Bump Electrode Patents (Class 438/613)
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Publication number: 20130249082Abstract: A conductive bump structure is formed on a substrate having a plurality of bonding pads and a first insulating layer thereon. The first insulating layer has a plurality of openings formed therein for exposing the bonding pads and a conductive post is formed on the bonding pads exposed through the openings. Therein, a gap is formed between the conductive post and the wall of the opening such that no contact occurs between the conductive post and the first insulating layer, thereby preventing delamination of the conductive bump structure caused by stresses concentrating on an interface of different materials as in the prior art.Type: ApplicationFiled: October 3, 2012Publication date: September 26, 2013Applicant: SILICONWARE PRECISION INDUSTRIES CO., LTD.Inventors: Feng-Lung Chien, Yi-Hung Lin, Yi-Hsin Chen
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Publication number: 20130249105Abstract: A semiconductor device has a semiconductor die and first insulating layer formed over the semiconductor die. A plurality of first micro-vias can be formed in the first insulating layer. A conductive layer is formed in the first micro-openings and over the first insulating layer. A second insulating layer is formed over the first insulating layer and conductive layer. A portion of the second insulating layer is removed to expose the conductive layer and form a plurality of second micro-openings in the second insulating layer over the conductive layer. The second micro-openings can be micro-vias, micro-via ring, or micro-via slots. Removing the portion of the second insulating layer leaves an island of the second insulating layer over the conductive layer. A bump is formed over the conductive layer. A third insulating layer is formed in the second micro-openings over the bump. The second micro-openings provide stress relief.Type: ApplicationFiled: March 21, 2012Publication date: September 26, 2013Applicant: STATS CHIPPAC, LTD.Inventors: Yaojian Lin, Kang Chen
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Publication number: 20130252383Abstract: A fabrication method of a wafer level semiconductor package includes: forming on a carrier a first dielectric layer having first openings exposing portions of the carrier; forming a circuit layer on the first dielectric layer, a portion of the circuit layer being formed in the first openings; forming on the first dielectric layer and the circuit layer a second dielectric layer having second openings exposing portions of the circuit layer; forming conductive bumps in the second openings; mounting a semiconductor component on the conductive bumps; forming an encapsulant for encapsulating the semiconductor component; and removing the carrier to expose the circuit layer. By detecting the yield rate of the circuit layer before mounting the semiconductor component, the invention avoids discarding good semiconductor components together with packages as occurs in the prior art, thereby saving the fabrication cost and improving the product yield.Type: ApplicationFiled: September 27, 2012Publication date: September 26, 2013Applicant: SILICONWARE PRECISION INDUSTRIES CO., LTD.Inventor: Lu-Yi Chen
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Publication number: 20130252414Abstract: A system, method, and computer program product are provided for affixing a post to a substrate pad. In use, a post is affixed to each of one or more pads of a substrate, where each post receives a ball of a package during an assembly process.Type: ApplicationFiled: March 22, 2012Publication date: September 26, 2013Applicant: NVIDIA CORPORATIONInventors: Leilei Zhang, Abraham F. Yee, Shantanu Kalchuri, Zuhair Bokharey
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Patent number: 8541299Abstract: An electrical interconnect forming method. The electrical interconnect includes a first substrate comprising a first electrically conductive pad, a second substrate comprising a second electrically conductive pad, and an interconnect structure electrically and mechanically connecting the first electrically conductive pad to the second electrically conductive pad. The interconnect structure comprises a non-solder metallic core structure, a first solder structure, and a second solder structure. The first solder structure electrically and mechanically connects a first portion of the non-solder metallic core structure to the first electrically conductive pad. The second solder structure electrically and mechanically connects a second portion of the non-solder metallic core structure to the second electrically conductive pad.Type: GrantFiled: May 26, 2010Date of Patent: September 24, 2013Assignee: Ultratech, Inc.Inventors: Stephen Leslie Buchwalter, Bruce K. Furman, Peter A. Gruber, Jae-Woong Nah, Da-Yuan Shih
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Patent number: 8541890Abstract: A semiconductor die package is disclosed. In one embodiment, the semiconductor die package has a substrate. It includes (i) a lead frame structure including a die attach region with a die attach surface and a lead having a lead surface, and (ii) a molding material. The die attach surface and the lead surface are exposed through the molding material. A semiconductor die is on the die attach region, and the semiconductor die is electrically coupled to the lead.Type: GrantFiled: July 12, 2005Date of Patent: September 24, 2013Assignee: Fairchild Semiconductor CorporationInventor: Rajeev Joshi
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Publication number: 20130244384Abstract: A semiconductor device includes a substrate having a first side and a second side, the second side having a mounting location for at least one semiconductor element, and the first side having a plurality of locations electrically connected to locations on the second side. A plurality of electrically conductive interconnects are provided at the locations, each having a first end attached at the location and a second end spaced from the substrate, and an encapsulant partially encapsulates the plurality of interconnects and has a surface lying in a first plane. The second ends are located on the side of the first plane opposite from the substrate first side, an annular space in the encapsulant surrounds each of the plurality of electrically conductive interconnects, and the annular space has a bottom located between the first plane and the substrate first side. Also a method for making such a semiconductor device.Type: ApplicationFiled: May 9, 2013Publication date: September 19, 2013Applicant: QUALCOMM IncorporatedInventors: Mark Wendell Schwarz, Jianwen Xu
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Publication number: 20130244417Abstract: A template wafer fabrication process is disclosed for high density indium bumping of microchips by using an innovative template wafer upon which the bumps are initially fabricated. Once fabricated, these bumps are transferred to the microchip, after which can be hybridized to another microchip. Such a template wafer is reusable, and thus provides an economical way to fabricate indium bumps. Reusability also eliminates nonuniformities in bump shape and size in serial processing of separate microchips, which is not the case for other indium bump fabrication processes. Such a fabrication process provides a way to form relatively tall indium bumps and accomplishes this without the standard thick photoresist liftoff process. The described process can be suitable for bump pitches under 10 microns, and is only limited by the resolution of the photolithography equipment used.Type: ApplicationFiled: April 30, 2013Publication date: September 19, 2013Applicant: UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETARY OF THE ARMYInventor: UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETARY OF THE ARMY
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Publication number: 20130241054Abstract: In a semiconductor apparatus, a plurality of semiconductor chips including through-silicon vias are stacked in a vertical direction, wherein the through-silicon via formed in each semiconductor chip protrudes beyond heights of each semiconductor chip.Type: ApplicationFiled: September 5, 2012Publication date: September 19, 2013Applicant: SK hynix Inc.Inventors: Chul KIM, Jong Chern LEE
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Publication number: 20130240883Abstract: A system and method for testing electrical connections is provided. In an embodiment one or more floating pads may be manufactured in electrical connection with an underbump metallization structure. A test may then be performed to measure the electrical characteristics of the underbump metallization structure through the floating pad in order to test for defects. Alternatively, a conductive connection may be formed on the underbump metallization and the test may be performed on the conductive connection and the underbump metallization together.Type: ApplicationFiled: March 16, 2012Publication date: September 19, 2013Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Jie Chen, Hsien-Wei Chen, Tsung-Yuan Yu, Ying-Ju Chen
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Publication number: 20130234315Abstract: Structures and methods for detecting solder wetting of pedestal sidewalls. The structure includes a semiconductor wafer having an array of integrated circuit chips, each of the integrated circuit chips having an array of chip pedestals having respective chip solder columns on top of the chip pedestals, the pedestals spaced apart a first distance in a first direction and a spaced apart second distance in second direction perpendicular to the first direction; and at least one monitor structure disposed in different regions of the wafer from the integrated circuit chips, the monitor structure comprising at least a first pedestal and a first solder column on a top surface of the first pedestal and a second pedestal and a second solder column on a top surface of the second pedestal, the first and the second pedestals spaced apart a third distance, the third distance less than the first and the second distances.Type: ApplicationFiled: March 8, 2012Publication date: September 12, 2013Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Timothy H. Daubenspeck, Jeffrey P. Gambino, Christopher D. Muzzy, Wolfgang Sauter, Timothy D. Sullivan
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Publication number: 20130237049Abstract: A method of fabricating a package substrate including preparing a substrate having at least one conductive pad, forming an insulating layer having an opening to expose the conductive pad on the substrate, forming a separation barrier layer on the conductive pad inside the opening to be higher than the upper surface of the insulating layer along the side walls thereof, forming a post terminal on the separation barrier layer, and forming a solder bump on the post terminal.Type: ApplicationFiled: April 19, 2013Publication date: September 12, 2013Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.Inventors: Dong Gyu Lee, Dae Young Lee, Tae Joon Chung, Seon Jae Mun, Jin Won Choi
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Publication number: 20130234316Abstract: The invention provides a semiconductor chip structure having at least one aluminum pad structure and a polyimide buffering layer under the aluminum pad structure, wherein the polyimide buffering layer is self-aligned to the aluminum pad structure, and a method of forming the same. The method includes forming a polyimide buffering layer on a substrate, forming an aluminum pad structure on the buffering layer, and, using the aluminum pad structure as a mask, etching the substrate to remove the polyimide buffering layer from the substrate everywhere except under the aluminum pad structure.Type: ApplicationFiled: March 9, 2012Publication date: September 12, 2013Applicant: International Business Machines CorporationInventors: Timothy H. Daubenspeck, Jeffrey P. Gambino, Christopher D. Muzzy, Wolfgang Sauter, Timothy D. Sullivan
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Publication number: 20130234305Abstract: A transmission line structure for semiconductor RF and wireless circuits, and method for forming the same. The transmission line structure includes embodiments having a first die including a first substrate, a first insulating layer, and a ground plane, and a second die including a second substrate, a second insulating layer, and a signal transmission line. The second die may be positioned above and spaced apart from the first die. An underfill is disposed between the ground plane of the first die and the signal transmission line of the second die. Collectively, the ground plane and transmission line of the first and second die and underfill forms a compact transmission line structure. In some embodiments, the transmission line structure may be used for microwave applications.Type: ApplicationFiled: March 9, 2012Publication date: September 12, 2013Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Yu-Ling LIN, Hsiao-Tsung YEN, Feng Wei KUO, Ho-Hsiang CHEN, Chin-Wei KUO
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Patent number: 8530346Abstract: An electronic device can include an interconnect level including a bonding pad region. An insulating layer can overlie the interconnect level and include an opening over the bonding pad region. In one embodiment, a conductive stud can lie within the opening and can be substantially encapsulated. In another embodiment, the electronic device can include a barrier layer lying along a side and a bottom of the opening and a conductive stud lying within the opening. The conductive stud can substantially fill the opening. A majority of the conductive stud can lie within the opening. In still another embodiment, a process for forming an electronic device can include forming a conductive stud within the opening wherein from a top view, the conductive stud lies substantially completely within the opening. The process can also include forming a second barrier layer overlying the conductive stud.Type: GrantFiled: October 11, 2010Date of Patent: September 10, 2013Assignee: Freescale Semiconductor, Inc.Inventors: Lakshmi N. Ramanathan, Tien Yu T. Lee, Jinbang Tang
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Patent number: 8531041Abstract: A connection contact layer (4) is disposed between semiconductor bodies (1,2). In the second semiconductor body (2), a recess is provided. A connection layer (7) on the top face extends as far as the recess, in which a metallization (10) is present that conductively connects the connection contact layer (4) to the connection layer (7) in an electrical manner. A polymer (8) or a further metallization is present in the recess.Type: GrantFiled: September 22, 2010Date of Patent: September 10, 2013Assignee: AMS AGInventor: Franz Schrank
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Patent number: 8531040Abstract: A method of fabricating a semiconductor comprises forming a plurality of stud bumps in a pattern having a geometrical shape on a surface of a substrate, the pattern defining a periphery of a bonding area on the surface of the substrate, and placing a solder material in the bonding area such that the solder material is surrounded by the stud bumps. The solder material is heated to a temperature where the solder material begins to flow within the bonding area. A bonding surface of a die is pressed onto the stud bumps with a sufficient pressure to crush the stud bumps a predetermined extent such that the solder material substantially evenly spreads between the stud bumps within the bonding area. The solder material is then solidified to form a final solder area that conforms to the geometrical shape of the pattern of stud bumps.Type: GrantFiled: March 14, 2012Date of Patent: September 10, 2013Assignee: Honeywell International Inc.Inventor: Mark Eskridge
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Patent number: 8525352Abstract: A multi-die package includes a first semiconductor die and a second semiconductor die each having an upper surface with a plurality of bond pads disposed thereon. The upper surface of the second semiconductor die may be substantially coextensive with the upper surface of the first semiconductor die and extend substantially along a plane. The multi-die package also includes a plurality of bonding wires each coupling one of the bond pads on the upper surface of the first semiconductor die to a corresponding one of the bond pads on the upper surface of the second semiconductor die. A bonding wire of the plurality of bonding wires has a kink disposed at a height above the plane, a first hump disposed between the first semiconductor die and the kink, and a second hump disposed between the second semiconductor die and the kink.Type: GrantFiled: September 8, 2011Date of Patent: September 3, 2013Assignee: Carsem (M) sdn.bhd.Inventors: Liew Siew Har, Law Wai Ling
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Patent number: 8525333Abstract: An electronic device includes the electronic element, the interposer substrate, on one surface of which the electronic element is mounted, and the interconnection substrate, on one surface of which the interposer substrate is mounted. One portion of the connection parts is an electrical connection part that electrically interconnects the interposer substrate and the interconnection substrate. The remaining portion is a dummy connection part that produces no functional deficiency even when the dummy connection part does not electrically interconnect the interposer substrate with the interconnection substrate. The dummy connection part includes at least one of the connection parts that at least partially overlap with the electronic element in a plan projection and are preferably arranged along an outer rim of the plan projection of the electronic element.Type: GrantFiled: March 17, 2009Date of Patent: September 3, 2013Assignee: Renesas Electronics CorporationInventor: Yoshifumi Kanetaka
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Patent number: 8525331Abstract: A chip design (1) comprising an external supply connection (VBAT), an internal supply connection (VDD), an integrated circuit (2) that is coupled to the internal supply connection (VDD) for voltage supply, and a fuse (3) that electrically connects the internal supply connection (VBAT) and is arranged within the chip design (1).Type: GrantFiled: November 23, 2009Date of Patent: September 3, 2013Assignee: AMS AGInventors: Karl Ilzer, Rainer Minixhofer, Mario Manninger
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Patent number: 8524595Abstract: A semiconductor structure includes a plurality of solder structures between a first substrate and a second substrate. A first encapsulation material is substantially around a first one of the solder structures and a second encapsulation material is substantially around a second one of the solder structures. The first one and the second one of the solder structures are near to each other and a gap is between the first encapsulation material and the second encapsulation material.Type: GrantFiled: November 9, 2009Date of Patent: September 3, 2013Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Mirng-Ji Lii, Hsin-Hui Lee
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Patent number: 8525335Abstract: A semiconductor construct includes a semiconductor substrate and connection pads provided on the semiconductor substrate. Some of the connection pads are connected to a common wiring and at least one of the remaining of the connection pads are connected to a wiring. The construct also includes a first columnar electrode provided to be connected to the common wiring and a second columnar electrode provided to be connected to a connection pad portion of the wiring.Type: GrantFiled: July 1, 2010Date of Patent: September 3, 2013Assignee: Teramikros, Inc.Inventors: Shinji Wakisaka, Takeshi Wakabayashi
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Patent number: 8525332Abstract: A semiconductor device includes a semiconductor substrate having a plurality of electrode pads, a protective film covering the upper surface of the semiconductor substrate and having an opening so that the electrode pad is exposed therethrough, a metal film formed on the electrode pad exposed through the opening, and a bump formed on the metal film. The metal film includes a plurality of grooves radially formed from the center thereof toward the periphery thereof.Type: GrantFiled: September 12, 2011Date of Patent: September 3, 2013Assignee: Panasonic CorporationInventor: Takeshi Matsumoto
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Publication number: 20130224946Abstract: A structure and method of forming passivated copper chip pads is described. In various embodiments, the invention describes a substrate that includes active circuitry and metal levels disposed above the substrate. A passivation layer is disposed above a last level of the metal levels. A conductive liner is disposed in the sidewalls of an opening disposed in the passivation layer, wherein the conductive liner is also disposed over an exposed surface of the last level of the metal levels.Type: ApplicationFiled: April 1, 2013Publication date: August 29, 2013Applicant: Infineon Technologies AGInventor: Infineon Technologies AG
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Patent number: 8519522Abstract: A semiconductor package includes a substrate having an upper surface and a lower surface which faces away from the upper surface, and possessing a recess which is defined on the upper surface; and a semiconductor chip mounted to the upper surface of the substrate, having one surface which faces the upper surface and the other surface which faces away from the one surface, and warped in a smile shape such that a warped edge portion of the semiconductor chip is inserted into the recess.Type: GrantFiled: October 12, 2011Date of Patent: August 27, 2013Assignee: SK Hynix Inc.Inventor: Hee Ra Roh
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Patent number: 8519470Abstract: A semiconductor chip includes a redistribution interconnect that is implemented by shorting bumps, and a semiconductor package and a system each including the semiconductor chip. The semiconductor chip includes a semiconductor substrate, a passivation film disposed on the semiconductor substrate, and a plurality of pseudo bumps disposed on the passivation film. Each pseudo bump is directly connected to adjacent pseudo bumps to form at least one redistribution interconnect.Type: GrantFiled: March 31, 2011Date of Patent: August 27, 2013Assignee: Samsung Electronics Co., LtdInventors: Sun-won Kang, Hwan-sik Lim
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Publication number: 20130214424Abstract: The invention provides a structure and a manufacturing method thereof for reducing a stress of a chip. The structure comprises a through-silicon via (TSV), a plurality of reinforcing base and a plurality of base bodies. The reinforcing bases are disposed near and around the TSV. The base bodies are disposed near and around the TSV, and the base is disposed on a side of the reinforcing base. The reinforcing base or the base body does not connected with the TSV.Type: ApplicationFiled: June 27, 2012Publication date: August 22, 2013Inventors: Nien-Yu TSAI, Hao YU, Jui-Hung CHIEN, Shih-Chien CHANG
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Publication number: 20130207259Abstract: The present invention prevents bumps on semiconductor chips from sticking to probe needles and coming off from the semiconductor chips. A wafer has effective areas where a plurality of bumps (first bumps) are formed. The bumps are formed on the side of an active surface of the semiconductor chips. The wafer further has non-effective areas where a plurality of dummy bumps are formed. Among the dummy bumps, some positioned at the outermost circumference are dummy bumps (second bumps) that are smaller than the other bumps. The dummy bumps (second bumps) intersect the inner peripheral edge of a shielding member as viewed in a plan view. The dummy bumps (second bumps) are formed over third pad electrodes. A bump-formation insulating film is removed from over the entire third pad electrodes.Type: ApplicationFiled: January 28, 2013Publication date: August 15, 2013Applicant: Renesas Electronics CorporationInventor: Renesas Electronics Corporation
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Publication number: 20130207258Abstract: A semiconductor device including a dielectric layer formed on the surface of a post-passivation interconnect (PPI) structures. A polymer layer is formed on the dielectric layer and patterned with an opening to expose a portion of the dielectric layer. The exposed portion of the dielectric layer is then removed to expose a portion of the PPI structure. A solder bump is then formed over and electrically connected to the first portion of the PPI structure.Type: ApplicationFiled: February 10, 2012Publication date: August 15, 2013Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Hsien-Wei CHEN, Yi-Wen WU
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Patent number: 8508031Abstract: An electronic device includes a wiring board; a semiconductor device arranged at an upper side of the wiring board with an electrically conductive member being arranged therebetween; a covering member arranged at an upper side of the semiconductor device; and a supporting member arranged at a lower side of the wiring board, the supporting member having a convex portion facing the wiring board, the supporting member being connected to the covering member and supporting the wiring board at the convex portion.Type: GrantFiled: October 19, 2010Date of Patent: August 13, 2013Assignee: Fujitsu LimitedInventors: Nobuyuki Hayashi, Yasuhiro Yoneda, Teru Nakanishi, Masaru Morita
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Patent number: 8501545Abstract: In a reflow process for connecting a semiconductor die and a package substrate, the temperature gradient and thus the thermally induced mechanical forces in a sensitive metallization system of the semiconductor die may be reduced during the cooling phase. To this end, one or more heating intervals may be introduced into the cooling phase, thereby efficiently reducing the temperature difference. In other cases, the central region may additionally be cooled by providing appropriate locally restricted mechanisms, such as a locally restricted gas flow and the like. Consequently, desired short overall process times may be obtain without contributing to increased yield losses when processing sophisticated metallization systems on the basis of a lead-free contact regime.Type: GrantFiled: December 8, 2010Date of Patent: August 6, 2013Assignee: GLOBALFOUNDRIES Inc.Inventors: Michael Grillberger, Matthias Lehr, Rainer Giedigkeit
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Patent number: 8501614Abstract: A method for manufacturing fine-pitch bumps comprises the steps of providing a silicon substrate; forming a titanium-containing metal layer on the silicon substrate, wherein the titanium-containing metal layer comprises a plurality of first zones and a plurality of second zones; forming a photoresist layer on the titanium-containing metal layer; patterning the photoresist layer to form a plurality of opening slots; forming a plurality of copper bumps at the opening slots, wherein each of the copper bumps comprises a first top surface and a ring surface; heating the photoresist layer to form a plurality of body portions and a plurality of removable portions; etching the photoresist layer; and removing the second zones to enable each of the first zones to form an under bump metallurgy layer having a bearing portion and an extending portion.Type: GrantFiled: March 22, 2012Date of Patent: August 6, 2013Assignee: Chipbond Technology CorporationInventors: Cheng-Hung Shih, Yung-Wei Hsieh, Shu-Chen Lin, Cheng-Fan Lin, Hua-An Dai
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Patent number: 8501615Abstract: A system and method for forming metal bumps is provided. An embodiment comprises attaching conductive material to a carrier medium and then contacting the conductive material to conductive regions of a substrate. Portions of the conductive material are then bonded to the conductive regions using a bonding process to form conductive caps on the conductive regions, and residual conductive material and the carrier medium are removed. A reflow process is used to reflow the conductive caps into conductive bumps.Type: GrantFiled: June 15, 2011Date of Patent: August 6, 2013Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ming-Da Cheng, Chih-Wei Lin, Hsiu-Jen Lin, Tzong-Hann Yang, Wen-Hsiung Lu, Zheng-Yi Lim, Yi-Wen Wu, Chung-Shi Liu
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Patent number: 8501587Abstract: Structure and methods of forming stacked semiconductor chips are described. In one embodiment, a method of forming a semiconductor chip includes forming an opening for a through substrate via from a top surface of a first substrate. The sidewalls of the opening are lined with an insulating liner and the opened filled with a conductive fill material. The first substrate is etched from an opposite bottom surface to form a protrusion, the protrusion being covered with the insulating liner. A resist layer is deposited around the protrusion to expose a portion of the insulating liner. The exposed insulating liner is etched to form a sidewall spacer along the protrusion.Type: GrantFiled: November 5, 2009Date of Patent: August 6, 2013Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ming-Fa Chen, Jao Sheng Huang
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Patent number: 8501616Abstract: A semiconductor device including a semiconductor substrate and a conductive post overlying and electrically connected to the substrate. The semiconductor device further includes a manganese-containing protection layer on a surface of the conductive post. A method of forming a semiconductor device. The method includes forming a bond pad region on a semiconductor substrate. The method further includes forming a conductive post overlying and electrically connected to the bond pad region. The method further includes forming a protection layer on a surface of the conductive post, wherein the protection layer comprises manganese (Mn).Type: GrantFiled: October 25, 2012Date of Patent: August 6, 2013Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chung-Shi Liu, Chen-Hua Yu
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Patent number: 8501613Abstract: A method includes forming an under-bump metallurgy (UBM) layer overlying a substrate, and forming a mask overlying the UBM layer. The mask covers a first portion of the UBM layer, and a second portion of the UBM layer is exposed through an opening in the mask. A metal bump is formed in the opening and on the second portion of the UBM layer. The mask is then removed. A laser removal is performed to remove a part of the first portion of the UBM layer and to form an UBM.Type: GrantFiled: July 7, 2011Date of Patent: August 6, 2013Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yi-Yang Lei, Hung-Jui Kuo, Chung-Shi Liu, Mirng-Ji Lii, Chen-Hua Yu
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Patent number: 8502377Abstract: A package substrate including a conductive pattern disposed on a die attach surface of the package substrate; at least one bumping trace inlaid into the conductive pattern; and at least one gap disposed along with the bumping trace in the conductive pattern to separate the bumping trace from a bulk portion of the conductive pattern. The bumping trace may have a lathy shape from a plan view and a width substantially between 10 ?m and 40 ?m and a length substantially between 70 ?m and 130 ?m, for example.Type: GrantFiled: May 19, 2011Date of Patent: August 6, 2013Assignee: Mediatek Inc.Inventors: Tzu-Hung Lin, Ching-Liou Huang, Thomas Matthew Gregorich
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Publication number: 20130196498Abstract: A bumping process includes providing a silicon substrate; forming a titanium-containing metal layer on silicon substrate, the titanium-containing metal layer comprises a plurality of first areas and a plurality of second areas; forming a first photoresist layer on titanium-containing metal layer; patterning the first photoresist layer to form a plurality of first opening slots; forming a plurality of copper bumps within first opening slots, said copper bump comprises a first top surface and a first ring surface; removing the first photoresist layer; forming a second photoresist layer on titanium-containing metal layer; patterning the second photoresist layer to form a plurality of second opening slots; forming a plurality of bump isolation layers at spaces, the first top surfaces and the first ring surfaces; forming a plurality of connective layers on bump isolation layers; removing the second photoresist layer, removing the second areas to form an under bump metallurgy layer.Type: ApplicationFiled: January 30, 2013Publication date: August 1, 2013Applicant: CHIPBOND TECHNOLOGY CORPORATIONInventor: CHIPBOND TECHNOLOGY CORPORATION
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Publication number: 20130193567Abstract: A method of manufacturing a lead frame, includes forming a rectangular first dimple includes, first inclined side surfaces inclined to a depth direction, and arranged in two opposing sides in one direction, and standing side surfaces standing upright to a depth direction, and arranged in two opposing sides in other direction, on a backside of a die pad by a first stamping, and forming a second dimple having second inclined side surfaces inclined on the backside of the die pad by a second stamping, such that a second inclined side surfaces of the second dimple are arranged in side areas of the standing side surfaces of the first dimple, wherein the standing side surfaces are transformed into reversed inclined side surfaces inclined to a reversed direction to the first inclined side surfaces, and a front side of the die pad is semiconductor element mounting surface.Type: ApplicationFiled: January 28, 2013Publication date: August 1, 2013Applicant: SHINKO ELECTRIC INDUSTRIES CO., LTD.Inventor: Shinko Electric Industries Co., Ltd.
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Patent number: 8497160Abstract: A solder-top enhanced semiconductor device is proposed for packaging. The solder-top device includes a device die with a top metal layer patterned into contact zones and contact enhancement zones. At least one contact zone is electrically connected to at least one contact enhancement zone. Atop each contact enhancement zone is a solder layer for an increased composite thickness thus lowered parasitic impedance. Where the top metal material can not form a uniform good electrical bond with the solder material, the device die further includes an intermediary layer sandwiched between and forming a uniform electrical bond with the top metal layer and the solder layer. A method for making the solder-top device includes lithographically patterning the top metal layer into the contact zones and the contact enhancement zones; then forming a solder layer atop each of the contact enhancement zones using a stencil process for an increased composite thickness.Type: GrantFiled: July 27, 2012Date of Patent: July 30, 2013Assignee: Alpha & Omega Semiconductor, Inc.Inventors: François Hébert, Anup Bhalla, Kai Liu, Ming Sun
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Patent number: 8497200Abstract: Method of forming a solder alloy deposit on a substrate comprising i) provide a substrate including a surface bearing electrical circuitry that includes at least one inner layer contact area, ii) form a solder mask layer on the substrate surface and patterned to expose at least one contact area, iii) contact the entire substrate area including the solder mask layer and the at least one contact area with a solution to provide a metal seed layer on the substrate surface, iv) form a structured resist layer on the metal seed layer, v) electroplate a first solder material layer containing tin onto the conductive layer, vi) electroplate a second solder material layer onto the first solder material layer, vii) remove the structured resist layer and etch away an amount of the metal seed layer sufficient to remove the metal seed layer from the solder mask layer area and reflow the substrate.Type: GrantFiled: June 23, 2011Date of Patent: July 30, 2013Assignee: Atotech Deutschland GmbHInventors: Kai-Jens Matejat, Sven Lamprecht, Ingo Ewert
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Patent number: 8492262Abstract: An assembly is obtained; it includes a substrate; a plurality of wet-able pads formed on a surface of the substrate; and a solder resist layer deposited on the surface of the substrate and having an outer surface. At least the solder resist layer is formed with recessed regions defining volumes adjacent the wet-able pads. Molten solder is directly injected into the volumes adjacent the wet-able pads, such that the volumes adjacent the wet-able pads are filled with solder. The solder is allowed to solidify. It forms a plurality of solder structures adhered to the wet-able pads. The substrate and the solder are re-heated after the solidification, to re-flow the solder into generally spherical balls extending above the outer surface of the solder resist layer. The volumes adjacent the wet-able pads are configured and dimensioned to receive sufficient solder in the injecting step such that the generally spherical balls extend above the outer surface of the solder resist layer as a result of the re-heating step.Type: GrantFiled: February 16, 2010Date of Patent: July 23, 2013Assignee: International Business Machines CorporationInventors: Peter A. Gruber, Paul A. Lauro, Jae-Woong Nah
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Patent number: 8492891Abstract: A copper pillar bump has a sidewall protection layer formed of an electrolytic metal layer. The electrolytic metal layer is an electrolytic nickel layer, an electrolytic gold layer, and electrolytic copper layer, or an electrolytic silver layer.Type: GrantFiled: April 22, 2010Date of Patent: July 23, 2013Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Wen-Hsiung Lu, Ming-Da Cheng, Chih-Wei Lin, Jacky Chang, Chung-Shi Liu, Chen-Hua Yu
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Patent number: 8492263Abstract: Protection of a solder ball joint is disclosed in which the solder ball joint is located below the surface level of the encapsulating buffer layer. The buffering layer is etched to expose one or more electrode posts, each of which may be made up of a single column or multiple columns. A top layer resulting either from a top conductive cap or a plating layer around the electrode posts also lies below the buffer layer. When the solder ball is placed onto the posts, the solder/ball joint is protected in a position below the surface of the buffer layer, while still maintaining an electrical connection between the various solder balls and their associated or capping/plating material, electrode posts, wiring layers, and circuit layers. Therefore, the entire ball joint is protected from direct stress.Type: GrantFiled: November 16, 2007Date of Patent: July 23, 2013Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chung Yu Wang, Chien-Hsiun Lee, Pei-Haw Tsao, Kuo-Chin Chang, Chung-Yi Lin, Bill Kiang
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Patent number: 8492203Abstract: A semiconductor device has a semiconductor die and encapsulant deposited over the semiconductor die. A first insulating layer is formed over the die and encapsulant. The first insulating layer is cured with multiple dwell cycles to enhance adhesion to the die and encapsulant. A first conductive layer is formed over the first insulating layer. A second insulating layer is formed over the first insulating layer and first conductive layer. The second insulating layer is cured with multiple dwell cycles to enhance adhesion to the first insulating layer and first conductive layer. A second conductive layer is formed over the second insulating layer and first conductive layer. A third insulating layer is formed over the second insulating layer and second conductive layer. The first, second, and third insulating layers have different CTE. The second insulating layer or third insulating layer is cured to a dense state to block moisture.Type: GrantFiled: June 20, 2011Date of Patent: July 23, 2013Assignee: STATS ChipPAC, Ltd.Inventors: Yaojian Lin, Kang Chen, Yu Gu, Wei Meng, Chee Siang Ong
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Patent number: 8490857Abstract: A reflow apparatus, where formic acid is used for cleaning a surface of a solder electrode on a processing target, is disclosed. The reflow apparatus includes a processing chamber, a formic acid introduction mechanism for supplying an atmosphere gas containing formic acid to the processing chamber, and a shielding member that is made of a material having corrosion resistance against formic acid. The shielding member is arranged between a reflow processing section of the processing chamber and an inner wall of the processing chamber. In place of or in addition to the shielding member, the reflow apparatus may include a heater for decomposing residual formic acid.Type: GrantFiled: March 31, 2012Date of Patent: July 23, 2013Assignee: Fujitsu Semiconductor LimitedInventors: Hiroyuki Matsui, Hirohisa Matsuki, Koki Otake
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Patent number: 8492896Abstract: A semiconductor apparatus including: a substrate 12; a plurality of electrode pads 20 formed on a surface of the substrate 12; and a protection film 14 having a plurality of through holes 16 formed in one-to-one correspondence with the electrode pads 20, and covering circumferential edge portions of the electrode pads 20 and the surface of the substrate 12 except for areas under the electrode pads 20. An inner wall of each through hole 16 is a slant surface 22 slanted toward outside of the through hole 16. A plurality of metal layers 24 have been formed, each covering an exposed part of each electrode pad 20 not covered by the protection film 14 and an area of each slant surface extending from the exposed part up to a middle of the slant surface. A plurality of bumps 18 have been connected one-to-one with the metal layers 24.Type: GrantFiled: February 25, 2011Date of Patent: July 23, 2013Assignee: Panasonic CorporationInventor: Sumiaki Nakano
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Publication number: 20130183799Abstract: Provided is a method for manufacturing a semiconductor device, which includes: preparing a semiconductor wafer; and peeling off an adhesive layer from the semiconductor wafer. The prepared semiconductor wafer includes at least one semiconductor chip having a bump electrode group formed by arraying bump electrodes in a matrix, and the adhesive layer formed on one surface having the bump electrodes. The bump electrode group is formed by arraying the bump electrodes so that the number of bump electrodes in a second direction can be smaller than that in a first direction. To peel off the adhesive layer from the semiconductor wafer, the adhesive layer is peeled off from the semiconductor wafer along the first direction from one end side of the semiconductor wafer.Type: ApplicationFiled: May 9, 2012Publication date: July 18, 2013Applicant: ELPIDA MEMORY, INC.Inventors: Jun SASAKI, Tadashi KOYANAGI
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Patent number: RE44431Abstract: A semiconductor device has a semiconductor die with a plurality of bumps formed over the die. A substrate has a plurality of conductive traces formed on the substrate. Each trace has an interconnect site for mating to the bumps. The interconnect sites have parallel edges along a length of the conductive traces under the bumps from a plan view for increasing escape routing density. The bumps have a noncollapsible portion for attaching to a contact pad on the die and fusible portion for attaching to the interconnect site. The fusible portion melts at a temperature which avoids damage to the substrate during reflow. The noncollapsible portion includes lead solder, and fusible portion includes eutectic solder. The interconnect sites have a width which is less than 1.2 times a width of the conductive trace. Alternatively, the interconnect sites have a width which is less than one-half a diameter of the bump.Type: GrantFiled: July 23, 2012Date of Patent: August 13, 2013Assignee: STATS ChipPAC, Ltd.Inventor: Rajendra D. Pendse
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Patent number: RE44500Abstract: A semiconductor device has a semiconductor die mounted to a substrate with a plurality of composite interconnects formed between interconnect sites on the substrate and bump pads on the die. The interconnect sites are part of traces formed on the substrate. The interconnect site has a width between 1.0 and 1.2 times a width of the trace. The composite interconnect is tapered. The composite interconnects have a fusible portion connected to the interconnect site and non-fusible portion connected to the bump pad. The non-fusible portion can be gold, copper, nickel, lead solder, or lead-tin alloy. The fusible portion can be tin, lead-free alloy, tin-silver alloy, tin-silver-copper alloy, tin-silver-indium alloy, eutectic solder, or other tin alloys with silver, copper, or lead. An underfill material is deposited between the semiconductor die and substrate. A finish such as Cu-OSP can be formed over the substrate.Type: GrantFiled: January 28, 2013Date of Patent: September 17, 2013Assignee: STATS ChipPAC, Ltd.Inventor: Rajendra D. Pendse