Group Iii-v Compound On Si Or Ge (epo) Patents (Class 257/E21.127)
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Patent number: 12063023Abstract: Disclosed is a method for manufacturing a piezoelectric AlxGa1-xN (0.5?x?1) thin film, comprising: forming a stress control layer comprised of a Group III nitride on a silicon substrate by chemical vapor deposition (CVD); and depositing a piezoelectric AlxGa1-xN (0.5?x?1) thin film on the stress control layer, the thin film being deposited by PVD at 0.3 Tm (Tm is melting temperature of a piezoelectric thin film material) or higher. Further, a method for manufacturing a device in conjunction with piezoelectric AlxGa1-xN (0.5?x?1) thin films is provided.Type: GrantFiled: February 28, 2020Date of Patent: August 13, 2024Assignee: WAVELORD CO., LTD.Inventor: Sang Jeong An
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Patent number: 11967617Abstract: A nitride semiconductor substrate including a group III nitride semiconductor crystal and having a main surface, wherein a low index crystal plane is (0001) plane curved in a concave spherical shape to the main surface, and the off-angle (?m, ?a) at a position (x, y) in the main surface approximated by x representing a coordinate in a direction along <1-100> axis, y is a coordinate in a direction along <11-20> axis, (0, 0) represents a coordinate (x, y) of the center, ?m represents a direction component along <1-100> axis in an off-angle of <0001> axis with respect to a normal, ?a represents a direction component along <11-20> axis in the off-angle, (M1, A1) represents a rate of change in the off-angle (?m, ?a) with respect to the position (x, y) in the main surface, and (M2, A2) represents the off-angle (?m, ?a) at the center.Type: GrantFiled: August 8, 2018Date of Patent: April 23, 2024Assignee: SUMITOMO CHEMICAL COMPANY, LIMITEDInventors: Fumimasa Horikiri, Takehiro Yoshida
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Patent number: 11955581Abstract: The present invention provides a method for producing a Group III nitride semiconductor device which can relax strain between a Group III nitride semiconductor layer containing In and a semiconductor layer adjacent thereto, and a production method therefor. The well layer is a Group III nitride semiconductor layer containing In. The barrier layer is a Group III nitride semiconductor layer. The well layer and the barrier layer are brought into contact with each other in at least one of growing a well layer and growing a barrier layer. A gas containing hydrogen gas as a carrier gas is used in growing a well layer and growing a barrier layer. In growing a barrier layer, the flow rate of hydrogen gas is higher than the flow rate of hydrogen gas in growing a well layer.Type: GrantFiled: July 7, 2021Date of Patent: April 9, 2024Assignee: TOYODA GOSEI CO., LTD.Inventor: Koji Okuno
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Patent number: 11955172Abstract: An atomic orbital based memory storage is provided that includes a plurality of surface atoms forming dangling bonds (DBs) and a subset of the plurality of surface atoms passivated with spatial control to form covalent bonds with hydrogen, deuterium, or a combination thereof. The atomic orbital based data storage that can be rewritten and corrected as needed. The resulting data storage is also archival and capable of high data densities than any known storage as the data is retained in a binary storage or a given orbital being passivated or a dangling bond (DB). A method of forming and reading the atomic orbital data storage is also provided. The method including selectively removing covalent bonds to form dangling bonds (DBs) extending from a surface atom by hydrogen lithography and imaging the covalent bonds spatially to read the atomic orbital data storage.Type: GrantFiled: November 28, 2022Date of Patent: April 9, 2024Assignees: National Research Council of Canada, Quantum Silicon Inc., The Governors of the University of AlbertaInventors: Roshan Achal, Robert A. Wolkow, Jason Pitters, Martin Cloutier, Mohammad Rashidi, Marco Taucer, Taleana Huff
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Patent number: 11923237Abstract: A manufacturing method of a semiconductor device includes at least the following steps. A sacrificial substrate is provided. An epitaxial layer is formed on the sacrificial substrate. An etch stop layer is formed on the epitaxial layer. Carbon atoms are implanted into the etch stop layer. A capping layer and a device layer are formed on the etch stop layer. A handle substrate is bonded to the device layer. The sacrificial substrate, the epitaxial layer, and the etch stop layer having the carbon atoms are removed from the handle substrate.Type: GrantFiled: August 30, 2021Date of Patent: March 5, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chi-Ming Chen, Kuei-Ming Chen, Po-Chun Liu, Chung-Yi Yu, Chia-Shiung Tsai
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Patent number: 11894487Abstract: A light-emitting device comprises a substrate; a first semiconductor layer formed on the substrate; a first patterned layer formed on the first semiconductor layer; and a second semiconductor layer formed on the first semiconductor layer, wherein the second semiconductor layer comprises a core layer comprising a group III or transition metal material formed along the first patterned layer.Type: GrantFiled: June 16, 2021Date of Patent: February 6, 2024Assignee: EPISTAR CORPORATIONInventors: Shih-Kuo Lai, Li-Shen Tang
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Patent number: 11802049Abstract: A sputtering target for a gallium nitride thin film, which has a low oxygen content, a high density and a low resistivity. A gallium nitride powder having powder physical properties of a low oxygen content and a high bulk density is used and hot pressing is conducted at high temperature in high vacuum to prepare a gallium nitride sintered body having a low oxygen content, a high density and a low resistivity.Type: GrantFiled: February 1, 2022Date of Patent: October 31, 2023Assignee: TOSOH CORPORATIONInventors: Masami Mesuda, Hideto Kuramochi
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Patent number: 11769697Abstract: An embodiment provides an epitaxial water evaluation method comprising the steps of: cutting a wafer into a first specimen and a second specimen; growing and thermally treating epitaxial layers of the first and second specimens under different conditions; and measuring the diffusion distance of a dopant in each of the epitaxial layers of the first and second specimens.Type: GrantFiled: January 23, 2020Date of Patent: September 26, 2023Assignee: SK SILTRON CO., LTD.Inventors: Jung Kil Park, Ja Young Kim
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Patent number: 11767609Abstract: GaN wafers and bulk crystal have dislocation density approximately 1/10 of dislocation density of seed used to form the bulk crystal and wafers. Masks are formed selectively on GaN seed dislocations, and new GaN grown on the seed has fewer dislocations and often 1/10 or less of dislocations present in seed.Type: GrantFiled: May 3, 2021Date of Patent: September 26, 2023Assignee: SixPoint Materials, Inc.Inventor: Tadao Hashimoto
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Patent number: 11764326Abstract: The present disclosure relates to a method for manufacturing a device, where the device includes, in order, a metamorphic contact layer, a first metamorphic junction, a metamorphic tunnel junction, and a second metamorphic junction. To produce the device, the manufacturing includes, in order, a first depositing of a buffer layer onto a substrate, a second depositing of the metamorphic contact layer, a third depositing of the first metamorphic junction, a fourth depositing of the metamorphic tunnel junction, a fifth depositing of the second metamorphic junction, and the removing of the buffer layer and the substrate.Type: GrantFiled: August 30, 2021Date of Patent: September 19, 2023Assignee: Alliance for Sustainable Energy, LLCInventors: Kevin Louis Schulte, Myles Aaron Steiner, Daniel Joseph Friedman, Ryan Matthew France, Asegun Henry
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Patent number: 11699586Abstract: A method of manufacturing nitride semiconductor substrate, comprising: providing silicon-on-insulator substrate which comprises an underlying silicon layer, a buried silicon dioxide layer and a top silicon layer; forming a first nitride semiconductor layer on the top silicon layer; forming, in the first nitride semiconductor layer, a plurality of notches which expose the top silicon layer; removing the top silicon layer and forming a plurality of protrusions and a plurality of recesses on an upper surface of the buried silicon dioxide layer, wherein each of the plurality of protrusions is in contact with the first nitride semiconductor layer, and there is a gap between each of the plurality of recesses and the first nitride semiconductor layer; and epitaxially growing a second nitride semiconductor layer on the first nitride semiconductor layer, such that the first nitride semiconductor layer and the second nitride semiconductor layer form a nitride semiconductor substrate.Type: GrantFiled: August 13, 2019Date of Patent: July 11, 2023Assignee: ENKRIS SEMICONDUCTOR, INC.Inventor: Kai Cheng
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Patent number: 11665984Abstract: A projected memory device includes a carbon-based projection component. The device includes two electrodes, a memory segment, and a projection component. The projection component and the memory segment form a dual element that connects the two electrodes. The projection component extends parallel to and in contact with the memory segment. The memory segment includes a resistive memory material, while the projection component includes a thin film of non-insulating material that essentially comprises carbon. In a particular implementation, the non-insulating material and the projection component essentially comprises amorphous carbon. Using carbon and, in particular, amorphous carbon, as a main component of the projection component, allows unprecedented flexibility to be achieved when tuning the electrical resistance of the projection component.Type: GrantFiled: December 7, 2021Date of Patent: May 30, 2023Assignee: International Business Machines CorporationInventors: Ghazi Sarwat Syed, Vara Sudananda Prasad Jonnalagadda, Benedikt Kersting, Manuel Le Gallo-Bourdeau, Abu Sebastian
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Patent number: 11664426Abstract: A semiconductor device includes an epitaxial substrate. The epitaxial substrate includes a substrate. A strain relaxed layer covers and contacts the substrate. A III-V compound stacked layer covers and contacts the strain relaxed layer. The III-V compound stacked layer is a multilayer epitaxial structure formed by aluminum nitride, aluminum gallium nitride or a combination of aluminum nitride and aluminum gallium nitride.Type: GrantFiled: March 3, 2022Date of Patent: May 30, 2023Assignee: UNITED MICROELECTRONICS CORP.Inventors: Yu-Ming Hsu, Yu-Chi Wang, Yen-Hsing Chen, Tsung-Mu Yang, Yu-Ren Wang
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Patent number: 11641005Abstract: A method of manufacturing a light-emitting element includes: providing a substrate, wherein the substrate includes a top surface with a first area and a second area; introducing a semiconductor material to form a first layer on the first area and a second layer on the second area, wherein the first layer includes a first crystal quality and the second layer includes a second crystal quality, the first crystal quality is different from the second crystal quality; and dicing the substrate along the second area.Type: GrantFiled: May 24, 2021Date of Patent: May 2, 2023Assignee: EPISTAR CORPORATIONInventors: Yi-Lun Chou, Chih-Hao Chen
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Patent number: 11588015Abstract: An epitaxial structure includes a substrate, a nucleation layer on the substrate, a buffer layer on the nucleation layer, and a nitride layer on the buffer layer. The nucleation layer consists of regions in a thickness direction, wherein a chemical composition of the regions is Al(1-x)InxN, where 0?x?1. A maximum value of the x value in the plurality of regions is the same, a minimum value of the x value in the plurality of regions is the same, and an absolute value of a gradient slope of each of the regions is 0.1%/nm to 50%/nm. A thickness of the nucleation layer is less than a thickness of the buffer layer. A roughness of a surface of the nucleation layer in contact with the buffer layer is greater than a roughness of a surface of the buffer layer in contact with the nitride layer.Type: GrantFiled: March 9, 2022Date of Patent: February 21, 2023Assignee: GlobalWafers Co., Ltd.Inventors: Jia-Zhe Liu, Yen-Lun Huang, Ying-Ru Shih
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Patent number: 11535951Abstract: A method of performing heteroepitaxy comprises exposing a substrate to a carrier gas, a first precursor gas, a Group II/III element, and a second precursor gas, to form a heteroepitaxial growth of one of GaAs, AlAs, InAs, GaP, InP, ZnSe, GaSe, CdSe, InSe, ZnTe, CdTe, GaTe, HgTe, GaSb, InSb, AlSb, CdS, GaN, and AlN on the substrate; wherein the substrate comprises one of GaAs, AlAs, InAs, GaP, InP, ZnSe, GaSe, CdSe, InSe, ZnTe, CdTe, GaTe, HgTe, GaSb, InSb, AlSb, CdS, GaN, and AlN; wherein the carrier gas is Hz, wherein the first precursor is HCl, the Group II/III element comprises at least one of Zn, Cd, Hg, Al, Ga, and In; and wherein the second precursor is one of AsH3 (arsine), PH3 (phosphine), H2Se (hydrogen selenide), H2Te (hydrogen telluride), SbH3 (hydrogen antimonide), H2S (hydrogen sulfide), and NH3 (ammonia). The process may be an HVPE (hydride vapor phase epitaxy) process.Type: GrantFiled: December 11, 2020Date of Patent: December 27, 2022Assignee: United States of America as represented by the Secretary of the Air ForceInventor: Vladimir Tassev
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Patent number: 11508818Abstract: A semiconductor device includes an epitaxial substrate. The epitaxial substrate includes a substrate. A strain relaxed layer covers and contacts the substrate. A III-V compound stacked layer covers and contacts the strain relaxed layer. The III-V compound stacked layer is a multilayer epitaxial structure formed by aluminum nitride, aluminum gallium nitride or a combination of aluminum nitride and aluminum gallium nitride.Type: GrantFiled: October 21, 2021Date of Patent: November 22, 2022Assignee: UNITED MICROELECTRONICS CORP.Inventors: Yu-Ming Hsu, Yu-Chi Wang, Yen-Hsing Chen, Tsung-Mu Yang, Yu-Ren Wang
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Patent number: 11450747Abstract: The present invention discloses a semiconductor structure with an epitaxial layer, including a substrate, a blocking layer on said substrate, wherein said blocking layer is provided with predetermined recess patterns, multiple recesses formed in said substrate, wherein each of said multiple recesses is in 3D diamond shape with a centerline perpendicular to a surface of said substrate, a buffer layer on a surface of each of said multiple recesses, and an epitaxial layer comprising a buried portion formed on said buffer layer in each of said multiple recesses and only one above-surface portion formed directly above said blocking layer and directly above said recess patterns of said blocking layer, and said above-surface portion directly connects said buried portion in each of said multiple recesses, and a first void is formed inside each of said buried portions of said epitaxial layer in said recess.Type: GrantFiled: March 30, 2021Date of Patent: September 20, 2022Assignee: UNITED MICROELECTRONICS CORP.Inventors: Hsiao-Pang Chou, Hon-Huei Liu, Ming-Chang Lu, Chin-Fu Lin, Yu-Cheng Tung
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Patent number: 11245054Abstract: A base substrate includes a supporting substrate and a base crystal layer provided on a main face of the supporting substrate composed of a crystal of a group 13 nitride and having a crystal growth surface. The base crystal layer includes a raised part. A reaction product of a material of the supporting substrate and the crystal of the group 13 nitride, metal of a group 13 element and/or void is present between the raised part and supporting substrate.Type: GrantFiled: March 23, 2020Date of Patent: February 8, 2022Assignee: NGK INSULATORS, LTD.Inventors: Masahiro Sakai, Shohei Oue, Masashi Goto, Takashi Yoshino
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Patent number: 10700235Abstract: The method comprises: forming an Al layer or Al droplets on a surface of a substrate by flowing an organic metal gas containing Al without flowing an ammonia gas; forming an AlN buffer layer on the Al layer or Al droplets by flowing the organic metal gas containing Al and the ammonia gas, the Al layer or Al droplets remaining as a metal under the AlN buffer layer; forming the Group III nitride semiconductor on the AlN buffer layer; and peeling the Group III nitride semiconductor in a place of the Al layer or Al droplets from the substrate.Type: GrantFiled: August 29, 2018Date of Patent: June 30, 2020Assignee: TOYODA GOSEI CO., LTD.Inventor: Koji Okuno
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Patent number: 9957639Abstract: The present invention provides a method for producing an epitaxial silicon carbide wafer comprising epitaxially growing SiC on an SiC substrate to produce an epitaxial SiC wafer during which further reducing stacking faults and comet defects than the conventional technologies to obtain an epitaxial SiC wafer having a high quality epitaxial film. The method for producing the epitaxial silicon carbide wafer is characterized in that a pre-growth atmosphere gas flowing into the growth furnace before the start of epitaxial growth contains hydrogen gas and has a balance of an inert gas and unavoidable impurities, and the hydrogen gas is contained in 0.1 to 10.0 vol % with respect to the inert gas.Type: GrantFiled: February 27, 2015Date of Patent: May 1, 2018Assignee: NIPPON STEEL & SUMITOMO METAL CORPORATIONInventors: Takashi Aigo, Wataru Ito, Tatsuo Fujimoto
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Patent number: 9041111Abstract: A flat panel detector includes a photoelectric conversion layer and a pixel detecting element disposed under the photoelectric conversion layer. The pixel detecting element includes: a pixel electrode for receiving charges, a storage capacitor for storing the received charges, and a thin film transistor for controlling outputting of the stored charges. The storage capacitor includes a first electrode and a second electrode. The first electrode includes an upper electrode and a bottom electrode that are disposed opposite to each other and electrically connected. A second electrode is sandwiched between the upper electrode and the bottom electrode. It is insulated between the upper electrode and the second electrode and between the second electrode and the bottom electrode.Type: GrantFiled: December 16, 2013Date of Patent: May 26, 2015Assignee: BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.Inventor: Zhenyu Xie
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Patent number: 9035318Abstract: A semiconductor device includes a GaN FET with an overvoltage clamping component electrically coupled to a drain node of the GaN FET and coupled in series to a voltage dropping component. The voltage dropping component is electrically coupled to a terminal which provides an off-state bias for the GaN FET. The overvoltage clamping component conducts insignificant current when a voltage at the drain node of the GaN FET is less than the breakdown voltage of the GaN FET and conducts significant current when the voltage rises above a safe voltage limit. The voltage dropping component is configured to provide a voltage drop which increases as current from the overvoltage clamping component increases. The semiconductor device is configured to turn on the GaN FET when the voltage drop across the voltage dropping component reaches a threshold value.Type: GrantFiled: May 3, 2013Date of Patent: May 19, 2015Assignee: TEXAS INSTRUMENTS INCORPORATEDInventors: Sameer Pendharkar, Naveen Tipirneni
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Patent number: 9018050Abstract: A rolled-up transmission line structure for a radiofrequency integrated circuit (RFIC) comprises a multilayer sheet in a rolled configuration comprising multiple turns about a longitudinal axis, where the multilayer sheet comprises a conductive pattern layer on a strain-relieved layer. The conductive pattern layer comprises a first conductive film and a second conductive film separated from the first conductive film in a rolling direction. In the rolled configuration, the first conductive film surrounds the longitudinal axis, and the second conductive film surrounds the first conductive film. The first conductive film serves as a signal line and the second conductive film serves as a conductive shield for the rolled-up transmission line structure.Type: GrantFiled: October 10, 2013Date of Patent: April 28, 2015Assignee: The Board of Trustees of the University of IllinoisInventors: Xiuling Li, Wen Huang
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Patent number: 8999805Abstract: A semiconductor device includes a first type region including a first conductivity type. The semiconductor device includes a second type region including a second conductivity type. The semiconductor device includes a channel region extending between the first type region and the second type region. The semiconductor device includes a gate region surrounding the channel region. The gate region includes a gate electrode. A gate electrode length of the gate electrode is less than about 10 nm. A method of forming a semiconductor device is provided.Type: GrantFiled: October 5, 2013Date of Patent: April 7, 2015Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Jean-Pierre Colinge, Kuo-Cheng Ching, Ta-Pen Guo, Carlos H. Diaz
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Patent number: 8993447Abstract: An apparatus includes a wafer with a number of openings therein. For each opening, an LED device is coupled to a conductive carrier and the wafer in a manner so that each of the coupled LED device and a portion of the conductive carrier at least partially fill the opening. A method of fabricating an LED device includes forming a number of openings in a wafer. The method also includes coupling light-emitting diode (LED) devices to conductive carriers. The LED devices with conductive carriers at least partially fill each of the openings.Type: GrantFiled: April 8, 2013Date of Patent: March 31, 2015Assignee: TSMC Solid State Lighting Ltd.Inventors: Hsing-Kuo Hsia, Chih-Kuang Yu, Hung-Yi Kuo, Chyi Shyuan Chern
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Patent number: 8987922Abstract: A semiconductor device includes a substrate, a bond pad above the substrate, a guard ring above the substrate, and an alignment mark above the substrate, between the bond pad and the guard ring. The device may include a passivation layer on the substrate, a polymer layer, a post-passivation interconnect (PPI) layer in contact with the bond pad, and a connector on the PPI layer, wherein the connector is between the bond pad and the guard ring, and the alignment mark is between the connector and the guard ring. The alignment mark may be at the PPI layer. There may be multiple alignment marks at different layers. There may be multiple alignment marks for the device around the corners or at the edges of an area surrounded by the guard ring.Type: GrantFiled: March 13, 2013Date of Patent: March 24, 2015Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Tsung-Yuan Yu, Hsien-Wei Chen, Wen-Hsiung Lu, Hung-Jen Lin
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Patent number: 8981403Abstract: A patterned surface for improving the growth of semiconductor layers, such as group III nitride-based semiconductor layers, is provided. The patterned surface can include a set of substantially flat top surfaces and a plurality of openings. Each substantially flat top surface can have a root mean square roughness less than approximately 0.5 nanometers, and the openings can have a characteristic size between approximately 0.1 micron and five microns.Type: GrantFiled: September 6, 2012Date of Patent: March 17, 2015Assignee: Sensor Electronic Technology, Inc.Inventors: Maxim S Shatalov, Rakesh Jain, Jinwei Yang, Michael Shur, Remigijus Gaska
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Patent number: 8937020Abstract: One object is to provide a deposition technique for forming an oxide semiconductor film. By forming an oxide semiconductor film using a sputtering target including a sintered body of a metal oxide whose concentration of hydrogen contained is low, for example, lower than 1×1016 atoms/cm3, the oxide semiconductor film contains a small amount of impurities such as a compound containing hydrogen typified by H2O or a hydrogen atom. In addition, this oxide semiconductor film is used as an active layer of a transistor.Type: GrantFiled: June 20, 2013Date of Patent: January 20, 2015Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Toru Takayama, Keiji Sato
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Patent number: 8927433Abstract: Provided is a technology for forming a conductive via hole to implement a three dimensional stacked structure of an integrated circuit. A method for forming a conductive via hole according to an embodiment of the present invention comprises: filling inside of a via hole structure that is formed in one or more of an upper portion and a lower portion of a substrate with silver by using a reduction and precipitation of silver in order to connect a plurality of stacked substrates by a conductor; filling a portion that is not filled with silver inside of the via hole structure by flowing silver thereinto; and sublimating residual material of silver oxide series, which is generated during the flowing, on an upper layer inside of the via hole structure filled with silver.Type: GrantFiled: December 15, 2010Date of Patent: January 6, 2015Assignee: Electronics and Telecommunications Research InstituteInventor: Jin-Yeong Kang
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Patent number: 8921174Abstract: Disclosed herein is a method for fabricating a complementary tunneling field effect transistor based on a standard CMOS IC process, which belongs to the field of logic devices and circuits of field effect transistors in ultra large scaled integrated (ULSI) circuits. In the method, an intrinsic channel and body region of a TFET are formed by means of complementary P-well and N-well masks in the standard CMOS IC process to form a well doping, a channel doping and a threshold adjustment by implantation. Further, a bipolar effect in the TFET can be inhibited via a distance between a gate and a drain on a layout so that a complementary TFET is formed. In the method according to the invention, the complementary tunneling field effect transistor (TFET) can be fabricated by virtue of existing processes in the standard CMOS IC process without any additional masks and process steps.Type: GrantFiled: June 14, 2012Date of Patent: December 30, 2014Assignee: Peking UniversityInventors: Ru Huang, Qianqian Huang, Zhan Zhan, Yingxin Qiu, Yangyuan Wang
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Patent number: 8912098Abstract: A device and method for device fabrication includes forming a buried gate electrode in a dielectric substrate and patterning a stack that includes a high dielectric constant layer, a carbon-based semi-conductive layer and a protection layer over the buried gate electrode. An isolation dielectric layer formed over the stack is opened to define recesses in regions adjacent to the stack. The recesses are etched to form cavities and remove a portion of the high dielectric constant layer to expose the carbon-based semi-conductive layer on opposite sides of the buried gate electrode. A conductive material is deposited in the cavities to form self-aligned source and drain regions.Type: GrantFiled: April 15, 2013Date of Patent: December 16, 2014Assignee: International Business Machines CorporationInventors: Dechao Guo, Shu-Jen Han, Keith Kwong Hon Wong, Jun Yuan
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Patent number: 8907359Abstract: An optoelectronic semiconductor component comprising a semiconductor layer sequence (3) based on a nitride compound semiconductor and containing an n-doped region (4), a p-doped region (8) and an active zone (5) arranged between the n-doped region (4) and the p-doped region (8) is specified. The p-doped region (8) comprises a p-type contact layer (7) composed of InxAlyGa1-x-yN where 0?x?1, 0?y?1 and x+y?1. The p-type contact layer (7) adjoins a connection layer (9) composed of a metal, a metal alloy or a transparent conductive oxide, wherein the p-type contact layer (7) has first domains (1) having a Ga-face orientation and second domains (2) having an N-face orientation at an interface with the connection layer (9).Type: GrantFiled: September 16, 2009Date of Patent: December 9, 2014Assignee: OSRAM Opto Semiconductors GmbHInventors: Martin Strassburg, Lutz Höppel, Matthias Peter, Ulrich Zehnder, Tetsuya Taki, Andreas Leber, Rainer Butendeich, Thomas Bauer
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Patent number: 8906752Abstract: Ink compositions comprising polythiophenes and methicone that are formulated for inkjet printing the hole injecting layer (HIL) of an organic light emitting diode (OLED) are provided. Also provided are methods of inkjet printing the HILs using the ink compositions.Type: GrantFiled: December 4, 2013Date of Patent: December 9, 2014Assignee: Kateeva, Inc.Inventors: Inna Tregub, Rajsapan Jain, Michelle Chan
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Patent number: 8900912Abstract: Embodiments of the invention relate to a camera assembly including a rear-facing camera and a front-facing camera operatively coupled together (e.g., bonded, stacked on a common substrate). In some embodiments of the invention, a system having an array of frontside illuminated (FSI) imaging pixels is bonded to a system having an array of backside illuminated (BSI) imaging pixels, creating a camera assembly with a minimal size (e.g., a reduced thickness compared to prior art solutions). An FSI image sensor wafer may be used as a handle wafer for a BSI image sensor wafer when it is thinned, thereby decreasing the thickness of the overall camera module. According to other embodiments of the invention, two package dies, one a BSI image sensor, the other an FSI image sensor, are stacked on a common substrate such as a printed circuit board, and are operatively coupled together via redistribution layers.Type: GrantFiled: June 26, 2013Date of Patent: December 2, 2014Assignee: OmniVision Technologies, Inc.Inventors: Gang Chen, Ashish Shah, Duli Mao, Hsin-Chih Tai, Howard E. Rhodes
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Patent number: 8872308Abstract: III-N material grown on a silicon substrate includes a single crystal rare earth oxide layer positioned on a silicon substrate. The rare earth oxide is substantially crystal lattice matched to the surface of the silicon substrate. A first layer of III-N material is positioned on the surface of the rare earth oxide layer. An inter-layer of aluminum nitride (AlN) is positioned on the surface of the first layer of III-N material and an additional layer of III-N material is positioned on the surface of the inter-layer of aluminum nitride. The inter-layer of aluminum nitride and the additional layer of III-N material are repeated n-times to reduce or engineer strain in a final III-N layer. A cap layer of AlN is grown on the final III-N layer and a III-N layer of material with one of an LED structure and an HEMT structure is grown on the AlN cap layer.Type: GrantFiled: February 20, 2013Date of Patent: October 28, 2014Assignee: Translucent, Inc.Inventors: Erdem Arkun, Michael Lebby, Andrew Clark, Rytis Dargis
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Patent number: 8853809Abstract: An optical element 10 for transmitting light therethrough along a predetermined direction and modulating the light comprises a structure 11 having a first region R1 and a second region R2 periodically arranged with respect to the first region R1 along a plane perpendicular to the predetermined direction, the first and second regions R1, R2 having respective refractive indexes different from each other, and properties of transmitting the light therethrough.Type: GrantFiled: May 7, 2013Date of Patent: October 7, 2014Assignee: Hamamatsu Photonics K.K.Inventors: Kazutoshi Nakajima, Toru Hirohata, Wataru Aka-Hori, Kazunori Tanaka, Kazuue Fujita
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Patent number: 8846464Abstract: An approach for controlling a critical dimension (CD) of a RMG of a semiconductor device is provided. Specifically, embodiments of the present invention allow for CD consistency between a dummy gate and a subsequent RMG. In a typical embodiment, a dummy gate having a cap layer is formed over a substrate. A re-oxide layer is then formed over the substrate and around the dummy gate. A set of doping implants will then be implanted in the substrate, and the re-oxide layer will subsequently be removed (after the set of doping implants have been implanted). A set of spacers will then be formed along a set of side walls of the dummy gate and an epitaxial layer will be formed around the set of side walls. Thereafter, the dummy gate will be replaced with a metal gate (e.g., an aluminum or tungsten body having a high-k metal liner there-around).Type: GrantFiled: March 13, 2013Date of Patent: September 30, 2014Assignee: GLOBALFOUNDRIES Inc.Inventors: Bingwu Liu, Baofu Zhu, Nam Sung Kim
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Patent number: 8835247Abstract: A sensor array for detecting particles, the sensor array comprising a substrate having a plurality of holes, a plurality of electronic sensor chips each having a sensor active region being sensitive to the presence of particles to be detected, and an electric contacting structure adapted for electrically contacting the plurality of electronic sensor chips, wherein the plurality of electronic sensor chips and/or the electric contacting structure are connected to the substrate in such a manner that the plurality of holes in combination with the plurality of electronic sensor chips and/or the electric contacting structure form a plurality of wells with integrated particle sensors.Type: GrantFiled: May 11, 2009Date of Patent: September 16, 2014Assignee: NXP, B.V.Inventors: Michel De Langen, Ger Reuvers, Frans Meeuwsen
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Patent number: 8823025Abstract: III-N material grown on a silicon substrate includes a single crystal buffer positioned on a silicon substrate. The buffer is substantially crystal lattice matched to the surface of the silicon substrate and includes aluminum oxynitride adjacent the substrate and aluminum nitride adjacent the upper surface. A first layer of III-N material is positioned on the upper surface of the buffer. An inter-layer of aluminum nitride (AlN) is positioned on the first III-N layer and an additional layer of III-N material is positioned on the inter-layer. The inter-layer of aluminum nitride and the additional layer of III-N material are repeated n-times to reduce or engineer strain in a final III-N layer.Type: GrantFiled: February 20, 2013Date of Patent: September 2, 2014Assignee: Translucent, Inc.Inventors: Erdem Arkun, Michael Lebby, Andrew Clark, Rytis Dargis
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Patent number: 8823146Abstract: A semiconductor structure having a silicon substrate having a <111> crystallographic orientation, an insulating layer disposed over a first portion of the silicon substrate, a silicon layer having a <100> orientation disposed over the insulating layer, and a non-nitride column III-V semiconductor layer or column II-VI semiconductor layer having the same <111> crystallographic orientation as the silicon substrate, the non-nitride column III-V semiconductor layer or column II-VI semiconductor layer being in direct contact with a second portion of the silicon substrate. A column III-nitride is disposed on the surface of the third portion of the substrate.Type: GrantFiled: February 19, 2013Date of Patent: September 2, 2014Assignee: Raytheon CompanyInventor: William E. Hoke
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Patent number: 8815694Abstract: Embodiments include semiconductor-on-insulator (SOI) substrates having SOI layers strained by oxidation of the base substrate layer and methods of forming the same. The method may include forming a strained channel region in a semiconductor-on-insulator (SOI) substrate including a buried insulator (BOX) layer above a base substrate layer and a SOI layer above the BOX layer by first etching the SOI layer and the BOX layer to form a first isolation recess region and a second isolation recess region. A portion of the SOI layer between the first isolation recess region and the second isolation recess region defines a channel region in the SOI layer. A portion of the base substrate layer below the first isolation recess region and below the second isolation recess region may then be oxidized to form a first oxide region and a second oxide region, respectively, that apply compressive strain to the channel region.Type: GrantFiled: December 3, 2012Date of Patent: August 26, 2014Assignee: International Business Machines CorporationInventors: Kangguo Cheng, Bruce B. Doris, Balasubramanian S. Haran, Ali Khakifirooz, Pranita Kerber
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Patent number: 8803189Abstract: A circuit structure includes a substrate; a patterned mask layer over the substrate, wherein the patterned mask layer includes a plurality of gaps; and a group-III group-V (III-V) compound semiconductor layer. The III-V compound semiconductor layer includes a first portion over the mask layer and second portions in the gaps, wherein the III-V compound semiconductor layer overlies a buffer/nucleation layer.Type: GrantFiled: August 10, 2009Date of Patent: August 12, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chen-Hua Yu, Chia-Lin Yu, Ding-Yuan Chen, Wen-Chih Chiou, Hung-Ta Lin
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Patent number: 8803158Abstract: A High Electron Mobility Transistor (HEMT) includes a first III-V compound layer having a first band gap, and a second III-V compound layer having a second band gap over the first III-V compound layer. The second band gap is greater than the first band gap. A crystalline interfacial layer is overlying and in contact with the second III-V compound layer. A gate dielectric is over the crystalline interfacial layer. A gate electrode is over the gate dielectric. A source region and a drain region are over the second III-V compound layer, and are on opposite sides of the gate electrode.Type: GrantFiled: February 18, 2013Date of Patent: August 12, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Han-Chin Chiu, Po-Chun Liu, Chi-Ming Chen, Chung-Yi Yu, King-Yuen Wong
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Patent number: 8796149Abstract: Fabrication methods, device structures, and design structures for a bipolar junction transistor. An emitter is formed in a device region defined in a substrate. An intrinsic base is formed on the emitter. A collector is formed that is separated from the emitter by the intrinsic base. The collector includes a semiconductor material having an electronic bandgap greater than an electronic bandgap of a semiconductor material of the device region.Type: GrantFiled: February 18, 2013Date of Patent: August 5, 2014Assignee: International Business Machines CorporationInventors: James W. Adkisson, David L. Harame, Qizhi Liu
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Patent number: 8785326Abstract: Wafer-level processing of wafer assemblies with transducers is described herein. A method in accordance with some embodiments includes forming a solid state transducer device by forming one or more trenches to define solid state radiation transducers. An etching media is delivered in to the trenches to release the transducers from a growth substrate used to fabricate the transducers. A pad can hold the radiation transducers and promote distribution of the etching media through the trenches to underetch and release the transducers.Type: GrantFiled: May 29, 2012Date of Patent: July 22, 2014Assignee: Micron Technology, Inc.Inventors: Martin F. Schubert, Ming Zhang, Lifang Xu
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Patent number: 8772826Abstract: It is an object to provide a photoelectric conversion device with high photoelectric conversion efficiency. The photoelectric conversion device includes an electrode layer, and a light absorbing layer located on the electrode layer. The light absorbing layer is comprised of a plurality of stacked semiconductor layers containing a chalcopyrite-based compound semiconductor. The semiconductor layers contain oxygen. A molar concentration of the oxygen in surfaces and their vicinities of the semiconductor layers where the semiconductor layers are stacked on each other is higher than average molar concentrations of the oxygen in the semiconductor layers.Type: GrantFiled: May 30, 2011Date of Patent: July 8, 2014Assignee: KYOCERA CorporationInventors: Hideaki Asao, Rui Kamada, Shuichi Kasai, Seiji Oguri, Isamu Tanaka, Nobuyuki Horiuchi, Kazumasa Umesato
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Patent number: 8765584Abstract: A semiconductor device and a manufacturing method therefor, wherein, during lift-off, no cracks due to internal stresses occur in the compound semiconductor layer. A method for manufacturing a semiconductor device having a structure in which a semiconductor layer is bonded on a supporting substrate, including: a device region formation step of forming a device region including the semiconductor layer on a growth substrate through a lift-off layer; a columnar member formation step of forming a columnar member on the growth substrate; a bonding step of bonding the tops of the semiconductor layer and the columnar member to a supporting substrate; a lift-off step of separating the bottom face of the semiconductor layer from the growth substrate by removing the lift-off layer, and not separating the columnar member from the growth substrate; and a step of separating the columnar member from the supporting substrate.Type: GrantFiled: July 26, 2011Date of Patent: July 1, 2014Assignee: Dowa Electronics Materials Co., Ltd.Inventors: Yoshitaka Kadowaki, Tatsunori Toyota
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Patent number: 8753947Abstract: The present invention provides a method of manufacturing an electronic apparatus, such as a lighting device having light emitting diodes (LEDs) or a power generating device having photovoltaic diodes. The exemplary method includes depositing a first conductive medium within a plurality of channels of a base to form a plurality of first conductors; depositing within the plurality of channels a plurality of semiconductor substrate particles suspended in a carrier medium; forming an ohmic contact between each semiconductor substrate particle and a first conductor; converting the semiconductor substrate particles into a plurality of semiconductor diodes; depositing a second conductive medium to form a plurality of second conductors coupled to the plurality of semiconductor diodes; and depositing or attaching a plurality of lenses suspended in a first polymer over the plurality of diodes. In various embodiments, the depositing, forming, coupling and converting steps are performed by or through a printing process.Type: GrantFiled: February 4, 2012Date of Patent: June 17, 2014Assignees: NthDegree Technologies Worldwide Inc, NASAInventors: William Johnstone Ray, Mark David Lowenthal, Neil O. Shotton, Richard A. Blanchard, Mark Allan Lewandowski, Kirk A. Fuller, Donald Odell Frazier
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Patent number: 8753983Abstract: A method includes providing a silicon-containing die and providing a heat sink having a palladium layer over a first surface of the heat sink. A first gold layer is located over one of a first surface of the die or the palladium layer. The silicon-containing die is bonded to the heat sink, where bonding includes joining the silicon-containing die and the heat sink such that the first gold layer and the palladium layer are between the first surface of the silicon-containing die and the first surface of the heat sink, and heating the first gold layer and the palladium layer to form a die attach layer between the first surface of the silicon-containing die and the first surface of the heat sink, the die attach layer comprising a gold interface layer having a plurality of intermetallic precipitates, each of the plurality of intermetallic precipitates comprising palladium, gold, and silicon.Type: GrantFiled: January 7, 2010Date of Patent: June 17, 2014Assignee: Freescale Semiconductor, Inc.Inventors: Jin-Wook Jang, Lalgudi M. Mahalingam, Audel A. Sanchez, Lakshminarayan Viswanathan