Elastic membrane for semiconductor wafer polishing

- Ebara Corporation
Skip to: Description  ·  Claims  ·  References Cited  · Patent History  ·  Patent History
Description

FIG. 1 is a front view of an elastic membrane for semiconductor wafer polishing showing our new design;

FIG. 2 is a rear view thereof;

FIG. 3 is a bottom view thereof;

FIG. 4 is a plan view thereof;

FIG. 5 is a left side view thereof;

FIG. 6 is a right side view thereof;

FIG. 7 is a cross-section view taken along the line 7-7 of FIG. 2 thereof;

FIG. 8 is a enlarged view of part 8 of FIG. 7 thereof; and,

FIG. 9 is a enlarged perspective view, observed from above thereof.

The broken lines depict environmental subject matter only and form no part of the claimed design.

Claims

The ornamental design for an elastic membrane for semiconductor wafer polishing, as shown and described.

Referenced Cited
U.S. Patent Documents
645938 March 1900 Brown
2576673 November 1951 Cole
3064984 November 1962 Mickle et al.
3347556 October 1967 Fleckenstein et al.
3848880 November 1974 Tanner
D244533 May 31, 1977 Eidelberg et al.
4109716 August 29, 1978 Canalizo
4421330 December 20, 1983 Burke
4570944 February 18, 1986 Traub
D286361 October 28, 1986 Zieff
4709522 December 1, 1987 Carnahan
D304862 November 28, 1989 DiCola
5422316 June 6, 1995 Desai et al.
5964653 October 12, 1999 Perlov et al.
6056632 May 2, 2000 Mitchel et al.
6110026 August 29, 2000 Arai
6116992 September 12, 2000 Prince
6147001 November 14, 2000 Kimura et al.
6159079 December 12, 2000 Zuniga et al.
6183354 February 6, 2001 Zuniga et al.
6217433 April 17, 2001 Herrman et al.
6296555 October 2, 2001 Inaba et al.
6305695 October 23, 2001 Wilson
6315649 November 13, 2001 Hu et al.
6358129 March 19, 2002 Dow
6494769 December 17, 2002 Sinclair et al.
6666948 December 23, 2003 Nguyen
6722965 April 20, 2004 Zuniga et al.
6739958 May 25, 2004 Chao et al.
6852019 February 8, 2005 Togawa et al.
6857945 February 22, 2005 Chen et al.
6872130 March 29, 2005 Zuniga
6890402 May 10, 2005 Gunji et al.
6923714 August 2, 2005 Zuniga et al.
6988942 January 24, 2006 Chen et al.
7025664 April 11, 2006 Korovin et al.
7033260 April 25, 2006 Togawa et al.
7083507 August 1, 2006 Togawa et al.
7235139 June 26, 2007 Boguslavskiy et al.
D546784 July 17, 2007 Hayashi
D548705 August 14, 2007 Hayashi
7255771 August 14, 2007 Chen et al.
7311585 December 25, 2007 Togawa et al.
7357699 April 15, 2008 Togawa et al.
7402098 July 22, 2008 Severson et al.
7479304 January 20, 2009 Sun et al.
7491117 February 17, 2009 Togawa et al.
7632173 December 15, 2009 Togawa et al.
7635292 December 22, 2009 Togawa et al.
D609652 February 9, 2010 Nagasaka et al.
D609655 February 9, 2010 Sugimoto
D616390 May 25, 2010 Sato
D633452 March 1, 2011 Namiki et al.
D634719 March 22, 2011 Yasuda et al.
D638523 May 24, 2011 Yoshida et al.
7988537 August 2, 2011 Togawa et al.
8021215 September 20, 2011 Zuniga et al.
D649126 November 22, 2011 Takahashi
D650053 December 6, 2011 Douglass, III
D655797 March 13, 2012 Muramatsu
8202140 June 19, 2012 Hong et al.
D681176 April 30, 2013 Chacko
8454413 June 4, 2013 Oh et al.
8469776 June 25, 2013 Zuniga et al.
D696751 December 31, 2013 Beagen, Jr.
D711330 August 19, 2014 Fukushima et al.
8808062 August 19, 2014 Oh et al.
8859070 October 14, 2014 Yasuda et al.
8932106 January 13, 2015 Fukushima et al.
8939817 January 27, 2015 Son
20020086624 July 4, 2002 Zuniga et al.
20030057089 March 27, 2003 Nguyen
20030171076 September 11, 2003 Molone et al.
20040175951 September 9, 2004 Chen
20080070479 March 20, 2008 Nabeya et al.
20080119119 May 22, 2008 Zuniga et al.
20090233532 September 17, 2009 Togawa et al.
20090247057 October 1, 2009 Kobayashi et al.
20130316628 November 28, 2013 Jang et al.
Foreign Patent Documents
2005-0814728 September 2007 EP
2000-167762 June 2000 JP
2000-301452 October 2000 JP
2002-075936 March 2002 JP
2002-527894 August 2002 JP
2004-297029 October 2004 JP
2004-363505 December 2004 JP
2006-159392 June 2006 JP
2006-255851 September 2006 JP
3937368 April 2007 JP
30-0526799 April 2009 KR
30-0526801 April 2009 KR
Patent History
Patent number: D729753
Type: Grant
Filed: Jul 10, 2014
Date of Patent: May 19, 2015
Assignee: Ebara Corporation (Tokyo)
Inventors: Makoto Fukushima (Tokyo), Hozumi Yasuda (Tokyo), Osamu Nabeya (Tokyo), Katsuhide Watanabe (Tokyo), Keisuke Namiki (Tokyo)
Primary Examiner: Selina Sikder
Application Number: 29/496,207