the PMOS transistor (60) are formed simultaneously by selectively implanting N-type impurities, such as phosphorous, in the semiconductor substrate (1). This invention greatly contributes to curtailing the processes of fabricating BiCMOS ICs and the like including vertical bipolar transistors with easily controllable performance characteristics, such as a current amplification factor, and MOS transistors with high dielectric strength and makes even more miniaturization of such ICs achievable.
    Type: Grant
    Filed: April 7, 2005
    Date of Patent: March 7, 2006
    Assignee: Sony Corporation
    Inventors: Kenichi Ookubo, Hideki Mori, Shigeru Kanematsu
  • Patent number: 6995432
    Abstract: A MIS type semiconductor device and a method for fabricating the same characterized in that impurity regions are selectively formed on a semiconductor substrate or semiconductor thin film and are activated by radiating laser beams or a strong light equivalent thereto from above so that the laser beams or the equivalent strong light are radiated onto the impurity regions and on an boundary between the impurity region and an active region adjoining the impurity region.
    Type: Grant
    Filed: November 22, 2002
    Date of Patent: February 7, 2006
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Yasuhiko Takemura
  • Patent number: 6995435
    Abstract: Briefly, in accordance with one embodiment of the invention, an integrated circuit has a voltage generator that selectively increases the voltage potential on the channel region of a transistor relative to the source region of the transistor. The voltage potential may be provided to a diffusion region in the well regions with transistors.
    Type: Grant
    Filed: August 24, 2004
    Date of Patent: February 7, 2006
    Assignee: Intel Corporation
    Inventor: Mark E. Schuelein
  • Patent number: 6982491
    Abstract: A process for fabricating an integrated circuit package includes: providing a substrate having conductive traces therein, the substrate including a cavity therein; mounting a semiconductor die to a first surface of the substrate, in a flip-chip orientation such that a sensor portion of the semiconductor die is aligned with the cavity and conductive interconnects connect pads of the semiconductor die to the conductive traces of the substrate; filling an area surrounding the interconnects with an underfill material; and mounting a plurality of conductive balls on the first surface of the substrate and in electrical connection with the conductive traces such that ones of the conductive balls are connected to ones of the pads of the semiconductor die via the conductive traces.
    Type: Grant
    Filed: January 20, 2004
    Date of Patent: January 3, 2006
    Assignee: ASAT Ltd.
    Inventors: Chun Ho Fan, Sadak Thamby Labeeb, Lap Keung Chow
  • Patent number: 6974999
    Abstract: It is an object to suppress a change in a characteristic of a semiconductor device with a removal of a hard mask while making the most of an advantage of a gate electrode formed by using the hard mask. A gate electrode (3) is formed by etching using a hard mask as a mask and the hard mask remains on an upper surface of the gate electrode (3) at a subsequent step. In the meantime, the upper surface of the gate electrode (3) can be therefore prevented from being unnecessarily etched. The hard mask is removed after ion implantation for forming a source-drain region. Consequently, the influence of the removal of the hard mask on a characteristic of a semiconductor device can be suppressed. In that case, moreover, a surface of a side wall (4) is also etched by a thickness of (d) so that an exposure width of an upper surface of the source-drain region is increased. After the removal of the hard mask, it is easy to salicide the gate electrode (3) and to form a contact on the gate electrode (3).
    Type: Grant
    Filed: October 7, 2002
    Date of Patent: December 13, 2005
    Assignee: Renesas Technology Corp.
    Inventor: Tsuyoshi Sugihara
  • Patent number: 6972466
    Abstract: Complementary metal-oxide-semiconductor (CMOS) integrated circuits with bipolar transistors and methods for fabrication are provided. A bipolar transistor may have a lightly-doped base region. To reduce the resistance associated with making electrical contact to the lightly-doped base region, a low-resistance current path into the base region may be provided. The low-resistance current path may be provided by a base conductor formed from heavily-doped epitaxial crystalline semiconductor. Metal-oxide-semiconductor (MOS) transistors with narrow gates may be formed on the same substrate as bipolar transistors. The MOS gates may be formed using a self-aligned process in which a patterned gate conductor layer serves as both an implantation mask and as a gate conductor. A base masking layer that is separate from the patterned gate conductor layer may be used as an implantation mask for defining the lightly-doped base region.
    Type: Grant
    Filed: February 23, 2004
    Date of Patent: December 6, 2005
    Assignee: Altera Corporation
    Inventors: Minchang Liang, Yow-Juang Liu, Fangyun Richter
  • Patent number: 6972460
    Abstract: A semiconductor device including a drift layer of a first conductivity type formed on a surface of a semiconductor substrate. A surface of the drift layer has a second area positioned on an outer periphery of a first area. A cell portion formed in the first area includes a first base layer of a second conductivity type, a source layer and a control electrode formed in the first base layer and the source layer. The device also includes a terminating portion formed in the drift layer including a second base layer of a second conductivity type, an impurity diffused layer of a second conductivity type, and a metallic compound whose end surface on the terminating portion side is positioned on the cell portion side away from the end surface of the impurity diffused layer on the terminal portion side.
    Type: Grant
    Filed: October 8, 2003
    Date of Patent: December 6, 2005
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Satoshi Aida, Shigeo Kouzuki, Masaru Izumisawa, Hironori Yoshioka
  • Patent number: 6965151
    Abstract: Structures for providing devices that include resistive paths specifically designed to provide a predetermined resistance between the bulk material of the device and a well tie contact. By providing a resistive path, an equivalent RC circuit is introduced to the device that allows the bulk material potential to track the gate potential, thereby advantageously lowering the threshold voltage as the device turns on and raising the threshold voltage as the device turns off. In addition, the introduction of the resistive path also allows the bulk material potential to be controlled and stabilize at an equilibrium potential between switching events.
    Type: Grant
    Filed: March 20, 2003
    Date of Patent: November 15, 2005
    Assignee: Sun Microsystems, Inc.
    Inventor: James B. Burr
  • Patent number: 6965133
    Abstract: Methods for fabricating a heterojunction bipolar transistor having a raised extrinsic base is provided in which the base resistance is reduced by forming a silicide atop the raised extrinsic base that extends to the emitter region in a self-aligned manner. The silicide formation is incorporated into a BiCMOS process flow after the raised extrinsic base has been formed. The present invention also provides a heterojunction bipolar transistor having a raised extrinsic base and a silicide located atop the raised extrinsic base. The silicide atop the raised extrinsic base extends to the emitter in a self-aligned manner. The emitter is separated from the silicide by a spacer.
    Type: Grant
    Filed: March 13, 2004
    Date of Patent: November 15, 2005
    Assignee: International Business Machines Corporation
    Inventors: Peter J. Geiss, Marwan H. Khater, Qizhi Liu, Randy W. Mann, Robert J. Purtell, BethAnn Rainey, Jae-Sung Rieh, Andreas D. Stricker
  • Patent number: 6958506
    Abstract: Methods of forming front-end-of the line (FEOL) capacitors such as polysilicon-polysilicon capacitors and metal-insulator-silicon capacitors are provided that are capable of incorporating a high-dielectric constant (k of greater than about 8) into the capacitor structure. The inventive methods provide high capacitance/area devices with low series resistance of the top and bottom electrodes for high frequency responses. The inventive methods provide a significant reduction in chip size, especially in analog and mixed-signal applications where large areas of capacitance are used.
    Type: Grant
    Filed: October 17, 2003
    Date of Patent: October 25, 2005
    Assignee: International Business Machines Corporation
    Inventors: Evgeni P. Gousev, Harald F. Okorn-Schmidt, Arne W. Ballantine, Douglas A. Buchanan, Eduard A. Cartier, Douglas D. Coolbaugh
  • Patent number: 6952027
    Abstract: A semiconductor integrated circuit device includes a semiconductor region of a first conductivity type. A first insulated-gate field effect transistor having a source/drain region of a second conductivity type connected to an output terminal is formed on the semiconductor region. Further, a semiconductor region of a second conductivity type connected to the gate of the transistor is formed adjacent to the source/drain region of the transistor on the semiconductor region.
    Type: Grant
    Filed: November 28, 2003
    Date of Patent: October 4, 2005
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Makoto Takizawa
  • Patent number: 6949424
    Abstract: A method of forming a bipolar transistor device, and more particularly a vertical poly-emitter PNP transistor, as part of a BiCMOS type manufacturing process is disclosed. The formation of the PNP transistor during a CMOS/DMOS fabrication process requires merely one additional mask to facilitate formation of a very small emitter in a portion of an N-type surface layer of a double diffused well (DWELL). Unlike conventional PNP transistors, a separate mask is not required to establish the base of the transistor as the transistor base is formed from a portion of the double diffused well and the DWELL includes a P-type body layer formed via implantation through the same opening in the same mask utilized to establish the N-type surface layer of the double diffused well. The base is also thin thus improving the transistor's frequency and gain.
    Type: Grant
    Filed: August 28, 2003
    Date of Patent: September 27, 2005
    Assignee: Texas Instruments Incorporated
    Inventor: Lily Springer
  • Patent number: 6949764
    Abstract: A bipolar transistor structure is described incorporating an emitter, base, and collector having a fully depleted region on an insulator of a Silicon-On-Insulator (SOI) substrate without the need for a highly doped subcollector to permit the fabrication of vertical bipolar transistors on semiconductor material having a thickness of 300 nm or less and to permit the fabrication of SOI BiCMOS. The invention overcomes the problem of requiring a thick semiconductor layer in SOI to fabricate vertical bipolar transistors with low collector resistance.
    Type: Grant
    Filed: November 19, 2004
    Date of Patent: September 27, 2005
    Assignee: International Business Machines Corporation
    Inventor: Tak Hung Ning
  • Patent number: 6930360
    Abstract: A semiconductor device having a semiconductor layer, includes: a first impurity atom having a covalent bond radius larger than a minimum radius of a covalent bond of a semiconductor constituent atom of a semiconductor layer; and a second impurity atom having a covalent bond radius smaller than a maximum radius of the covalent bond of the semiconductor constituent atom; wherein the first and second impurity atoms are arranged in a nearest neighbor lattice site location and at least one of the first and second impurity atoms is electrically active.
    Type: Grant
    Filed: July 1, 2003
    Date of Patent: August 16, 2005
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Jun Yamauchi, Nobutoshi Aoki
  • Patent number: 6930359
    Abstract: In a semiconductor device having a semiconductor element having a plurality of SOI-Si layers, the height of element isolation regions from the surface of the semiconductor substrate are substantially equal to each other. Alternatively, the element isolation regions are formed at the equal height on the semiconductor substrate and then a plurality of SOI-Si layers appropriately different in thickness are formed. In this manner, it is possible to obtain element isolation regions having substantially the same height from the semiconductor substrate and desired element regions having SOI-Si layers different in height. The thickness of a single crystalline silicon film (SOI-Si layer) may be appropriately changed by another method which includes depositing an amorphous silicon film and applying a heat processing to form an epi layer, and removing an unnecessary portion.
    Type: Grant
    Filed: March 24, 2004
    Date of Patent: August 16, 2005
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Yukihiro Ushiku
  • Patent number: 6924534
    Abstract: The invention is directed to reducing of the number of steps in a BiCMOS process. A first N-well 3A and a second N-well 3B are formed deeply on a surface of a P-type semiconductor substrate. A first P-well 4A is formed in the first N-well 3A, and an N-channel MOS transistor is formed in the first P-well 4A. The second N-well 3B is used as a collector of a vertical NPN bipolar transistor. A second P-well 4B is formed in the second N-well 3B. The second P-well 4B is formed simultaneously with the first P-well 4A. The second P-well 4B is used as a base of the vertical NPN bipolar transistor. An N+ emitter layer and a P+ base electrode layer of the vertical NPN bipolar transistor are formed on a surface of the second P-well 4B.
    Type: Grant
    Filed: April 2, 2004
    Date of Patent: August 2, 2005
    Assignee: Sanyo Electric Co., Ltd.
    Inventors: Kazutomo Goshima, Toshiyuki Ohkoda, Toshimitsu Taniguchi
  • Patent number: 6917080
    Abstract: A bipolar transistor is provided, which is low in collector-to-emitter saturation voltage, small in size and to be manufactured by a reduced number of processes, and a semiconductor device formed with such a bipolar transistor and a MOS transistor on a same substrate. A high concentration region for reducing the collector-to-emitter saturation voltage VCE(sat) is formed in a manner surrounding a base region of an NPN transistor. This high concentration region is not necessarily formed in such a depth as reaching a buried layer, and can be reduced in the spread in a lateral direction. Because a high concentration region can be formed in a same process as upon forming source and drain regions for an NMOS transistor to be formed together with an NPN transistor on a same silicon substrate, it is possible to omit a diffusion process exclusive for forming a high concentration region and hence to manufacture a semiconductor device through a reduced number of processes.
    Type: Grant
    Filed: March 26, 2003
    Date of Patent: July 12, 2005
    Assignee: Rohm Co., Ltd.
    Inventor: Masahiro Sakuragi
  • Patent number: 6914305
    Abstract: An output circuit of an integrated circuit device includes first and second MOS transistors including respective spaced apart pairs of source and drain regions in a substrate, arranged such that respective first and second channels of the first and second MOS transistors are laterally displaced with respect to one another. The output circuit further includes an isolation region in the substrate, disposed between the first and second MOS transistors. A first conductor connects the source region of the first MOS transistor to a power supply node. A second conductor connects the drain region of the first MOS transistor to the source region of the second MOS transistor. A third conductor connects the drain region of the second MOS transistor to an external signal pad of the integrated circuit device. The isolation region may comprise first and second insulation regions surrounding respective ones of the first and second MOS transistors, and a guard ring surrounding and separating the insulation regions.
    Type: Grant
    Filed: September 23, 2002
    Date of Patent: July 5, 2005
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Gue-Hyung Kwon, Eun-Kyoung Kwon
  • Patent number: 6911681
    Abstract: Disclosed is a bipolar complementary metal oxide semiconductor (BiCMOS) or NPN/PNP device that has a collector, an intrinsic base above the collector, shallow trench isolation regions adjacent the collector, a raised extrinsic base above the intrinsic base, a T-shaped emitter above the extrinic base, spacers adjacent the emitter, and a silicide layer that is separated from the emitter by the spacers.
    Type: Grant
    Filed: April 14, 2004
    Date of Patent: June 28, 2005
    Assignee: International Business Machines Corporation
    Inventors: Peter J. Geiss, Alvin J. Joseph, Qizhi Liu, Bradley A. Orner
  • Patent number: 6909150
    Abstract: An integrated circuit having improved isolation includes a first circuit section formed in a substrate and a second circuit section formed in the substrate, the second circuit section being spaced laterally from the first circuit section. The integrated circuit further includes an isolation buried layer formed under at least a portion of the first circuit section, and a conductive layer formed on a surface of the substrate and electrically coupled to the buried layer and to a voltage reference, the conductive layer reducing an effective lateral resistance of the buried layer, whereby an isolation between the first and second circuit sections is increased. A second isolation buried layer can be formed under at least a portion of the second circuit section as well to provide further isolation between the first and second circuit sections.
    Type: Grant
    Filed: July 23, 2001
    Date of Patent: June 21, 2005
    Assignee: Agere Systems Inc.
    Inventor: Paul C. Davis
  • Patent number: 6906363
    Abstract: A semiconductor device raises the maximum oscillation frequency fmax of the bipolar transistor. The stopper dielectric layer is formed on the substrate to cover the transistor section and the isolation dielectric. The interlayer dielectric layer is formed on the stopper dielectric layer. The base contact plug, which is formed in the interlayer dielectric layer, is located over the isolation dielectric in such a way as to contact the graft base region near its bottom end corner. Therefore, the base contact needs not to entirely overlap with the graft base region, which means that the graft base region can be narrowed without increasing the base resistance Rb and that the collector-base capacitance Ccb is reduced. Also, electrical short circuit between the graft base region and the collector region can be effectively suppressed by the stopper dielectric layer.
    Type: Grant
    Filed: May 28, 2002
    Date of Patent: June 14, 2005
    Assignee: NEC Electronics Corporation
    Inventor: Hisamitsu Suzuki
  • Patent number: 6903424
    Abstract: A semiconductor device (100) according to the present invention comprises a vertical PNP bipolar transistor (20), an NMOS transistor (50) and a PMOS transistor (60) that are of high dielectric strength, and a P-type semiconductor substrate 1, as shown in FIG. 2. A substrate isolation layer (21) of the PNP bipolar transistor (20), a drain buried layer (51) of the NMOS transistor (50), and a back gate buried layer (61) of the PMOS transistor (60) are formed simultaneously by selectively implanting N-type impurities, such as phosphorous, in the semiconductor substrate (1). This invention greatly contributes to curtailing the processes of fabricating BiCMOS ICs and the like including vertical bipolar transistors with easily controllable performance characteristics, such as a current amplification factor, and MOS transistors with high dielectric strength and makes even more miniaturization of such ICs achievable.
    Type: Grant
    Filed: February 3, 2003
    Date of Patent: June 7, 2005
    Assignee: Sony Corporation
    Inventors: Kenichi Ookubo, Hideki Mori, Shigeru Kanematsu
  • Patent number: 6881976
    Abstract: A BiCMOS semiconductor, and manufacturing method therefore, is provided. A semiconductor substrate having a collector region is provided. A pseudo-gate is formed over the collector region. An emitter window is formed in the pseudo-gate to form an extrinsic base structure. An undercut region beneath a portion of the pseudo-gate is formed to provide an intrinsic base structure in the undercut region. An emitter structure is formed in the emitter window over the intrinsic base structure. An interlevel dielectric layer is formed over the semiconductor substrate, and connections are formed through the interlevel dielectric layer to the collector region, the extrinsic base structure, and the emitter structure. The intrinsic base structure comprises a compound semiconductive material such as silicon and silicon-germanium, or silicon-germanium-carbon, or combinations thereof.
    Type: Grant
    Filed: November 6, 2003
    Date of Patent: April 19, 2005
    Assignee: Chartered Semiconductor Manufacturing Ltd.
    Inventors: Jia Zhen Zheng, Lap Chan, Shao-fu Sanford Chu
  • Patent number: 6873018
    Abstract: The invention includes BIFETRAM devices. Such devices comprise a bipolar transistor in combination with a field effect transistor (FET) in a three-dimensional stacked configuration. The memory devices can be incorporated within semiconductor-on-insulator (SOI) constructions. The base region of the bipolar device can be physically and electrically connected to one of the source/drain regions of the FET to act as a storage node for the memory cell. The semiconductor material of the SOI constructions can comprise Si/Ge, and the active region of the FET can extend into the Si/Ge. The SOI constructions can be formed over any of a number of substrates, including, for example, semiconductive materials, glass, aluminum oxide, silicon dioxide, metals and/or plastics.
    Type: Grant
    Filed: November 4, 2003
    Date of Patent: March 29, 2005
    Assignee: Micron Technology, Inc.
    Inventor: Arup Bhattacharyya
  • Patent number: 6870227
    Abstract: A ESD protective device is proposed, including a vertical bipolar transistor connected as a diode, in which the contacting of the collector layer is designed highly resistive. The arrangement, while having a space-saving construction, has an increased snap-back voltage.
    Type: Grant
    Filed: April 14, 2000
    Date of Patent: March 22, 2005
    Assignee: Robert Bosch GmbH
    Inventors: Stephan Mettler, Steffi Lindenkreuz, Wolfang Wilkening
  • Patent number: 6864542
    Abstract: A method of manufacturing a bipolar transistor in a P-type substrate, including the steps of forming in the substrate a first N-type area; forming by epitaxy a first silicon layer; forming in this first layer, and substantially above the first area a second heavily-doped P-type area separate from the second area; forming at the periphery of this second area a third N-type area; forming by epitaxy a second silicon layer; forming a deep trench crossing the first and second silicon layers, penetrating into the substrate and laterally separating the second area from the third area; and performing an anneal such that the dopant of the third area is in continuity with that of the first area.
    Type: Grant
    Filed: March 4, 2003
    Date of Patent: March 8, 2005
    Assignee: STMicroelectronics S.A.
    Inventors: Yvon Gris, Thierry Schwartzmann
  • Patent number: 6855985
    Abstract: A family of semiconductor devices is formed in a substrate that contains no epitaxial layer. In one embodiment the family includes a 5V CMOS pair, a 12V CMOS pair, a 5V NPN, a 5V PNP, several forms of a lateral trench MOSFET, and a 30V lateral N-channel DMOS. Each of the devices is extremely compact, both laterally and vertically, and can be fully isolated from all other devices in the substrate.
    Type: Grant
    Filed: September 29, 2002
    Date of Patent: February 15, 2005
    Assignees: Advanced Analogic Technologies, Inc., Advanced Analogic Technologies (Hong Kong) Limited
    Inventors: Richard K. Williams, Michael E. Cornell, Wai Tien Chan
  • Patent number: 6852585
    Abstract: A semiconductor circuit arrangement includes a circuit element embedded in a semiconductor substrate of a first conductivity type in an integrated manner and is provided with at least one gate electrode and first and second terminal electrodes. The first terminal electrode includes a well region that is embedded in the semiconductor substrate and is of a second conductivity type which is opposite the first conductivity type. A sub-well region is embedded in the well region of the first terminal electrode and is of the second conductivity type and has a higher doping than said well region. The sub-well region is embedded in the surface of the substrate and ends without reaching a well region of the gate electrode which is of the first conductivity type.
    Type: Grant
    Filed: November 30, 2000
    Date of Patent: February 8, 2005
    Assignee: Infineon Technologies AG
    Inventors: Christian Herzum, Ulrich Krumbein, Karl-Heinz Mueller
  • Patent number: 6849871
    Abstract: A bipolar transistor structure is described incorporating an emitter, base, and collector having a fully depleted region on an insulator of a Silicon-On-Insulator (SOI) substrate without the need for a highly doped subcollector to permit the fabrication of vertical bipolar transistors on semiconductor material having a thickness of 300 nm or less and to permit the fabrication of SOI BiCMOS. The invention overcomes the problem of requiring a thick semiconductor layer in SOI to fabricate vertical bipolar transistors with low collector resistance.
    Type: Grant
    Filed: January 10, 2001
    Date of Patent: February 1, 2005
    Assignee: International Business Machines Corporation
    Inventor: Tak Hung Ning
  • Publication number: 20040256678
    Abstract: The invention is directed to reducing of the number of steps in a BiCMOS process. A first N-well 3A and a second N-well 3B are formed deeply on a surface of a P-type semiconductor substrate. A first P-well 4A is formed in the first N-well 3A, and an N-channel MOS transistor is formed in the first P-well 4A. The second N-well 3B is used as a collector of a vertical NPN bipolar transistor. A second P-well 4B is formed in the second N-well 3B. The second P-well 4B is formed simultaneously with the first P-well 4A. The second P-well 4B is used as a base of the vertical NPN bipolar transistor. An N+ emitter layer and a P+ base electrode layer of the vertical NPN bipolar transistor are formed on a surface of the second P-well 4B.
    Type: Application
    Filed: April 2, 2004
    Publication date: December 23, 2004
    Applicant: Sanyo Electric Co., Ltd.
    Inventors: Kazutomo Goshima, Toshiyuki Ohkoda, Toshimitsu Taniguchi
  • Patent number: 6833591
    Abstract: A method for fabricating a semiconductor device including a step of forming an interconnection having the upper surface covered with an insulation film on a base substrate, a step of sequentially depositing an insulation film and an insulation film on the base substrate with the interconnection formed on, a step of etching the insulation film with the insulation film as a stopper to form openings in a region containing a region where the interconnection is formed, and the step of etching the insulation film in the opening to form sidewall insulation films of the insulation film on the side walls of the interconnection and to form contact holes to be connected to the base substrate in alignment with the interconnection.
    Type: Grant
    Filed: August 12, 2003
    Date of Patent: December 21, 2004
    Assignee: Fujitsu Limited
    Inventor: Shunji Nakamura
  • Patent number: 6828635
    Abstract: An improved NPN bipolar transistor integratable with CMOS FET processing is achieved. The transistor is formed on a substrate using a CMOS process and one additional masking and implant step. The CMOS N wells are used to form the collector contacts (reachthrough) and the P wells are used to form the base. N doped third wells are formed under the N wells, P wells, and shallow trench isolation regions to provide subcollectors. Since the P wells are not implanted through the STI, basewidths are reduced and current gain is increased. Gate electrode masking elements, formed over the base, separate the emitter and base contact regions, improving the emitter-to-base breakdown voltage. The CMOS source/drain N type implants then form emitters in the emitter regions and ohmic contacts in the collector contacts. The source/drain P type implants form the ohmic base contacts to complete the bipolar transistor.
    Type: Grant
    Filed: September 4, 2003
    Date of Patent: December 7, 2004
    Assignee: Chartered Semiconductor Manufacturing Ltd.
    Inventors: Shesh Mani Panday, Alan Shafi, Yong Ju
  • Patent number: 6822289
    Abstract: A semiconductor device having a high source breakdown voltage and high performance and high reliability and a liquid jet apparatus are provided. In a semiconductor device having a switching element for flowing current through a load and a circuit for driving the switching element, respectively formed on the same substrate, the circuit has a source follower transistor for generating a drive voltage to be applied to a control electrode of the switching element, and the source region of the source follower transistor has a first doped region connected to the source electrode and a second doped region having an impurity concentration lower than that of the first doped region, the second doped region forming a pn junction with a semiconductor region forming a channel.
    Type: Grant
    Filed: February 20, 2003
    Date of Patent: November 23, 2004
    Assignee: Canon Kabushiki Kaisha
    Inventors: Hiraku Kozuka, Osamu Iketa, Mineo Shimotsusa, Takashi Morii
  • Publication number: 20040224461
    Abstract: A method of forming a quasi-self-aligned heterojunction bipolar transistor (HBT) that exhibits high-performance is provided. The method includes the use of a patterned emitter landing pad stack which serves to improve the alignment for the emitter-opening lithography and as an etch stop layer for the emitter opening etch. The present invention also provides an HBT that includes a raised extrinsic base having monocrystalline regions located beneath the emitter landing pad stack.
    Type: Application
    Filed: May 28, 2004
    Publication date: November 11, 2004
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: James S. Dunn, Natalie B. Feilchenfeld, Qizhi Liu, Andreas D. Stricker
  • Patent number: 6815779
    Abstract: An integrated circuit including a vertical power component having a terminal formed by a chip substrate of a first conductivity type, a control circuit thereof, the control circuit isolated from the substrate by an isolation region of a second conductivity type, and a protection structure against polarity inversion of a substrate potential. The protection structure includes a first bipolar transistor with an emitter connected to said isolation region and a collector connected to a reference potential input of the integrated circuit, a bias circuit for biasing the first bipolar transistor in a reverse saturated mode when the substrate potential is higher than the reference potential, and a second bipolar transistor with an emitter connected to the substrate and a base coupled to the isolation region for coupling the isolation region to the substrate through a high-impedance when the substrate potential is lower than the reference potential.
    Type: Grant
    Filed: February 4, 2000
    Date of Patent: November 9, 2004
    Assignee: STMicroelectronics S.r.l.
    Inventors: Antonino Torres, Sergio Tommaso Spampinato
  • Publication number: 20040217427
    Abstract: A semiconductor device includes first, second, and third wells. The first well is connected to a pad to which an external pin is connected and includes a first-type diffusion region that receives a well bias voltage. The second well is adjacent to the first well, and includes an insulating region and a second-type diffusion region outside the insulating region. The third well is adjacent to the second well and includes a first-type diffusion region that receives a first voltage. The insulating region inside the second well along with the first-type well diffusion region of the first well constitute a bipolar junction transistor that cuts off current flowing from the first well to the third well.
    Type: Application
    Filed: April 1, 2004
    Publication date: November 4, 2004
    Applicant: SAMSUNG ELECTRONICS CO., LTD
    Inventors: Soon-Hong Ahn, Jung-Hwa Lee
  • Patent number: 6812534
    Abstract: An SRAM comprises a memory cell including first and second access nMOS transistors, first and second driver nMOS transistors and first and second load pMOS transistors, polysilicon wires forming gates of the first and second access nMOS transistors and polysilicon wires extending in the same direction as the polysilicon wires for forming gates of the first and second driver nMOS transistors and gates of the first and second load pMOS transistors. The gate widths of the first and second access nMOS transistors and those of the first and second driver nMOS transistors are equalized with each other.
    Type: Grant
    Filed: February 13, 2003
    Date of Patent: November 2, 2004
    Assignee: Renesas Technology Corp.
    Inventors: Yoshiyuki Ishigaki, Tomohiro Hosokawa, Yukio Maki
  • Patent number: 6809400
    Abstract: This disclosure describes a structure for transistor devices formed from compound semiconductor materials; and particularly for heterojuntion bipolar transistors (HBTs); and more particularly for the collector structure of a double HBT (DHBT). The invention enables high output power at high frequency operation, of high frequency operation at high output power.
    Type: Grant
    Filed: March 14, 2003
    Date of Patent: October 26, 2004
    Inventors: Eric Harmon, Jerry Woodall, Hironori Tsukamoto, David Salzman
  • Patent number: 6806129
    Abstract: A method for forming a heterojunction bipolar transistor (HBT) includes forming an etch mask a top layer of the HBT to expose a portion of the emitter cap layer, and selectively etching the exposed portion of the emitter cap layer to (1) form a reentry feature and (2) to expose a portion of the emitter layer. The method further includes selectively etching the exposed portion of the emitter layer to expose a portion of the base layer, and forming a metal layer over the exposed portion of the base layer and the exposed portion of the emitter cap layer.
    Type: Grant
    Filed: May 9, 2003
    Date of Patent: October 19, 2004
    Assignee: Agilent Technologies, Inc.
    Inventors: Scott A. McHugo, Gregory N. DeBrabander
  • Patent number: 6806550
    Abstract: An evaluation configuration has a first MOS evaluation stage, an isolation stage, and a bipolar evaluation stage. The isolation stage is connected between the first MOS evaluation stage and the bipolar evaluation stage. The isolation stage isolates the first MOS evaluation stage from the bipolar evaluation stage. The evaluation configuration can reliably detect very small read signals and allows a high integration density.
    Type: Grant
    Filed: September 16, 2002
    Date of Patent: October 19, 2004
    Assignee: Infineon Technologies AG
    Inventors: Kurt Hoffmann, Oskar Kowarik
  • Patent number: 6803634
    Abstract: In the manufacturing process of a Bi-CMOS semiconductor device, which includes a CMOSFET and a bipolar transistor, the steps for forming a well region, source regions, and drain regions of the CMOSFET are also used for forming the bipolar transistor. One of the steps is used for introducing impurities of the same conductivity type in a surface of a base region of the bipolar transistor in order to form a high impurity concentration region in the surface. The high impurity concentration region is formed such that the distance between an emitter region of the bipolar transistor and the high impurity concentration region becomes 1 to 2 &mgr;m. The shift in device characteristics of the bipolar transistor is improved by the high impurity concentration region even if the impurity concentration is relatively low at the surface of the base region of the bipolar transistor.
    Type: Grant
    Filed: November 7, 2002
    Date of Patent: October 12, 2004
    Assignee: Denso Corporation
    Inventors: Takuya Okuno, Shoji Mizuno, Toshitaka Kanemaru