Abstract: A radiation thermometer which starts body temperature measuring operations when a temperature measurement switch is pressed, inserts a probe into an opening of a living being, receives an infrared ray from within the opening and computes a temperature, and displays a maximum value of measured temperature data as a body temperature, for the purpose of avoiding temperature measurement and displaying of a temperature executed by manipulation of the temperature measurement start switch after insertion of the probe into an opening of a living being, a careless manipulation of the switch after insertion into an external acoustic opening despite a previous normal manipulation of the switch before insertion, etc.

Abstract: The present invention provides an apparatus and method for measuring the temperature of a moving radiant object. A probe, such as a pyrometer, is disposed in an opening of a vacuum chamber adjacent a radiation transparent window. The probe defines an optical path which intercepts the radiant object entering or exiting a processing chamber. The radiant object is moved through the optical path and emits electromagnetic waves. The electromagnetic waves are collected by the probe and transmitted to a signal processing unit where the waves are detected and converted to a temperature reading. If desired, the accumulated data may then be used to generate a cooling curve representing the thermal effects experienced by the radiant object. Extrapolation or correlation methods may be used to extend the cooling curve to points in time prior to or after the data collected by the probe.

Abstract: A CVD processing reactor employs a pyrometer to control temperature ramping. The pyrometer is calibrated between wafer processing by using a thermocouple that senses temperature during a steady state portion of a processing operation.

Abstract: A projector for use in a measuring device is provided with an emitter which emits a beam of visible light to a measurement object along a predetermined optical axis, a rotary optical member which is operable to change the propagation direction of the visible light beam with respect to the predetermined optical axis in accordance with rotation of the rotary optical member, and a driver which rotates the rotary optical member about a rotation axis. The projector accurately indicates a measurement area on a measurement object in simpler construction.

Abstract: A temperature sensor for measuring a temperature of a substrate in a thermal processing chamber is described. The chamber includes a reflector forming a reflecting cavity with a substrate when the substrate is positioned in the chamber. The temperature sensor includes a probe having an input end positioned to receive radiation from the reflecting cavity, and a detector optically coupled to an output end of the probe. The radiation entering the probe includes reflected radiation and non-reflected radiation. The detector measures an intensity of a first portion of the radiation entering the probe to generate a first intensity signal and measures an intensity of a second portion of the radiation entering the probe to generate a second intensity signal. The detector is configured so that a ratio of the reflected radiation to the non-reflected radiation is higher in the first portion than the second portion. The two intensity signals are used to calculate the temperature and emissivity of the substrate.

Abstract: A system and method are disclosed for optically measuring the temperature of a packaged integrated circuit (IC). A light beam is focused inside the IC package onto a region of the integrated circuit whose temperature is to be measured. The through-substrate reflectivity of the IC, which is a function of temperature and material characteristics (e.g., doping) of the region, determines how much of the incident light is reflected to a photo-detector. The photo-detector measures the intensity of the reflected light and generates a corresponding through-substrate reflectivity signal R. The reflectivity signal R is correlated with transmission curves for that region or materials with similar characteristics and the temperature of the region determined therefrom. Confocal techniques can be applied to substantially reduce measurement signal noise due to light reflected from the IC package which interferes with the light reflected from the IC.

Abstract: An apparatus and method for determining the temperature of a semiconductor wafer in a thermal processing chamber in the presence of a radiation absorbing gas, such as a vapor, is disclosed. The apparatus includes a temperature sensing device which senses the amount of electromagnetic radiation being emitted by a wafer being heated and a gas sensing device which senses the amount of a gas present within the chamber. The system further includes a controller which is placed in communication with the temperature sensing device and the gas sensing device. The controller is configured to determine a correction factor based upon the amount of gas contained within the chamber. The correction factor in combination with information received from the temperature sensing device are then used to determine the temperature of the wafer.

Abstract: Apparatus and methods of thermally processing a substrate inside a processing chamber including a radiation source for heating the substrate are described. In one aspect, a detection system is configured to receive radiation from the substrate and to produce first and second detection system signals respectively representative of different first and second spectral portions of the received radiation. A processor is coupled to the detection system and configured to compute a measure of substrate temperature based upon the second detection system signal and to compute an indication of the relative accuracy of the computed measure of substrate temperature based upon the first detection system signal.

Abstract: The invention is directed to a method of computing the radiation temperature of a body from the signals of a radiation and an ambient temperature sensor, and further to a radiation thermometer, in particular a clinical radiation thermometer. In the method of the present invention, computation of the temperature is not using the Stefan Boltzmann law, but rather, a polynomial is used, preferably a third-degree polynomial, which is adjusted to the radiation-optical properties of the thermometer in the relevant wavelength range. The reciprocal value of the sensitivity of the radiation sensor is preferably represented as a polynomial as well. In this manner, the computation of a fourth root or divisions which are otherwise customary are avoided, enabling the necessary computations to be also performed, for example, by a 4-bit microprocessor with great speed.

Abstract: The invention is directed to a method of operating a tympanic thermometer, in which a sensor (8) for detecting infrared radiation is arranged in a housing (1) having a radiation inlet (23). Associated with the sensor (8) is an electronic evaluation unit (13). For temperature measurement, the radiation inlet (23) is covered with a probe cover (5) transparent to infrared radiation. The condition of a missing probe cover (5) is indicated by an audible warning signal or a signal lamp (14) which are activated after the thermometer is turned on.

Abstract: This invention is intended to provide a semiconductor wafer temperature measuring method for use in reflector plate-equipped infrared annealing furnaces, infrared heating epitaxy furnaces, and other semiconductor wafer processing equipment that employs lamps as the heat source, the method affording easy and accurate measurement of substrate surface temperature, thereby enabling control of the heat source on the basis of these measurements. Characterizing features are the provision of a slit or small hole to the reflector plate and measuring light from the semiconductor wafer surface in the perpendicular direction by means of a scanning CCD sensor to allow substrate temperature to be measured on the basis of the radiant light distribution peak; and the provision of slits in a plurality of locations on the reflecting plate without impairing the function thereof, so that substrate temperature distribution can be measured accurately.

Abstract: An apparatus for processing a semiconductor substrate mounted in a thermal processing chamber includes a heating system for heating the substrate, which includes lamps facing a front side of the substrate and a power supply system providing power to at least one of the lamps with a DC power component and an AC power component at a selected frequency. The AC power component is a selected fraction of the DC power component. The apparatus also has a sensor facing a back side of the substrate for providing a detected signal indicative of measured radiation from the back side of the substrate. A lock-in system provides a lock-in signal indicative of a magnitude of an AC component of the detected signal at the selected frequency in response to the detected signal and a reference signal at the selected frequency.

Abstract: Heating apparatus particularly useful for rapid thermal processing of semiconductor wafers, includes: a head having a reflector and a support for supporting a wafer spaced above the reflector; a radiation heater located above the wafer, an optical fiber having one end exposed to the space between the wafer and the reflector for detecting the radiation emitted by the wafer as enhanced by the reflector; a heat measuring device at the opposite end of the optical fiber for producing a temperature measurement corresponding to the radiation emitted by the wafer as enhanced by the reflector; and a peripheral barrier circumscribing the head, reflector, and the wafer for blocking stray radiation from entering the space between the wafer and the reflector from the outer periphery of the head.

Abstract: Method and apparatus are provided for visibly outlining the energy zone to be measured by a radiometer. The method comprises the steps of providing a laser sighting device on the radiometer adapted to emit at least one laser beam against a surface whose temperature is to be measured and positioning said laser beam about the energy zone to visibly outline said energy zone. The apparatus comprises a laser sighting device adapted to emit at least one laser beam against the surface and means to position said laser beam about the energy zone to visibly outline said energy zone. The laser beam may be rotated about the periphery of the energy zone. In another embodiment, a pair of laser beams are projected on opposite sides of the energy zone. The laser beam may be further pulsed on and off in a synchronized manner so as to cause a series of intermittent lines to outline the energy zone. Such an embodiment improves the efficiency of the laser and results in a brighter laser beam being projected.

Abstract: A method for measuring the melt temperature in a melt vessel, where the vessel wall, at least partially, is made of a material transparent for infrared light; said material, at the interior of the vessel, is coated with a material having a high and stable emission factor (e>0.5; de/dT<0.001); the temperature of the inside of the vessel wall is used as a measure of the melt temperature close to the wall; and said temperature at the inside of the vessel wall is measured by use of optical pyrometry applied from the outside of the melt vessel.

Abstract: A novel technique for measuring the temperature of an electronic circuit undergoing assembly packaging processes includes a non-contact infrared detector which is used to measure the temperature of the die allowing a control systems to directly adjust the die temperature. Previous to this invention, the die temperatures were controlled indirectly, typically by controlling ambient temperature in an oven or furnace to a series of set point values during curing of the electronic packaging materials.

Abstract: The combination in an instrument of a multimeter and an instrument having apparatus for determining a non-contact measurement of radiation perceived at a distance from a surface. The instrument may further have an apparatus for determining temperature of that surface by direct contact therewith. The non-contact apparatus may have optical sighting means and laser sighting means, and means for determining emissivity of the surface. Provision may be made for recording data, e.g. a data logger. Audio output may be provided in accordance with temperature determinations, and may include speech synthesizing. Conveniently, the instrument is adapted for holding in the hand, for example by a pistol-grip handle, and/or for mounting on a tripod as well as a threaded connection with a wrist strap or a tripod. Temperatures derived respectively from infrared radiation, and from direct contact, have separate displays. The multimeter and the temperature instrument may have means for their control by vocal command.

Abstract: A plasma resistant lightpipe is used in a pyrometric temperature measurement system to measure the temperature of a substrate in a reaction chamber. The plasma resistant lightpipe includes two lightpipe elements. The first lightpipe element, which may be a sapphire rod or aluminum nitride rod, is positioned within a backside gas delivery path to the chamber. The first lightpipe element is resistant to etching caused by reactive plasmas or gases used within the chamber, such as fluorine. The second lightpipe, which is a quartz rod, is positioned beneath the first lightpipe element such that the two lightpipe elements are optically coupled. The first lightpipe element may be directly mounted in the base plate or electrostatic chuck of the pedestal assembly or directly mounted in a plug, which is then positioned within the base plate or electrostatic chuck.

Abstract: This invention relates to an infrared probe of a thermometer. The infrared probe does not need a waveguide to contact with a sensor for transmitting heat. The infrared probe consists of a sensor unit disposed on a sensor base and surrounded by an isolation unit. Standing at this forefront, the sensor unit can detect the infrared rays directly to lead a precise measurement. Moreover, the cost will be reduced without disposing a waveguide tube on the sensor.

Abstract: The subject invention relates to a technique employing a calibrated thermal radiometer, and the radiation characteristics of ionic crystals to measure the temperature distribution of crystals during crystal growth. When in high temperature, the ionic crystals often exhibit a transparent region having low reflectance, and low absorption in the spectrum between the short-wavelength absorption edge and the long-wavelength absorption edge. In addition, these crystals have an opaque spectral region having low reflectance and high absorption, i.e. have surface radiation of high emissivity when the spectrum is in the range between the long-wavelength absorption edge and the onset of the Reststrahlen band. The spectral emissivity of the ionic crystal may not change significantly with a variation of temperature in this opaque region.

Abstract: A system (80) for controlling deformations of optical components adapted for use with laser system aperture sharing elements (16) and deformable mirrors. The inventive system (80) includes a control loop (12, 40, 24, 20, 46, 28, 74, 78, 60, 34) for determining a desired temperature pattern. The control loop (12, 40, 24, 46, 28, 74, 78, 60, 34) provides a control signal (45) corresponding to the desired temperature pattern to a heat map applicator (18, 46, 47, 59, 60). The heat map applicator (18, 46, 47, 59, 60) applies the desired temperature pattern to the optical component (16) in response to the control signal and the optical component (16) is selectively deformed in response thereto. In a specific embodiment, the control loop (12, 40, 24, 20, 46, 28, 74, 78, 60, 34) is a closed loop control system that includes an interferometer (74).

Abstract: A method and apparatus for measuring the temperature of an object, such as a substrate, during processing. The object is illuminated by a light source. Infrared light that is transmitted through the object is then collected and transmitted to a photodiode. The amount of light transmitted through the substrate varies as a function of substrate temperature. The photodiode generates a signal in response to the light transmitted to the photodiode and an analyzing device generates a real-time temperature reading based on the signal. The photodiode may include at least one silicon photodiode or a plurality of photodiodes made from germanium or indium/gallium/arsenide.

Abstract: A quick registering thermometer utilizing a sensor that has electrical resistance varying with temperature located at the tip of a probe, the sensor having relatively small thermal mass and short thermal time constant. Within seconds of contact with the patient, the circuitry communicating with the sensor determines the rate of change in resistance of the sensor and, in turn, the temperature that the sensor would reach if allowed the length of time it would need to reach equilibrium with the contact surface of the patient. Based on the equilibrium temperature determined for the surface of the patient, the circuitry calculates and registers the core body temperature.

Abstract: A non-contact infrared thermometer measures target temperatures remotely without requiring the ratio of the target size to the target distance to the thermometer. A collection means collects and focusses target IR radiation on an IR detector. The detector measures thermal energy of the target over a spectrum using micromechanical sensors. A processor means calculates the collected thermal energy in at least two different spectral regions using a first algorithm in program form and further calculates the ratio of the thermal energy in the at least two different spectral regions to obtain the target temperature independent of the target size, distance to the target and emissivity using a second algorithm in program form.

Abstract: Tympanic temperature measurements are obtained from the output of a radiation sensor mounted in an extension from a housing. The housing has a temperature display and supports electronics for responding to sensed radiation. The sensor is mounted in an improved extension which is shaped to fit into smaller ear canals, such as a child's ear canal or a swollen adult ear canal. Within the extension, the sensor is positioned in a highly conductive environment and receives radiation from an external target through a tube. Electronics determine the target temperature based on the sensor output signal and a temperature sensor signal.

Abstract: A disposable probe cover for an electronic tympanic ("ear") thermometer is made of closed-cell foam that is laminated with a sheet of high density polyethylene plastic film substantially transparent to infrared radiant energy. The probe cover is hollow, defining a central passageway that accepts an oversized probe and can potentially accommodate a variety of different probe configurations. The foam construction allows the probe cover to stretch over the oversized probe--retaining the probe cover on the probe during use. The foam construction also allows the probe cover to deform when inserted into a patient's ear--sealing the patient's ear canal to prevent external heat and light from affecting the measurement, and providing a high degree of cushioning and comfort not available in any prior disposable probe cover design. The film laminate and foam provide a barrier that is impervious to germs, fluids and other secretions--further reducing the already low risk of cross-contamination.

Abstract: A disposable probe cover for an electronic tympanic ("ear") thermometer is made of closed-cell foam that is laminated with a sheet of high density polyethylene plastic film substantially transparent to infrared radiant energy. The probe cover is hollow, defining a central passageway that accepts an oversized probe and can potentially accommodate a variety of different probe configurations. The foam construction allows the probe cover to stretch over the oversized probe--retaining the probe cover on the probe during use. The foam construction also allows the probe cover to deform when inserted into a patient's ear--sealing the patient's ear canal to prevent external heat and light from affecting the measurement, and providing a high degree of cushioning and comfort not available in any prior disposable probe cover design. The film laminate and foam provide a barrier that is impervious to germs, fluids and other secretions--further reducing the already low risk of cross-contamination.

Abstract: An infrared thermal sensor assembly for sensing the temperature of a target, the sensor assembly including a heat sink having a bore therethrough; a thermopile housed in the bore; and a heater operative to heat the heat sink.

Abstract: An apparatus for processing a substrate wafer wherein the apparatus includes a reaction chamber, a wafer holder intended to hold the substrate wafer, and a susceptor. A temperature sensor, preferably a thermocouple with two junctions, is provided for measuring the difference between the temperatures at the site of the susceptor and at a site between the susceptor and the substrate wafer.

Abstract: An infrared thermal sensor assembly for sensing the temperature of a target, the sensor assembly including a heat sink having a bore therethrough; a thermopile housed in the bore; and a heater operative to heat the heat sink.

Abstract: A vertically oriented thermal processor supporting semiconductor wafers within a vertical processing chamber within a process tube about which a furnace heater is supported utilizes a model-base control target in combination with a heating control system configured to heat portions of the furnace in order to achieve a thermally uniform processing chamber environment. A furnace power controller implements a dynamic control system configured to achieve a desired uniform thermal distribution within the processing chamber during various processing cycles for semiconductor wafers. Preferably, the control system monitors thermal conditions within the chamber and compares the conditions with a desired thermal model of the furnace, and activates/deactivates one or more heater elements within the furnace in order to achieve a desired thermal condition within the processing chamber.

Abstract: A shutter 3 which can be momentarily held open and immediately closed, is disposed adjacent to an aperture stop 4 in an optical system, and a temperature sensor 5 is provided for measuring the temperature of the shutter 3. The blades of the shutter 3 can be utilized as a reference heat source. With the shutter 3 disposed adjacent to the aperture stop 4, the optical equivalence in the case when a reference heat source is inserted and in the other case, is not spoiled. A shutter 202 which can be readily momentarily held open and immediately closed under control of a shutter controller 203, is disposed at the optical pupil position of a combination lens 201. When the shutter 202 is closed, thermal image data is stored in a shading memory 208.

Abstract: A method of active radiometric thermometry. The target, whose temperature is to be measured, is heated briefly and locally, preferably by a pulse of laser radiation. The intensity of infrared or visible radiation emitted by the heated portion of the target is measured as a function of time. The temperature of the target is inferred from the shape of the intensity curve of the emitted radiation as a function of time.

Abstract: The surface of the member to be inspected is covered with powder deposited by using, for example, static electricity prior to the flaw detection. The member surface is covered so as to be partly exposed by setting the average thickness of the powder layer to 0.1D-0.6D, where D is the average particle diameter of the powder, under an assumption that the powder particles in the powder layer are virtually leveled into a uniform thickness film. Subsequently, the surface region of the member is heated by high frequency induction heating, and then the temperature distribution on the surface is measured with a radiation thermometer. The part for which the temperature measured is different from the surroundings is judged as a flaw. The surface of the member is covered with the powder so that the surface emissivity becomes almost uniform, and the resulting temperature distribution measured with the radiation thermometer becomes almost equal to the real one.

Abstract: A sensor for radiation pyrometric determination of the temperature of an object has a heat-conducting housing having a heat-transmissive window. At least one thermocolumn, consisting of thermocouples, is arranged in the housing. Each thermocouple consists of wire elements connected to one another. The wire elements consist of materials that are thermo-electrically active relative to one another. A support body is positioned in the housing and has a first end face facing the window. The support body consists of a heat-resistant, heat-insulating material. The support body has first throughbores extending from the end face through the support body. Each first throughbore receives one wire element. The wire elements have a first connecting location facing the window and positioned above the end face of the support body. The first connecting locations are heat radiation-sensitive.

Abstract: Apparatus for measuring wafer support pedestal temperature in a semiconductor wafer processing system. The apparatus measures infrared energy emitted by the bottom of the pedestal via a tube having one end inserted in a bore through the underside of the cathode pedestal base. The distal end of the tube is coupled to a temperature sensor. Both the tube and temperature sensor are fitted with insulating sleeve adapters to suppress unwanted RF signals from coupling to the sensor.

Abstract: The temperature of an infrared radiation scattering medium which contains water, for example, biological tissue and paper, cement and clay substrates, is determined by exposing the medium to infrared radiation, measuring the reflected radiation scattered by the medium, comparing the reflected radiation with calibrated values, and evaluating the temperature of the medium from the comparison; the technique provides a means of non-invasive determination of temperature in biological tissue which has utility in medical diagnosis.

Abstract: A probe tip in combination with a seal assembly that prevents debris and other contaminants from entering the probe tip. In the preferred embodiment, the seal comprises a tube with a filter holder assembly attached at the distal end of the holder. The filter holder assembly includes an infrared filter seated inside a screw-on member that is attached to a holder member with a sealing member located directly behind the infrared filter. During manufacturing, a predetermined force is applied to the proximal end of the tube which drives the distal end of the tube and filter holder assembly against the probe tip opening, thereby forming a watertight seal thereto. In alternative embodiments, the seal assembly may be comprised of a collar and gasket combination instead of a filter holder assembly.

Abstract: An apparatus and a method controls a heating device in a laundry ironer. The apparatus includes a frame and an ironer cylinder. The ironer cylinder rotatably connects to the frame and has an interior surface and an exterior surface. The interior and exterior surfaces extend substantially from a first end to a second end of the ironer cylinder. A line of sight temperature sensor connects to the frame near the first end wherein a line of sight of the sensor is directed at a portion of the interior surface of the cylinder. As the ironer cylinder rotates and is heated by a heating element, the temperature of a portion of the interior surface is sensed. Based on the temperature and a threshold, the state of the heating element is changed.

Abstract: An improved method for aligning the aiming beams of an infrared heat sensor included the steps of providing a heat source at a target site, orienting the infrared heat sensor so that output signal is maximized to orient an optical axis toward the target site, and aligning the aiming beams relative to the target site.

Abstract: A method for Rapid Thermal Processing (RTP) is presented, wherein the broadband reflectivity of an object is measured, and the results of the measurement used by the RTP system to adjust the RTP system parameters used in processing the object.

Abstract: An infrared detector is positioned in a probe having nonthermocouple leads which connect to socket connectors of a standard hand-held voltmeter. The voltmeter has a clip to retain the probe. The detected voltage may indicate the difference between a target temperature surface and ambient temperature. For more accurate sensing of ambient temperature, a thermocouple may be connected in series with the thermopile with one junction at the thermopile cold junction temperature and another junction sensing ambient temperature. The ambient temperature may be that temperature surrounding the infrared detector or the temperature of the environment surrounding the meter. The infrared detector is calibrated to provide a direct reading of temperature degrees by a factor of ten on the voltage scale of the meter. To that end, multiple thermocouples may be connected in series, each with a junction responding to ambient temperature and a junction responding to thermopile cold junction temperature.

Abstract: A system for aiming a remote IR temperature sensing device includes a laser aiming assembly and a scope assembly mounted to the IR temperature sensing device. The laser aiming assembly provides for adjusting the vertical and azimuthal positions of an alignment beam to facilitate the use of inexpensive, low-tolerance parts while providing high accuracy to improve sensitivity, accuracy, and resolution. The laser aiming assembly includes a laser aiming mirror for directing the alignment beam toward the target. The system includes a beam splitter which reflects incoming visible radiation toward the scope assembly and allows incoming IR radiation to pass through to an IR temperature sensor. The beamsplitter has an opening of sufficient size to allow the alignment beam to pass through unobstructed but not so large as to interfere with the operation of the beamsplitter.

Abstract: A disposable probe cover for an electronic tympanic ("ear") thermometer is made of closed-cell foam that is laminated with a sheet of high density polyethylene plastic film substantially transparent to infrared radiant energy. The probe cover is hollow, defining a central passageway that accepts an oversized probe and can potentially accommodate a variety of different probe configurations. The foam construction allows the probe cover to stretch over the oversized probe--retaining the probe cover on the probe during use. The foam construction also allows the probe cover to deform when inserted into a patient's ear--sealing the patient's ear canal to prevent external heat and light from affecting the measurement, and providing a high degree of cushioning and comfort not available in any prior disposable probe cover design. The film laminate and foam provide a barrier that is impervious to germs, fluids and other secretions--further reducing the already low risk of cross-contamination.

Abstract: Method and apparatus are provided for visibly outlining the energy zone to be measured by a radiometer. The method comprises the steps of providing a laser sighting device on the radiometer adapted to emit at last one laser beam against a surface whose temperature is to be measured and positioning said laser beam about the energy zone to outline said energy zone. The apparatus comprises a laser sighting device adapted to emit at least one laser beam against the surface and means to position said laser beam about the energy zone to outline said energy zone. The laser beam may be rotated about the periphery of the energy zone. In another embodiment, a pair of laser beams are projected on opposite sides of the energy zone. The laser beam may be further pulsed on and off in a synchronised manner so as to cause a series of intermittent lines to outline the energy zone. Such an embodiment improves the efficiency of the laser and results in a brighter laser beam being projected.

Abstract: Method and apparatus are provided for visibly outlining the energy zone to be measured by a radiometer. The method comprises the steps of providing a laser sighting device on the radiometer adapted to emit more than two laser beams against a surface whose temperature is to be measured and positioning said laser beams about the energy zone to outline said energy zone. The apparatus comprises a laser sighting device adapted to emit more than two laser beams against the surface and means to position said laser beams about the energy zone to outline said energy zone. The laser beams may be rotated about the periphery of the energy zone. In another embodiment, a pair of laser beams are projected on opposite sides of the energy zone. The laser beams may be further pulsed on and off in a synchronised manner so as to cause a series of intermittent lines to outline the energy zone. Such an embodiment improves the efficiency of the laser and results in brighter laser beams being projected.

Abstract: An apparatus and method for monitoring a temperature around a point of clinical interest. The apparatus has a sensing surface carrying a plurality of temperature detectors in a regular spatial outer disposition around a central detector. A signal processor computes the highest temperature difference between any two outer detectors and the central detector and compares the highest difference with a predetermined number of temperature domains or ranges. The signal processor activates an output device to provide an indication of the correlation between the highest determined temperature difference and the temperature domains. The output device comprises three different colored lights to provide an indication of normal, doubtful or abnormal correlation. In another embodiment, the output device is a graphical display having a pattern of the organ to be examined as a background and a luminous point on the display, which is either not lit, flashes with a low frequency, or is continuously lit.

Abstract: A method of detecting a defect on the surface of a structure using an infrared radiometric thermometer. It is determined that there is a lifting defect at a region of the surface if the region has a temperature difference of 0.3.degree. C. or more in comparison with a surrounding region and has an area of 200 cm.sup.2 or more. The temperature of the surface of the structure is obtained using the infrared radiometric thermometer in a period of time from 19:00 p.m. on a day when it is clear at least in the daytime to 4:30 a.m. on the next day.

Abstract: An improved ratio type infrared thermometer utilizes integrating amplifiers for each waveband having the integration time automatically set so that the output voltage utilizes the full range of an analog to digital convertor. The gain and offset of the amplifiers is not ambient temperature dependent so accurate digital representations of the signal for each waveband are provided. The linearized output of each detector is optionally provided so that special or proprietary algorithms for computing the temperature of colored objects can be utilized. A special feature for downloading of updated new programs utilizes a "programming jumper" and an attenuation warning signal is provided for selected levels of attenuation.

Abstract: A loop transmitter is connected between a thermocouple and a loop detector circuit. The transmitter has a circuit mounted on an elongated circuit board within a cylindrical housing with thermocouple leads and output leads extending from opposite ends of the cylinder. The circuit is potted in high conductivity epoxy, with an adjustment screw left exposed. After amplifier offset adjustment, the housing is completely filled with a lower conductivity epoxy.