Prom (epo) Patents (Class 257/E21.666)
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Patent number: 12167591Abstract: The present application discloses a semiconductor device, including a substrate; an isolation layer positioned in the substrate and defining an active area of the substrate, wherein the active area includes a transistor portion and a programmable portion extending from the transistor portion; a gate structure positioned on the transistor portion; a drain region positioned in the programmable portion and the transistor portion, and adjacent to the gate structure; a source region positioned in the transistor portion, adjacent to the gate structure, and opposite to the drain region with the gate structure interposed therebetween; a middle insulating layer positioned on the programmable portion; and an upper conductive layer positioned on the middle insulating layer. The drain region in the programmable portion, the middle insulating layer, and the upper conductive layer together configure a programmable structure.Type: GrantFiled: February 23, 2022Date of Patent: December 10, 2024Assignee: NANYA TECHNOLOGY CORPORATIONInventors: Wei-Zhong Li, Hsih-Yang Chiu
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Patent number: 12131798Abstract: Provided is a non-volatile memory device. The non-volatile memory device includes: a memory cell array including cell strings, each including memory cells respectively connected to word lines; a page buffer circuit including page buffers respectively connected to the memory cells through bit lines, wherein a first page buffer is connected to a first cell string through a first bit line; a control logic circuit configured to control a pre-sensing operation to disconnect the first bit line and the first cell string from each other during a pre-sensing period for detecting a defect of the first bit line and control a post-sensing operation to connect the first bit line and the first cell string to each other in a post-sensing period for detecting defects of the word lines and the first bit line; and a defect detection circuit configured to detect defects of the word lines based the sensing operations.Type: GrantFiled: October 24, 2022Date of Patent: October 29, 2024Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Junyoung Ko, Sangwan Nam, Youse Kim, Heewon Kim
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Patent number: 11984397Abstract: A semiconductor structure includes a substrate, first and second transistors, first and second fuses, a contact structure, and a dielectric layer. The substrate has first and second device regions, and a fuse region. The first and second transistors are respectively above the first and second device regions. The first fuse is electrically connected to the first transistor and includes a first fuse active region having first and second portions. The second fuse is electrically connected to the second transistor and includes a second fuse active region having third and fourth portions. The contact structure interconnects the second portion and the third portion, wherein the first portion and the fourth portion are on opposite sides of the contact structure. The dielectric layer is between the contact structure and the fuse region of the substrate.Type: GrantFiled: November 24, 2021Date of Patent: May 14, 2024Assignee: NANYA TECHNOLOGY CORPORATIONInventors: Wei-Zhong Li, Hsih-Yang Chiu
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Patent number: 11942167Abstract: Systems, methods, and apparatuses relating to interlocking transistor active regions are disclosed. An apparatus includes a gate including electrically conductive material and an active material including a doped semiconductor material. A portion of the active material overlapped by the gate has an at least substantially triangular shape. An apparatus includes a plurality of active materials. Each active material includes tapered ends and a plurality of gates. The plurality of active materials is arranged in an interlocking pattern with at least some tapered ends of the active materials interlocking with at least some others of the tapered ends. The plurality of gates overlaps the interlocked tapered ends of the plurality of active materials.Type: GrantFiled: February 24, 2020Date of Patent: March 26, 2024Assignee: Micron Technology, Inc.Inventors: Wei Lu Chu, Jing Wang, Zhiwei Liang, Raghu Sreeramaneni
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Patent number: 11923446Abstract: The present disclosure relates generally to structures in semiconductor devices and methods of forming the same. More particularly, the present disclosure relates to high electron mobility transistor (HEMT) devices having a silicided polysilicon layer. The present disclosure may provide an active region above a substrate, source and drain electrodes in contact with the active region, a gate above the active region, the gate being laterally between the source and drain electrodes, a polysilicon layer above the substrate, and a silicide layer on the polysilicon layer. The active region includes at least two material layers with different band gaps. The polysilicon layer may be configured as an electronic fuse, a resistor, or a diode.Type: GrantFiled: October 17, 2021Date of Patent: March 5, 2024Assignee: GlobalFoundries U.S. Inc.Inventors: Vibhor Jain, Johnatan Avraham Kantarovsky, Mark David Levy, Ephrem Gebreselasie, Yves Ngu, Siva P. Adusumilli
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Patent number: 11854968Abstract: An antifuse structure and IC devices incorporating such antifuse structures in which the antifuse structure includes an dielectric antifuse structure formed on an active area having a first dielectric antifuse electrode, a second dielectric antifuse electrode extending parallel to the first dielectric antifuse electrode, a first dielectric composition between the first dielectric antifuse electrode and the second dielectric antifuse electrode, and a first programming transistor electrically connected to a first voltage supply wherein, during a programming operation a programming voltage is selectively applied to certain of the dielectric antifuse structures to form a resistive direct electrical connection between the first dielectric antifuse electrode and the second dielectric antifuse electrode.Type: GrantFiled: March 4, 2021Date of Patent: December 26, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Meng-Sheng Chang, Chien-Ying Chen, Yao-Jen Yang
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Patent number: 11652143Abstract: Disclosed herein are IC structures, packages, and devices that include thin-film transistors (TFTs) integrated on the same substrate/die/chip as III-N devices, e.g., III-N transistors. In various aspects, TFTs integrated with III-N transistors have a channel and source/drain materials that include one or more of a crystalline material, a polycrystalline semiconductor material, or a laminate of crystalline and polycrystalline materials. In various aspects, TFTs integrated with III-N transistors are engineered to include one or more of 1) graded dopant concentrations in their source/drain regions, 2) graded dopant concentrations in their channel regions, and 3) thicker and/or composite gate dielectrics in their gate stacks.Type: GrantFiled: March 28, 2019Date of Patent: May 16, 2023Assignee: Intel CorporationInventors: Han Wui Then, Nidhi Nidhi, Paul B. Fischer, Rahul Ramaswamy, Walid M. Hafez, Samuel Jack Beach, Xiaojun Weng, Johann Christian Rode, Marko Radosavljevic, Sansaptak Dasgupta
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Patent number: 9012970Abstract: A memory array including a plurality of memory cells. In one embodiment, each memory cell is coupled to an electrically conductive gate material. A word line is coupled to the gate material at a contact interface level. A pair of pillars is comprised of an insulating material that extends below the contact interface level. Also, a method to prevent a gate contact from electrically connecting to a source contact for a plurality of memory cells on a substrate. The method includes depositing and etching gate material to partially fill a space between the pillars and to form a word line for the memory cells, forming a pair of pillars comprised of an insulating material and depositing a gate contact between the pair of pillars such that the gate contact electrically couples the gate material at a contact interface level and the insulating material extends below the contact interface level.Type: GrantFiled: August 16, 2012Date of Patent: April 21, 2015Assignee: International Business Machines CorporationInventors: Matthew J. BrightSky, Chung H. Lam, Gen P. Lauer
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Patent number: 8748264Abstract: A discrete storage element film is disposed above a tunneling dielectric film against a shallow trench isolation structure and under conditions to resist formation of the discrete storage element film upon vertical exposures of the shallow trench isolation structure. A discrete storage element film is also disposed above a tunneling dielectric film against a recessed isolation structure. A microelectronic device incorporates the discrete storage element film. A computing system incorporates the microelectronic device.Type: GrantFiled: March 30, 2007Date of Patent: June 10, 2014Assignee: Intel CorporationInventor: Kyu S. Min
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Patent number: 8673717Abstract: A method to prevent a gate contact from electrically connecting to a source contact for a plurality of memory cells on a substrate. The method includes forming pillars with a doped silicon region on the substrate. An electrically conductive gate material is deposited between and over the pillars. The gate material is etched such that the gate material partially fills a space between the pillars. The pillars are then etched such that a pair of pillars from the pillars include an insulating material over the doped silicon region. A gate contact is deposited between the pair of pillars such that the gate contact electrically couples the gate material at a contact interface level, and the insulating material extends below the contact interface level.Type: GrantFiled: July 18, 2012Date of Patent: March 18, 2014Assignee: International Business Machines CorporationInventors: Matthew J. BrightSky, Chung H. Lam, Gen P. Lauer
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Patent number: 8350308Abstract: A read only memory is manufactured with a plurality of transistors (4) on a semiconductor substrate (2). A low-k dielectric (10) and interconnects (14) are provided over the transistors (4). To program the read only memory, the low-k dielectric is implanted with ions (22) in unmasked regions (20) leaving the dielectric unimplanted in masked regions (18). The memory thus formed is difficult to reverse engineer.Type: GrantFiled: March 5, 2009Date of Patent: January 8, 2013Assignee: NXP B.V.Inventors: Aurelie Humbert, Pierre Goarin, Romain Delhougne
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Patent number: 8243492Abstract: Embodiments relate to a manufacturing method of a one time programmable (OTP) memory device including: forming a common source in a linear configuration on a semiconductor substrate; forming a gate dielectric layer on the semiconductor substrate at both sides of the source; forming a gate over the gate dielectric layer; forming a spacer between the gates and at both side walls of the gate; and forming a drain on the semiconductor substrate at both sides of the spacer. With embodiments, the OTP memory device can be formed together with the logic part using the logic process and can increase the storage capacity of the OTP memory device by improving density of memory arrays.Type: GrantFiled: December 2, 2009Date of Patent: August 14, 2012Assignee: Dongbu HiTek Co., Ltd.Inventor: Sung-Kun Park
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Patent number: 8212231Abstract: A resistive memory device and a fabricating method thereof are introduced herein. In resistive memory device, a plurality of bottom electrodes is disposed in active region of a substrate. Each of the bottom electrodes is disposed to correspond to each of the conductive channels; a patterned resistance switching material layer and the patterned top electrode layer are sequentially stacked on the bottom electrodes. An air dielectric layer exists between the patterned resistance switching material layer and the bottom electrodes. A plurality of patterned interconnections is disposed on the patterned top electrode.Type: GrantFiled: December 30, 2009Date of Patent: July 3, 2012Assignee: Industrial Technology Research InstituteInventor: Wei-Su Chen
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Patent number: 7902048Abstract: A method of forming a phase change layer may include providing a bivalent first precursor having germanium (Ge), a second precursor having antimony (Sb), and a third precursor having tellurium (Te) onto a surface on which the phase change layer is to be formed. The phase change layer may be formed by CVD (e.g., MOCVD, cyclic-CVD) or ALD. The composition of the phase change layer may be varied by modifying the deposition pressure, deposition temperature, and/or supply rate of reaction gas. The deposition pressure may range from about 0.001-10 torr, the deposition temperature may range from about 150-350° C., and the supply rate of the reaction gas may range from about 0-1 slm. Additionally, the above phase change layer may be provided in a via hole and bounded by top and bottom electrodes to form a storage node.Type: GrantFiled: October 22, 2007Date of Patent: March 8, 2011Assignee: Samsung Electronics Co., Ltd.Inventors: Woong-chul Shin, Jae-ho Lee, Youn-seon Kang
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Patent number: 7898039Abstract: A nonvolatile memory device includes a string selection gate and a ground selection gate on a semiconductor substrate, and a plurality of memory cell gates on the substrate between the string selection gate and the ground selection gate. First impurity regions extend into the substrate to a first depth between ones of the plurality of memory cell gates. Second impurity regions extend into the substrate to a second depth that is greater than the first depth between the string selection gate and a first one of the plurality of memory cell gates immediately adjacent thereto, and between the ground selection gate and a last one of the plurality of memory cell gates immediately adjacent thereto. Related fabrication methods are also discussed.Type: GrantFiled: February 15, 2007Date of Patent: March 1, 2011Assignee: Samsung Electronics Co., Ltd.Inventors: Dong-Yean Oh, Jai-Hyuk Song, Chang-Sub Lee, Chang-Hyun Lee, Hyun-Jae Kim
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Publication number: 20110006352Abstract: A read only memory is manufactured with a plurality of transistors (4) on a semiconductor substrate (2). A low-k dielectric (10) and interconnects (14) are provided over the transistors (4). To program the read only memory, the low-k dielectric is implanted with ions (22) in unmasked regions (20) leaving the dielectric unimplanted in masked regions (18). The memory thus formed is difficult to reverse engineer.Type: ApplicationFiled: March 5, 2009Publication date: January 13, 2011Applicant: NXP B.V.Inventors: Aurelie Humbert, Pierre Goarin, Romain Delhougne
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Patent number: 7808054Abstract: An OTP memory cell according to the present invention includes: a semiconductor substrate including a lower electrode forming region having a lower electrode formed therein, a diffusion layer forming region having a source and a drain formed therein, a first trench-type insulating region, and a second trench-type insulating region; an upper electrode being in contact with the first trench-type insulating region and formed on the lower electrode with the first insulating film interposed therebetween; and a gate electrode being in contact with the second trench-type insulating region and formed on a channel region with the second insulating film interposed therebetween, in which a shape of at least a part of an end of the lower electrode forming region in contact with the first insulating film is sharper than a shape of an end of the channel region in contact with the second insulating film.Type: GrantFiled: May 15, 2008Date of Patent: October 5, 2010Assignee: NEC Electronics CorporationInventor: Masahiro Wada
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Patent number: 7800155Abstract: A semiconductor device includes a gate insulating film formed on a semiconductor substrate, a first gate electrode formed on the gate insulating film, a second gate electrode formed on the gate insulating film between the first gate electrode and a contact plug, a first silicon oxide film formed above the substrate between the first and second gate electrodes, a first silicon nitride film formed along the substrate and a side surface of the second gate electrode between the contact plug and the second gate electrode, a second silicon oxide film formed on the first silicon oxide film, the first gate electrode and the second gate electrode, the second silicon oxide film including an upper surface having a height greater than the height of a first upper surface of the first gate electrode relative to the substrate, and a second silicon nitride film formed on the second silicon oxide film.Type: GrantFiled: September 20, 2007Date of Patent: September 21, 2010Assignee: Kabushiki Kaisha ToshibaInventor: Koichi Matsuno
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Patent number: 7795094Abstract: A recessed dielectric antifuse device includes a substrate and laterally spaced source and drain regions formed in the substrate. A recess is formed between the source and drain regions. A gate and gate oxide are formed in the recess and lightly doped source and drain extension regions contiguous with the laterally spaced source and drain regions are optionally formed adjacent the recess. Programming of the recessed dielectric antifuse is performed by application of power to the gate and at least one of the source region and the drain region to breakdown the dielectric, which minimizes resistance between the gate and the channel.Type: GrantFiled: September 2, 2004Date of Patent: September 14, 2010Assignee: Micron Technology, Inc.Inventor: Dwayne Kreipl
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Patent number: 7692252Abstract: A semiconductor integrated circuit device includes a cell well, a memory cell array formed on the cell well and having a memory cell area and cell well contact area, first wiring bodies arranged in the memory cell area, and second wiring bodies arranged in the cell well contact area. The layout pattern of the second wiring bodies is the same as the layout pattern of the first wiring bodies. The cell well contact area comprises cell well contacts that have the same dopant type as the cell well and that function as source/drain regions of dummy transistors formed in the cell well contact area.Type: GrantFiled: December 7, 2006Date of Patent: April 6, 2010Assignee: Kabushiki Kaisha ToshibaInventors: Atsuhiro Sato, Kikuko Sugimae, Masayuki Ichige
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Patent number: 7629638Abstract: A semiconductor device, in which both a reduction in a resistivity of a gate electrode and stabilization of transistor characteristics is achieved, and a manufacturing method thereof are disclosed. According to one aspect of the present invention, it is provided a semiconductor device comprising a semiconductor substrate, a plurality of gate electrodes each including an electric charge storage layer formed on the semiconductor substrate through a first insulator, first and second conductor layers, and a second insulator disposed between the electric charge storage layer and the first conductor layer, a barrier insulator provided between the gate electrodes and being in contact with side surfaces alone of the gate electrodes, and an interlayer insulator provided in contact with an upper surface of the second conductor layer.Type: GrantFiled: December 29, 2005Date of Patent: December 8, 2009Assignee: Kabushiki Kaisha ToshibaInventor: Toshitake Yaegashi
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Publication number: 20080036033Abstract: A one-time programmable memory. The memory has a substrate, a diffused electrode disposed on the substrate, a shallow trench isolation (STI) region formed on the substrate, a insulator formed on the STI region and the substrate, and a second electrode. The insulator separates the second electrode from the diffused electrode. At least a part of the second electrode overlaps at least a part of the STI region.Type: ApplicationFiled: August 9, 2007Publication date: February 14, 2008Applicant: Broadcom CorporationInventors: Akira Ito, Henry Chen