Elastic membrane for semiconductor wafer polishing
Latest Ebara Corporation Patents:
Description
The broken lines depict environmental subject matter only and form no part of the claimed design.
Claims
The ornamental design for an elastic membrane for semiconductor wafer polishing, as shown and described.
Referenced Cited
U.S. Patent Documents
Foreign Patent Documents
645938 | March 1900 | Brown |
2576673 | November 1951 | Cole |
3064984 | November 1962 | Mickle et al. |
3347556 | October 1967 | Fleckenstein et al. |
3848880 | November 1974 | Tanner |
D244533 | May 31, 1977 | Eidelberg et al. |
4109716 | August 29, 1978 | Canalizo |
4421330 | December 20, 1983 | Burke |
4570944 | February 18, 1986 | Traub |
D286361 | October 28, 1986 | Zieff |
4709522 | December 1, 1987 | Carnahan |
D304862 | November 28, 1989 | DiCola |
5422316 | June 6, 1995 | Desai et al. |
5964653 | October 12, 1999 | Perlov et al. |
6056632 | May 2, 2000 | Mitchel et al. |
6110026 | August 29, 2000 | Arai |
6116992 | September 12, 2000 | Prince |
6147001 | November 14, 2000 | Kimura et al. |
6159079 | December 12, 2000 | Zuniga et al. |
6183354 | February 6, 2001 | Zuniga et al. |
6217433 | April 17, 2001 | Herrman et al. |
6296555 | October 2, 2001 | Inaba et al. |
6305695 | October 23, 2001 | Wilson |
6315649 | November 13, 2001 | Hu et al. |
6358129 | March 19, 2002 | Dow |
6494769 | December 17, 2002 | Sinclair et al. |
6666948 | December 23, 2003 | Nguyen |
6722965 | April 20, 2004 | Zuniga et al. |
6739958 | May 25, 2004 | Chao et al. |
6852019 | February 8, 2005 | Togawa et al. |
6857945 | February 22, 2005 | Chen et al. |
6872130 | March 29, 2005 | Zuniga |
6890402 | May 10, 2005 | Gunji et al. |
6923714 | August 2, 2005 | Zuniga et al. |
6988942 | January 24, 2006 | Chen et al. |
7025664 | April 11, 2006 | Korovin et al. |
7033260 | April 25, 2006 | Togawa et al. |
7083507 | August 1, 2006 | Togawa et al. |
7235139 | June 26, 2007 | Boguslavskiy et al. |
D546784 | July 17, 2007 | Hayashi |
D548705 | August 14, 2007 | Hayashi |
7255771 | August 14, 2007 | Chen et al. |
7311585 | December 25, 2007 | Togawa et al. |
7357699 | April 15, 2008 | Togawa et al. |
7402098 | July 22, 2008 | Severson et al. |
7479304 | January 20, 2009 | Sun et al. |
7491117 | February 17, 2009 | Togawa et al. |
7632173 | December 15, 2009 | Togawa et al. |
7635292 | December 22, 2009 | Togawa et al. |
D609652 | February 9, 2010 | Nagasaka et al. |
D609655 | February 9, 2010 | Sugimoto |
D616390 | May 25, 2010 | Sato |
D633452 | March 1, 2011 | Namiki et al. |
D634719 | March 22, 2011 | Yasuda et al. |
D638523 | May 24, 2011 | Yoshida et al. |
7988537 | August 2, 2011 | Togawa et al. |
8021215 | September 20, 2011 | Zuniga et al. |
D649126 | November 22, 2011 | Takahashi |
D650053 | December 6, 2011 | Douglass, III |
D655797 | March 13, 2012 | Muramatsu |
8202140 | June 19, 2012 | Hong et al. |
D681176 | April 30, 2013 | Chacko |
8454413 | June 4, 2013 | Oh et al. |
8469776 | June 25, 2013 | Zuniga et al. |
D696751 | December 31, 2013 | Beagen, Jr. |
D711330 | August 19, 2014 | Fukushima et al. |
8808062 | August 19, 2014 | Oh et al. |
8859070 | October 14, 2014 | Yasuda et al. |
8932106 | January 13, 2015 | Fukushima et al. |
8939817 | January 27, 2015 | Son |
20020086624 | July 4, 2002 | Zuniga et al. |
20030057089 | March 27, 2003 | Nguyen |
20030171076 | September 11, 2003 | Molone et al. |
20040175951 | September 9, 2004 | Chen |
20080070479 | March 20, 2008 | Nabeya et al. |
20080119119 | May 22, 2008 | Zuniga et al. |
20090233532 | September 17, 2009 | Togawa et al. |
20090247057 | October 1, 2009 | Kobayashi et al. |
20130316628 | November 28, 2013 | Jang et al. |
2005-0814728 | September 2007 | EP |
2000-167762 | June 2000 | JP |
2000-301452 | October 2000 | JP |
2002-075936 | March 2002 | JP |
2002-527894 | August 2002 | JP |
2004-297029 | October 2004 | JP |
2004-363505 | December 2004 | JP |
2006-159392 | June 2006 | JP |
2006-255851 | September 2006 | JP |
3937368 | April 2007 | JP |
30-0526799 | April 2009 | KR |
30-0526801 | April 2009 | KR |
Patent History
Patent number: D729753
Type: Grant
Filed: Jul 10, 2014
Date of Patent: May 19, 2015
Assignee: Ebara Corporation (Tokyo)
Inventors: Makoto Fukushima (Tokyo), Hozumi Yasuda (Tokyo), Osamu Nabeya (Tokyo), Katsuhide Watanabe (Tokyo), Keisuke Namiki (Tokyo)
Primary Examiner: Selina Sikder
Application Number: 29/496,207
Type: Grant
Filed: Jul 10, 2014
Date of Patent: May 19, 2015
Assignee: Ebara Corporation (Tokyo)
Inventors: Makoto Fukushima (Tokyo), Hozumi Yasuda (Tokyo), Osamu Nabeya (Tokyo), Katsuhide Watanabe (Tokyo), Keisuke Namiki (Tokyo)
Primary Examiner: Selina Sikder
Application Number: 29/496,207
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)