Memory Structures (epo) Patents (Class 257/E21.645)
  • Publication number: 20130017655
    Abstract: Devices can be fabricated using a method of growing nanoscale structures on a semiconductor substrate. According to various embodiments, nucleation sites can be created on a surface of the substrate. The creation of the nucleation sites may include implanting ions with an energy and a dose selected to provide a controllable distribution of the nucleation sites across the surface of the substrate. Nanoscale structures may be grown using the controllable distribution of nucleation sites to seed the growth of the nanoscale structures. According to various embodiments, the nanoscale structures may include at least one of nanocrystals, nanowires, or nanotubes. According to various nanocrystal embodiments, the nanocrystals can be positioned within a gate stack and function as a floating gate for a nonvolatile device. Other embodiments are provided herein.
    Type: Application
    Filed: September 13, 2012
    Publication date: January 17, 2013
    Applicant: Micron Technology, Inc.
    Inventors: Gurtej S. Sandhu, D. Mark Durcan
  • Publication number: 20130016557
    Abstract: A three-dimensional memory device includes a stack of semiconductor layers. Phase change memory (PCM) cell arrays are formed on each layer. Each PCM cell includes a variable resistor as storage element, the resistance of which varies. On one layer, formed is peripheral circuitry which includes row and column decoders, sense amplifiers and global column selectors to control operation of the memory. Local bit lines and worldliness are connected to the memory cells. The global column selectors select global bitlines to be connected to local bit lines. The row decoder selects wordlines. Applied current flows through the memory cell connected to the selected local bitline and wordline. In write operation, set current or reset current is applied and the variable resistor of the selected PCM cell stores “data”. In read operation, read current is applied and voltage developed across the variable resistor is compared to a reference voltage to provide as read data.
    Type: Application
    Filed: April 4, 2011
    Publication date: January 17, 2013
    Applicant: Mosaid Technologies Incorporated
    Inventor: Jin-Ki Kim
  • Publication number: 20130016552
    Abstract: A semiconductor device including: a first memory cell including a non-volatile first variable resistance element that stores data by varying a resistance value and a selection transistor that selects the first variable resistance element; a first memory layer provided with more than one such first memory cell arranged in a plane; a second memory cell including a non-volatile second variable resistance element that stores data by varying a resistance value and a selection diode that selects the second variable resistance element; and a second memory layer provided with more than one such second memory cell arranged in a plane; wherein more than one such second memory layer is stacked over the first memory layer.
    Type: Application
    Filed: September 19, 2012
    Publication date: January 17, 2013
    Inventor: Naoharu SHINOZAKI
  • Patent number: 8354702
    Abstract: This disclosure provides a method of fabricating a semiconductor stack and associated device, such as a capacitor and DRAM cell. In particular, a bottom electrode has a material selected for lattice matching characteristics. This material may be created from a relatively inexpensive metal oxide which is processed to adopt a conductive, but difficult-to-produce oxide state, with specific crystalline form; to provide one example, specific materials are disclosed that are compatible with the growth of rutile phase titanium dioxide (TiO2) for use as a dielectric, thereby leading to predictable and reproducible higher dielectric constant and lower effective oxide thickness and, thus, greater part density at lower cost.
    Type: Grant
    Filed: February 19, 2010
    Date of Patent: January 15, 2013
    Assignee: Elpida Memory, Inc.
    Inventors: Sunil Shanker, Xiangxin Rui, Pragati Kumar, Hanhong Chen, Toshiyuki Hirota
  • Publication number: 20130009229
    Abstract: A semiconductor device includes memory blocks each configured to comprise a pair of channels, each channel including a pipe channel formed in a pipe gate of the memory block and a drain-side channel and a source-side channel coupled to the pipe channel; first slits placed between the memory blocks adjacent to other memory blocks; and a second slit placed between the source-side channel and the drain-side channel of each pair of channels.
    Type: Application
    Filed: June 29, 2012
    Publication date: January 10, 2013
    Applicant: SK hynix Inc.
    Inventors: Ki Hong LEE, Seung Ho PYI, Jung Yun CHANG
  • Patent number: 8349636
    Abstract: A method of manufacturing a phase change memory device is provided. A first insulating layer having a plurality of metal word lines spaced apart at a constant distance is formed on a semiconductor substrate. A plurality of line structures having a barrier metal layer, a polysilicon layer and a hard mask layer are formed to be overlaid on the plurality of metal word lines. A second insulating layer is formed between the line structures. Cross patterns are formed by etching the hard mask layers and the polysilicon layers of the line structures using mask patterns crossed with the metal word lines. A third insulating layer is buried within spaces between the cross patterns. Self-aligned phase change contact holes are formed and at the same time, diode patterns formed of remnant polysilicon layers are formed by selectively removing the hard mask layers constituting the cross patterns.
    Type: Grant
    Filed: July 12, 2010
    Date of Patent: January 8, 2013
    Assignee: Hynix Semiconductor Inc.
    Inventors: Jang Uk Lee, Kang Sik Choi, Hae Chan Park, Jin Hyock Kim, Ja Chun Ku
  • Patent number: 8351243
    Abstract: A nonvolatile memory device with a first conductor extending in a first direction and a semiconductor element above the first conductor. The semiconductor element includes a source, a drain and a channel of a field effect transistor (JFET or MOSFET). The nonvolatile memory device also includes a second conductor above the semiconductor element, the second conductor extending in a second direction. The nonvolatile memory device also includes a resistivity switching material disposed between the first conductor and the semiconductor element or between the second conductor and the semiconductor element. The JFET or MOSFET includes a gate adjacent to the channel, and the MOSFET gate being self-aligned with the first conductor.
    Type: Grant
    Filed: November 16, 2010
    Date of Patent: January 8, 2013
    Assignee: SanDisk 3D LLC
    Inventors: Andrei Mihnea, George Samachisa
  • Patent number: 8350333
    Abstract: A semiconductor device according to an embodiment includes: a semiconductor substrate; a resistance element of a first conductivity type formed in one region of the semiconductor substrate; a field effect transistor of a second conductivity type formed in another region of the semiconductor substrate; and a field effect transistor of the first conductivity type formed in still another region of the semiconductor substrate. The resistance element includes: an insulating film formed in an upper layer portion of the semiconductor substrate; and a well of the first conductivity type formed immediately below the insulating film, an impurity concentration at an arbitrary depth position in the well of the first conductivity is lower than an impurity concentration at the same depth position in a channel region of the field effect transistor of the second conductivity type.
    Type: Grant
    Filed: May 24, 2010
    Date of Patent: January 8, 2013
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Hanae Ishihara, Mitsuhiro Noguchi
  • Publication number: 20130003440
    Abstract: A memory device includes diode plus resistivity switching element memory cells coupled between bit and word lines, single device bit line drivers with gates coupled to a bit line decoder control lead, sources/drains coupled to a bit line driver, and drains/sources coupled to bit lines, single device word line drivers with gates coupled to a word line decoder control lead, sources/drains coupled to a word line driver output, and drains/sources coupled to word lines, a first bleeder diode coupled between a bit line and a first bleeder diode controller, and a second bleeder diode coupled between a word line and a second bleeder diode controller. The first bleeder diode controller connects the first bleeder diode to low voltage in response to a bit line decoder signal. The second bleeder diode controller connects the second bleeder diode to high voltage in response to a word line decoder signal.
    Type: Application
    Filed: September 10, 2012
    Publication date: January 3, 2013
    Applicant: SanDisk 3D LLC
    Inventor: Roy E. Scheuerlein
  • Publication number: 20130003437
    Abstract: A multi-layer cross-point memory array comprises one or more word line (WL) layers, one or more bit line (BL) layers interleaved with the one or more WL layers, and a plurality of memory layers, each memory layer disposed between an adjacent WL layer and an adjacent BL layer, and each memory layer including memory elements configured between cross-points of WLs and BLs of the adjacent WL and BL layers. Memory elements in successive memory layers of the memory array are configured with opposing orientations, so that half-selected memory elements arising during times when data operations are being performed on selected memory elements in the memory array are subjected to stress voltages of a polarity of which they are least susceptible to being disturbed. The memory elements can be discrete re-writeable non-volatile two-terminal memory elements that are fabricated as part of a BEOL fabrication process used to fabricate the memory array.
    Type: Application
    Filed: June 28, 2011
    Publication date: January 3, 2013
    Applicant: UNITY SEMICONDUCTOR CORPORATION
    Inventor: Chang Hua Siau
  • Patent number: 8344350
    Abstract: A programmable resistance memory combines multiple cells into a block that includes one or more shared electrodes. The shared electrode configuration provides additional thermal isolation for the active region of each memory cell, thereby reducing the current required to program each memory cell.
    Type: Grant
    Filed: April 25, 2011
    Date of Patent: January 1, 2013
    Assignee: Ovonyx, Inc.
    Inventors: Wolodymyr Czubatyj, Tyler Lowrey
  • Patent number: 8343798
    Abstract: A method of fabricating a phase change memory having a unit memory cell is described. The unit memory cell includes a phase change element connected to a corresponding vertical cell diode. The phase change element is formed from a phase change material layer formed on an interlayer dielectric layer including a via hole, and etched using a plasma formed from a plasma gas having a molecular weight of 17 or less to form a respective phase change material pattern in the via hole.
    Type: Grant
    Filed: April 12, 2011
    Date of Patent: January 1, 2013
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Byoung-Deog Choi, Byoung-Jae Bae, Jeong-Hee Park
  • Publication number: 20120329222
    Abstract: A phase change memory device having an improved word line resistance and a fabrication method of making the same are presented. The phase change memory device includes a semiconductor substrate, a word line, an interlayer insulation film, a strapping line, a plurality of current paths, a switching element, and a phase change variable resistor. The word line is formed in a cell area of the semiconductor substrate. The interlayer insulation film formed on the word line. The strapping line is formed on the interlayer insulation film such that the strapping line overlaps on top of the word line. The current paths electrically connect together the word line with the strapping line. The switching element is electrically connected to the strapping line. The phase change variable resistor is electrically connected to the switching element.
    Type: Application
    Filed: September 6, 2012
    Publication date: December 27, 2012
    Applicant: SK HYNIX INC.
    Inventors: Mi Ra CHOI, Jang Uk LEE
  • Publication number: 20120329215
    Abstract: Some embodiments include methods of forming memory arrays. A stack of semiconductor material plates may be patterned to subdivide the plates into pieces. Electrically conductive tiers may be formed along sidewall edges of the pieces. The pieces may then be patterned into an array of wires, with the array having vertical columns and horizontal rows. Individual wires may have first ends joining to the electrically conductive tiers, may have second ends in opposing relation to the first ends, and may have intermediate regions between the first and second ends. Gate material may be formed along the intermediate regions. Memory cell structures may be formed at the second ends of the wires. A plurality of vertically-extending electrical interconnects may be connected to the wires through the memory cell structures, with individual vertically-extending electrical interconnects being along individual columns of the array. Some embodiments include memory arrays incorporated into integrated circuitry.
    Type: Application
    Filed: September 7, 2012
    Publication date: December 27, 2012
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Sanh D. Tang, Janos Fucsko
  • Publication number: 20120313065
    Abstract: A semiconductor memory device includes a cell array layer including a first wire, a memory cell stacked on the first wire, and a second wire formed on the memory cell. The memory cell includes a variable resistance element and a current control element The current control element includes a first conductivity-type semiconductor into which a first impurity is doped, an i-type semiconductor in contact with the first conductivity-type semiconductor, a second conductivity-type semiconductor into which a second impurity is doped, and an impact ionization acceleration unit being formed between the i-type semiconductor and one of the first conductivity-type semiconductor and the second conductivity-type semiconductor.
    Type: Application
    Filed: March 27, 2012
    Publication date: December 13, 2012
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Jun NISHIMURA, Nobuaki YASUTAKE, Takayuki OKAMURA
  • Publication number: 20120313180
    Abstract: In an embodiment of the invention, a non-volatile anti-fuse memory cell is disclosed. The memory cell consists of a programmable n-channel diode-connectable transistor. The poly-silicon gate of the transistor has two portions. One portion is doped more highly than a second portion. The transistor also has a source with two portions where one portion of the source is doped more highly than a second portion. The portion of the gate that is physically closer to the source is more lightly doped than the other portion of the poly-silicon gate. The portion of the source that is physically closer to the lightly doped portion of the poly-silicone gate is lightly doped with respect to the other portion of the source. When the transistor is programmed, a rupture in the insulator will most likely occur in the portion of the poly-silicone gate that is heavily doped.
    Type: Application
    Filed: August 8, 2012
    Publication date: December 13, 2012
    Applicant: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Allan T. Mitchell, Mark A. Eskew, Keith Jarreau
  • Publication number: 20120313064
    Abstract: A semiconductor memory device includes a cell array layer having a memory cell. The memory cell has a current control device, a variable resistance device and a metal layer for silicide. A method for manufacturing the semiconductor memory device includes: forming the metal layer for silicide on a semiconductor layer for forming the current control device and a variable resistance device layer; selectively removing the variable resistance device layer and the metal layer through first etching; forming a first protective layer to cover at least a side surface of the metal layer exposed by the first etching; selectively removing a part of the semiconductor layer, through second etching; and forming a second protective layer to cover the variable resistance device layer, the metal layer for silicide, and the semiconductor layer.
    Type: Application
    Filed: March 27, 2012
    Publication date: December 13, 2012
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventor: Jun NISHIMURA
  • Patent number: 8329516
    Abstract: A plurality of nanowires is grown on a first substrate in a first direction perpendicular to the first substrate. An insulation layer covering the nanowires is formed on the first substrate to define a nanowire block including the nanowires and the insulation layer. The nanowire block is moved so that each of the nanowires is arranged in a second direction parallel to the first substrate. The insulation layer is partially removed to partially expose the nanowires. A gate line covering the exposed nanowires is formed. Impurities are implanted into portions of the nanowires adjacent to the gate line.
    Type: Grant
    Filed: February 24, 2012
    Date of Patent: December 11, 2012
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Moon-Sook Lee
  • Patent number: 8329545
    Abstract: Subject matter disclosed herein relates to a method of manufacturing a semiconductor integrated circuit device, and more particularly to a method of fabricating a charge trap NAND flash memory device.
    Type: Grant
    Filed: December 30, 2008
    Date of Patent: December 11, 2012
    Assignee: Micron Technology, Inc.
    Inventors: Umberto M. Meotto, Giulio Albini, Paolo Tessariol, Paola Bacciaglia, Marcello Mariani
  • Publication number: 20120309155
    Abstract: A semiconductor process is provided. A substrate is provided, gates each including a silicon layer, a silicide layer and a cap layer are formed thereon, and doped regions are formed at two sides of each gate. An insulating layer is formed to cover a memory region and a periphery region. First contact holes are formed in the insulating layer in the memory region, and each first contact hole is disposed between the two adjacent gates and exposes the doped region. A contact plug is formed in each first contact hole to electrically connect the doped region. A patterned mask layer is formed on the substrate to cover the memory region and expose a portion of the periphery region. Using the patterned mask layer as a mask, second and third contact holes are formed in the insulating layer in the periphery region, to expose the silicide layer and the doped region.
    Type: Application
    Filed: June 3, 2011
    Publication date: December 6, 2012
    Applicant: NANYA TECHNOLOGY CORPORATION
    Inventors: Wen-Chieh Wang, Yi-Nan Chen, Hsien-Wen Liu
  • Patent number: 8324056
    Abstract: A vertical pillar semiconductor device may include a substrate, a group of channel patterns, a gate insulation layer pattern and a gate electrode. The substrate may be divided into an active region and an isolation layer. A first impurity region may be formed in the substrate corresponding to the active region. The group of channel patterns may protrude from a surface of the active region and may be arranged parallel to each other. A second impurity region may be formed on an upper portion of the group of channel patterns. The gate insulation layer pattern may be formed on the substrate and a sidewall of the group of channel patterns. The gate insulation layer pattern may be spaced apart from an upper face of the group of channel patterns. The gate electrode may contact the gate insulation layer and may enclose a sidewall of the group of channel patterns.
    Type: Grant
    Filed: October 7, 2011
    Date of Patent: December 4, 2012
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Yong-Hoon Son, Jong-Wook Lee, Jong-Hyuk Kang
  • Patent number: 8324045
    Abstract: A semiconductor device and a method of forming the same are provided. The method includes preparing a semiconductor substrate. Insulating layers may be sequentially formed on the semiconductor substrate. Active elements may be formed between the insulating layers. A common node may be formed in the insulating layers to be electrically connected to the active elements. The common node and the active elements may be 2-dimensionally and repeatedly arranged on the semiconductor substrate.
    Type: Grant
    Filed: August 15, 2011
    Date of Patent: December 4, 2012
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jun-Beom Park, Soon-Moon Jung, Ki-Nam Kim
  • Publication number: 20120292589
    Abstract: A nonvolatile memory element according to the present disclosure includes: a variable resistance element including a first electrode layer, a second electrode layer, and a variable resistance layer which is located between the first electrode layer and the second electrode layer and has a resistance value that reversibly changes based on an electrical signal applied between the first electrode layer and the second electrode layer; and a fixed resistance layer having a predetermined resistance value and stacked together with the variable resistance element. The variable resistance layer includes (i) a first transition metal oxide layer which is oxygen deficient and (ii) a second transition metal oxide layer which has a higher oxygen content atomic percentage than the first transition metal oxide layer. The predetermined resistance value ranges from 70? to 1000? inclusive.
    Type: Application
    Filed: December 12, 2011
    Publication date: November 22, 2012
    Inventors: Shinichi Yoneda, Takumi Mikawa
  • Publication number: 20120292682
    Abstract: In an embodiment of the invention, a method of fabricating a floating-gate PMOSFET (p-type metal-oxide semiconductor field-effect transistor) is disclosed. A silicide blocking layer (e.g. oxide, nitride) is used not only to block areas from being silicided but to also form an insulator on top of a poly-silicon gate. The insulator along with a top electrode (control gate) forms a capacitor on top of the poly-silicon gate. The poly-silicon gate also serves at the bottom electrode of the capacitor. The capacitor can then be used to capacitively couple charge to the poly-silicon gate. Because the poly-silicon gate is surrounded by insulating material, the charge coupled to the poly-silicon gate may be stored for a long period of time after a programming operation.
    Type: Application
    Filed: May 19, 2011
    Publication date: November 22, 2012
    Applicant: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Shanjen Pan, Allan T. Mitchell, Weidong Tian
  • Publication number: 20120287709
    Abstract: In accordance with an embodiment, a non volatile semiconductor memory device includes a substrate, a first electrode, a functional film, and a second electrode. The first electrode is provided on the substrate. The functional film is located on the first electrode and serves as a storage medium. The second electrode is provided on the functional film or in the functional film, and has a convex curved upper surface.
    Type: Application
    Filed: February 29, 2012
    Publication date: November 15, 2012
    Applicant: Kabushiki Kaisha Toshiba
    Inventor: Kyoichi SUGURO
  • Publication number: 20120289039
    Abstract: According to one embodiment, an opening pattern is formed in the core film above a processing target, and a mask film is conformally formed above the processing target. Next, etch-back of the mask film is performed so that the mask film remains on a side surface of the core film. After that, line-and-space shaped core patterns, made of the core film, is formed in an area other than an area forming the opening pattern. Next, sidewall patterns are formed around the core patterns, and the core patterns are removed. Next, the processing target is patterned by using the mask film and the sidewall patterns.
    Type: Application
    Filed: February 2, 2012
    Publication date: November 15, 2012
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventor: Seiji KAJIWARA
  • Publication number: 20120281478
    Abstract: A memory includes an array of memory cells including rows and columns. The memory includes circuitry coupled to the word lines applying a first bias voltage to a first set of spaced-apart locations on a word line or word lines in the array, while applying a second bias voltage different than the first bias voltage, to a second set of spaced-apart locations on the word line or word lines, locations in the first set of spaced-apart locations being interleaved among locations in the second set of spaced-apart locations, whereby current flow is induced between locations in the first and second sets of locations that cause heating of the word line or word lines.
    Type: Application
    Filed: April 27, 2012
    Publication date: November 8, 2012
    Applicant: Macronix International Co., Ltd.
    Inventors: HANG-TING LUE, Chun-Hsiung Hung
  • Publication number: 20120282752
    Abstract: In one or more embodiments, methods of fabricating current-confining stack structures in a phase change memory switch (PCMS) cell are provided. One embodiment shows a method of fabricating a PCMS cell with current in an upper chalcogenide confined in the row and column directions. In one embodiment, methods of fabricating a PCMS cell with sub-lithographic critical dimension memory chalcogenide are shown. In another embodiment, methods of fabricating a PCMS cell with sub-lithographic critical dimension middle electrode heaters are disclosed.
    Type: Application
    Filed: July 20, 2012
    Publication date: November 8, 2012
    Inventors: Jong Won Lee, DerChang Kau, Gianpaolo Spadini
  • Publication number: 20120273867
    Abstract: A non-volatile memory device includes a substrate; a first conductive layer over the substrate, a second conductive layer over the first conductive layer, a stacked structure disposed over the second conductive layer, wherein the stacked structure includes a plurality of first inter-layer dielectric layers and a plurality of third conductive layers alternately stacked, a pair of first channels that penetrate the stacked structure and the second conductive layer, a second channel which is buried in the first conductive layer, covered by the second conductive layer, and coupled to lower ends of the pair of the first channels; and a memory layer formed along internal walls of the first and second channels.
    Type: Application
    Filed: April 27, 2012
    Publication date: November 1, 2012
    Inventors: Eun-Jung KO, Dae-Young Seo, Sang-Moo Choi
  • Publication number: 20120273842
    Abstract: A memory array including a plurality of memory cells, a plurality of word lines, a dummy word line, and a plug is provided. Each word line is coupled to corresponding memory cells. A dummy word line is directly adjacent to an outmost word line of the plurality of word lines. The plug is located between the dummy word line and the outmost word line.
    Type: Application
    Filed: July 13, 2012
    Publication date: November 1, 2012
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Chun-Yuan Lo, Cheng-Ming Yih, Wen-Pin Lu
  • Publication number: 20120273870
    Abstract: Memory arrays and methods of their formation are disclosed. One such memory array has memory-cell strings are formed adjacent to separated substantially vertical, adjacent semiconductor structures, where the separated semiconductor structures couple the memory cells of the respective strings in series. For some embodiments, two dielectric pillars may be formed from a dielectric formed in a single opening, where each of the dielectric pillars has a pair of memory-cell strings adjacent thereto and where at least one memory cell of one of the strings on one of the pillars and at least one memory cell of one of the strings on the other pillar are commonly coupled to an access line.
    Type: Application
    Filed: July 12, 2012
    Publication date: November 1, 2012
    Inventor: Zengtao LIU
  • Publication number: 20120273747
    Abstract: According to one embodiment, a semiconductor device includes a fin type stacked layer structure which has first to third semiconductor layers, and first to third layer select transistors to select one of the first to third semiconductor layers. The second layer select transistor is normally on in the second semiconductor layer, and is controlled to be on or off in the first and third semiconductor layers. A channel region of the second semiconductor layer which is covered with a gate electrode of the second layer select transistor has a metal silicide.
    Type: Application
    Filed: April 27, 2012
    Publication date: November 1, 2012
    Inventors: Masumi SAITOH, Toshinori NUMATA, Kiwamu SAKUMA, Haruka KUSAI, Takayuki ISHIKAWA
  • Publication number: 20120275207
    Abstract: An integrated circuit having an SRAM cell includes a pair of cross-coupled inverters with first driver and load transistors connected to provide a first storage node and second driver and load transistors connected to provide a second storage node. The SRAM cell also includes first and second pass gate transistors controlled by at least one word line and respectively connected between a first bit line and the first storage node and a second bit line and the second storage node; wherein a first driver transistor threshold voltage is different than a second driver transistor threshold voltage and one of the first and second driver threshold voltages is different than a pass gate transistor threshold voltage. Alternately, a threshold voltage of the first and second driver transistors is different than a symmetrical pass gate transistor threshold voltage. Additionally, methods of manufacturing an integrated circuit having an SRAM cell are provided.
    Type: Application
    Filed: April 29, 2011
    Publication date: November 1, 2012
    Applicant: Texas Instruments Incorporated
    Inventors: Theodore W. Houston, Puneet Kohli, Amitava Chatterjee
  • Publication number: 20120267699
    Abstract: According to one embodiment, a nonvolatile semiconductor memory device includes sheet-like memory strings arranged in a matrix shape substantially perpendicularly to a substrate. A control gate electrode film includes a common connecting section that extends in a first direction and an electrode forming section that is provided for each of memory cells above or below a floating gate electrode film via an inter-electrode dielectric film to project from the common connecting section in a second direction. The floating gate electrode film extends in the second direction and is formed on a first principal plane of a sheet-like semiconductor film via a tunnel dielectric film.
    Type: Application
    Filed: January 18, 2012
    Publication date: October 25, 2012
    Applicant: Kabushiki Kaisha Toshiba
    Inventor: Masahiro Kiyotoshi
  • Publication number: 20120267597
    Abstract: A memory device includes an array of electrodes that includes thin film plates of electrode material. Multilayer strips are arranged as bit lines over respective columns in the array of electrodes, including a layer of memory material and a layer of top electrode material. The multilayer strips have a primary body and a protrusion having a width less than that of the primary body and is self-aligned with contact surfaces on the thin film plates. Memory material in the protrusion contacts surfaces on the distal ends of thin film plates of electrodes in the corresponding column in the array. The device can be made using a damascene process in self-aligned forms over the contact surfaces.
    Type: Application
    Filed: April 19, 2011
    Publication date: October 25, 2012
    Applicant: Macronix International Co., Ltd.
    Inventor: Hsiang-Lan Lung
  • Publication number: 20120262973
    Abstract: An array of nonvolatile memory cells includes a plurality of vertically stacked tiers of nonvolatile memory cells. The tiers individually include a first plurality of horizontally oriented first electrode lines and a second plurality of horizontally oriented second electrode lines crossing relative to the first electrode lines. Individual of the memory cells include a crossing one of the first electrode lines and one of the second electrode lines and material there-between. Specifically, programmable material, a select device in series with the programmable material, and current conductive material in series between and with the programmable material and the select device are provided in series with such crossing ones of the first and second electrode lines. The material and devices may be oriented for predominant current flow in defined horizontal and vertical directions. Method and other implementations and aspects are disclosed.
    Type: Application
    Filed: April 15, 2011
    Publication date: October 18, 2012
    Inventor: Jun Liu
  • Publication number: 20120261635
    Abstract: A resistive random access memory cell over a substrate includes a memory stack structure and a sidewall spacer. The memory stack structure is over the substrate and includes a first electrode layer, a second electrode layer, and a metal oxide layer between the first electrode layer and the second electrode layer. The metal oxide layer has a sidewall. The sidewall spacer is adjacent to the sidewall and has a composition including silicon, carbon, and nitrogen.
    Type: Application
    Filed: April 12, 2011
    Publication date: October 18, 2012
    Inventors: Feng Zhou, Ko-Min Chang, Cheong Min Hong
  • Publication number: 20120258574
    Abstract: A memory device includes a first bit line coupled to a first source/drain region of a first multiplexer gate, a second bit line coupled to a first source/drain region of a second multiplexer gate, and a sensing device having an input coupled to a second source/drain region of the first multiplexer gate and a second source/drain region of the second multiplexer gate. The input of the sensing device is formed at a vertical level that is different than a vertical level at which at least one of the first and second bit lines is formed.
    Type: Application
    Filed: June 13, 2012
    Publication date: October 11, 2012
    Inventors: Akira GODA, Seiichi Aritome
  • Publication number: 20120256150
    Abstract: Some embodiments include methods of patterning platinum-containing material. An opening may be formed to extend into an oxide. Platinum-containing material may be formed over and directly against an upper surface of the oxide, and within the opening. The platinum-containing material within the opening may be a plug having a lateral periphery. The lateral periphery of the plug may be directly against the oxide. The platinum-containing material may be subjected to polishing to remove the platinum-containing material from over the upper surface of the oxide. The polishing may delaminate the platinum-containing material from the oxide, and may remove the platinum-containing material from over the oxide with an effective selectivity for the platinum-containing material relative to the oxide of at least about 5:1. Some embodiments include methods of forming memory cells. Some embodiments include integrated circuitry having platinum-containing material within an opening in an oxide and directly against the oxide.
    Type: Application
    Filed: April 8, 2011
    Publication date: October 11, 2012
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Andrey V. Zagrebelny, Chet E. Carter
  • Publication number: 20120258577
    Abstract: A capacitor-less memory cell, memory device, system and process of forming the capacitor-less memory cell includes forming the memory cell in an active area of a substantially physically isolated portion of the bulk semiconductor substrate. A pass transistor is formed on the active area for coupling with a word line. The capacitor-less memory cell further includes a read/write enable transistor vertically configured along at least one vertical side of the active area and operable during a reading of a logic state with the logic state being stored as charge in a floating body area of the active area, causing different determinable threshold voltages for the pass transistor.
    Type: Application
    Filed: June 15, 2012
    Publication date: October 11, 2012
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Fernando Gonzalez, Chandra V. Mouli
  • Publication number: 20120252182
    Abstract: A method of fabricating a semiconductor device includes providing a substrate including a first region and a second region, forming a first trench having a first width in the first region and a second trench having a second width in the second region, and the second width is greater than the first width. The method also includes forming a first insulation layer in the first and second trenches, removing the first insulation layer in the second trench to form a first insulation pattern that includes the first insulation layer remaining in the first trench, forming on the substrate a second insulation layer that fills the second trench, and the second insulation layer includes a different material from the first insulation layer.
    Type: Application
    Filed: February 9, 2012
    Publication date: October 4, 2012
    Inventors: Kyungmun BYUN, Byoungdeog Choi, Eunkee Hong, Mansug Kang
  • Publication number: 20120248398
    Abstract: Vertical transistor phase change memory and methods of processing phase change memory are described herein. One or more methods include forming a dielectric on at least a portion of a vertical transistor, forming an electrode on the dielectric, and forming a vertical strip of phase change material on a portion of a side of the electrode and on a portion of a side of the dielectric extending along the electrode and the dielectric into contact with the vertical transistor.
    Type: Application
    Filed: June 12, 2012
    Publication date: October 4, 2012
    Applicant: MICRON TECHNOLOGY, INC.
    Inventor: Jun Liu
  • Publication number: 20120250396
    Abstract: A memory cell is provided that includes a steering element, and a non-volatile state change element coupled in series with the steering element. The steering element and state change element are disposed in a vertically-oriented pillar. Other aspects are also provided.
    Type: Application
    Filed: June 19, 2012
    Publication date: October 4, 2012
    Inventors: Mark G. Johnson, Thomas H. Lee, Vivek Subramanian, Paul Michael Farmwald, James M. Cleeves
  • Publication number: 20120252178
    Abstract: A capacitor and an NVM cell are formed in an integrated fashion so that the etching of the capacitor is useful in end point detection of an etch of the NVM cell. This is achieved using two conductive layers over an NVM region and over a capacitor region. The first conductive layer is patterned in preparation for a subsequent patterning step which includes a step of patterning both the first conductive layer and the second conductive layer in both the NVM region and the capacitor region. The subsequent etch provides for an important alignment of a floating gate to the overlying control gate by having both conductive layers etched using the same mask. During this subsequent etch, the fact that first conductive material is being etched in the capacitor region helps end point detection of the etch of the first conductive layer in the NVM region.
    Type: Application
    Filed: March 31, 2011
    Publication date: October 4, 2012
    Inventors: Bradley P. Smith, Mehul D. Shroff
  • Publication number: 20120248504
    Abstract: An array of vertically stacked tiers of memory cells includes a plurality of horizontally oriented access lines within individual tiers of memory cells and a plurality of horizontally oriented global sense lines elevationally outward of the tiers. A plurality of select transistors is elevationally inward of the tiers. A plurality of pairs of local first and second vertical lines extends through the tiers. The local first vertical line within individual of the pairs is in conductive connection with one of the global sense lines and in conductive connection with one of the two source/drain regions of one of the select transistors. The local second vertical line within individual of the pairs is in conductive connection with another of the two source/drain regions of the one select transistor. Individual of the memory cells include a crossing one of the local second vertical lines and one of the horizontal access lines and programmable material there-between.
    Type: Application
    Filed: March 29, 2011
    Publication date: October 4, 2012
    Inventor: Zengtao T. Liu
  • Publication number: 20120252184
    Abstract: A variable resistance element comprises, when M is a transition metal element, O is oxygen, and x and y are positive numbers satisfying y>x; a lower electrode; a first oxide layer formed on the lower electrode and comprising MOx when a content ratio of O with respect to M is x; a second oxide layer formed on the first oxide layer and comprising MOy when a content ratio of O with respect to M is y; an upper electrode formed on the second oxide layer; a protective layer formed on the upper electrode and comprising an electrically conductive material having a composition different from a composition of the upper electrode; an interlayer insulating layer formed to cover the protective layer; and an upper contact plug formed inside an upper contact hole penetrating the interlayer insulating layer.
    Type: Application
    Filed: December 14, 2010
    Publication date: October 4, 2012
    Inventors: Takeki Ninomiya, Yoshio Kawashima, Yukio Hayakawa, Takumi Mikawa
  • Publication number: 20120252177
    Abstract: A gate-edge diode is made in a diode region of a substrate and a non-volatile memory cell is made in an NVM region of the substrate. A first dielectric layer is formed on the substrate in the diode region and the NVM region. A first conductive layer is formed on the first dielectric layer. A second dielectric layer is formed on the first conductive layer. A second conductive layer is formed over the second dielectric layer. A first mask is formed over the diode region having a first pattern. The first pattern is of a plurality of fingers and a second mask over the NVM region has a second pattern. The second pattern is of a gate stack of the non-volatile memory cell. An etch is performed through the second conductive layer, the second dielectric layer, and the first conductive layer to leave the first pattern of the plurality of fingers in the diode region and the second pattern of the gate stack in the NVM region.
    Type: Application
    Filed: March 31, 2011
    Publication date: October 4, 2012
    Inventor: Bradley P. Smith
  • Patent number: 8278170
    Abstract: Methods of forming nonvolatile memory devices according to embodiments of the invention include techniques to form highly integrated vertical stacks of nonvolatile memory cells. These vertical stacks of memory cells can utilize dummy memory cells to compensate for process artifacts that would otherwise yield relatively poor functioning memory cell strings when relatively large numbers of memory cells are stacked vertically on a semiconductor substrate using a plurality of vertical sub-strings electrically connected in series.
    Type: Grant
    Filed: June 21, 2011
    Date of Patent: October 2, 2012
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Changhyun Lee, Sunil Shim, Jaehoon Jang, Sunghoi Hur, Hansoo Kim, Kihyun Kim
  • Publication number: 20120243348
    Abstract: In the disclosed technology, the device identification code of a memory integrated circuit is changeable. In some cases, multiple device identification codes are stored on the memory integrated circuit, and multiple device identification code selection data are stored on the memory integrated circuit.
    Type: Application
    Filed: March 21, 2011
    Publication date: September 27, 2012
    Applicant: Macronix International Co., Ltd.
    Inventors: Nai-Ping Kuo, Kuen-Long Chang, Ken-Hui Chen, Ming-Chih Hsieh
  • Publication number: 20120241711
    Abstract: Some embodiments include a memory device and methods of forming the same. The memory device can include an electrode coupled to a memory element. The electrode can include different materials located at different portions of the electrode. The materials can create different dielectrics contacting the memory elements at different locations. Various states of the materials in the memory device can be used to represent stored information. Other embodiments are described.
    Type: Application
    Filed: March 25, 2011
    Publication date: September 27, 2012
    Inventors: Durai Vishak Nirmal Ramaswamy, Kirk D. Prall