Using Liquid Deposition (epo) Patents (Class 257/E21.114)
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Publication number: 20100136771Abstract: A Group IV based nanoparticle fluid is disclosed. The nanoparticle fluid includes a set of nanoparticles—comprising a set of Group IV atoms, wherein the set of nanoparticles is present in an amount of between about 1 wt % and about 20 wt % of the nanoparticle fluid. The nanoparticle fluid also includes a set of HMW molecules, wherein the set of HMW molecules is present in an amount of between about 0 wt % and about 5 wt % of the nanoparticle fluid. The nanoparticle fluid further includes a set of capping agent molecules, wherein at least some capping agent molecules of the set of capping agent molecules are attached to the set of nanoparticles.Type: ApplicationFiled: June 29, 2009Publication date: June 3, 2010Inventors: Hyungrak Kim, Malcolm Abbott, Andreas Meisel, Elizabeth Tai, Augustus Jones, Dmitry Poplavskyy, Karel Vanheusden
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Patent number: 7727788Abstract: A method for manufacturing a display device using light emitting diode chips contemplates manufacturing a plurality of light emitting diode (LED) chips using a porous template; forming a plurality of first electrodes on a substrate; attaching the LED chips to pixel sites on the first electrodes using fluidic self assembly (FSA); and forming a plurality of second electrodes on a top surface of the LED chips.Type: GrantFiled: April 20, 2006Date of Patent: June 1, 2010Assignee: Samsung Mobile Display Co., Ltd.Inventors: In-Taek Han, Jong-Min Kim
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Publication number: 20100105194Abstract: A method of growing an epitaxial film and transferring it to an assembly substrate is disclosed. The film growth and transfer are made using an epitaxy lateral overgrowth technique. The formed epitaxial film on an assembly substrate can be further processed to form devices such as solar cell, light emitting diode, and other devices and assembled into higher integration of desired applications.Type: ApplicationFiled: October 28, 2009Publication date: April 29, 2010Inventor: Eric Ting-Shan Pan
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Patent number: 7700161Abstract: An apparatus for depositing a solid film onto a substrate from a reagent solution includes a reservoir of reagent solution maintained at a sufficiently low temperature to inhibit homogeneous reactions within the reagent solution. The reagent solution contains multiple ligands to further control temperature stability and shelf life. The chilled solution is dispensed through a showerhead onto a substrate. The substrate is positioned in a holder that has a raised structure peripheral to the substrate to retain or impound a controlled volume (or depth) of reagent solution over the exposed surface of the substrate. The reagent solution is periodically or continuously replenished from the showerhead so that only the part of the solution directly adjacent to the substrate is heated. A heater is disposed beneath the substrate and maintains the substrate at an elevated temperature at which the deposition of a desired solid phase from the reagent solution may be initiated.Type: GrantFiled: May 7, 2008Date of Patent: April 20, 2010Assignee: Sisom Thin Films LLCInventor: Isaiah O. Oladeji
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Publication number: 20100093158Abstract: A bulk-doped semiconductor that is at least one of the following: a single crystal, an elongated and bulk-doped semiconductor that, at any point along its longitudinal axis, has a largest cross-sectional dimension less than 500 nanometers, and a free-standing and bulk-doped semiconductor with at least one portion having a smallest width of less than 500 nanometers. Such a semiconductor may comprise an interior core comprising a first semiconductor; and an exterior shell comprising a different material than the first semiconductor. Such a semiconductor may be elongated and may have, at any point along a longitudinal section of such a semiconductor, a ratio of the length of the section to a longest width is greater than 4:1, or greater than 10:1, or greater than 100:1, or even greater than 1000:1.Type: ApplicationFiled: October 4, 2006Publication date: April 15, 2010Applicant: President and fellows of Harvard CollegeInventors: Charles M. Lieber, Yi Cui, Xiangfeng Duan, Yu Huang
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Patent number: 7682852Abstract: Provided is a method of manufacturing a semiconductor laser device having a light shield film comprising: forming a light emission structure by depositing a first clad layer, an active layer and a second clad layer on a substrate; depositing a light shield film and a protection film on the light emission face of the light emission structure; removing the light shield film corresponding to an area of the light emission face of the light emission structure including and above the first clad layer; and removing the protection layer.Type: GrantFiled: August 9, 2007Date of Patent: March 23, 2010Assignee: Samsung Led Co., Ltd.Inventors: Han-youl Ryu, Kyoung-ho Ha, Youn-joon Sung
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Patent number: 7670870Abstract: A method of manufacturing an organic thin film transistor characterized by low costs and high performances, the method in which the self-assemble monolayer is formed in a short period of time, and the organic thin film transistor are provided. A method of manufacturing an organic thin film a transistor having a gate electrode, a semiconductor layer, a source electrode, and a drain electrode on a substrate, wherein a semiconductor solution as a mixture of the self-assembled monolayer material and organic semiconductor material is coated between the source electrode and drain electrode, whereby a semiconductor layer is formed.Type: GrantFiled: May 16, 2007Date of Patent: March 2, 2010Assignee: Konica Minolta Holdings, Inc.Inventors: Tomoo Izumi, Masakazu Okada
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Publication number: 20100029069Abstract: Highly ordered Ge films are prepared directly on single crystal Si substrates by applying an aqueous coating solution having Ge-bound polymer onto the substrate and then heating in a hydrogen-containing atmosphere. A coating solution was prepared by mixing water, a germanium compound, ethylenediaminetetraacetic acid, and polyethyleneimine to form a first aqueous solution and then subjecting the first aqueous solution to ultrafiltration.Type: ApplicationFiled: September 11, 2009Publication date: February 4, 2010Applicant: LOS ALAMOS NATIONAL SECURITY, LLCInventors: Quanxi Jia, Anthony K. Burrell, Eve Bauer, Filip Ronning, Thomas Mark McCleskey, Guifu Zou
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Publication number: 20100001255Abstract: Nanotube electronic devices exhibit selective affinity to disparate nanotube types. According to an example embodiment, a semiconductor device exhibits a treated substrate that selectively interacts (e.g., chemically) with nanotubes of a first type, relative to nanotubes of a second type, the respective types including semiconducting-type and metallic-type nanotubes. The selective interaction is used to set device configuration characteristics based upon the nanotube type. This selective-interaction approach can be used to set the type, and/or characteristics of nanotubes in the device.Type: ApplicationFiled: June 26, 2009Publication date: January 7, 2010Inventors: Zhenan Bao, Melburne Lemieux, Justin P. Opatkiewicz, Soumendra N. Barman
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Patent number: 7635860Abstract: To increase productivity of organic thin-film transistors, in an organic thin-film transistor manufacturing equipment, a liquid containing at least either one of a wiring material and a semiconductor material is coated on a substrate to form a number of organic thin-film transistors. Substrate carrying means carry the substrate. The substrate is heated by a first heating means, and the temperature of the substrate is controlled by a controller. The liquid containing at least either one of the wiring material and the semiconductor material is heated by a second heating means, and the temperature of this liquid is controlled also by the controller.Type: GrantFiled: January 19, 2007Date of Patent: December 22, 2009Assignee: Hitachi, Ltd.Inventors: Tomohiro Inoue, Akira Doi, Masahiko Ando
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Publication number: 20090280624Abstract: Liquid-based precursors for formation of Copper Selenide, Indium Selenide, Copper Indium Diselenide, and/or copper Indium Galium Diselenide include copper-organoselenides, particulate copper selenide suspensions, copper selenide ethylene diamine in liquid solvent, nanoparticulate indium selenide suspensions, and indium selenide ethylene diamine coordination compounds in solvent. These liquid-based precursors can be deposited in liquid form onto substrates and treated by rapid thermal processing to form crystalline copper selenide and indium selenide films.Type: ApplicationFiled: November 9, 2006Publication date: November 12, 2009Applicant: Midwest Research InstituteInventors: Calvin J. Curtis, Alexander Miedaner, Marinus Franciscus Antonius van Hest, David S. Ginley
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Publication number: 20090239360Abstract: A sealing member 21 is lifted to cause its edge 21a to be in contact with a contact surface 17a of a support member 13. In the state where a precision ejection nozzle 5 is isolated, a gas exhaust unit 41 is operated to exhaust the inside of a chamber 1 to reduce the pressure in the chamber 1 to a predetermined level. Then, a purge gas is introduced into the chamber 1 from a purge gas supply source 31 through a gas introduction section 26 to replace the atmosphere in the chamber 1 with the purge gas, and the pressure in the chamber 1 is returned to the atmospheric pressure. After that, the sealing member 21 is lowered to release the isolation of the precision ejection nozzle 5. Then, liquid droplets of a liquid device material are ejected toward the surface of a substrate S while a carriage 7 is reciprocated in the X direction.Type: ApplicationFiled: May 29, 2009Publication date: September 24, 2009Applicant: TOKYO ELECTON LIMITEDInventor: HIROSHI SATO
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Publication number: 20090233426Abstract: A method for forming a passivated densified nanoparticle thin film on a substrate in a chamber is disclosed. The method includes depositing a nanoparticle ink on a first region on the substrate, the nanoparticle ink including a set of Group IV semiconductor particles and a solvent. The method also includes heating the nanoparticle ink to a first temperature between about 30° C. and about 400° C., and for a first time period between about 1 minute and about 60 minutes, wherein the solvent is substantially removed, and a porous compact is formed. The method further includes flowing an oxidizer gas into the chamber; and heating the porous compact to a second temperature between about 600° C. and about 1000° C., and for a second time period of between about 5 seconds and about 1 hour; wherein the passivated densified nanoparticle thin film is formed.Type: ApplicationFiled: March 13, 2008Publication date: September 17, 2009Inventors: Dmitry Poplavskyy, Maxim Kelman, Mason Terry
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Publication number: 20090206341Abstract: Fluid media comprising inorganic semiconductor components for fabrication of thin film transistor devices.Type: ApplicationFiled: February 2, 2009Publication date: August 20, 2009Inventors: Tobin J. Marks, Antonio Facchetti, Paul D. Byrne, Hyun Sung Kim
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Publication number: 20090203195Abstract: Hybrid semiconductor materials have an inorganic semiconductor incorporated into a hole-conductive fluorene copolymer film. Nanometer-sized particles of the inorganic semiconductor may be prepared by mixing inorganic semiconductor precursors with a steric-hindering coordinating solvent and heating the mixture with microwaves to a temperature below the boiling point of the solvent.Type: ApplicationFiled: July 11, 2006Publication date: August 13, 2009Inventors: Farid Bensebaa, Pascal L'Ecuyer, Jianfu Ding, Andrea Firth
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Publication number: 20090194763Abstract: A manufacturing method of a semiconductor element provided with a semiconductor layer containing a crystal of an organic semiconductor material of the invention includes the steps of (i) forming a frame (12) on a substrate (base) (11), and (ii) forming the semiconductor layer (crystal (13)) inside the frame (12). The step (ii) includes a crystal forming step in which a solution (21) containing the organic semiconductor material and a liquid medium is placed inside the frame (12) and then the crystal (13) is formed from the solution (21).Type: ApplicationFiled: June 5, 2007Publication date: August 6, 2009Applicant: PANASONIC CORPORATIONInventors: Norihisa Mino, Takayuki Takeuchi, Yasuo Kitaoka
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Publication number: 20090176353Abstract: Single-crystalline growth is realized using a liquid-phase crystallization approach involving the inhibition of defects typically associated with liquid-phase crystalline growth of lattice mismatched materials. According to one example embodiment, a semiconductor device structure includes a substantially single-crystal region. A liquid-phase material, such as Ge or a semiconductor compound, is crystallized to form the single-crystal region using an approach involving defect inhibition for the promotion of single-crystalline growth. In some instances, this defect inhibition involves the reduction and/or elimination of defects using a relatively small physical opening via which a crystalline growth front propagates. In other instances, this defect inhibition involves causing a change in crystallization front direction relative to a crystallization seed location.Type: ApplicationFiled: February 25, 2009Publication date: July 9, 2009Inventors: James D. Plummer, Peter B. Griffin, Jia Feng, Shu-Lu Chen
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METHODS FOR INFUSING ONE OR MORE MATERIALS INTO NANO-VOIDS IF NANOPOROUS OR NANOSTRUCTURED MATERIALS
Publication number: 20090117718Abstract: A method of forming composite nanostructures using one or more nanomaterials. The method provides a nanostructure material having a surface region and one or more nano void regions within a first thickness in the surface region. The method subjects the surface region of the nanostructure material with a fluid. An external energy is applied to the fluid and/or the nanostructure material to drive in a portion of the fluid into one or more of the void regions and cause the one or more nano void regions to be substantially filled with the fluid and free from air gaps.Type: ApplicationFiled: June 27, 2008Publication date: May 7, 2009Applicant: Stion CorporationInventor: HOWARD W.H. LEE -
Publication number: 20090117719Abstract: A high frequency diode comprising: a P type region, a N type region, and an I layer as a high resistivity layer interposed between the P type region and the N type region, wherein the I layer is made of a silicon wafer that has a carbon concentration of 5×1015 to 5×1017 atoms/cm3 interstitial oxygen concentration of 6.5×1017 to 13.5×1017 atoms/cm3, and a resistivity of 100 ?cm or more.Type: ApplicationFiled: December 3, 2008Publication date: May 7, 2009Applicant: Sumco CorporationInventor: Kazunari Kurita
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Publication number: 20090093105Abstract: To provide a (homogeneous) particle deposit without any impurity contamination, on which only particles with a desired size are deposited. A solution, with particles dispersed in a solvent, is jetted as a flow of fine liquid droplets from a tip part of a capillary, and the jetted fine liquid droplets are electrically charged. This flow of the droplets is introduced into a vacuum chamber through a jet nozzle, as a free jet flow. The free jet flow that travels in the vacuum chamber is introduced into an inside of a deposition chamber, inside of which is set at lower pressure, through a skimmer nozzle provided in the deposition chamber, as an ion beam. Subsequently, by an energy separation device, only particles having particular energy are selected from the electrically charged particles in the flow, and are deposited on a deposited body disposed in an inside of the deposition chamber.Type: ApplicationFiled: October 21, 2005Publication date: April 9, 2009Applicant: HOYA CORPORATIONInventors: Satoshi Kobayashi, Yuki Iguchi
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Patent number: 7507593Abstract: A method for fabricating a liquid crystal display (LCD) device includes: forming a gate line, a gate electrode, and a gate pad electrode on a substrate; sequentially forming a gate insulating layer, a semiconductor layer and a metal layer on an entire surface of the substrate including the gate electrode; forming a first photoresist on the metal layer; patterning the semiconductor layer, a data line, source and drain electrodes, and a data pad electrode by selectively etching the gate insulating layer, the semiconductor layer, and the metal layer using the first photoresist as a mask; forming a second photoresist to cover the gate pad electrode; forming a passivation layer on an entire surface of the substrate including the first and second photoresists; removing the passivation layer on the first and second photoresists by lift-stripping the first and second photoresists; and forming a pixel electrode electrically connected to the drain electrode.Type: GrantFiled: June 23, 2006Date of Patent: March 24, 2009Assignee: LG Display Co., Ltd.Inventors: Jae Young Oh, Soopool Kim
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Publication number: 20090053536Abstract: Compositions, inks and methods for forming a patterned silicon-containing film and patterned structures including such a film. The composition generally includes (a) passivated semiconductor nanoparticles and (b) first and second cyclic Group IVA compounds in which the cyclic species predominantly contains Si and/or Ge atoms. The ink generally includes the composition and a solvent in which the composition is soluble. The method generally includes the steps of (1) printing the composition or ink on a substrate to form a pattern, and (2) curing the patterned composition or ink. In an alternative embodiment, the method includes the steps of (i) curing either a semiconductor nanoparticle composition or at least one cyclic Group IVA compound to form a thin film, (ii) coating the thin film with the other, and (iii) curing the coated thin film to form a semiconducting thin film.Type: ApplicationFiled: October 29, 2008Publication date: February 26, 2009Inventors: Klaus KUNZE et al., Scott Haubrich, Fabio Zurcher, Brent Ridley, Joerg Rockenberger
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Patent number: 7494903Abstract: A method is disclosed for making a doped semiconductor transport layer for use in an electronic device comprising: growing in-situ doped semiconductor nanoparticles in a colloidal solution; depositing the in-situ doped semiconductor nanoparticles on a surface; and annealing the deposited in-situ doped semiconductor nanoparticles so that the organic ligands boil off the surface of the in-situ doped semiconductor nanoparticles.Type: GrantFiled: January 29, 2007Date of Patent: February 24, 2009Assignee: Eastman Kodak CompanyInventor: Keith B. Kahen
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Publication number: 20090029534Abstract: A programmable resistance, chalcogenide, switching or phase-change material device includes a substrate with a plurality of stacked layers including a conducting bottom composite electrode layer, an insulative layer having an opening formed therein, an active material layer deposited over both the insulative layer and the bottom composite electrode, and a top electrode layer deposited over the active material layer. The device uses a chemical or electrochemical liquid phase deposition process to selectively and conformally fill the insulative layer opening with the conductive bottom composite electrode layer. Conformally filling the conductive material within the opening reduces structural irregularities within the opening thereby increasing material density and resistivity within the device and thereby improving device performance and reducing programming current.Type: ApplicationFiled: July 23, 2007Publication date: January 29, 2009Inventors: Wolodymyr Czubatyi, Tyler Lowrey, Ed Spall
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Publication number: 20080299703Abstract: An apparatus for depositing a solid film onto a substrate from a reagent solution includes a reservoir of reagent solution maintained at a sufficiently low temperature to inhibit homogeneous reactions within the reagent solution. The reagent solution contains multiple ligands to further control temperature stability and shelf life. The chilled solution is dispensed through a showerhead onto a substrate. The substrate is positioned in a holder that has a raised structure peripheral to the substrate to retain or impound a controlled volume (or depth) of reagent solution over the exposed surface of the substrate. The reagent solution is periodically or continuously replenished from the showerhead so that only the part of the solution directly adjacent to the substrate is heated. A heater is disposed beneath the substrate and maintains the substrate at an elevated temperature at which the deposition of a desired solid phase from the reagent solution may be initiated.Type: ApplicationFiled: May 7, 2008Publication date: December 4, 2008Inventor: Isaiah O. Oladeji
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Patent number: 7459769Abstract: It is an object of the invention to relax magnetic saturation and realize a high-performance magnetic shield effect that is suitable for magnetic devices such as an MRAM. A magnetic shield member of the invention is suitable for a magnetic memory device in which a magnetic random access memory (MRAM) consisting of a TMR element formed by stacking a magnetization fixed layer with a direction of magnetization fixed and a magnetic layer, in which a direction of magnetization can be changed, via a tunnel barrier layer is sealed by a sealing material such as resin.Type: GrantFiled: February 8, 2005Date of Patent: December 2, 2008Assignee: Sony CorporationInventors: Yoshihiro Kato, Yoshinori Ito, Tatsushiro Hirata, Katsumi Okayama, Kaoru Kobayashi
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Publication number: 20080283874Abstract: The present invention provides a field-effect transistor and method for the fabrication of a field-effect transistor by deposition on a substrate (480), which method comprises a wet chemical deposition of materials that react to form a semi-conducting material. The materials deposited include cadmium, zinc, lead, tin, bismuth, antimony, indium, copper or mercury. The wet chemical deposition may be by chemical bath deposition or spray pyrolysis. A vacuum deposition process is not required.Type: ApplicationFiled: June 24, 2005Publication date: November 20, 2008Applicant: KONINKLIJKE PHILIPS ELECTRONICS, N.V.Inventors: Martinus P.J. Peeters, Dagobert Michel de Leeuw, Femke Karina de Theije
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Publication number: 20080280427Abstract: A method for manufacturing wafers using a low EPD crystal growth process and a wafer annealing process is provided that results in GaAs/InGaP wafers that provide higher device yields from the wafer.Type: ApplicationFiled: May 9, 2007Publication date: November 13, 2008Inventors: Weiguo Liu, Morris S. Young, M. Hani Badawi
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Patent number: 7446055Abstract: This invention relates to an improvement in a deposition process for producing low dielectric films having a dielectric constant of 3, preferably <2.7 and lower. The process comprises the steps: (a) forming a liquid precursor solution comprised of an organosilicon source containing both Si—O and Si—C bonds and solvent; (b) generating a liquid mist of said liquid precursor solution, said mist existing as precursor solution droplets having a number average droplet diameter size of less than 0.5 ?m; (c) preferably electrically charging the liquid mist of said liquid precursor solution droplets; (d) depositing liquid mist of said liquid precursor solution droplets onto a substrate; and, (e) converting the thus deposited liquid mist of said liquid precursor solution droplets to a solid, low dielectric film.Type: GrantFiled: March 17, 2005Date of Patent: November 4, 2008Assignee: Air Products and Chemicals, Inc.Inventors: Scott Jeffrey Weigel, Jean Louise Vincent, Sarah Kathryn Coulter, James Edward MacDougall
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Publication number: 20080182390Abstract: A method of forming a densified nanoparticle thin film is disclosed. The method includes positioning a substrate in a first chamber; and depositing a nanoparticle ink, the nanoparticle ink including a set of Group IV semiconductor particles and a solvent. The method also includes heating the nanoparticle ink to a first temperature between about 30° C. and about 300° C., and for a first time period between about 1 minute and about 60 minutes, wherein the solvent is substantially removed, and a porous compact is formed; and positioning the substrate in a second chamber, the second chamber having a pressure of between about 1×10?7 Torr and about 1×10?4 Torr. The method further includes depositing on the porous compact a dielectric material; wherein the densified nanoparticle thin film is formed.Type: ApplicationFiled: December 4, 2007Publication date: July 31, 2008Inventors: Francesco Lemmi, Elena V. Rogojina, Pingrong Yu, David Jurbergs, Homer Antoniadis, Maxim Kelman
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Patent number: 7375011Abstract: A method of making an ex-situ doped semiconductor transport layer for use in an electronic device includes: growing a first set of semiconductor nanoparticles having surface organic ligands in a colloidal solution; growing a second set of dopant material nanoparticles having surface organic ligands in a colloidal solution; depositing a mixture of the first set of semiconductor nanoparticles and the second set of dopant material nanoparticles on a surface, wherein there are more semiconductor nanoparticles than dopant material nanoparticles; performing a first anneal of the deposited mixture of nanoparticles so that the organic ligands boil off the surfaces of the first and second set of nanoparticles; performing a second anneal of the deposited mixture so that the semiconductor nanoparticles fuse to form a continuous semiconductor layer and the dopant material atoms diffuse out from the dopant material nanoparticles and into the continuous semiconductor layer.Type: GrantFiled: February 22, 2007Date of Patent: May 20, 2008Assignee: Eastman Kodak CompanyInventor: Keith B. Kahen
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Patent number: 7361529Abstract: A transistor is formed by applying modifier coatings to source and drain contacts and/or to the channel region between those contacts. The modifier coatings are selected to adjust the surface energy pattern in the source/drain/channel region such that semiconductor printing fluid is not drawn away from the channel region. For example, the modifier coatings for the contacts can be selected to have substantially the same surface energy as the modifier coating for the channel region. Semiconductor printing fluid deposited on the channel region therefore settles in place (due to the lack of a surface energy differential) and forms a relatively thick active semiconductor region between the contacts. Alternatively, the modifier coatings can be selected to have lower surface energies than the modifier coating in the channel region, which actually causes semiconductor printing fluid to be drawn towards the channel region.Type: GrantFiled: January 12, 2006Date of Patent: April 22, 2008Assignee: Palo Alto Research Center IncorporatedInventors: Michael L. Chabinyc, Ana C. Arias
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Patent number: 7320936Abstract: An insulating layer (5) and a conductive seed layer (6) are applied to a substrate (1) in a simple process. A photo resist with palladium chloride are provided in a bath for electrophoretic deposition onto the substrate. The photo resist is an insulator and the palladium chloride is a catalyst. The layer is heated with UV to cure it. The layer is plasma etched to expose more of the palladium chloride, which acts as a catalyst for electrodes plating of the conductive seed layer. A thicker conductive layer (7) is then electroplated onto the seed layer. These steps may be repeated for successive insulating and/or conductive layers.Type: GrantFiled: June 21, 2005Date of Patent: January 22, 2008Assignee: University College Cork - National University of Ireland, CorkInventors: Magall Brunet, Andrew Mark Connell, Paul McCloskey, Terence O'Donnell, Stephen O'Reilly, Sean Cian O'Mathuna
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Patent number: 7259046Abstract: According to one aspect of the present invention, a semiconductor device, comprising a wiring board provided with wires and electrodes; a semiconductor element which is mounted on the wiring board and has plural connection electrodes formed on its surface; and a metal layer of fine metal particles aggregated and bonded which is interposed between the electrodes on the wiring board and the connection electrodes of the semiconductor element to connect between the electrodes and the connection electrodes, is provided.Type: GrantFiled: March 9, 2005Date of Patent: August 21, 2007Assignee: Kabushiki Kaisha ToshibaInventors: Hideo Aoki, Yoshiaki Sugizaki, Naoko Yamaguchi, Chiaki Takubo
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Patent number: 7186581Abstract: A method for manufacturing an organic EL device comprising: coating a composition including an organic EL material on a plurality of electrodes to form an organic EL layer on each electrode; defining an effectively optical area in which the plurality of electrodes are formed; and defining a coating area which is broader than the effectively optical area, on which the composition including an organic EL material is to be coated. According to this method, a uniform display device without uneven luminance and uneven chrominance within a pixel or among a plurality of pixels in the effectively optical area can be obtained.Type: GrantFiled: July 8, 2005Date of Patent: March 6, 2007Assignee: Seiko Epson CorporationInventors: Shunichi Seki, Katsuyuki Morii
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Patent number: 7141492Abstract: The invention provides a method of forming a high-performance thin-film at low cost using a liquid material in safety, an apparatus to form a thin-film, a method of manufacturing a semiconductor device, an electro-optical unit, and an electronic apparatus. An apparatus to form a thin-film includes a coating unit to apply a liquid material containing a thin-film component onto a substrate and also includes heat-treating units to heat the substrate applied with the liquid material. The coating unit and the heat-treating units each include a control device to control the atmosphere in a treating chamber to treat the substrate.Type: GrantFiled: April 21, 2003Date of Patent: November 28, 2006Assignee: Seiko Epson CorporationInventor: Ichio Yudasaka
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Patent number: 7115507Abstract: A substrate is patterned by forming an indent region 8 in the surface 10 of a substrate 4 and depositing a liquid material onto the surface 10 at selected locations adjacent to the indent region 8. The liquid material spreads over the surface to an edge of the indent region, at which point further spreading is controlled by the effective enhancement of the contact angle of the liquid material relative to the surface as provided by the indent region.Type: GrantFiled: July 22, 2003Date of Patent: October 3, 2006Assignee: Seiko Epson CorporationInventor: Takeo Kawase