Abstract: An ESD protection device is provided for an integrated circuit. The ESD protection device includes a power supply clamp device formed from a diode and coupled between a first power supply VCC and a second power supply VSS. An input protection device is also provided which is formed from a diode coupled between an input pad and the first power supply and a second diode coupled between the input pad and a second power supply. The diodes have an adjusted reverse breakdown voltage that is higher than the voltage supply VCC used to power the peripheral circuitry that drives circuitry within a core of the integrated circuit. The adjusted reverse breakdown voltage is also lower than the breakdown voltage of gate oxide layers used within the peripheral circuitry.

Abstract: An electrostatic discharge (ESD) protection device having a silicon controlled rectifier (SCR) for protecting circuitry of an integrated circuit (IC). The SCR includes a N-doped layer disposed over a substrate and a first P doped region disposed over the N-doped layer. At least one first N+ doped region forming a cathode is disposed over the P-doped region and coupled to ground. The at least one first N+ doped region, first P-doped region, and N-doped layer form a vertical NPN transistor of the SCR. A second P doped region forming an anode is coupled to a protected pad. The second P doped region is disposed over the N-doped layer, and is laterally positioned and electrically isolated with respect to the first P doped region. The second P doped region, N-doped layer, and first P doped region form a lateral PNP transistor of the SCR.

Abstract: A protection circuit including a power supply terminal supplied with a power supply potential, a reference terminal supplied with a reference potential, and a first p-channel MOS transistor having a first gate, a first source, a first drain and a first back gate. The first gate, the first source and the first back gate are connected to the power supply terminal. Also included is a second p-channel MOS transistor having a second gate, a second source, a second drain and the first back gate, in which the second source of the second p-channel MOS transistor is connected to the first drain of the first p-channel MOS transistor, and the second gate and the second drain of the second p-channel MOS transistor is connected to the reference terminal.

Abstract: A structure of protection of an area of a semiconductor wafer including a lightly-doped substrate of a first conductivity type against high-frequency noise likely to be injected from components formed in the upper portion of a second area of the wafer. The structure includes a very heavily-doped wall of the first conductivity type having substantially the depth of the upper portion. The wall is divided into segments, each of which is connected to a ground plane.

Abstract: A semiconductor device 1000 may include an element isolation region 14, an n-type field effect transistor 100 and an npn-type bipolar transistor 200 formed on a SOI substrate 10. A p-type body region 50a may be electrically connected to an n-type source region 120. The p-type body region 50a may be electrically connected to a p-type base region 220. An n-type drain region 130 may be electrically connected to an n-type collector region 230. An n-type source region 120 may be formed structurally isolated from an n-type emitter region 210.

Abstract: A semiconductor device that includes an integrated circuit and an HBM structure formed on different semiconductor substrates is provided. The HBM structure may include input or output or input/output circuitry coupled to the integrated circuit and protection structures coupled to the input or output or input/output circuitry. In an embodiment, the integrated circuit may include input or output or input/output structures spaced across an area of the integrated circuit. The input or output or input/output circuitry of the HBM structure may be coupled to the input or output or input/output structures of the integrated circuit. A method for developing a design for an HBM structure is also provided. The method may include coupling an HBM structure formed on a first semiconductor substrate to an integrated circuit formed on a second semiconductor substrate. The method may also include testing the HBM structure and altering the HBM design based on the testing.

Abstract: A LSI has a plurality of separate power source systems, and an ESD protection circuit connected between ground lines of two of the power source systems. The protection circuit includes a pair of thyristors connected parallel to one another in opposite directions between the ground lines.

Abstract: A novel device structure and process are described for an SCR ESD protection device used with shallow trench isolation structures. The invention incorporates an SCR device with all SCR elements essentially contained within the same active area without STI elements being interposed between the device anode and cathode elements. This enhances ESD performance by eliminating thermal degradation effects caused by interposing STI structures, and enhances the parasitic bipolar characteristics essential to ESD event turn on. Enabling this unique design is the use of an insulation oxide surface feature which prevents the formation of contact salicides in unwanted areas. This design is especially suited to silicon-on-insulator design, as well as conventional SCR and LVTSCR designs.

Abstract: A vertical bipolar transistor having low breakdown voltage, low ESD clamping voltage and high beta is fabricated in a semiconductor 301 of a first conductivity type, which has a buried layer 360 of the opposite conductivity type with sharp junctions, suitable as collector. This layer extends laterally to deep wells 371 of the opposite conductivity type, thus isolating the subsurface band 301a of the semiconductor of the first conductivity type. This band is suitable as the base and has a width 301c controlled by the proximity of the buried layer junction 360a. The emitter 310 is supplied by a surface region of the opposite conductivity type. The photomask, which is needed for implanting the low energy ions to create the extended emitter, is also used for the process step of implanting, at high energy and high dose, the ions needed (opposite conductivity type) to create the buried layer.

Abstract: The invention describes the fabrication and structure of an ESD protection device for integrated circuit semiconductor devices with improved ESD protection and resiliency. A vertical bipolar npn transistor forms the basis of the protection device. To handle the large current requirements of an ESD incident, the bipolar transistor has multiple base and emitter elements formed in an npn bipolar array. To assure turn-on of the multiple elements of the array the emitter fingers are continuously or contiguously connected with an unique emitter design layout. The contiguous emitter design provides an improved electrical emitter connection for the device, minimizing any unbalance that can potentially occur when using separate emitter fingers and improving the ability for the simultaneous turn on of the multiple emitter-base elements.

Abstract: A semiconductor device includes a semiconductor substrate. A gate electrode is formed on the semiconductor substrate via a gate insulating film. A source region and a drain region of a first conductivity type are formed on the first side and the second side of the gate electrode, respectively, in the semiconductor substrate. A punch-through stopper region of a second conductivity type is formed in the semiconductor substrate such that the second conductivity type punch-through stopper region is located between the source region and the drain region at distances from the source region and the drain region and extends in the direction perpendicular to the principal surface of the semiconductor substrate. The concentration of an impurity element of the second conductivity type in the punch-through stopper region is set to be at least five times the substrate impurity concentration between the source region and the drain region.

Abstract: An ESD protection device for an integrated circuit, which is integrated in a semiconductor substrate of the integrated circuit, has a heavily doped p-region provided with a first connection electrode, a heavily doped n-region provided with a second connection electrode, a lightly doped p-region bordering on the heavily doped p-region, and a lightly doped n-region bordering on the heavily doped n-region and the lightly doped p-region in such a way that the lightly doped regions are arranged at least between the heavily doped regions. The distance which exists between the lightly doped p-region and the heavily doped n-region and which is determined by the lightly doped n-region is dimensioned in such a way that the depletion zone in the lightly doped n-region, which becomes larger as the blocking voltage applied to the connection electrodes increases, reaches the heavily doped n-region before the breakthrough voltage between the lightly doped n-region and the lightly doped p-region has been reached.

Abstract: An ESD guard structure includes a self-aligned lateral p+/n+ diode serving as the trigger diode. This lateral trigger diode is largely independent of alignment precisions. The n+ and p+ regions are implanted on opposite sides of a gate electrode. The edges of the resist masks of the respective process diffusions are placed onto this gate electrode such that they always rest on the gate electrode, within the limits of the alignment capabilities. This way, the spacing between the n+ region and the p+ region is defined solely by the length or width of the gate electrode, which can be closely controlled. This technique is limited only by the requirement that the minimum gate electrode length must be no less than twice the maximum alignment precision.

Abstract: A semiconductor device having resistance to static electricity damage under the CDM is disclosed. The semiconductor device may include a plurality of input/output terminals (102), a first reference electric potential connection (101) electrically connected to the terminals, an input/output protection element (103) electrically connected between the terminals and the first reference electric potential connection (101). A board electric potential generator (104) may provide a potential to a board electric potential connection. A clamp element (105) may be electrically connected between the first reference electric potential and the board electric potential connection.

Abstract: Electrostatic discharge protection device comprising a first highly p-doped region with a base contact, a first highly n-doped region with a collector contact, a second highly n-doped region with an emitter contact and located between the first highly p-doped region and the second highly n-doped region, the first highly p-doped region and the second highly n-doped region being applied in a weakly p-doped region which a has a lateral overlap extending towards the first highly n-doped region, the lateral overlap having a width, the first highly n-doped region being applied in a weakly n-doped region, the weakly p-doped region and the weakly n-doped region being applied in a more weakly n-doped region, and a highly n-doped buried layer located underneath the more weakly n-doped region and extending below at least a portion of the weakly n-doped region and at least a portion of the weakly p-doped region.

Abstract: A process for forming at least one interface region between two regions of semiconductor material. At least one region of dielectric material comprising nitrogen is formed in the vicinity of at least a portion of a boundary between the two regions of semiconductor material, thereby controlling electrical resistance at the interface.

Abstract: A new method is provided for the creation of interconnect lines. Fine line interconnects are provided in a first layer of dielectric overlying semiconductor circuits that have been created in or on the surface of a substrate. A layer of passivation is deposited over the layer of dielectric, a thick second layer of dielectric is created over the surface of the layer of passivation. Thick and wide interconnect lines are created in the thick second layer of dielectric. The first layer of dielectric may also be eliminated, creating the wide thick interconnect network on the surface of the layer of passivation that has been deposited over the surface of a substrate.

Abstract: A diode-triggered NPN ESD protection device includes a P-Base region enclosing the emitter region of the NPN transistor for enhancing the reliability of the ESD protection device. The incorporation of the P-Base region encourages bulk transistor action and inhibits surface transistor action such that the reliability of the protection device is enhanced. In another aspect of the present invention, a trigger voltage control method is applied to a diode-triggered ESD protection device to extend the periphery length of the p-n junction of the trigger diode without increasing the size of the protection device. By extending the periphery length of the p-n junction, the trigger current generated by the trigger diode is increased so that the trigger voltage for the ESD protection device can be lowered, providing effective ESD protection. The periphery length is extended by using a shaped periphery, such as a corrugated periphery or a perforated periphery.

Abstract: A new cascaded NMOS transistor output circuit with enhanced ESD protection is achieved. A driver PMOS transistor has the source connected to a voltage supply, the gate connected to the input signal, and the drain connected to the output pad. A dummy PMOS transistor has the source and the gate connected to the voltage supply, and the drain connected to the output pad. A driver NMOS cascaded stack comprises first and second NMOS transistors. The first NMOS transistor has the source connected to ground and the gate connected to the input signal. The second NMOS transistor has the gate connected to the voltage supply, the source connected to the first NMOS transistor drain, and the drain connected to the output pad. A p− implanted region underlies the n+ region of the drain but does not underlie the n+ region of the source. A dummy NMOS cascaded stack comprises third and fourth NMOS transistors. The third NMOS transistor has the gate and the source connected to ground.

Abstract: Employing an electrostatic discharge (ESD) trigger to trigger the MOS transistors (i.e., the ESD fingers) within a CMOS device to provide substantially more uniform turn-on voltages for the MOS transistors, resulting in better ESD device performance without employing selective salicide blocking, is disclosed. A semiconductor device has an ESD trigger and a number of ESD fingers. The turn on voltage of the ESD trigger is less than the turn on voltage of the ESD fingers, such that the ESD fingers turn on substantially uniformly after the ESD trigger turns on during an ESD event. The semiconductor device is substantially fabricated without employing salicide blocking.

Abstract: In a semiconductor substrate, semiconductor regions belonging to the IGBT are formed in an IGBT region and semiconductor regions belonging to the diode are formed in a diode region. The IGBT and the diode are connected in anti-parallel to each other. A trench in which an insulator is buried is formed between the IGBT region and the diode region. The insulator restricts the reverse recovery current which flows from the diode region into the IGBT region. Thus, semiconductor regions of an IGBT and a diode connected in anti-parallel with each other are fabricated in a single semiconductor substrate and the chip size is reduced.

Abstract: A semiconductor device with substrate-triggered ESD protection technique includes a guard ring, a first MOS transistor array, a second MOS transistor array and a substrate-triggered portion. The first MOS transistor array, the second MOS transistor array and the substrate-triggered portion are formed in a region surrounded by the guard ring, and the substrate-triggered portion is located between the first MOS transistor array and the second MOS transistor array. Therefore, when the ESD event occurs, the substrate-triggered portion can be used for biasing a base of at least one parasitic BJT in the first MOS transistor array and a base of at least one parasitic BJT in the second MOS transistor array to achieve uniform turn-on among the multiple fingers of MOS transistor array. By using this layout design, the MOS transistor array can have a high ESD robustness.

Abstract: A protective circuit for limiting a voltage at a pad of an integrated circuit includes a threshold selector connected between the pad and ground. The input voltage to the threshold selector is the pad voltage. The threshold detector includes a first transistor where load path is connected to the pad. The central terminal of the first transistor is maintained at a threshold voltage derived from the pad voltage. A second transistor has its control terminal connected to a second terminal of the load path of the first transistor. The load path of this second transistor is connected between the pad and ground.

Abstract: An all-mode, bonding pad-oriented ESD (electrostatic discharge) protection structure, protects ICs against ESD pulses of all modes in all directions. A unique quasi-symmetrical layout design is devised to improve ESD structure. Physical symmetry and rounded layout provide uniform current and thermal distribution as well as symmetrical electrical operation characteristics. The ESD structure allows tunable triggering voltage, low holding voltage, low impedance, low leakage, fast response time and low parasitic effect. The ESD structure can easily be placed under or surrounding a bonding pad and consumes little extra silicon. The ESD structure can be implemented in commercial BiCMOS processes and is suitable for multiple-supply, mixed-signal, parasitic-sensitive RF and high-pin-count ICs.

Abstract: A dynamic source coupled ESD protection circuit that dissipates an ESD voltage coupled to an electrical contact pad to protect internal circuits on an integrated circuits chip is described. The ESD protection circuit lowers the snapback voltage of the ESD protection circuit to allow a thinner gate oxide within the internal circuits of the integrated circuit chip. The dynamic substrate coupled electrostatic discharge protection circuit consists of a gated MOS transistor, a capacitor, and a resistor. The gated MOS transistor has a drain region connected to the electrical contact pad. The gate and source are connected to a power supply voltage source. The power supply voltage source will either be a substrate biasing voltage or ground reference point for a gated NMOS transistor. The power supply voltage source will be the power supply voltage source VDD for the gated PMOS transistor.

Abstract: A semiconductor device includes an active layer of a first conductive type. A base layer of a second conductive type is selectively formed on a surface region of said active layer. A source layer of the first conductive type is selectively formed on a surface region of the base layer. An anode layer of the second conductive type is selectively formed on a surface region of the active layer, the anode layer being spaced from the base layer. A drain layer of the first conductive type is formed on a surface region between the base layer and the anode layer. A resistive layer of the first conductive type is formed on a surface region between the base layer and the drain layer. And, a gate electrode is formed above a region of the base layer between the source layer and the active layer, a gate insulating film being disposed between the base layer and the gate electrode.

Abstract: A bi-directional transient voltage suppression device is provided. The device comprises: (a) a lower semiconductor layer of p-type conductivity; (b) an upper semiconductor layer of p-type conductivity; (c) a middle semiconductor layer of n-type conductivity adjacent to and disposed between the lower and upper layers such that lower and upper p-n junctions are formed; (d) a mesa trench extending through the upper layer, through the middle layer and through at least a portion of the lower layer, such that the mesa trench defines an active area for the device; and (e) an oxide layer covering at least portions of the walls of the mesa trench that correspond to the upper and lower junctions, such that the distance between the upper and lower junctions is increased at the walls. The integral of the net middle layer doping concentration of this device, when taken over the distance between the junctions, is such that breakdown, when it occurs, is punch through breakdown, rather than avalanche breakdown.

Abstract: The invention relates to a so-called punch-through diode comprising a stack of, for example, an n++, p−, p+, n++ region (1, 2, 3, 4). In the known diode, these regions (1, 2, 3, 4) are arranged on a substrate (11) in said order. The diode is provided with connection conductors (5, 6). Such a diode does not have a steep I-V characteristic and hence is less suitable as a TVSD (=Transient Voltage Suppression Device). Particularly at voltages below 5 volts, a punch-through diode could form an attractive alternative for use as a TVSD. A punch-through diode according to the invention has an inverted structure, which means that the regions (1, 2, 3, 4) are positioned in reverse order on the substrate (11) and thus, the first region (1) adjoins the surface, and the fourth region (4) adjoins the substrate (11). Such a diode has a very steep I-V characteristic, is very suitable as a TVSD and functions very well at an operating voltage below 5 volts.

Abstract: A device layout is disclosed for an ESD device for protecting NMOS high voltage transistors where the SCR protection device and the two NMOS transistors are integrated. The two NMOS transistors share an n-type doped drain (ndd) area which has implanted two n+ drains, one for each of the two transistors and a p+ diffusion separates the two n+ drains. Furthermore, the ndd area has implanted an n-well which extends from halfway under the first n+ drain to halfway under the second n+ drain. In addition, the depth of the n-well exceeds the depth of the ndd area. The added p+ diffusion together with the ndd area and the p-substrate of the silicon wafer create the parasitic pnp transistors of the SCR. The shared ndd area together with the n+ sources of the NMOS transistors creates the SCR's two parasitic npn transistors.

Abstract: A current ballasting circuit for an ESD protection device couples nonintersecting conductive strips between a common contact pad and the contact electrodes of the ESD protection device. The connecting strips form respective electrically isolated ballasting resistors between the external contact pad and the contact electrodes of the ESD device. In addition, lateral resistances are formed between the contact strips which enhance the operation of the multiple ballasting resistors. The conductive strips may be made from metal, polysilicon or by a vertically meandering series connection of polysilicon layers, metal layers and interconnecting vias. The lateral resistance between the parallel conductive paths may be enhanced by segmenting both the drain and source electrodes. In one example, the gate electrode of an MOS ESD device extends locally between each pair of strips to segment the drain and source regions.

Abstract: An NMOS transistor circuit has a surge protection circuit connected in parallel with the NMOS transistor. A resistor is connected between a back gate of the NMOS transistor and ground. As a result, an input impedance higher than the input impedance of the surge protection circuit is applied to a semiconductor terminal at the electrode pad side of the NMOS transistor.

Abstract: A method and a structure for a parasitic bipolar silicided ESD device that has high resistivity regions within the collector of the parasitic NPN. The device has the structure of a N-MOS transistor and a substrate contact. The device preferably has silicide regions over the doped regions. The invention has two types of high resistivity regions: 1) isolation regions (e.g., oxide shallow trench isolation (STI)) and 2) undoped or lightly doped regions (e.g., channel regions). The channel regions can have gates thereover and the gates can be charged. Also, optionally a n−well (n minus well) can be formed under the collector. The high resistivity regions increase the collector resistivity thereby improving the performance of the parasitic bipolar ESD device.

Abstract: The present invention is related to a semiconductor device for electrostatic discharge or overvoltage protection applications, said device comprising means for absorbing an electrostatic discharge pulse or an overvoltage level, said means being triggered at intermediate voltages and said means including a series configuration of at least two trigger components. Said means can further be extended with a third trigger component and possibly further trigger components in said series configuration, the addition of said third and further trigger components extending sequentially the range of the intermediate trigger voltages. Said trigger components can comprise components, preferably diodes, with a specific breakdown voltage, the sum of the breakdown voltages of said diodes defining the specific intermediate trigger voltage of said device.

Abstract: In this invention, a novel substrate-triggered technique is proposed to effectively improve the electrostatic discharge (ESD) robustness of integrated circuit (IC) products. The ESD protection circuit derived from the substrate-triggered technique is comprised of a metal-oxide-semiconductor (MOS) transistor and an ESD detection circuit. The MOS transistor is composed of a bulk region, a gate, a source region coupled to a power rail, and a drain region couple to a pad. The source region, the bulk region and the drain region further construct a parasitic bipolar junction transistor (BJT) The ESD detection circuit is located between, and connected to, the power rail and the pad. During normal operation, the ESD detection circuit maintains the coupling of the bulk region to the first power rail. During an ESD event, the ESD detection circuit biases the bulk region to trigger the BJT thereby releasing ESD stress.

Abstract: Described are structures for a device with a controllable dummy layer which can provide a low controllable trigger voltage and can be used as a first triggered device in ESD protection networks. A controllable dummy layer diode is provided which is structured as a butting diode with a dummy polysilicon layer above the butting region. The dummy polysilicon layer functions as an STI block to remove the STI between the n+ and p+ regions of the diode. In one embodiment the diode has the function of a controllable gate with a punchthrough-like-trigger, in which a capacitor-couple circuit couples a portion of the ESD voltage into the gate of the diode to provide a gate voltage.

Abstract: An ESD protection circuit that will prevent internal circuits of an integrated circuit is formed on a semiconductor substrate to prevent damage during extreme voltage levels from an ESD voltage source and is connected to an input/output pad. A plurality of drains of multiple MOS FET's is formed within the surface of the semiconductor substrate and are each connected to the input/output pad. A plurality of sources of the multiple MOS FET's is formed within the surface of the semiconductor substrate and are placed at a distance from the plurality of drains and are connected to a ground reference potential. Pairs of the plurality of sources are adjacent to each other. A plurality of isolation regions placed between each source of the pairs of sources and are allowed to float. The multiple MOS FET's have a plurality of parasitic bipolar junction transistors.

Abstract: The holding voltage (the minimum voltage required for operation) of a triac is increased to a value that is greater than a dc bias on to-be-protected nodes. The holding voltage is increased by inserting a voltage drop between each p+ region and a to-be-protected node. As a result, the triac can be utilized to provide ESD protection to power supply pins.

Abstract: A power component is proposed which reliably switches inductive loads and has a current detection element to detect the current through the inductive load. The component includes a protective element which is connected to the source terminals of the sense element and of the actuator. The protective element protects against parasitic effects between the sense element and the actuator.

Abstract: A snapback device functions as a semiconductor protection circuit to prevent damage to integrated circuits due to events such as electrostatic discharge and the like. The snapback device is capable of carrying considerable current at a reduced voltage once it snaps back into bipolar operation mode after its trigger point is achieved. The snapback device includes the advantage of a low breakdown voltage which enables the snapback device to snap back into bipolar mode before damage is done to active circuit components due to their breakdown voltages being exceeded. The snapback device includes n+ active areas formed within a p-well substrate region and each active area includes a polysilicon film overlapping the active area but insulated therefrom by a dielectric film. Each n+ active area and polysilicon film are coupled by a conductive film and the components combine to form one electric node.

Abstract: A P_STSCR structure includes a P-type substrate, an N-well in the P-type substrate, a first N+ diffusion region located in the P-type substrate connected to the cathode, a second P+ diffusion region located in the N-well connected to the anode, and a third P+ diffusion region as a trigger node located in the P-type substrate and between the first N+ diffusion region and the second P+ diffusion region. A lateral SCR device including the second P+ diffusion region, the N-well, the P-type substrate and the first N+ diffusion region is thereby formed. When a current flows from the trigger node into the P-type substrate, the lateral SCR device is triggered on into its latch state to discharge ESD current. Since the present invention utilizes a substrate-triggered current Itrig flowing into or flowing out from the P-type substrate or the N-well through the inserted trigger node, a much lower switching voltage in the SCR device is obtained.

Abstract: A semiconductor device (10,50) is disclosed which can accommodate a negative voltage on its source using a P-type substrate (12) which is connected to ground potential. A first embodiment illustrates a device which can handle high voltage applications as well as a negative voltage applied to the source. A drain contact region (29) is recessed by a dimension (X) from a first insulated region (18). The dimension (X) provides for an optimum distance for high voltage applications while avoiding lateral surface punch-through. A second embodiment illustrates a gate structure (52) having a shape which surrounds a drain contact region (62) and accommodates a high voltage application while also eliminating the lateral surface punch-through. The drain contact region (62) is formed in a P-type region (20) centered inside the gate structure (52).

Abstract: Inter power supply surge voltage transmitting diode element is formed by a buried layer formed in a semiconductor substrate, a well region formed on the buried layer with its bottom portion being in contact with the buried layer, and impurity regions of mutually different conductivity types formed apart from each other at the surface of the well region. One of the impurity regions is electrically coupled to a first power supply line on which a surge voltage generates, and the other is electrically coupled to a second power supply line absorbing the surge voltage. The surge transmitting element includes a plurality of elements arranged parallel to each other between the first and second power supply lines. The second power supply line supplies the power supply voltage to an internal circuitry which consumes relatively small current.

Abstract: An electrostatic discharge protection circuit, comprising a semiconductor-controlled rectifier and a PMOS device. The semiconductor-controlled rectifier, coupled between two nodes, has an N-type semiconductor layer. The PMOS device, integrated with the semiconductor-controlled rectifier to share a first P-type doped region, has a PNP device located in the N-type semiconductor layer. When one of the nodes is coupled to the electrostatic discharge power, the PNP device will conduct to trigger the semiconductor-controlled rectifier.

Abstract: A bi-directional transient voltage suppression device with symmetric current-voltage characteristics has a lower semiconductor layer of first conductivity type, an upper semiconductor layer of first conductivity type, and a middle semiconductor layer adjacent to and disposed between the lower and upper layers having a second opposite conductivity type, such that upper and lower p-n junctions are formed. The middle layer has a net doping concentration that is highest at a midpoint between the junctions. Furthermore, the doping profile along a line normal to the lower, middle and upper layers is such that, within the middle layer the doping profile on one side of a centerplane of the middle layer mirrors the doping profile on an opposite side. In addition, an integral of the net doping concentration of the middle layer taken over the distance between the junctions is such that breakdown, when it occurs, is punch through breakdown, rather than avalanche breakdown.

Abstract: A bi-directional transient voltage suppression device with symmetric current-voltage characteristics is provided. The device comprises: (a) a lower semiconductor layer of first conductivity type; (b) an upper semiconductor layer of first conductivity type; and (b) a middle semiconductor layer adjacent to and disposed between the lower and upper layers, the middle layer having a second conductivity type opposite the first conductivity type, such that upper and lower p-n junctions are formed. In this device, the middle layer has a net doping concentration that is highest at a midpoint between the junctions. Furthermore, the doping profile along a line normal to the lower, middle and upper layers is such that, within the middle layer and within at least a portion of the lower and upper layers, the doping profile on one side of a centerplane of the middle layer mirrors the doping profile on an opposite side of the centerplane.

Abstract: A electrostatic discharge (ESD) device with salicide layers isolated by a shallow trench isolation in order to save one salicide block photomask. A shallow trench isolation is formed in drain region to isolate a portion of the drain region, so that the drain region is partitioned into two parts. A salicide layer is formed on the drain region. Since the salicide layer is not formed on the shallow trench isolation, without using an additional photomask, the salicide layer on the drain region is partitioned into two parts. The effect of the local thermal energy occurring to drain junction upon the contact metal of the drain region is eliminated.

Abstract: A novel low-voltage-triggered semiconductor controlled rectified (LVTSCR) as an ESD protection device is provided in this invention. The ESD protection device of the present invention has a lateral SCR (LSCR) structure with two electrodes and a MOS for triggering the LSCR. A dummy gate and a doped region are used to isolate the MOS from one of these two electrodes. The dummy gate is designed to block the formation of field-oxide layer formed in the device structure of the lateral SCR. Therefore, the proposed SCR device has a shorter current path in CMOS process, especially in the CMOS process with shallow trench isolation (STI) field-oxide layer. During an ESD, the current path in the ESD protection device is much shorter, and the turn-on speed and the ESD tolerance level are thereby enhanced.

Abstract: The semiconductor device having electrostatic discharge protector includes a gate electrode on a first conductive type semiconductor substrate, a second conductive type source area in the semiconductor substrate at one lateral side of the gate electrode, and a second conductive type lightly doped drain area in the semiconductor substrate at the other lateral side of the gate electrode. A second conductive type heavily doped drain area is formed in a portion of the second conductive type lightly doped drain. The second conductive type heavily doped drain area is spaced from the gate electrode, to reduce/eliminate input capacitance of a high speed semiconductor device as well as improve an electrostatic discharge characteristic. A contact of conductive material forms an interface with the second conductive type heavily doped drain area that is recessed into the second conductive type heavily doped drain area.

Abstract: A structure is designed with a lightly doped substrate (316) having a first conductivity type and a face. A first lightly doped region (314) has a second conductivity type and is formed within the lightly doped substrate. A first heavily doped region (308) has the first conductivity type and is formed at the face and extends to a first depth within the first lightly doped region. A second heavily doped region (312) has the second conductivity type and is formed at the face abutting the first heavily doped region. The second heavily doped region extends to a second depth and is at least partly within the first lightly doped region. A first isolation region (304) is formed at the face, abutting at least one of the first and second heavily doped regions. The first isolation region extends to a third depth that is greater than either of the first and the second depths.

Abstract: An electrostatic discharge (ESD) protection device for a silicon-on-insulator (SOI) integrated circuit having a silicon substrate with a buried oxide layer disposed thereon and an active layer disposed on the buried oxide layer having active regions defined by isolation trenches. The ESD protection device formed on the SOI integrated circuit and has an anode and a cathode formed within one of the active regions and coupled respectively to a first and a second node; and a filled backside contact opening disposed under and in thermal contact with at least one of the anode or the cathode, the backside contact opening traversing the buried oxide layer to thermally couple the one of the active regions and the substrate.