With Floating Gate Electrode Patents (Class 257/315)
  • Patent number: 10714582
    Abstract: A Field-Effect Transistor (FET) with a negative capacitance layer to increase power density provides a negative capacitor connected in series with a conventional positive capacitor. The dimensions of the negative capacitor are controlled to allow the difference in capacitances between the negative capacitor and the positive capacitor to approach zero, which in turn provides a large total capacitance. The large total capacitance provides for increased power density.
    Type: Grant
    Filed: June 7, 2018
    Date of Patent: July 14, 2020
    Assignee: QUALCOMM Incorporated
    Inventors: Bin Yang, Ye Lu, Lixin Ge
  • Patent number: 10714489
    Abstract: A memory device with a memory cell and control circuitry. The memory cell includes source and drain regions formed in a semiconductor substrate, with a channel region extending there between. A floating gate is disposed over a first portion of the channel region for controlling its conductivity. A select gate is disposed over a second portion of the channel region for controlling its conductivity. A control gate is disposed over the floating gate. An erase gate is disposed over the source region and adjacent to the floating gate. The control circuitry is configured to perform a program operation by applying a negative voltage to the erase gate for causing electrons to tunnel from the erase gate to the floating gate, and perform an erase operation by applying a positive voltage to the erase gate for causing electrons to tunnel from the floating gate to the erase gate.
    Type: Grant
    Filed: December 4, 2018
    Date of Patent: July 14, 2020
    Assignee: Silicon Storage Technology, Inc.
    Inventors: Yuri Tkachev, Alexander Kotov, Nhan Do
  • Patent number: 10700077
    Abstract: A memory cell, e.g., a flash memory cell, includes a substrate, a flat-topped floating gate formed over the substrate, and a flat-topped oxide region formed over the flat-topped floating gate. The flat-topped floating gate may have a sidewall with a generally concave shape that defines an acute angle at a top corner of the floating gate, which may improve a program or erase efficiency of the memory cell. The flat-topped floating gate and overlying oxide region may be formed with without a floating gate thermal oxidation that forms a conventional “football oxide.” A word line and a separate erase gate may be formed over the floating gate and oxide region. The erase gate may overlap the floating gate by a substantially greater distance than the word line overlaps the floating gate, which may allow the program and erase coupling to the floating gate to be optimized independently.
    Type: Grant
    Filed: March 15, 2018
    Date of Patent: June 30, 2020
    Assignee: MICROCHIP TECHNOLOGY INCORPORATED
    Inventors: Mel Hymas, James Walls, Sonu Daryanani
  • Patent number: 10685885
    Abstract: A semiconductor device includes a substrate, an isolation structure, and a gate structure. The substrate has an active area. The isolation structure surrounds the active area of the substrate. The gate structure is across the active area of the substrate. The isolation structure has a first portion under the gate structure and a second portion adjacent to the gate structure. A top surface of the first portion of the isolation structure is lower than a top surface of the second portion of the isolation structure.
    Type: Grant
    Filed: April 2, 2018
    Date of Patent: June 16, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Long-Jie Hong, Chih-Lin Wang, Kang-Min Kuo
  • Patent number: 10685970
    Abstract: A method of forming a low-cost and compact hybrid SOI and bulk MTP cell and the resulting devices are provided. Embodiments include forming a bulk region in a SOI wafer; forming an NW in the bulk region and a PW in a remaining SOI region of the SOI wafer; forming first and second pairs of common FG stacks over both of the SOI and bulk regions; forming a first shared N+ RSD between each common FG stack of the first and second pairs in a top Si layer; forming a N+ RSD in the top Si layer of the SOI region on an opposite side of each common FG stack from the first shared N+ RSD; forming a second shared N+ RSD between each common FG stack in the bulk region; and forming a P+ RSD between the first and second pairs in the bulk region.
    Type: Grant
    Filed: June 6, 2018
    Date of Patent: June 16, 2020
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Eng Huat Toh, Shyue Seng Tan, Danny Pak-Chum Shum
  • Patent number: 10685971
    Abstract: A 3D memory device includes a substrate, a plurality of conductive layers, a plurality of insulating layers, a memory layer and a channel layer. The insulating layers are alternately stacked with the conductive layers on the substrate to form a multi-layers stacking structure, wherein the multi-layers stacking structure has at least one trench penetrating through the insulating layers and the conductive layers. The memory layer covers on the multi-layers stacking structure and at least extends onto a sidewall of the trench. The cannel layer covers on the memory layer and includes an upper portion adjacent to an opening of the trench, a lower portion adjacent to a bottom of the trench and a string portion disposed on the sidewall, wherein the string portion connects the upper portion with the lower portion and has a doping concentration substantially lower than that of the upper portion and lower portion.
    Type: Grant
    Filed: October 15, 2018
    Date of Patent: June 16, 2020
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Yu-Wei Jiang, Chieh-Fang Chen, Jia-Rong Chiou
  • Patent number: 10670936
    Abstract: Process for forming a multi-layer electrochromic structure, the process comprising depositing a film of a liquid mixture onto a surface of a substrate, and treating the deposited film to form an anodic electrochromic layer, the liquid mixture comprising a continuous phase and a dispersed phase, the dispersed phase comprising metal oxide particles, metal hydroxide particles, metal alkoxide particles, metal alkoxide oligomers, gels or particles, or a combination thereof having a number average size of at least 5 nm.
    Type: Grant
    Filed: July 22, 2015
    Date of Patent: June 2, 2020
    Assignee: KINESTRAL TECHNOLOGIES, INC.
    Inventors: Hye Jin Choi, John David Bass, Eric Lachman, Daniel Mark Giaquinta, Howard W. Turner, Ellen Murphy
  • Patent number: 10672794
    Abstract: According to an embodiment, a semiconductor memory device comprises: a semiconductor substrate; a memory cell array configured having a plurality of memory units, each of the memory units including a plurality of memory cells connected in series, the plurality of memory cells being stacked, the plurality of memory units involving a first memory unit and a second memory unit; and a plurality of bit lines connected to ends of each of the memory units in the memory cell array. The first memory unit and the second memory unit are arranged in a staggered manner by the first memory unit being displaced in a row direction with respect to the second memory unit by an amount less than an arrangement pitch in a row direction of the first memory unit or the second memory unit.
    Type: Grant
    Filed: May 15, 2019
    Date of Patent: June 2, 2020
    Assignee: Toshiba Memory Corporation
    Inventor: Fumihiro Kono
  • Patent number: 10665531
    Abstract: In an embodiment, a semiconductor device includes a semiconductor substrate having a front surface, a lateral transistor arranged in the front surface of the semiconductor substrate and having an intrinsic source, and a through substrate via. A first conductive layer lines side walls of the through substrate via and extends from the through substrate via onto the front surface of the semiconductor substrate and is electrically coupled with the intrinsic source of the lateral transistor.
    Type: Grant
    Filed: February 11, 2019
    Date of Patent: May 26, 2020
    Assignee: Infineon Technologies AG
    Inventors: Albert Birner, Helmut Brech, Matthias Zigldrum
  • Patent number: 10651378
    Abstract: Techniques for fabricating a volatile memory structure having a transistor and a memory component is described. The volatile memory structure comprises the memory component formed on a substrate, wherein a first shape comprising one or more pointed edges is formed on a first surface of the memory component. The volatile memory structure further comprises transistor formed on the substrate and electrically coupled to the memory component to share operating voltage, wherein operating voltage applied to the transistor flows to the memory component.
    Type: Grant
    Filed: October 25, 2018
    Date of Patent: May 12, 2020
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Kangguo Cheng, Choonghyun Lee, Juntao Li, Peng Xu
  • Patent number: 10644019
    Abstract: A semiconductor device includes a peripheral circuit region on a substrate, a polysilicon layer on the peripheral circuit region, a memory cell array region on the polysilicon layer and overlapping the peripheral circuit region, the peripheral circuit region being under the memory cell array region, an upper interconnection layer on the memory cell array region, and a vertical contact through the memory cell array region and the polysilicon layer, the vertical contact connecting the upper interconnection layer to the peripheral circuit region.
    Type: Grant
    Filed: April 26, 2019
    Date of Patent: May 5, 2020
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Yoo-cheol Shin, Young-woo Park, Jae-duk Lee
  • Patent number: 10644012
    Abstract: A method of forming a memory device including a plurality of upwardly extending fins in a semiconductor substrate upper surface. A memory cell is formed on a first fin, and includes spaced apart source and drain regions in the first fin, with a channel region extending along top and opposing side surfaces of the first fin between the source and drain regions. A floating gate extends along a first portion of the channel region. A select gate extends along a second portion of the channel region. A control gate extends along the floating gate. An erase gate extends along the source region. A second fin has a length that extends in a first direction which is perpendicular to a second direction in which a length of the first fin extends. The source region is formed in the first fin at an intersection of the first and second fins.
    Type: Grant
    Filed: May 24, 2019
    Date of Patent: May 5, 2020
    Assignee: Silicon Storage Technology, Inc.
    Inventors: Serguei Jourba, Catherine Decobert, Feng Zhou, Jinho Kim, Xian Liu, Nhan Do
  • Patent number: 10636867
    Abstract: A method of forming an integrated circuit with a metal-insulator-poly (MIP) capacitor formed in a high-k metal gate (HKMG) process and the resulting device are provided. Embodiments include a device including a metal gate; a high-k dielectric layer formed around side walls of the metal gate, and a dummy polysilicon gate adjacent to at least one portion of the high-k dielectric layer. The device also includes a capacitor including the HK layer as an insulator, wherein the insulator is between a dummy as one electrode and the metal gate as another electrode.
    Type: Grant
    Filed: July 11, 2018
    Date of Patent: April 28, 2020
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Xinshu Cai, Shyue Seng Tan, Juan Boon Tan, Danny Pak-Chum Shum
  • Patent number: 10636910
    Abstract: A semiconductor device is provided, which includes a substrate, a fin structure, a capping layer and an oxide layer. The substrate has a well. The fin structure extends from the well. The capping layer surrounds a top surface and side surfaces of the fin structure. The oxide layer is over the substrate and covers the capping layer. A thickness of a top portion of the oxide layer above the capping layer is greater than a thickness of a sidewall portion of the oxide layer.
    Type: Grant
    Filed: June 22, 2017
    Date of Patent: April 28, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Kuo-Cheng Ching, Kuan-Ting Pan, Kuan-Lun Cheng, Chih-Hao Wang
  • Patent number: 10608001
    Abstract: A nonvolatile memory device includes a plurality of unit cells. Each of the plurality of unit cells includes a first active region disposed in a substrate to extend in a first direction, a floating gate extending in a second direction to cross over the first active region, a first selection gate disposed to be adjacent to a first side surface of the floating gate to cross over the first active region, a second selection gate disposed to be adjacent to a second side surface of the floating gate opposite to the first selection gate to cross over the first active region, a first dielectric layer disposed between the floating gate and the first selection gate, and a second dielectric layer disposed between the floating gate and the second selection gate.
    Type: Grant
    Filed: December 6, 2018
    Date of Patent: March 31, 2020
    Assignee: SK hynix system ic Inc.
    Inventor: Kwang Il Choi
  • Patent number: 10600797
    Abstract: An electrically erasable programmable nonvolatile memory cell includes a semiconductor substrate having a first substrate region and a trench region apart from the first substrate region in a lateral direction, a channel region between the first substrate region and the bottom portion of the trench region, an electrically conductive control gate insulated from and disposed over the first channel portion, an electrically conductive floating gate insulated from the bottom and sidewall portions of the trench region, an insulation region disposed over the second channel portion between the control gate and the second floating gate portion, an electrically conductive source line insulated from the floating gate and electrically connected to the trench region of the substrate, and an electrically conductive erase gate insulated from and disposed over a tip of the floating gate.
    Type: Grant
    Filed: September 5, 2018
    Date of Patent: March 24, 2020
    Assignee: GREENLIANT IP LLC
    Inventor: Bing Yeh
  • Patent number: 10601417
    Abstract: A switching circuit includes a printed circuit board that supports a switching element, a positive power supply circuit, a negative power supply circuit and a driving circuit thereon. The positive power supply circuit generates a positive voltage relative to a GND potential. The negative power supply circuit generates a negative voltage relative to the GND potential. The driving circuit supplies the gate electrode with the positive voltage and the negative voltage when turn on and off the switching element, respectively. The printed circuit board includes wiring as a conducting path extended from the negative power supply circuit to the gate electrode via the driving circuit. The conducting path includes a negative power supply wiring between the negative power supply circuit and the driving circuit. The negative power supply wiring at least partially includes a negative power supply solid pattern.
    Type: Grant
    Filed: June 18, 2019
    Date of Patent: March 24, 2020
    Assignee: DENSO CORPORATION
    Inventors: Yosuke Watanabe, Tomotaka Suzuki
  • Patent number: 10593675
    Abstract: Methods of maintaining a state of a memory cell without interrupting access to the memory cell are provided, including applying a back bias to the cell to offset charge leakage out of a floating body of the cell, wherein a charge level of the floating body indicates a state of the memory cell; and accessing the cell.
    Type: Grant
    Filed: September 17, 2019
    Date of Patent: March 17, 2020
    Assignee: Zeno Semiconductor, Inc.
    Inventors: Yuniarto Widjaja, Zvi Or-Bach
  • Patent number: 10593685
    Abstract: A semiconductor device includes a semiconductor layer having a main surface, a gate insulating film including a thin film portion forming a tunnel window, a thick film portion formed around the thin film portion and having a thickness larger than a thickness of the thin film portion, and an inclined portion connecting the thin film portion and the thick film portion and inclined upward from the thin film portion toward the thick film portion, and covering the main surface of the semiconductor layer, a memory gate structure formed on the thin film portion of the gate insulating film, and a select gate structure formed on the thick film portion of the gate insulating film.
    Type: Grant
    Filed: October 10, 2018
    Date of Patent: March 17, 2020
    Assignee: ROHM CO., LTD.
    Inventors: Toshiyuki Kanaya, Tsuyoshi Hosono
  • Patent number: 10586797
    Abstract: A vertical memory device includes a substrate with a cell array region, a word line contact region, and a peripheral circuit region, gate electrodes parallel to the substrate in the cell array and word line contact regions, the gate electrodes being stacked and spaced apart in a direction perpendicular to the substrate, a channel structure through the gate electrodes in the cell array region, the channel structure being electrically connected to the substrate, a dummy channel structure through the gate electrodes in the word line contact region, the dummy channel structure being spaced apart from the substrate, and a conductive line parallel to the substrate and electrically connected to a first gate electrode, the conductive line crossing at least a portion of an extension of the dummy channel structure in the perpendicular direction.
    Type: Grant
    Filed: April 13, 2017
    Date of Patent: March 10, 2020
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Kyoung-hoon Kim, Hong-soo Kim
  • Patent number: 10553597
    Abstract: A memory cell includes a first transistor coupled to a source line, wherein the first transistor is in a first well. The memory cell further includes a second transistor coupled to the first transistor and a bit line, wherein the second transistor is in the first well. The memory cell further includes a first capacitor coupled to a word line and the second transistor, wherein the first capacitor is in a second well. The memory cell further includes a second capacitor coupled to the second transistor and an erase gate, wherein the second capacitor is in the second well. In some embodiments, the first well contacts the second well on a first side of the first well.
    Type: Grant
    Filed: December 24, 2018
    Date of Patent: February 4, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shih-Hsien Chen, Liang-Tai Kuo, Hau-Yan Lu, Chun-Yao Ko
  • Patent number: 10553596
    Abstract: A split-gate flash memory cell (cell) that can be formed by a method including self-aligned patterning for the select gates includes a semiconductor surface. A first control gate (CG) on a first floating gate (FG) and a second CG on a second FG are on the semiconductor surface. A common source/drain is between the first and second FG. A first select gate and a second select gate are on a select gate dielectric layer that is between a first BL source/drain in the semiconductor surface and the first FG and between a second BL source/drain and the second FG, respectively. The first select gate and the second select gate are spacer-shaped.
    Type: Grant
    Filed: May 4, 2018
    Date of Patent: February 4, 2020
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Xiangzheng Bo, Douglas Tad Grider, III, John MacPeak
  • Patent number: 10546860
    Abstract: NAND string configurations and semiconductor memory arrays that include such NAND string configurations are provided. Methods of making semiconductor memory cells used in NAND string configurations are also described.
    Type: Grant
    Filed: September 17, 2018
    Date of Patent: January 28, 2020
    Assignee: Zeno Semiconductor, Inc.
    Inventors: Benjamin S. Louie, Jin-Woo Han, Yuniarto Widjaja
  • Patent number: 10541248
    Abstract: A semiconductor memory device includes a stack of word lines and insulating patterns. Cell pillars extend vertically through the stack of word lines and insulating patterns with memory cells being formed at the junctions of the cell pillars and the word lines. A ratio of the thickness of the word lines to the thickness of immediately neighboring insulating patterns is different at different locations along one or more of the cell pillars. Related methods of manufacturing and systems are also disclosed.
    Type: Grant
    Filed: July 26, 2018
    Date of Patent: January 21, 2020
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Taekyung Kim, Kwang Soo Seol, Seong Soon Cho, Sunghoi Hur, Jintae Kang
  • Patent number: 10522460
    Abstract: A memory device includes a first conductive layer; a second conductive layer provided above the first conductive layer; a plurality of electrode layers stacked above the second conductive layer; a semiconductor pillar extending through the plurality of electrode layers and the second conductive layer, and connected to the first conductive layer; and a third conductive layer provided above the first conductive layer. The third conductive layer is positioned at a level substantially same as a level of the second conductive layer in an extension direction of the semiconductor pillar, and is made of a material same as a material of the second conductive layer. The third conductive layer is electrically isolated from the second conductive layer, and is electrically connected to the first conductive layer.
    Type: Grant
    Filed: December 27, 2017
    Date of Patent: December 31, 2019
    Assignee: Toshiba Memory Corporation
    Inventors: Daigo Ichinose, Shigehiro Yamakita
  • Patent number: 10522563
    Abstract: A semiconductor device includes a first channel layer and a second channel layer, each extending from an upper portion to a lower portion; and word lines stacked toward the upper portion from the lower portion, the word lines spaced apart from each other, the word lines each extending to surround the first channel layer and the second layer; a first lower select group surrounding a portion of the first channel layer that further protrudes toward the lower portion than the word lines; and a second lower select group surrounding a portion of the second channel layer that further protrudes toward the lower portion than the word lines.
    Type: Grant
    Filed: April 25, 2019
    Date of Patent: December 31, 2019
    Assignee: SK hynix Inc.
    Inventor: Nam Jae Lee
  • Patent number: 10522545
    Abstract: An integrated circuit device includes a substrate, first and second fin-type active areas which extend in a first direction on the substrate, first and second gate lines on the substrate that extend in a second direction that crosses the first direction, and first and second contact structures. The first and second gate lines intersect the first and second fin-type active areas, respectively. The first contact structure is on the first fin-type active area at a side of the first gate line and contacts the first gate line. The second contact structure is on the second fin-type active area at a side of the second gate line. The first contact structure includes a first lower contact including metal silicide and a first upper contact on the first lower contact. The second contact structure includes a second lower contact including metal silicide and a second upper contact on the second lower contact.
    Type: Grant
    Filed: January 18, 2018
    Date of Patent: December 31, 2019
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Jae-yup Chung
  • Patent number: 10522551
    Abstract: A semiconductor device includes a first circuit structure and a second circuit structure. The first circuit structure has a first line terminal. The second circuit structure has a second line terminal. The first line terminal and the second line terminal are formed in a first circuit layer but separated by a gap. A conductive structure is forming in a second circuit layer above or below the first circuit layer, to electrically connect the first line terminal and the second line terminal.
    Type: Grant
    Filed: January 30, 2018
    Date of Patent: December 31, 2019
    Assignee: United Microelectronics Corp.
    Inventors: Chun-Hsien Huang, Ching-Cheng Lung, Yu-Tse Kuo, Chang-Hung Chen, Shu-Ru Wang, Wei-Chi Lee, Chun-Yen Tseng
  • Patent number: 10510902
    Abstract: Representative methods of manufacturing memory devices include forming a transistor with a gate disposed over a workpiece, and forming an erase gate with a tip portion extending towards the workpiece. The transistor includes a source region and a drain region disposed in the workpiece proximate the gate. The erase gate is coupled to the gate of the transistor.
    Type: Grant
    Filed: August 6, 2018
    Date of Patent: December 17, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventors: Alexander Kalnitsky, Hsiao-Chin Tuan, Felix Ying-Kit Tsui, Hau-Yan Lu
  • Patent number: 10509169
    Abstract: A semiconductor structure is disclosed. The semiconductor structure includes: a substrate and a gate element over the substrate. The gate element includes: a gate dielectric layer over the substrate; a gate electrode over the gate dielectric layer; and a waveguide passing through the gate electrode from a top surface of the gate electrode to a bottom surface of the gate electrode. A manufacturing method of the same is also disclosed.
    Type: Grant
    Filed: January 19, 2018
    Date of Patent: December 17, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Yung-Chang Chang, Chung-Yen Chou, Ming-Chyi Liu, Shih-Chang Liu
  • Patent number: 10504910
    Abstract: A memory cell for a printhead includes a substrate with a source and a drain. The substrate further includes a channel located between the source and the drain and surrounding the drain. The drain can include a first rounded closed curved structure. The memory cell can include a floating gate and a control gate. The floating gate can include a second rounded closed curve structure located above the channel and below the control gate. The control gate is capacitively coupled to the floating gate.
    Type: Grant
    Filed: November 15, 2016
    Date of Patent: December 10, 2019
    Assignee: HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.
    Inventors: Reynaldo V. Villavelez, Paul I. Mikulan
  • Patent number: 10497707
    Abstract: Some embodiments include a transistor having a first electrically conductive gate portion along a first segment of a channel region and a second electrically conductive gate portion along a second segment of the channel region. The second electrically conductive gate portion is a different composition than the first electrically conductive gate portion. Some embodiments include a method of forming a semiconductor construction. First semiconductor material and metal-containing material are formed over a NAND string. An opening is formed through the metal-containing material and the first semiconductor material, and is lined with gate dielectric. Second semiconductor material is provided within the opening to form a channel region of a transistor. The transistor is a select device electrically coupled to the NAND string.
    Type: Grant
    Filed: February 22, 2017
    Date of Patent: December 3, 2019
    Assignee: Micron Technology, Inc.
    Inventors: Deepak Thimmegowda, Andrew R. Bicksler, Roland Awusie
  • Patent number: 10490671
    Abstract: A logic circuit includes a thin film transistor having a channel formation region formed using an oxide semiconductor, and a capacitor having terminals one of which is brought into a floating state by turning off the thin film transistor. The oxide semiconductor has a hydrogen concentration of 5×1019 (atoms/cm3) or less and thus substantially serves as an insulator in a state where an electric field is not generated. Therefore, off-state current of a thin film transistor can be reduced, leading to suppressing the leakage of electric charge stored in a capacitor, through the thin film transistor. Accordingly, a malfunction of the logic circuit can be prevented. Further, the excessive amount of current which flows in the logic circuit can be reduced through the reduction of off-state current of the thin film transistor, resulting in low power consumption of the logic circuit.
    Type: Grant
    Filed: November 9, 2015
    Date of Patent: November 26, 2019
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Jun Koyama, Masashi Tsubuku, Kosei Noda
  • Patent number: 10483155
    Abstract: The present disclosure includes semiconductor structures and methods of forming semiconductor structures for trench isolation interfaces. An example semiconductor structure includes a semiconductor substrate having a shallow trench isolation (STI) structure with a trench formed therein. An material in the trench forms a charged interface by interaction with the semiconductor substrate of the STI structure. The formed charged interface raises a parasitic threshold of the STI structure.
    Type: Grant
    Filed: April 26, 2019
    Date of Patent: November 19, 2019
    Assignee: Micron Technology, Inc.
    Inventor: Arup Bhattacharyya
  • Patent number: 10475917
    Abstract: A MOSFET includes a semiconductor base substrate where a super junction structure is formed of an n-type column region and a p-type column region. A total amount of a dopant in the n-type column region is set to a value greater than a total amount of a dopant in the p-type column region. The MOSFET is configured to be operated during a period from a point of time when a drain current starts to decrease to a point of time when the drain current becomes 0 for the first time in response to turning off of the MOSFET such that a first period during which the drain current is decreased, a second period during which the drain current is increased or the drain current becomes constant, and a third period during which the drain current is decreased again occur in this order.
    Type: Grant
    Filed: May 21, 2018
    Date of Patent: November 12, 2019
    Assignee: SHINDENGEN ELECTRIC MANUFACTURING CO., LTD.
    Inventors: Daisuke Arai, Shigeru Hisada, Mizue Kitada, Takeshi Asada
  • Patent number: 10468538
    Abstract: A method for fabricating semiconductor device includes providing a substrate having a first device region and a second device region. Floating gate structure is formed in the first device region. Liner layer and nitride layer are sequentially deposited over the first device region and the second device region. The floating gate structure is conformally covered. Etching back process is performed on the nitride layer to reduce thickness of the nitride layer. The first device region is still covered by the nitride layer. A photomask layer is formed over the substrate with an opening region to expose the second device region for cleaning. The photomask layer is removed. A gate oxide layer grows on the substrate in the second device region. Anisotropic etching process is performed to remove the nitride layer, resulting in a nitride spacer on a lower portion of a sidewall of the floating gate structure.
    Type: Grant
    Filed: July 17, 2018
    Date of Patent: November 5, 2019
    Assignee: United Microelectronics Corp.
    Inventors: Chih-Haw Lee, Tzu-Ping Chen
  • Patent number: 10461091
    Abstract: A NAND flash memory device having a facing bar and a method of fabricating the same are provided. The method includes forming one transistor or a plurality of stack transistors as cell transistors on two side surfaces of a facing bar to have transmission channels thereat. In this case, the height of the facing bar may be easily increased. Thus, not only a layout area of unit transistors including the cell transistors but also a layout area of cell strings may be minimized, and lengths of the transmission channels of the cell transistors may be sufficiently extended. As a result, according to the NAND flash memory device and the method of fabricating the same, the overall operating characteristics are improved.
    Type: Grant
    Filed: December 15, 2017
    Date of Patent: October 29, 2019
    Assignee: DOSILICON CO., LTD.
    Inventors: Jin Ho Kim, Tae Gyoung Kang
  • Patent number: 10453707
    Abstract: A method for fabricating a semiconductor device, the method including forming a mold structure on a substrate such that the mold structure includes alternately and repeatedly stacked interlayer insulating films and sacrificial films; forming a channel hole passing through the mold structure; forming a vertical channel structure within the channel hole; exposing a surface of the interlayer insulating films by removing the sacrificial films; forming an aluminum oxide film along a surface of the interlayer insulating films; forming a continuous film on the aluminum oxide film; and nitriding the continuous film to form a TiN film.
    Type: Grant
    Filed: October 24, 2017
    Date of Patent: October 22, 2019
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Yong Seok Cho, Hyung Joon Kim, Jung Ho Kim, Joong Yun Ra, Bi O Kim, Jae Young Ahn, Ki Yong Oh, Sung Hae Lee
  • Patent number: 10446402
    Abstract: The present disclosure provides semiconductor devices and fabrication methods thereof. A work function layer is formed on the semiconductor substrate. A buffer layer is formed on the work function layer. The work function layer is doped through the buffer layer with impurity ions. The buffer layer obstructs a flow of the impurity ions to control a concentration of the impurity ions in different regions of the work function layer to regulate a work function of the work function layer in the different regions.
    Type: Grant
    Filed: September 7, 2017
    Date of Patent: October 15, 2019
    Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventor: Jie Zhao
  • Patent number: 10446543
    Abstract: A semiconductor device of the present invention includes, in a region 1C, a top electrode made by a semiconductor layer of an SOI substrate, a capacitive insulating film made by an insulating layer, a bottom electrode made by a supporting board, and a lead part (a high-concentration impurity region of an n type) of the bottom electrode coupled to the supporting board. An SOI transistor in a region 1B is formed over a main surface of the semiconductor layer over the insulating layer as a thin film, and threshold voltage can be adjusted by applying a voltage to a well arranged on the rear face side of the insulating layer.
    Type: Grant
    Filed: October 29, 2017
    Date of Patent: October 15, 2019
    Assignee: Renesas Electronics Corporation
    Inventors: Shinichi Uchida, Takafumi Kuramoto, Yasutaka Nakashiba
  • Patent number: 10446234
    Abstract: A timer module including a timer and a compensation circuit coupled to the timer is provided. The timer measures time over a first monitoring period. The timer includes a floating-gate and an energy barrier. The floating-gate stores electrons and has an initial state and a measured state. The measured state includes a current time and a current floating-gate voltage. The energy barrier is positioned adjacent the floating-gate and leaks electrons from an ambient environment of the timer to the floating-gate at a predetermined leakage rate using Fowler-Nordheim (FN) tunneling. The compensation circuit selectably adjusts the first monitoring period to facilitate improved robustness of the timer with respect to fabrication mismatch due to the self-compensating dynamics of FN tunneling.
    Type: Grant
    Filed: October 24, 2017
    Date of Patent: October 15, 2019
    Assignee: Washington University
    Inventors: Shantanu Chakrabartty, Liang Zhou
  • Patent number: 10439032
    Abstract: To provide a semiconductor device having improved reliability by relaxing the unevenness of the injection distribution of electrons and holes into a charge accumulation film attributable to the shape of the fin of a MONOS memory comprised of a fin transistor. Of a memory gate electrode configuring a memory cell formed above a fin, a portion contiguous to an ONO film that covers the upper surface of the fin and a portion contiguous to the ONO film that covers the side surface of the fin are made of electrode materials different in work function, respectively, and the boundary surface between them is located below the upper surface of the fin.
    Type: Grant
    Filed: May 14, 2018
    Date of Patent: October 8, 2019
    Assignee: RENESAS ELECTRONICS CORPORATION
    Inventors: Atsushi Yoshitomi, Yoshiyuki Kawashima
  • Patent number: 10418272
    Abstract: At least one method, apparatus and system providing semiconductor devices with relatively short gate heights but without a relatively high risk of contact-to-gate shorts. In embodiments, the method, apparatus, and system may provide contact formation by way of self-aligned contact processes.
    Type: Grant
    Filed: May 10, 2018
    Date of Patent: September 17, 2019
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Jiehui Shu, Garo Jacques Derderian, Hui Zang, John Zhang, Haigou Huang, Jinping Liu
  • Patent number: 10396275
    Abstract: A magnetic tunnel junction pattern includes a first magnetic layer, a tunnel barrier layer, a second magnetic layer, and a non-magnetic capping layer that are sequentially stacked on a substrate. A top electrode is disposed on the magnetic tunnel junction pattern. A bit line is disposed on the top electrode. The top electrode comprises a metal nitride pattern in contact with the non-magnetic capping layer and a metal pattern disposed on the metal nitride pattern.
    Type: Grant
    Filed: August 3, 2017
    Date of Patent: August 27, 2019
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Junghoon Bak, Hong Hyun Kim
  • Patent number: 10388378
    Abstract: A semiconductor memory cell includes a floating body region configured to be charged to a level indicative of a state of the memory cell; a first region in electrical contact with said floating body region; a second region in electrical contact with said floating body region and spaced apart from said first region; and a gate positioned between said first and second regions. The cell may be a multi-level cell. Arrays of memory cells are disclosed for making a memory device. Methods of operating memory cells are also provided.
    Type: Grant
    Filed: January 4, 2019
    Date of Patent: August 20, 2019
    Assignee: Zeno Semiconductor, Inc.
    Inventor: Yuniarto Widjaja
  • Patent number: 10381503
    Abstract: An apparatus and method, the apparatus comprising: at least one charged substrate (3); a channel of two dimensional material (5); and at least one floating electrode (7A-C) wherein the floating electrode comprises a first area (10A-C) adjacent the at least one charged substrate, a second area (11A-C) adjacent the channel of two dimensional material and a conductive interconnection (9A-C) between the first area and the second area wherein the first area is larger than the second area and wherein the at least one floating electrode is arranged to control the level of doping within the channel of two dimensional material.
    Type: Grant
    Filed: October 26, 2015
    Date of Patent: August 13, 2019
    Assignee: EMBERION OY
    Inventors: Stefano Borini, Alan Colli
  • Patent number: 10381370
    Abstract: A semiconductor device includes a peripheral circuit region on a substrate, a polysilicon layer on the peripheral circuit region, a memory cell array region on the polysilicon layer and overlapping the peripheral circuit region, the peripheral circuit region being under the memory cell array region, an upper interconnection layer on the memory cell array region, and a vertical contact through the memory cell array region and the polysilicon layer, the vertical contact connecting the upper interconnection layer to the peripheral circuit region.
    Type: Grant
    Filed: January 12, 2018
    Date of Patent: August 13, 2019
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Yoo-cheol Shin, Young-woo Park, Jae-duk Lee
  • Patent number: 10381371
    Abstract: A three dimensional NAND memory device includes word line driver devices located on or over a substrate, an alternating stack of word lines and insulating layers located over the word line driver devices, a plurality of memory stack structures extending through the alternating stack, each memory stack structure including a memory film and a vertical semiconductor channel, and through-memory-level via structures which electrically couple the word lines in a first memory block to the word line driver devices. The through-memory-level via structures extend through a through-memory-level via region located between a staircase region of the first memory block and a staircase region of another memory block.
    Type: Grant
    Filed: September 19, 2016
    Date of Patent: August 13, 2019
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventors: Hiroyuki Ogawa, Fumiaki Toyama, Yuki Mizutani
  • Patent number: 10374100
    Abstract: In one disclosed embodiment, a non-volatile memory cell is constructed using a floating gate transistor with a channel that includes a buried channel region interposed between two surface channel regions under a floating gate. The surface channel regions are formed using angled lightly-doped drain implantation at locations in the substrate so that a first surface channel region is located under a first end of the floating gate and a second surface channel region is located under a second end of the floating gate. In one embodiment, the floating gate transistor is a PMOS transistor, with the channel being formed in an n-well formed in a p-type substrate, with the buried channel region being formed using a Vtp implant, and with the surface channel regions being formed using angled NLDD implants. The surface channel regions increase the energy barrier along the channel and reduce off state current of the memory cell.
    Type: Grant
    Filed: June 29, 2017
    Date of Patent: August 6, 2019
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Doug Weiser, Jack G. Qian
  • Patent number: 10373958
    Abstract: A semiconductor device includes a semiconductor substrate having a gate trench including an upper trench and a lower trench. The upper trench is wider than the lower trench. A gate is embedded in the gate trench. The gate includes an upper portion and a lower portion. A first gate dielectric layer is between the upper portion and a sidewall of the upper trench. The first gate dielectric layer has a first thickness. A second gate dielectric layer is between the lower portion and a sidewall of the lower trench and between the lower portion and a bottom surface of the lower trench. The second gate dielectric layer has a second thickness that is smaller than the first thickness.
    Type: Grant
    Filed: January 22, 2018
    Date of Patent: August 6, 2019
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Tsuo-Wen Lu, Ger-Pin Lin, Tien-Chen Chan, Shu-Yen Chan