With An Insulated Gate (epo) Patents (Class 257/E21.409)

  • Patent number: 12261120
    Abstract: A 3D semiconductor memory device includes a peripheral circuit structure, an intermediate insulating layer and a cell array structure. The cell array structure includes a first substrate including a cell array region and a connection region; a stack structure comprising electrode layers and electrode interlayer insulating layers alternately stacked on the first substrate; a planarization insulating layer covering an end portion of the stack structure on the connection region; and a first through-via penetrating the planarization insulating layer, the first substrate and the intermediate insulating layer. The first through-via connects one of the electrode layers to the peripheral circuit structure. The first through-via includes a first and second via portion integrally connected to each other. The first via portion penetrates the planarization insulating layer and has a first width. The second via portion penetrates the intermediate insulating layer and has a second width greater than the first width.
    Type: Grant
    Filed: August 2, 2021
    Date of Patent: March 25, 2025
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Haemin Lee
  • Patent number: 12261176
    Abstract: A display device includes: a substrate including a display area and a non-display area; a transistor and a light emitting element, which are disposed on the display area; a pad portion disposed in the non-display area, where the pad portion includes a first metal pattern; and a printed circuit board or a data driver, which is connected with the pad portion. The transistor includes a semiconductor layer disposed on the substrate and a source electrode or a drain electrode which is electrically connected with the semiconductor layer. The source electrode or the drain electrode includes a first layer including a first metal, a second layer including a second metal, and a third layer including the first metal, where the first metal pattern includes the first metal, and is connected with the printed circuit board or the data driver.
    Type: Grant
    Filed: December 2, 2021
    Date of Patent: March 25, 2025
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Kohei Ebisuno, Jin-Suk Lee, Jong Min Lee, Jun Young Kim, Yong Ho Yang
  • Patent number: 12256564
    Abstract: A semiconductor device includes an active pattern on a substrate, a pair of source/drain patterns on the active pattern, a channel pattern between the pair of source/drain patterns, the channel pattern including semiconductor patterns stacked to be spaced apart from each other, and a gate electrode crossing the channel pattern and extending in a first direction. One of the pair of source/drain patterns includes a first semiconductor layer and a second semiconductor layer thereon. The first semiconductor layer is in contact with a first semiconductor pattern, which is one of the stacked semiconductor patterns. The largest widths of the first semiconductor pattern, the first semiconductor layer, and the second semiconductor layer in the first direction are a first width, a second width, a third width, respectively, and the second width is larger than the first width and smaller than the third width.
    Type: Grant
    Filed: January 18, 2024
    Date of Patent: March 18, 2025
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Jinbum Kim, Dahye Kim, Seokhoon Kim, Jaemun Kim, Ilgyou Shin, Haejun Yu, Kyungin Choi, Kihyun Hwang, Sangmoon Lee, Seung Hun Lee, Keun Hwi Cho
  • Patent number: 12250809
    Abstract: The present disclosure provides an anti-fuse type one-time programmable memory cell. The memory cell includes a selection transistor and a gate capacitor, which are connected in series and located in a substrate, the substrate including an active region and an isolation region; in which the gate capacitor includes a gate, a gate oxide layer between the gate and the substrate, and an ion-doped region beneath the gate oxide layer, the ion-doped region being located in the active region in the substrate and overlapping with a part of a lower surface of the gate oxide layer; in which a part of the lower surface of the gate oxide layer that does not overlap with the ion-doped region completely overlaps with the isolation region in the substrate, and the ion-doped region and the isolation region are seamlessly adjacent to each other in the substrate beneath the gate oxide layer.
    Type: Grant
    Filed: April 17, 2023
    Date of Patent: March 11, 2025
    Assignee: Chengdu Analog Circuit Technology Inc.
    Inventors: Dan Ning, Yulong Wang
  • Patent number: 12249648
    Abstract: A semiconductor device includes a first impurity region on a substrate; a channel pattern protruding from an upper surface of the substrate, the channel pattern extending in a first direction substantially parallel to the upper surface of the substrate; a second impurity region on the channel pattern, the second impurity region covering an entire upper surface of the channel pattern; a gate structure on a sidewall of the channel pattern and the substrate adjacent to the channel pattern; a first contact pattern on the second impurity region; a second contact pattern that is electrically connected to the gate structure; and a spacer between the first contact pattern and the second contact pattern. The spacer completely surrounds the second contact pattern in plan view, and the first contact pattern partially surrounds the second contact pattern in plan view.
    Type: Grant
    Filed: July 5, 2022
    Date of Patent: March 11, 2025
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Hyun-Seung Song, Hyo-Jin Kim, Kyoung-Mi Park, Hwi-Chan Jun, Seung-Seok Ha
  • Patent number: 12237386
    Abstract: A semiconductor includes a gate structure on a substrate and including a gate electrode, a source/drain pattern on a side surface of the gate electrode, a source/drain contact connected to the source/drain pattern, a first etching stop film structure on the source/drain contact and the gate structure, the first etching stop film structure including a first lower etching stop film and a silicon nitride film on the first lower etching stop film, and a first via plug inside the first etching stop film structure and connected to the source/drain contact, wherein the first lower etching stop film includes aluminum, and wherein an upper surface of the silicon nitride film is on a same plane as an upper surface of the first via plug.
    Type: Grant
    Filed: November 24, 2021
    Date of Patent: February 25, 2025
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventor: Sun Ki Min
  • Patent number: 12237325
    Abstract: A method of forming stacked vertical field effect devices is provided. The method includes forming a layer stack on a substrate, wherein the layer stack includes a first spacer layer on the substrate, a first protective liner on the first spacer layer, a first gap layer on the first protective liner, a second protective liner on the first gap layer, a second spacer layer on the second protective liner, a sacrificial layer on the second spacer layer, a third spacer layer on the sacrificial layer, a third protective liner on the third spacer layer, a second gap layer on the third protective liner, a fourth protective liner on the second gap layer, and a fourth spacer layer on the fourth protective liner. The method further includes forming channels through the layer stack, a liner layer on the sidewalls of the channels, and a vertical pillar in the channels.
    Type: Grant
    Filed: December 29, 2020
    Date of Patent: February 25, 2025
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Huimei Zhou, Su Chen Fan, Shogo Mochizuki, Peng Xu, Nicolas J. Loubet
  • Patent number: 12235551
    Abstract: The present disclosure provides an array substrate, a method for manufacturing the array substrate, and a display apparatus. The array substrate includes: a base substrate, a thin film transistor disposed on the base substrate; a first passivation layer, an organic film layer and a pixel electrode disposed on the thin film transistor; a connection structure for connecting the source electrode of the thin film transistor and the pixel electrode, wherein the connection structure is disposed in a via hole structure exposing the pixel electrode and the source electrode; or, the connection structure is disposed between the pixel electrode and the source electrode.
    Type: Grant
    Filed: October 23, 2020
    Date of Patent: February 25, 2025
    Assignees: Beijing BOE Display Technology Co., Ltd., BOE Technology Group Co., Ltd.
    Inventors: Yihe Jia, Xiangqian Ding, Yongzhi Song, Xiaoxiang Zhang, Xiaolong Li, Lianjie Yang, Yan Pang, Jing Liu, Jiantao Liu
  • Patent number: 12238941
    Abstract: A semiconductor device includes a substrate having a first region and a second region, first active fins that extend in a first direction in the first region, second active fins that extend in the first direction in the second region, a first field insulating layer between the first active fins and that extend in a second direction, a second field insulating layer between the second active fins and extending in the second direction, a gate line that extends in the second direction on the second field insulating layer, the gate line linearly along with the first field insulating layer, a gate isolation layer between the first field insulating layer and the gate line, and gate spacers that extend in the second direction, the gate spacers in contact with both sidewalls of each of the first field insulating layer, the gate line, and the gate isolation layer.
    Type: Grant
    Filed: February 8, 2024
    Date of Patent: February 25, 2025
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Seung Seok Ha, Hyun Seung Song, Hyo Jin Kim, Kyoung Mi Park, Guk Il An
  • Patent number: 12230710
    Abstract: There is provided a high withstand voltage LDMOS field-effect transistor that enables the compatibility of an increase of its withstand voltage and a decrease of its ON resistance.
    Type: Grant
    Filed: October 11, 2019
    Date of Patent: February 18, 2025
    Assignee: ABLIC Inc.
    Inventor: Shinichirou Wada
  • Patent number: 12230200
    Abstract: An apparatus includes a plurality of pixels arranged in an array on a substrate, the plurality of pixels each including a light emitting element, a first transistor, and a second transistor, a drain region of the first transistor being connected to an anode of the light emitting element, a drain region or a source region of the second transistor being connected to a gate electrode of the first transistor. In a plan view perpendicular to the substrate, a length of a current path from the first region to a gate electrode of the second transistor is greater than a length of a current path from a third region to the gate electrode of the second transistor.
    Type: Grant
    Filed: November 22, 2021
    Date of Patent: February 18, 2025
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Takahiro Akiyama, Hiromasa Tsuboi
  • Patent number: 12224356
    Abstract: A thin film transistor 101 includes: an active layer 7 that is supported on a substrate 1 and includes a first region 7S, a second region 7D and a channel region 7C located between the first region and the second region; a gate electrode 11 that is arranged so as to overlap with at least the channel region of the active layer 7 with a gate insulating layer 9 therebetween; a source electrode 15s electrically connected to the first region 7S; and a drain electrode 15d electrically connected to the second region 7D, at least the channel region 7C of the active layer 7 having a layered structure that includes a first metal layer m1 arranged on a lower oxide semiconductor layer 71 and containing substantially no oxygen, and an upper oxide semiconductor layer 72 arranged on the first metal layer m1, wherein a thickness of the first metal layer m1 is smaller than a thickness of the lower oxide semiconductor layer 71 or the upper oxide semiconductor 72.
    Type: Grant
    Filed: June 4, 2019
    Date of Patent: February 11, 2025
    Assignee: SAKAI DISPLAY PRODUCTS CORPORATION
    Inventor: Hiroyuki Ohta
  • Patent number: 12224010
    Abstract: A non-volatile memory has: a first and a second transistor having their gates connected together; a resistor having a first and a second terminal, with the first terminal connected to the source of the first transistor; a read voltage feed circuit configured to feed a read voltage for turning on at least one of the first and second transistors to between the gate of the first transistor and the second terminal of the resistor and to between the gate and the source of the second transistor; and a signal output circuit configured to output, in a read operation in which the read voltage feed circuit feeds the read voltage, a signal associated with a first or second value based on the drain currents of the first and second transistors.
    Type: Grant
    Filed: August 5, 2021
    Date of Patent: February 11, 2025
    Assignee: Rohm Co., Ltd.
    Inventor: Seiji Takenaka
  • Patent number: 12225739
    Abstract: A semiconductor device includes a gate electrode, a gate insulating film which includes oxidized material containing silicon and covers the gate electrode, an oxide semiconductor film provided to be in contact with the gate insulating film and overlap with at least the gate electrode, and a source electrode and a drain electrode electrically connected to the oxide semiconductor film. In the oxide semiconductor film, a first region which is provided to be in contact with the gate insulating film and have a thickness less than or equal to 5 nm has a silicon concentration lower than or equal to 1.0 at. %, and a region in the oxide semiconductor film other than the first region has lower silicon concentration than the first region. At least the first region includes a crystal portion.
    Type: Grant
    Filed: April 4, 2024
    Date of Patent: February 11, 2025
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Tatsuya Honda, Masashi Tsubuku, Yusuke Nonaka, Takashi Shimazu, Shunpei Yamazaki
  • Patent number: 12219758
    Abstract: Some embodiments include an integrated assembly having a carrier-sink-structure, and having digit lines over the carrier-sink-structure. Transistor body regions are over the digit lines. Extensions extend from the carrier-sink-structure to the transistor body regions. The extensions are configured to drain excess carriers from the transistor body regions. Lower source/drain regions are between the transistor body regions and the digit lines, and are coupled with the digit lines. Upper source/drain regions are over the transistor body regions, and are coupled with storage elements. Gates are adjacent the transistor body regions. The transistor body regions, lower source/drain regions and upper source/drain regions are together comprised a plurality of transistors. The transistors and the storage elements are together comprised by a plurality of memory cells of a memory array. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: January 31, 2024
    Date of Patent: February 4, 2025
    Assignee: Micron Technology, Inc.
    Inventors: Kamal M. Karda, Haitao Liu, Durai Vishak Nirmal Ramaswamy, Yunfei Gao, Sanh D. Tang, Deepak Chandra Pandey
  • Patent number: 12219773
    Abstract: Embodiments of 3D memory devices and fabricating methods thereof are disclosed. The method comprises forming an array device semiconductor structure comprising an alternating conductor/dielectric stack disposed on a semiconductor layer, and an array interconnect layer disposed on the alternating conductor/dielectric stack and including a first interconnect structure. The method further comprises a peripheral device disposed on a substrate, and a peripheral interconnect layer disposed on the peripheral device and including a second interconnect structure and a pad. The pad is electrically connected with the peripheral device through the second interconnect structure. The method further comprises bonding the array interconnect layer to the peripheral interconnect layer, such that the first interconnect structure is joined with the second interconnect structure. The method further comprises forming a pad opening exposing a surface of the pad.
    Type: Grant
    Filed: December 11, 2020
    Date of Patent: February 4, 2025
    Assignee: Yangtze Memory Technologies Co., Ltd.
    Inventors: Jun Chen, Zhiliang Xia, Li Hong Xiao
  • Patent number: 12218000
    Abstract: A substrate processing method of easily forming an air gap includes: forming a first insulating layer having a first step coverage on a patterned structure including a first protrusion and a second protrusion; and forming, on the first insulating layer, a second insulating layer having a second step coverage lower than the first step coverage, wherein an air gap is formed between the first protrusion and the second protrusion by repeating the forming of the second insulating layer.
    Type: Grant
    Filed: September 22, 2021
    Date of Patent: February 4, 2025
    Assignee: ASM IP Holding B.V.
    Inventor: HeeSung Kang
  • Patent number: 12219768
    Abstract: Three-dimensional (3D) semiconductor memory devices are provided. A 3D semiconductor memory device includes an electrode structure on a substrate. The electrode structure includes gate electrodes stacked on the substrate. The gate electrodes include electrode pad regions. The 3D semiconductor memory device includes a dummy vertical structure penetrating one of the electrode pad regions. The dummy vertical structure includes a dummy vertical semiconductor pattern and a contact pattern extending from a portion of the dummy vertical semiconductor pattern toward the substrate.
    Type: Grant
    Filed: March 22, 2024
    Date of Patent: February 4, 2025
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Younghwan Son, Jeehoon Han
  • Patent number: 12211843
    Abstract: A fin-type field effect transistor comprising a substrate, at least one gate stack and epitaxy material portions is described. The substrate has fins and insulators located between the fins, and the fins include channel portions and flank portions beside the channel portions. The at least one gate stack is disposed over the insulators and over the channel portions of the fins. The epitaxy material portions are disposed over the flank portions of the fins and at two opposite sides of the at least one gate stack. The epitaxy material portions disposed on the flank portions of the fins are separate from one another.
    Type: Grant
    Filed: March 23, 2022
    Date of Patent: January 28, 2025
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chun-Hsiung Tsai, Ziwei Fang, Tsan-Chun Wang, Kei-Wei Chen
  • Patent number: 12211836
    Abstract: A semiconductor device includes a first channel region disposed over a substrate, and a first gate structure disposed over the first channel region. The first gate structure includes a gate dielectric layer disposed over the channel region, a lower conductive gate layer disposed over the gate dielectric layer, a ferroelectric material layer disposed over the lower conductive gate layer, and an upper conductive gate layer disposed over the ferroelectric material layer. The ferroelectric material layer is in direct contact with the gate dielectric layer and the lower gate conductive layer, and has a U-shape cross section.
    Type: Grant
    Filed: June 27, 2023
    Date of Patent: January 28, 2025
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chia-Wen Chang, Hong-Nien Lin, Chien-Hsing Lee, Chih-Sheng Chang, Ling-Yen Yeh, Wilman Tsai, Yee-Chia Yeo
  • Patent number: 12205822
    Abstract: Implementations described herein provide a method of forming a semiconductor device. The method includes forming a nanostructure having a first set of layers of a first material and a second set of layers, alternating with the first set of layers, having a second material. The method further includes depositing a hard mask on a top layer of the first set of layers, the hard mask including a first hard mask layer on the top layer of the first set of layers and a second hard mask layer on the first hard mask layer. The method also includes depositing elements of a cladding structure on sidewalls of the nanostructure and the hard mask. The method further includes removing a top portion of the cladding structure. The method further includes removing the second hard mask layer after removing the top portion of the cladding structure.
    Type: Grant
    Filed: October 6, 2021
    Date of Patent: January 21, 2025
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Cheng Chao, Hsin-Chieh Huang, Yu-Wen Wang
  • Patent number: 12199171
    Abstract: A vertical tunneling field-effect transistor and a method for its manufacture are provided. According to methods herein disclosed, oppositely doped source and drain regions are formed, and an APAM delta layer is formed in the surface of the transistor substrate, beneath a metal gate, in electrical contact with, e.g., the source region. A dielectric layer intervenes between the substrate surface and the metal gate. An epitaxial cap layer directly over the APAM layer forms a dielectric layer interface with a dielectric layer, which is located between the epitaxial cap layer and the metal gate. A vertical channel is defined for tunneling between the APAM delta layer and an induced conduction channel adjacent to the dielectric layer interface that is formed in operation, and that is in electrical contact with, e.g., the drain region.
    Type: Grant
    Filed: June 2, 2022
    Date of Patent: January 14, 2025
    Assignee: National Technology & Engineering Solutions of Sandia, LLC
    Inventors: Tzu-Ming Lu, Xujiao Gao, Evan Michael Anderson, Juan Pedro Mendez Granado, DeAnna Marie Campbell, Scott William Schmucker, Shashank Misra
  • Patent number: 12200925
    Abstract: Methods, systems and apparatus for managing capacitors in memory devices, e.g., three-dimensional (3D) memory devices are provided. In one aspect, a capacitor includes: a first terminal, a second terminal conductively insulated from the first terminal, and a capacitance structure that includes a plurality of layers sequentially stacked together. At least one layer includes: one or more first conductive parts and one or more second conductive parts that are conductively insulated in the layer, the one or more first conductive parts being conductively coupled to the first terminal, the one or more second conductive parts being conductively coupled to the second terminal. The at least one layer is configured such that at least one of the one or more second conductive parts forms at least one subordinate capacitor with at least one adjacent first conductive part.
    Type: Grant
    Filed: April 19, 2022
    Date of Patent: January 14, 2025
    Assignee: Macronix International Co., Ltd.
    Inventors: Jung-Chuan Ting, Chih-Ting Hu
  • Patent number: 12200938
    Abstract: A memory can have a stacked memory array that can have a plurality of levels of memory cells. Each respective level of memory cells can be commonly coupled to a respective access line. A plurality of drivers can be above the stacked memory array. Each respective driver can have a monocrystalline semiconductor with a conductive region coupled to a respective access line.
    Type: Grant
    Filed: October 30, 2023
    Date of Patent: January 14, 2025
    Inventors: Haitao Liu, Kamal M. Karda, Gurtej S. Sandhu, Sanh D. Tang, Akira Goda, Lifang Xu
  • Patent number: 12199096
    Abstract: A semiconductor device includes a substrate having a first region and a second region, first active fins that extend in a first direction in the first region, second active fins that extend in the first direction in the second region, a first field insulating layer between the first active fins and that extend in a second direction, a second field insulating layer between the second active fins and extending in the second direction, a gate line that extends in the second direction on the second field insulating layer, the gate line linearly along with the first field insulating layer, a gate isolation layer between the first field insulating layer and the gate line, and gate spacers that extend in the second direction, the gate spacers in contact with both sidewalls of each of the first field insulating layer, the gate line, and the gate isolation layer.
    Type: Grant
    Filed: February 8, 2024
    Date of Patent: January 14, 2025
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Seung Seok Ha, Hyun Seung Song, Hyo Jin Kim, Kyoung Mi Park, Guk Il An
  • Patent number: 12183826
    Abstract: A semiconductor structure, and a method of making the same includes a fin extending upward from a substrate, an epitaxially grown bottom source/drain region in direct contact with the substrate and a bottom portion of the fin. A bottom surface and sidewalls of a metal silicide layer are in direct contact with the epitaxially grown bottom source/drain region. A bottom spacer is located above and in direct contact with the metal silicide layer and a portion of the epitaxially grown bottom source/drain region not covered by the metal silicide layer, the bottom spacer surrounding the fin.
    Type: Grant
    Filed: May 18, 2021
    Date of Patent: December 31, 2024
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Choonghyun Lee, Soon-Cheon Seo, Injo Ok, Alexander Reznicek
  • Patent number: 12176046
    Abstract: Disclosed is an operation method of a memory device that includes a plurality of memory cells stacked in a direction perpendicular to a substrate. The method includes performing first to (n?1)-th program loops on selected memory cells connected to a selected word line from among the plurality of memory cells, based on a first program parameter, and after the (n?1)-th program loop is performed, performing n-th to k-th program loops on the selected memory cells, based on a second program parameter different from the first program parameter. Herein, n is an integer greater than 1 and k is an integer greater than or equal to n. The first and second program parameters include information about at least two of a program voltage increment, a 2-step verify range, and a bit line forcing voltage used in the first to k-th program loops.
    Type: Grant
    Filed: September 29, 2022
    Date of Patent: December 24, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Yohan Lee, Sang-Wan Nam, Sang-Won Park, Jiho Cho, Eunhyang Park
  • Patent number: 12176210
    Abstract: A semiconductor device with high reliability is provided. A first step of forming a metal oxide containing indium over a substrate and a second step of performing microwave treatment from above the metal oxide are included. The first step is performed by a sputtering method using an oxide target containing indium. The second step is performed using a gas containing oxygen under reduced pressure, and by the second step, a defect in which hydrogen has entered an oxygen vacancy (VoH) in the metal oxide is divided into an oxygen vacancy (Vo) and hydrogen (H).
    Type: Grant
    Filed: October 16, 2019
    Date of Patent: December 24, 2024
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Shunpei Yamazaki
  • Patent number: 12176407
    Abstract: A method to form a transistor device with a recessed gate structure is provided. In one embodiment, a gate structure is formed overlying a device region and an isolation structure. The gate structure separates a device doping well along a first direction with a pair of recess regions disposed on opposite sides of the device region in a second direction perpendicular to the first direction. A pair of source/drain regions in is formed the device region on opposite sides of the gate structure. A sidewall spacer is formed extending along sidewalls of the gate structure, where a top surface of the sidewall spacer is substantially flush with the top surface of the gate structure. A resistive protection layer is then formed on the sidewall spacer and covering the pair of recess regions.
    Type: Grant
    Filed: July 27, 2022
    Date of Patent: December 24, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Liang Chu, Chien-Chih Chou, Chih-Chang Cheng, Yi-Huan Chen, Kong-Beng Thei, Ming-Ta Lei, Ruey-Hsin Liu, Ta-Yuan Kung
  • Patent number: 12174214
    Abstract: Provided is a physical quantity sensor including: a movable body; a base body; and a lid body, in which the movable body is accommodated in a space between the base body and the lid body, the space is sealed with a melt portion obtained by melting a through hole provided in the lid body, the lid body and the melt portion contain silicon, and the melt portion has a continuous curved surface having unevenness.
    Type: Grant
    Filed: May 12, 2023
    Date of Patent: December 24, 2024
    Assignee: SEIKO EPSON CORPORATION
    Inventor: Teruo Takizawa
  • Patent number: 12176347
    Abstract: Semiconductor devices and methods are provided. A semiconductor device according to the present disclosure includes a first transistor in a first area and a second transistor in a second area. The first transistor includes a first gate structure extending lengthwise along a first direction, and a first gate spacer, a second gate spacer, and a third gate spacer over sidewalls of the first gate structure. The second transistor includes a second gate structure extending lengthwise along the first direction, and the first gate spacer and the third gate spacer over sidewalls of the second gate structure. The first gate spacer, the second gate spacer and the third gate spacer are of different compositions and the third gate spacer is directly on the first gate spacer in the second area.
    Type: Grant
    Filed: July 10, 2023
    Date of Patent: December 24, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Sung-Hsin Yang, Jung-Chi Jeng, Ru-Shang Hsiao
  • Patent number: 12176429
    Abstract: Wrap-around contact structures for semiconductor nanowires and nanoribbons, and methods of fabricating wrap-around contact structures for semiconductor nanowires and nanoribbons, are described. In an example, an integrated circuit structure includes a semiconductor nanowire above a first portion of a semiconductor sub-fin. A gate structure surrounds a channel portion of the semiconductor nanowire. A source or drain region is at a first side of the gate structure, the source or drain region including an epitaxial structure on a second portion of the semiconductor sub-fin, the epitaxial structure having substantially vertical sidewalls in alignment with the second portion of the semiconductor sub-fin. A conductive contact structure is along sidewalls of the second portion of the semiconductor sub-fin and along the substantially vertical sidewalls of the epitaxial structure.
    Type: Grant
    Filed: October 12, 2023
    Date of Patent: December 24, 2024
    Assignee: Intel Corporation
    Inventors: Rishabh Mehandru, Tahir Ghani, Stephen Cea, Biswajeet Guha
  • Patent number: 12170321
    Abstract: A semiconductor device a method of forming the same are provided. The method includes forming a fin extending from a substrate and forming a gate dielectric layer along a top surface and sidewalls of the fin. A first thickness of the gate dielectric layer along the top surface of the fin is greater than a second thickness of the gate dielectric layer along the sidewalls of the fin.
    Type: Grant
    Filed: September 11, 2020
    Date of Patent: December 17, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Kuei-Lun Lin, Yen-Fu Chen, Po-Ting Lin, Chia-Yuan Chang, Xiong-Fei Yu, Chi On Chui
  • Patent number: 12165955
    Abstract: A semiconductor arrangement includes a first dielectric feature passing through a semiconductive layer and a first dielectric layer over a substrate. The semiconductor arrangement includes a conductive feature passing through the semiconductive layer and the first dielectric layer and electrically coupled to the substrate. The conductive feature is adjacent the first dielectric feature and electrically isolated from the semiconductive layer by the first dielectric feature.
    Type: Grant
    Filed: November 22, 2023
    Date of Patent: December 10, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Josh Lin, Chung-Jen Huang, Yun-Chi Wu, Tsung-Yu Yang
  • Patent number: 12165876
    Abstract: A method for forming an ultra-shallow junction includes the following operations: providing a semiconductor substrate, forming an epitaxial layer on the semiconductor substrate, providing a dopant and implanting the dopant into the epitaxial layer and a part of the semiconductor substrate, and removing the epitaxial layer, to form the ultra-shallow junction.
    Type: Grant
    Filed: November 9, 2021
    Date of Patent: December 10, 2024
    Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
    Inventor: Jian Yang
  • Patent number: 12166108
    Abstract: The present disclosure describes a structure with a conductive plate and a method for forming the structure. The structure includes a gate structure disposed on a diffusion region of a substrate, a protective layer in contact with the diffusion region and covering a sidewall of the gate structure and a portion of a top surface of the gate structure, and a first insulating layer in contact with the gate structure and the protective layer. The structure further includes a conductive plate in contact with the first insulating layer, where a first portion of the conductive plate laterally extends over a horizontal portion of the protective layer, and where a second portion of the conductive plate extends over a sidewall portion of the protective layer covering the sidewall of the gate structure. The structure further includes a second insulating layer in contact with the conductive plate.
    Type: Grant
    Filed: May 18, 2022
    Date of Patent: December 10, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chan-Yu Hung, Chia-Cheng Ho, Fei-Yun Chen, Yu-Chang Jong, Puo-Yu Chiang, Tun-Yi Ho
  • Patent number: 12159921
    Abstract: A semiconductor device includes: first and second fin structures, disposed on a substrate, that respectively extend in parallel to an axis; a first gate feature that traverses the first fin structure to overlay a central portion of the first fin structure; a second gate feature that traverses the second fin structure to overlay a central portion of the second fin structure; a first spacer comprising: a first portion comprising two layers that respectively extend from sidewalls of the first gate feature toward opposite directions of the axis; and a second portion comprising two layers that respectively extend from sidewalls of the first portion of the first spacer toward the opposite directions of the axis; and a second spacer comprising two layers that respectively extend from sidewalls of the second gate feature toward the opposite directions of the axis.
    Type: Grant
    Filed: August 4, 2022
    Date of Patent: December 3, 2024
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: I-Chih Chen, Ru-Shang Hsiao, Ching-Pin Lin, Chih-Mu Huang, Fu-Tsun Tsai
  • Patent number: 12154954
    Abstract: A manufacturing method of a semiconductor device includes forming a contact opening in a wafer. The wafer includes a substrate, a gate structure over the substrate and a dielectric layer over the substrate and surrounding the gate structure, and the contact opening passes through the dielectric layer and exposes the substrate. A recess is formed in the substrate such that the recess is connected to the contact opening. An oxidation process is performed to convert a portion of the substrate exposed in the recess to form a protection layer lining a sidewall and a bottom surface of the recess. The protection layer is etched back to remove a first portion of the protection layer in contact with the bottom surface of the recess of the substrate. A metal alloy structure is formed at the bottom surface of the recess of the substrate.
    Type: Grant
    Filed: October 30, 2023
    Date of Patent: November 26, 2024
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Wan Yu Kai
  • Patent number: 12148806
    Abstract: A device is disclosed. The device includes a first epitaxial region, a second epitaxial region, a first gate region between the first epitaxial region and a second epitaxial region, a first dielectric structure underneath the first epitaxial region, a second dielectric structure underneath the second epitaxial region, a third epitaxial region underneath the first epitaxial region, a fourth epitaxial region underneath the second epitaxial region, and a second gate region between the third epitaxial region and a fourth epitaxial region and below the first gate region. The device also includes, a conductor via extending from the first epitaxial region, through the first dielectric structure and the third epitaxial region, the conductor via narrower at an end of the conductor via that contacts the first epitaxial region than at an opposite end.
    Type: Grant
    Filed: January 9, 2024
    Date of Patent: November 19, 2024
    Assignee: Intel Corporation
    Inventors: Ehren Mannebach, Aaron Lilak, Hui Jae Yoo, Patrick Morrow, Anh Phan, Willy Rachmady, Cheng-Ying Huang, Gilbert Dewey
  • Patent number: 12150289
    Abstract: A method of forming a microelectronic device comprises forming a spacer structure having a rectangular ring horizontal cross-sectional shape over a transistor, a portion of the spacer structure horizontally overlapping a drain region of the transistor. A masking structure is formed over the spacer structure and the transistor, the masking structure exhibiting an opening therein horizontally overlapping the drain region of the transistor and the portion of the spacer structure. A portion of an isolation structure overlying the drain region of the transistor is removed using the masking structure and the portion of the spacer structure as etching masks to form a trench vertically extending through the isolation structure to the drain region of the transistor. A drain contact structure is formed within the trench in the isolation structure. Microelectronic devices, memory devices, and electronic systems are also described.
    Type: Grant
    Filed: March 16, 2021
    Date of Patent: November 19, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Si-Woo Lee, Kyuseok Lee, Sangmin Hwang
  • Patent number: 12148834
    Abstract: A field-effect transistor structure includes a semiconductor substrate, a metal gate, a metal trench for source, a metal trench for drain, an etching-stop layer, and a gate contact. The etching-stop layer is overlaid on the metal trench for source and the metal trench for drain. The gate contact is above an active region.
    Type: Grant
    Filed: April 9, 2021
    Date of Patent: November 19, 2024
    Assignee: HUAWEI TECHNOLOGIES CO., LTD.
    Inventors: Xinfang Liu, Miao Xu, Yanxiang Liu
  • Patent number: 12148794
    Abstract: In a method of manufacturing a semiconductor device, a fin structure in which first semiconductor layers and second semiconductor layers are alternately stacked is formed, a sacrificial gate structure is formed over the fin structure, a source/drain region of the fin structure, which is not covered by the sacrificial gate structure, is etched, thereby forming a source/drain space, the first semiconductor layers are laterally etched through the source/drain space, and a source/drain epitaxial layer is formed in the source/drain space. An inner spacer made of a dielectric material is formed on an end of each of the etched first semiconductor layers and at least one of the spacer has width changes along vertical direction of device. At least one of the first semiconductor layers has a composition different from another of the first semiconductor layers.
    Type: Grant
    Filed: June 29, 2022
    Date of Patent: November 19, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shu Kuan, Shahaji B. More, Chien Lin, Cheng-Han Lee, Shih-Chieh Chang
  • Patent number: 12148848
    Abstract: A photoelectric conversion apparatus includes a semiconductor substrate having a first surface and a second surface, a plurality of photoelectric conversion regions including an impurity of a first conductivity type and arranged at the semiconductor substrate, a trench arranged between the photoelectric conversion regions, an impurity region including an impurity of a second conductivity type opposite to the first conductivity type and arranged along a sidewall of the trench, and a first film arranged at the first surface of the semiconductor substrate and the sidewall of the trench. The impurity region includes a first region with an impurity concentration of a first concentration and a second region with an impurity concentration of a second concentration lower than the first concentration, and a distance between the first surface and the first region is smaller than a distance between the first surface and the second region.
    Type: Grant
    Filed: March 31, 2021
    Date of Patent: November 19, 2024
    Assignee: Canon Kabushiki Kaisha
    Inventor: Masashi Kusukawa
  • Patent number: 12142685
    Abstract: Methods are disclosed herein for forming fin-like field effect transistors (FinFETs) that maximize strain in channel regions of the FinFETs. An exemplary method includes forming a fin having a first width over a substrate. The fin includes a first semiconductor material, a second semiconductor material disposed over the first semiconductor material, and a third semiconductor material disposed over the second semiconductor material. A portion of the second semiconductor material is oxidized, thereby forming a second semiconductor oxide material. The third semiconductor material is trimmed to reduce a width of the third semiconductor material from the first width to a second width. The method further includes forming an isolation feature adjacent to the fin. The method further includes forming a gate structure over a portion of the fin, such that the gate structure is disposed between source/drain regions of the fin.
    Type: Grant
    Filed: March 10, 2021
    Date of Patent: November 12, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Kuo-Cheng Chiang, Ka-Hing Fung, Chih-Sheng Chang, Zhiqiang Wu
  • Patent number: 12136674
    Abstract: A semiconductor device with favorable electrical characteristics is provided. A semiconductor device with stable electrical characteristics is provided. A highly reliable display device is provided. The semiconductor device includes a first conductive layer, a first insulating layer, a semiconductor layer, and a pair of second conductive layers. The first insulating layer is in contact with a top surface of the first conductive layer. The semiconductor layer is in contact with a top surface of the first insulating layer. The pair of second conductive layers are in contact with a top surface of the semiconductor layer. The pair of second conductive layers are apart from each other in a region overlapping with the first conductive layer.
    Type: Grant
    Filed: February 17, 2020
    Date of Patent: November 5, 2024
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Toshimitsu Obonai, Junichi Koezuka, Kenichi Okazaki
  • Patent number: 12136658
    Abstract: Various examples of an integrated circuit with a sidewall spacer and a technique for forming an integrated circuit with such a spacer are disclosed herein. In some examples, the method includes receiving a workpiece that includes a substrate and a gate stack disposed upon the substrate. A spacer is formed on a side surface of the gate stack that includes a spacer layer with a low-k dielectric material. A source/drain region is formed in the substrate; and a source/drain contact is formed coupled to the source/drain region such that the spacer layer of the spacer is disposed between the source/drain contact and the gate stack.
    Type: Grant
    Filed: July 10, 2023
    Date of Patent: November 5, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yen-Ting Chen, Wei-Yang Lee, Feng-Cheng Yang, Yen-Ming Chen
  • Patent number: 12137559
    Abstract: According to one embodiment, a semiconductor memory device includes a first conductive layer, a first semiconductor body, a second semiconductor body, a first memory layer, and a second memory layer. The first conductive layer includes first to fourth extension regions, and a first connection region. The first extension region extends in a first direction. The second extension region extends in the first direction and is arranged with the first extension region in the first direction. The third extension region extends in the first direction and is arranged with the first extension region in a second direction crossing the first direction. The fourth extension region extends in the first direction, is arranged with the third extension region in the first direction, and is arranged with the second extension region in the second direction.
    Type: Grant
    Filed: March 14, 2023
    Date of Patent: November 5, 2024
    Assignee: KIOXIA CORPORATION
    Inventors: Takuya Inatsuka, Tadashi Iguchi, Murato Kawai, Hisashi Kato, Megumi Ishiduki
  • Patent number: 12133378
    Abstract: A semiconductor structure including a semiconductor substrate, an active area, a transistor gate, a fuse gate, a first dielectric pattern, a second dielectric pattern and a plurality of metal lines is provided. The active area is disposed in the semiconductor substrate. The transistor gate has a first line segment and a second line segment extending across the active area in a first direction. The fuse gate located between the first line segment and the second line segment extends across the active area in the first direction. The first dielectric pattern is disposed between the active area and the transistor gate. The second dielectric pattern is disposed between the active area and the fuse gate. The metal lines disposed on two opposite sides of the transistor gate are electrically connected to the active device.
    Type: Grant
    Filed: March 30, 2022
    Date of Patent: October 29, 2024
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventors: Wei Zhong Li, Hsih Yang Chiu
  • Patent number: 12132117
    Abstract: According to one embodiment, a semiconductor device includes a first insulating film formed of silicon nitride, a second insulating film disposed above the first insulating film and formed of silicon oxide, including a first region and a peripheral region surrounding the first region and thinner than the first region, an oxide semiconductor disposed on the second insulating film and intersecting the first region, a source electrode overlapping the peripheral region and a drain electrode overlapping the peripheral region. The first region is located between the source electrode and the drain electrode and separated from the source electrode and the drain electrode.
    Type: Grant
    Filed: December 27, 2021
    Date of Patent: October 29, 2024
    Assignee: JAPAN DISPLAY INC.
    Inventors: Takuo Kaitoh, Akihiro Hanada, Takashi Okada
  • Patent number: RE50357
    Abstract: A 3D semiconductor device is provided, comprising plural memory layers vertically stacked on a substrate and parallel to each other; plural selection lines disposed on the memory layers and parallel to each other; plural bit lines disposed on the selection lines, and the bit lines arranged in parallel to each other and in perpendicular to the selection lines; plural strings formed vertically to the memory layers and the selection lines, and the strings electrically connected to the corresponding selection lines; a plurality of cells respectively defined by the strings, the selection lines and the bit lines correspondingly, and the cells arranged in a plurality of rows and columns, wherein a column direction is parallel to the bit lines while a row direction is parallel to the selection lines. The adjacent cells in the same column are electrically connected to the different bit lines.
    Type: Grant
    Filed: August 22, 2022
    Date of Patent: March 25, 2025
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventor: Shih-Hung Chen