Abstract: A semiconductor device is provided with a first conductivity type semiconductor substrate (10); a voltage supplying terminal (26) arranged on the semiconductors substrate (10); one or more elements (6) which include a second conductivity type well section (22) and are arranged on the semiconductor substrate (10); a second conductivity type first conductive layer (21), which is a lower layer of the one or more elements (6), is in contact with the second conductivity type well section (22), and connects the second conductivity type well section (22) of the one or more elements (6) with the voltage supplying terminal (26); and a first conductivity type second conductive layer (11) formed in contact with a lower side of the first conductive layer (21).

Abstract: An object of the present invention is to mount both a RF circuit including an inductor formed therein and a digital circuit on a single chip. MOSFETs are formed on a semiconductor substrate 1 in regions isolated by an element isolation film 2. A plurality of low-permittivity insulator rods including a low-permittivity insulator embedded therein and penetrating a first interlevel dielectric film 4 to reach the internal of the silicon substrate are disposed in the RF circuit area 100. An inductor 40 is formed on the interlevel dielectric film in the RF circuit area by using multi-layered interconnects. A high-permeability isolation region in which a composite material including a mixture of high-permeability material and a low-permittivity material is formed in the region of the core of the inductor and periphery thereof.

Abstract: A method of manufacturing a metal-oxide-semiconductor (MOS) transistor device is disclosed. A gate dielectric layer is formed on an active area of a substrate. A gate electrode is patterned on the gate dielectric layer. The gate electrode has vertical sidewalls and a top surface. A liner is formed on the vertical sidewalls of the gate electrode. A nitride spacer is formed on the liner. An ion implanted is performed to form a source/drain region. After salicide process, an STI region that isolates the active area is recessed, thereby forming a step height at interface between the active area and the STI region. The nitride spacer is removed. A nitride cap layer that borders the liner is deposited. The nitride cap layer has a specific stress status.

Abstract: A method of optimally filling a through via within a through wafer via structure with a conductive metal such as, for example, W is provided. The inventive method includes providing a structure including a substrate having at least one aperture at least partially formed through the substrate. The at least one aperture of the structure has an aspect ratio of at least 20:1 or greater. Next, a refractory metal-containing liner such as, for example, Ti/TiN, is formed on bare sidewalls of the substrate within the at least one aperture. A conductive metal seed layer is then formed on the refractory metal-containing liner. In the invention, the conductive metal seed layer formed is enriched with silicon and has a grain size of about 5 nm or less. Next, a conductive metal nucleation layer is formed on the conductive metal seed layer. The conductive metal nucleation layer is also enriched with silicon and has a grain size of about 20 nm or greater.

Abstract: A semiconductor device may include, but is not limited to, a single crystal silicon diffusion layer, a polycrystal silicon conductor, and a diffusion barrier layer. The diffusion barrier layer separates the polycrystal silicon conductor from the single crystal silicon diffusion layer. The diffusion barrier layer prevents a diffusion of at least one of silicon-interstitial and silicon-vacancy between the single crystal silicon diffusion layer and the polycrystal silicon conductor.

Abstract: A non-volatile semiconductor memory device is disclosed, which comprises a memory cell unit including at least one memory cell transistor formed on a semiconductor substrate and having a laminated structure of a charge accumulation layer and a control gate layer, and a selection gate transistor one of the source/drain diffusion layer regions of which is connected to a bit line or a source line and the other of the source/drain diffusion layer regions of which is connected to the memory cell unit. The shape of the source diffusion layer region of the selection gate transistor is asymmetrical to the shape of the drain diffusion layer region thereof below the selection gate transistor.

Abstract: A pixel cell including a substrate having a top surface. A photo-conversion device is at a surface of the substrate and a trench is in the substrate adjacent the photo-conversion device. The trench has sidewalls and a bottom. At least one sidewall is angled less than approximately 85 degrees from the plane of the top surface of the substrate.

Abstract: A well isolation trenches for a CMOS device and the method for forming the same. The CMOS device includes (a) a semiconductor substrate, (b) a P well and an N well in the semiconductor substrate, (c) a well isolation region sandwiched between and in direct physical contact with the P well and the N well. The P well comprises a first shallow trench isolation (STI) region, and the N well comprises a second STI region. A bottom surface of the well isolation region is at a lower level than bottom surfaces of the first and second STI regions. When going from top to bottom of the well isolation region, an area of a horizontal cross section of the well isolation region is an essentially continuous function.

Abstract: An integrated power semiconductor device has an isolation structure having two or more isolation trenches, and one or more regions in between the isolation trenches, and a bias arrangement coupled to the regions to divide a voltage across the isolation structure between the isolation trenches. By dividing the voltage, the reverse breakdown voltage characteristics such as voltage level, reliability and stability can be improved for a given area of device, or for a given complexity of device, and avalanche breakdown at weaknesses in isolation structures can be reduced or avoided.

Abstract: A semiconductor device includes a semiconductor substrate having a cell region and a peripheral region. A cell array is defined within the cell region, the cell array having first, second, third, and fourth sides. A first decoder is defined within the peripheral region and provided adjacent to the first side of the cell array. A first isolation structure is formed at a first boundary region provided between the first side of the cell array and the peripheral region. A first dummy active region is formed at a second boundary region that is provided between the second side of the cell array and the peripheral region. The first isolation structure has a first portion that has a first depth and a second portion that has a second depth.

Abstract: The method of forming a semiconductor structure in a substrate comprises, forming a first trench with a first width We and a second trench with a second width Wc, wherein the first width We is larger than the second width Wc, depositing a protection material, lining the first trench, covering the substrate surface and filling the second trench and removing partially the protection material, wherein a lower portion of the second trench remains filled with the protection material.

Abstract: A semiconductor structure and a method of fabricating the same in which strain enhancement is achieved for both nFET and pFET devices is provided. In particular, the present invention provides at least one spacerless FET for stronger strain enhancement and defect reduction. The at least one spacerless FET can be a pFET, an nFET, or a combination thereof, with spacerless pFETs being particularly preferred since pFETs are generally fabricated to have a greater width than nFETs. The at least one spacerless FET allows to provide a stress inducing liner in closer proximity to the device channel than prior art structures including FETs having spacers. The spacerless FET is achieved without negatively affecting the resistance of the corresponding silicided source/drain diffusion contacts, which do not encroach underneath the spacerless FET.

Abstract: A trench is formed in the surface layer of a semiconductor substrate, surrounding an active region. A lower insulating film made of insulating material fills a lower region of the trench. An upper insulating film fills a region of the trench above the lower insulating film. The upper insulating film has therein a stress generating tensile strain in a surface layer of the active region.

Abstract: The present invention relates to an isolation film in a semiconductor device and method of forming the same. An isolation film is formed in a doped region of a peripheral region, in which the doped region is isolated from a deep well region of a cell region and the isolation film is thicker than an isolation film of the cell region so that a parasitic transistor is not generated and a leakage current can be prevented.

Abstract: A semiconductor device having a bipolar transistor improved with heat dissipation. A semiconductor device having bipolar transistors formed in a plurality of device forming regions electrically isolated from each other by device isolation trenches traversing the semiconductor layer, in which a device isolation trench for each of unit bipolar transistors connected in parallel is removed and the plurality of unit bipolar transistors connected in series are entirely surrounded with one device isolation trench.

Abstract: The present invention provides a FinFET transistor arrangement produced using a method with the steps: providing a substrate (106, 108); forming an active region (1) on the substrate a fin-like channel region (113b?; 113b?). Formation of the fin-like channel region (113b?; 113b?) has the following steps: forming a hard mask (S1-S4) on the active region (1); anisotropic etching of the active region (1) using the hard mask (S1-S4) forming STI trenches (G1-G5) having an STI oxide filling (9); polishing-back of the STI oxide filling (9); etching-back of the polished-back STI oxide filling (9); selective removal of components of the hard mask forming a modified hard mask (S1?-S4?); anisotropic etching of the active region (1) using the modified hard mask (S1?-S4?) forming widened STI trenches (G1?-G5?), the fin-like channel regions (113b?; 113b?) of the active region (1) remaining for each individual FinFET transistor.

Abstract: A MOSFET device includes a semiconductor substrate having an active region including storage node contact forming areas and a device isolation region and having a device isolation structure which is formed in the device isolation region to delimit the active region; screening layers formed in portions of the device isolation structure on both sides of the storage node contact forming areas of the active region; a gate line including a main gate which is located in the active region and a passing gate which is located on the device isolation structure; and junction areas formed in a surface of the active region on both sides of the main gate.

Abstract: The present invention is related to semiconductor device and method for manufacturing the same. In accordance with the semiconductor device and method for manufacturing the same, at least one opening extending between LDD regions and exposing a buried insulating layer is formed so that a gate electrode surrounds the surface of a channel region. This structure allows the formation of a relatively a thick channel region and decreases the sensitivity of characteristics of the device dependent upon the thickness of the channel region.

Abstract: Deep trench isolation structures and methods of formation thereof are disclosed. Several methods of and structures for increasing the threshold voltage of a parasitic transistor formed proximate deep trench isolation structures are described, including implanting a channel stop region into the bottom surface of the deep trench isolation structures, partially filling a bottom portion of the deep trench isolation structures with an insulating material, and/or filling at least a portion of the deep trench isolation structures with a doped polysilicon material.

Abstract: A semiconductor structure and related method for fabrication thereof includes a liner layer interposed between: (1) a pedestal shaped channel region within a semiconductor substrate; and (2) a source region and a drain region within a semiconductor material layer located upon the liner layer and further laterally separated from the pedestal shaped channel region within the semiconductor substrate. The liner layer comprises an active doped silicon carbon material. The semiconductor material layer may comprises a semiconductor material other than a silicon carbon semiconductor material. The semiconductor material layer may alternatively comprise a silicon carbon semiconductor material having an opposite dopant polarity and lower carbon content in comparison with the liner layer. Due to presence of the silicon carbon material, the liner layer inhibits dopant diffusion therefrom into the pedestal shaped channel region.

Abstract: A deep trench is formed in a semiconductor substrate. The deep trench may comprise a pair of parallel substantially vertical sidewalls having a constant separation distance. A set of outer substantially vertical sidewalls may have a closed shape in a horizontal cross-section. At least one dielectric layer is formed in the deep trench. The deep trench is filled with at least one conductive trench fill material to form a conductive deep trench fill region. A shallow trench isolation structure is formed directly on the deep trench to encapsulate the conductive deep trench fill region therebeneath. The stack of the deep trench and the shallow trench isolation structure form a deep trench inter-well isolation structure that provides electrical isolation of devices on one side of the stack from devices on the other side.

Abstract: In a method of fabricating a flash memory device, a semiconductor substrate includes a tunnel insulating layer and a charge storage layer formed in an active region and a trench formed in an isolation region. A first insulating layer is formed to fill a part of the trench. A second insulating layer is formed on the first insulating layer so that the trench is filled. The first and second insulating layers are removed such that the first and second insulating layers remain on sidewalls of the charge storage layer and on a part of the trench. A third insulating layer is formed on the first and second insulating layers so that a space defined by the charge storage layer is filled. The third insulating layer is removed so that a height of the third insulating layer is lowered.

Abstract: A semiconductor device using a CESL (contact etch stop layer) to induce strain in, for example, a CMOS transistor channel, and a method for fabricating such a device. A stress-producing CESL, tensile in an n-channel device and compressive in a p-channel device, is formed over the device gate structure as a discontinuous layer. This may be done, for example, by depositing an appropriate CESL, then forming an ILD layer, and simultaneously reducing the ILD layer and the CESL to a desired level. The discontinuity preferably exposes the gate electrode, or the metal contact region formed on it, if present. The upper boundary of the CESL may be further reduced, however, to position it below the upper boundary of the gate electrode.

Abstract: A method and structure for forming a semiconductor structure. A semiconductor substrate is provided. A trench is formed within the semiconductor substrate. A first layer of electrically insulative material is formed within the trench. A first portion and a second portion of the first layer of electrically insulative material is removed. A second layer of electrically insulative material is selectively grown on the first layer comprising the removed first portion and the removed second portion.

Abstract: Wiring lines for the supply of a voltage to feed a drive voltage to an integrated circuit formed in a semiconductor chip are disposed so as to cover a main surface of the semiconductor chip, so that, if the wiring lines are removed for the purpose of analyzing information stored in the semiconductor chip, the integrated circuit does not operate and it is impossible to analyze the information. Further, there is provided a processing detector circuit for detecting that the wiring lines have been tampered with. When the processing detector circuit detects a change in the state of the wiring lines, the integrated circuit is reset. Thus, it is possible to improve the security of information stored on the card.

Abstract: A semiconductor structure includes a semiconductor mesa located upon an isolating substrate. The semiconductor mesa includes a first end that includes a first doped region separated from a second end that includes a second doped region by an isolating region interposed therebetween. The first doped region and the second doped region are of different polarity. The semiconductor structure also includes a channel stop dielectric layer located upon a horizontal surface of the semiconductor mesa over the second doped region. The semiconductor structure also includes a first device located using a sidewall and a top surface of the first end as a channel region, and a second device located using the sidewall and not the top surface of the second end as a channel. A related method derives from the foregoing semiconductor structure. Also included is a semiconductor circuit that includes the semiconductor structure.

Abstract: An n-type drift region includes an active element region and a peripheral region. A p-type base region is formed at least in the active element region. A trench-type gate electrode is formed in each of the active element region and the peripheral region. An n-type source region formed in the base region. A plurality of p-type column regions is selectively formed separately from one another in each of the active element region and the peripheral region. In a peripheral region, a p-type guard region is formed below the gate electrode. In the active element region, the p-type guard region is not formed below the gate electrode. As a result, it is possible to hold the breakdown voltage in the peripheral region at a higher level than in the active element region while maintaining the low ON resistance due to a superjunction structure and to raise the breakdown voltage performance of the semiconductor device.

Abstract: An NVM cell such as an NROM cell is formed using a portion of one ONO stack and an adjacent portion of a neighboring NROM stack. A gate structure is formed between (and atop) the two ONO portions, or “strips” (or “stripes”). This provides having two physically separated charge storage regions (nitride “strips”, or “stripes”) in each memory cell.

Abstract: A semiconductor device manufacturing method includes the steps of: (a) forming a stopper layer for chemical mechanical polishing on a surface of a semiconductor substrate; (b) forming an element isolation trench in the stopper layer and the semiconductor substrate; (c) depositing a nitride film covering an inner surface of the trench; (d) depositing a first oxide film through high density plasma CVD, the first oxide film burying at least a lower portion of the trench deposited with the nitride film; (e) washing out the first oxide film on a side wall of the trench by dilute hydrofluoric acid; (f) depositing a second oxide film by high density plasma CVD, the second oxide film burying the trench after the washing-out; and (g) removing the oxide films on the stopper layer by chemical mechanical polishing.

Abstract: Interconnections are formed over an interlayer insulating film which covers MISFETQ1 formed on the principal surface of a semiconductor substrate, while dummy interconnections are disposed in a region spaced from such interconnections. Dummy interconnections are disposed also in a scribing area. Dummy interconnections are not formed at the peripheries of a bonding pad and a marker. In addition, a gate electrode of a MISFET and a dummy gate interconnection formed of the same layer are disposed. Furthermore, dummy regions are disposed in a shallow trench element-isolation region. After such dummy members are disposed, an insulating film is planarized by the CMP method.

Abstract: A cell includes a plurality of diffusion region pairs, each of the diffusion region pairs being formed by a first impurity diffusion region which is a constituent of a transistor and a second impurity diffusion region such that the first and second impurity diffusion regions are provided side-by-side in a gate length direction with a device isolation region interposed therebetween. In each of the diffusion region pairs, the first and second impurity diffusion regions have an equal length in the gate width direction and are provided at equal positions in the gate width direction, and a first isolation region portion, which is part of the device isolation region between the first and second impurity diffusion regions, has a constant separation length. In the diffusion region pairs, the first isolation region portions have an equal separation length.

Abstract: In one embodiment, a semiconductor device has an active region defined by an isolation layer formed inside an STI trench that includes an upper trench and a lower trench having a substantially curved cross-sectional profile under the upper trench so that the lower trench is in communication with the upper trench. Since the upper trench has a sidewall tapered with a positive slope, a good gap filling property can be obtained when filling the upper trench with an insulating layer. By forming a void in the lower trench, a dielectric constant at the bottom of the isolation layer is lower than a dielectric constant at an oxide layer, thereby improving the isolation property. The isolation layer includes a first insulating layer formed inside only the upper trench and covering an inner wall of the upper trench in the form of a spacer.

Abstract: Provided are methods and composition for forming an isolation structure on an integrated circuit substrate. First, a trench is etched in the integrated circuit substrate. A lower dielectric layer is then formed in the trench such that the lower dielectric layer at least partially fills the trench. An upper dielectric layer is then formed over the lower dielectric layer to create an isolation structure, the upper dielectric layer and the lower dielectric layer together having an effective dielectric constant that is less than that of silicon dioxide, thereby enabling capacitance associated with the isolation structure to be reduced.

Abstract: A trench is formed in the surface of a provided semiconductor body. An oxide is deposited in the trench and a cap is deposited on the oxide, wherein the combination of the cap and the oxide impart a mechanical stress on the semiconductor body.

Abstract: An integrated circuit is provided having a substrate and a transistor in an active region of the substrate. The substrate also has an isolation region having a dielectric material. In one embodiment, a pre-metal dielectric layer is disposed over the substrate and the transistor. At least one of the isolation region or the pre-metal dielectric layer includes a O3 TEOS oxide having a stress retaining dopant. The O3 TEOS oxide induces a stress in a channel region of the transistor.

Abstract: An infrared solid-state image pickup apparatus includes an SOI substrate having a silicon oxide film layer and an SOI layer on a silicon substrate, a detecting portion which is provided with a PN junction diode formed on the SOI substrate and converts a temperature change generated by an incident infrared ray to an electric signal, and a support that holds the detecting portion with a space from the silicon substrate of the SOI substrate. An impurity in a semiconductor layer constituting the PN junction diode is distributed such that carriers flowing in the semiconductor layer are distributed in such an uneven manner as being much in a central portion of the semiconductor layer than in a peripheral portion thereof.

Abstract: The invention relates to layers in substrate wafers. The aim of the invention is to provide layers in substrate wafers with which the drawbacks of conventional assemblies are overcome in order to achieve, on the one hand, an adequate resistance to latch-up in highly scaled, digital CMOS circuits with comparatively low costs and, on the other hand, to ensure low substrate losses/couplings for analog high-frequency circuits and, in addition, to influence the component behavior in a non-destructive manner.

Abstract: By forming isolation trenches of different types of intrinsic stress on the basis of separate process sequences, the strain characteristics of adjacent active semiconductor regions may be adjusted so as to obtain overall device performance. For example, highly stressed dielectric fill material including compressive and tensile stress may be appropriately provided in the respective isolation trenches in order to correspondingly adapt the charge carrier mobility of respective channel regions.

Abstract: A semiconductor structure includes a semiconductor substrate, a planar PMOS device at a surface of the semiconductor substrate, and an NMOS device at the surface of the semiconductor substrate, wherein the NMOS device is a Fin field effect transistor (FinFET).

Abstract: A cell includes a plurality of diffusion region pairs, each of the diffusion region pairs being formed by a first impurity diffusion region which is a constituent of a transistor and a second impurity diffusion region such that the first and second impurity diffusion regions are provided side-by-side in a gate length direction with a device isolation region interposed therebetween. In each of the diffusion region pairs, the first and second impurity diffusion regions have an equal length in the gate width direction and are provided at equal positions in the gate width direction, and a first isolation region portion, which is part of the device isolation region between the first and second impurity diffusion regions, has a constant separation length. In the diffusion region pairs, the first isolation region portions have an equal separation length.

Abstract: A method of manufacturing an SOI substrate for semiconductor devices is described. The method includes forming a low density impurity region in a first semiconductor substrate and a high density impurity region in the low density impurity region, forming a trench surrounding the low density impurity region and the high density impurity region, the depth of the trench being deeper than the high density impurity region and shallower than the low density impurity region, forming an insulating layer on the surface of the first semiconductor substrate to fill the inside of the trench, attaching a second semiconductor substrate on the surface of the insulating layer, and removing a part of the first semiconductor substrate so that the bottom of the trench is exposed.

Abstract: A semiconductor structure having a recessed active region and a method for forming the same are provided. The semiconductor structure comprises a first and a second isolation structure having an active region therebetween. The first and second isolation structures have sidewalls with a tilt angle of substantially less than 90 degrees. The active region is recessed. By recessing the active region, the channel width is increased and device drive current is improved.

Abstract: A semiconductor device having a bipolar transistor improved with heat dissipation. A semiconductor device having bipolar transistors formed in a plurality of device forming regions electrically isolated from each other by device isolation trenches traversing the semiconductor layer, in which a device isolation trench for each of unit bipolar transistors connected in parallel is removed and the plurality of unit bipolar transistors connected in series are entirely surrounded with one device isolation trench.

Abstract: A method for producing narrow trenches in semiconductor devices. The narrow trenches are formed by chemically changing the properties of a first dielectric layer locally, such that the side walls of a patterned hole in the first dielectric layer is converted locally and becomes etchable by a first etching substance. Subsequently a second dielectric material is deposited in the patterned structure and the damaged part of the first dielectric material is removed such that small trenches are obtained.

Abstract: A semiconductor device includes a first insulating layer and a second insulating layer in a trench. The first insulating layer insulates two MOSFETs from each other, and the second insulating layer has a true stress opposite to a true stress of the first insulating layer. The second insulating layer includes two regions of different true stresses. This enables a drain current flow in each MOSFET to be independently controlled in a semiconductor device that employs a STI method for element isolation.

Abstract: A semiconductor device and method for its fabrication are described. An active region spacer may be formed on a top surface of an isolation region and adjacent to a sidewall of an active region. In one embodiment, the active region spacer may suppress the formation of metal pipes in the active region.

Abstract: A semiconductor device and related method of manufacture are disclosed. The device comprises; a trench having a corner portion formed in the semiconductor substrate, a first oxide film formed on an inner wall of the trench and having an upper end portion exposing the corner portion of the semiconductor substrate, a nitride liner formed on the first oxide film, a second oxide film formed in contact with the upper end of the first oxide film and on the exposed corner portion and an upper surface of the semiconductor substrate, a field insulating film formed on the nitride liner to substantially fill the trench, and a field protecting film formed in contact with the second oxide film and filling a trench edge recess formed between the field insulating film and the second oxide film.

Abstract: A semiconductor device includes a semiconductor substrate including a memory cell region and a peripheral circuit region, a first trench formed in the memory cell region and having a first depth and a first opening width, and a second trench formed in the peripheral circuit region and including a pair of bottom edge portions and a bottom middle portion located between the bottom edge portions. The second trench has a second opening width that is larger than the first opening width. Each bottom edge portion has a second depth that is larger than the first depth. The bottom middle portion has a third depth that is same as the first depth.

Abstract: A CMOS image sensor and a method for manufacturing the same improves signal efficiency by reducing a dark signal, and includes a substrate having a first conductive type comprising an image area and a circuit area, a STI isolation layer in the substrate for electrical isolation within the circuit area, and a field oxide in the substrate for electrical isolation within the image area.

Abstract: Wiring lines for the supply of a voltage to feed a drive voltage to an integrated circuit formed in a semiconductor chip are disposed so as to cover a main surface of the semiconductor chip, so that, if the wiring lines are removed for the purpose of analyzing information stored in the semiconductor chip, the integrated circuit does not operates and it is impossible to analyze the information. Further, there is provided a processing detector circuit for detecting that the wiring lines have been tampered with. When the processing detector circuit detects a change in the sate of the wiring lines, the integrated circuit is reset. Thus, it is possible to improve the security of information stored on the card.