Abstract: The present invention provides a diaphragm attaching structure of an electrostatic capacity type pressure gauge which can achieve an improvement of a measuring precision by inhibiting a poor weld and a heat strain from being generated while restricting an increase of a cost with an easy manufacturing.

Abstract: A hydraulic pressure intermediary includes: a platform, which has a bowl-shaped surface having an annular, platform-surface edge region, a platform-surface central region depressed relative to the platform-surface edge region and surrounded by the platform-surface edge region, and an annular platform-surface transition region, which borders, on its inner side, the platform-surface central region and, on its outer side, the platform-surface edge region; a bowl-shaped, separating membrane having a flat, annular, separating-membrane edge region, a separating-membrane central region depressed relative to the separating-membrane edge region and an annular separating-membrane transition region, which borders, on its inner side, the separating-membrane central region and, on its outer side, the separating-membrane edge region. The separating membrane is connected with the platform-surface edge region within the separating-membrane edge region along a surrounding joint.

Abstract: Described herein is a method for integrating MEMS with submicron semiconductor electrical circuits such as CMOS to provide more complex signal processing, on-chip calibration and integration with RF technologies. A MEMS sensor is provided having an upper layer, an insulating layer into which a cavity has been formed and a handle layer. The upper layer acts as both the substrate of the semiconductor electrical circuit and as the active MEMS element. The remainder of the circuitry is fabricated either in or on the upper layer. In a preferred method of the present invention a first wafer assembly and a second wafer assembly are fabricated such that a MEMS sensor and the substrate of at least one semiconductive electrical circuit is formed.

Abstract: A gage having a motion detection mechanism magnetically attached to a pressure sensing diaphragm. The motion detection mechanism is magnetically coupled to a pointer rotation mechanism configured to indicate the position of the diaphragm and the corresponding pressure sensed by the diaphragm.

Abstract: The present invention discloses a pressure measurement device comprising: a substrate that includes at least one pressure sensing module and at least one fluid-conductive channel, wherein each channel has a first aperture and a second aperture. The substrate is flexible such that the pressure measurement device is conformably adjustable onto an object's surface. The first aperture is located on the substrate such that when the substrate is suitably adjusted onto the object's surface, the first aperture is open to the exterior of the object's surface. The pressure sensors module is operatively connected to at least one of the second apertures, such that the at least one pressure sensing module is generally being subjected to the pressure being present at the first aperture.

Abstract: A semiconductor pressure sensor comprises a silicon support substrate (1), an insulating layer (2) formed on the silicon support substrate (1), and a silicon thin plate (3) formed on the insulating layer (2). A through-hole (1a) extending in the thickness direction of the silicon support substrate (1) is formed in the silicon support substrate (1). The silicon thin plate (3) located on an extension of the through-hole (1a) functions as a diaphragm (23) that is deformed by an external pressure. The insulating layer (2) remains over the entire lower surface of the diaphragm (23). The thickness of the insulating layer (2) decreases from the peripheral portion toward the central portion of the diaphragm (23). This provides the semiconductor pressure sensor capable of reducing both the offset voltage and the variation of output voltage caused by the variation of temperature and its fabrication method.

Abstract: Described herein is the sense element assembly for a capacitive pressure sensor and method for creating same that has increased sensitivity without additional size. The sense element assembly and method includes fabricating an off-centered elliptically shaped center electrode, at least one elliptical annular-like electrode around the center electrode, a ground electrode and a method for fusing the layers together to optimize sensitivity.

Abstract: A pressure sensor is provided. The pressure sensor includes a sensing element, a case, a line element, an insect entering restriction element. The case has a space for receiving the sensing element. The case includes a pressure introduction passage, which is in communication with the space to introduce a pressure medium into the sensing element. The line element has a first portion electrically connected with the sensing element and a second portion to be electrically connected to an external element. The insect entering restriction element extends across a path on the exterior surface of the case, the path interconnecting between the second portion of the line element and the open end of pressure introduction passage.

Abstract: A vacuum measuring cell with a membrane between two planar housing parts has a first housing part forming a reference vacuum volume and the second housing part forming a measuring vacuum volume with a connection for the medium to be measured and a mechanism for measuring the membrane deflection. The membrane surface exposed to the medium to be measured is a structured surface.

Abstract: A diaphragm is provided that includes a plurality of zonal portions that define reinforced and non-reinforced areas of the diaphragm. A first zonal portion extends from a marginal edge portion toward a central portion and is formed of a fabric material. A second zonal portion extends from the first zonal portion toward the central portion and is formed of an elastomer. A third zonal portion defines the central portion and is formed of a fabric material. The combination of reinforced and non-reinforced portions provides for a decrease in the radial tension (spring rate) of the diaphragm and helps prevent undesired changes to the flow control valve flow setpoint.

Abstract: An ultra low pressure switch system for efficiently reducing switch deterioration. The ultra low pressure switch system generally includes a housing comprised of a first portion and a second portion, wherein the first portion and the second portion define a cavity between thereof, a first port fluidly connected to the housing, a diaphragm member positioned within the cavity, a first terminal positioned within the cavity, a second terminal positioned within the cavity and a spacer member positioned within the cavity and between the first terminal and the second terminal.

Abstract: A sensing apparatus for determining the pressure of a fluid includes first and second support members. The first and second support members are configured to define at least one sealed chamber. A flexible diaphragm is disposed between the first and second support members. The diaphragm includes first and second opposing surfaces. The first opposing surface is in fluid communication with a first fluid-flow circuit, and the second opposing surface is in fluid communication with a second fluid-flow circuit. A first electronic circuit is disposed within the at least one chamber and coupled to the diaphragm for sensing a first differential pressure associated with the first and second flow circuits. The first electronic circuit is configured to produce at least one electrical signal proportional to a magnitude of the first differential pressure.

Abstract: A workpiece composite includes a preform part and a gel accommodated in a recess in the preform, the recess being enclosed by at least one edge which serves as a creep barrier to prevent the gel from spreading. The at least one edge of the recess defines a termination point of at least one surface which is provided with a coating made of an oleophobic material in an area adjacent to the at least one edge.

Abstract: A sensor element having a sensitive sensor portion on an upper side of a substrate layer. The upper side of the substrate layer is provided with a recess on the periphery of the sensitive sensor portion. The recess provides mechanical isolation or decoupling of the sensitive sensor portion, as a result of which external forces do not cause stress in the sensitive sensor portion. In addition, a sensor assembly is described which is provided with at least one sensor element and a casing.

Abstract: A micromechanical pressure sensing device includes a silicon support structure, which is configured to provide a plurality of silicon support beams. The device further includes one or more diaphragms attached to and supported by the support beams, and at least one piezoresistive sensing device, which is buried in at least one of the support beams. The piezoresistive sensing device is arranged to sense a strain induced in the silicon support structure, the strain being induced by a fluid in contact with the one or more diaphragms, to determine the pressure acting on the one or more diaphragms.

Abstract: In a particular embodiment, a process transmitter includes a corrosion resistive housing including a flange portion, where the corrosion resistive housing is formed from a first material. The process transmitter also includes an outer ring formed from a second material. The outer ring has an inner diameter and is brazed to the flange portion. The process transmitter further includes a deformable diaphragm formed from a third material, the deformable diaphragm is welded to the outer ring at a weld seam between the diaphragm and the outer ring adjacent to the inner diameter to form a fluid seal.

Abstract: To provide a double-ended tuning fork type piezoelectric resonator that includes: a piezoelectric element having two arm portions disposed in parallel, a first supporting portion that support one ends of each of the arm portions, a second supporting portion that support the other ends of each of the arm portions; and an exciting electrode formed on a surface of each of the arm portions, and has a structure suitable for being built into a pressure sensor as a pressure sensitive element. A double-ended tuning fork type piezoelectric resonator includes: a piezoelectric element 3 having two arm portions 4 disposed in parallel and apart from each other, and a first supporting portion 5 and a second supporting portion 6 that respectively support one ends and the other ends of each of the arm portions; and an exciting electrode 7 formed on a surface of each arm portion.

Abstract: The invention discloses a trabecular stent and methods for treating glaucoma. The stent may incorporate an intraocular pressure sensor comprising a compressible element that is implanted inside an anterior chamber of an eye, wherein at least one external dimension of the element correlates with intraocular pressure. In some embodiments, the sensor may be coupled to the stent. Also disclosed are methods of delivery of the stent and the sensor to the eye.

Abstract: A sensor assemblage, in particular a high-pressure sensor assemblage, includes a substrate element and a connector element, the substrate element comprising a sensor structure having a pressure-sensitive diaphragm and a cavity disposed in the region of the diaphragm, the substrate element being connected to the connector element in such a way that the cavity is connected to a hollow space of the connector element, the substrate element moreover including at least one further sensor structure having a pressure-sensitive further diaphragm and a further cavity disposed in the region of the further diaphragm, the further cavity being connected to a further hollow space of the at least one connector element or of a further connector element.

Abstract: A pressure sensor comprises: a case; a detection unit attached to one end of the case; a housing member coupled with the one end of the case, the housing member including a first connection member, a second connection member, a passage and a pressure introduction hole; and a diaphragm fixed to the housing member so as to cover the detection unit, wherein the passage connects the first connection member with the second connection member, the pressure introduction hole introduces a pressure of the cooling medium to the diaphragm, and the detection unit is capable of detecting the pressure of the cooling medium.

Abstract: An apparatus for sensing pressure is provided comprising a housing, electronics, a pressure sensor and a secondary seal. The housing comprises an interior bore and a first end, with the interior bore forming an opening at the first end. The electronics may be disposed in the interior bore. The pressure sensor is mounted at the first end of the interior bore. The pressure sensor may be operatively connected to send signals to the electronics in response to external fluid pressure. The pressure sensor may, at least in part, form a primary seal at the first end of the interior bore. The secondary seal may be disposed in the interior bore in between the pressure sensor and the electronics. The secondary seal may be configured to act as a backup seal to the primary seal. The secondary seal provides an added degree of safety from high pressure pipeline contents.

Abstract: A pressure-measuring device is situated in a chamber of an internal combustion engine. The pressure-measuring device has a housing, a force-transmitting element that protrudes partly from the housing at a chamber-side opening of the housing, and a pressure sensor that is situated in an interior space of the housing. The pressure sensor stands in effective connection to the force-transmitting element. In addition, a diaphragm is provided that seals the interior space of the housing, in which the pressure sensor is situated, against the chamber-side opening. The diaphragm, which is preferably fashioned as a metal diaphragm, has a force-transmitting segment that is oriented in an axial direction of the force-transmitting element. Moreover, the pressure sensor stands in effective connection with the force-transmitting element via the force-transmitting segment of the diaphragm.

Abstract: The invention concerns a pressure sensing die to be mounted on a base, comprising: a diaphragm structure with a deflectable pressure sensing diaphragm whose deflection is representative of the pressure and sensing elements for detecting the deflection of the sensing diaphragm; a pedestal supporting the diaphragm structure; wherein the pedestal is a composite pedestal comprising top and bottom platforms connected by at least one small link having a mean cross-section smaller than the cross-section of the top platform, said small link isolating at least some of the stresses, produced by the mounting of the pressure sensing die on the base, from said deflectable pressure sensing diaphragm.

Abstract: A pressure sensor includes: a housing; a pressure receiver which seals an opening of the housing and transmits pressure from outside the housing to the inside of the housing; and a pressure sensing element having a pressure sensing portion and a pair of base portions which are respectively coupled to both ends of the pressure sensing portion. In the pressure sensor, a force detecting direction is set to be a detection axis, a line connecting the pair of base portions and a displacement direction of the pressure receiver are arranged in parallel, one of the base portions is coupled to a central region, which is displaced by the pressure, of the pressure receiver, and the other of the base portions is coupled to a marginal region, which is at a fixing side, of the pressure receiver through a connecting member.

Abstract: A cap is provided on a diaphragm, and a first end of a flexible board is connected to the cap. A cover is attached to the cap. The cover directs a second end of the flexible board in a direction away from the diaphragm held by a joint so that the flexible board is supported while being curved. Since the flexible board is not locally bent at an acute angle, a crack is not generated on a copper pattern provided on the flexible board.

Abstract: Pressure sensor unit, in particular for a vehicle brake system, including a housing (2) in which at least one sensor element (1) is arranged which includes a deformation body (6) and at least one sensor means (7) arranged on the deformation body (6) for sensing a deformation of the deformation body (6), in which case at least the part of the housing (2) which is connected to the sensor element (1) and the part of the sensor element (1) which is connected to the housing (2) are fabricated from the same plastic material or from plastic materials having identical or almost identical temperature expansion coefficients, or in that at least part of the housing (2) and part of the sensor element (1) is designed as a one-piece injection molded part made of plastics.

Abstract: A side collision detecting apparatus includes a pressure sensor disposed in a side door of a vehicle and including a diaphragm for detecting a pressure in the side door. The diaphragm has a pressure receiving surface configured to be distorted in accordance with a change in the pressure. The pressure sensor is arranged so as to satisfy one of a first condition where an angle between a line along which the pressure receiving surface extends and a horizontal line extending in a front-rear direction of the vehicle is from 60 degrees to 90 degrees and a second condition where the angle is less than 60 degrees or greater than 90 degrees and the pressure receiving surface is not vertical.

Abstract: A hydraulic pressure intermediary includes: a platform, which has a bowl-shaped surface having an annular, platform-surface edge region, a platform-surface central region depressed relative to the platform-surface edge region and surrounded by the platform-surface edge region, and an annular platform-surface transition region, which borders, on its inner side, the platform-surface central region and, on its outer side, the platform-surface edge region; a bowl-shaped, separating membrane having a flat, annular, separating-membrane edge region, a separating-membrane central region depressed relative to the separating-membrane edge region and an annular separating-membrane transition region, which borders, on its inner side, the separating-membrane central region and, on its outer side, the separating-membrane edge region. The separating membrane is connected with the platform-surface edge region within the separating-membrane edge region along a surrounding joint.

Abstract: A dry, front-flush, pressure measuring transducer, which enables reliable measurements over a large temperature range. The transducer includes: a process connection made of a stainless steel and serving for securing the pressure measuring transducer to a measuring site; and a pressure sensor module, including a holder of stainless steel, into which a metal separating diaphragm is set front-flushly by means of a purely metal connection. A pressure to be measured acts on the separating diaphragm during measurement operation. The holder is set front-flushly by means of a purely metal connection into the process connection. The pressure sensor module further includes a titanium disk which is carried by the holder. A sapphire carrier with integrated silicon sensors is secured to the titanium disk.

Abstract: A method of manufacturing a pressure sensor is provided whereby the pressure sensor includes a joint, a diaphragm, and an adapter disposed between the joint and the diaphragm. The adapter includes an axis portion and a flange projecting in a radial direction from the axis portion. The axis portion is disposed such that one end does not interfere with the joint and the other end is welded to the diaphragm. The diaphragm is welded to the adapter and the welded portion the welded portion is positioned on an inner side of an end face of the joint. The joint is caulked to a peripheral edge of the flange of the adapter.

Abstract: The pressure sensor includes a first tubular member including at one end portion thereof a sensing section outputting an electrical signal indicative of a pressure applied thereto, and an opening section formed at the other end portion thereof, a second tubular member including an opening section formed at one end portion thereof and a diaphragm located at one end portion thereof, a housing having an opening at one end portion thereof, and a pressure transmission member operating to transmit a pressure applied thereto to the sensing section. The first and second tubular members are integrally connected to each other at their the opening sections. A fixing portion between the first and the second tubular members is located inside the housing, an outer periphery of the second tubular member is fixed to an inner periphery of the opening section of the housing.

Abstract: The present invention is a device that allows the pressure inside an aircraft landing gear shock strut to be measured. A charging valve is modified by integrating a small pressure sensing device into the stem of the part such that the active diaphragm is subjected to the pressure within the charged vessel. The wires from the pressure sensing device are connected to a receptacle or connector in the bore of the stem such that a corresponding electrical receptacle may be mated for the purposes of making a measurement. The internal receptacle is designed such that the flow of air or oil is not excessively impeded and normal servicing tools do not interfere with the receptacle.

Abstract: A differential pressure transmitter includes first and second process fluid inlets. A differential pressure sensor is disposed within the transmitter and has first and second sensor inlets. A first isolator diaphragm is located proximate the first process fluid inlet and is operably coupled to the first sensor inlet through a first fill fluid volume. A second isolator diaphragm is located proximate the second process fluid inlet and is operably coupled to the second sensor inlet through a second fill fluid volume. Measurement circuitry is operably coupled to the differential pressure sensor and configured to measure an electrical parameter of the sensor and provide an indication of the measured parameter. A third fluid volume substantially surrounds the differential pressure sensor. The third fluid volume exerts a compressive force on the differential pressure sensor.

Abstract: A pressure sensor assembly is provided for fitting within the valve stem of a vehicle tire. The assembly comprises a substrate assembly defining a plurality of holes. A pressure sensor and a temperature compensation sensor are mounted to the substrate assembly. Each sensor includes a deflectable membrane defining a first chamber and a cap mounted to the membrane to form a second chamber. A cover is provided for engaging with the pressure sensor and the temperature compensation sensor to define an active chamber and reference chamber respectively. The active chamber is exposed to tire pressure when the pressure sensor assembly is fitted within the valve stem whereas the reference chamber is sealed from tire pressure.

Abstract: A diaphragm pressure measuring cell arrangement has a housing body at least partly made of sapphire material and a planar sapphire diaphragm with a peripheral edge joined by a first edge seal to the housing body to form a reference vacuum chamber. An outer surface of the diaphragm is exposed to a medium to be measured. A ceramic supporting body is attached to the back side of the housing body by sealing glass and includes a surface area overhanging that surrounds the housing body to form a first sealing surface. A tubular sensor casing incorporates the measuring cell for mounted the ceramic support body, the casing including an inside second surrounding sealing surface corresponding to the first sealing surface. A metal ring seal is between the sealing surfaces and a pressing member presses sealing surfaces together.

Abstract: A differential pressure sensor method and system includes a number of elastomer plates, which can be placed with certain distance and sealed in a small tube, wherein the tube can be connected to a number of detection areas. The surface of the elastomers can be covered with a thin film of conductive elastomer as a compliant electrode. The resistance of the compliant electrodes varies with deformation of the elastomer plates and the resistance change can be measured through circuits. A variable capacitor also exists between the elastomer plates due to a sealed space and the compliant electrodes. The elastomer plates deform accordingly when the pressure varies in the detection areas and the variation of the capacitance can be detected through circuits. The pressure difference between the detection areas can then be detected utilizing the variation in resistance and capacitance.

Abstract: A pressure sensor module includes a pressure sensor, a bump, and a laminated substrate. The pressure sensor includes a semiconductor substrate; a cavity; a pressure-sensitive element; and a conductive section. The cavity is disposed inside the semiconductor substrate such that a thin-plate region of the semiconductor substrate is provided and the thin-plate region being defined as a diaphragm. The pressure-sensitive element is arranged at the diaphragm. The conductive section is electrically connected to the pressure-sensitive element and disposed on the face of the semiconductor substrate at a region excluding the diaphragm. The bump is electrically connected to the conductive section. The laminated substrate includes a wiring base material electrically connected to the pressure sensor via the bump. The wiring base material is disposed inside the laminated substrate. A face of the wiring base material is electrically connected to the bump and has an exposed area from the laminated substrate.

Abstract: A pressure sensor which includes: a semiconductor substrate; a first cavity portion that spreads out approximately parallel with one surface of the semiconductor substrate in the interior of a central region thereof; a diaphragm portion of a thin plate shape that is positioned on one side of the first cavity portion; a pressure sensitive element that is disposed on the diaphragm; and a bump that is disposed in an outer edge region of the one surface of the semiconductor substrate that excludes the diaphragm portion and is electrically connected with the pressure sensitive element, wherein a second cavity portion is disposed in at least one portion of the outer edge region in the interior of the semiconductor substrate and is closed with respect to the one surface of the semiconductor substrate.

Abstract: A membrane unit configured for use in a housing of a pressure measuring unit, preferably for measuring pressure in an extra-corporal blood circuit, has a flexible membrane and a fixing ring which is integral with the membrane so that the membrane and the fixing ring form a one-piece element. The fixing ring has a lower flexibility than the membrane, and has fixing elements for fixing the fixing ring to the pressure measuring housing.

Abstract: A single pressure sensing capsule has a reference pressure ported to the rear side of a silicon sensing die. The front side of the silicon sensing die receives a main pressure at another port. The silicon sensing die contains a full Wheatstone bridge on one of the surfaces and within the active area designated as the diaphragm area. Thus, the difference of the main and reference pressure results in the sensor providing an output equivalent to the differential pressure, namely the main pressure minus the reference pressure which is the stress induced in a sensing diaphragm. In any event, the reference pressure or main pressure may be derived from a pump pressure which is being monitored. The pump pressure output is subjected to a pump ripple or a sinusoidally varying pressure. In order to compensate for pump ripple, one employs a coiled tube. The tube length is selected to suppress the pump ripple as applied to the sensor die.

Abstract: A pressure measurement arrangement for measuring a line pressure of a product is described wherein product hold-up inside of disposable parts is minimized, comprising: a reusable pressure sensor comprising a measurement diaphragm, a fitting, the fitting comprising: a tubular opening extending through said fitting, for the reception of a disposable elastomeric tube, an aperture extending through an outside wall of the fitting into the tubular opening; and mounting structure, for mounting the pressure sensor on the aperture, such that the measurement diaphragm is exposed to an inside of the tubular opening; wherein the disposable tube is inserted in the tubular opening of the fitting during measurement; and an outside wall of the disposable tube comprises a thin flexible portion, which conforms to the measurement diaphragm when the disposable tube is pressurized by the line pressure.

Abstract: A pressure restrictor for use with a pressure sensing element comprising a cylindrical member of a given diameter and length having a plurality of apertures directed from a first end to a second end is disclosed. A pressure restrictor housing holds and positions the cylindrical member in close proximity to the pressure sensing element at the second end by clamping the pressure restrictor between the housing and element. The apertures provided in the pressure restrictor are the sole path for application of pressure to the sensing element. The sensing element is a double diaphragm silicon sensor where one diaphragm is exposed to pressure and the other diaphragm is not exposed to pressure. Each diaphragm has located thereon a half-bridge wherein both half bridges are connected to provide a full bridge. The full bridge provides an output strictly proportional to pressure.

Abstract: A pressure sensor is provided with a cap on a measuring portion of a diaphragm to which a first end of a flexible board is connected while a second end of the flexible board is connected to a circuit board spaced apart from the diaphragm. The flexible board is provided with the first end, a belt portion that is bent at an angle of ninety degrees or more relative to the first end in a direction to be away from the circuit board and is curved along the outer circumference of the diaphragm, and the second end that is bent at an angle of ninety degrees or more relative to the belt portion to be connected to the circuit board.

Abstract: The invention provides for a temperature compensating pressure sensing arrangement. The arrangement includes a substrate having sealed channels on which is deposited a CMOS layer, with a conductive layer and a passivation layer deposited on the CMOS layer. The arrangement also includes a conductive active membrane spaced from the conductive layer to form an active chamber, and a conductive reference membrane spaced from the conductive layer to form a sealed reference chamber. Further included is a cap which covers the membranes, said cap exposing the active membrane to an outside fluid pressure. The active membrane further defines a foot which is located between the substrate and cap with a leg extending away from the substrate and terminating in a substantially planar deflectable portion, which deflects due to differential pressure stresses so that an active capacitance is developed between the active membrane and the conductive layer depending on the electrical permittivity e of the fluid.

Abstract: A diaphragm is provided that includes a plurality of zonal portions that define reinforced and non-reinforced areas of the diaphragm. A first zonal portion extends from a marginal edge portion toward a central portion and is formed of a fabric material. A second zonal portion extends from the first zonal portion toward the central portion and is formed of an elastomer. A third zonal portion defines the central portion and is formed of a fabric material. The combination of reinforced and non-reinforced portions provides for a decrease in the radial tension (spring rate) of the diaphragm and helps prevent undesired changes to the flow control valve flow setpoint.

Abstract: Various embodiments and methods relating to a pressure sensor having a flexure supported piezo resistive sensing element are disclosed.

Abstract: A method includes forming multiple trenches in a first wafer, forming a sensor structure on a first surface of a second wafer, and bonding the first wafer and the second wafer. The method also includes etching a second surface of the second wafer to form a sensor diaphragm in the second wafer. The method further includes removing a portion of the first wafer by cutting the first wafer in multiple areas of the first wafer associated with the trenches. A sensor includes a substrate and a surface acoustic wave (SAW) resonator on a first surface of the substrate. The sensor also includes a bonding pad electrically coupled to the SAW resonator and a notch formed in a second surface of the substrate. The sensor further includes a cover separated from the first surface of the substrate by a spacer. The SAW resonator is located between the cover and the substrate.

Abstract: The present invention relates to a pressure sensor. The pressure sensor includes a substrate assembly. The substrate assembly defines sealed channels and includes a conductive layer. A conductive membrane extends from the substrate assembly and is spaced from the conductive layer to form a sealed reference chamber. A cap defines apertures. The cap extends from the substrate assembly to cover the membrane and thereby form an apertured chamber.

Abstract: An enhanced pressure sensing system and method use an external diaphragm to address issues involved with accurate and prolonged measurement of fluid pressure, such as of blood flowing in a vascular structure. Some external diaphragms include a metallized layer or other highly impermeable layer to furnish a high degree of seal at least near to hermetic grade. As temperature of the intermediary fluid changes, the external diaphragm is able to move in a direction that minimizes differential pressure across the external diaphragm over an operational temperature range thereby reducing pressure change of the intermediary fluid due to change in temperature of the intermediary fluid. Relatively smooth hydrodynamic surfaces can be used as well as a bi-layer construction.

Abstract: An air-pressure sensor for side-impact sensing, and a pressure-entry channel, which conveys the air pressure to a pressure-sensor element. The pressure-entry channel has multiple angles.