Target profile for a physical vapor deposition chamber target

- APPLIED MATERIALS, INC.
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Description

FIG. 1 is a top perspective view of a target profile for a physical vapor deposition chamber target, showing our new design;

FIG. 2 is a bottom perspective view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a right side elevation view thereof;

FIG. 6 is a left side elevation view thereof;

FIG. 7 is a front elevation view thereof;

FIG. 8 is a back elevation view thereof; and,

FIG. 9 is an enlarged cross sectional view taken along line 9-9 in FIG. 4.

Claims

The ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.

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Patent History
Patent number: D877101
Type: Grant
Filed: Mar 9, 2018
Date of Patent: Mar 3, 2020
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: William R. Johanson (Gilroy, CA), Kirankumar Neelasandra Savandaiah (Bangalore), Prashant Prabhakar Prabhu (Karwar)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/639,953