Pretreatment Of Coating Supply Or Source Outside Of Primary Deposition Zone Or Off Site Patents (Class 427/561)
  • Patent number: 5573817
    Abstract: A method of delivering a substance into a material mass including the steps of measuring a quantity of a carrier fluid and a material to be delivered, mixing the carrier fluid and the material to be delivered, and subjecting the mixture to a magnetic influence for increasing a permeability and effectiveness thereof by affecting the organization of the molecules of the mixture. Finally the mixture is introduced to the material mass for penetrating therein and direct, substantial absorbing of the mixture by the material mass.
    Type: Grant
    Filed: May 16, 1995
    Date of Patent: November 12, 1996
    Inventor: William C. Reed
  • Patent number: 5569349
    Abstract: Apparatus for and related methods of forming three-dimensional objects out of a building material, which is normally solid, but which is flowable when heated. In one embodiment, a support material is used to fill in portions of layers which are not to be solidified as part of the object, thus providing support to otherwise unsupported portions of other layers. Advantageously, the support material is also normally solid and flowable when heated, and has a lower melting point than the building material enabling the support material to later be removed without damaging the object. In an alternative embodiment this support material can be used to build a support such as a web support, or the like, for supporting an object surface from a second surface.
    Type: Grant
    Filed: June 5, 1995
    Date of Patent: October 29, 1996
    Assignee: 3D Systems, Inc.
    Inventors: Thomas A. Almquist, Dennis R. Smalley
  • Patent number: 5562952
    Abstract: In a plasma-CVD method and apparatus, plasma is formed from a film material gas in a process chamber and, in the plasma, a film is deposited on a substrate disposed in the process chamber. Formation of the plasma from the material gas is performed by application of an rf-power prepared by effecting an amplitude modulation on a basic rf-power having a frequency in a range from 10 MHz to 200 MHz. A modulation frequency of the amplitude modulation is in a range from 1/1000 to 1/10 of the frequency of the basic rf-power. Alternatively, the rf-power is prepared by effecting on the basic rf-power a first amplitude modulation at a frequency in a range from 1/1000 to 1/10 of the frequency of the basic rf-power, and additionally effecting a second amplitude modulation on the modulated rf-power. A modulation frequency of the second amplitude modulation is in a range from 1/100 to 100 times the modulation frequency of the first amplitude modulation.
    Type: Grant
    Filed: April 4, 1995
    Date of Patent: October 8, 1996
    Assignee: Nissin Electric Co., Ltd.
    Inventors: Takahiro Nakahigashi, Hiroshi Murakami, Satoshi Otani, Takao Tabata, Hiroshi Maeda, Hiroya Kirimura, Hajime Kuwahara
  • Patent number: 5547714
    Abstract: A process forms an amorphous carbon film over a solid, which film has physical and chemical properties similar to those of diamond. Its ancillary objects are the solid bodies so coated and the self-sustained film obtained in a subsequent stage of dissolution of said substrate. The process includes generating a highly accelerated beam of carbon-hydrogenated ions, which beam is made to impact with sufficiently high energy on the surface of the substrate. The beam is concentrated by electrostatic lenses and homogenized by a magnetic mass separator. The process forms on a solid substrate, a film with properties similar to those of diamond, such as high hardness, high chemical stability, transparency, high heat conductivity and high electric resistivity; obtainable at ambient temperature, and which is simpler than known procedures.
    Type: Grant
    Filed: April 12, 1995
    Date of Patent: August 20, 1996
    Assignee: Comision Nacional de Energia Atomica
    Inventors: Hugo A. Huck, Alberto E. Jech, Ra ul Righini
  • Patent number: 5547715
    Abstract: A multilayer structure has a selectable, (i) propagating reaction front velocity V, (ii) reaction initiation temperature attained by application of external energy and (iii) amount of energy delivered by a reaction of alternating unreacted layers of the multilayer structure. Because V is selectable and controllable, a variety of different applications for the multilayer structures are possible, including but not limited to their use as ignitors, in joining applications, in fabrication of new materials, as smart materials and in medical applications and devices. The multilayer structure has a period D, and an energy release rate constant K. Two or more alternating unreacted layers are made of different materials and separated by reacted zones. The period D is equal to a sum of the widths of each single alternating reaction layer of a particular material, and also includes a sum of reacted zone widths, t.sub.i, in the period D.
    Type: Grant
    Filed: October 13, 1995
    Date of Patent: August 20, 1996
    Assignee: The Regents of the University of California
    Inventors: Troy W. Barbee, Jr., Timothy Weihs
  • Patent number: 5540959
    Abstract: A process for preparing a coated substrate in which mist particles are created from a dilute liquid, the mist particles are contacted with a pressurized carrier gas and contacted with radio frequency energy while being heated to form a vapor, and the vapor is then deposited onto a substrate. The coated substrate is then heated to a temperature of 450 to 1,400 degrees centigrade for at least ten minutes.
    Type: Grant
    Filed: February 21, 1995
    Date of Patent: July 30, 1996
    Assignee: Howard J. Greenwald
    Inventor: Xingwu Wang
  • Patent number: 5534314
    Abstract: A process for vapor depositing an evaporant onto a substrate is provided which involves:presenting the substrate to a deposition chamber, wherein the deposition chamber has an operating pressure of from 0.001 Torr to atmospheric pressure and has coupled thereto a carrier gas stream generator and an electron beam gun capable of providing an electron beam at the operating pressure and contains an evaporant source;impinging the evaporant source with the electron beam to generate the evaporant;entraining the evaporant in the carrier gas stream; andcoating the substrate with the carrier gas stream which contains the entrained evaporant, and an apparatus for performing the process.
    Type: Grant
    Filed: August 31, 1994
    Date of Patent: July 9, 1996
    Assignee: University of Virginia Patent Foundation
    Inventors: Haydn N. G. Wadley, James F. Groves
  • Patent number: 5534311
    Abstract: Structures having a controlled three-dimensional geometry are deposited by lectrostatically focused deposition using charged particle beam and gaseous precursors, or polarizable precursors with or without a charged particle beam. At least one apertured electrode is electrically biased with respect to the substrate surface. The resulting electrostatic field and field gradient focuses the charged particle beam or polarizable gaseous precursor molecules, and controls the three-dimensional geometry of the deposited structure. By this method, an array including many deposited structures may be simultaneously deposited on a single substrate. Thus, the disclosed method provides a fact and simple way of fabricating one or more arrays of three-dimensional structures. The method is particularly useful in the fabrication of arrays of sharp-tipped, cone-shaped conductive structures, such as field emitter tips and contacts.
    Type: Grant
    Filed: May 31, 1995
    Date of Patent: July 9, 1996
    Assignee: The United States of America as represented by the Secretary of the Navy
    Inventors: Jonathan L. Shaw, Henry F. Gray
  • Patent number: 5529808
    Abstract: A glass fiber reinforced polymer which excels in mechanical properties and is suitable for use in a large-sized structural members, formed from a dispersion liquid by dispersing reinforcement glass fibers and particulate thermoplastic resin in a surfactant-containing aqueous medium in which bubbles of air are dispersed, forming a sheet-like web on a porous support plate, and applying heat and pressure to form a sheet. The reinforcement glass fibers include a silane coupling agent while the matrix resin has functional groups bonded to the silane coupling agent. The concentration of said functional groups is higher in the regions adjacent the surfaces of said reinforcement glass fibers than in regions farther removed therefrom, and said concentration progressively decreases in the direction away from said reinforcement glass fibers.
    Type: Grant
    Filed: August 15, 1994
    Date of Patent: June 25, 1996
    Assignee: Kawasaki Steel Corporation
    Inventors: Kunihiko Eguchi, Masafumi Komatsu, Seiji Hanatani, Yuichi Uchida, Tomoshige Ono, Tadahiro Wakui
  • Patent number: 5518780
    Abstract: This invention is directed to a process for providing a hard, transparent, hydrophobic film of hydrogenated boron nitride on a substrate and the film so made. The process comprises depositing the film condensation from a flux of ions generated from gaseous precursors comprising borazine, the kinetic energy of the ions being between 50 and 300 electron volts per ion. Preferably the process is plasma-enhanced chemical vapor deposition carried out in a radio frequency plasma system.
    Type: Grant
    Filed: June 16, 1994
    Date of Patent: May 21, 1996
    Assignee: Ford Motor Company
    Inventors: Michael A. Tamor, William C. Vassell
  • Patent number: 5503968
    Abstract: A method of making resin coated photographic paper which comprises providing a paper base, subjecting the paper base to a flame treatment and a corona discharge treatment, providing a polyolefin melt curtain, treating the polyolefin resin melt curtain with a mixture of ozone and air and bringing the paper base in contact with the polyolefin melt curtain to provide a uniform layer of polyolefin resin on the paper base.
    Type: Grant
    Filed: September 27, 1994
    Date of Patent: April 2, 1996
    Assignee: Eastman Kodak Company
    Inventor: Jong S. Lee
  • Patent number: 5501824
    Abstract: Apparatus for and related methods of forming three-dimensional objects out of a building material, which is normally solid but which is flowable when heated. In one embodiment a support material is used to fill in portions of layers which are not to be solidified as part of the object to provide support to otherwise unsupported portions of other layers. Advantageously, the support material is also normally solid and flowable when heated, and has a lower melting point than the building material enabling the support material to later be removed without damaging the object. In an alternative embodiment this support material can be used to build a support such as a web support, or the like, for supporting an object surface from a second surface.
    Type: Grant
    Filed: November 8, 1993
    Date of Patent: March 26, 1996
    Assignee: 3D Systems, Inc.
    Inventors: Thomas A. Almquist, Dennis R. Smalley
  • Patent number: 5494711
    Abstract: Disclosed herein is a method of preparing an InSb thin film, which comprises a step of physically sticking InSb powder onto a major surface of a substrate, and a step of depositing an InSb thin film on the major surface of the substrate provided with the as-stuck InSb powder by a method such as vacuum evaporation.
    Type: Grant
    Filed: January 11, 1994
    Date of Patent: February 27, 1996
    Assignee: Murata Manufacturing Co., Ltd.
    Inventors: Toshikazu Takeda, Yoshifumi Ogiso, Takuji Nakagawa, Atsuo Senda
  • Patent number: 5474809
    Abstract: An evaporation method is described for the deposition of various materials that comprise a plurality of elements, such as metal alloys, ceramics and certain inorganic-metallic compounds. The method involves the evaporation of a material comprising a plurality of elements through a molten pool of another material. The material which is to be evaporated is placed in a suitable evaporation means under the material which is to be used to form the molten pool. By applying heat sufficient to melt both materials, the material to be evaporated is transported through the molten pool of the other material. The materials are selected so that the material to be evaporated is preferentially evaporated with respect to the other material. This method produces a vapor stream and condensates that have compositions which closely resemble the compositions of the material from which they were deposited. Further, the condensate may be collected using the method of this invention at high rates on the order of 0.
    Type: Grant
    Filed: December 27, 1994
    Date of Patent: December 12, 1995
    Assignee: General Electric Company
    Inventors: David W. Skelly, Melvin R. Jackson
  • Patent number: 5466494
    Abstract: A thin sulfide film can be formed by simultaneously generating under different conditions a plurality of deposition materials to be deposited on a substrate, using the fact that sulfur has a higher vapor pressure. Sulfur vapors can be generated in an external vessel (6) which is located outside the vacuum deposition vessel (1). The sulfur vapors can then be introduced into the vacuum deposition vessel (1) through a vapor inlet tube (7) to form a localized atmosphere of sulfur vapors within the vacuum deposition vessel (1) in the vicinity of the substrate which is positioned on a substrate holder (4). Chemical bonding, on the substrate, of the sulfur vapors and the vapors of other deposition materials generated from other deposition sources provided in the vacuum deposition vessel (1) form a thin film of high quality with good reproducibility.
    Type: Grant
    Filed: January 29, 1993
    Date of Patent: November 14, 1995
    Assignee: Kabushiki Kaisha Komatsu Seisakusho
    Inventors: Akira Matsuno, Takashi Nire
  • Patent number: 5462899
    Abstract: A silicon oxide film is deposited on a substrate by chemical vapor deposition (CVD) using an organosilicon compound such as tetraethylorthosilicate (TEOS) and ozone as the principal reactants. The organosilicon compound gas and an ozone-oxygen gas which is relatively low in ozone concentration such as 0.1-1% are mixed in a gas mixer outside the CVD reaction chamber, and the resultant gas mixture is fed into the reaction chamber. Separately, another ozone-oxygen gas which is relatively high in ozone concentration such as 1-10% is introduced directly into the reaction chamber so as to come into contact with and mix with the aforementioned gas mixture in the vicinity of the substrate surface. The obtained silicon oxide film is good in film properties and step coverage, and the CVD operation does not suffer from deposition of reaction products in the gas feeding pipes and gas injecting nozzles.
    Type: Grant
    Filed: November 30, 1993
    Date of Patent: October 31, 1995
    Assignee: NEC Corporation
    Inventor: Yasuo Ikeda
  • Patent number: 5429730
    Abstract: According to this invention, there is provided a method of repairing a bump defect of a structure obtained by forming a predetermined pattern on a substrate, having the steps of forming a first thin film consisting of a material different from that of the substrate on the substrate around the bump defect or close to the bump defect, forming a second thin film on the bump defect and the first thin film to flatten an upper surface of the second thin film, performing simultaneous removal of the bump defect and the thin films on an upper portion of the projecting defect and around the bump defect using a charged particle beam, and performing removal of the thin films left in the step of performing simultaneous removal.
    Type: Grant
    Filed: November 2, 1993
    Date of Patent: July 4, 1995
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Hiroko Nakamura, Haruki Komano, Kazuyoshi Sugihara, Keiji Horioka, Mitsuyo Kariya, Soichi Inoue, Ichiro Mori, Katsuya Okumura, Tadahiro Takigawa, Toru Watanabe, Motosuke Miyoshi, Yuichiro Yamazaki, Haruo Okano
  • Patent number: 5415901
    Abstract: A laser ablation device for forming a thin film includes a vacuum chamber having a gas introduction port through which an oxidating gas is introduced into the chamber, and a light-transmittable section, a target holder disposed in the vacuum chamber for holding a target made of a film forming material of an oxide, an object holder confronting the target holder for holding an object on which the thin film is to be formed, a short wavelength laser which emits a first short wavelength laser light passing to the target in the vacuum chamber through the light-transmittable section from outside of the vacuum chamber, and a short wavelength laser light irradiating device for irradiating the object with a second short wavelength laser light passing into the vacuum chamber through the light-transmittable section from outside of the vacuum chamber. The second short wavelength laser light has an intensity lower than that of the first short wavelength laser light irradiating the target.
    Type: Grant
    Filed: June 1, 1993
    Date of Patent: May 16, 1995
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Kunio Tanaka, Youichi Ohnishi, Yoshikazu Yoshida, Yukio Nishikawa
  • Patent number: 5415900
    Abstract: A method of delivering a substance into a material mass including the steps of subjecting a first fluid to a magnetic influence such that the molecules of the first fluid become linearly organized and the first fluid is charged to a positive or negative polarity, introducing the first fluid into the material mass for absorption throughout its interior, subjecting a second fluid to another magnetic influence such that the molecules of the second fluid become linearly organized and the second fluid is charged to a polarity opposite that of the first fluid, and introducing the second fluid into the material mass for absorption therein, whereby the permeability of the fluids into the material mass is greatly enhanced by reason of the linear organization of the fluid molecules, and the naturally attractive forces between the oppositely charged fluids produces a rapid, complete and directed absorption of such polarized fluids throughout the interior of the material mass.
    Type: Grant
    Filed: January 12, 1994
    Date of Patent: May 16, 1995
    Inventor: William C. Reed
  • Patent number: 5411772
    Abstract: A method is provided for depositing a uniform thin film on a substrate using laser ablation of a target material in a deposition chamber. The laser beam may be pulsed and focused to strike the target along a line to produce a broad plume of ablated material expanding in a propagation direction outward from the target. The plane of the substrate deposition surface is oriented generally parallel to the propagation direction of the plume of ablated material. The deposition chamber includes a low background pressure of inert or reactive gas to facilitate lateral diffusion of ablated atoms, ions, and molecules to be deposited on the substrate surface. Particles ejected from the target material, which have trajectories generally parallel to the propagation direction of the plume, are too heavy to have significant lateral diffusion and have little chance of lodging on the deposition surface.
    Type: Grant
    Filed: January 25, 1994
    Date of Patent: May 2, 1995
    Assignee: Rockwell International Corporation
    Inventor: Jeffrey T. Cheung
  • Patent number: 5405660
    Abstract: A coating of at least 71% by weight molybdenum as applied to the steel base body of a worm or screw for a plastifier or extruder for plastic materials and synthetic resin by introducing the coating material into a laser beam and directing the thus melted coating material and the laser beam onto the surface of the worm or screw to be coated. The melt-metallurgical bond is formed between the coating without distortion or crack formation of the base body.
    Type: Grant
    Filed: October 18, 1993
    Date of Patent: April 11, 1995
    Assignee: Friedrich Theysohn GmbH
    Inventors: Werner Psiuk, Michael Reuter
  • Patent number: 5376409
    Abstract: A process and apparatus for the use of liquid-source bubbler/delivery systems for the delivery of solid source precursors employed in the growth of advanced technical materials such as the deposition of copper films in microelectronic devices.
    Type: Grant
    Filed: December 21, 1992
    Date of Patent: December 27, 1994
    Assignee: The Research Foundation of State University of New York
    Inventors: Alain E. Kaloyeros, Eric T. Eisenbraun, Bo Zheng
  • Patent number: 5374456
    Abstract: An object (30) is plasma processed by placing an electrically conducting grid (34) over all or a portion of the surface (32) of the object (30) so that the grid (34) generally follows the contours of the surface (32) but is displaced outwardly from the surface (32). Ions or electrons from a plasma surrounding the object (30) are accelerated into the surface (32) of the object (30) using as a processing driving force an electrical potential applied to the electrically conducting grid (34). The use of a contoured conducting grid (34) allows plasma processing of large, electrically nonconducting objects and objects having sharp surface features or recesses.
    Type: Grant
    Filed: December 23, 1992
    Date of Patent: December 20, 1994
    Assignee: Hughes Aircraft Company
    Inventors: Jesse N. Matossian, Robert W. Schumacher, David M. Pepper
  • Patent number: 5366764
    Abstract: This invention describes an environmentally and occupationally safer method and apparatus for coating and/or reclaiming materials in low pressure inert atmospheres. This invention is useful for coating a large number of irregularly shaped articles, such as industrial fasteners, tools and the like, with metals, semiconductor materials, composites, or alloys. The process related to this invention is also useful for coating parts in a rack or barrel type coating apparatus, as well as the continuous coating of parts which are fed through the path of material vapor streams. The processes and apparatus disclosed use sublimation techniques which allow almost unrestricted size, shape and placement of the depositing source. Heating sources serve to sublimate materials which can then be directed to the desired substrate for condensing.
    Type: Grant
    Filed: June 15, 1992
    Date of Patent: November 22, 1994
    Inventor: Mandar B. Sunthankar
  • Patent number: 5350606
    Abstract: A ferroelectric thin film consisting of a single crystal of BaTiO.sub.3 which has a perovskite structure is produced by a method comprising evaporating Ba and Ti in an atomic ratio of 1:1 from discrete evaporation sources of Ba and Ti to deposit them on a substrate in a vacuum deposition vessel while supplying a small amount of an oxygen gas to the reactor.
    Type: Grant
    Filed: June 9, 1993
    Date of Patent: September 27, 1994
    Assignees: Kanegafuchi Chemical Industry Co., Ltd., Nippon Steel Corporation, NEC Corporation, Seisan Kaihatsu Kagaku Kenkyusho
    Inventors: Toshio Takada, Takahito Terashima, Kenji Iijima, Kazunuki Yamamoto, Kazuto Hirata, Yoshichika Bando
  • Patent number: 5348604
    Abstract: An extrudable material, such as a hot melt adhesive, is applied to a substrate with simultaneous irradiation by a laser beam. The energy of the laser is absorbed by the adhesive and the substrate to cause the adhesive to spread into the fabric. When applied to a gap between two substrate sheets, the extrudable material creates a very strong bond. When one of the substrate materials is porous, the extrudable material will penetrate the thickness of the material and contact a lower layer to form a bond. The extrudable material is applied through a nozzle, and the laser beam is directed through the nozzle to be coaxial with the flow path of the extrudable material. The coaxial arrangement facilitates movement of the nozzle and beam in complicated patterns and ensures simultaneous application of the extrudable material and the laser beam.
    Type: Grant
    Filed: January 29, 1993
    Date of Patent: September 20, 1994
    Inventor: Craig A. Neff
  • Patent number: 5340604
    Abstract: This invention relates to a composite vapor deposition film composed of a plurality of elements and a method for manufacturing the same. A composite vapor deposition film is produced by having a composite of multi-component particles turned into a vapor to instantaneously evaporate the multi-component particles to an energy active vapor phase state. The composite vapor phase substance is solidified on a deposition substrate to form the vapor deposition film.
    Type: Grant
    Filed: March 22, 1991
    Date of Patent: August 23, 1994
    Inventor: Ogura Atsushi
  • Patent number: 5336529
    Abstract: Bubble-free solder stop lacquer coatings of circuitboards are obtained for high conductor runs and close spacing, in that one proceeds from a photopolymerizable low-solvent lacquer, which is heated to pouring viscosity through a heatable roll and doctor blade by means of infrared lamps and is poured onto cooled circuitboards as a lacquer curtain.
    Type: Grant
    Filed: March 9, 1993
    Date of Patent: August 9, 1994
    Assignee: Rutgerswerke Aktiengesellschaft
    Inventor: Hans J. Schafer
  • Patent number: 5320877
    Abstract: In an apparatus for forming a thin film on substrates, two substrate supporters having respective recesses therein are connected by a shaft so that the recesses oppose one another, and opposing ends of many rod-like substrates are supported on the side walls of the recesses. Then, the substrates are rotated on the side walls as the substrate supporters are revolved, and the substrates shift their positions under their own weight. In this state, deposition particles impinge against the substrates from a material source, while the rod-like substrates are stirred so that each region of the outer peripheries thereof has an equal probability of having the film deposited thereon. Thus, a uniform thin film is formed on the surface of every substrate. The numbers of recesses may be two or more. Further, a nest of substrate supporters may be used.
    Type: Grant
    Filed: October 31, 1991
    Date of Patent: June 14, 1994
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Hirokazu Nakaue, Hideo Kurokawa, Tsutomo Mitani
  • Patent number: 5320881
    Abstract: A method is provided for fabricating a thin film of ferrite material upon a variety of substrates wherein pulsed high power laser light impinges upon a target of ferrite material causing localized vaporization of the ferrite material and subsequent deposition upon a proximate substrate. The rapidity with which the target material is vaporized promotes chemical stability during ferrite film growth. Both the target and the substrate are maintained inside a vacuum chamber, and are maintained substantially within a temperature range of 550.degree.-900.degree. C. The equipment needed to practice the method is relatively inexpensive. Furthermore, the method allows for the large-scale production of high quality ferrite films with preferential magnetic texture, wherein the magnetization of the ferrite material aligns in a preferred direction in the plane of the film.
    Type: Grant
    Filed: August 4, 1992
    Date of Patent: June 14, 1994
    Assignee: Northeastern University
    Inventor: Carmine Vittoria
  • Patent number: 5320882
    Abstract: A single step method of forming a composite of ductile niobium particles within a matrix of brittle niobium aluminum is taught. The method involves completely ablating the end of a rod of a niobium aluminum intermetallic with a laser beam to form a plume of vaporous and particulate material and depositing the ablated material on a receiving surface disposed proximate the rod end being ablated. A surface composite structure is formed in a single step and has ductile particles within a brittle matrix.
    Type: Grant
    Filed: April 22, 1992
    Date of Patent: June 14, 1994
    Assignee: General Electric Company
    Inventor: Li-Chyong Chen
  • Patent number: 5318809
    Abstract: Apparatus for the deposition of a material such as diamond on a substrate by chemical vapor deposition is provided. The apparatus comprises:support shelf on which the substrate is located;a resistance heating element in the form of an elongate strip of conductive material having at least one curved section in its length; the elongate strip being positioned relative to, and spaced from, the substrate such that it presents an elongate edge to the substrate and an elongate edge away from the substrate; andmeans such as a perforated pipe for causing reaction gas for the deposition to pass across the elongate strip from one longitudinal edge to the other and then to the support shelf and the substrate located thereon.
    Type: Grant
    Filed: November 4, 1992
    Date of Patent: June 7, 1994
    Inventor: Ricardo S. Sussman
  • Patent number: 5304406
    Abstract: A process for depositing an organic thin film is disclosed, which comprises continuously conducting purification of the raw materials and deposition of the film in the same apparatus.
    Type: Grant
    Filed: August 13, 1992
    Date of Patent: April 19, 1994
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Masashi Hongo
  • Patent number: 5298759
    Abstract: Ultraviolet (UV) light from a lamp (12) or laser (38) is provided for cracking Group V and Group VI species comprising clusters (dimers and tetramers) or metal-organic molecules to form monomers (atoms). The UV radiation interacts with a molecular beam (14) of Group V and Group VI species following their generation in a source cell (16), which may be an effusion source in molecular beam epitaxy (MBE) apparatus, a thermal cracker cell in gas-source MBE apparatus, or a gas injector cell in metal-organic MBE apparatus (MOMBE). As configured, the UV light source and associated elements comprise a unit, termed herein a "photo-cracker cell" (10). The photo-cracker cell includes an elliptical reflective cavity (18), which defines two foci. The source of UV light is located along one focus and the path of the molecular beam is located along the other focus substantially parallel thereto.
    Type: Grant
    Filed: February 19, 1993
    Date of Patent: March 29, 1994
    Assignee: Hughes Aircraft Company
    Inventors: Peter D. Brewer, John A. Roth
  • Patent number: 5296257
    Abstract: In the two-sided coating of a web by feeding the web through the nip of a pair of pressing rolls onto which the coating substance is metered, the amount of the coating substance applied to each pressing roll is measured by infrared absorption and the relative coating quantities RW.sub.o onto the upper side and RW.sub.u to the underside are calculated by the relationsRW.sub.o =M2.sub.o /(M2.sub.o +M2.sub.u) andRW.sub.u =M2.sub.u /(M2.sub.o +M2.sub.u); andwhere M2.sub.o represents an infrared absorption measurement of the coating on the roll applying the coating to the upper side and M2u represents the absorption measurement of the coating on the roll applying the substance to the underside of the web.
    Type: Grant
    Filed: July 22, 1993
    Date of Patent: March 22, 1994
    Assignee: Jagenberg Aktiengesellschaft
    Inventors: Reinhard Knop, Volker Fathke
  • Patent number: 5279868
    Abstract: In the manufacture of ultrafine particles of semiconductor compound, pulse laser with high output is irradiated on an evaporation source having the same or similar composition as the above semiconductor compound to evaporate the source in a moment and the ultrafine particles of the semiconductor compound are produced utilizing the nuclear growth in inert gas. A process wherein a material for ultrafine particles is heated/evaporated by laser in inert gas and the resulting vapor is rapidly cooled by a collision with the inert gas whereby the resulting ultrafine particles of said material is sticked on a base plate and another process wherein a material for matrix is heated/evaporated by laser whereby the matrix is formed on the base plate are carried out alternately so that the ultrafine particles are homogeneously dispersed in the matrix to prepare the material wherein the ultrafine particles are dispersed.
    Type: Grant
    Filed: September 30, 1992
    Date of Patent: January 18, 1994
    Assignee: Nippon Sheet Glass Co., Ltd.
    Inventors: Shunsuke Ohtsuka, Hisao Nagata, Ken Yamashita, Tadashi Koyama, Shuhei Tanaka
  • Patent number: 5271969
    Abstract: A metal oxide ceramic composite powder has crystals of a reacted and precipitated metal oxide distributed on fine particles of a ceramic material. The metal oxide is derived from an aqueous solution of metal chloride, which in the presence of a magnetic field, forms a complex ion solution. The complex ion may comprise a proportional blend of metallic and semi-metallic elements to produce specific properties. The complex ion is reacted and precipitated with an alkaline material to deposit a high purity metal oxide on the ceramic material. Each ceramic particle thus has a uniform coating of a high purity metal oxide deposited thereon.
    Type: Grant
    Filed: May 4, 1992
    Date of Patent: December 21, 1993
    Assignee: Atsushi Ogura
    Inventor: Atsushi Ogura
  • Patent number: 5266364
    Abstract: A method and apparatus for controlling plasma generated utilizing microwaves and a magnetic field. Microwaves including right and left circularly polarized waves are generated and introduced into a processing chamber and a ratio of the right circularly polarized waves to the left circularly polarized waves is controlled to enable control of at least one of an electron temperature and a density distribution for plasma processing.
    Type: Grant
    Filed: August 15, 1991
    Date of Patent: November 30, 1993
    Assignee: Hitachi, Ltd.
    Inventors: Hitoshi Tamura, Tamotsu Shimizu
  • Patent number: 5254832
    Abstract: Ultrafine particles (9) are produced from a target 30) by laser beam evaporation. The laser beam (1) is directed to the target in such a manner that the removal of the target material takes place in the direction of movement of the laser beam. The ultrafine particles thus manufactured are preferably used for the manufacture of single or multi-component materials or moulded bodies from such materials; by coating substrates (15) with said ultrafine particles.
    Type: Grant
    Filed: January 8, 1991
    Date of Patent: October 19, 1993
    Assignee: U.S. Philips Corporation
    Inventors: Georg Gartner, Hans Lydtin
  • Patent number: 5252365
    Abstract: A method for stabilizing and lubricating elastomeric material includes depositing a first material film layer of carbide forming material by high energy level vacuum plating onto the elastomeric material to thereby stabilize free carbon atoms present in the elastomeric material. A second material film layer is deposited by high energy vacuum plating onto the first material film layer to thereby lubricate the elastomeric material.
    Type: Grant
    Filed: January 28, 1992
    Date of Patent: October 12, 1993
    Assignee: White Engineering Corporation
    Inventor: Gerald W. White
  • Patent number: 5241040
    Abstract: A method and apparatus are disclosed for conducting a physical process and a chemical reaction by exposing a material containing a volatile substance to microwave radiation where the morphology of said material will change when exposed to such radiation. The power of said radiation is adjusted over time as the morphology of the material changes to maximize the effect of the radiation in order to produce a product in a minimum amount of time that is substantially free of said volatile substance.The method and apparatus can also be used to conduct such a process or reaction with materials that do not contain a volatile material.In one embodiment a method and apparatus are disclosed for manufacturing a polyimide from a precursor in a solvent by exposing the precursor to microwave radiation in a tuneable microwave resonant cavity that is tuned during imidization to achieve critical coupling of the system. Microwave power is controlled to remove the solvent and obtain the desired level of reaction.
    Type: Grant
    Filed: July 11, 1990
    Date of Patent: August 31, 1993
    Assignee: International Business Machines Corporation
    Inventors: Jerome J. Cuomo, Jeffrey D. Gelorme, Michael Hatzakis, Jr., David A. Lewis, Jane M. Shaw, Stanley J. Whitehair
  • Patent number: 5234556
    Abstract: A method of treating a metal alkoxide solution to form metal oxide prepolymer molecules therein is characterized by irradiating the solution with light energy having a wavelength selected to break the metal-alkoxy group bond in said metal alkoxide, thereby to form the metal oxide prepolymer molecules in the solution. The prepolymer is converted into polymeric metal oxide gel. The stoichiometry of the oxide is high. A gel of carbon content below 4 atomic % can be achieved by the step of decarbonizing the gel, preferably using light to produce ozone.
    Type: Grant
    Filed: August 20, 1990
    Date of Patent: August 10, 1993
    Assignee: Hitachi, Ltd.
    Inventors: Tomoji Oishi, Ken Takahashi, Tetsuo Nakazawa, Shigeru Tanaka, Tadahiko Miyoshi
  • Patent number: 5232567
    Abstract: A mass production process for fabrication of a magneto-optic recording medium is disclosed. The process comprises alternately arranging first and second metal regions upon a target, installing isolating plates between adjacent regions, and moving a substrates over the target. When moving the substrates, a voltage is supplied to the target so that first and second metal regions alternatively deposit on the substrates in a continuous manner to form a multi-layer structure.
    Type: Grant
    Filed: December 8, 1992
    Date of Patent: August 3, 1993
    Assignee: Gold Star Co., Ltd.
    Inventors: Sung C. Shin, Jin H. Kim
  • Patent number: 5227204
    Abstract: A method is provided for fabricating a thin film of ferrite material upon a variety of substrates wherein pulsed high power laser light impinges upon a target of ferrite material causing localized vaporization of the ferrite material and subsequent deposition upon a proximate substrate. The rapidity with which the target material is vaporized promotes chemical stability during ferrite film growth. Both the target and the substrate are maintained inside a vacuum chamber, and are maintained substantially within a temperature range of 550.degree.-600.degree. C. The equipment needed to practice the method is relatively inexpensive. Furthermore, the method allows for the large-scale production of high quality ferrite films with preferential magnetic texture, wherein the magnetization of the ferrite material aligns in a preferred direction in the plane of the film.
    Type: Grant
    Filed: August 27, 1991
    Date of Patent: July 13, 1993
    Assignee: Northeastern University
    Inventor: Carmine Vittoria
  • Patent number: 5225140
    Abstract: An apparatus for and a method of manufacturing a fiber reinforced thermoplastic sheet-shaped molding including a pre-impregnating process and a final impregnating process. A sheet of thermoplastic resin and a web of reinforcement fibers are supplied through the pre-impregnating process during which the thermoplastic resin is sucked under the influence of a suction force so as to partially penetrate into interstices in the reinforcement fiber web while both are transported around and by a perforated rotary drum, thereby to form a first preformed sheet. The first preformed sheet is subsequently supplied to the final impregnating process during which an impregnating machine is employed. As the first preformed sheet is passed through the impregnating machine while compressed inwardly and heated, the thermoplastic resin is allowed to completely penetrate into the interstices in the reinforcement fiber web to complete the fiber reinforced thermoplastic sheet-shaped molding upon cooling thereof.
    Type: Grant
    Filed: March 29, 1991
    Date of Patent: July 6, 1993
    Assignee: Kuraray Co., Ltd.
    Inventors: Noriaki Hayashikoshi, Masahiko Nishimori, Hisanobu Hori, Toshinori Ishii, Isao Ohnishi
  • Patent number: 5225396
    Abstract: A method for forming an oxide superconducting film is disclosed. A substrate member comprising an oxygen ion conductor and a material provided thereon having oxygen permeability and good fitting of lattice constant to the oxide superconducting film is prepared, and then an oxide superconducting film is formed on the substrate member. During the formation of the superconducting film, electric current is made to flow through the substrate member, whereby oxygen is supplied to the superconducting film.
    Type: Grant
    Filed: July 24, 1991
    Date of Patent: July 6, 1993
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Hisashi Ohtani
  • Patent number: 5225252
    Abstract: A glass vacuum flask coating method comprising a step to put a metal material in the gap between an inner flask and an outer flask before said inner and outer flasks being formed into a blank for a glass vacuum flask, after the process of exhausting and tipping-off said metal material being heated by a magnetic field generated from an inductance coil into a metal vapor inside said gap, permitting said metal vapor to be adhered to the glass surface inside said gap, forming into a metal reflecting film thereon.
    Type: Grant
    Filed: January 23, 1992
    Date of Patent: July 6, 1993
    Inventors: Ming-Wen Chang, Yu-Cheng Chuang
  • Patent number: 5215789
    Abstract: The subject invention comprises forming a plurality of positively charged ions of an ionizable coating material in an ion formation area. A deposition area is provided at a predetermined distance from the ion formation area. This deposition area is capable of being negatively charged for attracting the positively charged ions of the ionizable coating material. Next, the deposition area is negatively charged so that a uniform, substantially parallel flow path is formed for the ionizable coating material between the ion formation area and the negatively charged deposition area. A substrate is then positioned between the ion formation and deposition areas within the uniform, substantially parallel flow path, and preferably perpendicular to the flow path. The positively charged ions of the coating material are released from the ion formation area into the flow path, and are moved within the flow path by the attraction of the positively charged ions toward the negatively charged deposition area.
    Type: Grant
    Filed: January 6, 1992
    Date of Patent: June 1, 1993
    Assignee: Micron Technology, Inc.
    Inventor: S. Ananda Kugan
  • Patent number: 5175022
    Abstract: A metal fuel for producing power for propulsion is disclosed. The fuel is made up of a metal core, a metal barrier and an oxidizer layer. The combination of materials disclosed provides a means for melting the metal core so that it can be oxidized in an exothermic reaction to produce power. The metal fuel may also be stabilized with respect to auto-ignition by adding a binder layer. A method for producing the metal fuel is also described herein.
    Type: Grant
    Filed: July 19, 1991
    Date of Patent: December 29, 1992
    Assignee: Alliant Techsystems Inc.
    Inventors: Mark E. Stout, Gary G. Wittmer
  • Patent number: 5154791
    Abstract: A method for bonding or potting substrates by means of cationically polymerizable masses being activated before joining or potting by irradiation with visible light and curing after joining or potting of the substrates without the irradiation being continued is described as well as an apparatus for executing this method. By irradiation with light having a wavelength of from 400 to 600 nm for photo-activation of said masses, a prolonged pot life of said masses without reducing their wetting ability during pot life is obtained such that the masses are unlimitedly applicable for more than 30, preferably more than 100 sec. after exposure is finished. The apparatus according to the invention comprises a source of irradiation which exclusively emits light having a wavelength of >400 nm.
    Type: Grant
    Filed: March 22, 1990
    Date of Patent: October 13, 1992
    Assignee: Thera Patent GmbH & Co. KG Gesellschaft fur industrielle
    Inventors: Oswald Gasser, Erich Wanek, Klaus Ellrich, Rainer Guggenberger