Abstract: To be provided are a heat treatment apparatus having blocking members which block gaps between the side walls of nozzle boxes provided with slit nozzles, whose size in the lengthwise direction is greater than the width of a sheet, and the side walls of a heat treatment chamber, and gas having a uniform velocity fluctuating no more than ±25% in the lengthwise direction of the slit nozzles is blown out of the slit nozzles to subject the sheet to heat treatment, resulting in little unevenness of temperature in the widthwise direction and reduced energy loss, and a heat treatment method using this heat treatment apparatus.

Abstract: A heat processing apparatus includes a heating plate configured to heat the substrate; a cover configured to surround a space above the heating plate; an exhaust gas flow forming mechanism configured to exhaust gas inside the cover to form exhaust gas flows within the space above the heating plate; a downflow forming mechanism configured to form downflows uniformly supplied onto an upper surface of the substrate placed on the heating plate; and a control mechanism configured to execute mode switching control between a mode arranged to heat the substrate while forming the downflows by the downflow forming mechanism and a mode arranged to heat the substrate while forming the exhaust gas flows by the exhaust gas flow forming mechanism.

Abstract: A continuous gravity flow apparatus for heating and/or drying of particulate material is vertically disposed and is provided with an inlet at the top and an outlet at the bottom. The apparatus includes a flow passage for the particulate material which is defined between an outer housing and an inner housing. Each of the outer and inner housing defines perforated wall sections allowing for the flow of hot gas through the wall of one housing, into contact with the particulate material, and then out through the wall of the other housing. Manifolds are associated with the outer and inner housings to provide for uniform flow of the gas through the material. The perforated wall sections are positioned and designed to enhance particle-to-particle movement of the material to thereby avoid particle sticking and bridging problems.

Abstract: The present invention provides method and apparatus for surface treatment which, when employed in process steps of manufacturing semiconductor devices, can result in the final products having enhanced reliability. According to the surface processing method, an obeject to be processed W is introduced in a processing vessel 10, which is then supplied with ClF3 gas serving as cleaning gas from a supply unit 26. The ClF3 gas is bound to the surface of the object to be processed W, and although the supply of the gas to the processing vessel is interrupted, the ClF3 gas bound to the surface of the object to be processed W serves to clean the surface of the object to be processed. Next, reducing gas is introduced into the processing vessel W to remove chlorine from the object to be processed W, the chlorine being derived from the ClF3 gas. After that, the introduction of the reducing gas is interrupted, and the cleaned object to be processed W is exported from the processing vessel 10.

Abstract: One is a process to dry and to immunize guadua twigs based upon the recirculation of smoke within a furnace provided this one with a coil that provides vaporized water to conform a humid atmosphere in a temperature of between the 30 and 50° c. The furnace goes equally provided with air nozzles by pressure in the home and a recollection system of piro log (piroleñoso) acid of the drying, as well as parallel grills in the furnace to vertically align guadua twigs during the drying.

Abstract: The invention relates to an air impingement system arranged outside the jacket of an air impingement roll in the drying section of a paper machine or the like for heating and drying a web travelling around the said air impingement roll. The air impingement system comprises a mainly closed hood, which has control means for directing air onto the paper web. From the hood, air is directed by blowing with at least one fan to the blower nozzles and back again into the said hood as a circulation air process, and the system incorporates at least one heating device for heating the air. The air impingement system's hood and its said equipment are used in conjunction with an air impingement roll, which is of the size of approximately 1.5–2 m in diameter. The hood of the air impingement roll is at maximum 5 m high, preferably only 1.5–2.5 m high.

Abstract: Dry air is jetted from jet holes of a guide plate toward a conveyor belt to levitate a photosensitive sheet and to press it against the conveyor belt. The photosensitive sheet is supported and carried by the conveyor belt. The dry air dries the photosensitive sheet. A projection amount h of a guide roller projecting from the guide plate is defined so as to satisfy an expression of h?H×(W?P)/W. H is a gap between the guide plate and the conveyor belt. P is a length from a center line of the carried photosensitive sheet to an outer edge of the guide roller. W is a length from the center line to a lateral end of the photosensitive sheet. Even if a curl occurs on the photosensitive sheet, an edge thereof is prevented from contacting with the guide plate.

Abstract: A method for dry etching and chamber cleaning high dielectric constant materials is disclosed herein. In one aspect of the present invention, there is provided a process for cleaning a substance comprising a dielectric constant greater than the dielectric constant of silicon dioxide from at least a portion of a surface of a reactor comprising: introducing a first gas mixture comprising a boron-containing reactive agent into the reactor wherein the first gas mixture reacts with the substance contained therein to provide a volatile product and a boron-containing by-product; introducing a second gas mixture comprising a fluorine-containing reactive agent into the reactor wherein the second gas mixture reacts with the boron-containing by-product contained therein to form the volatile product; and removing the volatile product from the reactor.

Abstract: A SPME-fiber cleaning and conditioning apparatus and method having an elongated heating chamber with first and second opposite ends. The first end is capable of insertably receiving a SPME fiber portion of a SPME device, and the second end is a fluid outlet. A heater is provided for heating the chamber and heat-treating an inserted SPME fiber. Contaminants and other particles are agitated, desorbed and purged from the inserted SPME fiber by flowing a fluid through the chamber from the first end to the second end, away from the SPME device. Additionally, turbulence may be produced in the flow at a location adjacent the first end, to enhance agitation, desorption, and purging. A holder may also be provided extending from the first end for supporting the SPME device in a substantially horizontal orientation when the SPME fiber is positioned in the chamber.

Abstract: A low-pressure dryer dries a substrate applied a coating solution thereon at low pressure. The dryer includes an airtight chamber installing a substrate table to place the substrate thereon; a diffuser plate, provided as facing the substrate placed on the substrate table with a gap, for discharging gas existing in the gap toward outside, the diffuser plate having a size almost the same as or larger than the substrate; a substrate-temperature adjuster, installed in the substrate table, for adjusting a temperature of the substrate; and a decompression mechanism for decompressing the airtight chamber. The diffuser plate has a temperature adjuster for making temperature adjustments to have a temperature difference between a first region and a second region of the diffuser plate, the first region facing a center region of the substrate, the second region being outside the first region and including a region facing an outer region of the substrate.

Abstract: A low-pressure dryer dries a substrate applied a coating solution thereon at low pressure. The dryer includes an airtight chamber installing a substrate table to place the substrate thereon; a diffuser plate, provided as facing the substrate placed on the substrate table with a gap, for discharging gas existing in the gap toward outside, the diffuser plate having a size almost the same as or larger than the substrate; a substrate-temperature adjuster, installed in the substrate table, for adjusting a temperature of the substrate; and a decompression mechanism for decompressing the airtight chamber. The diffuser plate has a temperature adjuster for making temperature adjustments to have a temperature difference between a first region and a second region of the diffuser plate, the first region facing a center region of the substrate, the second region being outside the first region and including a region facing an outer region of the substrate.

Abstract: A method of drying a paper web is provided. The method utilizes a dryer, such as a through-dryer, having a first dryer section and a second dryer section. Within the first dryer section, a relatively wet paper web is dried at an elevated temperature, such as between about 400° F. to about 500° F. After being dried by the first dryer section, the web is relatively dry and is further dried by the second dryer section at a reduced temperature, such as between about 300° F. to about 400° F. A variety of control techniques can also be utilized to control the temperature of each dryer section.

Abstract: An apparatus and corresponding method for heating a wafer during processing. The apparatus includes a process chamber enclosing a processing tube defining a processing area. The processing tube includes a first wall and a second wall which define a hollow cavity or passageway therebetween. The second wall includes a plurality of holes or outlets formed thereon which allow environmental communication between the hollow cavity and the processing area. The apparatus also includes a plurality of resistive heating elements positioned adjacent to the processing tube. A thermal energy output from the resistive heating elements is configured to heat a gas flowing through the hollow cavity. The gas flowing through the hollow cavity exits the hollow cavity through the plurality of holes and convectively change the temperature of the wafer disposed in the processing tube.

Abstract: A continuous gravity flow apparatus for heating and/or drying of particulate material is vertically disposed and is provided with an inlet at the top and an outlet at the bottom. The apparatus includes a flow passage for the particulate material which is defined between an outer housing and an inner housing. Each of the outer and inner housing defines perforated wall sections allowing for the flow of hot gas through the wall of one housing, into contact with the particulate material, and then out through the wall of the other housing. Manifolds are associated with the outer and inner housings to provide for uniform flow of the gas through the material. The perforated wall sections are positioned and designed to enhance particle-to-particle movement of the material to thereby avoid particle sticking and bridging problems.

Abstract: The disclosed invention provides an improved method of drying wet or water damaged surfaces. The method uses a vacuum source, a manifold, and a plastic sheet covered grid. The grid includes a lattice formation with spaces to permit moisture and air to pass from and beneath the surface to the vacuum source.

Abstract: The present invention provides: a method of drying metallic waste having pyrophoric tendencies (liable to catch fire and/or explode), said waste being for compacting; an apparatus for drying said waste, the apparatus including a compacting canister and being suitable for implementing said drying method; and a canister for compacting said waste, the canister being particularly adapted to implementing said drying method.

Abstract: In an apparatus for a treatment of a wafer at elevated temperatures, the wafer is taken out of the reactor after heat treatment with the help of a mechanical transport apparatus which preferably grips the wafer around the circumference and on the under side. The transport apparatus includes a wafer surrounding ring. The wafer is placed in a floating wafer reactor where it is cooled in a controlled manner. Transport for further action or treatment then takes place.

Abstract: Methods of blow drying vehicles with two or three superimposed dryers mounted for linear movement along the length of a vehicle include blow dryers having either fixed or pivotal nozzles so that air can be blown at the vehicle in predetermined patterns that have been found to more efficiently dry the vehicle. Further, a pivotal nozzle system is disclosed wherein a frustoconical nozzle is pivotally mounted on a horizontal axis for reciprocating movement by a linear actuator so that the nozzle can be oriented in desirable positions for effecting the drying operations described in the disclosed methods.

Abstract: A system, method, and apparatus for supplying a gas-liquid vapor to a process tank for performing semiconductor manufacturing. In one aspect, the invention is a method of supplying a gas-liquid vapor to a process tank comprising: supplying a gas stream through at least one hydrophobic tube; exposing the outside surface of the hydrophobic tube to a liquid so that the liquid permeates the hydrophobic tube and enters the gas stream, forming a gas-liquid vapor inside the tube; and transporting the gas-liquid vapor to the process tank. In another aspect, the invention is an apparatus for supplying a gas-liquid vapor to a process tank comprising: at least one hydrophobic tube adapted to carry a gas; and a housing forming a chamber that surrounds the tube, the chamber adapted to receive a liquid that can permeate the tube, forming a gas-liquid vapor.

Abstract: A heating oven for use in dynamo-electric machine component manufacture is provided. The oven uses forced air heating to raise the temperature of in-process component subassemblies to suitable process temperatures. The heating oven includes a rotating drum mounted in a cabinet. A number of open-ended tubular cradles are disposed in circular arrays between the drum faces. Batches of component subassemblies may be individually loaded into the cradles for heat treatment. Air flow channels are set up in the oven cabinet to evenly distribute heated air through individual cradles. Heated air after passing over the individual in-process subassemblies, exits the cradles through side slots in the cradle walls into the interior of the drum. The exiting air is reheated and recirculated through the heating oven.

Abstract: A method for drying articles is provided comprising, providing a wash basket within a wash drum inside a washing machine and an air stream which follows an air flow path through the wash basket and through the machine. Then engaging a heater located along the air flow path, engaging a cooling unit located along the air flow path, and spinning the wash basket with the heating unit and cooling units engaged. Also provided is an apparatus for drying articles comprising, an air stream which follows an air flow path through a washing machine comprising a wash basket, a heating unit located along the air stream, a cooling unit located along the air stream, and a supplemental heater located along the air stream.

Abstract: A photosensitive material is dried by radiating heat from a guide plate, having high emissivity, which is disposed along a conveying path and is heated by a ceramic heater. Further, the photosensitive material is dried by a warm air, which is heated by a heater, blown onto the photosensitive material from nozzles. In the drying, because the warm air is also heated by the heated guide plate, the warm air can be risen to a predetermined temperature efficiently. Accordingly, because transferring the radiating heat and the blowing the warm air are performed at a same position (a same member), the drying can be performed efficiently without enlarging the device.

Abstract: A low-pressure dryer dries a substrate applied a coating solution thereon at low pressure. The dryer includes an airtight chamber installing a substrate table to place the substrate thereon; a diffuser plate, provided as facing the substrate placed on the substrate table with a gap, for discharging gas existing in the gap toward outside, the diffuser plate having a size almost the same as or larger than the substrate; a substrate-temperature adjuster, installed in the substrate table, for adjusting a temperature of the substrate; and a decompression mechanism for decompressing the airtight chamber. The diffuser plate has a temperature adjuster for making temperature adjustments to have a temperature difference between a first region and a second region of the diffuser plate, the first region facing a center region of the substrate, the second region being outside the first region and including a region facing an outer region of the substrate.

Abstract: This invention provides a dried singulated crosslinked cellulose pulp fiber product as well as an apparatus and a method for forming singulated, crosslinked, and dried fibers. In accordance with the process, a feed pulp containing a crosslinker is delivered to a jet drier. The jet drier singulates and dries the feed pulp. The singulated and dried fibers are collected from the jet drier. The feed pulp may be further treated with a treatment substance. The jet drier may be maintained at negative pressure. The product fibers may have low knot count, a low fines count, as well improved kink, curl and twist. The apparatus for carrying out the process may include a pretreatment station for supplying the treatment substance, a pulp feed device designed for pulp, a pulp feed device designed for pulp and foam suspensions, and/or a fiber separation station having a vacuum conveyor.

Abstract: An air dryer assembly and mounting bracket for mounting an air dryer to a vehicle. The air dryer assembly has a manifold and a canister which seal against the surface of the mounting bracket. Orientation pegs are provided along the sealing surface of the air dryer manifold and receive corresponding indented regions in a cut out region in the mounting bracket. By providing a number of orientation pegs on the surface of the manifold, a number of mounting orientations for the air dryer assembly can be achieved.

Abstract: This invention provides a dried singulated cellulose pulp fiber product as well as an apparatus and a method for forming singulated and dried fibers. In accordance with the process a feed pulp is delivered to a jet drier. The jet drier singulates and dries the feed pulp. The singulated and dried fibers are collected from the jet drier. The feed pulp may be treated with a treatment substance. The jet drier may be maintained at negative pressure. The product fibers may have low knot count, a low fines count, as well improved kink, curl and twist. The apparatus for carrying out the process may include a pretreatment station for supplying the treatment substance, a pulp feed device designed for pulp, a pulp feed device designed for pulp and foam suspensions, and/or a fiber separation station having a vacuum conveyor.

Abstract: Gas is recovered from a landfill by introducing water into the landfill to promote digestion of organic matter in the landfill, and removing from the landfill gas produced by digestion. The improvement comprises the introduction of water as part of an aqueous foam, whereby the water is distributed more uniformly throughout the landfill. Iron salts may be included in the foam to eliminate hydrogen sulfide.

Abstract: The present invention relates to a process for controlling the temperature of a product in the form of a web (12) that is influenced by an IR ramp (9) for surface treatment of the web (12). With the help of a number of temperature sensors (26), the temperature of the web (12) is measured continuously within evenly distributed zones across and along its direction of movement (28), and the values obtained from the respective zone of the web (12) are transmitted to the respective drier modules (2) for the purpose of subjecting the aforementioned zones of the web to heat. The invention also relates to an arrangement with which the aforementioned process is executed.

Abstract: A method in consolidation and drying of paper. A wet web is contacted with superheated steam, whose temperature is 200-600° C. for the purpose of reducing, by heat transfer from the superheated stream, the water content of the web by evaporation of a substantial part of the water in the same. The wet web is supported and transported by means of a heat-conductive, gas-impermeable belt whose width is equal to or exceeds the width of the web, and jets of the superheated steam are directed towards the side of the web facing away from the belt.

Abstract: A semiconductor wafer drying apparatus is provided. In one embodiment, this apparatus includes a bath which can contain much deionized water so that semiconductor wafers soak in the deionized water; a chamber providing a space where vapor flows over the bath; a vapor supply line supplying vapor to the internal space of the chamber; an exhaust line discharging vapor contained in the chamber; a deionized water exhaust line discharging deionized water in the bath; a semiconductor wafer holder supporting the semiconductor wafer in the bath; and pitch guides placed at left and right sides of the semiconductor wafer, movable to a first position and a second position in a vertical direction, wherein the pitch guides are separated from the semiconductor wafer at the first position and contact the semiconductor wafer at the second position thus preventing the movement of the semiconductor wafer.

Abstract: A dryer for drying a substrate includes: a bath containing a fluid; a chamber; and a delivery system supplying a polar organic compound, such as isopropyl alcohol, and a hydrophobic organic compound, such as hydrofluoroether, to the interface between the substrate and the fluid as the substrate is removed from the fluid of the bath into the chamber. The dryer further includes a chamber environment control system that supplies a gas into the chamber to dry the substrate and controls temperature and humidity in the chamber and a chamber heater attached to the chamber to transfer thermal energy into the chamber. A drying method includes: immersing a substrate into a fluid contained in a bath; removing the substrate from the fluid into a chamber; and supplying isopropyl alcohol and hydrofluoroether to an interface between the substrate and the fluid.

Abstract: The device (10) and method are used for ventilating an offset pocket space (12) located in a drying section of a papermaking machine by injecting air from a heated dry air supply inlet (11). The offset pocket space (12) is situated between a set of three axially-parallel drying cylinders (20) over which consecutively runs a paper web (14). The device (10) comprises a first air outlet (50) where a first air stream is directed into a cleft (34) defined where the felt (16) rejoins the felt roll (26), and a second air outlet (52) where a second air stream is directed in close proximity to the felt (16) at a location which is upstream of the cleft (34). In use, the device (10) and the corresponding method allow the first air stream to flow through the felt (16) and lift the paper web (14) away from the felt (16) so as to reach the offset pocket space (12). The second air stream creates an air curtain to lower the pressure in a zone between the first (50) and the second air outlet (52).

Abstract: The invention describes a method for the drying of a damp material (2), whereby the material (2) is treated in a treatment chamber (15) of a drying cabinet (1) in a mechanically immobile condition, in which air (10) is directed through the treatment chamber (15) and over a condenser (13) and the moisture in the air (10) can condense at the condenser (13) and be led away.

Abstract: A dehydration device and method is provided for the quick and efficient drying of garments wherein said dehydration device may be specifically adapted to receive an individual garment and may direct forced air into the interior volume of the garment to rapidly remove liquid and/or vapor from the garment. An optional heater may also be provided that is configured to accelerate the drying process.

Abstract: In one aspect, a method of drying a substrate includes (1) setting a gas delivery angle for an air knife used during an immersion-drying process; (2) using the air knife during immersion drying of a hydrophilic substrate; and (3) using the air knife during immersion drying of a hydrophobic substrate. The gas delivery angle is unchanged during immersion drying of both the hydrophilic substrate and hydrophobic substrate. Numerous other aspects are provided.

Abstract: A low pressure, low air volume system for heating and drying concrete walls in a damp environment is disclosed. A wall unit consisting of a wall panel having a plurality of vertical grooves and ridges formed in a back surface, the ridges in contact with a concrete wall surface and the grooves forming a plurality of air channels in contact with the surface of the wall, ducts heated air across the concrete surface of the wall, evaporating moisture migrating through the wall. An upper and lower plenum connect the air channels of the wall unit with a remote system consisting of a dehumidifier and discharge pump, heating element and fans for moving air through the system, the dehumidifier removing the moisture from the air before recirculating it through the system.

Abstract: An improved process for removing trace solvent from a material comprises rewetting the product with water during the drying process. Finished products such as suramin are produced efficiently to a high quality on a factory scale.

Abstract: The invention relates to a device for the thermal secondary treatment of plastic material in granulate form, in particular of polyester material such as polyethylene-terephthalate, in a flat shaft reactor comprising a substantially rectangular cross-section. The shaft (1) consists of an upper region (4) and a lower region (5), whose horizontal cross-section (Q5) tapers downwards in a vertical direction. At least sections of the vertical shaft walls (4A) and (4B) have screen-type gas dispersion regions. The large opposing shaft walls 5a and of the lower outlet region (5) are likewise gas dispersion regions. The gas dispersion regions consist of wedge-wire screens, which can have different arrangements of gaps according to requirements. The special gap arrangements in the wedge-wire screens allow the standardisation of the granulate speed profile over horizontal cross-sections in the shaft region.

Abstract: A method of drying a paper web is provided. The method utilizes a dryer, such as a through-dryer, having a first dryer section and a second dryer section. Within the first dryer section, a relatively wet paper web is dried at an elevated temperature, such as between about 400° F. to about 500° F. After being dried by the first dryer section, the web is relatively dry and is further dried by the second dryer section at a reduced temperature, such as between about 300° F. to about 400° F. A variety of control techniques can also be utilized to control the temperature of each dryer section.

Abstract: The invention relates to a method for conveying and guiding a lead-in strip in a paper machine, in which method a lead-in strip is directed over a run of a conveyor in the paper machine and a longitudinal vacuum effect is produced across the run of the conveyor in the direction of moment of the run of the conveyor.

Abstract: A portable hand truck mounted drying assembly for the drying of an elevated enclosed space which has been subjected to flooding, the drying assembly having an inlet path for the introduction of ambient air into the enclosed space, the ambient air being preheated in a heat exchanger by moisture laden air removed from the enclosed space, the preheated ambient air being subjected to further heating before introduction into the enclosed space, the portable hand truck mounted unit being positioned within the enclosed space and having a plurality of conduits in communication with the enclosed space for the introduction of dry heated air and the removal of moisture laden air.

Abstract: The present invention provides an apparatus and method for drying the interior of a flexible beverage container. The apparatus includes a housing having an inlet and outlet. A blower is disposed intermediate between the inlet and outlet and is operative to draw air through the housing via the inlet and outlet. An exhaust pipe is disposed at the outlet whereby the container may be disposed thereon for drying. The dryer is operative to blow air onto the farmost inner portions of the container to facilitate thorough and hygienic drying between uses.

Abstract: The invention provides an improved method of drying wet or water damaged structures. Specifically, several improved features of a forced air system are provided.

Abstract: Process for drying amoxicillin (compositions), characterised in that a gas, which is inert towards amoxicillin (compositions) and having a relative humidity content which is greater than zero is used for drying.

Abstract: A new method and apparatus is provided for the cleaning and drying of a wafer. An IPA vapor is created using an ultrasonic nebulizer that can be operated at a relatively low temperature. The water and the IPA that is used by the cleaning and drying process will be heated and evaporated using energy supplied by a microwave source of energy.

Abstract: A cleaning method is provided for cleaning a semiconductor wafer. In this method, after removing adhering substances from the wafer by using a chemical liquid of organic amine type, there is carried out a pure-water cleaning capable of prevention of electrostatic destruction and alkaline corrosion on the wafer. In detail, it is executed to make a processing chamber have an atmosphere of carbon dioxide and subsequently introduce steam into the chamber to dissolve CO2-gas into the steam. Next, spray the pure water to the wafer. Then, the steam in which CO2-gas is dissolved dissolves in the pure water, so that the pure wafer becomes weak acid, accomplishing the reduction of resistivity of the pure water. Additionally, alkaline substances is neutralized by carbonated water to prevent an alkaline corrosion on a wiring layer on the wafer's surface.

Abstract: According to a supercritical drying method of this invention, a substrate having a pattern is dipped in water and rinsed with water. Then, the substrate is placed in the reaction chamber of a predetermined sealable vessel, and surfactant-added liquid carbon dioxide is introduced into the reaction chamber. The substrate is dipped in surfactant-added liquid carbon dioxide, and liquid carbon dioxide is changed to the supercritical state. After that, supercritical carbon dioxide is gasified.

Abstract: Methods and apparatus for processing an electronic component precursor comprising the steps of contacting a carrier gas with a process chemical stream to entrain the process chemical in the carrier gas thereby forming a fluid stream and injecting at least a portion of additional process chemical into the fluid stream to form a localized region of increased concentration of process fluid is provided. The methods and apparatus also provide injecting a portion of additional carrier gas into the fluid stream to form a diluted region of decreased concentration of process fluid is also provided. The methods and apparatus further provide controlling the concentration of process chemical in the localized region as well as in the fluid stream.

Abstract: Apparatus, method and system for the treatment of a wafer. After a treatment at elevated temperature, a wafer is taken out of the reactor in question with the help of a mechanical transport apparatus which preferably grips the wafer around the circumference and on the under side and consists of a wafer surrounding ring. The wafer is then placed in a floating wafer reactor where it is cooled in a controlled manner. Transport for further action or treatment then takes place.

Abstract: The present invention relates to zeolites having the crystal structure of chabazite (CHA) and having small crystallite size, to processes using the small crystallite CHA as a catalyst, and to gas separation processes using the small crystallite CHA.