Abstract: In a data-input device an actuator element that can be manually actuated, and a sensor mechanically coupled to the actuator element. The sensor is formed in a body of semiconductor material housing a first sensitive element, which detects the actuation of the actuator element and generates electrical control signals. The first sensitive element is a microelectromechanical pressure sensor, formed by: a cavity made within the body; a diaphragm made in a surface portion of the body and suspended above the cavity; and piezoresistive transducer elements integrated in peripheral surface portions of the diaphragm in order to detect its deformations upon actuation of the actuator element.

Abstract: A pressure sensing system positions a microelectromechanical (MEMS) diaphragm of a MEMS pressure sensor die in a housing to indirectly sample pressure state of a fluid being measured. A second housing diaphragm is used to make direct contact with the fluid being measured. Pressure state of the fluid being measured is transferred from the housing diaphragm through an electrically insulating intermediary fluid to the MEMS diaphragm thereby allowing the MEMS pressure sensor die to indirectly sample pressure state of the fluid being measured. Electrically conductive support members and electrically conductive solid vias are used to electrically couple circuitry of the MEMS pressure sensor die to external wires outside the housing.

Abstract: A device (20) comprising a pressure measurement surface (28) functionally attached to a proof body (22) and a rigid component (30), functionally attached to the proof body (22), the measurement surface (28) forming a surface of the rigid component (30). In addition, the device comprises a support (38), functionally separated from the proof body (22), of generally annular shape, housing the rigid component (30) and a flexible mass (40) radially inserted between the support (38) and the rigid component (30) such that the contour of the measurement surface (28) is bounded by the flexible mass (40), this flexible mass (40) adhering to the support (38) and to the rigid component (30).

Abstract: A pressure sensor for sensing a pressure of a fluid includes a monolithic metal including substrate having a substantially planar top side, wherein the metallic comprising substrate includes s a relatively thick boss near a center of the substrate and a thinned sensing portion that is elastically deformable and pressure-sensitive positioned radially outward from the boss. At least one dielectric layer is on the top side of the substrate. A plurality of piezoresistors are on the dielectric layer, wherein the piezoresistors are positioned over the thinned diaphragm portion. At least one overglaze layer is over the conductor layer that provides apertures for electrically contacting the plurality of piezoresistors. A sensing system includes a housing including at least a first port for coupling to a fluid for measurement of a pressure of the fluid and at least one sensor in the housing including a pressure sensor according to an embodiment of the invention.

Abstract: A pressure sensor adapted to provide a high resolution at a low pressure and a high pressure of an operating range is provided. The pressure sensor includes a body having an interface sur ace, a membrane sealingly disposed in the cavity adjacent the interface surface, and a sensing element in communication with the membrane. A fuel cell system including the pressure sensor is also provided.

Abstract: An apparatus for sensing pressure is provided comprising a housing, electronics, a pressure sensor and a secondary seal. The housing comprises an interior bore and a first end, with the interior bore forming an opening at the first end. The electronics may be disposed in the interior bore. The pressure sensor is mounted at the first end of the interior bore. The pressure sensor may be operatively connected to send signals to the electronics in response to external fluid pressure. The pressure sensor may, at least in part, form a primary seal at the first end of the interior bore. The secondary seal may be disposed in the interior bore in between the pressure sensor and the electronics. The secondary seal may be configured to act as a backup seal to the primary seal. The secondary seal provides an added degree of safety from high pressure pipeline contents.

Abstract: A pressure sensor for measuring an external pressure fabricated upon a ceramic substrate penetrated by a via extending from the top to the bottom of the ceramic substrate is disclosed. A sacrificial layer is deposited on a portion of the top of the ceramic substrate in communication with a via. A diaphragm material is then deposited on the sacrificial layer, thereby creating a diaphragm surface. A sensor element for transducing a mechanical deflection into an electrical signal is applied to the diaphragm surface. When the sacrificial layer is removed, the diaphragm is able to deflect in response to the external pressure, which is sensed by the sensor element in order to measure the external pressure.

Abstract: Pressure non-linearity in a low pressure sensor device formed from a silicon diaphragm with an embedded piezoresistive transducer is reduced by using a shallow boss or thin stiffener on an ultra-thin diaphragm while the pressure sensitivity of the device is increased with corner trenches.

Abstract: A method for fabricating a sensor is disclosed that in one embodiment bonds a first device wafer to an etched second device wafer to create a suspended structure, the flexure of which is determined by an embedded sensing element that is in electrical communication with an outer surface of the sensor through an interconnect embedded in a device layer of the first device wafer. In one embodiment the suspended structure is enclosed by a cap and the sensor is configured to measure absolute pressure.

Abstract: A high-temperature pressure sensor is provided. The sensor includes a quartz substrate with a cavity etched on one side. A reflective coating is deposited on at least a portion of the cavity. The sensor further includes a ferrule section coupled to the quartz substrate with the cavity therebetween. The cavity exists in a vacuum, and cavity gap is formed between the reflective metal coating and a surface of the ferrule. The sensor also includes an optical fiber enclosed by the ferrule section and extending from the cavity gap to an opposing end of the ferrule section and a metal casing surrounding the ferrule section and the quartz substrate with an opening for said optical fiber extending therefrom. The pressure applied to the quartz substrate changes the dimensions of the cavity gap and a reflected signal from the reflective coating is processed as a pressure.

Abstract: A pressure detector configured to detect a predetermined pressure includes a housing having a concave that includes a perforation hole that perforates the housing, a sheet configured to cover the concave and to rupture when placed in an environment of the predetermined pressure or higher, and a semipermeable membrane configured to cover one end of the perforation hole, and to allow air to pass through the semipermeable membrane, the semipermeable membrane being configured to prevent water from passing through the semipermeable membrane.

Abstract: A method for manufacturing an elastic deformation body made of an Al2O3 ceramic, according to which a highly pure alumina having at most 2000 ppm MgO, at most 200 ppm inorganic impurities, a specific surface of at least 10 m2/g, an average grain size of at most 0.3 ?m is applied. With the alumina and additives, there is produced via aqueous processing a homogeneous mixture, from which a pressable spray granulate is produced, which is formed by means of a uniaxial pressing method to a homogeneous, green body, which is subjected to a sinter process. The resulting elastic deformation body has a bending fracture stress ?c, whose distribution F(?c) is given by the Weibull parameters ?0?800 MPa and m?24, with an average grain size of the sintered material of no more than 2 ?m, and wherein the sintered material of the deformation body has a density of not less than 3.98 g/cm3.

Abstract: A combined pressure and temperature sensor for recording the pressure and the temperature of a medium. The combined pressure and temperature sensor includes a sensor element in which at least one channel is developed for accommodating a temperature sensor and at least one channel is developed for recording a pressure. The at least one channel, for recording a pressure, opens out under a pressure sensor. The at least one channel for the temperature sensor runs centrically in the sensor element.

Abstract: A pressure-measuring device is situated in a chamber of an internal combustion engine. The pressure-measuring device has a housing, a force-transmitting element that protrudes partly from the housing at a chamber-side opening of the housing, and a pressure sensor that is situated in an interior space of the housing. The pressure sensor stands in effective connection to the force-transmitting element. In addition, a diaphragm is provided that seals the interior space of the housing, in which the pressure sensor is situated, against the chamber-side opening. The diaphragm, which is preferably fashioned as a metal diaphragm, has a force-transmitting segment that is oriented in an axial direction of the force-transmitting element. Moreover, the pressure sensor stands in effective connection with the force-transmitting element via the force-transmitting segment of the diaphragm.

Abstract: There is disclosed a high pressure sensing header which is relatively insensitive to mounting torque. The header comprises an outer torque isolating shell which surround an inner “H” section header. The inner “H” section header has a thick diaphragm and is surrounded by the torque isolating shell which is secured to the “H” section header at a peripheral flange of the “H” section header. In this manner when the header is installed, the installation force is absorbed by the outer shell and there is no installation force or torque exhibited by the inner “H” section which will respond only to stress due to pressure. The torque isolating shell also contains a top surface which has a counterbore that accommodates a crush ring. When the unit is installed, the crush ring is crushed against an installation wall to enable the inner header to receive pressure without experiencing significant installation force.

Abstract: A pressure transfer device comprises a pressure transfer device body and an isolating diaphragm, wherein, between the surface of the body of the pressure transmitting device and the isolating diaphragm, a pressure chamber is formed, whose volume is dependent on the position of the isolating diaphragm. The isolating diaphragm has a material thickness and a deflectable working region with an area A, wherein the isolating diaphragm has a reference position, in which the pressure chamber contains a reference volume Vref, and the isolating diaphragm is deflectable from the reference position at least so far in two directions, that the volume of the pressure chamber varies between values of up to Vref+/??Vdesired, wherein associated with a volume change ?V is a dimensionless deflection measure w, with w(?V):=(3·?V)/(A·h), wherein ?Vdesired is dimensioned in such a way, that |w(?Vdesired)|?2.5; wherein, in the case of all w(?V), for which |w(?V)|?|w?(?V)|, wherein |w?(?V)|?0.

Abstract: A pressure sensor includes: a housing; an attachment having a pressure input orifice communicating with an interior of the housing; a first diaphragm that seals an opening of the pressure input orifice of the attachment, an external surface of the first diaphragm being a pressure receiving surface; a force transmitting member having an end which is coupled approximately perpendicular to a main surface of the first diaphragm, the main surface being opposite from the pressure receiving surface; a swing arm which is joined to the force transmitting member and is held to a retainer at a pivoting point as a fulcrum; and a pressure sensing element having a first end coupled to the retainer and a second end coupled to the swing arm, so that a displacement direction of the force transmitting member is the same direction as a line joining the first end and the second end.

Abstract: A capacitative pressure sensor that has a silicon substrate, CMOS layers deposited on the silicon substrate, a conductive layer deposited on the CMOS layer and, a passivation layer on the conductive layer. A conductive membrane extends from the substrate assembly such that it is spaced from the conductive layer. The conductive layer has a plurality of apertures and the silicon substrate to define a passage for fluid communication with fluid pressure exterior to the pressure sensor and a cap extending from the substrate assembly to cover the membrane and form a chamber on one side of the conductive membrane that is sealed from the fluid pressure exterior to the pressure sensor.

Abstract: In an input device, a control element is operated by a user; a pressure sensor is mechanically coupled to the control element and is provided with a monolithic body of semiconductor material housing a first sensitive element, which detects an actuation of the control element; a supporting element is connected to the pressure sensor; and connection elements electrically connect the monolithic body to the supporting element without interposition of a package. In particular, the monolithic body has electrical-contact areas carried by one main surface thereof, and the printed circuit board has conductive regions carried by a main face thereof; the connection elements are conductive bumps and electrically connect the electrical-contact areas to the conductive regions.

Abstract: A membrane unit configured for use in a housing of a pressure measuring unit, preferably for measuring pressure in an extra-corporal blood circuit, has a flexible membrane and a fixing ring which is integral with the membrane so that the membrane and the fixing ring form a one-piece element. The fixing ring has a lower flexibility than the membrane, and has fixing elements for fixing the fixing ring to the pressure measuring housing.

Abstract: A method and apparatus for measuring gas pressure by combining an ionization gauge with at least one other vacuum sensor. Nonvolatile memory coupled to the vacuum gauge contains calibration parameters unique to each individual sensor based on factory calibration. The nonvolatile memory may contain calibration parameters for a heat-sensitive vacuum sensor to compensate for the temperature gradients generated by the ionization gauge. The calibration parameters are a function of calibration data determined when the ionization gauge is both on and off. The nonvolatile memory may store a window of measurement data of the vacuum gauge that is updated at predetermined time intervals and in response to an event, such as an error event, to aid in investigating the cause of vacuum gauge malfunction or failure.

Abstract: A single pressure sensing capsule has a reference pressure ported to the rear side of a silicon sensing die. The front side of the silicon sensing die receives a main pressure at another port. The silicon sensing die contains a full Wheatstone bridge on one of the surfaces and within the active area designated as the diaphragm area. Thus, the difference of the main and reference pressure results in the sensor providing an output equivalent to the differential pressure, namely the main pressure minus the reference pressure which is the stress induced in a sensing diaphragm. In any event, the reference pressure or main pressure may be derived from a pump pressure which is being monitored. The pump pressure output is subjected to a pump ripple or a sinusoidally varying pressure. In order to compensate for pump ripple, one employs a coiled tube. The tube length is selected to suppress the pump ripple as applied to the sensor die.

Abstract: A temperature compensating pressure sensor comprises a substrate having sealed channels on which is deposited a CMOS layer; a conductive layer and a passivation layer deposited on the CMOS layer; a conductive active membrane spaced from the conductive layer to form an active chamber, the conductive active membrane having a corrugated cross section; a conductive reference membrane spaced from the conductive layer to form a reference chamber; and a cap which covers the membranes, said cap exposing the active membrane to an outside fluid pressure. The active membrane deflects due to differential stresses so that an active capacitance is developed between the active membrane and the conductive layer depending on the electrical permittivity e of the fluid, with the reference membrane providing a temperature compensating reference capacitance.

Abstract: The invention relates to a pressure sensor (6). This pressure sensor (6) comprises a flexible membrane (11) cooperating with a transmission device (10) that enables a value representing the pressure to be supplied on the basis of the deformation of the membrane (11). The membrane (11) is made from an at least partially amorphous material in order to optimise the dimensions of the sensor (6).

Abstract: A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component having a capacitive magneto-MEMS component, a compensator and an output component for sensing magnetic fields and for providing, in response thereto, an indication of the current present in a respective conductor to be measured. In one embodiment, first and second mechanical sense components are electrically conductive and operate to sense a change in a capacitance between the mechanical sense components in response to a mechanical indicator from a magnetic-to-mechanical converter.

Abstract: A variable capacitor, a microfabricated implantable pressure sensor including a variable capacitor and an inductor, and related pressure measurement and implantation methods. The inductor may have a fixed or variable inductance. A variable capacitor and pressure sensors include a flexible member that is disposed on a substrate and defines a chamber. Capacitor elements extend indirectly from the flexible member. Sufficient fluidic pressure applied to an exterior surface of the flexible member causes the flexible member to move or deform, thus causing the capacitance and/or inductance to change. Resulting changes in resonant frequency or impedance can be detected to determine pressure, e.g., intraocular pressure.

Abstract: This invention uses a flexible gauge to digitize an analogue signal from a mechanical gauge. In particular, this invention uses a flexible gauge to digitize an analogue signal from a mechanical pressure gauge. More particularly, this invention uses a flexible gauge to digitize an a analogue signal from a mechanical pressure gauge that uses a Bourdon tube.

Abstract: The inventive endoscopy system includes a cannula for arranging an endoscope and forming, between said cannula and endoscope, an irrigation or aspiration channel for transporting an irrigation or aspiration fluid, respectively, a connection ring mounted around the cannula and provided with a connection channel connectable to the irrigation or aspiration channel, respectively and a connector which is mounted on the connection ring and includes a transport channel with the connection channel and a first pressure sensor for detecting pressure in the transport channel. The connection ring is provided with a bypass circuit connectable to the irrigation or aspiration channel, respectively and the connector including a dead channel connectable to the bypass circuit and a second pressure sensor for detecting pressure in the dead channel.

Abstract: There is disclosed a high pressure sensing header which is relatively insensitive to mounting torque. Essentially the header consists of an outer torque isolating shell which has a “C” shaped cross section with the cylindrical shell surrounding an inner “H” section header. The inner “H” section header has a thick diaphragm and is surrounded by the torque isolating shell which is secured to the “H” section header at a peripheral flange of the “H” section header. In this manner when the header is installed, the installation force is absorbed by the outer shell and there is no installation force or torque exhibited by the inner “H” section which will respond only to stress due to pressure. The torque isolating shell also contains a top surface which has a counterbore which can accommodate a crush ring, and when the unit is installed, the crush ring is forced or crushed against an installation wall to enable the inner header to receive pressure without experiencing any significant installation force.

Abstract: A temperature compensating pressure sensor arrangement includes a capacitive pressure sensor having a substrate carrying CMOS layers. A conductive membrane is arranged on the substrate and defines a reference chamber such that capacitance changes resulting from displacement of the conductive membrane can be converted to pressure change values. A cap covers the conductive membrane and has openings to permit pressure changes to be detected by the conductive membrane. A capacitive temperature sensor is operatively arranged with respect to the capacitive pressure sensor and has a conductive membrane arranged on the substrate and defines a reference chamber such that capacitance changes resulting from displacement of the conductive membrane can be converted to temperature change values. The conductive member defining openings and cap covers and seals the conductive membrane from an external environment.

Abstract: A pressure transducer has an H-shaped cross-sectional header having a front and a back section. The front and back sections are of equal diameter and are circular. Each front and back section has a depression with an isolation diaphragm covering the depression. Each diaphragm is of equal size and the depressions communicate one with the other via a central channel in the central arm of the H. A pressure sensor communicates with the channel, where the pressure sensor responds to a first pressure applied to the first isolation diaphragm and a second pressure applied to the second isolation diaphragm. The pressure sensor produces an output equal to the difference in pressure. The differential pressure transducer having both diaphragms of the same size and still enabling leads from the sensor to be brought out.

Abstract: A hermetic scroll compressor includes a hermetic shell through which the pressure within the shell is monitored. In one embodiment, a housing is resistance welded into an aperture extending through the shell. An oil filled pressure sensor or a dry type pressure sensor is associated with the housing. The oil filled pressure sensor extends through an aperture in the shell. The dry type pressure sensor is located on the housing outside of the shell. In another embodiment, the shell forms the diaphragm portion of the pressure sensor.

Abstract: In a manufacturing method of a pressure detector, a first member that includes a sensing portion for outputting an electric signal in accordance with a pressure, a second member that includes a pressure-receiving diaphragm, and a pressure transmission member are prepared. The pressure transmission member is disposed between the sensing portion and the pressure-receiving diaphragm and the first member and the second member are welded in a state where the pressure is applied from the pressure-receiving diaphragm to the sensing portion through the pressure transmission member. One of the first member and the second member are strained so that a preliminary load, which is applied from the pressure-receiving diaphragm to the sensing portion through the pressure transmission member in a state where no external pressure is applied to the pressure-receiving diaphragm, meets a predetermined value.

Abstract: A pressure sensor includes: a diaphragm having a pressure-receiving portion receiving a pressure and a thick portion adjacent to the pressure-receiving portion; and a pressure sensitive element having a first and a second ends facing each other. The pressure sensitive element extends in a direction intersecting the thick portion and the first end of the pressure sensitive element is bonded to a pressure-receiving surface of the pressure-receiving portion, and a central portion of a portion at which the pressure-receiving portion and the first end are bonded is positioned at a side closer to the second end of the pressure sensitive element than a center of the pressure-receiving portion.

Abstract: A MEMS-based silicon pressure sensor for the ocean environment is presented. The invention is a multiple diaphragm piezoresistive pressure sensor for measuring the pressure of a liquid, comprising an inner deformable diaphragm formed on a silicon substrate, the inner deformable diaphragm having a first thickness an outer deformable diaphragm formed on the silicon substrate, the outer deformable diaphragm having a second thickness which is greater than the first thickness, positioned below the inner deformable diaphragm to support the inner deformable diaphragm, a first piezoresistive bridge embedded in the inner deformable diaphragm, a second piezoresistive bridge embedded in the outer deformable diaphragm and possibly a third piezoresistive bridge embedded in the silicon substrate to compensate for temperature variations.

Abstract: The invention concerns a pressure sensor (5), particularly for a depth gauge (1), capable of having a high level of precision, owing to sufficient elastic deflection amplitude of the diaphragm (or membrane), while avoiding any risk of plastic deformation. The diaphragm (12) is formed by a flat metal disc. The peripheral region (13) thereof is neither welded nor inset, but it is pre-stressed against a stop strip (25) with a closed, preferably circular contour, and can pivot on the stop strip (25) when the diaphragm bends under the effect of fluid pressure in the pressure chamber (10). The pre-stressing may be achieved via a sealing gasket (21) located opposite the stop strip (25). Between said strip and a central aperture (15), a concave stop surface (20) limits the deflection of the diaphragm (12) and prevents any plastic deformation in the event of excessive pressure. Manufacture of the diaphragm is simple, with a high level of reproducibility, assembly is easy and the seal quality is high.

Abstract: A method and an apparatus for determining a pressure (PProbe) of a fluid (Fprobe), comprising the steps of: a) providing a vacuum tight welded housing (10, 12); b) providing within the housing (10, 12) a first membrane (16) enclosing a part of a first inner volume; said first membrane (16) having a first contact area (18) associated with a first temperature sensor (20) and a heater (22); c) further providing within the housing (10, 12) a second membrane (14) enclosing also a part of the first inner volume; said second membrane (14) having a second contact area (24) associated with a second temperature sensor (26) and being disposed opposite to said first contact area (18), wherein one of said first membrane (16) and said second membrane (14) being elastic at least in part of the area around its respective contact area (18, 24), d) providing an access (6) of said first inner volume to the fluid (FProbe); e) designing the first and second membrane (14, 16) in a way that they hermetically seal a second inner vol

Abstract: The present invention relates to a temperature-compensated pressure sensor assembly for fitting within the valve stem of a vehicle tire. The assembly includes a substrate assembly defining a plurality of holes. A pressure sensor is mounted to the substrate assembly. The pressure sensor includes a first deflectable membrane defining a first chamber and a first cap mounted to the membrane to form a second chamber. A temperature compensation sensor is mounted to the substrate assembly. The temperature compensation sensor includes a second deflectable membrane mounted to the substrate assembly to define a third chamber and a second cap mounted to the other membrane to form a fourth chamber.

Abstract: A tool to measure the depth of one or more through-silicon vias, the tool fabricated in silicon to include a microfluidic chamber that is positioned over the one or more through-silicon vias, further including a fluid actuation chamber to inject fluid into the microfluidic chamber and into the one or more through-silicon vias, and a pressure sensing chamber to sense the fluid pressure to indicate when the one or more through-silicon vias are filled with the fluid.

Abstract: It is an objective of the present invention to provide a highly sensitive optical pressure sensor that uses a Mach-Zehnder Interferometer to measure pressure. The pressure sensor comprises a deflectable diaphragm including a substantially central boss and channel and an optical waveguide having a first arm and a second arm, wherein the first arm is substantially aligned with an edge of the boss and the second arm is substantially aligned with an edge of the channel, and further wherein the first and second arms contain a periodic array of etched holes to improve the overall sensitivity of the pressure sensor. The pressure sensor further comprises a light source coupled to the optical waveguide for introducing light to the waveguide and a light detector coupled to the waveguide for detecting changes in the intensity of light. The change in light intensity is then correlated to an applied pressure.

Abstract: A noninvasive system and method for measuring vacuum pressure in a fluid in accordance with the present invention generally includes a chamber with two interconnected diaphragms having different surface areas and a force transducer that makes contact with the smaller area diaphragm. When a pressure level less than atmospheric occurs inside the chamber, the smaller area diaphragm presses with a force on the force sensor. As the pressure level in the chamber decreases, the force on the sensor increases. The present system is intended for, but not limited to, use in a Phacoemulsification machine, where it will serve to measure the vacuum in a fluid without contaminating the fluid with previous uses of the system or with any components of the system which are unable to undergo a sterilization process.

Abstract: The invention provides for a pressure sensor with compensation for temperature variations. The sensor has CMOS layers deposited on a substrate, a conductive layer connected to the CMOS and a passivation layer deposited on the CMOS layers. The arrangement also includes a conductive active membrane spaced from the conductive layer to form an active chamber, and a conductive reference membrane spaced from the conductive layer to form a sealed reference chamber. Further included is a cap which covers the membranes, said cap exposing the active membrane to an outside fluid pressure. The active membrane further defines a foot which is located between the substrate and cap with a leg extending away from the substrate and terminating in a substantially planar deflectable portion, which deflects due to differential pressure stresses so that an active capacitance is developed between the active membrane and the conductive layer depending on the electrical permittivity e of the fluid.

Abstract: There is disclosed a header for a differential pressure transducer. The header has a cylindrical sensor housing section which has a front and a back surface. The front surface has a sensor accommodating recess. There is a plurality of terminal pins extending from the front surface and directed through the housing to extend from said back surface. The pins are arranged in a semi-circular pattern, said sensor housing having a stem aperture and cylindrical wall. A stem housing is positioned in the stem aperture and is brazed thereto. The stem housing has a stem passageway directed through the housing which communicates with a passageway in the cylindrical sensor housing. The cylindrical sensor recess contains a sensing device which receives a first input pressure on one diaphragm surface of the sensing device and a second input pressure on a second surface of the diaphragm to produce a differential output pressure. The header, as indicated, is rugged and simple to use and produce.

Abstract: A method is described for reducing a dead volume of a microfluidic circuit that includes, in one embodiment, a reservoir, an outlet, and a microfluidic flowpath fluidly connecting the reservoir and the outlet. The method includes providing a microfluidic flow component between the reservoir and the outlet for performing a function and in fluidic communication with the microfluidic flowpath, wherein the microfluidic flow component includes a total volume including a working volume and a dead volume. The working volume is a volume necessary for the microfluidic flow component to perform the function and the dead volume is a volume unnecessary for the microfluidic flow component to perform the function. The method includes configuring at least one of the reservoir, the microfluidic flowpath, and the microfluidic flow component to reduce the dead volume, such that the working volume of the component is substantially the same as the total volume.

Abstract: There is disclosed a high pressure sensing header which is relatively insensitive to mounting torque. Essentially the header consists of an outer torque isolating shell which has a “C” shaped cross section with the cylindrical shell surrounding an inner “H” section header. The inner “H” section header has a thick diaphragm and is surrounded by the torque isolating shell which is secured to the “H” section header at a peripheral flange of the “H” section header. In this manner when the header is installed, the installation force is absorbed by the outer shell and there is no installation force or torque exhibited by the inner “H” section which will respond only to stress due to pressure. The torque isolating shell also contains a top surface which has a counterbore which can accommodate a crush ring, and when the unit is installed, the crush ring is forced or crushed against an installation wall to enable the inner header to receive pressure without experiencing any significant installation force.

Abstract: A semiconductor filter is provided to operate in conjunction with a differential pressure transducer. The filter receives a high and very low frequency static pressure attendant with a high frequency low dynamic pressure at one end, the filter operates to filter said high frequency dynamic pressure to provide only the static pressure at the other filter end. A differential transducer receives both dynamic and static pressure at one input port and receives said filtered static pressure at the other port where said transducer provides an output solely indicative of dynamic pressure. The filter in one embodiment has a series of etched channels directed from an input end to an output end. The channels are etched pores of extremely small diameter and operate to attenuate or filter the dynamic pressure.

Abstract: In a particular embodiment, a process transmitter includes a corrosion resistive housing including a flange portion, where the corrosion resistive housing is formed from a first material. The process transmitter also includes an outer ring formed from a second material. The outer ring has an inner diameter and is brazed to the flange portion. The process transmitter further includes a deformable diaphragm formed from a third material, the deformable diaphragm is welded to the outer ring at a weld seam between the diaphragm and the outer ring adjacent to the inner diameter to form a fluid seal.

Abstract: The present invention relates to a pressure sensor comprising multiple flexible diaphragms to which are affixed, within which are embedded, or which themselves constitute part of transducer elements that are connected together electrically, providing greater sensitivity and allowing the diaphragms to be made smaller, thereby increasing burst pressure to operating pressure ratio. This multi-diaphragm pressure sensor can therefore be used to accurately measure small changes in dynamic pressure in a fluid of overall high static pressure, for example, in a flow inventory control system as may be used in a fire suppression system, or for control of nuclear reactor systems.

Abstract: A high-pressure sensor device has a pressure sensor element and an electric circuit, in particular in the form of a semiconductor component, the pressure sensor element having a membrane deformable under the effect of pressure, and a functional layer, which experiences a change in its electrical properties when deformed, and which has at least one electric terminal area, and the design and the manufacturing process being simplified in particular by the fact that the semiconductor component is directly connected to the electric terminal area via a solder layer.

Abstract: In a device for measuring the pressure of a medium, in particular a liquid medium, the device including a measuring chamber through which the medium can flow and which has at least one elastically deformable wall, at least one wall that is more rigid by comparison to the elastically deformable wall, and an inlet and outlet for the medium, at least one excitation electrode is provided in or on the at least one more rigid wall of the measuring chamber, and at least one signal electrode is provided on the elastically deformable wall, for impedance measurement.