Shield for plasma chambers

Description

FIG. 1 is a perspective view of a shield for plasma chambers showing our new design;

FIG. 2 is a side view thereof;

FIG. 3 is a top view thereof;

FIG. 4 is a bottom view thereof;

FIG. 5 is a cross-sectional view taken along lines 5-5 in FIG. 4;

FIG. 6 is an enlarged portion view of encircled portion labeled, “6,” in FIG. 5;

FIG. 7 is an enlarged portion view of encircled portion labeled, “7,” in FIG. 6; and,

FIG. 8 is an enlarged portion view of encircled portion labeled, “8,” in FIG. 6.

The dot-dash broken lines shown in FIGS. 5-8 illustrate boundary lines of the encircled portion views of FIGS. 6-8 and form no part of the claimed design.

Claims

The ornamental design for a shield for plasma chambers, as shown and described.