Abstract: After forming a sacrificial gate structure straddling a stacking of a semiconductor mandrel structure and a dielectric mandrel cap and spacers present on sidewalls of the stack, portions of the spacers located on opposite sides of the sacrificial gate structure are removed. Epitaxial source/drain regions are formed on exposed sidewalls of portions of the semiconductor mandrel structure located on opposite sides of the sacrificial gate structure. The sacrificial gate structure is removed to provide a gate cavity. Next, portions of the spacers exposed by the gate cavity are removed to expose sidewalls of a portion of the semiconductor mandrel structure. III-V compound semiconductor channel portions are then formed on exposed sidewalls of the semiconductor mandrel structure. Portions of the semiconductor mandrel structure and the dielectric mandrel cap exposed by the gate cavity are subsequently removed from the structure, leaving only the III-V compound semiconductor channel portions.

Abstract: A nonvolatile memory device includes a substrate; a channel layer projecting from a surface of the substrate, in a direction perpendicular to the surface; a tunnel dielectric layer surrounding the channel layer; a plurality of interlayer dielectric layers and a plurality of control gate electrodes alternately formed along the channel layer; floating gate electrodes interposed between the tunnel dielectric layer and the plurality of control gate electrodes, the floating gate electrodes comprising a metal-semiconductor compound; and a charge blocking layer interposed between each of the plurality of control gate electrodes and each of the plurality of floating gate electrodes.

Abstract: The invention relates to a contact structure of a semiconductor device. An exemplary structure for a contact structure for a semiconductor device comprises a substrate comprising a major surface and a trench below the major surface; a strained material filling the trench, wherein a lattice constant of the strained material is different from a lattice constant of the substrate; an inter-layer dielectric (ILD) layer having an opening over the strained material, wherein the opening comprises dielectric sidewalls and a strained material bottom; a semiconductor layer on the sidewalls and bottom of the opening; a dielectric layer on the semiconductor layer; and a metal layer filling an opening of the dielectric layer.

Abstract: According to one embodiment, a semiconductor memory device includes a semiconductor substrate, a plurality of element-separating insulators, and contacts. The plurality of element-separating insulators partition the upper layer portion into a plurality of active areas extending in a first direction. The contacts are connected to the active areas. A recess is made in a part in the first direction of an upper surface of each of the active areas. The recess is made across the entire active area in a second direction orthogonal to the first direction. Positions in the first direction of two of the contacts connected respectively to mutually-adjacent active areas are different from each other. One of the contacts is in contact with a side surface of the recess and not in contact with a bottom surface of the recess.

Abstract: A method for fabricating a semiconductor device includes etching a substrate to form a plurality of trenches, forming first liner layers over bottom surfaces and inner sidewalls of the trenches to a first height, forming sacrificial liner layers on one of the inner sidewalls of the trenches where the first liner layers are formed, forming third sacrificial layers to a second height, so that the third sacrificial layers are buried over the trenches where the sacrificial liner layers are formed, removing portions of the sacrificial liner layers exposed by the third sacrificial layers to form sacrificial patterns, forming second liner layers on the inner sidewalls of the trenches exposed by the third sacrificial layers, and removing the third sacrificial layers to form side contact regions opening one of the inner sidewalls of the trenches in a line form.

Abstract: The present invention connects a first wiring portion located at one side of a substrate and a second wiring portion located at the other side. A side electrode connected to the first wiring portion is formed, and the second wiring portion is formed on an insulating layer formed on the substrate. An exposed end of the second wiring portion formed when singulated into individual semiconductor package and the side electrode are wired by ink jet system using nano metal particles. Particularly, when copper is used, the wiring by the ink jet system is performed by the reduction of a metal surface oxidation film and/or removal of organic matters by atomic hydrogen.

Abstract: A semiconductor device including a gate insulating layer formed over a semiconductor substrate; a gate insulating layer pattern formed over an exposed uppermost surface of the semiconductor substrate along the same horizontal plane as the gate insulating layer; an isolation insulating layer formed over the gate insulating layer; a plurality of first gate conductive patterns formed over the gate insulating layer and the gate insulating layer pattern; a source/drain conductor formed over an exposed uppermost surface of the semiconductor substrate; a second gate conductive pattern formed over one of the plurality of the first gate conductive patterns that is provided over the gate insulating layer pattern; a plurality of salicide layers formed over the second gate conductive pattern, the source/drain conductor, and at least one of the plurality of first gate conductive patterns that are provided over the gate insulating layer; and a pair of spacers formed over the gate insulating layer pattern and on sidewalls o

Abstract: In view of micronizing semiconductor device and of suppressing current leakage in a shared contact allowing contact between a gate electrode and an impurity-diffused region, a semiconductor device 100 includes a first gate electrode 108, a fourth source/drain region 114b, and a shared contact electrically connecting the both, wherein in a section taken along the gate length direction, the first gate electrode 108 and the fourth source/drain region 114b are disposed as being apart from each other, an element-isolating insulating film 102 is formed over the entire surface of a semiconductor substrate 160 exposed therebetween, and the distance between the first gate electrode 108 and the fourth source/drain region 114b is made substantially equal to the width of the sidewall formed on the side face of the first gate electrode 108, when viewed in another section taken along the gate length direction.

Abstract: Methods of forming metal lines in semiconductor devices are disclosed. One example method may include forming lower metal lines and forming an insulation layer on the lower metal lines; etching said insulation layer to a depth; and depositing a material for upper metal lines on the entire surface of said insulation layer and planarizing the material for the upper metal lines to form said upper metal lines. The example method may also include exposing the lower metal lines by etching said upper metal lines and the insulation layer and depositing a material for contact plugs on the entire surfaces of said upper metal lines and said insulation layer and planarizing the material for said contact plugs to form the contact plugs.

Abstract: A method for fabricating a spacer structure includes: forming a gate insulation layer having a gate deposition-inhibiting layer, a gate layer and a covering deposition-inhibiting layer on a semiconductor substrate, and patterning the gate layer and the covering deposition-inhibiting layer in order to form gate stacks. An insulation layer is deposited selectively using the deposition-inhibiting layers, thereby permitting highly accurate formation of the spacer structure.