For Operation As Bipolar Or Punchthrough Element Patents (Class 257/361)
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Patent number: 7061051Abstract: A novel device structure and process are described for an SCR ESD protection device used with shallow trench isolation structures. The invention incorporates an SCR device with all SCR elements essentially contained within the same active area without STI elements being interposed between the device anode and cathode elements. This enhances ESD performance by eliminating thermal degradation effects caused by interposing STI structures, and enhances the parasitic bipolar characteristics essential to ESD event turn on. Enabling this unique design is the use of an insulation oxide surface feature which prevents the formation of contact salicides in unwanted areas. This design is especially suited to silicon-on-insulator design, as well as conventional SCR and LVTSCR designs.Type: GrantFiled: December 2, 2003Date of Patent: June 13, 2006Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventor: Ta-Lee Yu
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Patent number: 7061029Abstract: A high-voltage device structure disposed in a substrate of a first conductivity type includes a first well and a second well each of a second conductivity type, a source diffusion region and a drain diffusion region each of a first length located in the first well and the second well respectively, and a gate of a second length on the substrate surface. Since the gate of the second length is longer than the source diffusion region and the drain diffusion region of the first length, the two sides of the gate have two spare regions. Two windows are located in the spare regions.Type: GrantFiled: February 24, 2005Date of Patent: June 13, 2006Assignee: United Microelectronics Corp.Inventors: Wen-Fang Lee, Wei-Lun Hsu, Yu-Hsien Lin
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Patent number: 7049663Abstract: An electrostatic discharge protection device with high voltage and negative voltage tolerance is provided. The electrostatic discharge protection device comprises: a first type substrate; a first type well inside the first type substrate, the first type well being floating; a second type well inside the first type substrate, the second type well separating the first type well from the first type substrate, the second type well being coupled to a first voltage line; a second type first doped region inside the first type well and coupled to a second voltage line; a second type second doped region inside the first type well and coupled to the pad; and an isolation structure between the second type first doped region and the second type second doped region.Type: GrantFiled: September 23, 2004Date of Patent: May 23, 2006Assignee: Sunplus Technology Co,Ltd.Inventor: Tai-Ho Wang
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Patent number: 7030447Abstract: A method of providing a Transient Voltage Suppression (TVS) device is described utilizing a Metal Oxide Semiconductor (MOS) structure and an Insulated Gate Bipolar Transistor (IGBT) structure. The MOS based TVS devices offer reduced leakage current with reduced clamp voltages between 0.5 and 5 volts. Trench MOS based TVS device (72) provides an enhanced gain operation, while device (88) provides a top side drain contact. The high gain MOS based TVS devices provide increased control over clamp voltage variation.Type: GrantFiled: July 15, 2003Date of Patent: April 18, 2006Assignee: Semiconductor Components Industries, L.L.C.Inventors: Francine Y. Robb, Jeffrey Pearse, David M. Heminger, Stephen P. Robb
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Patent number: 7026690Abstract: The invention includes BIFETRAM devices. Such devices comprise a bipolar transistor in combination with a field effect transistor (FET) in a three-dimensional stacked configuration. The memory devices can be incorporated within semiconductor-on-insulator (SOI) constructions. The base region of the bipolar device can be physically and electrically connected to one of the source/drain regions of the FET to act as a storage node for the memory cell. The semiconductor material of the SOI constructions can comprise Si/Ge, and the active region of the FET can extend into the Si/Ge. The SOI constructions can be formed over any of a number of substrates, including, for example, semiconductive materials, glass, aluminum oxide, silicon dioxide, metals and/or plastics.Type: GrantFiled: February 12, 2003Date of Patent: April 11, 2006Assignee: Micron Technology, Inc.Inventor: Arup Bhattacharyya
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Patent number: 7009255Abstract: A semiconductor device and a method of manufacturing the same is disclosed. A trench is formed in an active region of a semiconductor substrate. A doped layer is formed on the inner walls of the trench. The trench is filled up with a first semiconductor layer. A gate insulating layer is formed on the first semiconductor layer and the substrate. Two gate electrodes are formed on the gate insulating layer such that the trench is located in between two gate electrodes. First and second impurity regions are formed in the substrate on both sides of each of the gate electrodes. Since the doped layer is locally formed in the trench area, the source and drain regions are completely separated from the heavily doped layer to weaken the electric field of PN junction, thereby improving refresh and preventing punchthrough between the source and drain.Type: GrantFiled: May 23, 2003Date of Patent: March 7, 2006Assignee: Samsung Electronics Co., Ltd.Inventors: Nak-Jin Son, Ji-Young Kim
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Patent number: 7009256Abstract: A monolithically integratable semiconductor structure serves for over-voltage protection in an integrated circuit or as a normal diode. The structure includes an insulating layer between a substrate and a semiconductor layer of first conductivity type, and several layers formed in the semiconductor layer. First and second layers of second conductivity type are spaced apart from one another. A third layer of first conductivity type contacts the second layer. A fourth layer of first conductivity type directly contacts and surrounds the second and third layers. A fifth layer of first conductivity type and higher dopant concentration than the semiconductor layer is disposed under the first layer. The first layer surrounds the second, third and fourth layers essentially in a ring-shape. A first electrode contacts the first layer. A second electrode contacts the second and third layers.Type: GrantFiled: September 20, 2004Date of Patent: March 7, 2006Assignee: Atmel Germany GmbHInventors: Franz Dietz, Michael Graf
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Patent number: 7005708Abstract: An electrostatic discharge (ESD) MOS transistor including a plurality of interleaved fingers, where the MOS transistor is formed in an I/O periphery of and integrated circuit (IC) for providing ESD protection for the IC. The MOS transistor includes a P-substrate and a Pwell disposed over the P-substrate. The plurality of interleaved fingers each include an N+ source region, an N+ drain region, and a gate region formed over a channel region disposed between the source and drain regions. Each source and drain includes a row of contacts that is shared by an adjacent finger, wherein each contact hole in each contact row has a distance to the gate region defined under minimum design rules for core functional elements of the IC. The Pwell forms a common parasitic bipolar junction transistor base for contemporaneously triggering each finger of the MOS transistor during an ESD event.Type: GrantFiled: May 12, 2003Date of Patent: February 28, 2006Assignees: Sarnoff Corporation, Sarnoff EuropeInventors: Markus Paul Josef Mergens, Koen Gerard Maria Verhaege, Cornelius Christian Russ, John Armer, Phillip Czeslaw Jozwiak, Bart Keppens
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Patent number: 6987300Abstract: A high voltage ESD-protection structure is used to protect delicate transistor circuits connected to an input or output of an integrated circuit bond pad from destructive high voltage ESD events by conducting at a controlled breakdown voltage that is less than a voltage that may cause destructive breakdown of the input and/or output circuits. The ESD-protection structure is able to absorb high current from these ESD events without snapback that would compromise operation of the higher voltage inputs and/or outputs of the integrated circuit. The ESD-protection structure will conduct when an ESD event occurs at a voltage above a controlled breakdown voltage of an electronic device, e.g., diode, in the ESD protection structure. Conduction of current from an ESD event having a voltage above the electronic device controlled breakdown voltage may be through another electronic device, e.g.Type: GrantFiled: March 25, 2004Date of Patent: January 17, 2006Assignee: Microchip Technology IncorporatedInventors: Randy L. Yach, Greg Dix
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Patent number: 6963111Abstract: A pMOS transistor (601) is located in an n-well (602) and has at least one gate (603). Transistor (601) is connected between power pad Vdd or I/O pad (604) and ground potential Vss (605). Gate (603) is connected to power pad (604). The n-well (602) is capacitively (620) coupled to ground (605), decoupled from the transistor source (606) and floating under normal operating conditions. Under an ESD event, the diode formed by the source (606) and the n-well (602) is forward biased (n-well negatively biased) to turn on the lateral pnp transistor to discharge the ESD current. The well voltage keeps increasing up to the value that triggers the lateral bipolar pnp transistor. The ESD protection is scalable with the width of gate (603), improving with shrinking gate width.Type: GrantFiled: June 13, 2003Date of Patent: November 8, 2005Assignee: Texas Instruments IncorporatedInventors: Vijay K. Reddy, Gianluca Boselli, Ekanayake A. Amerasekera
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Patent number: 6960811Abstract: A low capacitance ESD protection device. The device comprises a substrate, a well of a first conductivity type in the substrate, a first and second transistor of the first conductivity type respectively on two sides of the well, a guard ring of a second conductivity type in the substrate, surrounding the well, and the first and second transistor, and a doped region of the second conductivity type in the well, wherein profiles of a drain and source region of each of the first and second transistor are un-symmetrical, and an area of the drain region is smaller than that of the source region in each of the first and second transistor.Type: GrantFiled: August 30, 2004Date of Patent: November 1, 2005Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Yi-Hsun Wu, Jian-Hsing Lee
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Patent number: 6949806Abstract: The present disclosure provides a deep submicron electrostatic discharge (ESD) protection structure for a deep submicron integrated circuit (IC) and a method for forming such a structure. The structure includes at least two electrodes separated by a dielectric material, such as a thin gate oxide layer. In some examples, the thin gate oxide may be less than 25 ? thick. A source and drain are positioned proximate to and on opposite sides of one of the electrodes to form a channel. The drain is covered with a silicide layer that enhances the ESD protection provided by the structure. The source may also be covered with a silicide layer. In some examples, the drain may be floating.Type: GrantFiled: October 16, 2003Date of Patent: September 27, 2005Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yi-Hsun Wu, Jian-Hsin Lee, Tongchern Ong
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Fully-depleted-collector silicon-on-insulator (SOI) bipolar transistor useful alone or in SOI BiCMOS
Patent number: 6949764Abstract: A bipolar transistor structure is described incorporating an emitter, base, and collector having a fully depleted region on an insulator of a Silicon-On-Insulator (SOI) substrate without the need for a highly doped subcollector to permit the fabrication of vertical bipolar transistors on semiconductor material having a thickness of 300 nm or less and to permit the fabrication of SOI BiCMOS. The invention overcomes the problem of requiring a thick semiconductor layer in SOI to fabricate vertical bipolar transistors with low collector resistance.Type: GrantFiled: November 19, 2004Date of Patent: September 27, 2005Assignee: International Business Machines CorporationInventor: Tak Hung Ning -
Patent number: 6940104Abstract: A cascaded diode structure with a deep N-well for effectively reducing the leakage current of the P-type substrate by floating the base of a parasitic transistor in the cascaded diode structure. The cascaded diode structure includes a P-type substrate, a deep N-well formed on the P-type substrate, a plurality of elemental diodes formed on the deep N-well, and a plurality of connecting parts for cascading the elemental diodes. Each elemental diode includes a P-well formed on the deep N-well, a heavily doped P-type region formed on the P-well, and a heavily doped N-type region formed on the P-well.Type: GrantFiled: May 13, 2004Date of Patent: September 6, 2005Assignee: Realtek Semiconductor Corp.Inventors: Ta-Hsun Yeh, Chao-Cheng Lee, Tay-Her Tsaur
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Patent number: 6936896Abstract: A low voltage thyristor is disclosed that can be used to provide protection during electrostatic discharge event. The thyristor is connected between voltage reference nodes having a common potential, such as ground nodes, that are isolated from one another during normal operating conditions. During an ESD event on one of the voltage reference nodes, the low voltage thyrister triggers, at a voltage of less than ten volts, to help discharge the ESD current through the otherwise isolated ground node.Type: GrantFiled: December 21, 2001Date of Patent: August 30, 2005Assignee: Freescale Semiconductor, Inc.Inventors: Richard T. Ida, Hongzhong Xu
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Patent number: 6933567Abstract: An electrostatic discharge (ESD) protection device formed in the semiconductor layer of a semiconductor-on-insulator device, wherein the semiconductor layer has first and second wells. A discharge circuit is formed in the first well, operable to discharge the ESD pulse to ground. A pump circuit is formed in the second well, operable to use a portion of an ESD pulse's voltage to pump current into the first well for allowing the discharge circuit to turn on uniformly. The discharge circuit has a plurality of body nodes to the first well. The pump circuit comprises an input pad for receiving a portion of the ESD pulse's voltage; an MOS transistor having source, gate and drain; a capacitor connected between the input pad and the gate, whereby a rising input voltage pulls the gate transiently high for pumping current into the first well; the source is connected to the body nodes of the discharge circuit, and the drain connected to the input pad.Type: GrantFiled: May 15, 2002Date of Patent: August 23, 2005Assignee: Texas Instruments IncorporatedInventors: Charvaka Duvvury, Sridhar Ramaswamy
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Patent number: 6927458Abstract: An ESD protection circuit includes a field effect transistor device configured such that current flowing through a hot spot filament formed in a gate region must flow in a non-linear path from a drain contact to a source contact. Source diffusion areas are segmented and staggered relative to drain diffusion areas in order to provide the non-linear current path.Type: GrantFiled: August 8, 2003Date of Patent: August 9, 2005Assignee: Conexant Systems, Inc.Inventor: Eugene R. Worley
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Patent number: 6919603Abstract: An electrostatic discharge (ESD) protection structure for protecting against ESD events between signal terminals is disclosed. ESD protection is provided in a first polarity, by a bipolar transistor (4C) formed in an n-well (64; 164), having a collector contact (72; 172) to one signal terminal (PIN1) and its emitter region (68; 168) and base (66; 166) connected to a second signal terminal (PIN2). For reverse polarity ESD protection, a diode (25) is formed in the same n-well (64; 164) by a p+ region (78; 178) connected to the second signal terminal (PIN2), serving as the anode. The cathode can correspond to the n-well (64; 164) itself, as contacted by the collector contact (72; 172). By using the same n-well (64; 164) for both devices, the integrated circuit chip area required to implement this pin-to-pin protection is much reduced.Type: GrantFiled: April 30, 2003Date of Patent: July 19, 2005Assignee: Texas Instruments IncorporatedInventors: Jonathan Brodsky, Robert Steinhoff, Sameer P. Pendharkar
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Patent number: 6914305Abstract: An output circuit of an integrated circuit device includes first and second MOS transistors including respective spaced apart pairs of source and drain regions in a substrate, arranged such that respective first and second channels of the first and second MOS transistors are laterally displaced with respect to one another. The output circuit further includes an isolation region in the substrate, disposed between the first and second MOS transistors. A first conductor connects the source region of the first MOS transistor to a power supply node. A second conductor connects the drain region of the first MOS transistor to the source region of the second MOS transistor. A third conductor connects the drain region of the second MOS transistor to an external signal pad of the integrated circuit device. The isolation region may comprise first and second insulation regions surrounding respective ones of the first and second MOS transistors, and a guard ring surrounding and separating the insulation regions.Type: GrantFiled: September 23, 2002Date of Patent: July 5, 2005Assignee: Samsung Electronics Co., Ltd.Inventors: Gue-Hyung Kwon, Eun-Kyoung Kwon
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Patent number: 6894328Abstract: According to one exemplary embodiment, a bipolar transistor includes a base having a top surface. The bipolar transistor further includes a first link spacer and a second link spacer situated on the top surface of the base. The bipolar transistor further includes a sacrificial post situated between the first and second link spacers, where the first and second link spacers have a height that is substantially less than a height of the sacrificial post. The bipolar transistor also includes a conformal layer situated over the sacrificial post and the first and second link spacers. According to this exemplary embodiment, the bipolar transistor further includes a sacrificial planarizing layer situated over the conformal layer, the first and second link spacers, the sacrificial post, and the base. The sacrificial planarizing layer may include, for example, an organic material such as an organic BARC (“bottom anti-reflective coating”).Type: GrantFiled: May 21, 2003Date of Patent: May 17, 2005Assignee: Newport Fab, LLCInventors: Amol Kalburge, Kevin Q. Yin
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Patent number: 6891230Abstract: The invention describes the fabrication and structure of an ESD protection device for integrated circuit semiconductor devices with improved ESD protection and resiliency. A vertical bipolar npn transistor forms the basis of the protection device. To handle the large current requirements of an ESD incident, the bipolar transistor has multiple base and emitter elements formed in an npn bipolar array. To assure turn-on of the multiple elements of the array the emitter fingers are continuously or contiguously connected with an unique emitter design layout. The contiguous emitter design provides an improved electrical emitter connection for the device, minimizing any unbalance that can potentially occur when using separate emitter fingers and improving the ability for the simultaneous turn on of the multiple emitter-base elements.Type: GrantFiled: March 2, 2004Date of Patent: May 10, 2005Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventor: Ta-Lee Yu
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Patent number: 6888201Abstract: The invention describes the fabrication and structure of an ESD protection device for integrated circuit semiconductor devices with improved ESD protection and resiliency. A vertical bipolar npn transistor forms the basis of the protection device. To handle the large current requirements of an ESD incident, the bipolar transistor has multiple base and emitter elements formed in an npn bipolar array. To assure turn-on of the multiple elements of the array the emitter fingers are continuously or contiguously connected with an unique emitter design layout. The contiguous emitter design provides an improved electrical emitter connection for the device, minimizing any unbalance that can potentially occur when using separate emitter fingers and improving the ability for the simultaneous turn on of the multiple emitter-base elements.Type: GrantFiled: March 2, 2004Date of Patent: May 3, 2005Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventor: Ta-Lee Yu
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Patent number: 6870184Abstract: A bipolar junction transistor (BJT) requires the fabrication of a BJT structure and of a support post which is adjacent to, but physically and electrically isolated from, the BJT structure. The BJT structure includes a semi-insulating substrate, a subcollector, a collector, a base, and an emitter. Metal contacts are formed on the subcollector and emitter to provide collector and emitter terminals. Contact to the structure's base is accomplished with a metal contact which extends from the top of the support post to the edge of the base nearest the support post. The contact bridges the physical and electrical separation between the support post and the base and provides a base terminal for the device. The base contact need extend over the edge of the base by no more than the transfer length associated with the fabrication process. This results in the smaller base contact area over the collector than would otherwise be necessary, and a consequent reduction in base-collector capacitance.Type: GrantFiled: July 30, 2003Date of Patent: March 22, 2005Assignee: Innovative Technology Licensing, LLCInventors: James Chingwei Li, Richard L. Pierson, Jr., Berinder P. S. Brar, John A. Higgins
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Patent number: 6867461Abstract: The claimed invention discloses an ESD protection circuit that is applied to an IC with power-down-mode operation. When the IC goes into power-down-mode operation, leakage current and charging from the I/O pad to the VDD power line could be prevented by applying the present invention. Therefore, the malfunction of the IC can be avoided. There still have two ESD clamp circuits respectively connected between the VDD power line and the VSS power line and between ESD bus line and VSS power line, so as to achieve the whole chip ESD protection scheme. The present invention can prevent ESD protection circuit from resulting in leakage current or malfunction under power-down-mode operation, and moreover achieve whole chip ESD protection scheme.Type: GrantFiled: April 1, 2004Date of Patent: March 15, 2005Assignee: National Chiao Tung UniversityInventors: Ming-Dou Ker, Kun-Hsien Lin
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Patent number: 6864538Abstract: An ESD protection device encompassing a vertical bipolar transistor that is connected as a diode and has an additional displaced base area. The assemblage has a space-saving configuration and a decreased difference between snapback voltage and breakdown voltage.Type: GrantFiled: April 14, 2001Date of Patent: March 8, 2005Assignee: Robert Bosch GmbHInventors: Stephan Mettler, Wolfgang Wilkening
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Patent number: 6864537Abstract: An electrostatic discharge (ESD) protection circuit includes a transistor with a gate electrode isolated from the semiconductor substrate by a thick oxide, a collector clamp coupled with a pad and the gate electrode, and an emitter clamp coupled between the gate electrode and the emitter of the transistor. Until the pad voltage reaches a trigger voltage, the collector clamp does not conduct, thereby preventing the transistor from conducting. However, when the pad voltage reaches the trigger voltage, the collector clamp turns on and triggers the latching of a parasitic thyristor that exists in the structure of the transistor. The latched parasitic thyristor (and thus the transistor) begins to conduct and rapidly dissipates the charge at the pad.Type: GrantFiled: January 3, 2003Date of Patent: March 8, 2005Assignee: Micrel, IncorporatedInventor: Shekar Mallikarjunaswamy
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Patent number: 6861711Abstract: An electrostatic discharge (ESD) protection circuit that includes an transistor with a gate electrode isolated from the semiconductor substrate. The transistor can be an insulated gate bipolar transistor (IGBT) connected between an integrated circuit (IC) pad and ground. The IGBT includes a parasitic thyristor that latches when the voltage at the pad exceeds a threshold level and does not turn off until the charge at the pad is dissipated, thereby preventing electrostatic damage to the IC.Type: GrantFiled: September 19, 2003Date of Patent: March 1, 2005Assignee: Micrel, IncorporatedInventor: Shekar Mallikarjunaswamy
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Patent number: 6858900Abstract: ESD protection devices and methods of forming them are provided in this invention. By employing the thin gate oxide fabricated by a dual gate oxide process and breakdown-enhanced layers, ESD protection devices with a lower trigger voltage are provided. The NMOS structure for ESD protection according to the present invention has islands, a control gate and breakdown-enhanced layers. These islands as well as the breakdown-enhanced layers overlapping the drain region of the NMOS reduce the breakdown voltage of the PN junction in the drain region, thereby reducing the ESD trigger voltage and improving the ESD protection level of the NMOS. Furthermore, the invention is applicable to general integrated-circuit processes as well as various ESD protection devices.Type: GrantFiled: October 8, 2001Date of Patent: February 22, 2005Assignee: Winbond Electronics CorpInventors: Wei-Fan Chen, Shi-Tron Lin, Chuan-Jane Chao
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Patent number: 6858902Abstract: A semiconductor device for ESD protection of an input/output pad (301) of an integrated circuit built in a substrate of a first conductivity type comprising a multi-finger MOS transistor (304), its source (304b) and its gate (304c) connected to ground potential and its drain (304a) connected to the I/O pad. A well of the opposite conductivity type, partially separated from the substrate by shallow trench isolations, has a diode (302), its anode (302b) connected to the pad and also to the transistor drain, and its cathode (302a) connected to power 303). These transistor and diode connections create a parasitic silicon controlled rectifier (SCR) with the SCR-anode (310a) formed by the diode anode, the first base region formed by the well, the second base region formed by the substrate, and the SCR-cathode (311a) formed by the transistor source. The SCR structure provides a significantly lower clamping voltage and an about two times higher failure current than a substrate-pumped MOS transistor.Type: GrantFiled: October 31, 2003Date of Patent: February 22, 2005Assignee: Texas Instruments IncorporatedInventors: Craig T. Salling, Charvaka Duvvury
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Fully-depleted-collector silicon-on-insulator (SOI) bipolar transistor useful alone or in SOI BiCMOS
Patent number: 6849871Abstract: A bipolar transistor structure is described incorporating an emitter, base, and collector having a fully depleted region on an insulator of a Silicon-On-Insulator (SOI) substrate without the need for a highly doped subcollector to permit the fabrication of vertical bipolar transistors on semiconductor material having a thickness of 300 nm or less and to permit the fabrication of SOI BiCMOS. The invention overcomes the problem of requiring a thick semiconductor layer in SOI to fabricate vertical bipolar transistors with low collector resistance.Type: GrantFiled: January 10, 2001Date of Patent: February 1, 2005Assignee: International Business Machines CorporationInventor: Tak Hung Ning -
Patent number: 6847083Abstract: This invention provides a semiconductor device that does not cause a defect at an intersection of wirings even when a surge voltage enters from a signal input terminal, an electro-optic device provided with the semiconductor device as a TFT array substrate, and an electronic instrument. In a TFT array substrate of a liquid crystal device, a signal input terminal, and terminals are arranged along a substrate side, and a signal input line extends from the signal input terminal to a substrate side. Of constant potential lines that supply constant potential to an electrostatic protection circuit for the signal input line, a low potential line does not at all intersect the signal input line, and a high potential line, though intersecting the signal input line, does not intersect a wiring portion from the signal input terminal to the electrostatic protection circuit.Type: GrantFiled: December 9, 2002Date of Patent: January 25, 2005Assignee: Seiko Epson CorporationInventor: Ichiro Murai
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Patent number: 6833590Abstract: An NMOS transistor circuit has a surge protection circuit connected in parallel with the NMOS transistor. A resistor is connected between a back gate of the NMOS transistor and ground. As a result, an input impedance higher than the input impedance of the surge protection circuit is applied to a semiconductor terminal at the electrode pad side of the NMOS transistor.Type: GrantFiled: March 4, 2003Date of Patent: December 21, 2004Assignee: Renesas Technology Corp.Inventors: Chikao Makita, Kunihiko Karasawa
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Patent number: 6822297Abstract: A short-channel NMOS transistor in a p-well, bordered laterally on each side by an isolation region and vertically by a channel stop region, has a n-source and a n-drain, each comprising a shallow region extending to the transistor gate and a deeper region recessed from the gate, and both having a depletion region when reverse biased. The shallow regions are surrounded in part by an enhanced p-doping implant pocket. The transistor further has in these regions of enhanced p-doping another region of a p-resistivity higher than the remainder of the semiconductor. These regions extend laterally approximately from the inner border of the respective shallow region to the inner border of the respective recessed region, and vertically from a depth just below the depletion regions of source and drain to approximately the top of the channel stop regions.Type: GrantFiled: June 7, 2001Date of Patent: November 23, 2004Assignee: Texas Instruments IncorporatedInventors: Mahalingam Nandakumar, Song Zhao, Youngmin Kim
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Patent number: 6818955Abstract: An electrostatic discharge device may provide better protection of an integrated circuit by more uniform breakdown of a plurality of finger regions. The plurality of finger regions may extend through a first region of a substrate having a first conductivity type and into a second region of the substrate more lightly doped with impurities of the first conductivity type. An electrostatic discharge device may include a collector region having a middle region that may be highly doped with impurities of the first conductivity type. The middle region may be proximate to a layer that is lightly doped with impurities of the first conductivity type and a layer that is doped with impurities of the second conductivity type. The collector region may decrease the breakdown voltage of the electrostatic discharge device.Type: GrantFiled: April 9, 2003Date of Patent: November 16, 2004Assignee: Marvell International Ltd.Inventors: Choy Hing Li, Xin Yi Zhang
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Patent number: 6815776Abstract: A multi-finger type electrostatic discharge protection circuit is disclosed. In an NMOS type ESD protection circuit, a pair of gates are formed in parallel with each other in one of multiple active regions so as to enable all the gate fingers in the active regions to perform npn bipolar operations uniformly. The present invention discharges an ESD pulse effectively by forming one or more additional n+ (or p+) type active regions, which are connected to Vcc (or Vss), between respective active regions.Type: GrantFiled: December 28, 2001Date of Patent: November 9, 2004Assignee: Hynix Semiconductor Inc.Inventors: Myoung Goo Lee, Hong Bae Park
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Patent number: 6803632Abstract: A semiconductor circuit has an output circuit, an input circuit and an input protection circuit. The output circuit is connected to a first power supplying terminal and a reference terminal for outputting an output signal. The output circuit has first transistors serially connected between the first terminal and the reference terminal. The input circuit is connected to a second power supplying terminal and the reference terminal. The input circuit has second transistors serially connected between the second terminal and the reference terminal. Each of the first and second transistors has a gate, a source and a drain. In the source and drain, there is a first low resistance region around a contact formed thereon so that a high resistance region is located between the gate and the first low resistance region.Type: GrantFiled: June 24, 2003Date of Patent: October 12, 2004Assignee: Oki Electric Industry Co., Ltd.Inventor: Katsuhiro Kato
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Publication number: 20040195630Abstract: An ESD protection device (20) comprises an N-type epitaxial collector (21), a first, lightly doped, deep base region (221) and second, highly doped, shallow base region (222) that extends a predetermined lateral dimension. The device responds to an ESD event by effecting vertical breakdown between the base regions and the N-type epitaxial collector. The ESD response is controlled by the predetermined lateral dimension, S, which, in one embodiment, may be is determined by a single masking step. Consequently, operation of the ESD protection device is rendered relatively insensitive to the tolerances of a fabrication process, and to variations between processes.Type: ApplicationFiled: April 4, 2003Publication date: October 7, 2004Inventor: James D. Whitfield
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Patent number: 6800907Abstract: The present invention provides a method for fabricating a semiconductor device capable of suppressing stresses concentrated at bottom corners of a gate electrode as simultaneously as preventing an oxidation of a metal included in a gate electrode. The inventive method includes the steps of: forming a gate oxide layer on a substrate; forming a gate electrode including at least one metal layer on the gate oxide layer; forming an oxide layer on the substrate including the gate electrode at a temperature lower than oxidation temperature of the metal layer; and etching selectively the densified oxide layer so as to form an oxide spacer on the lateral sides of the gate electrode.Type: GrantFiled: December 30, 2002Date of Patent: October 5, 2004Assignee: Hynix Semiconductor Inc.Inventors: Jae-Ok Kim, Woo-Jin Kim, Jong-Hyuk Oh
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Patent number: 6787856Abstract: An ESD device and method using parasitic bipolar transistors that are silicided. The first embodiment is a parasitic Bipolar Junction Transistor comprised of n+/n−/p−/n−/n+ regions. The emitter is formed of the second N+ region and the second N− well. The parasitic base is formed by the p− substrate or well. The collector is formed of the first well and the first n+ region. The benefit of the first embodiment is the trigger voltage is lower because the junction between the n− well (emitter) and P− substrate (base) and the junction between P− substrate (base) and the n-well have lower cross over concentrations. The second embodiment is similar to the first embodiment with the addition of the first gate. The first gate is preferably connected to the first n+ region and the Vpad. The third embodiment contains the same elements as the second embodiment with the addition of a third n+ region.Type: GrantFiled: July 22, 2002Date of Patent: September 7, 2004Assignee: Nano Silicon Pte. Ltd.Inventors: David Hu, Jun Cai
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Publication number: 20040169234Abstract: The invention describes the fabrication and structure of an ESD protection device for integrated circuit semiconductor devices with improved ESD protection and resiliency. A vertical bipolar npn transistor forms the basis of the protection device. To handle the large current requirements of an ESD incident, the bipolar transistor has multiple base and emitter elements formed in an npn bipolar array. To assure turn-on of the multiple elements of the array the emitter fingers are continuously or contiguously connected with an unique emitter design layout. The contiguous emitter design provides an improved electrical emitter connection for the device, minimizing any unbalance that can potentially occur when using separate emitter fingers and improving the ability for the simultaneous turn on of the multiple emitter-base elements.Type: ApplicationFiled: March 2, 2004Publication date: September 2, 2004Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANYInventor: Ta-Lee Yu
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Publication number: 20040169233Abstract: A semiconductor device has a surge protection circuit electrically connected to a signal input terminal and including a diode and a transistor. The diode has its cathode region constituted of an n+ diffusion layer, an n− epitaxial layer, an n-type diffusion layer and an n+ diffusion layer. The n+ diffusion layer is electrically connected to a conductive layer and formed at a main surface of a semiconductor substrate. The n+ diffusion layer constitutes, together with a p-type diffusion layer, a pn junction where Zener breakdown occurs, and the pn junction with the Zener breakdown occurring therein is distant from a field oxide film. Then, the semiconductor device with the surge protection circuit without suffering from current leakage and thus normally operating can be achieved.Type: ApplicationFiled: February 27, 2004Publication date: September 2, 2004Applicant: RENESAS TECHNOLOGY CORP.Inventors: Fumitoshi Yamamoto, Akio Uenishi
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Patent number: 6784498Abstract: A low capacitance ESD protection device. The device comprises a substrate, a well of a first conductivity type in the substrate, a first and second transistor of the first conductivity type respectively on two sides of the well, a guard ring of a second conductivity type in the substrate, surrounding the well, and the first and second transistor, and a doped region of the second conductivity type in the well, wherein profiles of a drain and source region of each of the first and second transistor are un-symmetrical.Type: GrantFiled: March 31, 2003Date of Patent: August 31, 2004Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Jian-Hsing Lee, Yi-Hsun Wu
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Publication number: 20040164356Abstract: An electrostatic discharge (ESD) protection device having high holding current for latch-up immunity. The ESD protection circuit is formed in a semiconductor integrated circuit (IC) having protected circuitry. The ESD protection device includes a silicon controlled rectifier (SCR) coupled between a protected supply line of the IC and ground. A trigger device is coupled from the supply line to a first gate of the SCR, and a first substrate resistor is coupled between the first gate and ground. A first shunt resistor is coupled between the first gate and ground, wherein the shunt resistor has a resistance value lower than the substrate resistor.Type: ApplicationFiled: February 20, 2004Publication date: August 26, 2004Applicant: Sarnoff CorporationInventors: Markus Paul Josef Mergens, Cornelius Christian Russ, John Armer, Koen Gerard Maria Verhaege, Phillip Czeslaw Jozwiak
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Patent number: 6774438Abstract: A semiconductor integrated circuit device includes an external connection pad, an electrostatic discharge protection circuit, an output circuit, an output pre-buffer circuit, an output-signal-fixing circuit and an internal circuit. The output-signal-fixing circuit includes a first capacitor and a second capacitor and fixes an output signal from a second pre-buffer circuit at an “L” level (low voltage) even when an output from the internal circuit is in a floating state. During an ESD test, since an output signal from the second pre-buffer circuit is fixed at an “L” level (low voltage) by the output-signal-fixing circuit, the NMIS transistor is in an OFF state. In this manner, a surge current is prevented from flowing locally into the NMIS transistor.Type: GrantFiled: September 24, 2002Date of Patent: August 10, 2004Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Katsuya Arai, Toshihiro Kohgami, Shiro Usami
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Patent number: 6770918Abstract: An electrostatic discharge (ESD) protection device having a silicon controlled rectifier (SCR) for protecting circuitry of an integrated circuit (IC). The SCR includes a N-doped layer disposed over a substrate and a first P doped region disposed over the N-doped layer. At least one first N+ doped region forming a cathode is disposed over the P-doped region and coupled to ground. The at least one first N+ doped region, first P-doped region, and N-doped layer form a vertical NPN transistor of the SCR. A second P doped region forming an anode is coupled to a protected pad. The second P doped region is disposed over the N-doped layer, and is laterally positioned and electrically isolated with respect to the first P doped region. The second P doped region, N-doped layer, and first P doped region form a lateral PNP transistor of the SCR.Type: GrantFiled: September 10, 2002Date of Patent: August 3, 2004Assignee: Sarnoff CorporationInventors: Cornelius Christian Russ, John Armer, Markus Paul Josef Mergens, Phillip Czeslaw Jozwiak
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Patent number: 6770938Abstract: An ESD protection device is provided for an integrated circuit. The ESD protection device includes a power supply clamp device formed from a diode and coupled between a first power supply VCC and a second power supply VSS. An input protection device is also provided which is formed from a diode coupled between an input pad and the first power supply and a second diode coupled between the input pad and a second power supply. The diodes have an adjusted reverse breakdown voltage that is higher than the voltage supply VCC used to power the peripheral circuitry that drives circuitry within a core of the integrated circuit. The adjusted reverse breakdown voltage is also lower than the breakdown voltage of gate oxide layers used within the peripheral circuitry.Type: GrantFiled: January 16, 2002Date of Patent: August 3, 2004Assignee: Advanced Micro Devices, Inc.Inventors: Michael Fliesler, Mark Ramsbey, Mark Randolph, Ian Morgan, Timothy Thurgate, Paohua Kuo, David M. Rogers
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Patent number: 6762462Abstract: A structure of protection of an area of a semiconductor wafer including a lightly-doped substrate of a first conductivity type against high-frequency noise likely to be injected from components formed in the upper portion of a second area of the wafer. The structure includes a very heavily-doped wall of the first conductivity type having substantially the depth of the upper portion. The wall is divided into segments, each of which is connected to a ground plane.Type: GrantFiled: February 5, 2002Date of Patent: July 13, 2004Assignee: STMicroelectronics S.A.Inventor: Didier Belot
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Patent number: 6762460Abstract: A protection circuit including a power supply terminal supplied with a power supply potential, a reference terminal supplied with a reference potential, and a first p-channel MOS transistor having a first gate, a first source, a first drain and a first back gate. The first gate, the first source and the first back gate are connected to the power supply terminal. Also included is a second p-channel MOS transistor having a second gate, a second source, a second drain and the first back gate, in which the second source of the second p-channel MOS transistor is connected to the first drain of the first p-channel MOS transistor, and the second gate and the second drain of the second p-channel MOS transistor is connected to the reference terminal.Type: GrantFiled: October 23, 2001Date of Patent: July 13, 2004Assignee: Kabushiki Kaisha ToshibaInventors: Akira Takiba, Masanori Kinugasa, Yoshimitsu Itoh, Masaru Mizuta
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Patent number: 6734504Abstract: A semiconductor device that includes an integrated circuit and an HBM structure formed on different semiconductor substrates is provided. The HBM structure may include input or output or input/output circuitry coupled to the integrated circuit and protection structures coupled to the input or output or input/output circuitry. In an embodiment, the integrated circuit may include input or output or input/output structures spaced across an area of the integrated circuit. The input or output or input/output circuitry of the HBM structure may be coupled to the input or output or input/output structures of the integrated circuit. A method for developing a design for an HBM structure is also provided. The method may include coupling an HBM structure formed on a first semiconductor substrate to an integrated circuit formed on a second semiconductor substrate. The method may also include testing the HBM structure and altering the HBM design based on the testing.Type: GrantFiled: April 5, 2002Date of Patent: May 11, 2004Assignee: Cypress Semiconductor Corp.Inventors: James H. Lie, Yue Chen
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Patent number: RE38608Abstract: A punch-through diode transient suppression device has a base region of varying doping concentration to improve leakage and clamping characteristics. The punch-through diode includes a first region comprising an n+ region, a second region comprising a p− region abutting the first region, a third region comprising a p+ region abutting the second region, and a fourth region comprising an n+ region abutting the third region. The peak dopant concentration of the n+ layers should be about 1.5E18 cm−3, the peak dopant concentration of the p+ layer should be between about 1 to about 5 times the peak concentration of the n+ layer, and the dopant concentration of the p− layer should be between about 0.5E14 cm−3 and about 1.OE17 cm−3. The junction depth of the fourth (n+) region should be greater than about 0.3 &mgr;m. The thickness of the third (p+) region should be between about 0.3 &mgr;m and about 2.Type: GrantFiled: January 17, 2002Date of Patent: October 5, 2004Assignee: Semtech CorporationInventors: Bin Yu, Chenming Hu, Ya-Chin King, Jeffrey T. Pohlman, Rita Trivedi