Fluorescence Patents (Class 378/44)
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Publication number: 20090086896Abstract: Certain embodiments of one aspect relates to inducing at least one induced X-ray fluorescing photon within an at least some matter of an at least a portion of an at least one individual responsive to an at least some input energy being applied to the at least some matter of the least the portion of the at least one individual. The aspect can include X-ray fluorescence visualizing, imaging, or information providing within the at least some matter of the least the portion of the at least one individual at least partially in response to the inducing at least one induced X-ray fluorescing photon within the at least some matter of the least the portion of the at least one individual.Type: ApplicationFiled: September 28, 2007Publication date: April 2, 2009Inventors: Edward S. Boyden, Roderick A. Hyde, Muriel Y. Ishikawa, Edward K.Y. Jung, Eric C. Leuthardt, Robert W. Lord, Nathan P. Myhrvold, Dennis J. Rivet, Michael A. Smith, Clarence T. Tegreene, Thomas A. Weaver, Charles Whitmer, Lowell L. Wood, JR., Victoria Y.H. Wood
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Publication number: 20090086893Abstract: One aspect relates to deriving at least one first X-ray fluorescence visualization, image, or provided information substantially within an at least some matter of an at least a portion of an at least one individual at least partially as a result of directing an at least one first applied high energy photon and/or particle having an at least one first input energy towards the at least some matter of the at least the portion of the at least one individual. The aspect comprises deriving at least one second X-ray fluorescence visualization, image, or provided information substantially within the at least some matter of the at least the portion of the at least one individual at least partially as a result of directing an at least one second applied high energy photon and/or particle having an at least one second input energy toward the at least some matter of the at least the portion of the at least one individual.Type: ApplicationFiled: September 28, 2007Publication date: April 2, 2009Inventors: Edward S. Boyden, Roderick A. Hyde, Muriel Y. Ishikawa, Edward K.Y. Jung, Eric C. Leuthardt, Robert W. Lord, Nathan P. Myhrvold, Dennis J. Rivet, Michael A. Smith, Clarence T. Tegreene, Thomas A. Weaver, Charles Whitmer, Lowell L. Wood, JR., Victoria Y.H. Wood
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Publication number: 20090082971Abstract: A combination radiography and fluoroscopy system includes in one embodiment a radiography radiation generator and radiography radiation receiver, a fluoroscopy radiation generator and fluoroscopy radiation receiver, and a single computer system connected to receive signals from the radiography radiation receiver and fluoroscopy radiation receiver. The single computer system includes signal processing paths for the radiography signal and for the fluoroscopy signal wherein some processes or modules are common between the paths and some are path specific. The path specific processes are preferably connected in parallel. Common controls and a common interface are provided to the monitor connected to the computer system.Type: ApplicationFiled: September 25, 2007Publication date: March 26, 2009Inventors: Franz Atzinger, Bernhard Geiger, Heinz Hornegger, Clemens Joerger
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Patent number: 7508906Abstract: An X-ray fluorescence measurement device comprises an X-ray source and a sample window for allowing X-rays from the X-ray source reach a sample. A filter arrangement between the X-ray source and the sample window includes a first filter layer comprising a first filtering element and a second filter layer including a second filtering element. The atomic number of the second filtering element is greater than the atomic number of the first filtering element. The first filter layer is between the X-ray source and the second filter layer.Type: GrantFiled: April 26, 2007Date of Patent: March 24, 2009Assignee: Oxford Instruments Analytical OyInventors: Erikki Puusaari, Andy Ellis
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Patent number: 7471762Abstract: A semiconductor substrate is exposed to an acid vapor, an impurity on the surface of the semiconductor substrate exposed to the acid vapor is scanned and collected with an acid solution, the acid solution after being subjected to the scanning and collecting is changed to a concentrated and dried object on a substrate having a mirror surface, the concentrated and dried object is changed to a particle-like concentrated object using an acid, and the particle-like concentrated object is analyzed using a total reflection X-ray fluorescence analysis device.Type: GrantFiled: April 29, 2005Date of Patent: December 30, 2008Assignee: Kabushiki Kaisha ToshibaInventor: Shoko Ito
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Patent number: 7471763Abstract: To provide a fluorescent X-ray analysis apparatus using a polarization for effectively measuring a minute portion of a sample surface without a necessary to prepare many kinds of secondary targets. A fluorescent X-ray analysis apparatus according to the present invention includes an X-ray tube for generating an X-ray; a sample support portion for supporting a sample receiving the X-ray; a polarization filter for receiving an X-ray to be generated from the sample receiving the X-ray; and a detector for detecting the X-ray from the polarization filter. Then, the X-ray tube, the sample, the polarization filter, and the detector are arranged so that three light paths, namely, a light path from the X-ray tube to the sample, a light path from the sample to the polarization filter, and a light path from the polarization filter to the detector intersect with each other at 90 degrees.Type: GrantFiled: May 24, 2007Date of Patent: December 30, 2008Assignee: SII Nano Technology Inc.Inventor: Norio Sasayama
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Publication number: 20080310587Abstract: An X-ray fluourescence (XRF) apparatus uses both an analyzer crystal (6) and a silicon drift detector (34). By using this combination problems of background and overlapping peaks can be mitigated.Type: ApplicationFiled: April 4, 2008Publication date: December 18, 2008Inventors: Petra Hegeman, Christian Brons, Peter Brouwer
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Publication number: 20080294264Abstract: A shoulder joint is provided. The shoulder joint includes a main support, a fold-out arm, first and second carriages arranged on the main support, and a first coupling that is operable to couple the first and second carriages together. The fold-out arm is attached by a pin to the second carriage, and the first carriage is connected to the fold-out arm in such a way that when the first and second carriages are operable to move towards each other, the fold-out arm is folded out by pivoting around the pin. The first coupling is operable to couple the first and second carriages together when the fold-out arm is folded out, and the first and second carriages are operable to move jointly in at least one direction when coupled together.Type: ApplicationFiled: May 16, 2008Publication date: November 27, 2008Inventors: Franz Beimler, Michael Kleber, Marianne Koferl, Joachim Trummer, Dieter Wohrl
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Publication number: 20080267348Abstract: An X-ray fluorescence measurement device comprises an X-ray source and a sample window for allowing X-rays from said X-ray source reach a sample. A filter arrangement between said X-ray source and said sample window comprises a first filter layer comprising a first filtering element and a second filter layer comprising a second filtering element. The atomic number of the second filtering element is greater than the atomic number of the first filtering element. Said first filter layer is between said X-ray source and said second filter layer.Type: ApplicationFiled: April 26, 2007Publication date: October 30, 2008Inventors: Erikki Puusaari, Andy Ellis
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Publication number: 20080267349Abstract: A particle therapy facility has a particle accelerator, a therapy control system and at least one treatment room, where the particle accelerator accelerates particles and supplies them to the treatment room via an adaptation unit in order to irradiate a volume which is to be irradiated in a patient, and where the treatment room has a patient positioning device for positioning the patient relative to a scan area of the adaptation unit and at least one fluoroscopy system for continuously obtaining fluoroscopic image data from the patient in an area around the scan area, and where the therapy control system is designed for online evaluation of the fluoroscopic image data for movement of the volume which is to be irradiated and/or of the adjoining tissue and/or organs arranged around it and/or markers implanted in the patient which are depicted in the fluoroscopic images, and for output of a control signal for the adaptation unit which (control signal) adapts a particle beam direction and/or a particle energy toType: ApplicationFiled: November 9, 2006Publication date: October 30, 2008Inventor: Eike Rietzel
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Patent number: 7443951Abstract: An x-ray fluorescence (XRF) device and a method for using the same to analyze a sample are described. The EMRXG source of the XRF device has a configuration that allows a greater amount of EMRXG to impinge on the sample being analyzed. The x-ray detector of the XRF device has a configuration that allows a greater amount of x-rays emitted by the sample to impinge on the detector. With such a configuration, the size and cost of the x-ray fluorescence device decreases. As well, fewer EMRXG are needed from the EMRXG source because of the greater efficiency and an exempt EMRXG source that is exempt from radioactivity licensing requirements can be used.Type: GrantFiled: April 1, 2005Date of Patent: October 28, 2008Assignee: KeyMasters Technologies, Inc.Inventors: Donald K. Kenning, L. Stephen Price, Bruce J. Kaiser
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Patent number: 7443959Abstract: An X-ray fluorescence analyzer device comprises an X-ray source and a sample window. Between the X-ray source and the sample window there are a collimator plate with a plurality of microscopic pores and an annular plate comprising material essentially opaque to X-rays. The annular plate defines an area transparent to X-rays. The pores in said collimator plate let through collimated X-rays radiated by said X-ray source towards said sample window. The area transparent to X-rays in said annular plate spatially limits in a transverse direction a beam of X-rays radiated by said X-ray source towards said sample window.Type: GrantFiled: October 10, 2006Date of Patent: October 28, 2008Assignee: Oxford Instruments Analytical OyInventors: Esko Juhani Kantonen, Heikki Johannes Sipilä
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Patent number: 7440542Abstract: A method and a measuring arrangement are disclosed for nondestructive analysis of an examination object. In at least one embodiment of the method, x-radiation having a specific energy spectrum is generated by an x-ray source, with the aid of at least one x-ray/optical grating in the beam path of the x-radiation there is generated a standing wave field of this x-radiation that is positioned at least partially in the examination object, and the radiation excited by the x-ray standing wave field in the examination object is measured as a function of at least one relative position between the examination object and the x-ray standing wave field. Further, a material distribution in the examination object is inferred from the measurement result of the radiation excited by the x-ray standing wave field.Type: GrantFiled: January 31, 2007Date of Patent: October 21, 2008Assignee: Siemens AktiengesellschaftInventors: Joachim Baumann, Martin Engelhardt, Jörg Freudenberger, Eckhard Hempel, Martin Hoheisel, Thomas Mertelmeier, Stefan Popescu, Manfred Schuster
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Patent number: 7436926Abstract: A sample sealing vessel 8 includes a plurality of wall faces comprising a material for transmitting X-ray, an X-ray source 1 is arranged at a wall face 11 to irradiate primary X-ray, a face 12 different from the face irradiated with the primary X-ray is arranged to be opposed to an X-ray detector 10, and the primary X-ray from the X-ray source 1 is arranged to be able to irradiate the wall face 12 of the sample sealing vessel to which the X-ray detector 10 is opposed.Type: GrantFiled: May 3, 2007Date of Patent: October 14, 2008Assignee: SII Nano Technology Inc.Inventors: Yoshiki Matoba, Takayuki Fukai, Masanori Takahashi, Yutaka Ikku
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Patent number: 7433537Abstract: An original image data representing an image read out from an original is removed with noise of a predetermined periodic pattern, if any, and storage image data is generated. The storage image data is stored in an image memory and is subjected to an enlargement/reduction processing and output image data is generated. An image is reproduced on the basis of the output image data.Type: GrantFiled: June 14, 2002Date of Patent: October 7, 2008Assignee: FUJIFILM CorporationInventor: Ryoji Sasada
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Patent number: 7432501Abstract: An ionising particle analyser comprises a source of ionising particles, a charged particle detector, and an ionisable gas located between the source and the detector. The analyser further comprises a charged particle impeding device located between the source and the detector. The charged particle impeding device is arranged to be maintained in a first configuration at a potential to impede the passage of charged particles and pass uncharged particles.Type: GrantFiled: August 27, 2004Date of Patent: October 7, 2008Assignee: Council for the Central Laboratory of the Research CouncilsInventors: James Edmond Bateman, Gareth Derbyshire
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Patent number: 7430273Abstract: An analytical instrument is disclosed having both XRF and spark emission spectroscopy capabilities. In a particularly advantageous embodiment, a field portable XRF device is removably coupled to the instrument by means of a docking station. A first surface of the sample is irradiated with an X-ray beam, and the X-ray radiation fluorescently emitted from the sample is detected and analyzed to acquire elemental composition data. The instrument is further provided with a spark source located proximal a second surface of the sample and a detector for sensing the radiation emitted from the spark-excited material. The combined instrument enables the acquisition of complementary elemental composition data by XRF and spark emission spectroscopy without having to transport a sample between separate instruments.Type: GrantFiled: February 23, 2007Date of Patent: September 30, 2008Assignee: Thermo Fisher Scientific Inc.Inventor: Ravisekhar Yellepeddi
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Patent number: 7430274Abstract: An XRF system, preferably handheld, includes an X-ray source for directing X-rays to a sample, a detector responsive to X-rays emitted by the sample, and a filter assembly with multiple filter materials located between the X-ray source and the detector. An analyzer is responsive to detector and is configured to analyze the intensities of X-rays irradiated by the sample at one power setting and to choose a filter material which suppresses certain intensities with respect to other intensities. A device, controlled by the analyzer, automatically moves the filter assembly to the chosen filter material and then the analyzer increases the power setting to analyze certain non-suppressed intensities.Type: GrantFiled: February 27, 2007Date of Patent: September 30, 2008Assignee: Innov-X-Systems, Inc.Inventors: Brendan Connors, Brad Hubbard-Nelson, Don Sackett
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Patent number: 7428293Abstract: There is provided a fluorescent X-ray analysis apparatus in which a detection lower limit has been improved by reducing an X-ray generating subsidiarily and detected. The fluorescent X-ray analysis apparatus is one which possesses an X-ray source irradiating a primary X-ray, and a detector in which a collimator having a through-hole in its center part has been placed in a front face, and in which, by the detector, there is detected a primary fluorescent X-ray which generates from a sample by irradiating the primary X-ray to a sample, and passes through the through-hole of the collimator.Type: GrantFiled: March 28, 2007Date of Patent: September 23, 2008Assignee: SII Nanotechnology Inc.Inventors: Takayuki Fukai, Yoshiki Matoba
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Publication number: 20080226025Abstract: The invention relates to a method and a device for determining the distribution of an X-ray fluorescence (XRF) marker (16) in a body volume (14). The body volume (14) is irradiated with a beam of rays (12) from an X-ray source (10) with a first ray component with a quantum energy just above and a second ray component with a quantum energy just below the K-edge of the XRF marker (16). Secondary radiation emitted from the body volume (14) is detected in a location-resolved way by a detector (30). To separate the X-ray fluorescence components in the secondary radiation from background radiation, the body volume is irradiated for a second time with a beam of rays from which the first ray component has been substantially removed by a filter (22) made from the material of the XRF marker.Type: ApplicationFiled: February 11, 2005Publication date: September 18, 2008Applicant: KONINKLIJKE PHILIPS ELECTRONIC, N.V.Inventors: Geoffrey Harding, Gerhard Martens, Hans Barschdorf, Bernd Schweizer
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Patent number: 7424092Abstract: An apparatus and method for accurately analyzing transition metal such as iron and copper contained as impurities in a hafnium-containing film on a semiconductor substrate, which is a sample, is provided. Ir-L? rays selected and split by a monochromator from X rays generated from an X-ray tube having an anode containing iridium, is applied to the sample so as to totally reflect on a hafnium film of the sample, and the fluorescent X rays generated in a direction other than the total reflection direction are detected by a detector. This makes it possible not only to detect Fe—K? rays, but also to suppress generation of Hf-L? rays which interferes with detection of Cu—K rays, and to shift the upper limit energy of the Raman scattering to be small so as to cancel overlapping with Cu—K rays.Type: GrantFiled: April 17, 2006Date of Patent: September 9, 2008Assignee: Technos Co., ltd.Inventor: Shinichi Terada
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Patent number: 7424093Abstract: To provide a fluorescent X-ray analysis apparatus, whereby a peak-back ratio is improved by effectively exciting a focused element and a detection limit of the focused element is improved by decreasing a scattered X-ray to be a background. A sample housing has one or more wall surfaces made of a material through which an X-ray transmits and an X-ray source is arranged so that a primary X-ray is irradiated on the wall surface. In addition, the sample housing is arranged so that a wall surface different from a wall surface on which the primary X-ray is irradiated is opposed to an X-ray detector incident window. Further, the primary X-ray from the X-ray source is arranged so as to be able to irradiate the wall surface of the sample housing to which the X-ray detector incident window is opposed. The sample housing has a shape extending in response to extension of a viewing filed that a detection element in the X-ray detector is seen from the X-ray detector incident window.Type: GrantFiled: May 24, 2007Date of Patent: September 9, 2008Assignee: SII NanoTechnology Inc.Inventors: Takayuki Fukai, Yoshiki Matoba, Masanori Takahashi
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Publication number: 20080205591Abstract: A storage unit stores data of a blood vessel image, a first mask image, and a second mask image of an object, an imaging unit which images a fluoroscopic image for the object. A subtraction unit subtracts the first mask image from the fluoroscopic image and generates data of a subtraction image. A calculating unit calculates anatomical displacement amount between the first mask image and the second mask image. A display unit displays the blood vessel image and the subtraction image so as to be superimposed each other by positioning the blood vessel image and the subtraction image to be fitted together on the basis of the calculated displacement amount.Type: ApplicationFiled: February 27, 2008Publication date: August 28, 2008Inventor: Masahiro OZAWA
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Patent number: 7416462Abstract: To reuse glass used in a flat panel display, processing suitable for global environment such as processing of separating a lead component must be realized. A disassembly processing method for a flat panel display having a structure in which a face plate and rear plate mainly containing glass are airtightly joined via a frame with frit glass is characterized by including the step of separating the face plate and rear plate joined with the frit glass. The separation step is characterized by separating the face plate and rear plate by cutting, dissolution, or melting.Type: GrantFiled: January 3, 2005Date of Patent: August 26, 2008Assignee: Canon Kabushiki KaishaInventors: Takashi Noma, Toyoko Kobayashi, Taiko Motoi, Hiromitsu Takase, Naoko Miura, Shin Kobayashi
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Publication number: 20080192888Abstract: In a fluorescent X-ray analysis method, a sample (1) is set on a sample stage (2) on an upper side of an X-ray irradiation chamber (7) and a sample cover (6) is closed from the upper part of the sample (1) to surround the sample (1), and then, a lower plane of the sample (1) is irradiated with X-ray for analysis. When the sample (1) is set on the sample stage (2) and the sample cover (6) is closed, a cover detecting means (8) detects that the sample cover (6) is closed and X-ray is automatically projected from an X-ray source (3) to start analysis.Type: ApplicationFiled: April 25, 2005Publication date: August 14, 2008Inventors: Hiroshi Iwamoto, Yoshiyuki Tani, Takao Hisazumi, Yukihiro Iwata, Etsuyoshi Sakaguchi
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Patent number: 7412131Abstract: An optic device, system and method for making are described. The optic device includes a first solid phase layer having a first index of refraction with a first photon transmission property and a second solid phase layer having a second index of refraction with a second photon transmission property. The first and second layers are conformal to each other. The optic device may be fabricated by vapor depositing a first layer and then vapor depositing a second layer thereupon. The first layer may be deposited onto a blank or substrate. The blank or substrate may be rotated during deposition. Further, a computer-controlled shutter may be used to alter the deposition rate of material along an axis of the optic device. Alternatively, the optic device may be moved at varying speeds through a vapor stream to alter the deposition rate of material.Type: GrantFiled: January 2, 2007Date of Patent: August 12, 2008Assignee: General Electric CompanyInventors: Susanne Madeline Lee, Forrest Frank Hopkins
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Publication number: 20080187835Abstract: A method for examining a negative electrode of a non-aqueous electrolyte secondary battery includes irradiating an active material layer including silicon or a silicon compound having a known composition, which is capable of electrochemically absorbing and releasing lithium ions on a current collector made of a metal including at least any one of copper, nickel, titanium and iron, with an X-ray; and measuring an attenuation amount of any one of a CuK? ray, a NiK? ray, a TiK? ray, and a FeK? ray, which is a fluorescent X-ray of the metal included in the current collector in fluorescent X-rays generated from the active material layer.Type: ApplicationFiled: February 1, 2008Publication date: August 7, 2008Inventors: Hideharu TAKEZAWA, Takayuki Shirane, Shinya Fujimura, Sadayuki Okazaki, Kazuyoshi Honda
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Patent number: 7409037Abstract: An X-ray fluorescence analyzer has a structure that defines a chamber (102). There is a window (103) to the chamber in a surface that is to come next to a sample (101) outside the chamber. The window (103) comprises a foil that is permeable to X-rays. A detector (104) receives fluorescent X-rays through said window (103). A low pressure source (508) is coupled to the chamber (102) and configured to controllably lower the pressure of a gaseous medium in the chamber (102) to a pressure value between 760 torr and 10 torr. The X-ray fluorescence analyzer maintains a lowered pressure of a value between 760 torr and 10 torr in the chamber (102) for the duration of an X-ray fluorescence measurement.Type: GrantFiled: May 5, 2006Date of Patent: August 5, 2008Assignee: Oxford Instruments Analytical OyInventors: Erkki Tapani Puusaari, Hannu Rintamäki
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Publication number: 20080152078Abstract: Alpha and X radiation source, PIXE-XRF analysis device using this source, and method for making the source. The source according to the invention comprises a support (2), consisting of a chemical element for which the atomic number is less than 10 or of a plurality of chemical elements each having an atomic number less than 10, which support is covered with a layer (4) of noble metal, having a thickness less than 0.2 ?m, and on which a layer of a material selected from actinides is deposited. According to the method, the layer of the material is formed by electrochemical deposition, from an organic electrolyte based on dimethyl formamide and containing ions of the material.Type: ApplicationFiled: May 3, 2006Publication date: June 26, 2008Applicant: ISTITUTO NAZIONALE DI FISICA NUCLEAREInventors: Jacques De Sanoit, Giuseppe Pappalardo, Carmelo Marchetta
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Patent number: 7386337Abstract: Methods for correcting a bone density value for an effect of lead are disclosed. One method includes determining an apparent bone density in a patient; applying a correction factor to the apparent bone density, the correction factor being based on a blood lead level; and deriving a corrected bone density value for the patient.Type: GrantFiled: May 2, 2003Date of Patent: June 10, 2008Assignee: University of RochesterInventor: J. Edward Puzas
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Patent number: 7382855Abstract: It is possible to solve the problem of the conventional fluorescent X-ray analysis that a concentration calculation result can be obtained only after elapse of a time set as a measurement time. In the fluorescent X-ray analysis method and fluorescent X-ray analysis device according to the present invention, a sample measurement condition is set before starting the measurement and the measurement concentration of the element contained in the sample and the measurement accuracy are calculated. When the measurement accuracy has become a value satisfying the predetermined measurement condition, the measurement is terminated and the concentration at that moment is outputted.Type: GrantFiled: April 27, 2005Date of Patent: June 3, 2008Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Yoshiyuki Tani, Hiroshi Iwamoto, Takao Hisazumi, Yukihiro Iwata, Etsuyoshi Sakaguchi
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Patent number: 7375327Abstract: A method and device to accurately obtain very small quantity of wear of the order of nanometers of a protective film on the surface of a sliding member. A quantity of wear on the surface of a measurement sample including a base and a coating layer is measured by making a spectrum of the surface elements in a reference sample using a surface-element analysis device which analyzes elements on the surface of a substance from an energy spectrum of charged particles obtained by applying excited ionization radiation on the reference sample equivalent to the measurement and by measuring charged particles generated from the surface of the substance. A step of obtaining signal intensity ratios of plural elements from the spectrum is repeated a plurality of times while the surface of the reference sample is being etched and calibration curves which indicate a distribution of the signal intensity ratios of the plural elements in the reference sample are made.Type: GrantFiled: November 7, 2005Date of Patent: May 20, 2008Assignee: Kabushiki Kaisha ToshibaInventors: Masahiko Yoshiki, Makoto Kato
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Patent number: 7375359Abstract: An instrument and method for measuring the elemental composition of a test material. The instrument has a source of penetrating radiation for irradiating an irradiated region of the test material, a detector for detecting fluorescence emission by the test material and for generating a detector signal, and a controller for converting the detector signal into a spectrum characterizing the composition of the test material. A platen of attenuating material extends outward from adjacent to, and surrounding, the irradiated surface of the test material. In certain embodiments, the thickness of the attenuating platen is tapered with increasing radial distance from the central irradiated region of the test material.Type: GrantFiled: May 25, 2006Date of Patent: May 20, 2008Assignee: Thermo NITON Analyzers LLCInventor: Lee Grodzins
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Publication number: 20080095309Abstract: An X-ray source (101) is configured to controllably irradiate a sample (105) with incident X-rays through a sample window (104) that has a two-dimensional area. A detector (102) is configured to detect fluorescent radiation coming from the irradiated sample. A carrier (301, 401, 402, 501, 601) is essentially transparent to X-rays and disposed to spatially coincide with a substantial part of the two-dimensional area of the sample window (104). Marker material (303, 403, 602), which is responsive to X-rays by emitting fluorescent radiation, is mechanically supported by said carrier and essentially evenly distributed across at least that part of the carrier that spatially coincides with said two-dimensional area of the sample window.Type: ApplicationFiled: October 17, 2006Publication date: April 24, 2008Inventors: Erkki Tapani Puusaari, Oleg Shirokobrod
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Publication number: 20080095318Abstract: An X-ray fluorescence analyzer device comprises an X-ray source and a sample window. Between the X-ray source and the sample window there are a collimator plate with a plurality of microscopic pores and an annular plate comprising material essentially opaque to X-rays. The annular plate defines an area transparent to X-rays. The pores in said collimator plate let through collimated X-rays radiated by said X-ray source towards said sample window. The area transparent to X-rays in said annular plate spatially limits in a transverse direction a beam of X-rays radiated by said X-ray source towards said sample window.Type: ApplicationFiled: October 10, 2006Publication date: April 24, 2008Inventors: Esko Juhani Kantonen, Heikki Johannes Sipila
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Patent number: 7356114Abstract: An X-ray fluorescence spectrometer includes an X-ray source 7 for irradiating a sample 1 at a predetermined incident angle ø with primary X-rays 6, and a detecting device 9 for measuring an intensity of fluorescent X-rays 8 generated from the sample at a predetermined detection angle ? and ?, wherein with two combinations of the incident angle ø and the detection angle ? and ?, in which combinations the incident angles ø and/or the detection angles ? and ? are different from each other, each intensity of the fluorescent X-rays 8 is measured and, also, the incident angle ø and the detection angle ? and ? in each of the combination are so set that with respect to a measurement depth represented by the coating weight, at which the intensity of the fluorescent X-rays 8 attains a value equal to 99% of the uppermost limit when the coating weight of a target coating to be measured is increased, respective measurement depths in the two combinations may be a value greater than the coating weight of a coating 3.Type: GrantFiled: September 13, 2006Date of Patent: April 8, 2008Assignee: Rigaku Industrial CorporationInventors: Yoshiyuki Kataoka, Eiichi Furusawa, Hisayuki Kohno
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Patent number: 7331714Abstract: A multifunctional hard x-ray nanoprobe instrument for characterization of nanoscale materials and devices includes a scanning probe mode with a full field transmission mode. The scanning probe mode provides fluorescence spectroscopy and diffraction contrast imaging. The full field transmission mode allows two-dimensional (2-D) imaging and tomography. The nanoprobe instrument includes zone plate optics for focusing and imaging. The nanoprobe instrument includes a stage group for positioning the zone plate optics. The nanoprobe instrument includes a specimen stage group for positioning the specimen. An enhanced laser Doppler displacement meter (LDDM) system provides two-dimensional differential displacement measurement in a range of nanometer resolution between the zone-plate optics and the sample holder. A digital signal processor (DSP) implements a real-time closed-loop feedback technique for providing differential vibration control between the zone-plate optics and the sample holder.Type: GrantFiled: September 29, 2005Date of Patent: February 19, 2008Assignee: UChicago Argonne, LLCInventors: Deming Shu, Jorg M. Maser, Barry Lai, Franz Stefan Vogt, Martin V. Holt, Curt A. Preissner, Robert P. Winarski, Gregory B. Stephenson
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Publication number: 20080037706Abstract: The invention relates to a device for performing X-ray analysis. Device 1 comprises an X-ray tube 2 and at least one capillary lens 4 for focusing the X-rays in a micro-region at a location 5 for a sample for analysis. Device 1 further comprises a detector 6 for detecting X-ray fluorescence from the sample. Device 1 further comprises at least one energy-dependent filter 3 placed between the X-ray tube 2 and the capillary lens 4. The filter 3 is adapted to substantially block X-rays with an energy which is lower than a predetermined threshold value.Type: ApplicationFiled: August 8, 2006Publication date: February 14, 2008Inventors: Gustaaf Christian Simon Brons, Petronella Emerentiana Hegeman
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Patent number: 7312446Abstract: Systems and methods for process monitoring based upon X-ray emission induced by a beam of charged particles such as electrons or ions. Concept as expressed herein.Type: GrantFiled: October 8, 2003Date of Patent: December 25, 2007Assignee: Applied Materials, Israel, Ltd.Inventor: Dror Shemesh
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Patent number: 7313220Abstract: A device for realizing an online element analysis for a substance (S) that is conveyed past or flows past a measuring station is provided with a device for conveying the substance to be measured, a measuring station with an X-ray source (10), and an X-ray fluorescence detector (20) with radiation inlet. To improve the tolerance to calibration errors and a changing height of the sample surface, at least one first X-ray conductor (30) extends from the radiation inlet of the X-ray fluorescence detector in the direction of the conveying device (51).Type: GrantFiled: July 3, 2003Date of Patent: December 25, 2007Inventor: Elisabeth Katz
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Publication number: 20070286337Abstract: Disclosed is a detector array comprising a first linear array for detecting a first ray and a second ray which penetrate through a first plurality of parts of the inspected object to acquire first values and second values for the first plurality of parts, wherein the second ray is alternately emitted with the first ray; and a second linear array arranged parallel to the first linear array for detecting the first ray and the second ray which penetrate through a second plurality of parts of the inspected object to acquire third values and fourth values for the second plurality of parts, wherein the first plurality of parts is partly identical to the second plurality of parts. With the detector array, the efficiency and material discrimination accuracy can be improved in the scanning inspection of the inspected object by use of alternate dual-energy rays.Type: ApplicationFiled: April 23, 2007Publication date: December 13, 2007Inventors: Xuewu Wang, Zhiqiang Chen, Yuanjing Li, Huaqiang Zhong, Qingjun Zhang, Shuqing Zhao
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Patent number: 7298817Abstract: An x-ray fluorescence technique for detecting the level of arsenic in a sample of water or body fluid. Arsenic and lead are expected to fluoresce in a first energy band and lead is expected to also fluoresce separately in a second energy band. An excitation path directs x-rays toward the sample; a first detection path detects x-ray fluorescence of the first energy band from the sample; and a second detection path detects x-ray fluorescence of the second energy band from the sample. The level of arsenic can be obtained by analyzing the x-ray fluorescence from both detection paths, and using a constant which relates the level of lead in the second energy band to the level of lead in the first energy band. The excitation path and each detection path may each include a monochromating optic to transmit the desired x-ray energy band, e.g., a doubly curved optic.Type: GrantFiled: November 30, 2004Date of Patent: November 20, 2007Assignee: X-ray Optical Systems, Inc.Inventors: Zewu Chen, Walter M. Gibson
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Patent number: 7253901Abstract: A system for analyzing a thin film uses an energy beam, such as a laser beam, to remove a portion of a contaminant layer formed on the thin film surface. This cleaning operation removes only enough of the contaminant layer to allow analysis of the underlying thin film, thereby enhancing analysis throughput while minimizing the chances of recontamination and/or damage to the thin film. An energy beam source can be readily incorporated into a conventional thin film analysis tool, thereby minimizing total analysis system footprint. Throughput can be maximized by focusing the probe beam (or probe structure) for the analysis operation at the same location as the energy beam so that repositioning is not required after the cleaning operation. Alternatively, the probe beam (structure) and the energy beam can be directed at different locations to reduce the chances of contamination of the analysis optics.Type: GrantFiled: January 23, 2002Date of Patent: August 7, 2007Assignee: KLA-Tencor Technologies CorporationInventors: Gary R. Janik, Patrick M. Maxton
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Patent number: 7245696Abstract: An element-specific imaging technique utilizes the element-specific fluorescence X-rays that are induced by primary ionizing radiation. The fluorescence X-rays from an element of interest are then preferentially imaged onto a detector using an optical train. The preferential imaging of the optical train is achieved using a chromatic lens in a suitably configured imaging system. A zone plate is an example of such a chromatic lens; its focal length is inversely proportional to the X-ray wavelength. Enhancement of preferential imaging of a given element in the test sample can be obtained if the zone plate lens itself is made of a compound containing substantially the same element. For example, when imaging copper using the Cu La spectral line, a copper zone plate lens is used.Type: GrantFiled: May 29, 2002Date of Patent: July 17, 2007Assignee: Xradia, Inc.Inventors: Wenbing Yun, Kenneth W. Nill
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Patent number: 7245695Abstract: A method for testing a material applied to a surface of a sample includes directing an excitation beam, having a known beam-width and intensity cross-section, onto a region of the sample. An intensity of X-ray fluorescence emitted from the region responsively to the excitation beam is measured. A distribution of the material within the region is estimated, responsively to the measured intensity of the X-ray fluorescence and to the intensity cross-section of the excitation beam, with a spatial resolution that is finer than the beam-width.Type: GrantFiled: April 11, 2005Date of Patent: July 17, 2007Assignee: Jordan Valley Applied Radiation Ltd.Inventors: Isaac Mazor, Alex Dikopoltsev, Boris Yokhin, Tzachi Rafaeli, Alex Tokar
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Patent number: 7233643Abstract: A measurement apparatus and method are provided for determining the material composition of a sample. An X-ray fluorescence detector (412) detects fluorescent X-rays coming from said sample under irradiation with incident X-rays. A laser source (301) is adapted to produce a laser beam. Focusing optics (302) focus said laser beam into a focal spot on a surface of said sample. An optical sensor (312) detects optical emissions coming from particles of said sample upon being exposed to said laser beam at said focal spot. A gas administration subsystem (104, 105, 106, 107, 108) is adapted to controllably deliver gas to a space (101) around said focal spot.Type: GrantFiled: May 20, 2005Date of Patent: June 19, 2007Assignee: Oxford Instruments Analytical OyInventors: Heikki Johannes Sipilä, Tero Eklin, Kai Kuparinen
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Patent number: 7218704Abstract: An inspection system based upon an enclosed conveyance such as a van, capable of road travel, for inspecting persons or objects. The conveyance is characterized by an enclosing body, or skin. A source of penetrating radiation and a spatial modulator for forming the penetrating radiation into a beam, both contained entirely within the body of the enclosed conveyance, irradiate the person or object with a time-variable scanning profile. A detector module generates a scatter signal based on the scatter of penetrating radiation. A proximity sensor may be employed to generate a relative motion signal based on a relative disposition of the conveyance and the inspected object. An image is formed of the contents of the object based in part on the scatter signal and the relative motion signal. A detector, which may be separate or part of the scatter detector module, may exhibit sensitivity to decay products of radioactive material.Type: GrantFiled: September 29, 2005Date of Patent: May 15, 2007Assignee: American Science and Engineering, Inc.Inventors: William L. Adams, Alex Chalmers, Lee Grodzins, Louis W. Perich, Peter Rothschild
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Patent number: 7202951Abstract: A system for analyzing a thin film uses an energy beam, such as a laser beam, to remove a portion of a contaminant layer formed on the thin film surface. This cleaning operation removes only enough of the contaminant layer to allow analysis of the underlying thin film, thereby enhancing analysis throughput while minimizing the chances of recontamination and/or damage to the thin film. An energy beam source can be readily incorporated into a conventional thin film analysis tool, thereby minimizing total analysis system footprint. Throughput can be maximized by focusing the probe beam (or probe structure) for the analysis operation at the same location as the energy beam so that repositioning is not required after the cleaning operation. Alternatively, the probe beam (structure) and the energy beam can be directed at different locations to reduce the chances of contamination of the analysis optics.Type: GrantFiled: October 28, 2004Date of Patent: April 10, 2007Assignee: KLA-Tencor Technologies CorporationInventors: Gary R. Janik, Patrick M. Maxton
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Patent number: 7199360Abstract: A system and method are provided to calibrate fluorescence detection of a fluorescence microscope by using a near-perfectly uniform reflector as a target in combination with temporary removal of the microscope's emission filter. Excitation light is reflected from the near-perfectly uniform reflector back into the microscope's objective optical system and transmitted to a dichroic. A small fraction of the excitation light passes though the dichroic and is measured by a CCD camera or other appropriate measurement device. By measuring the intensity of the residual excitation light at a plurality of points in the field of view, variations in illumination intensity may be determined. Using this, fluorescence detection at different points in the field of view may be readily calibrated.Type: GrantFiled: January 13, 2006Date of Patent: April 3, 2007Inventor: Jean Montagu
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Patent number: 7184515Abstract: X-ray fluorescence analysis is used to determine wear of machine parts on a component-specific basis. The individual wetted wear surfaces of the machine are provided with a signature tagant composition, and as the components wear, the amounts of each tagant in the lubricating fluid are determined by the x-ray fluorescence analysis. An analysis system tracks the amounts of the tagants in the lubricating fluid, and with information of the signature tagant composition of each wear surface, calculates wear rate information for each of the wear surfaces. This component-specific wear information is then used in scheduling maintenance and predicting failures of the machine.Type: GrantFiled: September 24, 2004Date of Patent: February 27, 2007Assignee: Battelle Memorial InstituteInventor: Bary Wilson