By Thermally Emitted Radiation Patents (Class 374/121)
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Patent number: 5340215Abstract: An upper portion of a case body (1) of a radiant-temperature clinical thermometer is integrally formed to include a supporting frame (11) to which a supporting cylinder (2) is secured horizontally. The tip of the supporting cylinder (2) projects outwardly and a radiant-temperature sensor (3) for sensing heat rays from the external ear is secured to the end face of the tip. A cylindrical probe (4) is supported on the supporting cylinder (2) so as to be free to slide, and the cylindrical probe (4) is biased by a coil spring (42) in a direction that thrusts the probe outwardly. A flange (41) on the base end of the cylindrical probe (4) abuts against a stopper (12) of the supporting frame (11), whereby the extended position of the cylindrical probe (4) is determined. A cover ( 9 ) is attached to the tip portion of the cylindrical probe (4).Type: GrantFiled: June 28, 1993Date of Patent: August 23, 1994Assignee: OMRON CorporationInventors: Shigeru Makita, Yoshihiko Sano, Hiroyuki Ota, Yasushi Nakamura
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Patent number: 5335308Abstract: An apparatus for heat treating the surface of a body includes an infrared heat source carried on a stand. A circuit controls the energization of the lamp. The circuit includes a heat detector for detecting a targeted area temperature. The apparatus includes a sighting mechanism to permit an operator to accurately sight the heat detector against the surface to be heat treated.Type: GrantFiled: September 17, 1993Date of Patent: August 2, 1994Assignee: BGK Finishing Systems, Inc.Inventor: Thomas M. Sorensen
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Patent number: 5333784Abstract: A radiation detector comprises a thermopile and a thermocouple connected in series. The cold junction of the thermocouple is connected to a remote temperature reference. A calibrator in the thermopile/thermocouple circuit weights the output signals of the two devices to provide a combined output signal which changes with both sensed radiation and ambient temperature. The device may be calibrated for an environmental control system to control heating or cooling based on both air temperature and radiant temperature of surrounding surfaces. In another application, the thermocouple and calibrator provide a simple signal adjustment to provide an internal temperature reading from a sensed surface temperature. For example, the circuit can provide a core temperature reading from detected ear temperature.Type: GrantFiled: March 2, 1993Date of Patent: August 2, 1994Assignee: Exergen CorporationInventor: Francesco Pompei
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Patent number: 5326171Abstract: A method for sensing the temperature of a remote object within a chamber that is heated from outside the chamber, includes sensing radiation from the object within the chamber through a window in the wall of the chamber that exhibits different transmissivity than the wall of the chamber to radiation in a selected waveband relative to the waveband of the radiation supplied through the wall of the chamber to heat the object within the chamber.Type: GrantFiled: February 19, 1993Date of Patent: July 5, 1994Assignee: A G Processing Technologies, Inc.Inventors: Thomas E. Thompson, Eugene R. Westerberg
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Patent number: 5325863Abstract: In a tympanic temperature detector a thermopile is suspended in a rigid structure of high thermal conductivity having a window. That structure is positioned at the rear end of a high thermal conductivity duct through which the tympanic membrane is viewed. The duct is cantilevered within a shield to which it is coupled to a high thermal conductivity joint. Thermal paths to the thermopile and window are tuned to minimize response of the thermopile to thermal perturbations at the tip of the duct.Type: GrantFiled: February 6, 1992Date of Patent: July 5, 1994Assignee: Exergen CorporationInventor: Francesco Pompei
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Patent number: 5323005Abstract: The monitoring of energy radiating from a heated material, such as a hot melt adhesive, dispensed onto a substrate may be accomplished by an infrared sensor. The wand of the infrared sensor is located downstream of the dispensed material for receiving the radiant energy. The wand is provided with internal air for cooling and for providing laminar air flow in the vicinity of the lens to prevent the accumulation of airborne contaminants on the lens. The wand is also provided with a light aiming device.Type: GrantFiled: May 12, 1993Date of Patent: June 21, 1994Assignee: Nordson CorporationInventor: Stephen L. Merkel
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Patent number: 5316385Abstract: A method and apparatus to produce correction-free pyrometry is described. The method determines the optimum position for a pyrometer that "views" a specular, spherical or near-spherical target in a furnace through pyrometer optics and a window in a wall of the furnace. The positioning method uses nonparaxial optical analysis to determine the position of an image of the window in the target. The window image is free of any image of the furnace walls, that is, it is free from wall radiance, and pure target radiance can be obtained in that region. The optical analysis is then used to back project the pyrometer detector through the pyrometer optics and onto the surface of the target. If the detector projection falls completely within the image of the window, the detector will read only pure target radiance and no correction will be necessary to obtain the temperature of the target through pyrometry.Type: GrantFiled: March 30, 1993Date of Patent: May 31, 1994Assignee: The United States of America as represented by the Administrator of the National Aeronautics and Space AdministrationInventor: Andrew S. W. Thomas
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Patent number: 5294200Abstract: A device for measuring the temperature of an external moving filament is disclosed. The device includes dual thermal sinks or reference bodies; each reference body has two heat flow sensors that are matched in sensitivity and are connected in series. By utilizing dual thermal reference bodies, which are maintained at different temperatures, the device yields the absolute temperature of the filament by measuring the temperatures of the referenced bodies and the heat flow rates between each of the reference bodies and the filament. The device automatically calculates the proportionality constant between the heat flow rates and the temperature differences between the filament and the reference bodies and thus calculates the filament temperature. Each heat flow sensor has a row of sensitive elements or active junction lines that is not parallel to the path of the filament.Type: GrantFiled: March 30, 1992Date of Patent: March 15, 1994Assignee: Luxtron CorporationInventor: Dieter L. Rall
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Patent number: 5290102Abstract: Methods and apparatus for measuring gravitational and inertial forces, magnetic fields, or wave or radiant energy acting on an object or fluid in space provide an electric tunneling current through a gap between an electrode and that object or fluid in space and vary that gap with any selected one of such forces, magnetic fields, or wave or radiant energy acting on that object or fluid. These methods and apparatus sense a corresponding variation in an electric property of that gap and determine the latter force, magnetic fields, or wave or radiant energy in response to that corresponding variation, and thereby sense or measure such parameters as acceleration, position, particle mass, velocity, magnetic field strength, presence or direction, or wave or radiant energy intensity, presence or direction.Type: GrantFiled: December 24, 1992Date of Patent: March 1, 1994Assignee: California Institute of TechnologyInventors: William J. Kaiser, Steven B. Waltman, Thomas W. Kenny
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Patent number: 5285396Abstract: A device for evaluating a plurality of race horses' readiness for a race by quantitatively assessing the horses' temperatures without contacting the horses, the evaluation being made prior to the race when the race horses may be viewed in a paddock area. The device may include an infrared sensor for measuring the horses' temperatures at least three times in a random sampling period, an arithmetic operator for calculating characteristics of those measurements such as the maximum, minimum and mean, and various differences among the measured temperatures, and a display for providing a visual comparison of the measured and calculated values. The device may also correct the measured temperatures for the distance from which temperature measurements were taken.Type: GrantFiled: November 21, 1991Date of Patent: February 8, 1994Inventor: Tadamasa Aoyama
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Patent number: 5263839Abstract: Apparatus the temperature of a thermoplastic sheet including a hollow wave guide having a bend therein, for receiving and transmitting infrared energy emitted by the sheet between a sheet heater at a sheet forming station and differential pressure forming apparatus at a forming station. One end of the hollow channel is mounted adjacent the sheet. At the opposite end of the hollow channel, a plurality of infrared energy sensors is mounted for sensing the infrared energy. Infrared sensors include mechanism for converting the infrared energy to electrical energy to operate a control system which controls the level of electrical power to the heater and thus controls the temperature of the sheet.Type: GrantFiled: November 5, 1991Date of Patent: November 23, 1993Assignee: Trafalgar House Inc.Inventors: David J. Robinson, Samuel D. Ferguson
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Patent number: 5258824Abstract: A method and apparatus is used to determine the thickness of a layer deposited on a specimen. For example, the thickness of a layer of polycrystalline may be measured as it is deposited over silicon oxide on a silicon wafer. The intensity of radiation emission at the top of the silicon wafer is detected. The temperature of the silicon wafer is measured and the variation in the intensity of radiation emission due to variation of the temperature is subtracted from the intensity of radiation emission detected at the top of the silicon wafer. The resultant signal is used to calculate the thickness of the polycrystalline silicon layer.Type: GrantFiled: May 14, 1992Date of Patent: November 2, 1993Assignee: Applied Materials, Inc.Inventors: David K. Carlson, Russell Bowman
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Patent number: 5255286Abstract: A multi-point non-invasive, real-time pyrometry-based temperature sensor (200) for simultaneously sensing semiconductor wafer (22) temperature and compensating for wafer emissivity effects. The pyrometer (200) measures the radiant energy that a heated semiconductor wafer (22) emits and coherent beams of light (224) that the semiconductor wafer (22) reflects. As a result, the sensor (200) generates accurate, high-resolution multi-point measurements of semiconductor wafer (22) temperature during a device fabrication process. The pyrometer (200) includes an infrared laser source (202) that directs coherent light beam (203) into beam splitter (204). From the beam splitter (204), the coherent light beam (203) is split into numerous incident coherent beams (210). Beams (210) travel via optical fiber bundles (218) to the surface of semiconductor wafer (22) within the fabrication reactor (80). Each optical fiber bundle (218) collects reflected coherent light beam and radiant energy from wafer (22).Type: GrantFiled: July 10, 1992Date of Patent: October 19, 1993Assignee: Texas Instruments IncorporatedInventors: Mehrdad M. Moslehi, Habib N. Najm
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Patent number: 5249142Abstract: A method of measuring the temperature of a matter accurately, in non-contact fashion and without setting any emissivity comprising obtaining a spectral characteristics of absorbing electromagnetic waves inherent to a matter whose temperature is to be measured, obtaining those absorption peak wavelengths of the electromagnetic waves which correspond to two or more high points of electromagnetic wave absorption rate obtained from the spectral characteristics, measuring amounts of the electromagnetic waves, which have the absorption peak wavelengths, radiated from the temperature-measured matter, and calculating the temperature of the matter from blues of the radiant amounts of the electromagnetic waves thus measured.Type: GrantFiled: April 3, 1992Date of Patent: September 28, 1993Assignees: Tokyo Electron Kyushu Limited, Kokusai Gljutsu Kaihatsu Co., Ltd.Inventors: Eiichi Shirakawa, Masafumi Nomura, Kimiharu Matsumura
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Patent number: 5246292Abstract: Temperature measurement apparatus comprising an IR temperature change detector, a chopper for intermittently exposing the detector to an object whose temperature is to be measured, and means for providing an output indication representing the temperature of the object in response to the output of the detector, wherein the chopper is driven by a quartz timepiece movement.Type: GrantFiled: May 28, 1992Date of Patent: September 21, 1993Inventors: Eli Gal, Dan Moran, Yonatan Gerlitz
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Patent number: 5235399Abstract: An apparatus for measuring the temperature of an object placed in a plasma by utilizing radiation includes measuring means for measuring the intensity of radiation from the object and the intensity of plasma light in different directions at the same time. The measuring means includes a first lens for receiving the radiation from the object and the plasma light, a second lens for converting the output beam of the first lens into parallel light rays, a third lens for focusing the parallel light rays, and an interference filter disposed rotatably between the second lens and the third lens.Type: GrantFiled: June 24, 1991Date of Patent: August 10, 1993Assignee: Hitachi, Ltd.Inventors: Tatehito Usui, Tomoji Watanabe, Junichi Kobayashi, Takehiko Ooshima, Shunji Sasabe
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Patent number: 5232667Abstract: An accurate, low cost temperature control system for a disposable cartridge carrying including a sample chamber for a portable medical diagnostic device or other electrochemical analytical device is disclosed. The disposable cartridge may include its own heating element on a sensor chip and plugs into a terminal which contains electrical input/output connections. The outer surface of the chip is exposed. A remote temperature sensor which senses the temperature of the outer surface of the chip of the measuring cell and generates a control signal which is used with conventional temperature control circuitry as the basis for thermostatic control of the cell temperature.Type: GrantFiled: May 21, 1992Date of Patent: August 3, 1993Assignee: Diametrics Medical, Inc.Inventors: Martin G. Hieb, Scott E. Blomberg
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Patent number: 5216625Abstract: A method and apparatus for measuring the temperature of an external body is disclosed. The apparatus comprises dual thermal sinks or reference bodies wherein heat flow sensors are mounted. By utilizing dual thermal reference bodies, which are at different temperatures, the method of the invention yields the absolute temperature of the external body by measuring the temperatures of the referenced bodies and the heat flow rates between each of the reference bodies and the external body. The apparatus automatically calculates the proportionality constant between the heat flow rates and the temperature differences between the external body and the reference bodies and thus calculates the external body temperature.Type: GrantFiled: November 1, 1989Date of Patent: June 1, 1993Assignee: Luxtron CorporationInventor: Dieter L. Rall
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Patent number: 5203631Abstract: A narrow-band pyrometric system measures the temperature of an object (1), such as a semiconductor wafer (1), that is coated with a film (2) having an absorption band. The thermal radiation emitted by the coated object (1) passes through a lens (3) and aperture (4), and then a filter (5). The passband of this filter (5) falls within the absorption band of the film (2). The transmitted radiation is then collected by the radiation detector (6), which measures the intensity. The detected radiation is at a wavelength where the heated object (1) is substantially opaque, and the effect of uncertainties in the emissivity on the temperature measurement is minimized. Thus, a method is provided to coat the object (1) with a film (2) of material having an absorption band encompassing the filter (5) passband, and a thickness sufficiently great that the object (1) appears opaque when viewed through the filter (5).Type: GrantFiled: October 18, 1991Date of Patent: April 20, 1993Assignee: Varian Associates, Inc.Inventors: Michelangelo Delfino, David T. Hodul
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Patent number: 5196830Abstract: An apparatus for supervising objects, such as hot plates and electrical stoves, with regard to overheating comprises at least one detector for detecting conditions of overheating and a device controlled by the detector for delivering for instance alarm. The detector is a detector for infrared radiation arranged at a distance from the object to detect heat radiation emitted therefrom.Type: GrantFiled: August 24, 1990Date of Patent: March 23, 1993Inventors: Torbjorn Birging, Carl-Gosta Ardesjo
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Patent number: 5193911Abstract: A thermal imaging device comprising a pyroelectric layer having on one major surface an array of interconnected electrodes forming an entrance face, and on the opposite major surface an array of discrete electrodes connected to electrical circuitry formed on a semiconductive substrate. Between the entrance faces of individual detector elements in a network of further electrodes of high thermal conductance which provides a high degree of thermal isolation for the detector elements and prevents significant thermal cross-talk between adjacent detector elements.Type: GrantFiled: April 24, 1991Date of Patent: March 16, 1993Assignee: Thorn Emi plcInventors: Elvin L. Nix, Brian Holcroft, Stephen D. Etienne
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Patent number: 5188458Abstract: Dual pyrometric detectors and method measure the temperature of a remote heated object in the presence of ambient radiation. One detector measures emitted radiation from both the remote object and from the environment, and the other detector measures radiation predominantly from the environment alone. The output signals from the two detectors are processed electronically to yield the detected radiation from the remote object alone. The result can then be electronically processed to display the pyrometrically-measured temperature of the remote object.Type: GrantFiled: September 9, 1991Date of Patent: February 23, 1993Assignee: A G Processing Technologies, Inc.Inventors: Thomas E. Thompson, Eugene R. Westerberg
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Patent number: 5178464Abstract: A sensor includes two thermal energy detectors thermally insulated from one another. The first detector is warmed or cooled by radiation between it and the object being measured. The second detector is warmed or cooled by exchange of thermal energy with a thermal reference source until the second detector reaches a temperature that is a predetermined ratio with that of the first detector. A control circuit which receives signals from the detectors that represent their temperatures, provides control for the thermal reference. A third detector measures the temperature of the thermal reference source and provides a signal representative of the temperature of the reference source. A processor receives the signal from the third detector and provides a signal indicative of the temperature of the object.Type: GrantFiled: April 19, 1991Date of Patent: January 12, 1993Assignee: Thermoscan Inc.Inventor: Jacob Fraden
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Patent number: 5174864Abstract: Controlled heating unit for extracting solvent from sludge by distillation, in particular for dry-cleaning machines, having a sludge tank with a flattened shape which is arranged at the base of a sealed box-like chamber and above which inlets for microwaves generated by a microwave source are present, a mixer for the sludge to be treated, at least one sludge temperature sensor which switches off the microwave source when the sludge reaches a temperature which is proximate to the degradation temperature of the solvent.Type: GrantFiled: October 16, 1990Date of Patent: December 29, 1992Assignee: Sodibo S.p.A.Inventors: Tommaso Arbizzani, Gualtiero Ghelardini
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Patent number: 5172978Abstract: A radiant thermometer for detecting infrared rays coming from an object along an optical axis to determine its temperature is provided with an improved aiming system. An exterior housing supports an interior housing that mounts the detector having an opening for receiving the infrared rays. A visible sighting light source is provided in the exterior housing behind the detector. A peripheral lens system is mounted between the interior and the exterior housing to provide a cone shaped transmission of light having a larger field angle than a field angle of the detector. The cone shaped transmission of light is capable of being focused on the optical axis for aiming the radiant thermometer.Type: GrantFiled: May 20, 1991Date of Patent: December 22, 1992Assignee: Horiba, Ltd.Inventors: Toshiyuki Nomura, Naohiro Osuga, Yuiji Tsujioka, Naoyuki Matsumoto
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Patent number: 5173868Abstract: A scanning radiation sensor (10) for individually determining temperature of a plurality of spots (16') along a scan line (16) on a target (12) responds to inputs to a light marking apparatus (21, 29, 40, 21) to determine which of a plurality of samples produced during a scan cycle are to be selected for averaging (54, 54'). Averages are determined for each scan (54, 54') and then averages for each scan are averaged over multiple scans (56). Both spot target samples (Ts) and reference source samples (Rs) are averaged for improved accuracy, with target samples being converted to temperatures (52) before averaging.Type: GrantFiled: October 19, 1990Date of Patent: December 22, 1992Assignee: Square D CompanyInventors: Eugene F. Kalley, Steven A. Ignatowicz
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Patent number: 5171733Abstract: A device is provided for measuring radiant energy, the device comprising a substrate; a bolometer formed from a high T.sub.c superconducting material disposed on the substrate in an area that is about 1.times.5 .mu.m.sup.2 and about 0.02 .mu.m in depth; and a planar antenna disposed on the substrate and coupled to receive radiation and to impart the received radiation to the bolometer.Type: GrantFiled: December 4, 1990Date of Patent: December 15, 1992Assignee: The Regents of the University of CaliforniaInventor: Qing Hu
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Patent number: 5169234Abstract: An infrared temperature sensor with a sensor element sensitive for infrared radiation and which generates an analog output signal, permits a speed-variable and resolution-variable infrared temperature measurement, in that at least one resolution-adjustable converter means is provided for converting the analog signal into a digital signal and in that a digital signal processing means is provided for the program-controlled linearization and evaluation of the digital signal.Type: GrantFiled: February 13, 1991Date of Patent: December 8, 1992Assignee: Ultrakust Electronic GmbHInventor: Alfred Bohm
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Patent number: 5169235Abstract: A thermometer includes an infrared sensor (14) for receiving infrared radiation to generate a corresponding electrical signal; a reference unit (10) for emitting a standard infrared radiation; a temperature sensor (11) for receiving the standard infrared radiation to generate a corresponding standard electrical signal; a support unit (1, 2) for supporting the infrared sensor and the reference means such that the infrared sensor receives the standard infrared radiation from the reference means in a standby state and infrared radiation from a subject in a measurement state; an arithmetic unit (44) for computing a temperature of the subject based on the electrical signals from the infrared sensor in both the standby and measurement states and from the temperature sensor.Type: GrantFiled: August 30, 1991Date of Patent: December 8, 1992Assignee: Hirose Electric Co., Ltd.Inventors: Hitoshi Tominaga, Masami Tanaka, Masayoshi Koshino, Hideo Ishibashi
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Patent number: 5167452Abstract: A method of accurately determining the temperature of a thin layer of bandgap material without requiring contact to the layer involves the use of optical radiation through the layer and the detection of optical absorption by the layer. The relationship between the temperature varying bandgap energy and the resulting optical absorption characteristics provides an indication of temperature independent of ambient temperature. Apparatus for performing high quality temperature detection and control is also provided.Type: GrantFiled: August 28, 1989Date of Patent: December 1, 1992Assignee: ITT CorporationInventors: Avraham Amith, Charles Naselli, C. Scott Nevin
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Patent number: 5166080Abstract: The thickness of a thin film on a substrate surface is determined by measuring its emissivity and temperature with a non-contact optical technique and then calculating the film thickness from these measurements. The thickness of the film can be determined by this technique in situ, while it is being formed and substantially in real time, thus allowing the measurement to control the film forming process. This has application to controlling the formation of dielectric and other material layers on a semiconductor substrate in the course of manufacturing electornic integrate circuits, including automatically terminating the process at its endpoint when the layer has reached a desired thickness.Type: GrantFiled: April 29, 1991Date of Patent: November 24, 1992Assignee: Luxtron CorporationInventors: Charles W. Schietinger, Bruce E. Adams
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Patent number: 5156461Abstract: A multi-point non-invasive, real-time pyrometry-based temperature sensor (200) for simultaneously sensing semiconductor wafer (22) temperature and compensating for wafer emissivity effects. The pyrometer (200) measures the radiant energy that a heated semiconductor wafer (22) emits and coherent beams of light (224) that the semiconductor wafer (22) reflects. As a result, the sensor (200) generates accurate, high-resolution multi-point measurements of semiconductor wafer (22) temperature during a device fabrication process. The pyrometer (200) includes an infrared laser source (202) that directs coherent light beam (203) into beam splitter (204). From the beam splitter (204), the coherent light beam (203) is split into numerous incident coherent beams (210). Beams (210) travel via optical fiber bundles (218) to the surface of semiconductor wafer (22) within the fabrication reactor (80). Each optical fiber bundle (218) collects reflected coherent light beam and radiant energy from wafer (22).Type: GrantFiled: May 17, 1991Date of Patent: October 20, 1992Assignee: Texas Instruments IncorporatedInventors: Mehrdad M. Moslehi, Habib N. Najm
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Patent number: 5152609Abstract: In a method for measuring the temperature of the mix in a mixing chamber of a kneader, the temperature of the mix being continuously measured by means of at least one sensor projecting into the mixing chamber, for the purpose of correcting measuring errors due to the heat conductivity of the sensor housing, a second sensor, in particular in the form of an infra-red sensor, is provided and directly detects the temperature of the mix at certain discrete times during the mixing process, the continuous temperature measuring of the first sensor being corrected according to the measuring of the second sensor when the mixing process is continued.Type: GrantFiled: July 18, 1991Date of Patent: October 6, 1992Assignee: Werner & Pfleiderer Gummitechnik GmbHInventors: Walter Hader, Andreas Limper, Wolfgang Engel
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Patent number: 5115815Abstract: The use of ophthermometers in a new field of ophthermology in the passive detection of thermal discrepance in the eyes of a person and its relation to health impairment and/or alcohol and drug abuse. Ophthermology has many uses. It can be used to initially establish a baseline or normal temperature for reference in identifying future eye problems. Readings can be taken from the pupil iris area or the white of the eye from the optic nerve to the cornea. Taking eye temperature before eye surgery can determine whether blood flow is adequate to permit surgery. Eye surgery can be monitored to determine the extent surgical wounds have healed and when the cease medication. Eye temperature readings can determine the fit of contact lenses, especially in fitting abnormal distorted corneas. Eye socket temperature can be measured to detect infection after traume of eye removal. Eye temperature differential can indicate reduced carotid flow and early detection of risk of stroke.Type: GrantFiled: September 18, 1990Date of Patent: May 26, 1992Inventor: Donald H. Hansen
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Patent number: 5106200Abstract: An apparatus for measuring the temperature of a wafer by a non-contact method includes a supporting device, at a specified position on which the wafer is placed horizontally. A thermocouple is provided with a heat collector at one end thereof. The heat collector is disposed near but in non-contacting relationship with the wafer at the specified position. A reflector capable of reflecting radiant heat is disposed near the heat collector and on the opposite side thereof from the wafer such that radiant heat from the wafer can be efficiently collected by the heat collector.Type: GrantFiled: December 20, 1990Date of Patent: April 21, 1992Assignee: Applied Materials, Inc.Inventor: Akihiro Hosokawa
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Patent number: 5100243Abstract: This invention relates to a device for monitoring the temperature of the wheels of passing railroad cars. More particularly, this device includes a self-calibration function wherein a predetermined heat source is attached to the device, a fixed amplifier amplifies the resulting electric signal so as to generate a signal comparable in magnitude to that generated by a passing train, a variable gain amplifier further amplifies the signal, and the resulting signal is converted to a digital signal. The digital signal is used as a signal to the feedback input of a variable gain amplifier. In response to the digital signal, the variable gain amplifier adjusts its gain until the feedback signal reaches a predetermined value.Type: GrantFiled: December 12, 1990Date of Patent: March 31, 1992Assignee: Servo Corporation of AmericaInventors: George Grosskopf, W. Woodward Sanville
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Patent number: 5099121Abstract: A method of measuring the temperature of a remote body which comprises determining the frequency range to be covered and the portion of that range or frequency band to be covered by each detector of a detector array or by a single detector via a filter for applying different frequency bands to the single detector. The required detector or detectors are then provided and sense the energy radiated by the remote body whose temperature is to be measured. The detector or detectors then provide an output of the amount of energy measured in each unique frequency band and sends these measured outputs to a processor. The processor receives the measured outputs from the detector(s) and determines therefrom in accordance with an algorithm thereat the measured temperature. The processor then provides an output indicative of the measured temperature.Type: GrantFiled: May 11, 1990Date of Patent: March 24, 1992Assignee: Texas Instruments IncorporatedInventor: John B. Allen
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Patent number: 5098198Abstract: The temperature of a semiconductor wafer during annealing of metallization is accurately and indirectly monitored by supporting the wafer on a thin susceptor of constant emissivity and monitoring the temperature of the susceptor. The system has the added advantage of providing efficient, controlled heating of the wafer by radiant heating of the backside of the susceptor.Type: GrantFiled: September 3, 1991Date of Patent: March 24, 1992Assignee: Applied Materials, Inc.Inventors: Jaim Nulman, Dan Maydan
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Patent number: 5098199Abstract: A method of accurately determining the temperature of a thin layer of bandgap material without requiring contact to the layer involves the use of optical radiation reflected off the bandgap material and the detection of the reflected energy. The relationship between the temperature varying bandgap energy and the resulting reflection characteristics provides an indication of temperature, independent of ambient temperature.Type: GrantFiled: August 6, 1990Date of Patent: March 24, 1992Assignee: ITT CorporationInventor: Avraham Amith
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Patent number: 5092680Abstract: A device for the measurement of a temperature in a relatively low range having the lower limit of below 100.degree. C. is proposed. The device is suitably used for measuring a temperature of a substrate 4 during a sputtering treatment in a vacuum environment. Infrared rays radiated from the substrate 4 in a vacuum chamber 1 are collected by an optical lens 13 mounted in a freely movable probe 10 via a mirror (15) provided in a hood 14 attached to a front end of the probe (10) for deflecting the incident rays to the lens 13. The collected rays are led outside the chamber 1 to a sensor through a fluoride fiber 8 optically connected to the lens 13. The fiber 8 is enveloped in an air-tight manner within a metal bellows 9.Type: GrantFiled: May 23, 1990Date of Patent: March 3, 1992Assignee: Fujitsu LimitedInventors: Kazuo Kobayashi, Ayahiko Sato, Yuji Uehara, Shigetomo Sawada
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Patent number: 5090819Abstract: A superconducting transition edge bolometer is constructed using high critical temperature conducting films by stabilizing a substrate of magnesium oxide or sapphire with a silicon base that is bonded to the substrate using a thermally conductive bonding layer. The base is etched away in the region of the desired radiation detecting portion of the superconductor establishing a controlled thermal connection between the detecting portion and the base which base serves as a thermal bath for the bolometer.Type: GrantFiled: August 20, 1990Date of Patent: February 25, 1992Assignee: Conductus, Inc.Inventor: Aharon Kapitulnik
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Patent number: 5081359Abstract: A differential temperature sensor uses two different thermopiles each encased in its own can. The thermopiles are given a position and spatial orientation to best suit the measuring task. A connector of low thermal impedance thermally connects the cold junctions of the two thermopiles. The connector is adjusted, angled or pivoted to allow the proper relative orientation of the thermopiles. The thermopiles are placed close to the detected areas to keep the thermopile cold junctions and a detected reference area close in temperature. An automatic assembly process uses the present invention in conjunction with a photoelectric switch which confirms the presence of the subject being measured. An improved chiropractic measuring device also uses the differential sensor to accurately sense nerve damage near the spine.Type: GrantFiled: May 23, 1990Date of Patent: January 14, 1992Assignee: Exergen CorporationInventor: Francesco Pompei
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Patent number: 5075856Abstract: LOWTRAN 7 is a low-resolution propagation model and computer code for predicting atmospheric transmittance and background radiance from 0 to 50,000 cm.sup.- at a resolution of 20 cm.sup.-. The code is based on the LOWTRAN 6 (1983) model with a number of improvements. Multiple scattered radiation has been added to the model as well as new molecular band model parameters and new ozone and molecular oxygen absorption parameters for the UV. Other modifications include a wind-dependent desert model, new cirrus cloud models, and new cloud and rain models. The code also includes new representative (geographical and seasonal) atmospheric models and updated aerosol models with options to replace them with user-derived values. An improved extra-terrestrial solar source function is also included. Six modes of program execution are allowed with the new model and computer code for a given slant path geometry.Type: GrantFiled: July 17, 1989Date of Patent: December 24, 1991Assignee: The United States of America as represented by the Secretary of the Air ForceInventors: Francis X. Kneizys, Eric P. Shettle, Leonard W. Abreu, James H. Chetwynd, Gail P. Anderson, William O. Gallery, John E. A. Selby, Shepard A. Clough
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Patent number: 5059032Abstract: An apparatus for measuring heat flow from a surface, including a heat flow measuring device for measuring heat flow from a surface; a structure for applying a relatively constant and repeatable force on the heat flow measuring device contacting the surface; an infrared pyrometer for measuring test surface temperature; an infrared pyrometer for measuring surrounding atmospheric temperature and a free standing support for supporting all of the above identified elements of the heat flow measuring device.Type: GrantFiled: August 16, 1990Date of Patent: October 22, 1991Assignee: The Dow Chemical CompanyInventors: Russel T. Mack, Ronald W. Rieger
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Patent number: 5028145Abstract: A temperature measuring arrangement for a revolving roll which includes a contactless temperature sensor by means of which the temperature of an annular peripheral zone of the roll situated outside the operating zone of the roll is measured contactlessly. Upon detection of a deviation from a given temperature or given time response of the temperature, a contact temperature sensor which is active only briefly is, by means of a control unit, brought into abutment, using a movement drive, at a point inside the operating zone of the roll.Type: GrantFiled: September 5, 1989Date of Patent: July 2, 1991Assignee: Eduard Kusters Maschinenfabrik GmbHInventors: Werner Borkenhagen, Lambert Berends
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Patent number: 5018872Abstract: A probe assembly for an infrared medical thermometer, which is adapted for insertion into a patient's ear canal and which facilitates a rapid measurement of the patient's body temperature with very high accuracy. The probe assembly includes a plastic outer tube sized to fit snugly in the patient's ear canal, with an elongated heat sink and an infrared sensor located within the tube. A cylindrical shield and inwardly-projecting guard ring ensure that the sensor's hot junction receives radiation only from the ear canal and that the sensor's cold junction is prevented from being heated for at least sufficient time to allow the thermometer to provide an accurate measurement of the patient's body temperature.Type: GrantFiled: October 5, 1989Date of Patent: May 28, 1991Assignee: Diatek, Inc.Inventors: Edward D. Suszynski, Kerry Banke, Thomas K. Gregory
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Patent number: 5017019Abstract: A radiation detector provides differential temperature readings of surface tissue. The differential readings are normalized to room temperature ambient. Green and yellow LEDs indicate a normalized temperature of less than 2.degree. C. and red LEDs indicate a normalized temperature differential of greater than 2.degree. C.Type: GrantFiled: April 14, 1989Date of Patent: May 21, 1991Assignee: Exergen CorporationInventor: Francesco Pompei
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Patent number: 5017761Abstract: A heater probe assembly used to heat treat a portion of a metallic tube that is surrounded by a heat sink is disclosed. The heater probe assembly heats the tube to a selected temperature range to relieve stress in and prevent degradation of the tube portion. The heater probe assembly includes an elongated probe body that is insertable and slidably movable within the tube portion. A radiant heat source is removably mounted on the probe body and heats the tube portion to incandescence within the selected temperature range. A temperature monitoring device monitors the temperature of the tube portion. The temperature monitoring device includes first and second optical measuring devices which determine the color of the tube portion at its longitudinally middle and end portions of the tube portion. An optical pyrometer translates the optical color measurement into a temperature measurement.Type: GrantFiled: January 18, 1989Date of Patent: May 21, 1991Assignee: Westinghouse Electric Corp.Inventor: Michael G. Brunner
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Patent number: 5001657Abstract: A radiation thermometer has a detector for receiving radiation energy from a target object, and the detector generates an AC signal as a result of movement of a chopper. The AC signal is rectified by a rectifying circuit and the rectified signal is supplied to a microcomputer. On the other hand, temperatures around the detector are detected by a temperature sensor and the temperature of the target object is measured based on those detected values. In addition, the radiation thermometer has various calibration modes other than a measurement mode. In a calibration mode I, calibration data concerning a difference in characteristics of the temperature sensor for each thermometer is obtained. Data for correcting timing for synchronous rectification by the rectifying circuit is obtained in a calibration mode II. Calibration data for calculation of the temperature of the target object is obtained in a calibration mode III.Type: GrantFiled: December 6, 1989Date of Patent: March 19, 1991Assignee: Minolta Camera Kabushiki KaishaInventors: Hirokazu Yagura, Kenji Imura
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Patent number: 4998826Abstract: An infrared thermometer has a field of view selected so that the temperature of the crop growing in a field is accurately measured. The infrared thermometer may be mounted on a support pole in a field to substantially continuously monitor the foliage temperature of the growing crop. In one preferred embodiment, the infrared thermometer comprises and instrument housing structure provided with an infrared telescope mounted on a turntable that scans through an angle of the field, while an electronic circuit simultaneously integrates the output of the infrared telescope. The angle to be scanned is selected by the user in accordance with his needs. In another embodiment, the infrared thermometer comprises a novel sensor head block including an aperture which provides a wide, elongated oval field of view for an infrared sensor provided therein. In both embodiments, the elongated oval field of view has a width that is at least four times its height.Type: GrantFiled: November 30, 1988Date of Patent: March 12, 1991Assignee: Telatemp CorporationInventors: Don E. Wood, Wayne Scharf