Abstract: The structure of the MOS transistor provided in this invention has LDD (lightly doped drain) and halo doped regions removed from the source, the drain or both regions in the substrate for improved linearity range when operated as a voltage-controlled resistor. The removal of the LDD and halo doped regions is performed by simply modifying the standard mask of the MOS process using a logic operation layer with no extra mask required.

Abstract: A power semiconductor device includes: a first semiconductor substrate; a second semiconductor layer; a plurality of third semiconductor pillar regions and a plurality of fourth semiconductor pillar regions that are provided in an upper layer of the second semiconductor layer and alternatively arranged along a direction parallel to an upper surface of the first semiconductor substrate; a first main electrode; and a second main electrode. A concentration of first-conductivity-type impurity in a connective portion between the second semiconductor layer and the third semiconductor pillar regions is lower than concentrations of first-conductivity-type impurity in portions of both sides of the connective portion in a direction from the second semiconductor layer to the third semiconductor pillar regions.

Abstract: A method for manufacturing a semiconductor device is provided. The semiconductor device may be a drain extended metal-oxide-semiconductor (DMOS) device. The method includes: forming a gate insulating film on a semiconductor substrate having an active region; forming a gate on the gate insulating film; forming a low-concentration source region and a low-concentration drain region over the semiconductor substrate by implanting low-concentration impurity ions using the gate as a mask; forming a spacer on sides of the gate; forming a silicide area block (SAB) pattern over the semiconductor substrate, covering a portion of the gate and the low-concentration drain region; and forming a high-concentration source region and a high-concentration drain region over the semiconductor substrate by implanting high-concentration impurity ions using the SAB pattern as a mask.

Abstract: A semiconductor device having an EDMOS transistor and a method for forming the same are provided. The semiconductor device includes source and drain regions formed separately in a semiconductor substrate, a first gate insulating layer filling a trench formed in the substrate between the source and drain regions, the first gate insulating layer being adjacent to the drain region and separated from the source region, a second gate insulating layer formed over the substrate between the first gate insulating layer and the source region, the second gate insulating layer being thinner than the first gate insulating layer, a gate electrode formed over the first and second gate insulating layers, and a doped drift region formed in the substrate under the first gate insulating layer, the doped drift region being in contact with the drain region. This reduces the planar area of the EDMOS transistor, thereby achieving highly integrated semiconductor devices.

Abstract: A high-voltage semiconductor device capable of preventing a substrate current from forming is disclosed. The method of manufacturing the high-voltage semiconductor device comprises forming a well in a semiconductor substrate, forming a device isolation film in a portion of the semiconductor substrate, forming a series of drift regions below the surface of the semiconductor substrate, forming a gate electrode on the surface of the semiconductor substrate so as to overlap a portion of at least one drift region, and forming a source and a drain region below the surface of the semiconductor substrate drift regions formed on opposing sides of the gate electrode. Advantageously, the substrate current of the semiconductor device is reduced and the operational withstand voltage is increased, improving the characteristics of the high-voltage transistor.

Abstract: A Metal Oxide Semiconductor (MOS) device formed on a substrate and a method for forming the MOS device. The MOS device includes a drain region, a gate region surrounding the drain region, source regions arranged around the gate region and across from the drain region, and bulk regions arranged around the gate region and separating the source regions. The gate region is formed in a loop around the drain region. In this manner, the on-resistance (Ron) of a MOS device is decreased without also increasing the area of the MOS device.

Abstract: A semiconductor structure includes a first well region of a first conductivity type overlying a substrate, a second well region of a second conductivity type opposite the first conductivity type overlying the substrate and laterally adjoining the first well region, a third well region of the second conductivity type adjacent and spaced apart from the first well region, a first deep well region of the second conductivity type underlying at least portions of the first and the second well regions, a second deep well region of the second conductivity type underlying the third well region and spaced apart from the first deep well region, an insulation region in the first well region, a gate dielectric extending from over the insulation region to over the second well region, and a gate electrode on the gate dielectric.

Abstract: A power transistor comprises a number of groups of gate fingers of various widths and can include uniform or non-uniform pitch. The widths may include any number of different widths. In one embodiment, there are included three widths W1, W2, and W3, in which W3>W2>W1. The groups of gate fingers are arranged from greater width to lesser width disposed from a periphery to a center of the device. In addition, the gate fingers are configured to have one of a centered justification, a gate pad side justification, and a drain pad side justification, along a dimension of the power transistor layout. In another embodiment, the groups of gate fingers having widths W1, W2, and W3 are configured symmetrically about a center line of the device. The variable gate finger widths provide a level of greater power density at the outside of the die in relation to a power density at the center of the die. Asymmetrical arrangements of gate finger widths are also contemplated.

Abstract: A semiconductor device, such as a LDMOS device, comprising: a semiconductor substrate; a drain region in the semiconductor substrate; a source region in the semiconductor substrate laterally spaced from the drain region; and a drift region in the semiconductor substrate between the drain region and the source region. A gate is operatively coupled to the source region and is located offset from the drain region on a side of the source region opposite from the drain region. When the device is in an on state, current tends to flow deeper into the drift region to the offset gate, rather than near the device surface. The drift region preferably includes at least first and second stacked JFETs.

Abstract: A method of manufacturing double diffused drains in a semiconductor device. An embodiment comprises forming a gate dielectric layer on a substrate, and masking and patterning the gate dielectric layer. Once the gate dielectric layer has been patterned, a second dielectric layer, having a different depth than the gate dielectric layer, is deposited into the pattern. Once the dielectric layers have been placed into a step form, DDDs are formed by implanting ions through the two dielectric layers, whose different filtering properties form the DDDS. In another embodiment the implantations through the two dielectric layers are performed using different energies to form the different dose regions. In yet another embodiment the implantations are performed using different species (light and heavy), instead of different energies, to form the different dose regions.

Abstract: A semiconductor memory device includes a well layer having a first conductivity type and formed in a semiconductor substrate, a block layer formed in a trench and formed of an insulating layer, a gate electrode formed on the semiconductor substrate apart from the block layer, a first diffusion layer having a second conductivity type, formed on a surface of the semiconductor substrate, and having a high impurity concentration region to a first depth from the surface of the semiconductor substrate, a second diffusion layer having the second conductivity type, formed on the surface of the semiconductor substrate on a side of the block layer away from the gate electrode, having a high impurity concentration region to a second depth greater than the first depth from the surface of the semiconductor substrate, and electrically connected to the first diffusion layer, and a contact connected to the second diffusion layer.

Abstract: A semiconductor device includes a drift layer having a first conductivity type and a body region adjacent the drift layer. The body region has a second conductivity type opposite the first conductivity type and forms a p-n junction with the drift layer. The device further includes a contactor region in the body region and having the first conductivity type, and a shunt channel region extending through the body region from the contactor region to the drift layer. The shunt channel region has the first conductivity type. The device further includes a first terminal in electrical contact with the body region and the contactor region, and a second terminal in electrical contact with the drift layer.

Abstract: A field effect transistor includes a gate that is formed in a channel region of an active region defined on a substrate. A source is formed at a first surface portion of the active region that is adjacently disposed at a first side face of the gate. A drain is formed at a second surface portion of the active region that is opposite to the first surface portion with respect to the gate. The drain has a protruded portion that is protruded from a surface portion of the substrate.

Abstract: A manufacturing method for a super-junction semiconductor device is disclosed. The methods includes a first step of depositing, on a low-resistivity semiconductor substrate of one conductivity type, at least an epitaxial layer of the one conductivity type which is to become a drift layer; a second step of forming a base region(s) of the other conductivity type and source regions of the one conductivity type to be used for formation of MOS gate structures; a third step of forming, by anisotropic vapor-phase etching using an insulating film mask, trenches that penetrate through the base region(s) and reach the low-resistivity semiconductor substrate or its vicinity; and a fourth step of burying epitaxial layers of the other conductivity type in the respective trenches, the first to fourth steps being executed in this order.

Abstract: A method of manufacturing a silicon carbide semiconductor device having a MOS structure includes preparing a substrate made of silicon carbide, and forming a channel region, a first impurity region, a second impurity region, a gate insulation layer, and a gate electrode to form a semiconductor element on the substrate. In addition, a film is formed on the semiconductor element to provide a material of an interlayer insulation layer, and a reflow process is performed at a temperature about 700° C. or over in an wet atmosphere so that the interlayer insulation layer is formed from the film and an edge portion of the gate electrode is rounded and oxidized.

Abstract: An MOS device includes a semiconductor layer of a first conductivity type and first and second source/drain regions of a second conductivity type formed in the semiconductor layer proximate an upper surface of the semiconductor layer. The first and second source/drain regions are spaced apart relative to one another. A gate is formed above and electrically isolated from the semiconductor layer, at least partially between the first and second source/drain regions. At least a given one of the first and second source/drain regions is configured having an effective width that is substantially greater than a width of a junction between the semiconductor layer and the given source/drain region.

Abstract: According to an aspect of the present invention, there is provided a semiconductor device including a first conductive type semiconductor substrate, a gate electrode formed over the semiconductor substrate via a gate insulator, a first conductive impurity region buried in the semiconductor substrate, the first conductive impurity region being both sides of an extend plane, the extend plane being extended from side-walls of the gate electrode into the semiconductor substrate and a second conductive type source/drain region partially overlapping with the first conductive impurity region and extending from an end of the gate electrode at the semiconductor substrate to an outer region in the semiconductor substrate, wherein a first conductive impurity concentration at a prescribed depth in the overlapping portion between the first conductive impurity region and the source/drain region is lower than the first conductive impurity concentration in the first conductive impurity region except the overlapping portion c

Abstract: High voltage semiconductor devices and methods for fabricating the same are provided. An exemplary embodiment of a semiconductor device capable of high-voltage operation, comprising a substrate comprising a first well formed therein. A gate stack is formed overlying the substrate, comprising a gate dielectric layer and a gate electrode formed thereon. A channel well and a second well are formed in portions of the first well. A source region is formed in a portion of the channel well. A drain region is formed in a portion of the second well, wherein the gate dielectric layer comprises a relatively thinner portion at one end of the gate stack adjacent to the source region and a relatively thicker portion at one end of the gate stack adjacent to and directly contacts the drain region.

Abstract: An MOS device includes first and second source/drain regions of a first conductivity type formed in a semiconductor layer of a second conductivity type proximate an upper surface of the semiconductor layer, the first and second source/drain regions being spaced apart relative to one another. A non-uniformly doped channel region of the first conductivity type is formed in the semiconductor layer proximate the upper surface of the semiconductor layer and at least partially between the first and second source/drain regions. An insulating layer is formed on the upper surface of the semiconductor layer. A first gate is formed on the insulating layer at least partially between the first and second source/drain regions and above at least a portion of the channel region, and at least a second gate formed on the insulating layer above at least a portion of the channel region and between the first gate and the second source/drain region.

Abstract: A semiconductor device and a method of manufacturing the same are provided, capable of minimizing a size of the semiconductor device and inhibiting punch through. According to an embodiment, at least one conductive bar is formed in a substrate between source and drain regions. Thereby, punch through can be inhibited to the utmost to increase breakdown voltage, and thus the electrical properties of the device can be improved. Further, because the punch through is inhibited, the size of the device can be minimized without degrading the electrical properties of the device.

Abstract: In a high voltage MOS transistor, in a portion immediately below the gate electrode, peaks of concentration distribution in depth direction of a first conductivity type impurity and a second conductivity type impurity in the drain offset region are in the same depth, the second conductivity type impurity being higher concentrated than the first conductivity type impurity.

Abstract: Semiconductor devices and methods of fabricating the same are provided. According to an example embodiment, a semiconductor device may include an active region disposed in a substrate and having first conductivity type impurity ions, a gate electrode crossing on the active region, a source region disposed within the active region at one a first side of the gate electrode, a drain region disposed within the active region at the a second side of the gate electrode, a source lightly doped drain (LDD) region disposed within the active region, extending toward the gate electrode from the source region, and having second conductivity type impurity ions, a drain LDD region disposed within the active region, extending toward the gate electrode from the drain region, and having the second conductivity type impurity ions in a concentration higher than the source LDD region, and a first halo region disposed within the active region, surrounding the source LDD region, and having the first conductivity type impurity ions.

Abstract: Methods and systems for precision manufacture of MOS-gated power devices. The raw device includes a stratum of semiconductor nanocrystals embedded at or near the top edge of the gate dielectric, and after the device has been built a programmation operation trims the device to the precisely correct threshold voltage, by charging this stratum.

Abstract: A high voltage device prevents or minimizes the lowering of a maximum operating voltage range. Bulk resistances of the drift regions are reduced by forming trenches within the drift regions and filling the trenches with conductive polysilicon layers. The polysilicon layers reduce the bulk resistances and prevents or minimizes the operation of parasitic bipolar junction transistors typically formed when the high voltage device is manufactured.

Abstract: A trench MOS-gated transistor is formed as follows. A first region of a first conductivity type is provided. A well region of a second conductivity type is then formed in an upper portion of the first region. A trench is formed which extends through the well region and terminates within the first region. Dopants of the second conductivity type are implanted along predefined portions of the bottom of the trench to form regions along the bottom of the trench which are contiguous with the well region such that when the transistor is in an on state the deeper portion of the well region prevents a current from flowing through those channel region portions located directly above the deeper portion of the well region.

Abstract: In a body of semiconductor material, a field region separates a first active area and a second active area. A drain region is formed in the first active area; a body region is formed in the second active area and accommodates a source region. A body-contact region is formed inside the source region and extends from the surface as far as the body region. An insulating layer extends on top of the surface and accommodates a plurality of metal contacts, which extend as far as the drain region, the source region and the body-contact region. The body-contact region is self-aligned to a respective contact.

Abstract: In one embodiment, a power switch device (33) includes a first MOSFET device 41 and a second MOSFET device (42). A split gate structure (84) including a first gate electrode (48,87) controls the first MOSFET device (41). A second gate electrode (49,92) controls the second MOSFET device (42). A current limit device (38) is coupled to the first gate electrode (48,97) to turn on the first MOSFET device during a current limit mode. A comparator device (36) is coupled to the second gate electrode (49,92) to turn on the second MOSFET device (42) when the power switch device (33) is no longer in current limit mode.

Abstract: An asymmetric hetero-doped metal oxide (AH2MOS) semiconductor device includes a substrate and an insulated gate on the top of the substrate disposed between a source region and a drain region. On one side of the gate, heterodoped tub and source regions are formed. The tub region has dopants of a second polarity. A source region is disposed inside each tub region and has dopants of a first polarity opposite to the second polarity. On the other side of the gate, heterodoped buffer and drift regions are formed. The buffer regions comprise dopants of the second polarity. The drift regions are disposed inside the buffer regions and are doped with dopants of the first polarity. A drain n+ tap region is disposed in the drift region.

Abstract: The present invention relates to a semiconductor device including a high withstand voltage MOS transistor and a manufacturing method thereof. The semiconductor device according to the present invention includes a MOS transistor in which a second-conductivity type source region is formed on a first-conductivity type semiconductor region, an offset drain region is interconnected to a second-conductivity type drain region and has a concentration lower than an impurity concentration of a drain region, the offset drain region is composed of a portion that does not overlap a first-conductivity type semiconductor region and a portion that overlaps part of the surface of the first-conductivity type semiconductor region and a gate electrode is formed on the surface extending from a channel region between the source region and the offset drain region to part of the offset drain region through a gate insulating film.

Abstract: LDMOS transistor devices and fabrication methods are provided, in which additional dopants are provided to region of a substrate near a thick dielectric between the channel and the drain to reduce device resistance without significantly impacting breakdown voltage. The extra dopants are added by implantation prior to formation of the thick dielectric, such as before oxidizing silicon in a LOCOS process or following trench formation and before filling the trench in an STI process.