Lower chamber liner
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The broken lines in the figures form no part of the claimed design.
The upper chamber liner is shown broken away in
All surfaces not shown, form no part of the claimed design.
Claims
The ornamental design for a lower chamber liner, as shown and described.
4340462 | July 20, 1982 | Koch |
D404370 | January 19, 1999 | Kimura |
D404372 | January 19, 1999 | Ishii |
6170429 | January 9, 2001 | Schoepp et al. |
6277237 | August 21, 2001 | Schoepp et al. |
6884297 | April 26, 2005 | Park et al. |
7011039 | March 14, 2006 | Mohn et al. |
7234412 | June 26, 2007 | Carpenter et al. |
D556704 | December 4, 2007 | Nakamura et al. |
D557226 | December 11, 2007 | Uchino et al. |
D593969 | June 9, 2009 | Li |
D600221 | September 15, 2009 | Sato |
D600222 | September 15, 2009 | Sato |
7942969 | May 17, 2011 | Riker et al. |
7987814 | August 2, 2011 | Carducci et al. |
8118938 | February 21, 2012 | Carducci et al. |
D658691 | May 1, 2012 | Suzuki et al. |
D658692 | May 1, 2012 | Suzuki et al. |
D658693 | May 1, 2012 | Suzuki et al. |
8282736 | October 9, 2012 | Carducci et al. |
8313578 | November 20, 2012 | Carducci et al. |
D678228 | March 19, 2013 | Suzuki et al. |
D699692 | February 18, 2014 | Yousif |
20020069970 | June 13, 2002 | Noorbakhsh et al. |
20050229849 | October 20, 2005 | Silvetti et al. |
20080041820 | February 21, 2008 | Tong et al. |
20080121620 | May 29, 2008 | Guo et al. |
Type: Grant
Filed: Nov 7, 2013
Date of Patent: Oct 28, 2014
Assignee: Applied Materials, Inc. (Santa Clara, CA)
Inventors: Shu-Kwan Lau (Sunnyvale, CA), Mehmet Tugrul Samir (Mountain View, CA), Anzhong Chang (San Jose, CA), Paul Brillhart (Pleasanton, CA), Richard O. Collins (Santa Clara, CA)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/472,055