Edge ring

- Applied Materials, Inc.
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Description

FIG. 1 is a front isometric top view of an edge ring.

FIG. 2 is a top plan view thereof.

FIG. 3 is a bottom plan view thereof.

FIG. 4 is a first side view thereof.

FIG. 5 is a second side view thereof.

FIG. 6 is an enlarged partial view of the section 6 shown in FIG. 1.

FIG. 7 is a cross sectional view along line 7-7 of FIG. 2 thereof.

FIG. 8 is an enlarged partial side view thereof.

FIG. 9 is an enlarged partial view of the section 9 shown in FIG. 2.

FIG. 10 is an enlarged partial cross sectional view of the section 10 shown in FIG. 7.

FIG. 11 is another front isometric top view thereof assembled with an overhang ring.

FIG. 12 is another top plan view thereof assembled with the overhang ring.

FIG. 13 is a third side view thereof assembled with the overhang ring; and,

FIG. 14 is an enlarged partial cross sectional view along line 14-14 of FIG. 12 thereof assembled with an overhang ring.

The broken lines appearing in FIGS. 1-14 illustrate portions of the edge ring assembly that form no part of the claimed design. The dot-dot-dash broken lines show boundaries of cross sectional or enlarged views that form no part of the claimed design.

Claims

The ornamental design for an edge ring, as shown and described.

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Patent History
Patent number: D1034491
Type: Grant
Filed: Jul 27, 2020
Date of Patent: Jul 9, 2024
Assignee: Applied Materials, Inc. (Santa Clara, CA)
Inventors: Kin Pong Lo (Fremont, CA), Vladimir Nagorny (Tracy, CA), Wei Liu (San Jose, CA), Theresa Kramer Guarini (San Jose, CA), Bernard L. Hwang (Santa Clara, CA), Malcolm J. Bevan (Santa Clara, CA), Jacob Abraham (San Jose, CA), Swayambhu Prasad Behera (Santa Clara, CA)
Primary Examiner: Shawn T Gingrich
Assistant Examiner: Caleb M Baker
Application Number: 29/744,119