By Physical Means Only (epo) Patents (Class 257/E21.306)
  • Patent number: 10645814
    Abstract: A method for creating patterned coatings on a molded article includes providing a molded article which has a surface comprising a first area and a second area, at least one surface property in the first area of the surface being different from that in the second area, applying a coating covering at least the first area and the second area to the surface of the molded article, the adhesion of said coating being greater in the first area than in the second area because of the at least one different surface property, and partially removing the coating by means of a removal process which is applied to the entire coating at a constant removal power that is determined such that the entire coating is removed in the second area while the coating remains in place on an entire surface of the first area.
    Type: Grant
    Filed: September 30, 2016
    Date of Patent: May 5, 2020
    Assignees: PLASMA INNOVATIONS GMBH, LPKF LASER & ELECTRONICS AG
    Inventors: Michael Bisges, Roman Ostholt, Bernd Rösener, Daniel Dunker
  • Patent number: 7855132
    Abstract: The present invention provides a method of manufacturing a bonded wafer. The method includes forming an oxygen ion implantation layer in an active layer wafer having a substrate resistivity of 1 to 100 m?cm by implanting oxygen ions in the active layer wafer, bonding a base wafer and the active layer wafer directly or through an insulating layer to form a bonded wafer, heat treating the bonded wafer to strengthen the bond and convert the oxygen ion implantation layer into a stop layer, grinding, polishing, and/or etching, from the active layer wafer surface side, the bonded wafer in which the bond has been strengthened to expose the stop layer on a surface of the bonded wafer, removing the stop layer, and subjecting the bonded wafer from which the stop layer has been removed to a heat treatment under a reducing atmosphere to diffuse an electrically conductive component comprised in the active layer wafer.
    Type: Grant
    Filed: March 28, 2008
    Date of Patent: December 21, 2010
    Assignee: Sumco Corporation
    Inventors: Akihiko Endo, Nobuyuki Morimoto
  • Patent number: 7767472
    Abstract: A substrate processing method is used to polish a substrate. The substrate processing method includes rotating a substrate 13 by a motor 12, polishing a first surface of a peripheral portion of the substrate 13 by pressing a polishing surface of a polishing mechanism 20 against the first surface, determining a polishing end point of the first surface by monitoring a polished state of the first surface, stopping the polishing according to the determining the polishing end point, determining a polishing time spent for the polishing, determining a polishing time for a second surface of the peripheral portion based on the polishing time of the first surface, and polishing the second surface for the determined polishing time.
    Type: Grant
    Filed: August 1, 2007
    Date of Patent: August 3, 2010
    Assignees: Ebara Corporation, Kabushiki Kaisha Toshiba
    Inventors: Atsushi Shigeta, Gen Toyota, Hiroyuki Yano, Kunio Oishi, Kenya Ito, Masayuki Nakanishi, Kenji Yamaguchi
  • Patent number: 7670952
    Abstract: A method of manufacturing a semiconductor device, comprising forming a metal silicide gate electrode on a semiconductor substrate surface. The method also comprises exposing the metal silicide gate electrode and the substrate surface to a cleaning process. The cleaning process includes a dry plasma etch using an anhydrous fluoride-containing feed gas and a thermal sublimation configured to leave the metal silicide gate electrode substantially unaltered. The method also comprises depositing a metal layer on source and drain regions of the substrate surface and annealing the metal layer and the source and drain regions of the substrate surface to form metal silicide source and drain contacts.
    Type: Grant
    Filed: March 23, 2007
    Date of Patent: March 2, 2010
    Assignee: Texas Instruments Incorporated
    Inventors: Yaw S. Obeng, Juanita DeLoach, Freidoon Mehrad
  • Patent number: 7579202
    Abstract: The present invention discloses a method for fabricating a light emitting diode element, which incorporates an epitaxial process with an etching process to etch LED epitaxial layers bottom up and form side-protrudent structures, whereby the LED epitaxial layers have non-rectangular inclines, which can solve the problem of total reflection and promote light-extraction efficiency. Further, the method of the present invention has a simple fabrication process, which can benefit mass production and lower cost.
    Type: Grant
    Filed: December 21, 2007
    Date of Patent: August 25, 2009
    Assignee: Tekcore Co., Ltd.
    Inventors: Wen-Chieh Hsu, Yu-Chuan Liu, Jenn-Hwa Fu, Shih-Hung Lee, Tai-Chun Wang