Abstract: A capacitor insulating film for use as an insulating film sandwiched between two electrodes is made of a crystal containing a hafnium element in a titanium site in place of a part of titanium elements contained in a crystal of a strontium titanate or barium strontium titanate.

Abstract: Provided is a semiconductor device in which on-resistance is largely reduced. In a region (2a) of an N type epitaxial layer (2) of the semiconductor device 20, each region between neighboring trenches (3) is blocked with a depletion layer (14) formed around a trench (3) so that a current passage (12) is interrupted, while a part of the depletion layer (14) formed around the trench (3) is deleted so that the current passage (12) is opened. In a region (2b), a junction portion (8) between the N type epitaxial layer (2) and a P+ type diffusion region (7) makes a Zener diode (8).

Abstract: An integrated semiconductor structure includes a heterojunction bipolar transistor and a Schottky diode. The structure has a substrate, the heterojunction bipolar transistor overlying and contacting the substrate, wherein the heterojunction bipolar transistor includes a transistor collector layer, and a Schottky diode overlying the substrate and overlying the transistor collector layer. The Schottky diode includes a Schottky diode barrier layer structure that desirably is not of the same material, doping, and thickness as the transistor collector layer.

Abstract: A capacitor may include at least one of a polysilicon layer over a semiconductor substrate; a capacitor dielectric layer over a polysilicon layer; an insulating layer over a capacitor dielectric layer; a metal layer connected to a capacitor dielectric layer through a first region of an insulating layer; an upper metal wiring layer connected to a metal layer over an insulating layer; and/or a lower metal wiring line layer connected to a polysilicon layer through a metal contact that passes through a second region of an insulating layer and a capacitor dielectric layer over the insulating layer.

Abstract: The present invention has for its purpose to provide a technique capable of reducing planar dimension of the semiconductor device. An input/output circuit is formed over the semiconductor substrate, a grounding wiring and a power supply wiring pass over the input/output circuit, and a conductive layer for a bonding pad is formed thereover. The input/output circuit is formed of MISFET elements in the nMISFET forming region and the pMISFET forming region, resistance elements in the resistance element forming regions and diode elements in the diode element forming regions functioning as protective elements. A wiring connected to the protective elements and positioned under the grounding wiring and the power supply wiring is pulled out in a pulling-out region between the nMISFET forming region and the pMISFET forming region and between the grounding wiring and the power supply wiring to be connected to the conductive layer.

Abstract: A gate trench 13 is formed in a semiconductor substrate 10. The gate trench 13 is provided with a gate electrode 16 formed over a gate insulating film 14. A portion of the gate electrode 16 protrudes from the semiconductor substrate 10, and a sidewall 24 is formed over a side wall portion of the protruding portion. A body trench 25 is formed in alignment with an adjacent gate electrode 16. A cobalt silicide film 28 is formed over a surface of the gate electrode 16 and over a surface of the body trench 25. A plug 34 is formed using an SAC technique.

Abstract: A semiconductor device includes a P-type substrate 1, an N-type buried layer 2, a P-type buried layer 3, N-type epitaxial layers 4, P-type diffusion layers 6, P-type diffusion layers 8, P-type diffusion layers 11, first electrodes formed on the P-type diffusion layers 11, N-type diffusion layers 9, P-type diffusion layers 12, N-type diffusion layers 13, second electrodes formed on the P-type diffusion layers 12 and the N-type diffusion layers 13, and gate electrodes 10 short-circuited with the second electrodes. The N-type buried layer 2 is in a floating state.

Abstract: A semiconductor structure includes a power transistor monolithically integrated with a RC snubber in a die. The power transistor includes body regions extending in a silicon region, gate electrodes insulated from the body region by a gate dielectric, source regions extending in the body regions, the source and the body regions being of opposite conductivity type, and a source interconnect contacting the source regions. The RC snubber comprises including snubber electrodes insulated from the silicon region by a snubber dielectric such that the snubber electrodes and the silicon region form a snubber capacitor having a predetermined value. The snubber electrodes are connected to the source interconnect in a manner so as to form a snubber resistor of a predetermined value between the snubber capacitor and the source interconnect. The snubber capacitor and the snubber resistor are configured to substantially dampen output ringing when the power transistor switches states.

Abstract: An integrated circuit includes a substrate having a semiconducting surface (605) and a plurality of standard cells arranged in a plurality of rows including at least a first row (610) and a second row (615) immediately above the first row. The first row (610) include at least a first decap filler cell (602) including a first active area (612) and a field dielectric outside the first active area (612) having a portion with a full field dielectric thickness portion 621 and a portion with a thinned field dielectric (622), and at least a first MOS transistor (618) having a gate electrode (619) on a thick gate dielectric (613) on the first active area (612) connected as a decoupling capacitor.

Abstract: The silicon nitride layer 910 formed by plasma CVD using a gas containing a hydrogen compound such as silane (SiH4) and ammonia (NH3) is provided on and in direct contact with the oxide semiconductor layer 905 used for the resistor 354, and the silicon nitride layer 910 is provided over the oxide semiconductor layer 906 used for the thin film transistor 355 with the silicon oxide layer 909 serving as a barrier layer interposed therebetween. Therefore, a higher concentration of hydrogen is introduced into the oxide semiconductor layer 905 than into the oxide semiconductor layer 906. As a result, the resistance of the oxide semiconductor layer 905 used for the resistor 354 is made lower than that of the oxide semiconductor layer 906 used for the thin film transistor 355.

Abstract: A phase change memory cell and methods of fabricating the same are presented. The memory cell includes a variable resistance region and a top and bottom electrode. The shapes of the variable resistance region and the top electrode are configured to evenly distribute a current with a generally hemispherical current density distribution around the first electrode.

Abstract: A semiconductor integrated circuit device with a “PAD on I/O cell” structure in which a pad lead part is disposed almost in the center of an I/O part so as to reduce the chip layout area. In the I/O part, a transistor lies nearest to the periphery of the semiconductor chip. When seen in a plan view of the I/O part, a resistance lies above the transistor and a first and a second diode lie above the resistance; a second transistor lies above the diodes; and a logic block lies above the second transistor with a pad lead part, for example, formed in a metal wiring layer, therebetween. This permits the pad through the second transistor to be on the same node and therefore the pad lead part can be disposed almost in the center of the I/O part.

Abstract: A fan-out unit which can control a resistance difference among channels with efficient space utilization and a thin-film transistor (TFT) array substrate having the fan-out unit are presented. The fan-out unit includes: an insulating substrate; a first wiring layer which is formed on the insulating substrate and connected to a pad; a second wiring layer which is formed on the insulating substrate and connected to a TFT; and a resistance controller which is connected between the first wiring layer and the second wiring layer and includes a plurality of first resistors extending parallel to the first wiring layer and a plurality of second resistors extending perpendicular to the first resistors and alternately connecting to the first resistors, wherein the first resistors are longer than the second resistors.

Abstract: A group III nitride-based transistor capable of achieving terahertz-range cutoff and maximum frequencies of operation at relatively high drain voltages is provided. In an embodiment, two additional independently biased electrodes are used to control the electric field and space-charge close to the gate edges.

Abstract: Techniques for using gate arrays to create capacitive structures within an integrated circuit are disclosed. Embodiments comprise placing a gate array of P-type field effect transistors (P-fets) and N-type field effect transistors (N-fets) in an integrated circuit design, coupling drains and sources for one or more P-fets and gates for one or more N-fets to a power supply ground, and coupling gates for the one or more P-fets and the drains and sources for one or more N-fets to a positive voltage of the power supply. In some embodiments, source-to-drain leakage current for capacitive apparatuses of P-fets and N-fets are minimized by biasing one or more P-fets and one or more N-fets to the positive voltage and the ground, respectively. In other embodiments, the capacitive structures may be implemented using fusible elements to isolate the capacitive structures in case of shorts.

Abstract: A field-effect semiconductor device such as a HEMT or MESFET is monolithically integrated with a Schottky diode for feedback, regeneration, or protection purposes. The field-effect semiconductor device includes a main semiconductor region having formed thereon a source, a drain, and a gate between the source and the drain. Also formed on the main semiconductor region, preferably between gate and drain, is a Schottky electrode electrically coupled to the source. The Schottky electrode provides a Schottky diode in combination with the main semiconductor region. A current flow is assured from Schottky electrode to drain without interruption by a depletion region expanding from the gate.

Abstract: A method and integrated circuit renders a shunt structure non-conductive during a power up event or noise event for and in addition, during an electrostatic discharge event, keeps the shunt structure conductive for a period of time to discharge electrostatic energy through the shunt structure. In one example, a shunt structure, such as a transistor, is interposed between a power node and a ground node. Circuitry is operative during a power up event or noise event, to render the shunt structure non-conductive for a period of time during the power up event or during the noise event (when power is applied). Second circuit is operative, during an electrostatic discharge event, to keep the shunt structure conductive for a period of time to discharge electrostatic energy through the shunt structure. In one example, a plurality of resistor/capacitors (RC) circuits are utilized wherein the RC circuits have different time constants.

Abstract: High voltage semiconductor devices with Schottky diodes are presented. A high voltage semiconductor device includes an LDMOS device and a Schottky diode device. The LDMOS device includes a semiconductor substrate, a P-body region in a first region of the substrate, and an N-drift region in the second region of the substrate with a junction therebetween. A patterned isolation region defines an active region. An anode electrode is disposed on the P-body region. An N+-doped region is disposed in the N-drift region. A cathode electrode is disposed on the N+-doped region. The Schottky diode includes an N-drift region on the semiconductor substrate. The anode electrode is disposed on the N-drift region at the first region of the substrate. The N+-doped region is disposed on the N-drift region at the second region of the substrate. The cathode electrode is disposed on the N+-doped region.

Abstract: Radio frequency identification (RFID) tags and processes for manufacturing the same. The RFID device generally includes (1) a metal antenna and/or inductor; (2) a dielectric layer thereon, to support and insulate integrated circuitry from the metal antenna and/or inductor; (3) a plurality of diodes and a plurality of transistors on the dielectric layer, the diodes having at least one layer in common with the transistors; and (4) a plurality of capacitors in electrical communication with the metal antenna and/or inductor and at least some of the diodes, the plurality of capacitors having at least one layer in common with the plurality of diodes and/or with contacts to the diodes and transistors. The method preferably integrates liquid silicon-containing ink deposition into a cost effective, integrated manufacturing process for the manufacture of RFID circuits. Furthermore, the present RFID tags generally provide higher performance (e.g.

Abstract: A semiconductor element (20) of the present invention includes a plurality of field effect transistors (90) and a schottky electrode (9a), and the schottky electrode (9a) is formed along an outer periphery of a region where the plurality of field effect transistors (90) are formed.

Abstract: Channel regions continuous with transistor cells are disposed also below a gate pad electrode. The channel region below the gate pad electrode is fixed to a source potential. Thus, a predetermined reverse breakdown voltage between a drain and a source is secured without forming a p+ type impurity region below the entire lower surface of the gate pad electrode. Furthermore, a protection diode is formed in a conductive layer disposed at the outer periphery of an operation region.

Abstract: A semiconductor device include a semiconductor substrate comprising a substrate body, a base over the substrate body and a pillar over a first region of the base; a buried line adjacent to a side surface of the base; a first diffusion layer over a second region of the base; a second diffusion layer over the pillar, the second diffusion layer being higher in level than the first diffusion layer; and a third diffusion layer disposed between the buried line and the semiconductor substrate. The third diffusion layer is different in level from the first diffusion layer. The top level of the third diffusion layer is lower than the top level of the first diffusion layer.

Abstract: There is provided a low power memory device with JFET device structures. Specifically, a low power memory device is provided that includes a plurality memory cells having a memory element and a JFET access device electrically coupled to the memory element. The memory cells may be isolated using diffusion based isolation.

Abstract: In a semiconductor element (20) including a field effect transistor (90), a schottky electrode (9a) and a plurality of bonding pads (12S, 12G), at least one of the plurality of bonding pads (12S, 12G) is disposed so as to be located above the schottky electrode (9a).

Abstract: Novel etch techniques are provided for shaping silicon features below the photolithographic resolution limits. FinFET devices are defined by recessing oxide and exposing a silicon protrusion to an isotropic etch, at least in the channel region. In one implementation, the protrusion is contoured by a dry isotropic etch having excellent selectivity, using a downstream microwave plasma etch.

Abstract: Provided are a phase change material containing carbon (C), a memory device including the phase change material, and a method of operating the memory device. The phase change material contains a main compound and an additive, wherein the main compound is In—Sb—Te and the additive includes carbon (C). A content a of the carbon (C) may be 0.005?a?0.30 atomic (at) %. The additive may further contain nitrogen (N), oxygen (O), boron (B), or a transition metal. The additive may include carbide instead of the carbon (C).

Abstract: A semiconductor device of the present invention has a first contact and a second contact which are located over a device isolation film so as to be opposed with each other, and have a length in the horizontal direction larger than the height; a first electro-conductive pattern located on the first contact and is formed in at least a single interconnect layer; a second electro-conductive pattern located on the second contact so as to be opposed with the first electro-conductive pattern; and an interconnect formed in an upper interconnect layer which is located above the first electro-conductive pattern and the second electro-conductive pattern, so as to be located in a region above the first electro-conductive pattern and the second electro-conductive pattern.

Abstract: Electrostatic discharge clamp devices are described. In one embodiment, the semiconductor device includes a first transistor, the first transistor including a first source/drain and a second source/drain, the first source/drain coupled to a first potential node, the second source/drain coupled to a second potential node. The device further includes a OR logic block, a first input of the OR logic block coupled to the first potential node through a capacitor, the first input of the OR logic block being coupled to the second potential node through a resistor, and a second input of the OR logic block coupled to a substrate pickup node of the first transistor.

Abstract: A semiconductor device includes a substrate which includes an element region and an isolation region, a transistor portion which includes a gate insulating film formed on the element region, and a gate electrode having a metal film formed on the gate insulating film and a first semiconductor film formed on the metal film, and a resistance element portion which includes a second semiconductor film formed above the substrate and formed of the same material as that of the first semiconductor film, and a cavity formed between the substrate and the second semiconductor film.

Abstract: A transistor-type protection device includes: a semiconductor substrate; a well of a first-conductivity-type formed in the semiconductor substrate; a source region of a second-conductivity-type formed in the well; a gate electrode formed on the well via a gate insulating film at one side of the source region; plural drain regions of a second-conductivity-type formed apart from each other and respectively separated at a predetermined distance from a well part immediately below the gate electrode film; and a resistive connection part connecting between the plural drain regions with a predetermined electric resistance.

Abstract: There is provided a capacitor having variable capacitance, which forms different capacitances according to a control signal by applying a switch to a metal-oxide-metal (MOM) structure plate capacitor using a CMOS process. The capacitor includes a stack structure including a plurality of metal layers including a first metal layer, and a plurality of dielectric layers respectively interposed between the plurality of metal layers, and a switch part including at least one switch having one side connected to at least one metal layer among the plurality of metal layers other than the first metal layer. The first metal layer and the other side of the switch serve as both terminals of the capacitor, and at least two capacitances are provided between both terminals of the capacitor upon controlling a short/open of the switch.

Abstract: The invention includes: multiple bit lines b1 to b5 arranged in parallel to each other at a first line pitch; multiple word lines w1 to w4 arranged in parallel to each other at a second line pitch greater than the first line pitch and intersecting with bit lines b1 to b5; and multiple capacitors. Respective center positions 4 of the multiple capacitors lie above the bit lines and are displaced by given distance C from the intersection of the bit line and the word line in a direction of arranging the word lines.

Abstract: A method of fabricating a semiconductor device according to one embodiment includes: laying out a first region, a second region, a third region and a fourth region on a semiconductor substrate by forming an element isolation region in the semiconductor substrate; forming a first insulating film on the first region and the second region; forming a first semiconductor film on the first insulating film; forming a second insulating film and an aluminum oxide film thereon on the fourth region after forming of the first semiconductor film; forming a third insulating film and a lanthanum oxide film thereon on the third region after forming of the first semiconductor film; forming a high dielectric constant film on the aluminum oxide film and the lanthanum oxide film; forming a metal film on the high dielectric constant film; forming a second semiconductor film on the first semiconductor film and the metal film; and patterning the first insulating film, the first semiconductor film, the second insulating film, the al

Abstract: A device structure is disclosed for preventing gate oxide damage of a trench MOSFET during wafer processing while adding an ESD protection module atop the trench MOSFET. The ESD protection module has a low temperature oxide (LTO) bottom layer whose patterning process was found to cause the gate oxide damage before. The present invention structure includes a semiconductor substrate having an active area and a termination area; numerous trench MOSFET cells disposed in the active area; numerous electrostatic discharge (ESD) diodes disposed above the semiconductor substrate in the termination area; and an insulation layer comprising Oxide/Nitride/Oxide (ONO) sandwiched between the ESD diodes and the semiconductor substrate. In one embodiment, the active area does not contain the ONO insulation layer.

Abstract: A semiconductor device comprises an insulated gate field effect transistor and a protection diode. The insulated gate field effect transistor has a gate electrode formed on a gate insulating film, a source and a drain. The source and the drain are formed in a first area of a semiconductor substrate. A first silicon oxide film is formed on a second area of the semiconductor substrate adjacent to the first area. The first silicon oxide film is thicker than the gate insulating film and contains larger amount of impurities than the gate insulating film. A poly-silicon layer is formed on the first silicon oxide film. The protection diode has a plurality of PN-junctions formed in the poly-silicon layer. The protection diode is connected between the gate electrode and the source so as to prevent breakdown of the gate insulating film.

Abstract: A semiconductor device has a MOS transistor that has a gate connected to a first terminal, a source connected to a second terminal and a drain connected to a third terminal, a first polysilicon diode that has an anode connected to the first terminal, a first single-crystalline silicon diode that is connected to a cathode of the first polysilicon diode at a cathode thereof and to the second terminal at an anode thereof, has a reverse breakdown voltage lower than a reverse breakdown voltage of the first polysilicon diode, a second polysilicon diode that has a cathode connected to the first terminal and a second single-crystalline silicon diode that is connected to an anode of the second polysilicon diode at an anode thereof and to the third terminal at a cathode thereof, has a reverse breakdown voltage lower than a reverse breakdown voltage of the second polysilicon.

Abstract: A recessed channel transistor, a semiconductor device including a transistor and methods of manufacturing the same are provided, the recessed channel transistor includes a gate structure, a second impurity region and a first impurity region. The gate structure may be formed on a substrate and filling a recess. The first impurity region, including first impurities, may be formed at a first upper portion of the substrate adjacent to the gate structure. The second impurity region, including second impurities, may be formed at a second upper portion of the substrate contacting the gate structure. The first impurity region may surround the second impurity region. The first impurities have a conductive type different from that of the second impurities.

Abstract: A trench MOSFET device with embedded Schottky rectifier, Gate-Drain and Gate-Source diodes on single chip is formed to achieve device shrinkage and performance improvement. The present semiconductor devices achieve low Vf and reverse leakage current for embedded Schottky rectifier, have overvoltage protection for GS clamp diodes and avalanche protection for GD clamp diodes.

Abstract: A semiconductor device includes a source region, a drain region, a gate region, and a drift region. The drift region further includes an active drift region and inactive floating charge control (FCC) regions. The active drift region conducts current between the source region and the drain region when voltage is applied to the gate region. The inactive FCC regions, which field-shape the active drift region to improve breakdown voltage, are vertically stacked in the drift region and are separated by the active drift region. Vertically stacking the inactive FCC regions reduce on-resistance while maintaining higher breakdown voltages.

Abstract: Provided is a semiconductor device including: a semiconductor substrate; a multi-layered wiring structure which is formed over the semiconductor substrate and in which a plurality of wiring layers, each of which is formed by a wiring and an insulating layer, are laminated; and a capacitive element having a lower electrode, a capacitor insulating layer, and an upper electrode which is embedded in the multi-layered wiring structure, wherein at least two or more of the wiring layers are provided between a lower capacitor wiring connected to the lower electrode and an upper capacitor wiring connected to the upper electrode.

Abstract: In capacitive sensor circuits where physical contact is required and excess pressure may be inadvertently applied to the sensor surface, aluminum is not sufficiently hard to provide “scratch” protection and may delaminate, causing circuit failure, even if passivation integrity remains intact. Because hard passivation layers alone provide insufficient scratch resistance, at least the capacitive electrodes and preferably all metallization levels within the sensor circuit in the region of the capacitive electrodes between the surface and the active regions of the substrate are formed of a conductive material having a hardness greater than that of aluminum. The selected conductive material preferably has a hardness which is at least as great as the lowest hardness for any interlevel dielectric or passivation material employed.

Abstract: A method of manufacture and device for a dual-gate CMOS structure. The structure includes a first plate in an insulating layer and a second plate above the insulating layer electrically corresponding to the first plate. An isolation structure is between the first plate and the second plate.

Abstract: A design structure for a circuit providing the same trigger voltage across the multiple fingers is provided, which comprises a data representing an external current injection source connected to individual fingers of a multi-finger semiconductor device. For example, the external injection current is supplied to the body of a MOSFET or the gate of a thyristor. The magnitude of the supplied current from each external current injection source is adjusted so that each finger has the same trigger voltage. The external current supply circuit may comprise diodes or an RC triggered MOSFET. The components of the external current supply circuit may be tuned to achieve a desired predetermined trigger voltage across all fingers of the multi-finger semiconductor device.

Abstract: To provide a PMOS transistor that is arranged within an N-well formed in a P-type semiconductor substrate and that is connected to an external terminal; and an MOS gate capacitor that is positioned adjacent to the PMOS transistor and of which one end and the other end are supplied with a power supply potential and a ground potential, respectively. An N-type diffusion layer that becomes a cathode of a PNPN parasitic thyristor configured by the PMOS transistor and the MOS gate capacitor is fixed to the power supply potential. This structure does not permit turning on of the PNPN parasitic thyristor, and thus a problem that a device is broken by a latch-up phenomenon is eliminated.

Abstract: When a resistance load inverter is used to control lighting/non-lighting of a pixel, in accordance with characteristic variations of a transistor forming the resistance load inverter, variations occur in light emission of each pixel. As an inverter in a pixel, an N channel transistor and a P channel transistor are used to apply a CMOS inverter. Even when characteristics of the transistor forming the CMOS inverter vary and inverter transfer characteristics vary, there is little effect on controlling lighting/non-lighting of the pixel, therefore, light emission variations of each pixel can be eliminated. Further, a signal potential of a scan line is used as one power source of a potential of the inverter, therefore, an aperture ratio of the pixel can be increased.

Abstract: A protection circuit protects a semiconductor device provided on a semiconductor substrate and including an interconnect from charge entering the interconnect during fabrication of the semiconductor device. The protection circuit includes a first metal interconnect connected to the interconnect; a forward diode and a backward diode connected in parallel to the interconnect; an NMIS whose drain is connected to the output port of the forward diode, whose source is connected to the semiconductor substrate and whose gate is grounded through an upper metal interconnect; a PMIS whose drain is connected to the input port of the backward diode and whose source is connected to the semiconductor substrate; a first antenna connected to the gate of the NMIS; and a second antenna connected to the gate of the PMIS.

Abstract: A method for passive cancellation of substrate noise for a buck converter uses an on-chip capacitor to reduce the substrate noise. The capacitor achieves a close-magnitude noise with opposite phase for better noise cancellation effect in the substrate. The capacitor can be realized as a MOS capacitor, NMOS isolation ring n-well capacitor, n-well junction capacitor, isolated p-well junction capacitor, etc. The capacitor is easy to implement. Further, bond wire parasitic inductance in the buck converter is used to reduce substrate noise.

Abstract: A semiconductor device including a MISFET formed in a well at a main surface of a substrate, a second MISFET formed at a main surface of the substrate, and a passive element formed over the main surface of the substrate and having two terminals. A conductive film is formed at a rear face of the semiconductor substrate. The conductive film is connected with a fixed potential and also electrically connected with the conductive film.

Abstract: A semiconductor device including a MISFET formed in a well at a main surface of a substrate, a second MISFET formed at a main surface of the substrate, and a passive element formed over the main surface of the substrate and having two terminals. A conductive film is formed at a rear face of the semiconductor substrate. The conductive film is connected with a fixed potential and also electrically connected with the conductive film.

Abstract: A method of fabricating an MIM type capacitor includes at least one of: Forming a first trench within an insulating interlayer formed on a semiconductor substrate. Forming a lower electrode layer of a metal nitride layer substance to fill an inside of the first trench. Forming a second trench on a surface of the lower electrode layer to have a depth less than the first trench. Forming a capacitor dielectric layer conformal along a surface of the lower electrode layer including the second trench. Forming an upper electrode layer of a metal nitride layer substance on the capacitor dielectric layer. Sequentially patterning the upper electrode layer and the capacitor dielectric layer by photolithography.