Including Resistive Element Patents (Class 257/536)
  • Patent number: 10236289
    Abstract: A method of forming a resistor adjacent to a fin field effect transistor on a substrate, including, forming a plurality of vertical fins on the substrate, forming a dielectric fill layer on the plurality of vertical fins, forming at least two dummy gate structures on the plurality of vertical fins, forming a replaceable resistor structure on the dielectric fill layer over a region of the substrate unoccupied by vertical fins, forming a sidewall spacer on the at least two dummy gate structures and the replaceable resistor structure, removing the replaceable resistor structure to form a trench, and forming a resistor structure in the trench.
    Type: Grant
    Filed: October 3, 2017
    Date of Patent: March 19, 2019
    Assignee: International Business Machines Corporation
    Inventors: Veeraraghavan S. Basker, Kangguo Cheng, Theodorus E. Standaert, Junli Wang
  • Patent number: 10229966
    Abstract: Disclosed examples include a resistor comprising a semiconductor structure having a length dimension with first and second ends spaced from one another and an intermediate region between the first and second ends, first and second metal-semiconductor compound structures on the semiconductor structure proximate the first and second ends of the semiconductor structure, the first and second metal-semiconductor compound structures being spaced apart from each other along the length dimension of the semiconductor structure, and at least one intermediate metal-semiconductor compound structure on a portion of the intermediate region of the semiconductor structure between the first and second ends, the intermediate metal-semiconductor compound structure being spaced apart from the first and second metal-semiconductor compound structures on the semiconductor structure.
    Type: Grant
    Filed: January 30, 2017
    Date of Patent: March 12, 2019
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Mattias Erik Dahlström, Li Jen Choi
  • Patent number: 10191084
    Abstract: Embodiments are directed to techniques for providing a user-selected target resistance across a set of output terminals of a resistance-generating apparatus.
    Type: Grant
    Filed: December 21, 2017
    Date of Patent: January 29, 2019
    Assignee: IET Labs, Inc.
    Inventors: Benjamin Salim Sheena, Robert Michael Brown, Trung Q. Mai, David Sheena
  • Patent number: 10192870
    Abstract: An HVNMOS having a source follower configuration is disposed in an n? diffusion region that forms an HVJT. The lateral HVNMOS includes a p-type back gate region, source contact region, n+drain region, and gate electrode. The p-type back gate region and source contact region contact a p? isolation region and are separated from p+ common potential regions inside the p? isolation region. The source contact region is electrically connected to the COM electrode pad through a source follower resistor RSF. The p+ common potential regions are electrically connected to the p-type back gate region and source contact region of the HVNMOS through diffusion resistors provided between the p-type back gate region/source contact region of the HVNMOS and the p+ common potential region.
    Type: Grant
    Filed: December 5, 2017
    Date of Patent: January 29, 2019
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventor: Masaharu Yamaji
  • Patent number: 10157258
    Abstract: A FIT evaluation method for an IC is provided. The FIT evaluation method includes accessing data representing a layout of the IC comprising a number of metal lines and a number of VIAs; picking a number of nodes along the metal lines; dividing each of the metal lines into a number of metal segments based on the nodes; and determining a FIT value for each of the metal segments or VIAs to verify the layout and fabricate the IC.
    Type: Grant
    Filed: November 18, 2016
    Date of Patent: December 18, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chin-Shen Lin, Ming-Hsien Lin, Kuo-Nan Yang, Chung-Hsing Wang
  • Patent number: 9985018
    Abstract: A high TCR tungsten resistor on a reverse biased Schottky diode. A high TCR tungsten resistor on an unsilicided polysilicon platform geometry. A high TCR tungsten resistor between two parallel polysilicon leads on remaining contact etch stop dielectric. A high TCR tungsten resistor embedded in a intermetal dielectric layer above a lower interconnect layer and below an upper interconnect layer. A method of forming a high TCR tungsten resistor on a reverse biased Schottky diode. A method of forming high TCR tungsten resistor on an unsilicided polysilicon platform geometry. A method of forming high TCR tungsten resistor between two parallel polysilicon leads on remaining contact etch stop dielectric. A method of forming high TCR tungsten resistor embedded in a inter metal dielectric layer above a lower interconnect layer and below an upper interconnect layer.
    Type: Grant
    Filed: September 24, 2015
    Date of Patent: May 29, 2018
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Russell Carlton McMullan, Binu Kamblath Pushkarakshan, Subramanian J. Narayan, Swaminathan Sankaran, Keith Edmund Kunz
  • Patent number: 9972386
    Abstract: The present invention provides a resistive memory array arranged in a 3D stack comprising a plurality of resistivity switching memory elements laid out in an array in a first and second direction, and stacked in a third direction, a plurality of first electrodes and a plurality of second electrodes extending in the first direction, each first electrode and each second electrode being associated with the at least one resistivity switching memory element, and a plurality of transistor devices, each transistor device being electrically coupled to one of the resistivity switching memory elements, an inversion or accumulation channel of a transistor device being adapted for forming a switchable resistivity path in the third direction, between the electrically coupled resistivity switching memory element and the associated second electrode, wherein the memory array furthermore comprises at least one third electrode provided in a trench through the stack.
    Type: Grant
    Filed: December 20, 2012
    Date of Patent: May 15, 2018
    Assignee: IMEC
    Inventors: Pieter Blomme, Dirk Wouters
  • Patent number: 9972613
    Abstract: A semiconductor device includes a transistor having a plurality of transistor cells in a semiconductor body. Each transistor cell includes a control terminal and first and second load terminals. The transistor further includes a phase change material exhibiting a solid-solid phase change at a phase transition temperature Tc between 150° C. and 400° C. The control terminals of the plurality of transistor cells are electrically connected to one another.
    Type: Grant
    Filed: July 10, 2015
    Date of Patent: May 15, 2018
    Assignee: Infineon Technologies AG
    Inventors: Hans-Joachim Schulze, Guenther Ruhl, Hans-Joerg Timme
  • Patent number: 9941209
    Abstract: Conductive structures include stair step structures positioned along a length of the conductive structure and at least one landing comprising at least one via extending through the conductive structure. The at least one landing is positioned between a first stair step structure of the stair step structures and a second stair step structure of the stair step structures. Devices may include such conductive structures. Systems may include a semiconductor device and stair step structures separated by at least one landing having at least one via formed in the at least one landing. Methods of forming conductive structures include forming at least one via through a landing positioned between stair step structures.
    Type: Grant
    Filed: March 11, 2016
    Date of Patent: April 10, 2018
    Assignee: Micron Technology, Inc.
    Inventors: Paolo Tessariol, Graham R. Wolstenholme, Aaron Yip
  • Patent number: 9905514
    Abstract: A semiconductor device structure comprises stacked tiers each comprising a conductive structure and an insulating structure longitudinally adjacent the conductive structure, at least one staircase structure having steps comprising lateral ends of the stacked tiers, and an opening laterally adjacent a first side of the at least one staircase structure and extending through the stacked tiers and continuously across an entire length of the at least one staircase structure. Conductive structures of the stacked tiers laterally extend from the steps of the at least one staircase structure completely across a second side of the at least one staircase structure opposing the first side to form continuous conductive paths laterally extending completely across the stacked tiers. Additional semiconductor device structures, methods of forming semiconductor device structures, and electronic systems are also described.
    Type: Grant
    Filed: April 11, 2016
    Date of Patent: February 27, 2018
    Assignee: Micron Technology, Inc.
    Inventor: Toru Tanzawa
  • Patent number: 9847402
    Abstract: A method for fabricating semiconductor device includes the steps of: providing a substrate, wherein the substrate comprises a first region and a second region; forming a high-k dielectric layer on the first region and the second region; forming a first bottom barrier metal (BBM) layer on the high-k dielectric layer of the first region and the second region; forming a stop layer on the first region and the second region; removing the stop layer on the second region; and forming a second BBM layer on the first region and the second region.
    Type: Grant
    Filed: August 2, 2017
    Date of Patent: December 19, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chao-Hung Lin, Shih-Hung Tsai, Jyh-Shyang Jenq
  • Patent number: 9823279
    Abstract: A current sense resistor integrated with an integrated circuit die where the integrated circuit die is housed in a flip-chip semiconductor package includes a metal layer formed over a passivation layer of the integrated circuit die where the metal layer having an array of metal pillars extending therefrom. The metal pillars are electrically connected to a first leadframe portion and a second leadframe portion of the semiconductor package where the first leadframe portion and the second leadframe portion are electrically isolated from each other and physically separated by a separation of a first distance. The current sense resistor is formed in a portion of the metal layer spanning the separation between the first and second leadframe portions, the first and second leadframe portions forming terminals of the current sense resistor.
    Type: Grant
    Filed: August 4, 2015
    Date of Patent: November 21, 2017
    Assignee: Micrel, Inc.
    Inventor: Cameron Jackson
  • Patent number: 9806020
    Abstract: A semiconductor device that includes a first wiring, a second wiring, and a first number of first resistance elements that are connected in parallel between the first wiring and the second wiring, and each of which has a negative first temperature coefficient. The semiconductor device further includes a second number of second resistance elements that are connected in parallel to the first resistance elements, each of which has a positive second temperature coefficient, the second temperature coefficient having an absolute value larger than an absolute value of the first temperature coefficient. The second number is smaller than the first number.
    Type: Grant
    Filed: September 2, 2016
    Date of Patent: October 31, 2017
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventor: Yoshiaki Ishii
  • Patent number: 9793002
    Abstract: In one embodiment, a programming circuit is configured to form a programming current for a silicide fuse element by using a non-silicide programming element.
    Type: Grant
    Filed: March 17, 2016
    Date of Patent: October 17, 2017
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventor: Jefferson W. Hall
  • Patent number: 9786738
    Abstract: A semiconductor device including a well resistance element of high accuracy and high withstand voltage and a method of manufacturing the semiconductor device are provided. The semiconductor device includes a semiconductor substrate, a well region, an input terminal, an output terminal, a separation insulating film, and an active region. The input terminal and the output terminal are electrically coupled to the well region. The separation insulating film is arranged to be in contact with the upper surface of the well region in an intermediate region between the input terminal and the output terminal. The active region is arranged to be in contact with the upper surface of the well region. The separation insulating film and the active region in the intermediate region have an elongated shape in plan view. In the intermediate region, a plurality of separation insulating films and a plurality of active regions are alternately and repeatedly arranged.
    Type: Grant
    Filed: July 23, 2015
    Date of Patent: October 10, 2017
    Assignee: RENESAS ELECTRONICS CORPORATION
    Inventor: Kiyoshi Hayashi
  • Patent number: 9773730
    Abstract: One or more techniques for forming a semiconductor arrangement and resulting structures formed thereby are provided herein. The semiconductor arrangement includes a power divider comprising a transmission line and a resistor, where the transmission line is over and connected to an active area input, a first active area output and a second active area output. The semiconductor arrangement has a smaller chip size than a semiconductor arrangement where the transmission line is not over the active area input, the first active area output and the second active area output. The smaller chip size is due to the active area input, the first active area output and the second active area output being formed closer to one another than would be possible in a semiconductor arrangement where the transmission line is formed between at least one of the active area input, the first active area output or the second active area output.
    Type: Grant
    Filed: January 8, 2016
    Date of Patent: September 26, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
    Inventors: Chung-Hao Tsai, Jeng-Shien Hsieh, Chuei-Tang Wang, Chen-Hua Yu
  • Patent number: 9761692
    Abstract: A method for fabricating semiconductor device preferably forms a stop layer composed of amorphous silicon between a first BM layer and a second BBM layer of one of the gate structure during the fabrication of a device having multi-VT gate structures. By doing so, it would be desirable to use the stop layer as a protecting layer during the etching process of work function metal layers and the second BBM layer so that the first BBM layer could be protected from etchant such as SC1 and the overall thickness of the first BBM layer and the performance of the device could be maintained.
    Type: Grant
    Filed: May 23, 2016
    Date of Patent: September 12, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chao-Hung Lin, Shih-Hung Tsai, Jyh-Shyang Jenq
  • Patent number: 9754898
    Abstract: A semiconductor package is provided, which includes: a carrier; at least an interposer disposed on the carrier; an encapsulant formed on the carrier for encapsulating the interposer while exposing a top surface of the interposer; a redistribution layer formed on the encapsulant and the top surface of the interposer; and at least a semiconductor element disposed on the redistribution layer. The top surface of the interposer is flush with a surface of the encapsulant so as for the redistribution layer to have a planar surface for disposing the semiconductor element, thereby preventing warpage of the interposer and improving the reliability of electrical connection between the redistribution layer and the semiconductor element.
    Type: Grant
    Filed: June 20, 2013
    Date of Patent: September 5, 2017
    Assignee: Siliconware Precision Industries Co., Ltd.
    Inventors: Mu-Hsuan Chan, Wan-Ting Chen, Chun-Tang Lin, Yi-Che Lai
  • Patent number: 9704624
    Abstract: An integrated circuit (IC) may include a semiconductor substrate, and a semiconductor resistor. The semiconductor resistor may include a well in the semiconductor substrate and having a first conductivity type, a first resistive region in the well having an L-shape and a second conductivity type, and a tuning element associated with the first resistive region. The IC may also include a resistance compensation circuit on the semiconductor substrate. The resistance compensation circuit may be configured to measure an initial resistance of the first resistive region, and generate a voltage at the tuning element to tune an operating resistance of the first resistive region based upon the measured initial resistance.
    Type: Grant
    Filed: June 30, 2015
    Date of Patent: July 11, 2017
    Assignee: STMICROELECTRONICS S.R.L.
    Inventors: Alberto Pagani, Alessandro Motta
  • Patent number: 9679894
    Abstract: A semiconductor variable resistance device includes: a substrate; a gate formed on the substrate, the substrate further including a first trench the first trench formed outside a side of the gate; first and second doped regions, formed in the substrate, the first and second doped regions formed on two sides of the gate, the first trench formed between the gate and the first doped region; and first and second lightly-doped drain (LDD) regions, formed in the substrate. The first LDD region is formed between the first trench and the first doped region. The second LDD region is formed between the gate and the second doped region. The first and second doped regions form a source and a drain, respectively. The first trench is deeper than the first and the second lightly-doped drain regions.
    Type: Grant
    Filed: October 28, 2016
    Date of Patent: June 13, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventor: Yu-Hsiang Shu
  • Patent number: 9666797
    Abstract: A memory structure and a manufacturing method for the same are disclosed. The memory structure comprises a lower electrode, an upper insulating layer, a material layer, a dielectric film, and an upper electrode. The upper insulating layer is on the lower electrode. The material layer is on the upper insulating layer. The upper insulating layer and the material layer have a common opening to expose a portion of the lower electrode. The dielectric film is on the exposed portion of the lower electrode. The dielectric film and the material layer contain a same first transition metal. The upper electrode is on the dielectric film and fills the common opening.
    Type: Grant
    Filed: December 22, 2015
    Date of Patent: May 30, 2017
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Feng-Min Lee, Yu-Yu Lin
  • Patent number: 9640529
    Abstract: Provided is a method of fabricating a semiconductor device. The method includes providing a substrate including a transistor area and a resistor area, forming dummy gate structures on the substrate in the resistor area, and a lower interlayer insulating layer; forming a resistor structure having a buffer insulating pattern, a resistor element and an etch-retard pattern disposed sequentially on the lower interlayer insulating layer; and forming resistor contact structures configured to pass through the etch-retard pattern and to contact with the resistor element.
    Type: Grant
    Filed: June 29, 2016
    Date of Patent: May 2, 2017
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Hyun-Seung Song, Hwi-Chan Jun
  • Patent number: 9620711
    Abstract: An electronic device includes a semiconductor unit. The semiconductor unit includes a first electrode and a second electrode spaced apart from each other in a first direction; and a first material layer interposed between the first electrode and the second electrode and having a variable resistance characteristic or a threshold switching characteristic, wherein the first electrode, or the second electrode, or both includes a plurality of sub-electrodes and a plurality of second material layers that are alternately arranged in the first direction, and wherein each of the second material layers has a thickness that is sufficiently small to enable the second material layers to exhibit an ohmic-like behavior for a current flowing therein at an operating current of the semiconductor unit.
    Type: Grant
    Filed: June 11, 2015
    Date of Patent: April 11, 2017
    Assignee: SK HYNIX INC.
    Inventor: Hyung-Dong Lee
  • Patent number: 9583534
    Abstract: A semiconductor device comprises a magneto-resistive device capable of performing multiple functions with low power. The semiconductor device comprises a cell transistor in which a first impurity region and a second impurity region are respectively arranged on both sides of a channel region in a channel direction, a source line connected to the first impurity region of the cell transistor, and the magneto-resistive device connected to the second impurity region of the cell transistor. The first impurity region and the second impurity region are asymmetrical about a center of the cell transistor in the channel direction with respect to at least one of a shape and an impurity concentration distribution.
    Type: Grant
    Filed: July 9, 2015
    Date of Patent: February 28, 2017
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Choong-jae Lee, Hong-kook Min, Bo-young Seo, Aliaksei Ivaniukovich, Yong-kyu Lee
  • Patent number: 9536878
    Abstract: Provided are semiconductor devices and fabricating methods thereof. The semiconductor device includes a field insulating layer formed in a substrate, an interlayer dielectric layer formed on the field insulating layer and including a trench exposing at least a portion of the field insulating layer, a deposition insulating layer formed in the trench to be disposed on the field insulating layer, a gate insulating layer formed the trench to be disposed on the deposition insulating layer, and a metal gate formed the trench on the gate insulating layer.
    Type: Grant
    Filed: January 30, 2014
    Date of Patent: January 3, 2017
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Ju-Youn Kim
  • Patent number: 9502332
    Abstract: A nonvolatile memory device including a substrate which includes a cell array region and a connection region, an electrode structure formed on the cell array region and the connection region and including a plurality of laminated electrodes, a first recess formed in the electrode structure on the connection region and disposed between the cell array region and a second recess formed in the electrode structure on the connection region, and a plurality of vertical wirings formed on the plurality of electrodes exposed by the first recess.
    Type: Grant
    Filed: June 26, 2013
    Date of Patent: November 22, 2016
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Jong-Heun Lim, Hyo-Jung Kim, Ji-Woon Im, Kyung-Hyun Kim
  • Patent number: 9502651
    Abstract: An electronic device includes a semiconductor memory. The semiconductor memory includes an odd-numbered layer structure disposed over a substrate and including a plurality of first lines which extend in a first direction; an even-numbered layer structure disposed over the substrate and including a plurality of second lines which extend in a second direction crossing the first direction; and resistance variable layers interposed between the first lines, between the second lines, and between the first lines and the second lines, wherein the odd-numbered layer structure and the even-numbered layer structure are alternately stacked over the substrate.
    Type: Grant
    Filed: December 11, 2013
    Date of Patent: November 22, 2016
    Assignee: SK HYNIX INC.
    Inventor: Hae-Chan Park
  • Patent number: 9496036
    Abstract: A writing method for a resistive memory cell and a resistive memory are provided. The writing method includes following steps. A reference voltage is provided to a bit line of the resistive memory cell. A first voltage is provided to a word line of the resistive memory cell, and a second voltage is provided to a source line of the resistive memory cell, wherein the first voltage is not increased while the second voltage is progressively increased. Thus, when the writing method for the resistive memory cell is performed, the voltage of the word line is not increased while the voltage of the source line is progressively increased, so as to expand voltage window for reset operation. And, the chance for occurring the complementary switching manifestation of the resistive memory cell due to excessive input voltages is reduced.
    Type: Grant
    Filed: November 30, 2015
    Date of Patent: November 15, 2016
    Assignee: Winbond Electronics Corp.
    Inventors: Frederick Chen, Ping-Kun Wang, Shao-Ching Liao, Pei-Hsiang Liao
  • Patent number: 9478546
    Abstract: A lay-out arrangement for LC modules in 3D semiconductor memories is described that avoids large step height. The arrangement creates insulating/conducting layer pairs with adjacent pairs differing in height by no more than the thickness of two insulating/conducting layer pairs.
    Type: Grant
    Filed: October 16, 2014
    Date of Patent: October 25, 2016
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventor: Chin Cheng Yang
  • Patent number: 9478533
    Abstract: An integrated circuit includes a layer of a semiconductor device including a standard cell configuration having a fixed gate electrode pitch between gate electrode lines and a resistor formed of metal between the fixed gate electrode pitch of the standard cell configuration. In one embodiment, the integrated circuit can be charged device model (CDM) electrostatic discharge (ESD) protection circuit for a cross domain standard cell having the resistor formed of metal. A method of manufacturing integrated circuits includes forming a plurality of gate electrode lines separated by a gate electrode pitch to form a core standard cell device, applying at least a first layer of metal within the gate electrode pitch to form a portion of a resistor, and applying at least a second layer of metal to couple to the first layer of metal to form another portion of the resistor.
    Type: Grant
    Filed: May 18, 2015
    Date of Patent: October 25, 2016
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wei Yu Ma, Bo-Ting Chen, Ting Yu Chen, Kuo-Ji Chen, Li-Chun Tien
  • Patent number: 9461111
    Abstract: A method of forming double and/or multiple numbers of fins of a FinFET device using a Si/SiGe selective epitaxial growth process and the resulting device are provided. Embodiments include forming a Si pillar in an oxide layer, the Si pillar having a bottom portion and a top portion; removing the top portion of the Si pillar; forming a SiGe pillar on the bottom portion of the Si pillar; reducing the SiGe pillar; forming a first set of Si fins on opposite sides of the reduced SiGe pillar; removing the SiGe pillar; replacing the Si fins with SiGe fins; reducing the SiGe fins; forming a second set of Si fins on opposite sides of the SiGe fins; and removing the SiGe fins.
    Type: Grant
    Filed: August 10, 2015
    Date of Patent: October 4, 2016
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: InSoo Jung, Wonwoo Kim
  • Patent number: 9461063
    Abstract: A method for forming a semiconductor structure is provided. The method includes following steps. First, a stack of alternate conductive layers and insulating layers is formed on a buffer layer on a buried layer. Next, a first opening is formed through the stack and through a portion of the buffer layer. Thereafter, a spacer is formed on a sidewall of the first opening.
    Type: Grant
    Filed: May 6, 2015
    Date of Patent: October 4, 2016
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Erh-Kun Lai, Chun-Min Cheng, Kuang-Hao Chiang
  • Patent number: 9455403
    Abstract: A semiconductor structure and a method for manufacturing the same are provided. The semiconductor structure comprises an access device, a dielectric layer, a barrier layer, a first interlayer conductor, a first barrier liner, a second interlayer conductor, a second barrier liner, a memory element and a top electrode layer. The access device has two terminals. The dielectric layer covers the access device. The barrier layer is disposed on the dielectric layer. The first and second interlayer conductors are connected to the two terminals, respectively. The first and second barrier liners are disposed on sidewalls of the first and second interlayer conductors, respectively. The memory element is disposed on the first interlayer conductor. The top electrode layer is disposed on the barrier layer and the memory element and covers the memory element.
    Type: Grant
    Filed: August 28, 2015
    Date of Patent: September 27, 2016
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Erh-Kun Lai, Feng-Min Lee, Yu-Yu Lin, Dai-Ying Lee
  • Patent number: 9450184
    Abstract: A multilayer-stacked resistive random access memory device includes: first and second electrode layers; a resistive oxide layer which is electrically coupled to the first and second electrode layers, which exhibits resistive switching characteristics and which includes a metal oxide containing a first metal selected from the group consisting of W, Ti, Zr, Sn, Ta, Ni, Ag, Cu, Co, Hf, Ru, Mo, Cr, Fe, Al, and combinations thereof; and a sulfide layer contacting the resistive oxide layer and including a metal sulfide that contains a second metal that is the same as the first metal.
    Type: Grant
    Filed: June 11, 2015
    Date of Patent: September 20, 2016
    Assignee: NATIONAL TSING HUA UNIVERSITY
    Inventors: Tri-Rung Yew, Ying-Chan Hung, Tsang-Hsuan Wang, Pin Chang
  • Patent number: 9337088
    Abstract: An semiconductor structure, method of fabrication therefor, and design structure therefor is provided. A thermal grid is formed over at least a portion of a substrate. An insulating layer is formed over at least a portion of the thermal grid. A resistor is formed over at least a portion of the insulating layer. A buried interconnect is connected to the thermal grid via at least one contact. The buried interconnect is adapted to receive thermal energy from the thermal grid via the at least one contact.
    Type: Grant
    Filed: June 12, 2014
    Date of Patent: May 10, 2016
    Assignee: International Business Machines Corporation
    Inventors: William F. Clark, Jr., Robert R. Robison, Hung H. Tran
  • Patent number: 9295131
    Abstract: The invention relates to an electroluminescent lighting device, which is based on an array of standard electroluminescent tiles (D1-Dn) combined with an array of ballast components (R1-Rn) mounted on a carrier board (30) in such a way that the power loss is evenly spread across the whole board area to minimize local electric power in the ballast components. The unavoidable remaining hot spots and electroluminescent tiles are thermally coupled in such a way that the additional thermal load on the electroluminescent emission layer is as symmetric as possible with respect to the self heating of the electroluminescent device. This can be achieved by a combination of properly designed heat spreading and thermal isolation of the electroluminescent and ballast components. Heat spreading is achieved by a properly designed interconnection structure (40) on the carrier board. Different options are proposed to thermally isolate the electroluminescent tiles from the hot spots.
    Type: Grant
    Filed: March 1, 2013
    Date of Patent: March 22, 2016
    Assignee: OLEDWORKS GMBH
    Inventor: Dirk Hente
  • Patent number: 9245964
    Abstract: An integrated circuit has a nonvolatile memory cell that includes a first electrode, a second electrode, and an ion conductive material there-between. At least one of the first and second electrodes has an electrochemically active surface received directly against the ion conductive material. The second electrode is elevationally outward of the first electrode. The first electrode extends laterally in a first direction and the ion conductive material extends in a second direction different from and intersecting the first direction. The first electrode is received directly against the ion conductive material only where the first and second directions intersect. Other embodiments, including method embodiments, are disclosed.
    Type: Grant
    Filed: October 28, 2014
    Date of Patent: January 26, 2016
    Assignee: Micron Technology, Inc.
    Inventors: Jun Liu, John K. Zahurak
  • Patent number: 9227456
    Abstract: A three-dimensional memory is formed as an array of memory elements across multiple layers positioned at different distances above a semiconductor substrate. Cylindrical stacks of memory elements are formed where a cylindrical opening has read/write material deposited along its wall, and a cylindrical vertical bit line formed along its central axis. Memory elements formed on either side of such a cylinder may include sheet electrodes that extend into the read/write material.
    Type: Grant
    Filed: March 7, 2013
    Date of Patent: January 5, 2016
    Assignee: SanDisk 3D LLC
    Inventors: Henry Chien, Yao-Sheng Lee, George Samachisa, Johann Alsmeier
  • Patent number: 9214629
    Abstract: A resistive memory having a leakage inhibiting characteristic and a method for fabricating the same, which can suppress a sneak current in a large scaled crossing array of a RRAM. A memory cell forming the resistive memory comprises a lower electrode, a first semiconductor-type oxide layer, a resistive material layer, a second semiconductor-type oxide layer and an upper electrode which are sequentially stacked. Each of the semiconductor-type oxide layers may be a semiconductor-type metal oxide or a semiconductor-type non-metal oxide. The sneak current may be effectively reduced by means of a Schottky barrier formed between the semiconductor-type oxide layer and the metal electrode, the fabrication process is easy to be implemented, and a high device integration degree can be achieved.
    Type: Grant
    Filed: April 26, 2013
    Date of Patent: December 15, 2015
    Assignee: Peking University
    Inventors: Ru Huang, Yinglong Huang, Yimao Cai, Yangyuan Wang, Muxi Yu
  • Patent number: 9190840
    Abstract: An electrostatic discharge (ESD) protection circuit, suitable for an input stage circuit including a first N channel metal oxide semiconductor (NMOS) transistor, is provided. The ESD protection circuit includes an P channel metal oxide semiconductor (PMOS) transistor and an impedance device, in which the PMOS transistor has a source coupled to a gate of the first NMOS transistor, and a drain coupled to a source of the first NMOS transistor, and the impedance device is coupled between a gate of the PMOS transistor and a first power rail to perform a initial-on ESD protection circuit. The ESD protection circuit formed by the PMOS transistor and the resistor is capable of increasing the turn-on speed of the ESD protection circuit and preventing the input stage circuit from a CDM ESD event.
    Type: Grant
    Filed: July 31, 2013
    Date of Patent: November 17, 2015
    Assignee: UNITED MICROELECTRONICS CORPORATION
    Inventors: Ming-Dou Ker, Chun-Yu Lin, Chang-Tzu Wang
  • Patent number: 9184226
    Abstract: A high TCR tungsten resistor on a reverse biased Schottky diode. A high TCR tungsten resistor on an unsilicided polysilicon platform geometry. A high TCR tungsten resistor between two parallel polysilicon leads on remaining contact etch stop dielectric. A high TCR tungsten resistor embedded in a intermetal dielectric layer above a lower interconnect layer and below an upper interconnect layer. A method of forming a high TCR tungsten resistor on a reverse biased Schottky diode. A method of forming high TCR tungsten resistor on an unsilicided polysilicon platform geometry. A method of forming high TCR tungsten resistor between two parallel polysilicon leads on remaining contact etch stop dielectric. A method of forming high TCR tungsten resistor embedded in a inter metal dielectric layer above a lower interconnect layer and below an upper interconnect layer.
    Type: Grant
    Filed: August 15, 2012
    Date of Patent: November 10, 2015
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Russell Carlton McMullan, Binu Kamblath Pushkarakshan, Subramanian J. Narayan, Swaminathan Sankaran, Keith Edmund Kunz
  • Patent number: 9184383
    Abstract: Embodiments of the invention generally relate to a resistive switching nonvolatile memory device having an interface layer structure disposed between at least one of the electrodes and a variable resistance layer formed in the nonvolatile memory device, and a method of forming the same. Typically, resistive switching memory elements may be formed as part of a high-capacity nonvolatile memory integrated circuit, which can be used in various electronic devices, such as digital cameras, mobile telephones, handheld computers, and music players. In one configuration of the resistive switching nonvolatile memory device, the interface layer structure comprises a passivation region, an interface coupling region, and/or a variable resistance layer interface region that are configured to adjust the nonvolatile memory device's performance, such as lowering the formed device's switching currents and reducing the device's forming voltage, and reducing the performance variation from one formed device to another.
    Type: Grant
    Filed: January 16, 2014
    Date of Patent: November 10, 2015
    Assignees: Intermolecular, Inc., Kabushiki Kaisha Toshiba, SanDisk 3D LLC
    Inventors: Yun Wang, Tony P. Chiang, Imran Hashim
  • Patent number: 9166067
    Abstract: A band gap reference circuit includes an error-amplifier-based current mirror coupled between a first supply node and a pair of intermediate voltage nodes, and a matched diode pair for providing a proportional-to-absolute temperature (PTAT) current. The matched diode pair includes a first diode connected between a first intermediate voltage node from the pair of intermediate voltage nodes and a second supply node, and a second diode connected in series with a resistor between a second intermediate voltage node from the pair of intermediate voltage nodes and the second supply node. Each diode has a P-N diode junction that is a homojunction.
    Type: Grant
    Filed: November 26, 2013
    Date of Patent: October 20, 2015
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Jaw-Juinn Horng, Chung-Hui Chen, Sun-Jay Chang, Chia-Hsin Hu
  • Patent number: 9159728
    Abstract: A system comprises a first transistor comprising a first active region and a second active region, a first resistor comprising a plurality of first vias connected in series, wherein the first resistor is over the first active region, a second resistor comprising a plurality of second vias connected in series, wherein the second resistor is over the second active region, a second transistor comprising a third active region and a fourth active region, a capacitor having a terminal electrically coupled to the fourth active region and a bit line electrically coupled to the third active region.
    Type: Grant
    Filed: October 30, 2014
    Date of Patent: October 13, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hsiao-Tsung Yen, Yu-Ling Lin
  • Patent number: 9035273
    Abstract: A resistive switching memory device is provided with first to third electrodes. The first electrode forms a Schottky barrier which can develop a rectifying property and resistance change characteristics at an interface between the first electrode and an oxide semiconductor. The third electrode is made of a material which provides an ohmic contact with the oxide semiconductor. A control voltage is applied between the first and second electrodes, and a driving voltage is applied between the first and third electrodes.
    Type: Grant
    Filed: December 13, 2011
    Date of Patent: May 19, 2015
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventor: Sakyo Hirose
  • Patent number: 9035425
    Abstract: A semiconductor integrated circuit includes a substrate, a multi-gate transistor device formed on the substrate, and an n-well resistor formed in the substrate. The substrate includes a plurality of first isolation structures and at least a second isolation structure formed therein. A depth of the first isolation structures is smaller than a depth of the second isolation structure. The multi-gate transistor device includes a plurality of fin structures, and the fin structures are parallel with each other and spaced apart from each other by the first isolation structures. The n-well resistor includes at least one first isolation structure. The n-well resistor and the multi-gate transistor device are electrically isolated from each other by the second isolation structure.
    Type: Grant
    Filed: May 2, 2013
    Date of Patent: May 19, 2015
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventor: Po-Chao Tsao
  • Patent number: 9029984
    Abstract: A semiconductor substrate assembly is proposed. The semiconductor interposer comprises a substrate having a first surface and a second surface opposite to the first surface, a first conductive pad, a second conductive pad and a conductive pillar. The first conductive pad is formed at a predetermined location of the first surface of the substrate. The second conductive pad is formed at a predetermined location of the second surface of the substrate as compared with the position of the first conductive pad. The conductive pillar is formed in the substrate and contacts with one of the first conductive pad and the second conductive pad.
    Type: Grant
    Filed: March 12, 2013
    Date of Patent: May 12, 2015
    Assignee: Industrial Technology Research Institute
    Inventors: Peng-Shu Chen, Min-Lin Lee, Shih-Hsien Wu, Shur-Fen Liu
  • Publication number: 20150115410
    Abstract: A plurality of first wiring layers are arranged on a main surface of a substrate, a first insulating film is arranged on upper faces of the plurality of first wiring layers, a second insulating film is arranged on an upper face of the first insulating film, and a plurality of second wiring layers are arranged on the second insulating film. A metal resistive element layer is arranged just below at least one second wiring layer among the plurality of second wiring layers. A plurality of conductive layers extend from the plurality of second wiring layers respectively to the metal resistive element layer in a Z direction perpendicular to the main surface. The metal resistive element layer includes a metal wiring layer. At least one part of a side face of at least one conductive layer among the plurality of conductive layers is connected to the metal wiring layer.
    Type: Application
    Filed: October 17, 2014
    Publication date: April 30, 2015
    Applicant: RENESAS ELECTRONICS CORPORATION
    Inventors: Shigeo TOKUMITSU, Takahiro MORI, Tetsuya NITTA
  • Patent number: 9012293
    Abstract: A method is provided for forming sandwich damascene resistors in MOL processes and the resulting devices. Embodiments include forming on a substrate a film stack including an interlayer dielectric (ILD), a first dielectric layer, and a sacrifice layer (SL); removing a portion of the SL and the first dielectric layer, forming a first cavity; conformally forming a layer of resistive material in the first cavity and over the SL; depositing a second dielectric layer over the layer of resistive material and filling the first cavity; and removing the second dielectric layer, the layer of resistive material not in the first cavity, and at least a partial depth of the SL.
    Type: Grant
    Filed: January 10, 2013
    Date of Patent: April 21, 2015
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Chang Yong Xiao, Roderick Miller, Jie Chen
  • Patent number: 9006838
    Abstract: An integrated circuit containing CMOS gates and a counterdoped polysilicon gate material resistor which has a body region that is implanted concurrently with the NSD layers of the NMOS transistors of the CMOS gates and concurrently with the PSD layers of the PMOS transistors of the CMOS gates, and has a resistor silicide block layer over the body region which is formed of separate material from the sidewall spacers on the CMOS gates. A process of forming an integrated circuit containing CMOS gates and a counterdoped polysilicon gate material resistor which implants the body region of the resistor concurrently with the NSD layers of the NMOS transistors of the CMOS gates and concurrently with the PSD layers of the PMOS transistors of the CMOS gates, and forms a resistor silicide block layer over the body region of separate material from the sidewall spacers on the CMOS gates.
    Type: Grant
    Filed: October 10, 2013
    Date of Patent: April 14, 2015
    Assignee: Texas Instruments Incorporated
    Inventors: Rajni J. Aggarwal, Jau-Yuann Yang