With Channel Containing Layer Contacting Drain Drift Region (e.g., Dmos Transistor) (epo) Patents (Class 257/E29.256)
  • Patent number: 12250820
    Abstract: A method that is part of a method of forming an elevationally-extending string of memory cells comprises forming an intervening structure that is elevationally between upper and lower stacks that respectively comprise alternating tiers comprising different composition materials. The intervening structure is formed to comprise an elevationally-extending-dopant-diffusion barrier and laterally-central material that is laterally inward of the dopant-diffusion barrier and has dopant therein. Some of the dopant is thermally diffused from the laterally-central material into upper-stack-channel material. The dopant-diffusion barrier during the thermally diffusing is used to cause more thermal diffusion of said dopant into the upper-stack-channel material than diffusion of said dopant, if any, into lower-stack-channel material. Other embodiments, including structure independent of method, are disclosed.
    Type: Grant
    Filed: January 17, 2023
    Date of Patent: March 11, 2025
    Assignee: Micron Technology, Inc.
    Inventors: John D. Hopkins, David Daycock
  • Patent number: 12218189
    Abstract: A semiconductor device includes a drift region, a dielectric film, and an anti-type doping layer. The drift region has a first type conductivity. The anti-type doping layer is located between the drift region and the dielectric film, and has a second type conductivity opposite to the first type conductivity so as to change a current path of a current in the drift region, to thereby prevent the current from being influenced by the dielectric film. A method for manufacturing a semiconductor device and a method for reducing an influence of a dielectric film are also disclosed.
    Type: Grant
    Filed: November 24, 2023
    Date of Patent: February 4, 2025
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hsin-Fu Lin, Tsung-Hao Yeh, Chih-Wei Hung
  • Patent number: 12218134
    Abstract: In an embodiment, a device includes: an isolation region on a substrate; a fin structure protruding from between adjacent portions of the isolation region, the fin structure including a plurality of fins and a mesa, a channel region of the fin structure having a first portion in the fins and having a second portion in the mesa, the fins and the mesa being a continuous semiconductor material, the mesa having a greater width than the fins; and a first gate structure on the fin structure, the first gate structure extending along the first portion of the channel region in the fins and extending along the second portion of the channel region in the mesa.
    Type: Grant
    Filed: April 14, 2021
    Date of Patent: February 4, 2025
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Sung-Hsin Yang, Jung-Chi Jeng, Ru-Shang Hsiao
  • Patent number: 12206038
    Abstract: A PIN diode detector includes a substrate. The PIN diode detector further includes a plurality of PIN diode wells in a pixel region, wherein each of the plurality of PIN diode wells has a first dopant type. The PIN diode detector further includes a connecting ring well and a plurality of floating ring wells in a peripheral region, wherein the connecting ring well and plurality of floating ring wells have the first dopant type. The PIN diode detector further includes a field stop ring well surrounding the plurality of floating ring wells, wherein the field stop ring well has a second dopant type opposite the first dopant type. The PIN diode detector further includes a blanket doped region. The blanket doped region extends continuously through an entirety of the pixel region and an entirety of the peripheral region, and the blanket doped region has the second dopant type.
    Type: Grant
    Filed: May 27, 2022
    Date of Patent: January 21, 2025
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD, TSMC CHINA COMPANY, LIMITED
    Inventors: Lianjie Li, Feng Han, Lu Zhang, Shengtian Lu, LinChun Gui, Chenglin Zhang
  • Patent number: 12191361
    Abstract: A transistor structure with a multi-layer field plate and related methods are disclosed. The transistor structure includes a dielectric layer that has a thinner portion over a first doped well and a second doped well, and a thicker portion adjacent the thinner portion and over the second doped well. The thicker portion has a height greater than the thinner portion above the doped wells. The transistor includes a first gate structure on the thinner portion and a field plate on the thicker portion of the dielectric layer.
    Type: Grant
    Filed: March 24, 2022
    Date of Patent: January 7, 2025
    Assignee: GlobalFoundries U.S. Inc.
    Inventor: Ketankumar Harishbhai Tailor
  • Patent number: 12165868
    Abstract: In a semiconductor manufacturing method, a mask is disposed on a semiconductor layer or semiconductor substrate. The semiconductor layer or semiconductor substrate is etched in an area delineated by the mask to form a cavity. With the mask disposed on the semiconductor layer or semiconductor substrate, the cavity is lined to form a containment structure. With the mask disposed on the semiconductor layer or semiconductor substrate, the containment structure is filled with a base semiconductor material. After filling the containment structure with the base semiconductor material, the mask is removed. At least one semiconductor device is fabricated in and/or on the base semiconductor material deposited in the containment structure.
    Type: Grant
    Filed: May 31, 2023
    Date of Patent: December 10, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hung-Te Lin, Chia-Wei Liu, Hung-Chih Yu
  • Patent number: 12154972
    Abstract: A diffused field-effect transistor (FET) is disclosed. The diffused FET is dually optimized in voltage resistance by incorporating both a trench isolation structure and a thick second oxide layer and thus has a more significantly improved breakdown voltage. With the thick second oxide layer ensuring suitable voltage resistance of the transistor device, its on-resistance can be reduced either by reducing the size of the trench isolation structure or increasing an ion dopant concentration of a drift region. As such, a good tradeoff between voltage resistance and on-resistance is achievable.
    Type: Grant
    Filed: March 26, 2021
    Date of Patent: November 26, 2024
    Assignee: NEXCHIP SEMICONDUCTOR CORPORATION
    Inventors: Menghui Wang, Ching-Ming Lee, Jinzhuan Zhu
  • Patent number: 12154899
    Abstract: A Darlington pair sensor is disclosed. The Darlington pair sensor has an amplifying/horizontal bipolar junction transistor (BJT) and a sensing/vertical BJT and can be used as a biosensor. The amplifying bipolar junction transistor (BJT) is horizontally disposed on a substrate. The amplifying BJT has a horizontal emitter, a horizontal base, a horizontal collector, and a common extrinsic base/collector. The common extrinsic base/collector is an extrinsic base for the amplifying BJT. The sensing BJT has a vertical orientation with respect to the amplifying BJT. The sensing BJT has a vertical emitter, a vertical base, an extrinsic vertical base, and the common extrinsic base/collector (in common with the amplifying BJT). The common extrinsic base/collector acts as the sensing BJT collector. The extrinsic vertical base is separated into a left extrinsic vertical base and a right extrinsic vertical base giving the sensing BJT has two separated (dual) bases, a sensing base and a control base.
    Type: Grant
    Filed: October 18, 2021
    Date of Patent: November 26, 2024
    Assignee: International Business Machines Corporation
    Inventors: Bahman Hekmatshoartabari, Alexander Reznicek, Tak H Ning
  • Patent number: 12148793
    Abstract: The present invention provides a high voltage semiconductor device comprising a combined junction terminal protection structure, the device comprises: an active area formed with the high voltage semiconductor device; a combined junction terminal protection structure having a RESURF (Reduced Surface Field) structure, the RESURF structure comprising a first biasing field plate electrically connecting to the active area and a ferroelectric material layer positioned below the first biasing field plate and in contact with the first biasing field plate. The high voltage semiconductor device structure may further assist in raising breakdown voltage (BV) of the device and meanwhile effectively reduce on-resistance (Ron) of the device compared with current junction terminal protection structure, and then miniaturization of the device structure may be fulfilled more easily.
    Type: Grant
    Filed: November 20, 2023
    Date of Patent: November 19, 2024
    Assignee: SiEn (QingDao) Integrated Circuits Co., Ltd.
    Inventors: Min-Hwa Chi, Min Li, Richard Ru-Gin Chang
  • Patent number: 12136646
    Abstract: Coupled polysilicon guard rings for enhancing breakdown voltage in a power semiconductor device are presented herein. Polysilicon guard rings are disposed above the power device drift region and electrically coupled to power device regions (e.g., device diffusions) so as to spread electric fields associated with an operating voltage. Additionally, PN junctions (i.e., p-type and n-type junctions) are formed within the polysilicon guard rings to operate in reverse bias with a low leakage current between the power device regions (e.g., device diffusions). Low leakage current may advantageously enhance the electric field spreading without deleteriously affecting existing (i.e., normal) power device performance; and enhanced electric field spreading may in turn reduce breakdown-voltage drift.
    Type: Grant
    Filed: June 19, 2019
    Date of Patent: November 5, 2024
    Assignee: POWER INTEGRATIONS, INC.
    Inventors: Kuo-Chang Yang, Sorin Georgescu
  • Patent number: 12074216
    Abstract: An integrated circuit (IC) having a fin field effect transistor (FinFET) includes a substrate with a fin extending from a surface of the substrate. The fin includes a source region, a drain region, a drift region, and field plating oxide layer. The drift region is adjacent the drain region. The field plating oxide layer is on a first side, a second side, and a third side of the drift region.
    Type: Grant
    Filed: November 18, 2022
    Date of Patent: August 27, 2024
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventor: Ming-Yeh Chuang
  • Patent number: 12057475
    Abstract: A field effect transistor contains a semiconductor material layer including a source-side doped well, a source region, and a drain region. A shallow trench isolation structure is embedded in the semiconductor material layer and extends between the source region and the drain region. Agate dielectric layer overlies the semiconductor material layer. A horizontally-extending portion of a gate electrode overlies the gate dielectric layer, and at least one downward-protruding portion of the gate electrode extends downward from a bottom surface of the horizontally-extending portion into an upper region of the shallow trench isolation structure. The gate electrode is vertically spaced from a bottom surface of the shallow trench isolation structure modifies electrical field in a semiconductor channel to reduce hot carrier injection.
    Type: Grant
    Filed: September 10, 2021
    Date of Patent: August 6, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: HsinFu Lin, Tsung-Hao Yeh, Shiang-Hung Huang
  • Patent number: 12015053
    Abstract: A semiconductor device includes a semiconductor substrate, a gate dielectric film formed on the semiconductor substrate, a gate electrode formed on the gate dielectric film, a field plate portion which is integrally formed with the gate electrode, a step insulating film in contact with the field plate portion, a high dielectric constant film in contact with the step insulating film and having a higher dielectric constant than silicon.
    Type: Grant
    Filed: April 11, 2022
    Date of Patent: June 18, 2024
    Assignee: RENESAS ELECTRONICS CORPORATION
    Inventors: Makoto Koshimizu, Yasutaka Nakashiba
  • Patent number: 12010846
    Abstract: A transistor of a semiconductor device includes an isolation region, an active region disposed in the isolation region, a gate extending in a second direction on the active region, and source and drain regions respectively extending in a first direction perpendicular to the second direction in the active region on first and second sides of the gate. The source and drain regions include low-concentration source and drain doping regions including first and second low-concentration source and drain doping regions The source and drain regions further include high-concentration source and drain doping regions respectively disposed in the low-concentration source and drain doping regions and having higher doping concentrations than the low-concentration source and drain doping regions. A first length in the second direction of the first low-concentration source and drain doping regions is greater than a second length in the second direction of the second low-concentration source and drain doping regions.
    Type: Grant
    Filed: September 16, 2021
    Date of Patent: June 11, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Sungkweon Baek, Hakseon Kim, Jaehwa Seo
  • Patent number: 11996444
    Abstract: A semiconductor device includes a source region, a drain region, and a gate insulating film formed on a substrate, a gate electrode formed on the gate insulating film, a first insulating film pattern formed to extend from the source region to a part of a top surface of the gate electrode, and a spacer formed on a side surface of the gate electrode in a direction of the drain region.
    Type: Grant
    Filed: June 20, 2022
    Date of Patent: May 28, 2024
    Assignee: MagnaChip Semiconductor, Ltd.
    Inventor: Guk Hwan Kim
  • Patent number: 11967645
    Abstract: A semiconductor device is provided. The semiconductor device includes a substrate, a field plate, a gate electrode, and a first dielectric layer. The substrate has a top surface. The substrate includes a first drift region with a first conductivity type extending from the top surface of the substrate into the substrate, and includes a second drill region with the first conductivity type extending from the top surface of the substrate into the substrate and adjacent to the first drift region. The field plate is over the substrate. The gate electrode has a first portion and a second portion, wherein the first portion of the gate electrode is located over the field plate. The first dielectric layer is between the substrate and the field plate. The first portion of the gate electrode is overlapping with a boundary of the first drift region and the second drift region in the substrate.
    Type: Grant
    Filed: July 30, 2021
    Date of Patent: April 23, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Yogendra Yadav, Chi-Chih Chen, Ruey-Hsin Liu, Chih-Wen Yao
  • Patent number: 11961890
    Abstract: A semiconductor device includes a semiconductor layer and a gate structure on the semiconductor layer. The gate structure includes a multi-stepped gate dielectric on the semiconductor layer and a gate electrode on the multi-stepped gate dielectric. The multi-stepped gate dielectric includes a first gate dielectric segment having a first thickness and a second gate dielectric segment having a second thickness that is less than the first thickness.
    Type: Grant
    Filed: August 12, 2021
    Date of Patent: April 16, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hsin-Fu Lin, Chia-Ta Hsieh, Tsung-Hao Yeh
  • Patent number: 11869761
    Abstract: The present disclosure relates to an image sensor having a photodiode surrounded by a back-side deep trench isolation (BDTI) structure, and an associated method of formation. In some embodiments, a plurality of pixel regions is disposed within an image sensing die and respectively comprises a photodiode configured to convert radiation into an electrical signal. The photodiode comprises a photodiode doping column with a first doping type surrounded by a photodiode doping layer with a second doping type that is different than the first doping type. A BDTI structure is disposed between adjacent pixel regions and extending from the back-side of the image sensing die to a position within the photodiode doping layer. The BDTI structure comprises a doped liner with the second doping type and a dielectric fill layer. The doped liner lines a sidewall surface of the dielectric fill layer.
    Type: Grant
    Filed: September 11, 2020
    Date of Patent: January 9, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Hung Cheng, Chun-Tsung Kuo, Jiech-Fun Lu, Min-Ying Tsai, Chiao-Chun Hsu, Ching I Li
  • Patent number: 11862674
    Abstract: The present invention provides a high voltage semiconductor device comprising a combined junction terminal protection structure with a ferroelectric material and method of making the same, the device comprises: an active area formed with the high voltage semiconductor device; a combined junction terminal protection structure having a RESURF (Reduced Surface Field) structure, the RESURF structure comprising a first biasing field plate electrically connecting to the active area and a ferroelectric material layer positioned below the first biasing field plate and in contact with the first biasing field plate. The high voltage semiconductor device structure may further assist in raising breakdown voltage (BV) of the device and meanwhile effectively reduce on-resistance (Ron) of the device compared with current junction terminal protection structure, and then miniaturization of the device structure may be fulfilled more easily.
    Type: Grant
    Filed: June 18, 2021
    Date of Patent: January 2, 2024
    Assignee: SiEn (QingDao) Integrated Circuits Co., Ltd.
    Inventors: Min-Hwa Chi, Min Li, Richard Ru-Gin Chang
  • Patent number: 11830932
    Abstract: A laterally diffused metal oxide semiconductor structure can include: a base layer; a source region and a drain region located in the base layer; first dielectric layer located on a top surface of the base layer and adjacent to the source region; a voltage withstanding layer located on the top surface of the base layer and located between the first dielectric layer and the drain region; a first conductor at least partially located on the first dielectric layer; and a second conductor at least partially located on the voltage withstanding layer, where the first and second conductors are spatially isolated, and a juncture region of the first dielectric layer and the voltage withstanding layer is covered by one of the first and second conductors.
    Type: Grant
    Filed: January 20, 2021
    Date of Patent: November 28, 2023
    Assignee: Silergy Semiconductor Technology (Hangzhou) LTD
    Inventors: Budong You, Hui Yu, Meng Wang, Yicheng Du, Chuan Peng, Xianguo Huang
  • Patent number: 11824125
    Abstract: An electrostatic discharge (ESD) protection device is provided. The ESD protection device includes a substrate, an active region, a first terminal region, and a second terminal region. The substrate includes dopants having a first dopant conductivity. The active region is arranged over the substrate and has an upper surface. The first terminal region and the second terminal region are arranged in the active region laterally spaced apart from each other. The first terminal region and the second terminal region each include a well region having dopants of the first dopant conductivity and a first doped region arranged in the well region. The first doped region includes dopants having a second dopant conductivity.
    Type: Grant
    Filed: October 27, 2021
    Date of Patent: November 21, 2023
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Sagar Premnath Karalkar, James Jerry Joseph, Jie Zeng, Milova Paul, Kyong Jin Hwang
  • Patent number: 11791410
    Abstract: A semiconductor device includes a first layer that includes a first semiconductor material disposed on a semiconductor substrate, and a second layer of a second semiconductor material disposed on the first layer. The semiconductor substrate includes Si. The first semiconductor material and the second semiconductor material are different. The second semiconductor material is formed of an alloy including a first element and Sn. A surface region of an end portion of the second layer at both ends of the second layer has a higher concentration of Sn than an internal region of the end portion of the second layer. The surface region surrounds the internal region.
    Type: Grant
    Filed: July 12, 2021
    Date of Patent: October 17, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Fang-Liang Lu, I-Hsieh Wong, Shih-Ya Lin, CheeWee Liu, Samuel C. Pan
  • Patent number: 11784198
    Abstract: A semiconductor device includes a plurality of isolation structures, wherein each isolation structure of the plurality of isolation structures is spaced from an adjacent isolation structure of the plurality of isolation structures in a first direction. The semiconductor device further includes a gate structure. The gate structure includes a top surface; a first sidewall angled at a non-perpendicular angle with respect to the top surface; and a second sidewall angled with respect to the top surface. The gate structure further includes a first horizontal surface extending between the first sidewall and the second sidewall, wherein the first horizontal surface is parallel to the top surface, and a dimension of the gate structure in a second direction, perpendicular to the first direction, is less than a dimension of each of the plurality of isolation structures in the second direction.
    Type: Grant
    Filed: June 2, 2022
    Date of Patent: October 10, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chia-Yu Wei, Fu-Cheng Chang, Hsin-Chi Chen, Ching-Hung Kao, Chia-Pin Cheng, Kuo-Cheng Lee, Hsun-Ying Huang, Yen-Liang Lin
  • Patent number: 11764216
    Abstract: A semiconductor device includes a ring-shaped gate electrode having an opening area disposed on a substrate, a source region and a bulk tap region disposed in the opening area, a well region disposed to overlap the ring-shaped gate electrode, a drift region disposed to be in contact with the well region, a first insulating isolation region disposed, on the drift region, to partially overlap the gate electrode, a second insulating isolation region enclosing the bulk tap region, a drain region disposed to be spaced apart from the ring-shaped gate electrode, and a deep trench isolation region disposed adjacent to the drain region.
    Type: Grant
    Filed: March 8, 2022
    Date of Patent: September 19, 2023
    Assignee: KEY FOUNDRY CO., LTD.
    Inventor: Hyun Kwang Shin
  • Patent number: 11756992
    Abstract: A semiconductor device includes a semiconductor substrate comprising a P-type lightly doped semiconductor layer; an undoped silicon layer formed on the P-type lightly doped semiconductor layer; a first deep trench isolation and a second deep trench isolation formed from an upper surface of the semiconductor substrate to the undoped silicon layer and filled with insulating films; and a first N-type highly doped buried layer formed on the undoped silicon layer, and disposed between the first deep trench isolation and the second deep trench isolation, wherein the undoped silicon layer surrounds bottoms of the first and second deep trench isolations, and has a thickness greater than a thickness of the first N-type highly doped buried layer.
    Type: Grant
    Filed: August 29, 2022
    Date of Patent: September 12, 2023
    Assignee: KEY FOUNDRY CO., LTD.
    Inventor: Yon Sup Pang
  • Patent number: 11721734
    Abstract: An embodiment transistor comprises a semiconductor drain region delimited by a first trench, and, in the first trench, a first electrically conductive element electrically coupled to a node of application of a potential closer to a drain potential of the transistor than to a source potential of the transistor.
    Type: Grant
    Filed: January 8, 2021
    Date of Patent: August 8, 2023
    Assignee: STMicroelectronics (Rousset) SAS
    Inventor: Rosalia Germana-Carpineto
  • Patent number: 11721758
    Abstract: A semiconductor structure is disclosed. The semiconductor structure includes: a substrate; an isolation region adjacent to the drain region; a gate electrode over the substrate and further downwardly extends into the substrate, wherein a portion of the gate electrode below a top surface of the substrate abuts the isolation region; and a source region and a drain region formed in the substrate on either side of the gate structure. An associated method for fabricating the semiconductor structure is also disclosed.
    Type: Grant
    Filed: November 24, 2020
    Date of Patent: August 8, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Jia-Rui Lee, Kuo-Ming Wu, Yi-Chun Lin
  • Patent number: 11710787
    Abstract: A laterally diffused metal oxide semiconductor device can include: a base layer; a source region and a drain region located in the base layer; a first dielectric layer located on a top surface of the base layer and adjacent to the source region; a voltage withstanding layer located on the top surface of the base layer and located between the first dielectric layer and the drain region; a first conductor at least partially located on the first dielectric layer; a second conductor at least partially located on the voltage withstanding layer; and a source electrode electrically connected to the source region, where the first and second conductors are spatially isolated, and the source electrode at least covers a space between the first and second conductors.
    Type: Grant
    Filed: August 12, 2021
    Date of Patent: July 25, 2023
    Assignee: Silergy Semiconductor Technology (Hangzhou) LTD
    Inventors: Budong You, Hui Yu, Meng Wang, Yicheng Du, Chuan Peng, Xianguo Huang
  • Patent number: 11658184
    Abstract: A fin field effect transistor (FinFET) includes a drain region, a merged drift region, and a plurality of fins. The drain region extends above a surface of a semiconductor substrate and has a first dopant concentration of first conductivity type. The merged drift region extends above the substrate surface and touches the drain region, and has a second lower dopant concentration of the first conductivity type. The plurality of fins extend above the substrate surface and each fin is directly connected to the merged drift region. Each fin is connected to a source region having the first conductivity type at a distal end of that fin from the merged drift region.
    Type: Grant
    Filed: December 2, 2020
    Date of Patent: May 23, 2023
    Assignee: Texas Instruments Incorporated
    Inventor: Ming-Yeh Chuang
  • Patent number: 11631742
    Abstract: A semiconductor structure and a method for forming the same are provided in embodiments of the present disclosure. The forming method includes: providing a base; forming a trench in the base, and forming a first dielectric layer on the bottom surface and side walls of the trench; forming a conductor layer, the conductor layer covering the first dielectric layer on the bottom surface of the trench; forming a second dielectric layer in the trench on the conductor layer; and forming a drift region on a side, provided with the trench, of the base. The forming method can improve the breakdown voltage of an LDMOS device and also reduce the Ron of the LDMOS device, thereby improving the performance of the LDMOS device.
    Type: Grant
    Filed: April 13, 2021
    Date of Patent: April 18, 2023
    Assignees: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION, SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION
    Inventors: Eric Zhang, Lily Liu
  • Patent number: 11610978
    Abstract: A method for manufacturing a semiconductor device includes forming a plate structure over an isolation region. A drain electrode electrically connected to a drift region underlying the isolation region is formed, wherein the drain electrode is separated from a first location of the plate structure by a first distance along a central axis of an active area of the semiconductor device in a direction of a current flow between a source and a drain of the semiconductor device, the drain electrode is separated from a second location of the plate structure by a second distance along a line parallel to the central axis and within the active area. The first distance is less than the second distance.
    Type: Grant
    Filed: March 11, 2021
    Date of Patent: March 21, 2023
    Assignee: NXP B.V.
    Inventors: Xin Lin, Ronghua Zhu, Zhihong Zhang, Yujing Wu, Pete Rodriquez
  • Patent number: 11606039
    Abstract: A method of controlling a synchronous rectifier circuit can include: adjusting a falling amplitude of a drive voltage of a synchronous rectifier switch in the synchronous rectifier circuit in a pull-down mode; adjusting a shielding time during which the synchronous rectifier switch is in a turn-off shielding mode and is not to be turned off; turning off the synchronous rectifier switch after a drain-source voltage of the synchronous rectifier switch reaches a turn-off threshold; and where the falling amplitude of the drive voltage in the pull-down mode and the shielding time for a current period are adjusted according to an operation state of the synchronous rectifier switch in a previous period.
    Type: Grant
    Filed: January 11, 2021
    Date of Patent: March 14, 2023
    Assignee: Silergy Semiconductor Technology (Hangzhou) LTD
    Inventors: Chaojun Chen, Jian Deng, Jin Jin
  • Patent number: 11588049
    Abstract: A semiconductor device and method for manufacturing same. The semiconductor device comprises: a drift region (120); an isolation structure (130) contacting the drift region (120), the isolation structure (130) comprising a first isolation layer (132), a hole etch stop layer (134) on the first isolation layer (132), and a second isolation layer (136) on the hole etch stop layer (134); and a hole field plate (180) provided above the hole etch stop layer (134) and contacting the hole etch stop layer (134).
    Type: Grant
    Filed: July 26, 2019
    Date of Patent: February 21, 2023
    Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventor: Huajun Jin
  • Patent number: 11532742
    Abstract: An integrated circuit (IC) structure and a field plate are disclosed. The IC structure and field plate may find advantageous application with, for example, extended drain metal-oxide semiconductor (EDMOS) transistors. The IC structure includes a transistor including a metal gate structure and a drain extension region extending laterally from partially under the metal gate structure to a drain region. A metal field plate is over the drain extension region. Due to being formed simultaneously as part of a gate-last formation approach, the metal field plate has an upper surface coplanar with an upper surface of the metal gate structure. A field plate contact may be on the metal field plate.
    Type: Grant
    Filed: March 19, 2021
    Date of Patent: December 20, 2022
    Assignee: GLOBALFOUNDRIES U.S. Inc.
    Inventors: Ketankumar Harishbhai Tailor, Peter Baars
  • Patent number: 11515424
    Abstract: Disclosed herein are field-effect transistors with asymmetric gate stacks. An example transistor includes a channel material and an asymmetric gate stack, provided over a portion of the channel material between source and drain (S/D) regions. The gate stack is asymmetric in that a thickness of a gate dielectric of a portion of the gate stack closer to one of the S/D regions is different from that of a portion of the gate stack closer to the other S/D region, and in that a work function (WF) material of a portion of the gate stack closer to one of the S/D regions is different from a WF material of a portion of the gate stack closer to the other S/D region. Transistors as described herein exploit asymmetry in the gate stacks to improve the transistor performance in terms of high breakdown voltage, high gain, and/or high output resistance.
    Type: Grant
    Filed: February 8, 2019
    Date of Patent: November 29, 2022
    Assignee: Intel Corporation
    Inventors: Said Rami, Hyung-Jin Lee, Saurabh Morarka, Guannan Liu, Qiang Yu, Bernhard Sell, Mark Armstrong
  • Patent number: 11502121
    Abstract: The present disclosure relates to a semiconductor device. The semiconductor device includes a gate structure arranged on a first surface of a substrate. A doped isolation region is arranged within the substrate along opposing sides of the gate structure. The substrate includes a first region between sides of the doped isolation region and a second region having a different doping characteristic than the first region. The second region contacts a bottom of the first region and a bottom of the doped isolation region.
    Type: Grant
    Filed: June 23, 2020
    Date of Patent: November 15, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Szu-Ying Chen, Min-Feng Kao, Jen-Cheng Liu, Feng-Chi Hung, Dun-Nian Yaung
  • Patent number: 11495681
    Abstract: A semiconductor device includes a semiconductor substrate, a recess, a first gate oxide layer, and a gate structure. The semiconductor substrate includes a first region and a second region adjacent to the first region. The recess is disposed in the first region of the semiconductor substrate, and an edge of the recess is located at an interface between the first region and the second region. At least a part of the first gate oxide layer is disposed in the recess. The first gate oxide layer includes a hump portion disposed adjacent to the edge of the recess, and a height of the hump portion is less than a depth of the recess. The gate structure is disposed on the first region and the second region of the semiconductor substrate, and the gate structure overlaps the hump portion of the first gate oxide layer in a vertical direction.
    Type: Grant
    Filed: October 12, 2020
    Date of Patent: November 8, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chang-Po Hsiung, Ching-Chung Yang, Shan-Shi Huang, Shin-Hung Li, Nien-Chung Li, Wen-Fang Lee, Chiu-Te Lee, Chih-Kai Hsu, Chun-Ya Chiu, Chin-Hung Chen, Chia-Jung Hsu, Ssu-I Fu, Yu-Hsiang Lin
  • Patent number: 11489072
    Abstract: A MOSFET includes a substrate having a body region of a first conductivity type. A main field effect transistor (mainFET) and a mirror device are formed in the substrate. The mainFET includes first gate trenches, first source regions of a second conductivity type adjacent to the first gate trenches, and first body implant regions of the first conductivity type extending into the body region adjacent to and interposed between the first source regions. The mirror device includes second gate trenches, second source regions of the second conductivity type adjacent to the second gate trenches, second body implant regions of the first conductivity type extending into the body region adjacent to and interposed between the second source regions, and link elements of the first conductivity type interconnecting pairs of the second body implant regions.
    Type: Grant
    Filed: April 7, 2021
    Date of Patent: November 1, 2022
    Assignee: NXP USA, Inc.
    Inventors: Ganming Qin, Feng Li, Vishnu Khemka, Moaniss Zitouni, Tanuj Saxena
  • Patent number: 11482543
    Abstract: Existing semiconductor transistor processes may be leveraged to form lateral extensions adjacent to a conventional gate structure. The dielectric thickness under these lateral gate extensions can be varied to tune device performance and enable higher cut-off frequencies without compromising resistance to breakdown at high operating voltages. These extensions may be patterned with dimensions that are not limited by lithographic resolution and overlay capabilities and are compatible with conventional processing for ease of integration with other devices. The lateral extensions and dielectric spacers may be used to form self-aligned source, drain, and channel regions. A narrow-highly-doped channel may be formed under a narrow gate extension to improve operating frequencies. A thick dielectric layer may be formed under a narrow extension gate to improve operation voltage range.
    Type: Grant
    Filed: February 19, 2021
    Date of Patent: October 25, 2022
    Assignee: metaMOS Solutions Inc.
    Inventor: Timothy Lee
  • Patent number: 11482605
    Abstract: A work function metal gate device includes a gate, a drift region, a source, a drain and a first isolation structure. The gate includes a convex stair-shaped work function metal stack or a concave stair-shaped work function metal stack disposed on a substrate. The drift region is disposed in the substrate below a part of the gate. The source is located in the substrate and the drain is located in the drift region beside the gate. The first isolation structure is disposed in the drift region between the gate and the drain.
    Type: Grant
    Filed: December 20, 2020
    Date of Patent: October 25, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chih-Wen Huang, Shih-An Huang
  • Patent number: 11476244
    Abstract: Structures for a laterally-diffused metal-oxide-semiconductor device and methods of forming a structure for a laterally-diffused metal-oxide-semiconductor device. First and second source/drain regions are formed in a substrate, a gate electrode is formed over the substrate, an interconnect structure over the substrate, and a doped region is arranged in the substrate beneath the first source/drain region. The gate electrode is laterally positioned between the first and second source/drain regions, and the interconnect structure includes a contact connected to the first source/drain region. The doped region has a side edge that is laterally spaced from the contact by a distance.
    Type: Grant
    Filed: August 19, 2020
    Date of Patent: October 18, 2022
    Assignee: GlobalFoundries Singapore Pte. Ltd.
    Inventors: Prantik Mahajan, Elaine Xiao Mei Low, Kyong Jin Hwang
  • Patent number: 11444190
    Abstract: An electronic device can include a HEMT. In an embodiment, a gate electrode, a drain electrode, and an access region including a first portion closer to the gate electrode and a second portion closer to the drain electrode. A lower dielectric film can overlie a portion of the access region, and an upper dielectric region can overlie another portion of the access region. In another embodiment, a dielectric film can have a relatively positive or negative charge and a varying thickness. In a further embodiment, the HEMT can include a gate electrode; a dielectric film overlying the gate electrode and defining openings to the gate electrode, wherein a portion of the dielectric film is disposed between the openings; and a gate interconnect extending into the openings of the dielectric film and contacting the gate electrode and the portion of the dielectric film.
    Type: Grant
    Filed: September 22, 2020
    Date of Patent: September 13, 2022
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Abhishek Banerjee, Peter Moens
  • Patent number: 11424331
    Abstract: A power semiconductor device for improving a hot carrier injection is provided. A drain field plate is introduced at one side of a drain in a dielectric trench and connected to a drain electrode, having identical electric potential, thereby improving hole injection effects at a drain side of the dielectric trench. A shield gate field plate is introduced at one side of a source electrode in the dielectric trench and is connected to the source electrode or ground, thereby forming a shield gate. While decreasing gate drain parasitic capacitance Cgd, electron injection effects at a source electrode side of the dielectric trench are improved. With a trench etching method, the improvement of hot carrier injection can also be achieved by making carriers avoid a side wall of the dielectric trench on a path.
    Type: Grant
    Filed: June 16, 2021
    Date of Patent: August 23, 2022
    Assignee: UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA
    Inventors: Ming Qiao, Dingxiang Ma, Zhengkang Wang, Bo Zhang
  • Patent number: 11342453
    Abstract: Disclosed is a lateral double-diffused metal oxide semiconductor field effect transistor (LDMOSFET) with a replacement metal gate (RMG) structure that includes a first section, which traverses a semiconductor body at a channel region in a first-type well, and a second section, which is adjacent to the first section and which traverses the semiconductor body at a drain drift region in a second-type well. The RMG structure includes, in both sections, a first-type work function layer and a second-type work function layer on the first-type work function layer. However, the thickness of the first-type work function layer in the first section is greater than the thickness in the second section such that the RMG structure is asymmetric. Thus, threshold voltage (Vt) at the first section is greater than Vt at the second section and the LDMOSFET has a relatively high breakdown voltage (BV). Also disclosed are methods for forming the LDMOSFET.
    Type: Grant
    Filed: August 18, 2020
    Date of Patent: May 24, 2022
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Yanping Shen, Haiting Wang, Zhiqing Li
  • Patent number: 9041103
    Abstract: Breakdown voltage BVdss is enhanced and ON-resistance reduced in RESURF devices, e.g., LDMOS transistors, by careful charge balancing, even when body and drift region charge balance is not ideal, by: (i) providing a plug or sinker near the drain and of the same conductivity type extending through the drift region at least into the underlying body region, and/or (ii) applying bias Viso to a surrounding lateral doped isolation wall coupled to the device buried layer, and/or (iii) providing a variable resistance bridge between the isolation wall and the drift region. The bridge may be a FET whose source-drain couple the isolation wall and drift region and whose gate receives control voltage Vc, or a resistor whose cross-section (X, Y, Z) affects its resistance and pinch-off, to set the percentage of drain voltage coupled to the buried layer via the isolation wall.
    Type: Grant
    Filed: February 28, 2013
    Date of Patent: May 26, 2015
    Assignee: FREESCALE SEMICONDUCTOR, INC
    Inventors: Won Gi Min, Zhihong Zhang, Hongzhong Xu, Jiang-Kai Zuo
  • Patent number: 9041104
    Abstract: A memory includes a semiconductor layer, a gate insulating film on the semiconductor layer, and a gate electrode on the gate insulating film. A first channel region of a first conductivity type is provided on a surface of the semiconductor layer below the gate insulating film. A diffusion layer of a second conductivity type is provided below the first channel region in the semiconductor layer. The diffusion layer contacts a bottom of the first channel region in a direction substantially vertical to a surface of the semiconductor layer. The diffusion layer forms a PN junction with the bottom of the first channel region. A drain of a first conductivity type and a source of a second conductivity type are provided on a side and another side of the first channel region. A sidewall film covers a side surface of the first channel region on a side of the diffusion layer.
    Type: Grant
    Filed: January 26, 2012
    Date of Patent: May 26, 2015
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventors: Emiko Sugizaki, Shigeru Kawanaka, Kanna Adachi
  • Patent number: 9018703
    Abstract: The present invention discloses a hybrid high voltage device and a manufacturing method thereof. The hybrid high voltage device is formed in a first conductive type substrate, and includes at least one lateral double diffused metal oxide semiconductor (LDMOS) device region and at least one vent device region, wherein the LDMOS device region and the vent device region are connected in a width direction and arranged in an alternating order. Besides, corresponding high voltage wells, sources, drains, body regions, and gates of the LDMOS device region and the vent device region are connected to each other respectively.
    Type: Grant
    Filed: February 10, 2014
    Date of Patent: April 28, 2015
    Assignee: Richtek Technology Corporation, R.O.C.
    Inventors: Tsung-Yi Huang, Chien-Hao Huang
  • Patent number: 9018710
    Abstract: A semiconductor device includes a substrate including first and second regions. A first gate stack structure containing a first effective work function adjust species is formed over the first region and a second gate stack structure containing a second effective work function adjust species is formed over the second region. A channel region is formed under the first gate stack structure and contains a threshold voltage adjust species.
    Type: Grant
    Filed: March 18, 2013
    Date of Patent: April 28, 2015
    Assignee: SK Hynix Inc.
    Inventors: Seung-Mi Lee, Yun-Hyuck Ji
  • Patent number: 9012289
    Abstract: A semiconductor device and its manufacturing method are disclosed. The semiconductor device comprises a gate, and source and drain regions on opposite sides of the gate, wherein a portion of a gate dielectric layer located above the channel region is thinner than a portion of the gate dielectric layer located at the overlap region of the drain and the gate. The thicker first thickness portion may ensure that the device can endure a higher voltage at the drain to gate region, while the thinner second thickness portion may ensure excellent performance of the device.
    Type: Grant
    Filed: September 3, 2013
    Date of Patent: April 21, 2015
    Assignee: Semiconductor Manufacturing International (Beijing) Corporation
    Inventor: Jinhua Liu
  • Patent number: 9012984
    Abstract: A transistor device includes a drift layer having a first conductivity type, a body layer on the drift layer, the body layer having a second conductivity type opposite the first conductivity type, and a source region on the body layer, the source region having the first conductivity type. The device further includes a trench extending through the source region and the body layer and into the drift layer, a channel layer on the inner sidewall of the trench, the channel layer having the second conductivity type and having an inner sidewall opposite an inner sidewall of the trench, a gate insulator on the inner sidewall of the channel layer, and a gate contact on the gate insulator.
    Type: Grant
    Filed: March 13, 2013
    Date of Patent: April 21, 2015
    Assignee: Cree, Inc.
    Inventors: Lin Cheng, Anant Agarwal, John Palmour