Combination Of Charge Coupled Devices, I.e., Ccd Or Bbd (epo) Patents (Class 257/E21.617)
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Patent number: 7585694Abstract: Provided is a manufacturing method of a CCD solid-state imaging device having such an impurity concentration distribution with which shading is reduced and formation of a buried channel endowed with a large saturation signal charge amount is made possible. The manufacturing method includes: an oxide layer forming step of forming an oxide layer (12) on a semiconductor substrate (11); an ion implantation step of performing ion implantation through the oxide layer (12) to the semiconductor substrate (11) thereby forming a well in a position corresponding to a charge transfer portion; and an insulation layer forming step of performing insulation layer forming processing to the oxide layer (12) having undergone the ion implantation step, at least in a position corresponding to the well.Type: GrantFiled: March 22, 2006Date of Patent: September 8, 2009Assignee: Panasonic CorporationInventor: Akira Tsukamoto
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Patent number: 7579207Abstract: The prevent invention is to provide a solid-state imaging device having a electrode configuration applicable to a progressive scan, and able to reduce a obstruction of incident light at the periphery of a light receiving portion, a method of producing the same, a camera including the same. A first transfer electrode, a second transfer electrode, and a third transfer electrode which have a single layer transfer electrode configuration are repeatedly arranged in a vertical direction. The first transfer electrodes are connected in a horizontal direction by an inter-pixel interconnection formed in the same layer. Shunt interconnections are formed in the horizontal direction and in the vertical direction above the transfer layers. The shunt interconnection connected to the second transfer interconnection is formed on the inter-pixel interconnection. The shunt interconnection connected to the third transfer electrode is formed above the transfer electrodes.Type: GrantFiled: November 20, 2006Date of Patent: August 25, 2009Assignee: Sony CorporationInventor: Hideo Kanbe
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Publication number: 20090200580Abstract: What is disclosed is an apparatus comprising a transfer gate formed on a substrate and a photodiode formed in the substrate next to the transfer gate. The photodiode comprises a shallow N-type collector formed in the substrate, a deep N-type collector formed in the substrate, wherein a lateral side of the deep N-type collector extends at least under the transfer gate, and a connecting N-type collector formed in the substrate between the deep N-type collector and the shallow N-type collector, wherein the connecting implant connects the deep N-type collector and the shallow N-type collector. Also disclosed is a process comprising forming a deep N-type collector in the substrate, forming a shallow N-type collector formed in the substrate, and forming a connecting N-type collector in the substrate between the deep N-type collector and the shallow N-type collector, wherein the connecting implant connects the deep N-type collector and the shallow N-type collector.Type: ApplicationFiled: February 8, 2008Publication date: August 13, 2009Applicant: OMNIVISION TECHNOLOGIES, INC.Inventors: Howard E. Rhodes, Hidetoshi Nozaki, Sohei Manabe
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Patent number: 7557390Abstract: A solid image capturing element comprising a plurality of vertical shift registers arranged to each correspond to a column of a plurality of light receiving pixels in a matrix arrangement, a horizontal shift register provided on an output side of the plurality of vertical shift registers, and an output section provided on an output side of the horizontal shift register. In this solid image capturing element, a reverse conductive semiconductor region is formed over one major surface of one conductive semiconductor substrate, the plurality of light receiving pixels, the plurality of vertical shift registers, the horizontal shift register, and the output section are formed in the semiconductor region, and a portion of the semiconductor region where the output section is formed has a higher dopant concentration than the portion of the semiconductor region where the horizontal shift register is formed.Type: GrantFiled: October 17, 2003Date of Patent: July 7, 2009Assignee: Sanyo Electric co., Ltd.Inventors: Yoshihiro Okada, Yuzo Otsuru
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Patent number: 7531373Abstract: A method of forming conductive interconnects includes forming a node of a circuit component on a substrate. A conductive metal line is formed at a first metal routing level that is elevationally outward of the circuit component. Insulative material is deposited above the first metal routing level over the conductive metal line and the circuit component. In a common masking step, a first opening is etched through the insulative material to the conductive metal line and a second opening is etched through the insulative material to the node of the circuit component that is received elevationally inward of the conductive metal line. Conductive material is concurrently deposited to within the first and second openings in respective conductive connection with the conductive metal line and the node of the circuit component. A first metal line at a second metal routing level that is above the first metal routing level is formed in conductive connection with the conductive material in the first opening.Type: GrantFiled: September 19, 2007Date of Patent: May 12, 2009Assignee: Micron Technology, Inc.Inventor: Xiaofeng Fan
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Patent number: 7456044Abstract: A method of manufacturing an image sensor using a microlens mold is provided. The method includes: forming an interlayer dielectric layer on a semiconductor substrate having photodiodes; forming color filter layers on the interlayer dielectric layer; forming a planarization layer on the color filter layers; coating photoresist on the planarization layer; aligning a mold having a lens shaped pattern on the semiconductor substrate with the photoresist applied thereon; pressing the mold and the semiconductor substrate closely to each other such that a pattern formed in the mold is transferred onto the photoresist; and separating the mold from the semiconductor substrate, thereby forming micro-lenses.Type: GrantFiled: December 15, 2006Date of Patent: November 25, 2008Assignee: Dongbu Electronics Co., Ltd.Inventor: Kwan Yul Lee
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Publication number: 20080213935Abstract: Provided is a manufacturing method of a CCD solid-state imaging device having such an impurity concentration distribution with which shading is reduced and formation of a buried channel endowed with a large saturation signal charge amount is made possible. The manufacturing method includes: an oxide layer forming step of forming an oxide layer (12) on a semiconductor substrate (11); an ion implantation step of performing ion implantation through the oxide layer (12) to the semiconductor substrate (11) thereby forming a well in a position corresponding to a charge transfer portion; and an insulation layer forming step of performing insulation layer forming processing to the oxide layer (12) having undergone the ion implantation step, at least in a position corresponding to the well.Type: ApplicationFiled: March 22, 2006Publication date: September 4, 2008Inventor: Akira Tsukamoto
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Patent number: 7345328Abstract: A solid-state image pick-up device of a photoelectric converting film lamination type including a semiconductor substrate and at least three layers of photoelectric converting films each of which is interposed between a common electrode film and pixel electrode films. The pixel electrode films correspond to pixels respectively, and at least three layers of photoelectric converting films are laminated through insulating layers. The at least three layers of photoelectric converting films are above the semiconductor substrate. Sets of the pixel electrode films are provided on each of the at least three layers of photoelectric converting films, and electric charge storage portions formed on the semiconductor substrate are connected through sets of columnar contact electrodes. Resistance values of the sets of columnar contact electrodes are equal to each other.Type: GrantFiled: February 22, 2006Date of Patent: March 18, 2008Assignee: Fujifilm CorporationInventor: Kazuya Oda
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Publication number: 20080042170Abstract: An image sensor and fabricating method thereof are provided. A gate electrode is formed on a semiconductor substrate with a photodiode on one side and a low-concentration drain on the other side. A silicide blocking pattern covers the photodiode, the gate electrode, and part of the low-concentration drain, such that an aperture exposes a portion of the low-concentration drain. A high-concentration drain is formed in the substrate under the aperture.Type: ApplicationFiled: August 21, 2007Publication date: February 21, 2008Inventor: Chang Hun Han
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Publication number: 20070254413Abstract: A method of forming a charge-coupled device including the steps of forming well or substrate of a first conductivity type; a buried channel of a second conductivity type; a plurality of first gate electrodes; partially coating the first gate electrodes with a mask substantially aligned to an edge of the first gate electrodes; implanting ions of the first conductivity type of sufficient energy to penetrate the first gates and into the buried channel; and a plurality of second gate electrodes covering regions each over the buried channel between the first gate electrodes.Type: ApplicationFiled: April 26, 2006Publication date: November 1, 2007Inventors: Christopher Parks, John McCarten, Joseph Summa
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Patent number: 7285808Abstract: A plurality of optical sensors (4) are arranged in a surface region of a semiconductor substrate (6) in a matrix pattern, and electric charge generated by the optical sensors (4) is transferred by first and second transfer electrodes (12 and 14) embedded under the optical sensors (4). The semiconductor substrate (6) is constructed by laminating a support substrate (16) composed of silicon, a buffer layer (18), and a thin silicon layer (20) composed of single-crystal silicon. p? regions (26) (overflow barrier) and n-type regions (28) which function as transfer paths are formed under the optical sensors (4). The first and the second transfer electrodes (12 and 14) are disposed between the buffer layer (18) and the n-type regions (28), and an insulating film (30) is interposed between the n-type regions (28) and the first and the second transfer electrodes (12 and 14). In this structure, the light-receiving area is large since the transfer electrodes are not disposed in the front region.Type: GrantFiled: October 2, 2002Date of Patent: October 23, 2007Assignee: Sony CorporationInventor: Takashi Kasuga
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Patent number: 7247511Abstract: A memory cell comprises a chalcogenide random access memory (CRAM) cell and a CMOS circuit. The CMOS circuit accesses the CRAM cell. The CRAM cell has a cross-sectional area that is determined by a thin film process (e.g., a chalcogenide deposition thin film process) and by an iso-etching process. If desired, the chalcogenide structure may be implemented in series with a semiconductor device such as a diode or a selecting transistor. The diode drives a current through the chalcogenide structure. The selecting transistor drives a current through the chalcogenide structure when enabled by a voltage at a gate terminal of the selecting transistor. The selecting transistor has a gate terminal, a source terminal, and a drain terminal; the gate terminal may be operatively coupled to a word line of a memory array, the source terminal may be operatively coupled to a drive line of the memory array, and the drain terminal may be operatively coupled to a bit line of the memory array.Type: GrantFiled: July 11, 2006Date of Patent: July 24, 2007Assignee: Macronix International Co., Ltd.Inventors: Hsiang-Lan Lung, Yi-Chou Chen
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Patent number: 7179675Abstract: A method for fabricating an image sensor includes forming a seed layer on a semiconductor substrate, forming a blocking layer on the seed layer, partially exposing a region for transistor in an active region of the semiconductor substrate by patterning the seed layer and the blocking layer, selectively forming a gate insulating material layer in a portion of the exposed region for transistor, filling a gate electrode material layer in the exposed region for transistor over the gate insulating material layer, forming a gate insulating layer pattern and a gate electrode pattern by selectively removing the blocking layer, the gate insulating material layer, the gate electrode material layer, and the seed layer, and forming source and drain diffusion layers and a photodiode on both sides of the gate insulating layer pattern and the gate electrode pattern by selectively doping impurity ions.Type: GrantFiled: December 30, 2004Date of Patent: February 20, 2007Assignee: Dongbu Electronics Co., Ltd.Inventor: Hee Sung Shim
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Patent number: 7179676Abstract: A technique for forming Charge-Coupled Devices (CCDs) in a conventional Complementary Metal Oxide Semiconductor (CMOS) process. A number of single-layer polysilicon gates are formed on an as-grown, native doped silicon substrate, with gaps between them. Masking is used to selectively dope the gates while preventing doping of the silicon in the gaps. Masking may likewise be used to selectively silicide the gates while preventing silicide formation in the gaps. Conventional source-drain processing produces input/output diffusions for the CCD.Type: GrantFiled: March 28, 2005Date of Patent: February 20, 2007Assignee: Kenet, Inc.Inventors: Gerhard Sollner, Lawrence J. Kushner, Michael P. Anthony, Edward Kohler, Wesley Grant
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Patent number: 7153719Abstract: A method of fabricating a pixel cell having a shutter gate structure. First and second charge barriers are respectively created between a photodiode and a first charge storage region and between the first storage region and a floating diffusion region. A global shutter gate is formed to control the charge barrier and transfer charges from the photodiode to the first charge storage region by effectively lowering the first charge barrier. A transfer transistor acts to transfer charges from the first storage region to the floating diffusion region by reducing the second charge barrier.Type: GrantFiled: August 24, 2004Date of Patent: December 26, 2006Assignee: Micron Technology, Inc.Inventors: Inna Patrick, Sungkwon C. Hong
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Patent number: 7125740Abstract: A method of fabricating a solid-state image pickup device comprising forming mask patterns corresponding to patterns of first and third transfer electrodes, which are to be alternately arranged in each vertical transfer register formation region and which are to extend in parallel to each other between light receiving portions adjacent to each other in the vertical direction, on a first electrode material layer. The method also includes forming side walls on each of the mask patterns. The method further includes patterning the first electrode material layer via the mask patterns having the side walls, to form first and third transfer electrodes formed by the first layer.Type: GrantFiled: July 12, 2004Date of Patent: October 24, 2006Assignee: Sony CorporationInventors: Junji Yamane, Kunihiko Hikichi