Electrode plate peripheral ring for a plasma processing apparatus

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Description

This application contains subject matter related to the following co-pending U.S. design patent applications:

Application Ser. No. 29/635,287, filed herewith and entitled “Electrode Plate for a Plasma Processing Apparatus”;

Application Ser. No. 29/635,289, filed herewith and entitled “Gas Ring for a Plasma Processing Apparatus”; and

Application Ser. No. 29/635,292, filed herewith and entitled “Electrode Cover for a Plasma Processing Apparatus”.

FIG. 1 is a front, bottom and right side perspective view of an electrode plate peripheral ring for a plasma processing apparatus according to the design;

FIG. 2 is a rear, bottom and left side perspective view thereof;

FIG. 3 is a front elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof;

FIG. 8 is a rear elevational view thereof;

FIG. 9 is a cross-sectional view taken along line 9-9 of FIG. 3;

FIG. 10 is a cross-sectional view taken along line 10-10 of FIG. 3;

FIG. 11 is an enlarged view of the portion shown in BOX 11 in FIG. 9;

FIG. 12 is an enlarged view of the portion shown in BOX 12 in FIG. 11; and,

FIG. 13 is a rear, bottom and left side perspective view of a cross-sectional view taken along line 10-10 of FIG. 3.

The broken lines in FIG. 9 show the boundary of the enlarged portion illustrated in FIG. 11 and form no part of the claimed design. The broken lines in FIG. 11 show the boundary of the enlarged portion illustrated in FIG. 12 and form no part of the claimed design.

Claims

The ornamental design for an electrode plate peripheral ring for a plasma processing apparatus, as shown and described.

Referenced Cited
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Other references
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  • Isozaki et al., Design U.S. Appl. No. 29/635,287, filed Jan. 30, 2018.
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  • Isozaki et al., Design U.S. Appl. No. 29/635,292, filed Jan. 30, 2018.
Patent History
Patent number: D871609
Type: Grant
Filed: Jan 30, 2018
Date of Patent: Dec 31, 2019
Assignee: Hitachi High-Technologies Corporation (Tokyo)
Inventors: Masakazu Isozaki (Tokyo), Masahito Mori (Tokyo), Kenetsu Yokogawa (Tokyo), Takao Arase (Tokyo), Takahisa Hashimoto (Tokyo)
Primary Examiner: Susan Bennett Hattan
Assistant Examiner: Omeed Agilee
Application Number: 29/635,296