Plasma chamber liner
Latest Applied Materials, Inc. Patents:
Description
Claims
The ornamental design for a plasma chamber liner, as shown and described.
Referenced Cited
U.S. Patent Documents
Other references
| 5964947 | October 12, 1999 | Zhao |
| 6277237 | August 21, 2001 | Schoepp |
| 6374871 | April 23, 2002 | Donohoe |
| 7011039 | March 14, 2006 | Mohn |
| D583838 | December 30, 2008 | Schmitz |
| D658691 | May 1, 2012 | Suzuki |
| D658692 | May 1, 2012 | Suzuki |
| D658693 | May 1, 2012 | Suzuki |
| D678228 | March 19, 2013 | Suzuki |
| D699692 | February 18, 2014 | Yousif |
| D716239 | October 28, 2014 | Lau |
| D716240 | October 28, 2014 | Lau |
| 8858754 | October 14, 2014 | Horiguchi |
| D717746 | November 18, 2014 | Lau |
| 8980005 | March 17, 2015 | Carlson et al. |
| D802545 | November 14, 2017 | Tauchi |
| D804436 | December 5, 2017 | Tauchi |
| D812578 | March 13, 2018 | Uemura |
| 20010054381 | December 27, 2001 | Umotoy |
| 20020069970 | June 13, 2002 | Noorbakhsh |
| 20040033385 | February 19, 2004 | Kaushal |
| 20040206309 | October 21, 2004 | Bera |
| 20050224180 | October 13, 2005 | Bera |
| 20050229849 | October 20, 2005 | Silvetti |
| 20090188625 | July 30, 2009 | Carducci |
| 20140116366 | May 1, 2014 | Harman |
| 20140322897 | October 30, 2014 | Samir et al. |
- Search Report for Taiwan Design Application No. 106306241 dated Jun. 6, 2018.
- Japanese Office Action for Application No. JP 2017-024106 dated Apr. 10, 2018.
- Japanese Office Action for Application No. JP 2017-024107 dated Apr. 10, 2018.
Patent History
Patent number: D842259
Type: Grant
Filed: Apr 28, 2017
Date of Patent: Mar 5, 2019
Assignee: Applied Materials, Inc. (Santa Clara, CA)
Inventor: Eric Kihara Shono (San Mateo, CA)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/602,207
Type: Grant
Filed: Apr 28, 2017
Date of Patent: Mar 5, 2019
Assignee: Applied Materials, Inc. (Santa Clara, CA)
Inventor: Eric Kihara Shono (San Mateo, CA)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/602,207
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)