Abstract: Disclosed is a method for manufacturing a semiconductor device comprising implanting ions of an impurity element into a semiconductor region, implanting, into the semiconductor region, ions of a predetermined element which is a group IV element or an element having the same conductivity type as the impurity element and larger in mass number than the impurity element, and irradiating a region into which the impurity element and the predetermined element are implanted with light to anneal the region, the light having an emission intensity distribution, a maximum point of the distribution existing in a wavelength region of not more than 600 nm.

Abstract: A DC-to-DC converter includes a high-side transistor and a low-side transistor wherein the high-side transistor is implemented with a high-side enhancement mode MOSFET. The low side-transistor further includes a low-side enhancement MOSFET shunted with a depletion mode transistor having a gate shorted to a source of the low-side enhancement mode MOSFET. A current transmitting in the DC-to-DC converter within a time-period between T2 and T3 passes through a channel region of the depletion mode MOSFET instead of a built-in diode D2 of the low-side MOSFET transistor. The depletion mode MOSFET further includes trench gates surrounded by body regions with channel regions immediately adjacent to vertical sidewalls of the trench gates wherein the channel regions formed as depletion mode channel regions by dopant ions having electrical conductivity type opposite from a conductivity type of the body regions.

Abstract: Embodiments of methods for improving electrical leakage performance and minimizing electromigration in semiconductor devices containing metal cap layers are generally described herein. According to one embodiment, a method of forming a semiconductor device includes planarizing a top surface of a workpiece to form a substantially planar surface with conductive paths and dielectric regions, forming metal cap layers on the conductive paths, and exposing the top surface of the workpiece to a dopant source from a gas cluster ion beam (GCIB) to form doped metal cap layers on the conductive paths and doped dielectric layers on the dielectric regions. According to some embodiments the metal cap layers and the doped metal cap layers contain a noble metal selected from Pt, Au, Ru, Rh, Ir, and Pd.

Abstract: An integrated circuit and method, producing semiconductor zones with a steep doping profile is disclosed. In one embodiment, dopants are implanted in a region corresponding to the semiconductor zone to be formed and which has at least one topology process. During the subsequent laser irradiation for activating the dopants in the semiconductor zone, regions which are laterally directly adjacent to the semiconductor zone are protected against melting on account of the topology process.

Abstract: An anti-fuse one-time-programmable (OTP) nonvolatile memory cell has a P well substrate with two P.sup.? doped regions. Another N.sup.+ doped region, functioning as a bit line, is positioned adjacent and between the two P.sup.? doped regions on the substrate. An anti-fuse is defined over the N.sup.+ doped region. Two insulator regions are deposited over the two P.sup.? doped regions. An impurity doped polysilicon layer is defined over the two insulator regions and the anti-fuse. A polycide layer is defined over the impurity doped polysilicon layer. The polycide layer and the polysilicon layer function as a word line. A programmed region, i.e., a link, functioning as a diode, is formed on the anti-fuse after the anti-fuse OTP nonvolatile memory cell is programmed. The array structure of anti-fuse OTP nonvolatile memory cells and methods for programming, reading, and fabricating such a cell are also disclosed.

Abstract: A method of forming an integrated circuit is provided. The method includes performing a multiple-time flash anneal process to a wafer, wherein the multiple-time flash anneal process comprises preheating the wafer to a first preheat temperature; performing a first flash on the wafer with a first flash energy; preheating the wafer to a second preheat temperature; and performing a second flash on the wafer with a second flash energy.

Abstract: Semiconductor devices are described wherein current flow in the device is confined between the rectifying junctions (e.g., p-n junctions or metal-semiconductor junctions). The device provides non-punch-through behavior and enhanced current conduction capability. The devices can be power semiconductor devices as such as Junction Field-Effect Transistors (VJFETs), Static Induction Transistors (SITs), Junction Field Effect Thyristors, or JFET current limiters. The devices can be made in wide bandgap semiconductors such as silicon carbide (SiC). According to some embodiments, the device can be a normally-off SiC vertical junction field effect transistor. Methods of making the devices and circuits comprising the devices are also described.

Abstract: An integrated circuit system that includes: providing a substrate including an active device with a gate top surface exposed; implanting a dopant within the gate to alter the grain size of the gate material; forming a dielectric layer over the active device and the substrate; and annealing the integrated circuit system to transfer the stress of the dielectric layer into the active device.

Abstract: This invention proposes a method for making very low threshold voltage (Vt) metal-gate/high-? CMOSFETs using novel self-aligned low-temperature ultra shallow junctions with gate-first process compatible with VLSI. At 1.2 nm equivalent-oxide thickness (EOT), good effective work-function of 5.3 and 4.1 eV, low Vt of +0.05 and 0.03 V, high mobility of 90 and 243 cm2/Vs, and small 85° C. bias-temperature-instability<32 mV (10 MV/cm, 1 hr) are measured for p- and n-MOS.

Abstract: A method of forming an electronic device including forming a first trench in a workpiece including a substrate, the first trench having side walls and a bottom surface extending for a width between the side walls and forming a charge-storage layer along the side walls and bottom surface of the first trench. The method further includes implanting ions within the substrate underlying the bottom surface of the first trench to form an implant region and annealing the implant region, wherein after annealing, the implant region extends the width of the bottom surface and along a portion of the side walls.

Abstract: A first semiconductor region and a second semiconductor region separated by a shallow trench isolation region are formed in a semiconductor substrate. A photoresist is applied and patterned so that the first semiconductor region is exposed, while the second semiconductor region is covered. Depending on the setting of parameters for the location of an edge of the patterned photoresist, the slope of sidewalls of the photoresist, the thickness of the photoresist, and the direction of ion implantation, ions may, or may not, be implanted into the entirety of the surface portion of the first semiconductor region by shading or non-shading of the first semiconductor region. The semiconductor substrate may further comprise a third semiconductor region into which the dopants are implanted irrespective of the shading or non-shading of the first semiconductor region. The selection of shading or non-shading may be changed from substrate to substrate in manufacturing.

Abstract: Different performance MOSFET Fully Depleted devices can be achieved on a single chip by varying the Vt through ion implantation. The integration of multiple Vt can be achieved through the selection of a metal gate stack with suitable effective WF for one semiconductor device to be included on a chip. Then, an ion implantation, with a dopant such as F, can be selectively performed to achieve proper Vt for other semiconductor devices on the chip.

Abstract: Method of preparing p-type doped ZnO or p-type doped ZnMgO, in which the following successive steps are carried out: a) implantation of O+ oxygen ions in an n-type doped ZnO or an n-type doped ZnMgO; b) first annealing at a temperature less than or equal to 1200° C. under oxygen for a time greater than or equal to 5 minutes; c) implantation of at least one ion of an element chosen among the elements of group I or the elements of group V of the periodic table; d) second annealing. The p-type doped ZnO or ZnMgO obtained by this method may be used in an optoelectronic device such as a light emitting diode.

Abstract: Some example embodiments of the invention provide a method to improve the performance of MOS devices by increasing the stress in the channel region. An example embodiment for a NMOS transistor is to form a tensile stress layer over a NMOS transistor. A heavy ion implantation is performed into the stress layer and then an anneal is performed. This increases the amount of stress from the stress layer that the gate retains/memorizes thereby increasing device performance.

Abstract: A semiconductor device, comprising a silicon layer, an n-type field-effect transistor (NFET) disposed in and on a silicon layer, and a p-type field-effect transistor (PFET) disposed in and on the silicon layer, wherein the PFET includes a boron-doped silicon-germanium layer disposed on the silicon layer. Also, a method for manufacturing a semiconductor device, comprising forming a first conductive layer over a p-well of a silicon layer, forming a second conductive layer over an n-well of the silicon layer, implanting fluorine ions into both the p-well and the n-well, exposing both the p-well and the n-well to ammonium hydroxide and peroxide, and epitaxially growing a boron-doped silicon-germanium layer on the silicon layer.

Abstract: In conducting laser annealing using a CW laser or a quasi-CW laser, productivity is not high as compared with an excimer laser and thus, it is necessary to further enhance productivity. According to the present invention, a fundamental wave is used without putting laser light into a non linear optical element, and laser annealing is conducted by irradiating a semiconductor thin film with pulsed laser light having a high repetition rate. A laser oscillator having a high output power can be used for laser annealing, since a non linear optical element is not used and thus light is not converted to a harmonic. Therefore, the width of a region having large grain crystals that is formed by scanning once can be increased, and thus the productivity can be enhanced dramatically.

Abstract: Devices and methods for junction formation in manufacturing a semiconductor device are disclosed. The devices have shallow junction depths far removed from end-of range defects. The method comprises forming an amorphous region in a crystalline semiconductor such as silicon down to a first depth, followed by implantation of a substitutional element such as carbon to a smaller depth than the first depth. The region is then doped with suitable dopants, e.g. phosphorus or boron, and the amorphous layer recrystallized by a thermal process.

Abstract: Embodiments of the invention provide a novel apparatus and methods for forming a conformal doped layer on the surface of a substrate. A substrate is provided to a process chamber, and a layer of dopant source material is deposited by plasma deposition, atomic layer deposition, or plasma-assisted atomic layer deposition. The substrate is then subjected to thermal processing to activate and diffuse dopants into the substrate surface.

Abstract: A method for preparing p-type zinc oxide (ZnO) is described. The p-type ZnO is prepared by implanting low energy acceptor ions into an n-type ZnO substrate and annealing. In an alternative embodiment, the n-type ZnO substrate is pre-doped by implanting low energy donor ions. The p-type ZnO may have application in various optoelectronic devices, and a p-n junction formed from the p-type ZnO prepared as described above and a bulk n-type ZnO substrate is also described.

Abstract: A method of manufacturing a semiconductor device includes providing a semiconductor wafer and forming at least one first trench in the wafer having first and second sidewalls and a first orientation on the wafer. The first sidewall of the at least one first trench is implanted with a dopant of a first conductivity at a first implantation direction. The first sidewall of the at least one first trench is implanted with the dopant of the first conductivity at a second implantation direction. The second implantation direction is orthogonal to the first implantation direction. The first and second implantation directions are non-orthogonal to the first sidewall.

Abstract: A method for infusing material below the surface of a substrate is described. The method comprises modifying a surface condition of a surface on a substrate to produce a modified surface layer, and thereafter, infusing material into the modified surface in the substrate by exposing the substrate to a gas cluster ion beam (GCIB) comprising the material.

Abstract: According to one embodiment of the present invention, a method of manufacturing a semiconductor device is provided. The method includes: forming a semiconductor structure; forming a stress liner over the semiconductor structure; and changing the stress properties of at least a part of the stress liner.

Abstract: A method of fabricating a semiconductor device having a gate spacer layer with a uniform thickness wherein a gate electrode layer pattern is formed on a substrate and ion implantation processes of respectively different doses are formed on side walls of the gate electrode layer patterns in respective first and second regions of the substrate. A first gate spacer layer is formed on the gate electrode layer pattern where the ion implantation process is performed. A second gate spacer layer is formed on the first gate spacer layer.

Abstract: A monitoring pattern of a semiconductor device and a method for fabricating the same, capable of increasing an area utilization rate. The monitoring pattern of a semiconductor device includes a gate electrode formed on a semiconductor substrate provided with an isolation film, a spacer formed on one sidewall of the gate electrode, an LDD region formed on the surface of the semiconductor substrate, a salicide formed over the entire surface of the semiconductor substrate in a region other than the region provided by the spacer, an interlayer dielectric film formed over the entire surface of the semiconductor substrate, contacts, each passing through the interlayer dielectric film arranged on the salicide, and a metal line arranged on the interlayer dielectric film, while being connected to the contacts.

Abstract: Processes and machines for producing large area sheets or films of crystalline, polycrystalline, or amorphous material are set forth; the production of such sheets being valuable for the manufacturing of solar photovoltaic cells, flat panel displays and the like. In one embodiment the surface of a rotating cylindrical workpiece (10) is implanted with an ion beam (30), whereby a layer of weakened material if formed below the surface, whereby sheet (20) may be detached and peeled off in an unrolling fashion, producing arbitrarily large, monolithic sheets. Optional annealing heater (40) may be used to improve the quality of the film. The sheet may also be optionally supported on a temporary or permanent handle (50) which may be rigid sheet such as glass, or a flexible sheet, such as a polymer film. Representative pinch roller (60) may assist in the lamination of handle (50) to sheet (20) before or after the point of separation of sheet (20) from workpiece (10).

Abstract: A MOS transistor and a method for manufacturing the transistor that may include forming a gate pattern on and/or over an active area of a semiconductor substrate defined as the active area and a field area, and silicide blocking films at each side of the gate pattern and partially over the uppermost surface of the gate pattern the silicide blocking films including first and second silicide blocking film portions formed spaced apart and extending in parallel to each other, and third and fourth silicide blocking film portions connected to the first and second silicide blocking film portions and formed spaced apart and extending in parallel to each other and perpendicular to the first and second silicide blocking film portions. With such a structural design, a high voltage transistor and middle voltage transistor having a reduced pitch size may be formed, thereby reducing the overall chip size.

Abstract: A method for manufacturing an integrated circuit includes: performing ion implantation on a wafer to make a chip in the wafer have an original doping concentration; dividing the chip into a plurality of regions; and controlling at least one region of plurality of the regions to not have further ion implantation performed thereon, thereby making the region only have single ion implantation performed thereon utilize the original doping concentration as a doping concentration of N-wells or P-wells of transistors in the region. Additionally, the region corresponds to signal output circuits of the integrated circuit.

Abstract: A semiconductor device 1 includes a substrate 2 having on a main surface thereof a central area and a peripheral area which surrounds the central area and is exposed, a semiconductor layer 4 which is formed on the main surface of the substrate 2, is made of a material harder than the substrate 2, is in the shape of a mesa, and has a steep side over the exposed peripheral area, and an insulating film 12S provided on a side surface of the semiconductor layer 4.

Abstract: A semiconductor device and a method for manufacturing the device capable of preventing an LDD region and a lower portion of the gate electrode from overlapping each other to achieve desirable device performance are disclosed. Embodiments relate to a semiconductor device and a method for manufacturing the device that may minimize overlap between an LDD region and a lower portion of the gate electrode. Minimizing overlap may maximize device performance and minimize the generation of defects between gate electrodes.

Abstract: Methods of fabricating a semiconductor device are provided. A photoresist pattern can be formed on an implantation target layer, and conductive impurities can be implanted into the implantation target layer using the photoresist pattern as a mask. A portion of the photoresist pattern can be removed, conductive impurities implanted in the photoresist pattern can be cleaned, and the remaining portion of the photoresist pattern can be removed.

Abstract: A semiconductor device and method for manufacturing the device with a planar halo profile is provided. The semiconductor device can be a MOSFET. The method of forming the structure includes forming an angled spacer adjacent a gate structure and implanting a halo implant at an angle to form a halo profile having low dopant concentration near a gate dielectric under the gate structure. The structure includes an underlying wafer or substrate and an angled gate spacer having an upper portion and an angled lower portion. The upper portion is structured to prevent halo dopants from penetrating an inversion layer of the structure. The structure further includes a low concentration halo dopant within a channel of a gate structure.

Abstract: This invention provides a semiconductor device that can prevent a deviation of work function by adopting a gate electrode having a uniform composition and exhibits excellent operating characteristics by virtue of effective control of a Vth. The semiconductor device is characterized by comprising a PMOS transistor, an NMOS transistor, a gate insulating film comprising an Hf-containing insulating film with high permittivity, a line electrode comprising a silicide region (A) and a silicide region (B), one of the silicide regions (A) and (B) comprising a silicide (a) of a metal M, which serves as a diffusing species in a silicidation reaction, the other silicide region comprising a silicide layer (C) in contact with a gate insulating film, the silicide layer (C) comprising a silicide (b) of a metal M, which has a smaller atom composition ratio of the metal M than the silicide (a), and a dopant which can substantially prevent diffusion of the metal M in the silicide (b).

Abstract: A metal ion transistor and related methods are disclosed. In one embodiment, the metal ion transistor includes a cell positioned in at least one isolation layer, the cell including a metal ion doped low dielectric constant (low-k) dielectric material sealed from each adjacent isolation layer; a first electrode contacting the cell on a first side; a second electrode contacting the cell on a second side; and a third electrode contacting the cell on a third side, wherein each electrode is isolated from each other electrode.

Abstract: A method for using ion implantation to create a precision trench in a mask or semiconductor substrate and to alter the optical properties of a mask or semiconductor substrate. In one embodiment, the method may include providing a semiconductor substrate or a mask, forming a damage layer in semiconductor substrate or the mask via ion implantation; wherein the damage layer is formed to a desired depth of the trench; etching the semiconductor substrate or mask to create the trench to the desired depth. In another embodiment, ion implantation is used to alter the optical properties of a mask.

Abstract: A method for fabricating a semiconductor device having a CMOS transistor including a gate electrode with low resistance. In the CMOS transistor in accordance with embodiments, the impurities implanted into the gate electrode have a higher density than the impurities implanted into the source/drain region. Embodiments also reduce the amount of impurities included in channel regions.

Abstract: Semiconductor doping techniques, along with related methods and structures, are disclosed that produce components having a more tightly controlled source and drain extension region dopant profiles without significantly inducing gate edge diode leakage. The technique follows the discovery that carbon, which may be used as a diffusion suppressant for dopants such as boron, may produce a gate edge diode leakage if present in significant quantities in the source and drain extension regions. As an alternative to placing carbon in the source and drain extension regions, carbon may be placed in the source and drain regions, and the thermal anneal used to activate the dopant may be relied upon to diffuse a small concentration of the carbon into the source and drain extension regions, thereby suppressing dopant diffusion in these regions without significantly inducing gate edge diode leakage.

Abstract: The present invention provides, in one embodiment, a transistor (100). The transistor (100) comprises a doped semiconductor substrate (105) and a gate structure (110) over the semiconductor substrate (105), the gate structure (110) having a gate corner (125). The transistor (100) also includes a drain-extended well (115) surrounded by the doped semiconductor substrate (105). The drain-extended well (115) has an opposite dopant type as the doped semiconductor substrate (105). The drain-extended well (115) also has a low-doped region (145) between high-doped regions (150), wherein an edge of the low-doped region (155) is substantially coincident with a perimeter (140) defined by the gate corner (125). Other embodiments of the present invention include a method of manufacturing a transistor (200) and an integrated circuit (300).

Abstract: A semiconductor device, particularly, a method for manufacturing a high voltage semiconductor device is disclosed. The method includes forming a high voltage gate oxide film on a semiconductor substrate having a high voltage device region and a low voltage device region, forming a gate electrode on the semiconductor substrate having the high voltage gate oxide film, forming a fluorinated silicate glass (FSG) film and a liner film sequentially on an entire surface of the semiconductor substrate including the gate electrode, and forming an interlayer insulating film on the liner film. Thus, it is possible to prevent an increase in leakage current of the high voltage semiconductor device such as a MOS transistor.

Abstract: A diffusion barrier layer is incorporated between a top semiconductor layer and buried oxide layer. The diffusion barrier layer blocks diffusion of dopants into or out of buried oxide layer. The diffusion barrier layer may comprise a dielectric material such as silicon oxynitride or a high-k gate dielectric material. Alternately, the diffusion barrier layer may comprise a semiconductor material such as SiC. Such materials provide less charge trapping than a silicon nitride layer, which causes a high level of interface trap density and charge in the buried oxide layer. Thus, diffusion of dopants from and into semiconductor devices through the buried oxide layer is suppressed by the diffusion barrier layer without inducing a high interface trap density or charge in the buried oxide layer.

Abstract: A method for manufacturing a semiconductor device which minimizes the line width of a pattern and allows a low temperature oxide film and a thinly formed photoresist film to serve as ion blockers when performing an ion implantation process on the semiconductor substrate.

Abstract: Embodiments of methods for improving a copper/dielectric interface in semiconductor devices are generally described herein. Other embodiments may be described and claimed.

Abstract: In accordance with the invention, a trench MOSFET semiconductor device is manufactured in accordance with a process comprising the steps of: providing a heavily doped N+ silicon substrate; utilizing a first mask to define openings for the trench gate and termination; utilizing a second mask as a source mask with openings determining the size and shape of a diffused source junction depth; utilizing a third mask as a contact mask to define contact hole openings; and utilizing a fourth mask as a metal mask, whereby only the first, second, third and fourth masks are utilized in the manufacture of the trench MOSFET semiconductor device.

Abstract: A method of producing a semiconductor element in a substrate includes forming a plurality of micro-cavities and carbide precipitates in the substrate, creating an amorphization of the substrate to form crystallographic defects and a doping of the substrate with doping atoms, annealing the substrate such that at least a part of the crystallographic defects are eliminated using the micro-cavities and the carbide precipitates, and wherein the semiconductor element is formed using the doping atoms.

Abstract: A semiconductor storage device includes: a storage circuit, an access control circuit, a ground voltage supplying region, and a polysilicon portion. The storage circuit stores data. The access control circuit includes a first access transistor and a second access transistor and controls reading and writing of the data. The ground voltage supplying region supplies a ground voltage to the storage circuit and the access control circuit. The polysilicon portion connects a first gate electrode included in the first access transistor and a second gate electrode included in the second access transistor, and is composed of a semiconductor of a second conductive type. The ground voltage supplying region is connected to a ground voltage supplying contact which supplies the ground voltage, and includes: a first portion composed of a semiconductor of the second conductive type, and a second portion composed of a semiconductor of a first conductive type.

Abstract: A metallization process is provided. The metallization process comprises the following steps. First, a semiconductor base having at least a silicon-containing conductive region is provided. Afterwards, nitrogen ions are implanted into the silicon-containing conductive region. Next, a first thermal process is performed on the semiconductor base for repairing the surface of the semiconductor base. Then, a metal layer is formed on the surface of the semiconductor base and the metal layer covers the silicon-containing conductive region. Lastly, a second thermal process is performed on the semiconductor base covered with the metal layer so as to form a metal silicide layer on the silicon-containing conductive region.

Abstract: The halo implant technique described herein employs a halo implant mask that creates a halo implant shadowing effect during halo dopant bombardment. A first transistor device structure and a second transistor device structure are formed on a wafer such that they are orthogonally oriented to each other. A common halo implant mask is created with features that prevent halo implantation of the diffusion region of the second transistor device structure during halo implantation of the diffusion region of the first transistor device structure, and with features that prevent halo implantation of the diffusion region of the first transistor device structure during halo implantation of the diffusion region of the second transistor device structure. The orthogonal orientation of the transistor device structures and the pattern of the halo implant mask obviates the need to create multiple implant masks to achieve different threshold voltages for the transistor device structures.

Abstract: The invention relates to a method of fabricating an integrated circuit, including the steps of providing at least one layer; performing a first implantation step, wherein particles are implanted into the layer under a first direction of incidence; performing a second implantation step, wherein particles are implanted into the layer under a second direction of incidence which is different from the first direction of incidence; performing a removal step, wherein the layer is partially removed depending on the local implant dose generated by the first and the second implantation step.

Abstract: Embodiments of the present invention relate generally to integrated circuits, to methods for manufacturing an integrated circuit and to a memory module. In an embodiment of the invention, an integrated circuit is provided having a programmable arrangement. The programmable arrangement includes a substrate, at least one first electrode disposed in or above the substrate, ion conductor doping material disposed above the at least one first electrode, ion conductor material disposed above the ion conductor doping material, and at least one second electrode disposed above the ion conductor material.

Abstract: A method for fabricating a semiconductor substrate is provided. A substrate having a region adjacent to a surface of the substrate as a channel region is provided. An ion implantation process is performed to form an amorphized silicon layer in the substrate below the channel region. A thermal treatment process is performed to re-crystallize the amorphized silicon layer so as to form an epitaxial material layer. The epitaxial material layer may enhance the stress on the channel region in the substrate.

Abstract: A semiconductor wafer for semiconductor components and to a method for its production is disclosed. In one embodiment, the semiconductor wafer includes a front side with an adjoining near-surface active zone as basic material for semiconductor component structures. The rear side of the semiconductor wafer is adjoined by a getter zone for gettering impurity atoms in the semiconductor wafer. The getter zone contains oxygen precipitates. In the near-surface active zone, atoms of doping material are located on lattice vacancies. The atoms of doping material have a higher diffusion coefficient that the oxygen atoms.