With Channel Containing Layer Contacting Drain Drift Region (e.g., Dmos Transistor) (epo) Patents (Class 257/E29.256)
  • Publication number: 20130307072
    Abstract: The present invention discloses a double diffused metal oxide semiconductor (DMOS) device and a manufacturing method thereof. The DMOS device is formed in a first conductive type substrate, and includes a second conductive type high voltage well, a field oxide region, a gate, a second conductive type source, a second conductive type drain, a first conductive type body region, and a first conductive type deep well. The deep well is formed beneath and adjacent to the high voltage well in a vertical direction. The deep well and the high voltage well are defined by a same lithography process step.
    Type: Application
    Filed: May 21, 2012
    Publication date: November 21, 2013
    Inventors: Tsung-Yi Huang, Ching-Yao Yang
  • Publication number: 20130307071
    Abstract: A layout pattern of a high voltage metal-oxide-semiconductor transistor device includes a first doped region having a first conductivity type, a second doped region having the first conductivity type, and an non-continuous doped region formed in between the first doped region and the second doped region. The non-continuous doped region further includes a plurality of third doped regions, a plurality of gaps, and a plurality of fourth doped regions. The gaps and the third doped regions s are alternately arranged, and the fourth doped regions are formed in the gaps. The third doped regions include a second conductivity type complementary to the first conductivity type, and the fourth doped regions include the first conductivity type.
    Type: Application
    Filed: May 21, 2012
    Publication date: November 21, 2013
    Inventors: Ming-Tsung Lee, Cheng-Hua Yang, Wen-Fang Lee, Chih-Chung Wang, Te-Yuan Wu
  • Patent number: 8587055
    Abstract: In an embodiment, an apparatus includes a source region, a gate region and a drain region supported by a substrate, and a drift region including a plurality of vertically extending n-wells and p-wells to couple the gate region and the drain region of a transistor, wherein the plurality of n-wells and p-wells are formed in alternating longitudinal rows to form a superjunction drift region longitudinally extending between the gate region and the drain region of the transistor.
    Type: Grant
    Filed: February 23, 2007
    Date of Patent: November 19, 2013
    Assignee: Infineon Technologies AG
    Inventors: Martin Stiftinger, Snezana Jenei, Wolfgang Werner, Uwe Hodel
  • Patent number: 8581338
    Abstract: A lateral-diffused metal oxide semiconductor device (LDMOS) includes a substrate, a first deep well, at least a field oxide layer, a gate, a second deep well, a first dopant region, a drain and a common source. The substrate has the first deep well which is of a first conductive type. The gate is disposed on the substrate and covers a portion of the field oxide layer. The second deep well having a second conductive type is disposed in the substrate and next to the first deep well. The first dopant region having a second conductive type is disposed in the second deep well. The doping concentration of the first dopant region is higher than the doping concentration of the second deep well.
    Type: Grant
    Filed: May 12, 2011
    Date of Patent: November 12, 2013
    Assignee: United Microelectronics Corp.
    Inventors: An-Hung Lin, Hong-Ze Lin, Bo-Jui Huang, Wei-Shan Liao, Ting-Zhou Yan, Kun-Yi Chou, Chun-Wei Chen
  • Patent number: 8581340
    Abstract: A semiconductor device includes: a semiconductor substrate; a gate electrode formed on the semiconductor substrate through a gate insulating film; a source diffusion layer and a drain diffusion layer formed on both sides of the gate electrode, respectively, in the semiconductor substrate; and a field drain section formed below the gate electrode in the semiconductor substrate so as to be positioned between the gate electrode and the drain diffusion region and include an insulator. The field drain section includes: a first insulating film configured to be contact with the semiconductor substrate, and a second insulating film configured to be formed on the first insulating film and has a dielectric constant higher than a dielectric constant of the first insulating film.
    Type: Grant
    Filed: July 25, 2011
    Date of Patent: November 12, 2013
    Assignee: Renesas Electronics Corporation
    Inventor: Kenji Sasaki
  • Publication number: 20130292764
    Abstract: A device includes a semiconductor substrate, source and drain regions in the semiconductor substrate, a channel region in the semiconductor substrate between the source and drain regions through which charge carriers flow during operation from the source region to the drain region, and a drift region in the semiconductor substrate, on which the drain region is disposed, and through which the charge carriers drift under an electric field arising from application of a bias voltage between the source and drain regions. A PN junction along the drift region includes a first section at the drain region and a second section not at the drain region. The drift region has a lateral profile that varies such that the first section of the PN junction is shallower than the second section of the PN junction.
    Type: Application
    Filed: May 7, 2012
    Publication date: November 7, 2013
    Applicant: Freescale Semiconductor, Inc.
    Inventors: Hongning Yang, Daniel J. Blomberg, Xu Cheng, Xin Lin, Won Gi Min, Zhihong Zhang, Jiang-Kai Zuo
  • Patent number: 8575692
    Abstract: Adverse tradeoff between BVDSS and Rdson in LDMOS devices employing a drift space (52, 152) adjacent the drain (56, 156), is avoided by providing a lightly doped region (511, 1511) of a first conductivity type (CT) separating the first CT drift space (52, 152) from an opposite CT WELL region (53, 153) in which the first CT source (57, 157) is located, and a further region (60, 160) of the opposite CT (e.g., formed by an angled implant) extending through part of the WELL region (53, 153) under an edge (591, 1591) of the gate (59, 159) located near a boundary (531, 1531) of the WELL region (53, 153) into the lightly doped region (511, 1511), and a shallow still further region (66, 166) of the first CT Ohmically coupled to the source (57, 157) and ending near the gate edge (591, 159) whereby the effective channel length (61, 161) in the further region (60, 160) is reduced to near zero.
    Type: Grant
    Filed: February 11, 2011
    Date of Patent: November 5, 2013
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Hongning Yang, Xin Lin, Jiang-Kai Zuo
  • Publication number: 20130285137
    Abstract: A protection circuit for a DMOS transistor comprises an anode circuit having a first heavily doped region of a first conductivity type (314) formed within and electrically connected to a first lightly doped region of the second conductivity type (310, 312). A cathode circuit having a plurality of third heavily doped regions of the first conductivity type (700) within a second heavily doped region of the second conductivity type (304). A first lead (202) is connected to each third heavily doped region (704) and connected to the second heavily doped region by at least three spaced apart connections (702) between every two third heavily doped regions. An SCR (400, 402) is connected between the anode circuit and the cathode circuit. The DMOS transistor has a drain (310, 312, 316) connected to the anode circuit and a source (304) connected to the cathode circuit.
    Type: Application
    Filed: April 30, 2012
    Publication date: October 31, 2013
    Applicant: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Sameer Pendharkar, Suhail Murtaza, Juergen Wittmann
  • Publication number: 20130277741
    Abstract: In one embodiment of an LDMOS device disclosed herein, the device includes a source region, a drain region and a gate electrode that are formed in and above a semiconducting substrate, wherein the gate electrode is generally laterally positioned between the source region and the drain region, a metal-1 field plate positioned above the gate electrode, and a silicide block layer that is positioned in an area between the gate electrode and the drain region. The device further includes at least one source contact that is conductively coupled to the metal-1 field plate and a conductive structure that is conductively coupled to the metal-1 field plate, wherein at least a first portion of the conductive structure extends downward toward the substrate in the area between the gate electrode and the drain region.
    Type: Application
    Filed: April 23, 2012
    Publication date: October 24, 2013
    Applicant: GLOBALFOUNDRIES SINGAPORE PTE LTD
    Inventors: Zhang Guowei, Purakh Raj Verma
  • Publication number: 20130270636
    Abstract: The present application discloses various implementations of a transistor having an isolated body for high voltage operation. In one exemplary implementation, such a transistor comprises a deep well implant having a first conductivity type disposed in a substrate having a second conductivity type opposite the first conductivity type. The transistor includes a source-side well and a drain-side well of the first conductivity type. The source-side well and the drain-side well are electrically coupled to the deep well implant. The deep well implant, the source-side well, and the drain-side well electrically isolate a body of the transistor from the substrate.
    Type: Application
    Filed: April 17, 2012
    Publication date: October 17, 2013
    Applicant: BROADCOM CORPORATION
    Inventor: Akira Ito
  • Publication number: 20130270606
    Abstract: A device includes a semiconductor substrate having a first conductivity type, a device isolating region in the semiconductor substrate, defining an active area, and having a second conductivity type, a body region in the active area and having the first conductivity type, and a drain region in the active area and spaced from the body region to define a conduction path of the device, the drain region having the second conductivity type. The device isolating region and the body region are spaced from one another to establish a first breakdown voltage lower than a second breakdown voltage in the conduction path.
    Type: Application
    Filed: April 17, 2012
    Publication date: October 17, 2013
    Applicant: Freescale Semiconductor, Inc.
    Inventors: Weize Chen, Hubert M. Bode, Richard J. De Souza, Patrice M. Parris
  • Publication number: 20130270635
    Abstract: An electronic apparatus includes a semiconductor substrate and first and second transistors disposed in the semiconductor substrate. The first transistor includes a channel region and a drain region adjacent the channel region. The second transistor includes a channel region, a false drain region adjacent the channel region, and a drain region electrically coupled to the channel region by a drift region such that the second transistor is configured for operation at a higher voltage level than the first transistor. The respective channel regions of the first and second transistors have a common configuration characteristic.
    Type: Application
    Filed: April 16, 2012
    Publication date: October 17, 2013
    Applicant: Freescale Semiconductor, Inc.
    Inventors: Patrice M. Parris, Weize Chen
  • Patent number: 8558307
    Abstract: It is desirable to reduce chip area, lower on resistance and improve electric current driving capacity of a DMOS transistor in a semiconductor device with a DMOS transistor. On the surface of an N type epitaxial layer, a P+W layer of the opposite conductivity type (P type) is disposed and a DMOS transistor is formed in the P+W layer. The epitaxial layer and a drain region are insulated by the P+W layer. Therefore, it is possible to form both the DMOS transistor and other device element in a single confined region surrounded by an isolation layer. An N type FN layer is disposed on the surface region of the P+W layer beneath the gate electrode. An N+D layer, which is adjacent to the edge of the gate electrode of the drain layer side, is also formed. P type impurity layers (a P+D layer and a FP layer), which are located below the drain layer, are disposed beneath the contact region of the drain layer.
    Type: Grant
    Filed: December 18, 2007
    Date of Patent: October 15, 2013
    Assignees: SANYO Semiconductor Co., Ltd., Semiconductor Components Industries, LLC
    Inventors: Shuichi Kikuchi, Kiyofumi Nakaya, Shuji Tanaka
  • Patent number: 8552497
    Abstract: The semiconductor device includes: a first conductive-type first well and a second conductive-type second well configured over a substrate to contact each other; a second conductive-type anti-diffusion region configured in an interface where the first conductive-type first well contacts the second conductive-type second well over the substrate; and a gate electrode configured to simultaneously cross the first conductive-type first well, the second conductive-type anti-diffusion region, and the second conductive-type second well over the substrate.
    Type: Grant
    Filed: November 7, 2011
    Date of Patent: October 8, 2013
    Assignee: Magnachip Semiconductor, Ltd.
    Inventors: Jae-Han Cha, Kyung-Ho Lee, Sun-Goo Kim, Hyung-Suk Choi, Ju-Ho Kim, Jin-Young Chae, In-Taek Oh
  • Publication number: 20130256795
    Abstract: A lateral double-diffused metal-oxide-semiconductor (LDMOS) transistor device includes an enhancement implant region formed in a portion of an accumulation region proximate a P-N junction between body and drift drain regions. The enhancement implant region contains additional dopants of the same conductivity type as the drift drain region. There is a gap between the enhancement implant region and the P-N junction. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.
    Type: Application
    Filed: March 27, 2012
    Publication date: October 3, 2013
    Inventor: Hideaki Tsuchiko
  • Patent number: 8546879
    Abstract: The present disclosure discloses a lateral DMOS with recessed source contact and method for making the same. The lateral DMOS comprises a recessed source contact which has a portion recessed into a source region to reach a body region of the lateral DMOS. The lateral DMOS according to various embodiments of the present invention may have greatly reduced size and may be cost saving for fabrication.
    Type: Grant
    Filed: August 18, 2011
    Date of Patent: October 1, 2013
    Assignee: Monolithic Power Systems, Inc.
    Inventors: Donald R. Disney, Lei Zhang, Tiesheng Li
  • Patent number: 8546878
    Abstract: A semiconductor device includes a semiconductor layer of a first conductivity type and a semiconductor layer of a second conductivity type formed thereon. The semiconductor layer of the second conductivity type is characterized by a first thickness. The semiconductor device includes a set of trenches having a predetermined depth and extending into the semiconductor layer of the second conductivity type, thereby defining interfacial regions disposed between the semiconductor layer of the second conductivity type and each of the trenches. The trenches comprises a distal portion consisting essentially of a dielectric material disposed therein and a proximal portion comprising the dielectric material and a gate material disposed interior to the dielectric material in the proximal portion of the trench. The semiconductor device further includes a source region coupled to the semiconductor layer of the second conductivity type.
    Type: Grant
    Filed: June 9, 2011
    Date of Patent: October 1, 2013
    Assignee: MaxPower Semiconductor, Inc.
    Inventor: Mohamed N. Darwish
  • Patent number: 8546877
    Abstract: A transistor structure that improves an ESD withstand voltage is offered. There is formed a P-type insulating isolation layer that divides an N-type epitaxial layer into a plurality of regions and isolates neighboring regions from each other. A diffusion layer doped with high concentration N-type impurities and an electrode extraction layer are formed in a surface of the epitaxial layer between a low impurity concentration drain layer and the insulating isolation layer. The diffusion layer and the electrode extraction layer are connected with a drain electrode. When an excessive positive surge voltage is applied to a source electrode, a parasitic diode that makes a current path including the diffusion layer and the electrode extraction layer is turned on to shunt an ESD current from the source electrode to the drain electrode, in addition to other parasitic diodes included in a conventional structure.
    Type: Grant
    Filed: September 26, 2007
    Date of Patent: October 1, 2013
    Assignees: Semiconductor Components Industries, LLC, SANYO Semiconductor Co., Ltd.
    Inventor: Kazumasa Akai
  • Publication number: 20130249602
    Abstract: A semiconductor arrangement includes a semiconductor body and a power transistor including a source region, a drain region, a body region and a drift region arranged in the semiconductor body, a gate electrode arranged adjacent to the body region and dielectrically insulated from the body region by a gate dielectric. The semiconductor arrangement further includes a high voltage device arranged within a well-like dielectric structure in the semiconductor body and comprising a further drift region.
    Type: Application
    Filed: March 26, 2012
    Publication date: September 26, 2013
    Applicant: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Anton Mauder, Franz Hirler, Joachim Weyers, Uwe Wahl
  • Patent number: 8541848
    Abstract: To limit or prevent current crowding, various HV-MOSFET embodiments include a current diversion region disposed near a drain region of an HV-MOSFET and near an upper surface of the semiconductor substrate. In some embodiments, the current diversion region is disposed near a field plate of the HV-MOSFET, wherein the field plate can also help to reduce or “smooth” electric fields near the drain to help limit current crowding. In some embodiments, the current diversion region is a p-doped, n-doped, or intrinsic region that is at a floating voltage potential. This current diversion region can push current deeper into the substrate of the HV-MOSFET (relative to conventional HV-MOSFETs), thereby reducing current crowding during ESD events. By reducing current crowding, the current diversion region makes the HV-MOSFETs disclosed herein more impervious to ESD events and, therefore, more reliable in real-world applications.
    Type: Grant
    Filed: October 12, 2011
    Date of Patent: September 24, 2013
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yun-Pei Huang, Yi-Feng Chang, Jam-Wem Lee
  • Publication number: 20130234246
    Abstract: A device includes a semiconductor substrate, a channel region in the semiconductor substrate having a first conductivity type, and a composite drift region in the semiconductor substrate, having a second conductivity type. The composite drift region includes a first drift region and a second drift region spaced from the channel region by the first drift region. The device further includes a drain region in the semiconductor substrate, spaced from the channel region by the composite drain region, and having the second conductivity type. The first drift region has a dopant concentration profile with a first concentration level where adjacent the channel region and a second concentration level where adjacent the second drift region, the first concentration level being higher than the second concentration level. In some embodiments, the first and second drift regions are stacked vertically, with the first drift region being shallower than the second drift region.
    Type: Application
    Filed: March 6, 2012
    Publication date: September 12, 2013
    Applicant: Freescale Semiconductor, Inc.
    Inventors: Hongning Yang, Jiang-Kai Zuo
  • Publication number: 20130234247
    Abstract: A lateral trench MOSFET comprises a dielectric isolation trench formed over a silicon-on-insulator substrate. The lateral trench MOSFET further comprises a first drift region formed between a drain/source region and an insulator, and a second drift region formed between the dielectric isolation trench and the insulator. The dielectric trench and the insulator help to fully deplete the drift regions. The depleted regions can improve the breakdown voltage as well as the on-resistance of the lateral trench MOSFET.
    Type: Application
    Filed: March 9, 2012
    Publication date: September 12, 2013
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Po-Yu Chen
  • Patent number: 8530965
    Abstract: A semiconductor device comprising a substrate in which a first region and a second region are defined, a gate line which extends in a first direction and traverses the first region and the second region, a source region including a portion formed in the first region, a first part of a body region which is formed under the portion of the source region in the first region and has a first width, a first well which is formed under the first part of the body region in the first region and has a second width greater than the first width, a second part of the body region which is formed in the second region and has a third width, and a second well which is formed under the second part of the body region in the second region and has a fourth width smaller than the third width.
    Type: Grant
    Filed: April 17, 2012
    Date of Patent: September 10, 2013
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Min-Hwan Kim
  • Patent number: 8530969
    Abstract: A semiconductor device includes a substrate, a gate structure, a source structure and a drain structure. The substrate includes a deep well region, and the gate structure is disposed on the deep well region. The source structure is formed within the deep well and located at a first side of the gate structure. The drain structure is formed within the deep well region and located at a second side of the gate structure. The drain structure includes a first doped region of a first conductivity type, a first electrode and a second doped region of a second conductivity type. The first doped region is located in the deep well region; the first electrode is electrically connected to the first doped region. The second doped region is disposed within the first doped region and between the first electrode and the gate structure.
    Type: Grant
    Filed: February 9, 2012
    Date of Patent: September 10, 2013
    Assignee: United Microelectronics Corporation
    Inventors: Lu-An Chen, Tai-Hsiang Lai, Tien-Hao Tang
  • Patent number: 8530300
    Abstract: Disclosed is a method of forming a semiconductor device with drift regions of a first doping type and compensation regions of a second doping type, and a semiconductor device with drift regions of a first doping type and compensation regions of a second doping type.
    Type: Grant
    Filed: July 23, 2010
    Date of Patent: September 10, 2013
    Assignee: Infineon Technologies Austria AG
    Inventors: Joachim Weyers, Armin Willmeroth, Anton Mauder, Franz Hirler
  • Publication number: 20130228861
    Abstract: A semiconductor structure and a manufacturing process thereof are disclosed. The semiconductor structure includes a substrate having a first conductive type, a first well having a second conductive type formed in the substrate, a doped region having the second conductive type formed in the first well, a field oxide and a second well having the first conductive type. The doped region has a first net dopant concentration. The field oxide is formed on a surface area of the first well. The second well is disposed underneath the field oxide and connected to a side of the doped region. The second well has a second net dopant concentration smaller than the first net dopant concentration.
    Type: Application
    Filed: March 5, 2012
    Publication date: September 5, 2013
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Chih-Chia Hsu, Yu-Hsien Chin, Yin-Fu Huang
  • Patent number: 8525259
    Abstract: The invention prevents a source-drain breakdown voltage of a DMOS transistor from decreasing due to dielectric breakdown in a portion of a N type drift layer having high concentration formed in an active region near field oxide film corner portions surrounding an gate width end portion. The field oxide film corner portions are disposed on the outside of the gate width end portion so as to be further away from a P type body layer formed in the gate width end portion by forming the active region wider on the outside of the gate width end portion than in a gate width center portion. By this, the N type drift layer having high concentration near the field oxide film corner portions are disposed further away from the P type body layer without increasing the device area.
    Type: Grant
    Filed: May 25, 2010
    Date of Patent: September 3, 2013
    Assignees: Semiconductor Components Industries, LLC., SANYO Semiconductor Co., Ltd.
    Inventors: Yasuhiro Takeda, Kazunori Fujita, Haruki Yoneda
  • Publication number: 20130221438
    Abstract: A layout pattern of a high voltage metal-oxide-semiconductor transistor device includes a first doped region having a first conductivity type, a second doped region having the first conductivity type, and an non-continuous doped region formed in between the first doped region and the second doped region. The non-continuous doped region includes a plurality of gaps formed therein. The non-continuous doped region further includes a second conductivity type complementary to the first conductivity type.
    Type: Application
    Filed: February 28, 2012
    Publication date: August 29, 2013
    Inventors: Ming-Tsung Lee, Cheng-Hua Yang, Wen-Fang Lee, Chih-Chung Wang, Chih-Wei Hsu, Po-Ching Chuang
  • Publication number: 20130214354
    Abstract: A semiconductor structure and a method for forming the same are provided. The semiconductor structure comprises a first semiconductor region, a second semiconductor region, a dielectric structure and a gate electrode layer. The first semiconductor region has a first type conductivity. The second semiconductor region has a second type conductivity opposite to the first type conductivity. The first semiconductor region is adjoined to the second semiconductor region. The dielectric structure is on the first semiconductor region and the second semiconductor region. The gate electrode layer is on the dielectric structure.
    Type: Application
    Filed: February 20, 2012
    Publication date: August 22, 2013
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventor: Wing-Chor Chan
  • Publication number: 20130214352
    Abstract: A dual gate lateral MOSFET comprises a drift region over a substrate, an isolation region formed in the drift region and a channel region formed in the drift region. The dual gate lateral MOSFET comprises a drain region formed in the drift region and a source region formed in the channel region, wherein the source region and drain region are formed on opposing sides of the isolation region. The dual gate lateral MOSFET further comprises a first gate and a second gate formed adjacent to the source region, wherein the first gate and the second gate are stacked together and separated by a dielectric layer.
    Type: Application
    Filed: February 20, 2012
    Publication date: August 22, 2013
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Po-Yu Chen
  • Patent number: 8513766
    Abstract: An inventive semiconductor device includes a semiconductor layer, a source region provided in a surface layer portion of the semiconductor layer, a drain region provided in the surface of the semiconductor layer in spaced relation from the source region, a gate insulation film provided in opposed relation to a portion of the surface of the semiconductor layer present between the source region and the drain region, a gate electrode provided on the gate insulation film, and a drain-gate isolation portion provided between the drain region and the gate insulation film for isolating the drain region and the gate insulation film from each other in non-contact relation.
    Type: Grant
    Filed: June 19, 2008
    Date of Patent: August 20, 2013
    Assignee: Rohm Co., Ltd.
    Inventors: Mitsuo Kojima, Shoji Takei
  • Publication number: 20130207185
    Abstract: An isolated device is formed in a substrate in which is formed a high voltage device. The isolated device includes: an isolated well formed in the substrate by a lithography process and an ion implantation process used in forming the high voltage device; a gate formed on the substrate; a source and a drain, which are located in the isolated well at both sides of the gate respectively; a drift-drain region formed beneath the substrate surface, wherein the gate and the drain are separated by the drift-drain region, and the drain is in the drift-drain region; and a mitigation region, which is formed in the substrate and has a shallowest portion located at least below 90% of a depth of the drift-drain region as measured from the substrate surface, wherein the mitigation region and the drift-drain region are defined by a same lithography process.
    Type: Application
    Filed: February 10, 2012
    Publication date: August 15, 2013
    Inventors: Tsung-Yi Huang, Chien-Wei Chiu
  • Publication number: 20130207184
    Abstract: A semiconductor device includes a substrate, a gate structure, a source structure and a drain structure. The substrate includes a deep well region, and the gate structure is disposed on the deep well region. The source structure is formed within the deep well and located at a first side of the gate structure. The drain structure is formed within the deep well region and located at a second side of the gate structure. The drain structure includes a first doped region of a first conductivity type, a first electrode and a second doped region of a second conductivity type. The first doped region is located in the deep well region; the first electrode is electrically connected to the first doped region. The second doped region is disposed within the first doped region and between the first electrode and the gate structure.
    Type: Application
    Filed: February 9, 2012
    Publication date: August 15, 2013
    Applicant: UNITED MICROELECTRONICS CORPORATION
    Inventors: Lu-An CHEN, Tai-Hsiang LAI, Tien-Hao TANG
  • Publication number: 20130207187
    Abstract: A high voltage metal-oxide-semiconductor laterally diffused device (HV LDMOS), particularly an insulated gate bipolar junction transistor (IGBT), and a method of making it are provided in this disclosure. The device includes a semiconductor substrate, a gate structure formed on the substrate, a source and a drain formed in the substrate on either side of the gate structure, a first doped well formed in the substrate, and a second doped well formed in the first well. The gate, source, second doped well, a portion of the first well, and a portion of the drain structure are surrounded by a deep trench isolation feature and an implanted oxygen layer in the silicon substrate.
    Type: Application
    Filed: February 13, 2012
    Publication date: August 15, 2013
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ker Hsiao HUO, Chih-Chang CHENG, Ru-Yi SU, Jen-Hao YEH, Fu-Chih YANG, Chun Lin TSAI
  • Patent number: 8507985
    Abstract: According to one embodiment, a semiconductor device, includes a semiconductor layer, a first base region of a first conductivity type, a first source region of a second conductivity type, a second base region of the first conductivity type, a back gate region of the first conductivity type, a drift region of the second conductivity type, a drain region of the second conductivity type, a first insulating region, a second insulating region, a gate oxide film, a first gate electrode, a second gate electrode, a first main electrode and a second main electrode. These constituent elements are provided on the surface of the semiconductor layer. The distance between the first base region and the first insulating region is not more than 1.8 ?m. The distance between the first base region and the first insulating region is shorter than a distance between the second base region and the second insulating region.
    Type: Grant
    Filed: March 18, 2011
    Date of Patent: August 13, 2013
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Hirofumi Hirasozu, Kimihiko Deguchi, Manji Obatake, Tomoko Matsudai
  • Patent number: 8507983
    Abstract: A device is disclosed. The device includes s substrate prepared with an active device region. The active device region includes a gate. The device also includes a doped channel well disposed in the substrate adjacent to a first edge of the gate. The first edge of the gate overlaps the channel well with a channel edge of the channel well beneath the gate. The first edge of the gate and channel edge defines an effective channel length of the device. The effective channel length is self-aligned to the gate. A doped drift well adjacent to a second edge of the gate is also included.
    Type: Grant
    Filed: July 16, 2012
    Date of Patent: August 13, 2013
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Guowei Zhang, Purakh Raj Verma
  • Patent number: 8507988
    Abstract: A high voltage (HV) device includes a gate dielectric structure over a substrate. The gate dielectric structure has a first portion and a second portion. The first portion has a first thickness and is over a first well region of a first dopant type in the substrate. The second portion has a second thickness and is over a second well region of a second dopant type. The first thickness is larger than the second thickness. A gate electrode is disposed over the gate dielectric structure. A metallic layer is over and coupled with the gate electrode. The metallic layer extends along a direction of a channel under the gate dielectric structure. At least one source/drain (S/D) region is disposed within the first well region of the first dopant type.
    Type: Grant
    Filed: June 2, 2010
    Date of Patent: August 13, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Wen Yao, Robert S. J. Pan, Ruey-Hsin Liu, Hsueh-Liang Chou, Puo-Yu Chiang, Chi-Chih Chen, Hsiao Chin Tuan
  • Publication number: 20130200459
    Abstract: A planar semiconductor device including a semiconductor on insulator (SOI) substrate with source and drain portions having a thickness of less than 10 nm that are separated by a multi-layered strained channel The multi-layer strained channel of the SOI layer includes a first layer with a first lattice dimension that is present on the buried dielectric layer of the SOI substrate, and a second layer of a second lattice dimension that is in direct contact with the first layer of the multi-layer strained channel portion. A functional gate structure is present on the multi-layer strained channel portion of the SOI substrate. The semiconductor device having the multi-layered channel may also be a finFET semiconductor device.
    Type: Application
    Filed: February 2, 2012
    Publication date: August 8, 2013
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Thomas N. Adam, Kangguo Cheng, Ali Khakifirooz, Alexander Reznicek, Davood Shahrjerdi
  • Patent number: 8502281
    Abstract: An integrated circuit and component is disclosed. In one embodiment, the component is a compensation component, configuring the compensation regions in the drift zone in V-shaped fashion in order to achieve a convergence of the space charge zones from the upper to the lower end of the compensation regions is disclosed.
    Type: Grant
    Filed: October 20, 2011
    Date of Patent: August 6, 2013
    Assignee: Infineon Technologies Austria AG
    Inventors: Armin Willmeroth, Holger Kapels
  • Publication number: 20130187225
    Abstract: A HV MOSFET device includes a substrate, a deep well region, a source/body region, a drain region, a gate structure, and a first doped region. The deep well region includes a boundary site and a middle site. The source/body region is formed in the deep well region and defines a channel region. The first doped region is formed in the deep well region and disposed under the gate structure, and having the first conductivity type. There is a first ratio between a dopant dose of the first doped region and a dopant dose of the boundary site of the deep well region. There is a second ratio between a dopant dose of the first doped region and a dopant dose of the middle site of the deep well region. A percentage difference between the first ratio and the second ratio is smaller than or equal to 5%.
    Type: Application
    Filed: January 20, 2012
    Publication date: July 25, 2013
    Applicant: UNITED MICROELECTRONICS CORPORATION
    Inventors: Chih-Chung WANG, Ming-Tsung Lee, Chung-I Huang, Shan-Shi Huang, Wen-Fang Lee, Te-Yuan Wu
  • Publication number: 20130187218
    Abstract: A device which includes a substrate defined with a device region having an ESD protection circuit is disclosed. The ESD protection circuit has a transistor. The transistor includes a gate having first and second sides. A first diffusion region is disposed adjacent to the first side of the gate and a second diffusion region is disposed in the device region displaced away from the second side of the gate. The first and second diffusion regions include dopants of a first polarity type. A drift isolation region is disposed between the gate and the second diffusion region. A first device well encompasses the device region and a second device well is disposed within the first device well. A drain well having dopants of the first polarity type is disposed under the second diffusion region and within the first device well.
    Type: Application
    Filed: November 5, 2012
    Publication date: July 25, 2013
    Applicant: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventor: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
  • Patent number: 8492836
    Abstract: In a semiconductor device according to the present invention, a p-type well region disposed in an outer peripheral portion of the power semiconductor device is divided into two parts, that is, an inside and an outside, and a field oxide film having a greater film thickness than the gate insulating film is provided on a well region at the outside to an inside of an inner periphery of the well region. Therefore, it is possible to prevent, in the gate insulating film, a dielectric breakdown due to the voltage generated by the flow of the displacement current in switching.
    Type: Grant
    Filed: October 14, 2009
    Date of Patent: July 23, 2013
    Assignee: Mitsubishi Electric Corporation
    Inventors: Naruhisa Miura, Shuhei Nakata, Kenichi Ohtsuka, Shoyu Watanabe, Shiro Hino, Akihiko Furukawa
  • Patent number: 8492834
    Abstract: An electrostatic discharge protection device comprises a substrate with a first conductivity, a gate, a drain structure and a source structure. The gate is disposed on a surface of the substrate. The drain structure with a second conductivity type comprises a first doping region with a first doping concentration disposed adjacent to the gate and extending into the substrate from the surface of the substrate, a second doping region extending into and stooped at the first doping region from the surface of the substrate and having a second doping concentration substantially greater than the first doping concentration, and a third doping region disposed in the substrate beneath the second doping region and having a third doping concentration substantially greater than the first doping concentration. The source structure with the second conductivity is disposed in the substrate and adjacent to the gate electrode.
    Type: Grant
    Filed: August 22, 2011
    Date of Patent: July 23, 2013
    Assignee: United Microelectronics Corp.
    Inventors: Tai-Hsiang Lai, Lu-An Chen, Tien-Hao Tang
  • Publication number: 20130181286
    Abstract: A method of forming a device is presented. The method includes providing a substrate having a device region which includes a source region, a gate and a drain region defined thereon. The method also includes implanting the gate. The gate comprises one or more doped portions with different dopant concentrations. A source and a drain are formed in the source region and drain region. The drain is separated from the gate on a second side of the gate and the source is adjacent to a first side of the gate.
    Type: Application
    Filed: January 17, 2012
    Publication date: July 18, 2013
    Applicant: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventor: Guowei ZHANG
  • Publication number: 20130181289
    Abstract: A semiconductor device includes a semiconductor substrate having a diffusion region. A transistor is formed within the diffusion region. A power rail is disposed outside the diffusion region. A contact layer is disposed above the substrate and below the power rail. A via is disposed between the contact layer and the power rail to electrically connect the contact layer to the power rail. The contact layer includes a first length disposed outside the diffusion region and a second length extending from the first length into the diffusion region and electrically connected to the transistor.
    Type: Application
    Filed: January 16, 2012
    Publication date: July 18, 2013
    Applicant: GLOBALFOUNDRIES INC.
    Inventors: Marc Tarabbia, James B. Gullette, Mahbub Rashed, David S. Doman, Irene Y. Lin, Ingolf Lorenz, Larry Ho, Chinh Nguyen, Jeff Kim, Jongwook Kye, Yuansheng Ma, Yunfei Deng, Rod Augur, Seung-Hyun Rhee, Jason E. Stephens, Scott Johnson, Subramani Kengeri, Suresh Venkatesan
  • Publication number: 20130181287
    Abstract: A method of forming a device is disclosed. A substrate having a device region is provided. The device region comprises a source region, a gate and a drain region defined thereon. A drift well is formed in the substrate adjacent to a second side of the gate. The drift well underlaps a portion of the gate with a first edge of the drift well beneath the gate. A secondary portion is formed in the drift well. The secondary portion underlaps a portion of the gate with a first edge of the secondary portion beneath the gate. The first edge of the secondary portion is offset from the first edge of the drift well. A gate dielectric of the gate comprises a first portion having a first thickness and a second portion having a second thickness. The second portion is over the secondary portion.
    Type: Application
    Filed: August 29, 2012
    Publication date: July 18, 2013
    Applicant: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Guowei ZHANG, Purakh Raj VERMA
  • Publication number: 20130181296
    Abstract: According to one embodiment, a semiconductor device includes a semiconductor substrate with a p-type conductivity, a buried layer with an n-type conductivity provided on the semiconductor substrate, a back gate layer with a p-type conductivity provided on the buried layer, a drain layer with an n-type conductivity provided on the back gate layer, a source layer with an n-type conductivity provided spaced from the drain layer, a gate electrode provided in a region immediately above a portion of the back gate layer between the drain layer and the source layer, and a drain electrode in contact with a part of an upper surface of the drain layer. A thickness of the drain layer in a region immediately below a contact surface between the drain layer and the drain electrode is half a total thickness of the back gate and drain layers in the region.
    Type: Application
    Filed: June 8, 2012
    Publication date: July 18, 2013
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Koji SHIRAI, Ken INADUMI, Tsuyoshi HIRAYU, Toshihiro SAKAMOTO
  • Publication number: 20130181285
    Abstract: An LDMOS transistor with a dummy gate comprises an extended drift region formed over a substrate, a drain region formed in the extended drift region, a channel region formed in the extended drift region, a source region formed in the channel region and a dielectric layer formed over the extended drift region. The LDMOS transistor with a dummy gate further comprises an active gate formed over the channel region and a dummy gate formed over the extended drift region. The dummy gate helps to reduce the gate charge of the LDMOS transistor while maintaining the breakdown voltage of the LDMOS transistor.
    Type: Application
    Filed: January 17, 2012
    Publication date: July 18, 2013
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chun-Wai Ng, Ruey-Hsin Liu, Jun Cai, Hsueh-Liang Chou, Chi-Chih Chen
  • Publication number: 20130175617
    Abstract: This application is directed to a semiconductor device with an oversized local contact as a Faraday shield, and methods of making such a semiconductor device. One illustrative device disclosed herein includes a transistor comprising a gate electrode and a source region, a source region conductor that is conductively coupled to the source region, a Faraday shield positioned above the source region conductor and the gate electrode and a first portion of a first primary metallization layer for an integrated circuit device positioned above and electrically coupled to the Faraday shield.
    Type: Application
    Filed: January 9, 2012
    Publication date: July 11, 2013
    Applicant: GLOBALFOUNDRIES INC.
    Inventors: Yanxiang Liu, Young Way Teh, Vara Vakada
  • Patent number: 8482085
    Abstract: Power MOS device of the type comprising a plurality of elementary power MOS transistors having respective gate structures and comprising a gate oxide with double thickness having a thick central part and lateral portions of reduced thickness. Such device exhibiting gate structures comprising first gate conductive portions overlapped onto said lateral portions of reduced thickness to define, for the elementary MOS transistors, the gate electrodes, as well as a conductive structure or mesh. Such conductive structure comprising a plurality of second conductive portions overlapped onto the thick central part of gate oxide and interconnected to each other and to the first gate conductive portions by means of a plurality of conducive bridges.
    Type: Grant
    Filed: December 14, 2010
    Date of Patent: July 9, 2013
    Assignee: STMicroelectronics S.r.l.
    Inventors: Angelo Magri, Ferruccio Frisina, Giuseppe Ferla