Diffraction, Reflection, Or Scattering Analysis Patents (Class 378/70)
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Patent number: 8357894Abstract: An improved microcalorimeter-type energy dispersive x-ray spectrometer provides sufficient energy resolution and throughput for practical high spatial resolution x-ray mapping of a sample at low electron beam energies. When used with a dual beam system that provides the capability to etch a layer from the sample, the system can be used for three-dimensional x-ray mapping. A preferred system uses an x-ray optic having a wide-angle opening to increase the fraction of x-rays leaving the sample that impinge on the detector and multiple detectors to avoid pulse pile up.Type: GrantFiled: August 10, 2010Date of Patent: January 22, 2013Assignee: FEI CompanyInventors: Milos Toth, Michael R. Scheinfein, Eric Silver, David Narum
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Patent number: 8340248Abstract: In an X-ray diffraction method, an X-ray parallel beam is incident on a sample, and diffracted X-rays from the sample are reflected at a mirror and thereafter detected by an X-ray detector. The reflective surface of the mirror is a combination of plural flat reflective surfaces, the respective centers of which are located on an equiangular spiral having a center that is located on a surface of the sample. The X-ray detector is one-dimensional position-sensitive in a plane parallel to the diffraction plane. X-rays that have been reflected at different flat reflective surfaces reach different points on the X-ray detector respectively. A correction is performed for separately recognizing different reflected X-rays that may have been reflected at the different flat reflective surfaces, and might be mixed with each other on the same detecting region of the X-ray detector.Type: GrantFiled: March 23, 2010Date of Patent: December 25, 2012Assignee: Rigaku CorporationInventors: Hideo Toraya, Hisashi Konaka
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Publication number: 20120294425Abstract: Disclosed is a radiation image conversion panel wherein luminance is improved by preventing the disorder of the structure of phosphor columnar crystals, thereby eliminating the scattering and refraction of optical elements which is emitted by an X-ray-irradiated phosphor and propagated in the direction of a photoelectric conversion element. Moreover disclosed is a radiation image detector using the same.Type: ApplicationFiled: January 11, 2011Publication date: November 22, 2012Applicant: KONICA MINOLTA MEDICAL & GRAPHIC, INC.Inventors: Yasushi Nagata, Keiko Maeda
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Patent number: 8311183Abstract: An on-line EDXRD analyser including (i) a housing defining an analysis zone and having a passageway through it to allow transport of material in a process stream to pass through the analysis zone, (ii) a collimated source of polychromatic X-rays, (iii) an energy-resolving (ER)X-ray detector, (iv) a primary beam collimator disposed between the source of X-rays and the (ER)X-ray detector comprising an annular slit which defines an incident beam of polychromatic X-rays to irradiate a portion of the analysis zone, (v) a scatter collimator disposed between the primary beam collimator and the ERX-ray detector, the scatter collimator comprising an annular slit which defines a diffracted beam of X-rays scattered by the material to converge towards the ERX-ray detector, and (vi) a detector collimator comprising a conical opening which further defines the diffracted beam of X-rays scattered by the material.Type: GrantFiled: October 3, 2008Date of Patent: November 13, 2012Assignee: Commonwealth Scientific and Industrial Research OrganisationInventors: Joel O'Dwyer, James Tickner
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Patent number: 8300767Abstract: A wavelength-classifying type X-ray diffraction device bombards a sample with characteristic X-rays generated from an X-ray generation source, and detects characteristic X-rays diffracted by the sample using an X-ray detector. The X-ray generation source is composed of several metals of different atomic number, respective metals generating several characteristic X-rays of different wavelengths. An X-ray detector is composed of several pixels for receiving X-rays and outputting pulse signals corresponding to X-ray wavelengths. Pixels are respectively furnished with classification circuits. The classification circuits classify and output pixel output signals based on each of characteristic X-ray wavelengths. X-ray intensity is detected on a per-wavelength basis in individual pixels 12. Measurement data based on different wavelength X-rays are acquired simultaneously in just one measurement.Type: GrantFiled: July 3, 2012Date of Patent: October 30, 2012Assignee: Rigaku CorporationInventors: Kazuyuki Matsushita, Takuto Sakumura, Yuji Tsuji, Masataka Maeyama, Kimiko Hasegawa
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Patent number: 8289387Abstract: A fixed vision system includes a sensor having a sensitive surface for acquiring an image of an object on a detecting plane, and a light-emitting device for generating a luminous reference figure on the detecting plane including an emission surface, and an objective through which a luminous radiation (from the object to the sensor) and a further luminous radiation (from the light-emitting device to the object) pass. The sensor and the light-emitting device are positioned such that, when the detecting plane is focused by the objective on the sensor, the sensitive surface is on the image plane generated by the objective or on a respective mirror plane with respect to the image plane and the emission surface of the light-emitting device is on the image plane or on a respective mirror plane with respect to the image plane.Type: GrantFiled: July 10, 2007Date of Patent: October 16, 2012Assignee: Datalogic Automation S.R.L.Inventors: Luigi Pellegrino, Kurt Vonmetz, Stefano Santi, Fabrizio Guastadini
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Patent number: 8243878Abstract: A method for analysis includes directing a converging beam of X-rays toward a surface of a sample having an epitaxial layer formed thereon, and sensing the X-rays that are diffracted from the sample while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum including a diffraction peak and fringes due to the epitaxial layer. A characteristic of the fringes is analyzed in order to measure a relaxation of the epitaxial layer.Type: GrantFiled: January 7, 2010Date of Patent: August 14, 2012Assignee: Jordan Valley Semiconductors Ltd.Inventors: Boris Yokhin, Isaac Mazor, Alexander Krohmal, Amos Gvirtzman, Gennady Openganden, David Berman, Matthew Wormington
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Publication number: 20120177180Abstract: A shutter arrangement for an X-ray housing includes a shutter 10 for example of solid tantalum. In embodiments, the shutter has a through hole 22 and slides between a closed and an open position on the inner face of the X-ray housing, in the open position the through hole 22 aligns with an opening 8 in the housing.Type: ApplicationFiled: January 12, 2011Publication date: July 12, 2012Applicant: PANalytical B.V.Inventors: Wilbert Alexander VAN LEMEL, Jaap BOKSEM
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Patent number: 8217937Abstract: An isosurfacial three-dimensional imaging system and method uses scanning electron microscopy for surface imaging of an assumed opaque object providing a series of tilt images for generating a sinogram of the object and a voxel data set for generating a three-dimensional image of the object having exterior surfaces some of which may be obscured so as to provide exterior three-dimensional surface imaging of objects including hidden surfaces normally obscured from stereographic view.Type: GrantFiled: March 28, 2007Date of Patent: July 10, 2012Assignee: The Aerospace CorporationInventors: Terence Sern-Wei Yeoh, Neil A. Ives
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Publication number: 20120163541Abstract: In a radiographic apparatus for obtaining a phase contrast image, and which includes a first grating and a second grating arranged with a predetermined distance therebetween, one of the first grating and the second grating is composed of plural unit gratings, each corresponding to a pixel, arranged in the direction of pixel columns. Further, the plural unit gratings are arranged in such a manner to be shifted, parallel to each other, in a direction orthogonal to a direction in which the other one of the first grating and the second grating extends by distances different from each other with respect to the other one of the first grating and the second grating. Further, image signals read out from groups of pixel rows, the groups being different from each other, are obtained, as image signals representing fringe images different from each other, based on image signals obtained by the radiation image detector by detecting radiation that has passed through the first grating and the second grating.Type: ApplicationFiled: December 27, 2011Publication date: June 28, 2012Applicant: FUJIFILM CORPORATIONInventor: Yasuhisa KANEKO
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Publication number: 20120134472Abstract: In a manufacturing process of a second grid, an X-ray absorbing layer is formed on a top surface of a strip of X-ray transparent sheet during conveyance, and a buffer layer is formed on a rear surface thereof. After that, the X-ray transparent sheet is wound into a roll so as to expose the X-ray absorbing layer to outside. Thus, the X-ray transparent sheet and the X-ray absorbing layer are laminated with being bonded with the buffer layer. The roll of layer laminated structure is sliced in its radial direction into a layer laminated sheet, which has the buffer layer, the X-ray transparent sheet, and the X-ray absorbing layer laminated in layers. After polishing sliced surfaces of the layer laminated sheet, the layer laminated sheet is pressed by a pressing device, so the second grid is curved into an approximately cylindrical shape.Type: ApplicationFiled: November 17, 2011Publication date: May 31, 2012Applicant: FUJIFILM CORPORATIONInventor: Yasuhisa KANEKO
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Publication number: 20120106705Abstract: A radiographic apparatus includes a radiation source that irradiates radiation, a first grating unit, a grating pattern unit, a radiological image detector, and a support unit. The radiation irradiated from the radiation source passes through the first grating unit. The grating pattern unit includes a periodic form that has a period which substantially coincides with a pattern period of a radiological image formed by the radiation having passed through the first grating unit. The radiological image detector detects a masked radiological image which is formed by masking the radiological image by the grating pattern unit. The support unit supports the radiation source, the first grating unit, the grating pattern unit and the radiological image detector. The radiation source is attached to the support unit via a vibration-proof member.Type: ApplicationFiled: November 1, 2011Publication date: May 3, 2012Applicant: FUJIFILM CorporationInventors: Yuji MIKAMI, Hiroyasu ISHII
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Publication number: 20120105267Abstract: A surveillance system is disclosed. In some embodiments, the surveillance system may include at least one controller adapted to control operation of first and second screening apparatus and to produce image data and screening data, to relate the image data to the screening data, and to produce relational information data from the related image data and screening data. In some embodiments, the system may include a first screening apparatus adapted to screen a subject in a subject position, a second screening apparatus adapted to screen the subject in the subject position, and a controller adapted to produce first and second screening data from the first and second screening apparatus, respectively, relate the first and second screening data, and to produce relational information data from the related first and second screening data.Type: ApplicationFiled: April 25, 2007Publication date: May 3, 2012Applicant: L-3 Communications Security and Detection Systems, Inc.Inventors: Paul DeLia, Scott T. TROSPER, Thomas E. BREEN, John J. Reilly, Paul J. Hurd, Michael J. LANZARO, Maya M. Radzinski, Thomas W. GRUDKOWSKI, Edward E. BROMBERG, Joseph Carter
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Patent number: 8163632Abstract: A method for processing the surface of a component, or the processing of an optical element through an ion beam, directed onto the surface to be processed, so that the surface is lowered and/or removed at least partially, wherein the ions have a kinetic energy of 100 keV or more, as well as optical elements processed by the method.Type: GrantFiled: December 4, 2007Date of Patent: April 24, 2012Assignee: CARL ZEISS SMT GmbHInventors: Martin Weiser, Stefan Burkart, Holger Maltor
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Patent number: 8153418Abstract: An apparatus for analyzing bacteria is described that includes an analytic sample preparation section for preparing an analytic sample by treating a specimen so as to generate a morphological difference between Gram-negative bacteria and Gram-positive bacteria, a detector for detecting optical information from each particle contained in the analytic sample and an analyzing section for detecting Gram-positive bacteria contained on the basis of the detected optical information. A method for analyzing bacteria is also described.Type: GrantFiled: June 24, 2010Date of Patent: April 10, 2012Assignee: Sysmex CorporationInventor: Yasuyuki Kawashima
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Patent number: 8155267Abstract: A device for X-ray analysis of a sample (1), including: a generation system for the generation of an X-ray beam to irradiate an analysis zone of the sample, said analysis zone defining a analysis mean plane, and the X-ray beam being emitted along a direction of incidence; a detection system for the detection, in at least one dimension, of X-rays diffracted by the irradiated analysis zone. An analyser system located between the sample and the detection system and includes an X-ray diffracting surface forming a partial surface of revolution about an axis of revolution being contained in the analysis mean plane, with the axis of revolution being distinct from the direction of incidence and passing through the centre of the analysis zone, and with the diffracting surface being oriented so as to diffract the X-rays toward the detection system.Type: GrantFiled: March 27, 2008Date of Patent: April 10, 2012Assignee: Centre National de la Recherche Scientifique (CNRS)Inventors: Jean-Louis Hodeau, Pierre Henri Michel Bordet, Alessandra Gianoncelli, Luc Ortega, Alain Prat, Philippe Walter, Joseph Salomon, Eric Dooryhe
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Publication number: 20120051496Abstract: This invention relates to the use of thick target materials 50 microns and thicker for an x-ray transmission tube; to possible target material compositions including various elements and their alloys, eutectic alloys, compounds, or intermetallic compounds; and applications for utilizing such thick target transmission x-ray tubes. The target comprises at lease one portion of the target with a thickness of 50 microns or greater. The target can be optionally attached to a substrate end-window essentially transparent to x-rays or be thick enough so that no such substrate is required. Applications include producing a high percentage of monochromatic line mission x-rays of said thick target for use in reduced dose medical imaging and other non-destructive testing applications.Type: ApplicationFiled: August 25, 2010Publication date: March 1, 2012Inventors: Chia-Gee Wang, Bruce Briant Parsons
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Patent number: 8121249Abstract: The present invention relates to the field of x-ray imaging. More particularly, embodiments of the invention relate to methods, systems, and apparatus for imaging, which can be used in a wide range of applications, including medical imaging, security screening, and industrial non-destructive testing to name a few.Type: GrantFiled: June 4, 2010Date of Patent: February 21, 2012Assignee: Virginia Tech Intellectual Properties, Inc.Inventors: Ge Wang, Wenxiang Cong
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Patent number: 8119991Abstract: A calibration technique is provided that utilizes a standard sample that allows for calibration in the wavelengths of interest even when the standard sample may exhibit significant reflectance variations at those wavelengths for subtle variations in the properties of the standard sample. A second sample, a reference sample may have a relatively featureless reflectance spectrum over the same spectral region and is used in combination with the calibration sample to achieve the calibration. In one embodiment the spectral region may include the VUV spectral region.Type: GrantFiled: August 12, 2010Date of Patent: February 21, 2012Assignee: Jordan Valley Semiconductors Ltd.Inventor: Dale A Harrison
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Patent number: 8111808Abstract: A technique for use in security screening and detection contexts employs an X-ray explosive imager that acquires images from backscattered RF modulated X-ray signals on which a time series analysis is performed to detect image change across the time series of images that represent pixels changing at the rate of the difference frequency of the RF frequency and the a priori NQR signature frequencies.Type: GrantFiled: August 14, 2009Date of Patent: February 7, 2012Assignee: Lockheed Martin CorporationInventor: James R. Wood
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Patent number: 8111807Abstract: A sample is supported on a flat rotary specimen stage and irradiated at an incidence angle ? via a divergence slit with an x-ray beam emitted by an x-ray source, the diffraction beam from the sample is received via a divergence slit and the light-receiving slit by an x-ray detector placed at the position of a diffraction angle 2? to generate diffraction beam intensity data, the x-ray incidence angle ? and diffraction angle 2? are fixed at intrinsic values on the sample, the sample is rotated within a plane at designated step angles by the flat rotary specimen stage, the diffraction beam intensity is measured by the x-ray detector in each in-plane rotation step, the variance induced by particle statistics is calculated from the calculated diffraction beam intensities, and the size of the crystallites in the sample is calculated based on the variance induced by the particle statistics.Type: GrantFiled: September 16, 2009Date of Patent: February 7, 2012Assignee: Rigaku CorporationInventors: Takashi Ida, Licai Jiang
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Publication number: 20110317813Abstract: A wavelength-classifying type X-ray diffraction device bombards a sample with characteristic X-rays generated from an X-ray generation source, and detects characteristic X-rays diffracted by the sample using an X-ray detector. The X-ray generation source is composed of several metals of different atomic number, respective metals generating several characteristic X-rays of different wavelengths. An X-ray detector is composed of several pixels for receiving X-rays and outputting pulse signals corresponding to X-ray wavelengths. Pixels are respectively furnished with classification circuits. The classification circuits classify and output pixel output signals based on each of characteristic X-ray wavelengths. X-ray intensity is detected on a per-wavelength basis in individual pixels 12. Measurement data based on different wavelength X-rays are acquired simultaneously in just one measurement.Type: ApplicationFiled: June 28, 2011Publication date: December 29, 2011Applicant: Rigaku CorporationInventors: Kazuyuki MATSUSHITA, Takuto Sakumura, Yuji Tsuji, Masataka Maeyama, Kimiko Hasegawa
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Publication number: 20110305317Abstract: Provided are a method and an apparatus of precisely measuring the intensity profile of an x-ray nanobeam, which can measure x-rays having different wavelengths with one knife edge and can perform optimal measurements corresponding to the depth of focus of an x-ray beam and the conditions of other measurement devices, using a dark field measurement method which enables precise measurements of the profile of an x-ray beam using a knife edge and using diffracted and transmitted x-rays. The knife edge (4) is formed of a heavy metal which advances the phase of an x-ray passing therethrough and is fabricated in such a manner that the thickness may change in the longitudinal direction continuously or in a stepwise fashion.Type: ApplicationFiled: March 19, 2009Publication date: December 15, 2011Inventors: Kazuto Yamauchi, Hidekazu Mimura, Hiromi Okada
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Patent number: 8041086Abstract: In a specific macromolecule crystal detecting method according to the present invention, ultraviolet light is irradiated to sample solution, and a fluorescent image emitted from a sample in the sample solution is detected to detect specific macromolecules in the sample solution. Furthermore, by detecting the outline of the sample from the visible light image of the sample contained in the sample solution, the crystal is discriminated from other materials on the basis of the outline. By integrating the detection results of the fluorescent image and the visible light image, the specific macromolecule crystal is detected from the sample solution.Type: GrantFiled: August 18, 2004Date of Patent: October 18, 2011Assignees: Rigaku Corporation, RikenInventors: Akihito Yamano, Takahisa Sato, Hiroki Yoshida, Motohide Yoshimura, Kensaku Hamada
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Patent number: 8036338Abstract: Since measurement of magnetostriction is accompanied by measurement of magnetization, magnetostriction and magnetization are measured conventionally by separately prepared devices, with efforts for observing the same region of the sample. Measurement of the magnetostriction is difficult due to the difficulty of compensation and calibration. The value of magnetostriction coefficient in low temperature region cannot be correctly determined. A convenient method which can measure magnetostriction and magnetization simultaneously at the same region of the sample and at the same time is developed by combining the method of measurement of magnetostriction by X-ray diffraction and the method of measurement of magnetic X-ray diffraction. The observed X-ray diffraction intensity as a function of the magnetic field from the sample can be separated to symmetric component and asymmetric component, which contain signals proportional to the magnetostriction and magnetization, respectively.Type: GrantFiled: November 24, 2005Date of Patent: October 11, 2011Assignees: Tokyo Gakugei University, National Institutes of Natural SciencesInventors: Etsuo Arakawa, Noriyuki Aizawa, Koichi Maruyama
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Patent number: 8030629Abstract: The invention relates to an adaptive optical device for the reflection of impinging radiation, the adaptive optical device comprising at least one actuator and at least one partially reflective volume. The at least one partially reflective volume has a first surface that is oriented to the impinging radiation. The at least one partially reflective volume is at least partially deformable by said at least one actuator such that the impinging radiation is reflected at the at least one partially reflective volume substantially in accordance with Bragg's law. Further, the invention relates to a method and apparatus for controlling the shape of an adaptive optical device.Type: GrantFiled: December 6, 2007Date of Patent: October 4, 2011Assignee: Westfälische Wilhelms-Universität MünsterInventors: Zacharias Helmut, Martin Silles
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Patent number: 7983386Abstract: An apparatus for carrying out both x-ray diffraction (XRD) and x-ray fluorescence (XRF) analysis of a crystalline sample. A sample holder is located within an evacuable chamber. An x-ray fluorescence source and separate x-ray diffraction source are mounted within the evacuable chamber. An XRF detection arrangement is also provided, for detecting secondary x-rays emitted from the surface of the crystalline sample as a result of illumination by x-rays from the said x-ray fluorescence source. An XRD detection arrangement is then provided for detecting x-rays of a characteristic wavelength which have been diffracted by the crystalline sample. A moveable XRD support assembly is provided, comprising a first part configured to mount the XRD source for relative movement between the XRD source and the sample holder, and a second part configured to mount the XRD detection arrangement for relative movement between the XRD detection arrangement and the sample holder.Type: GrantFiled: February 28, 2008Date of Patent: July 19, 2011Assignee: Thermo Fisher Scientific, Inc.Inventors: Ravisekhar Yellepeddi, Pierre-Yves Negro, Michel Bonzon
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Patent number: 7978820Abstract: An instrument capable of both X-ray diffraction, XRD, and X-ray fluorescence measurements, XRF, arranges an X-ray source 10 creating an incident X-ray beam directed to a sample on a sample stage. An X-ray detection system is mounted at a fixed angle 2? for high energy energy dispersive XRD For XRF, an X-ray detection system is used.Type: GrantFiled: October 22, 2009Date of Patent: July 12, 2011Assignee: Panalytical B.V.Inventors: Alexander Kharchenko, Roger Meier, Walter van den Hoogenhof
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Patent number: 7972062Abstract: An X-ray analyzer includes a sample stage for holding and positioning a sample and an optical positioner assembly configured above the sample stage. The optical positioner assembly includes a body member having an opening; an optical positioner located within the opening; and at least one X-ray optic and an optical viewing lens coupled to a first camera. The at least one X-ray optic and the optical viewing lens are secured to the optical positioner. The optical positioner is configured to align one of the at least one X-ray optic and the optic viewing lens normal to the sample on the sample stage such that the sample is irradiated with X-rays through the X-ray optic along a path which is normal to the sample and coaxial with the optic viewing lens receiving light reflected from the sample when the optic viewing lens is positioned normal to the sample.Type: GrantFiled: July 16, 2009Date of Patent: July 5, 2011Assignee: EDAX, Inc.Inventors: Joseph A. Nicolosi, Robert Westerdale, Bruce Elliott Scruggs, Sun Park
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Publication number: 20110120950Abstract: In at least one embodiment, the inventive technology relates to in-vessel generation of a material from a solution of interest as part of a processing and/or analysis operation. Preferred embodiments of the in-vessel material generation (e.g., in-vessel solid material generation) include precipitation; in certain embodiments, analysis and/or processing of the solution of interest may include dissolution of the material, perhaps as part of a successive dissolution protocol using solvents of increasing ability to dissolve.Type: ApplicationFiled: December 16, 2010Publication date: May 26, 2011Applicant: The University of Wyoming Research Corporation d/b/a Western Research InstituteInventors: John F. Schabron, Joseph F. Rovani, JR.
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Publication number: 20110096898Abstract: An instrument capable of both X-ray diffraction, XRD, and X-ray fluorescence measurements, XRF, arranges an X-ray source 10 creating an incident X-ray beam directed to a sample on a sample stage.Type: ApplicationFiled: October 22, 2009Publication date: April 28, 2011Inventors: Alexander Kharchenko, Roger Meier, Walter van den Hoogenhof
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Patent number: 7929667Abstract: An x-ray metrology tool having only one x-ray source. The x-ray source includes a liquid metal source for heating and melting at least one metal and producing a liquid metal jet, a liquid metal collector for acquiring the liquid metal jet, a liquid metal circulation system for returning liquid metal from the liquid metal collector to the liquid metal source, and an electron beam source for directing an electron beam at the liquid metal jet anode, thereby producing an incident x-ray beam that is directable towards a sample. A detector receives emissions from the sample in response to the incident x-ray beam, and produces signals indicative of properties of the sample. A controller controls the x-ray source, acquires the signals from the detector, and determines the properties of the sample based at least in part on the signals.Type: GrantFiled: September 29, 2009Date of Patent: April 19, 2011Assignee: KLA-Tencor CorporationInventors: Guorong V. Zhuang, John Fielden
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Patent number: 7924977Abstract: Methods, a processor, and a system for improving an accuracy of identification of a substance are described. One of the methods includes determining whether a relative molecular interference function of the substance includes at least one peak.Type: GrantFiled: March 7, 2008Date of Patent: April 12, 2011Assignee: Morpho Detection, Inc.Inventor: Geoffrey Harding
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Patent number: 7920676Abstract: CD-GISAXS achieves reduced measurement times by increasing throughput using longer wavelength radiation (˜12×, for example) such as x-rays in reflective geometry to increase both the collimation acceptance angle of the incident beams and the scattering signal strength, resulting in a substantial combined throughput gain. This wavelength selection and geometry can result in a dramatic reduction in measurement time. Furthermore, the capabilities of the CD-GISAXS can be extended to meet many of the metrology needs of future generations of semiconductor manufacturing and nanostructure characterization, for example.Type: GrantFiled: July 6, 2007Date of Patent: April 5, 2011Assignee: Xradia, Inc.Inventors: Wenbing Yun, Yuxin Wang, Srivatsan Seshadri, Kenneth W. Nill
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Patent number: 7912679Abstract: An optical metrology model is created for a structure formed on a semiconductor wafer. The optical metrology model comprises one or more profile parameters, one or more process parameters, and dispersion. A dispersion function is obtained that relates the dispersion to at least one of the one or more process parameters. A simulated diffraction signal is generated using the optical metrology model and a value for the at least one of the process parameters and a value for the dispersion. The value for the dispersion is calculated using the value for the at least one of the process parameter and the dispersion function. A measured diffraction signal of the structure is obtained. The measured diffraction signal is compared to the simulated diffraction signal. One or more profile parameters of the structure and one or more process parameters are determined based on the comparison of the measured diffraction signal to the simulated diffraction signal.Type: GrantFiled: September 20, 2007Date of Patent: March 22, 2011Assignee: Tokyo Electron LimitedInventors: Shifang Li, Hanyou Chu
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Publication number: 20110064197Abstract: A multiple-plane X-ray diffraction imaging (XDI) device for generating an X-ray diffraction (XRD) profile of an object is described. The XDI device includes an X-ray source configured to generate X-rays and a first primary collimator configured to generate a first primary X-ray fan-beam. The XDI device also includes a second primary collimator configured to generate a second primary X-ray fan-beam. The XDI device also includes a first scatter detector array configured to detect a first set of scattered radiation generated upon intersection of the first primary X-ray fan-beam with the object, and a second scatter detector array configured to detect a second set of scattered radiation generated upon intersection of the second primary X-ray fan-beam with the object.Type: ApplicationFiled: September 16, 2009Publication date: March 17, 2011Inventors: Geoffrey Harding, Stephan Olesinski, Dirk Kosciesza, Helmut Rudolf Otto Strecker
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Publication number: 20110064198Abstract: The object of the present invention is to analyze a functional organic compound with high accuracy. In the present invention, cluster ions are accelerated so that the kinetic energy of cluster ions is less than 3.1 eV per one atom that makes up the cluster ion and the cluster ions enter a sample. Since the functional organic compound in the sample is etched without the breakdown of the chemical structure, the functional organic compound, which has not been chemically denatured, is exposed on the surface of the sample. By alternately performing the etching and the surface analysis of the sample, or performing the surface analysis of the sample while performing the etching, the sample can be accurately analyzed in the depth direction.Type: ApplicationFiled: October 19, 2010Publication date: March 17, 2011Applicants: ULVAC, INC., ULVAC-PHI, INC.Inventors: Toshijyu KUNIBE, Noriaki Sanada, Daisuke Sakai
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Patent number: 7889840Abstract: A method and system for determining damage prediction of a component. The component may be critical component used in an aircraft or other vehicle experiencing cyclic loading. The method and system determines the ?K, Kmax and Kinternal values for the component and utilizes these values in order to predict damage and/or failure of the component.Type: GrantFiled: January 10, 2008Date of Patent: February 15, 2011Assignee: The United States of America as represented by the Secretary of the NavyInventors: Asuri K. Vasudevan, Kuntimaddi Sadananda, Grzegorz Glinka, Daniel Kujawski
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Patent number: 7869567Abstract: Phase contrast imaging is achieved using a sample mask 8 and a detector mask (6). X-rays emitted from x-ray source (2) are formed into individual beams (16) by sample mask which pass through sample (14) and arrive at individual pixels (12) of the detector (4) through detector mask (6). The individual x-ray beams are arranged to hit the pixel edge (20) of individual rows of pixels, individual columns of pixels or individual pixels. Small deviations ? in the individual beams (16) cause a significant increase or decrease in the signal hitting the exposed area (22) of the pixel resulting in a significant phase contrast signal.Type: GrantFiled: September 3, 2007Date of Patent: January 11, 2011Assignee: UCL Business PLCInventors: Alessandro Olivo, Robert D. Speller
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Patent number: 7864426Abstract: A method to stabilize planar nanostructures, for example grating and zone plate lenses that are typically used for directing or focusing x-ray radiation, includes the deposition of a top, stabilizing layer. The structures are typically made on a flat substrate, and therefore are only fixed at the bottom. At high aspect ratio, the stability can be poor since small forces such as electrostatic forces and van de Waals forces that are often present can alter the structure. The top coating of a metallic material such as titanium constrains the nanostructures at the top and at the same time eliminates electrostatic forces and reduces any thermal gradient that may be present across the device.Type: GrantFiled: February 13, 2007Date of Patent: January 4, 2011Assignee: Xradia, Inc.Inventors: Wenbing Yun, Alan Francis Lyon, Yan Feng
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Patent number: 7864922Abstract: An X-ray spectrometer which uses at least one curved analyzing crystal and which provides improved wavelength resolution of characteristic X-rays used for analysis and improved ratio of characteristic X-rays to background intensity by using only effective diffractive regions of the analyzing crystal. X-ray blocking plates upstand from an end of a crystal support member supporting the analyzing crystal in the direction of angular dispersion of the crystal toward the inside of a Rowland circle. Incident X-rays going from the point X-ray source toward the crystal and X-rays diffracted by the crystal toward an X-ray detector are partially blocked by the X-ray blocking plates. The shielded regions vary according to the incident angle ? of the incident X-rays. Optimum or nearly optimum effective regions of the surface of the crystal can be used at all times.Type: GrantFiled: September 1, 2006Date of Patent: January 4, 2011Assignee: JEOL Ltd.Inventor: Kazuyasu Kawabe
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Patent number: 7847274Abstract: A computerized system 40 for locating a device. System 40 includes a sensor module 20 and a CPU 42. A radioactive source 38, associated with the device, produces a signal in the form of radioactive disintegrations. Module 20 includes a radiation detector 22 capable of receiving a signal from source 38 attached to the device. Module 20 produces an output signal 34. CPU 42 receives output signal(s) 34 and translates output 34 into directional information relating to a position of source 38.Type: GrantFiled: August 11, 2005Date of Patent: December 7, 2010Assignee: Navotek Medical Ltd.Inventors: Giora Kornblau, Shlomi Ben-Ari
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Patent number: 7844028Abstract: An X-ray diffraction method for the analysis of polycrystalline materials, the method comprising: (a) providing a polycrystalline material for analysis; (b) providing a polychromatic X-ray source, wherein the source produces X-rays by accelerating charged particles to energies of no more than 1 MeV; (c) collimating X-rays from the polychromatic X-ray source into a beam having a divergence in the range of from 10?4 to 10?2 radians; (d) exposing at least a portion of the polycrystalline material to the collimated X-ray beam, whereby the beam is diffracted; (e) collecting at least some of the diffracted X-rays in an energy dispersive X-ray detector or array; and (f) analysing the collected, diffracted X-rays.Type: GrantFiled: January 24, 2003Date of Patent: November 30, 2010Assignee: Isis Innovation LimitedInventor: Alexander M. Korsunsky
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Patent number: 7841212Abstract: A method for producing a shaped body (10) made of glass or glass ceramics comprises the steps of: (a) placing at least two glass blanks (12a, 12b) side by side on a shaped surface (14) of a temperature-resistant sagging mold (13); (b) sagging the glass blanks (12a, 12b) onto the shaped surface (14) by heating the sagging mold (13) and the glass blanks (12a, 12b); (c) attaching the sagged glass blanks (10a, 10b) to each other in order to form the shaped body (10); and (d) lifting the shaped body (10) from the sagging mold (13). A shaped body (10) comprises at least two glass blanks (10a, 10b) attached side by side and formed by sagging.Type: GrantFiled: May 2, 2007Date of Patent: November 30, 2010Assignee: Carl Zeiss Sports Optics GmbHInventors: Hexin Wang, Kurt Becker, Lutz Autschbach
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Publication number: 20100298540Abstract: The crystal structure of the product, crystals of the MarR protein, a regulator of multiple antibiotic resistance in Escherichia coli, and methods of crystallization of the MarR protein are described.Type: ApplicationFiled: June 19, 2009Publication date: November 25, 2010Applicants: Trustees of Tufts College, Boston UniversityInventors: Michael N. Alekshun, Stuart B. Levy, James F. Head, Barbara A. Seaton
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Patent number: 7831019Abstract: A system and methods for characterizing an unknown substance is described. One of the methods include determining an effective atomic number of the unknown substance as a first function of a first gradient of a first line.Type: GrantFiled: December 28, 2007Date of Patent: November 9, 2010Assignee: Morpho Detection, Inc.Inventor: Geoffrey Harding
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Publication number: 20100277312Abstract: A contraband detection system includes a first contraband detection apparatus designed to perform a first scan on an object and a second contraband detection apparatus positioned in-line with the first contraband detection apparatus to perform a second scan on the object. A computer is included in the contraband detection system and is programmed to cause the first contraband detection apparatus to perform the first scan and acquire object data therefrom. The computer is further programmed to identify one or more regions of interest (ROI) in the object based on the object data, cause the second contraband detection apparatus to perform the second scan on the one or more identified ROIs, and acquire object data from the second scan.Type: ApplicationFiled: February 15, 2008Publication date: November 4, 2010Inventors: Peter Michael Edic, Mark E. Vermilyea, John Eric Tkaczyk, Pierfrancesco Landolfi, Geoffrey Harding, Sondre Skatter, Matthew Allen Merzbacher, Helmut Rudolf Strecker, Cameron John Ritchie
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Patent number: 7820975Abstract: A method for calibrating an imaging system includes coincident detecting scatter radiation events from a calibration source located within a bore of the imaging system. The scatter radiation events are subsequently used to compute calibration time offsets for each detector channel in the imaging system. Each detector channel is then calibrated with respective calibration time adjustments.Type: GrantFiled: June 30, 2008Date of Patent: October 26, 2010Assignee: Koninklijke Philips Electronics N.V.Inventors: Thomas Laurence, Jerome J. Griesmer
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Patent number: 7817779Abstract: Non-destructive analysis is carried out by irradiating an object with X-rays, for example, so that the X-rays from the object are incident on an analyzer crystal. The analyzer crystal can be of a transmission-type or a reflection-type. A pre-crystal device is used to make the radiation monochromated and parallelized. Atomic lattice planes of the pre-crystal device are approximately parallel with the atomic lattice planes of the analyzer crystal so as to use the angular analysis capability of the analyzer crystal. The thickness of the analyzer crystal is fixed.Type: GrantFiled: March 12, 2008Date of Patent: October 19, 2010Inventor: Masami Ando
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Publication number: 20100261060Abstract: Provided is an olivine-type lithium iron phosphate having a composition represented by Formula I, comprising 0.1 to 5% by weight of Li3PO4, and comprising no Li2CO3 or, if present, comprising Li2CO3 in an amount less than 0.25% by weight: Lii+aFe1?xMx(PO4?b)Xb (I) wherein M, X, a, x and b are as defined above. The lithium iron phosphate comprises no lithium carbonate (Li2CO3) or, if present, comprises the Li2CO3 in an extremely small amount, and comprises Li3PO4 having superior electrochemical stability, thermal stability and ionic conductivity, thus advantageously imparting high-temperature and storage stability as well as stability and rate properties to lithium secondary batteries, when used as a cathode active material for the lithium secondary batteries.Type: ApplicationFiled: February 19, 2010Publication date: October 14, 2010Applicant: LG CHEM, LTD.Inventors: Sanghoon CHOY, Yong Tae Lee, Hong-Kyu Park, Soo Min Park, Hyo-shik Kil, Cheol-Hee Park