Abstract: A method of aligning handles in rows for a rotating blow-molding machine for handled-bottles includes steps of: providing at least one handle conveying device to provide a plurality of unaligned handles, and providing a plurality of pairs of row aligning modules and bottle blowing modules to form a plurality of common modules. The row aligning modules receive the handles from the handle conveying device and arrange the handles in rows and send the aligned handles to the corresponding bottle blowing modules. Thus the row aligning modules are rotated synchronously with the corresponding bottle blowing modules without the problem of handle transport synchronization during high speed, and sufficient time is provided to align all the handles in rows.

Abstract: An apparatus for sensing specimen slides (38) has a specimen slide holder (42) holding specimen slides (38), each specimen slide (38) comprising an identification code. The specimen slides (38) are arranged inside the specimen slide holder (42) on a lifting element (50) in a lifted position. The apparatus includes a reading apparatus (40) for reading out the identification code, and a positioning apparatus that moves the specimen slide holder (42) with the specimen slides (38) relative to the lifting element (50) so that the specimen slides (38) drop successively from the lifted position on the lifting element (50). As one of the specimen slides (38) drops, the identification code of the specimen slide (38) or of the subsequent specimen slide (38) becomes readable for the reading apparatus (40). A triggering apparatus (67, 68) triggers the reading apparatus (40) to read the identification code.

Abstract: A substrate transfer apparatus includes upper and lower substrate support systems configured to support a substrate at upper and lower support levels, respectively, within a process chamber. A substrate elevator system is configured to move the substrate between the upper and lower support levels. A transfer robot for transferring substrates into and out of the process chamber, a loadlock chamber and methods of transferring substrates are also disclosed.

Abstract: A sputtering device includes a main body and a loading device received in the main body. The main body includes a top portion, a bottom portion, and a sidewall connected between the top portion and the bottom portion, an upper bearing mounted on the top portion, and a lower bearing mounted on the bottom portion. The loading device includes an outer frame, an inner frame received in the outer frame, and a gear device arranged between the outer frame and the in inner frame. The outer frame is rotatably connected to the upper bearing and includes a plurality of first rods arranged in a first circle. The inner frame is rotatably connected to the lower bearing and includes a plurality of second rods arranged in a second circle. The gear device is configured for bringing the outer frame and the inner frame to rotate in opposite directions.

Abstract: A substrate transfer apparatus includes forks that are vertically spaced apart from each other with a predetermined distance. When the forks take out the substrates from the first substrate containing part, each of the forks lifts the substrate and supports the same by moving upward from a pre-loading position located below the substrate to be taken out by a predetermined unloading stroke amount. A value of the predetermined distance is set to be equal to the sum of the distance between the substrates contained in the first substrate containing part and the unloading stroke amount.

Abstract: An example adjustable part loader system includes a first loader adjacent a base and adjustable along the base having a first motor and a second loader adjacent the base and adjustable along the base having a second motor. The second loader is aligned with the first loader along the base in a position relative to a dimension of a first part to be loaded. The first loader and the second loader each carry a distinct portion of the same part. The first loader is adjustable relative to the second loader. A controller system in communication with the first loader and the second loader and controls both simultaneously.

Abstract: A workpiece positioning device according to an embodiment includes a first moving unit that is movable in a horizontal direction, a second moving unit that is movable in a vertical direction, and a rotating unit that is placed on either an upper end or a lower end of the second moving unit. The second moving unit and the rotating unit are kept within the width of the first moving unit that is perpendicular to the moving direction of the first moving unit on a horizontal plane.

Abstract: The present invention provides an in-line type multi-chamber substrate processing apparatus which, with a simple configuration, can decrease influence of particles due to film peeling and enables installation of a number of processing chambers. In one embodiment of the present invention, a jointless arm of a transfer robot that has a substrate holding part 4a and performs rotational movement while maintaining a predetermined length of the arm is disposed inside a first process chamber capable of being evacuated. The first process chamber is configured to be able to transfer substrates from an adjacent second process chamber through an opening by the arm of the transfer robot. A holder as an arm retreating position and a substrate mounting position is positioned so as to overlap with a trajectory of the substrate holding part when the arm of the transfer robot rotates about a rotation axis.

Abstract: A method and storage system (1) for storing and order-picking articles (2). The storage system (1) includes a pallet rack store (3) for storing articles supplied on introductory load carriers, an arrangement (8) for depalletizing, separating and rearranging articles between introductory load carriers and transporting load carriers (7), a rack store (4) for storing separated articles as an interim buffer store upstream of the order-picking operation, at least one order-picking station (6), in which articles are loaded onto a destination load carrier (30), and a conveying mechanism for transporting separated articles to the rack store and from the rack store to the order-picking station. Transporting load carriers (7) are used for transporting separated articles on the conveying mechanism. Separated articles (2) are stored in the rack store (4) without transporting load carriers.

Abstract: A storage device transporter (400, 400b, 400c), for transporting a storage device (600) and for mounting a storage device within a test slot (500, 500b), includes a frame (410, 410b, 410c) configured to receive and support a storage device. The frame includes sidewalls (418, 425a, 425b, 429a, 429b) configured to receive a storage device there between and sized to be inserted into a test slot along with a storage device. The frame also includes a clamping mechanism (450) operatively associated with at least one of the sidewalls. The clamping mechanism includes a first engagement element (476, 700, 750) and a first actuator (454, 710, 760) operable to initiate movements of the first engagement element. The first actuator is operable to move the first engagement element into engagement with a test slot after a storage device being supported by the frame is arranged in a test position in a test slot.

Abstract: A substrate treatment system includes a plurality of treatment apparatuses, a position adjustment apparatus adjusting a center position of the substrate, a substrate transfer apparatus transferring the substrate to the treatment apparatuses and the position adjustment apparatus, and a control unit controlling operations of the apparatuses. The substrate transfer apparatus includes an arm part curved along a peripheral edge portion of the substrate with a radius of curvature larger than a radius of the substrate, and a holding part projecting inward from the arm part and holding a rear surface of the substrate. The position adjustment apparatus includes a mounting table which holds a central portion of the rear surface of the substrate and is rotatable and horizontally movable. The control unit controls the mounting table such that the center position of the substrate held on the mounting table is aligned with a center position of the arm part.

Abstract: Embodiments of the invention generally provide apparatus and methods of handling a damaged substrate in substrate processing systems, such as screen printing systems for solar cell devices. The damaged substrate handling apparatus includes a container mounted centrally on a rotary actuator assembly. A plurality of substrate supports are arranged around the periphery of the rotary actuator assembly. Damaged substrates are transferred to the container from the substrate supports. Both automated and manual apparatus and methods are disclosed.

Abstract: In a transport system, a positioning hole is provided in an undersurface of a container. A positioning protrusion corresponding to the positioning hole of the container provided on a first load port of a manufacturing device. When a transport vehicle places the container onto the first load port, the placement position of the container is established by having the positioning protrusion of the first load port fit into the positioning hole. A second load port different from the first load port of the manufacturing device is provided on a storage device. A positioning protrusion is not provided on the second load port. A slip prevention member is provided on an upper surface of the second loading load port.

Abstract: An apparatus and method for handling disks as part of a magnetic disk manufacturing process is provided. In one embodiment, during a drying process the disks are engaged at the inner diameter rather than the outer diameter to eliminate the formation of residue on the surface of the disks at or proximate data zones. The disks may be engaged individually or in pairs.

Abstract: A system and method are provided for optimizing the flow of seed along a seed handling path. The system and method include multiple stages at which seeds undergo different processes to prepare the seeds for sale or further handling. The stages may include one or more of Receiving, Husking, Sorting, Drying, Shelling, Bulk Storage, Sizing, Conditioning, Treating, and Packaging. Sensors may be located along the seed handling path for monitoring the seed handling path and the operations and conveyances occurring along the seed handling path at and between different stages. The sensors may provide feedback signals to a controller, which may in turn adjust the operating parameters of various processing devices associated with one or more of the stages in a real-time scenario to optimize the operations and conveyances occurring along the seed handling path.

Abstract: A tire work station and system for selectively holding a tire having work performed thereon in a side orientation or a front orientation. The tire work station comprises a work platform mounted to a vertically adjustable pedestal having a first support system and a second support system. The first support system comprising a pair of tread rollers inclined at a first inclined angle A1 and further forming a second angle A2 with a pair of sidewall rollers. The sidewall rollers spaced apart to define a passageway for the tire in its front orientation. The second support system mounted between the pair of tread rollers, comprising a tread support surface at a first distance from a top surface of the work platform lower than a support surface of the pair of tread rollers at a second distance from the top surface of the work platform.

Abstract: A substrate transport apparatus comprises a substrate holder capable of holding a substrate, a link unit which extends/retracts the substrate holder, a driving unit which generates a driving force to operate the link unit, a guide bar provided to one of the substrate holder and the link unit; and a support unit which is provided to the other of the substrate holder and the link unit, and slidably supports the guide bar when the substrate holder moves by the operation of the link unit.

Abstract: Disclosed herein are a system for management of a transportation device, including: a plurality of work tables disposed to be spaced from each other; charging terminals provided around the work tables; and transportation devices transporting objects between the work tables and including a supercapacitor as a power supply, and a method therefor.

Abstract: There is described a wafer processing system for thinned wafers that are easily broken during handling. The system protects against breakage during handling and provides for temperature controls during processing.

Abstract: A vacuum processing apparatus including a processing chamber for processing a sample to be processed, a cooling chamber for cooling the high-temperature sample processed in the processing chamber, and a vacuum transfer chamber for establishing a connection between the processing chamber and the cooling chamber, a vacuum transfer robot equipped inside the vacuum transfer chamber, wherein the cooling chamber includes a gas-exhausting unit for reducing pressure inside the cooling chamber, a gas-supplying unit for supplying a gas into the cooling chamber, a pressure-controlling unit for controlling the pressure inside the cooling chamber, a supporting unit for supporting the high-temperature sample, and a mounting stage for proximity-holding the sample supported by the supporting unit, the mounting stage having a temperature-adjusting unit for adjusting the temperature of surface of the mounting stage into a temperature which is capable of cooling the high-temperature sample, the supporting unit having an ascendi

Abstract: A substrate processing apparatus includes a cassette placing table; a first transfer mechanism having a first substrate holding hand capable of advancing/retreating and using this first substrate holding hand to transfer a substrate with respect to the cassette; a substrate processing unit for executing a predetermined process on a substrate; a second transfer mechanism having a second substrate holding hand capable of advancing/retreating and pivotable at a vertical axis, and using the second substrate holding hand to transfer a substrate with respect to the first transfer mechanism and the substrate processing unit; a moving mechanism for moving the first transfer mechanism in an arrangement direction of the cassettes; and a control unit for controlling transfer of a substrate between the first transfer mechanism and the second transfer mechanism in a position where the first transfer mechanism is opposed to a cassette.

Abstract: High productivity thin film deposition methods and tools are provided wherein a thin film semiconductor material layer with a thickness in the range of less than 1 micron to 100 microns is deposited on a plurality of wafers in a reactor. The wafers are loaded on a batch susceptor and the batch susceptor is positioned in the reactor such that a tapered gas flow space is created between the susceptor and an interior wall of the reactor. Reactant gas is then directed into the tapered gas space and over each wafer thereby improving deposition uniformity across each wafer and from wafer to wafer.

Abstract: A pallet changer includes: a machining-side linear guide rail 25 provided on a machining table 8 and extending in a Y-axis direction perpendicular to an X-axis direction (predetermined direction); preparation-side linear guide rails 26, 27 provided on workpiece preparation parts 9, 10 respectively, extending in the Y-axis direction, and coaxial with the machining-side linear guide rail 25; and linear guides 28 provided on respective pallets P1, P2 and slidably engageable with the machining-side and preparation-side linear guide rails 25 to 27, wherein, in changing the machining-side pallet P1 on the machining table 8 and the standby-side pallet P2 on the workpiece preparation part 10, the machining-side pallet P1 and the standby-side pallet P2 are moved in the Y-axis direction.

Abstract: A purging station with a substrate container receiving zone having at least one upwardly extending purging nozzle. The nozzle has a circular engaging lip. The substrate container has support means for at least one substrate and a purge port assembly that includes an externally facing sealing flange facing downward from the container. The sealing flange has a central aperture and a cantilevered flange portion that engages with the circular engaging lip of the nozzle. The weight of the substrate container on the nozzle carried by the canilevered portion of the flange causes bending of the flange for a resilient soft seal.

Abstract: An auxiliary feed-in mechanism comprises a base having two rails on two sides of the base respectively and a crossrod across two rails on another side of the base; a driving mechanism having a dynamic retractable rod and a chassis, one end of the dynamic retractable rod hinging with one side of the crossrod, another end of the dynamic retractable rod connecting to one side of the chassis, the chassis setting on two rails; a power mechanism setting under the chassis, a driving shaft of the power mechanism penetrating the chassis to expose above the chassis; a delivering mechanism having a frame and a plurality of rollers, the rollers setting side by side in the frame, the delivering mechanism setting above the chassis, a bottom of the frame connecting to the driving shaft, the auxiliary feed-in mechanism can increase the working efficiency of the examining mechanism.

Abstract: The injector assembly receives fasteners such as bolts used in the manufacture of composite aircraft wing structures, at a high speed from a supply thereof, such as a cartridge. The injector assembly includes a post assembly which includes a hollow post housing having a post mass and a mass stop pin positioned within the housing. The bolt moves through a feed tube assembly, a muzzle member and into a chamber portion of the injector assembly. A urethane contact member is positioned at a forward end of the mass. A source of compressed air moves the mass and the contact member into a position slightly past the rear end of the housing and into a chamber portion of the injector assembly. When the bolt contacts the contact member at high speed, the mass is moved back toward a base portion of the post assembly. The mass is sufficient to dissipate the kinetic energy of the moving bolt without damage thereto.

Abstract: A system and device for use in a security area, and more particularly, a rack system and holding device for placing various objects that are processed through a security area are taught.

Abstract: An apparatus and method for sorting stackable articles according to a sort feature use a holding device with receiving units. The apparatus has a sorting system with a measuring instrument and a discharge device, a movable holding device and a plurality of receiving units. The holding device has a rack, preferably a running gear and a plurality of bays for respectively a receiving unit. The discharge device includes at least two discharge sites. Each receiving unit is capable of receiving a stack of articles. A bay is respectively assigned to each discharge site. The measuring instrument is capable of measuring for each article the value which the predefined sort feature assumes for the article. The discharge device selects a discharge site for each article and discharges the article into a receiving unit. The receiving unit is received by that bay of the holding device which is assigned to the selected receiving site.

Abstract: A substrate processing apparatus includes a substrate container holding shelf comprising a plurality of shelf boards configured to hold substrate containers thereon; a substrate container carrying mechanism configured to load and unload the substrate containers into/from the substrate container holding shelf; a substrate container holding shelf elevation mechanism configured to lift each of the plurality of the shelf boards of the substrate container holding shelf in a vertical direction; and a processing unit configured to receive at least one of the substrate containers from the substrate container holding shelf.

Abstract: A substrate processing apparatus is configured to provide in series a plurality of processing blocks, each block including a processing unit and a transport robot transporting a substrate. A substrate rest is provided in a connecting portion of adjacent processing blocks. A sensor plate with sensor coils is provided spanning over support pins of the substrate rest. Once a temperature-measurement substrate with temperature-measuring elements, each element formed by connecting a coil to a quartz resonator, is placed on the support pins, a transmitter-receiver transmits transmission waves corresponding to the characteristic frequencies of the quartz resonators to the temperature-measuring elements through the sensor coils. After the stop of the transmission, the transmitter-receiver receives electromagnetic waves from the temperature-measuring elements through the sensor coils, and the temperature computer computes the substrate temperature based on the frequencies of the electromagnetic waves.

Abstract: Provided is a component placement machine including a rail (102) which extends along an X axis and slidably guides a head (101) along the X axis; an X beam (103) which has a bar shape, extends along the X axis, and has one side which is in a direction of a Y axis and on which the rail (102) is installed; and a Y beam (104) which extends along the Y axis and slidably guides the X beam (103) along the Y axis, and further including a reinforcement member (105) which acts against bending caused by difference in thermal expansion between the rail (102) and the X beam (103), is made of carbon fiber reinforced plastic, and is fastened, with first fasteners at three or more positions arranged along the X axis, to another side of the X beam (103) in the direction of the Y axis.

Abstract: A method for manufacturing an electronic device using a closed-type transport container, includes: controlling relative humidity inside the closed-type transport container to be lower than ambient relative humidity outside the closed-type transport container on a particular interprocess transport path in which an intermediate product stored in the closed-type transport container is transported from a first manufacturing process to a second manufacturing process. The first manufacturing process allows basic compounds containing nitrogen atoms to be released from the intermediate product. The second manufacturing process is susceptible to degradation due to contamination by the basic compounds.

Abstract: The present inventive concept provides a substrate treating system. The substrate treating system has a plurality of process facilities and at least one buffer station. Each of the process facilities respectively includes a transfer module in which a transfer robot is provided and a treating module connected to the transfer module. A buffer station is located between each of adjacent transfer modules. The buffer stations are provided to transfer substrates between the transfer modules. The plurality of process facilities includes a first facility in which the treating module is located on a first side of an imaginary connection line provided along a direction in which the transfer modules and the buffer stations are arranged and a second facility in which the treating module is located on a second side of the imaginary connection line. The transfer module of the first facility further protrudes toward the first side of the imaginary connection line farther than the transfer module of the second facility.

Abstract: A protection system (7) for container treatment machine comprises a support frame (8) with a base frame (9) extending in a longitudinal direction parallel to a treatment path of containers and at least one individual support member (10) connected to the base frame (9), at least one individual protection panel (11), at least one individual guide means (12) configured to define a movement path of the individual protection panel (11) between a closure position and an opening position, at least one auxiliary positioning means (13) configured to apply an auxiliary force to the individual protection panel (11), said auxiliary force acting in the direction of said movement path against the force of gravity of the individual protection panel (11), wherein the guide means (12) movably connect the individual protection panel (11) to the individual support member (10) and the auxiliary positioning means (13) is interposed between the protection panel (11) and the support member (10) such as to form at least one individu

Abstract: A device for processing a process good with a process medium has a provider for providing the process medium, and a transporter. The transporter has a transport element configured to move the process good along a process path between being accepted by a delivery device and being delivered to an accepting device and move with the process good from being accepted to being delivered. The process good enters the process medium laterally and is moved through same or is passed by same while floating on the process medium.

Abstract: In a substrate-processing apparatus for performing coating, baking and developing processes on a semiconductor substrate, a first processing block performs a coating process and a developing process. A second processing block is disposed opposite to the first processing block to heat-treat substrates. A main transfer block is disposed between the first and second processing blocks to transfer the substrates. A third processing block is disposed on one side of the main transfer block in a direction perpendicular to an arrangement direction of the first and second processing blocks to adjust a temperature of the substrates. An auxiliary transfer block is disposed adjacent to the second and third processing blocks to transfer the substrates between the second and third processing blocks. Thus, an overload of the main transfer block may be reduced.

Abstract: In a substrate-processing apparatus for performing coating, baking and developing processes on a semiconductor substrate, a first processing block performs a coating process and a developing process on substrates. A second processing block is disposed opposite to the first processing block to heat-treat the substrates. The first processing block includes upper, middle and lower unit blocks. The upper and lower blocks include at least one coating unit for forming a layer on the substrates and at least one developing unit for developing a photoresist layer on the substrates, respectively. The middle unit block is detachably disposed between the upper and lower unit blocks and includes at least one of coating units and developing units. The configuration of the middle unit block may vary according to a process recipe to improve the throughput of the substrate-processing apparatus.

Abstract: The present invention generally relates to a vertical CVD system having a processing chamber that is capable of processing multiple substrates. The multiple substrates are disposed on opposite sides of the processing source within the processing chamber, yet the processing environments are not isolated from each other. The processing source is a horizontally centered vertical plasma generator that permits multiple substrates to be processed simultaneously on either side of the plasma generator, yet independent of each other. The system is arranged as a twin system whereby two identical processing lines, each with their own processing chamber, are arranged adjacent to each other. Multiple robots are used to load and unload the substrates from the processing system. Each robot can access both processing lines within the system.

Abstract: The invention describes a device for transporting a substrate (5) into a working area (2, 3, 22) which can be temporarily separated in a vacuum-tight manner, and a corresponding method. A transport means (4) transports a substrate (5) in the plane (XY) to a defined working area (2, 3, 22) of a chamber (1). The transport means (4) has a deflectable sealing frame (6) which can be moved in a Z-direction perpendicular with respect to the XY-plane. The sealing frame (6) has two opposing sealing surfaces (10, 11) in the Z-direction. By pressing a closure means (16, 21, 24) against a first sealing surface (10, 11) and thus pressing the second sealing surface (11, 10) against a chamber wall (32, 31), the space of the working area (2, 3, 22) of the chamber (1) can be sealed.

Abstract: A monitoring system has a vehicle and a monitoring device. The vehicle is movable along a predetermined route, and the monitoring device is detachably mounted to the vehicle. The vehicle has a photonic device configured to read position information according to detection of a positioning tag positioned at a predetermined position along the predetermined route. The monitoring device has a sensor configured to monitor an environmental parameter and a controller communicatively coupled to the sensor and the photonic device. The controller is configured to record the monitored environmental parameter along the predetermined route and the position information.

Abstract: A glass substrate transportation carrier is provided, which includes a base; a glass holding stage for adsorbing a glass substrate; an elevating mechanism disposed between the base and the glass holding stage; an overturning mechanism disposed between the elevating mechanism and the glass holding stage; a rotating mechanism disposed between the overturning mechanism and the elevating mechanism; and a telescopic mechanism disposed between the overturning mechanism and the glass holding stage.

Abstract: A substrate holder stocker device capable of reducing foot print is provided. The device includes: a movable table A which holds a plurality of substrate holders side by side in a plate thickness direction thereof and moves back and forth; a movable table B which is provided parallel to the movable table A and holds a plurality of the substrate holders side by side in a plate thickness direction thereof, and which moves back and forth; and an inter-table transfer mechanism for allowing the substrate holder which is held by one of the movable tables A and B stopped at predetermined positions to be held by the other of the movable tables A and B.

Abstract: A slide glass storage device including: a supply tray which has a supply holding space determined by a longer edge upper limit allowed for a longer edge of a slide glass and a shorter edge upper limit allowed for a shorter edge of the slide glass and on which a slide glass to be supplied to a treatment unit operable to perform a predetermined treatment is mounted; a discharge tray which has a discharge holding space determined by a longer edge longer than the longer edge upper limit and a shorter edge longer than the shorter edge upper limit and on which a slide glass having been subjected to the treatment in the treatment unit and being to be discharged is mounted; and a support unit supporting the supply tray and the discharge tray.

Abstract: Disclosed is an organic/inorganic composite porous film comprising: (a) a porous substrate having pores; and (b) an active layer formed by coating a surface of the substrate or a part of the pores in the substrate with a mixture of inorganic particles and a binder polymer, wherein the inorganic particles in the active layer are interconnected among themselves and are fixed by the binder polymer, and interstitial volumes among the inorganic particles form a pore structure. A method for manufacturing the same film and an electrochemical device including the same film are also disclosed. An electrochemical device comprising the organic/inorganic composite porous film shows improved safety and quality, simultaneously.

Abstract: A system and method for sequencing component part delivery for use in assembling vehicle bodies arranged in a substantially random assembly sequence. The system and method includes a plurality of kit carts that are loaded or stocked with vehicle specific parts in a sequence or staging area of an assembly facility. The vehicle specific stocked carts are arranged and positioned to a coordinated vehicle to assemble the vehicle using the kit carts that move along in sequence with the vehicle as the vehicle is assembled along an assembly line. As the carts are depleted of parts, the carts are returned for restocking and assigned to a subsequent vehicle.

Abstract: A substrate transfer device has an arm, and a support shaft fixed to one end of the arm so as to pivotably support the arm in a horizontal plane. The support shaft is placed between a first working device and a second working device. A holding unit that is supported by the other end of the arm and sucks and holds an upper surface of a substrate, a rotational driving device makes the holding unit pivot on the support shaft as a center of rotation, and a posture holding mechanism keeps the pivoting holding unit in a fixed posture in horizontal directions. The substrate is transferred while the fixed posture in the horizontal directions is maintained by pivotal movement of the holding unit, between the first working device and the second working device.

Abstract: A mill relining apparatus (1) for handling articles such as liners and lifters within a mill (3). The relining apparatus (1) includes a mast (5), with top (23) and bottom (19) engagement members, which supports one or more article handling arrangements (31) The mast is extendible in length so that it can be locked into a substantially upright position within a mill (3) with the bottom engagement member (19) resting on mill charge (7) within the mill (3) and the top engagement member (23) engaging with an upper surface (99) of the mill (3).

Abstract: A substrate processing apparatus includes a substrate transit table configured to mount thereon a plurality of substrates; a substrate processing chamber configured to process the substrate one by one; a substrate transfer device capable of loading the substrate into the substrate processing chamber from the substrate transit table and unloading the substrate from the substrate processing chamber to the substrate transit table; and N number of (N is an integer equal to or larger than 3) substrate holding devices provided at the substrate transfer device and configured to hold the substrates one by one. Here, a multiplicity of (2 to N?1 number of) substrates are concurrently held by 2 to N?1 number of substrate holding devices among the N number of substrate holding devices and one substrate is loaded into the substrate processing chamber.

Abstract: A processing apparatus for semiconductor work pieces and related methodology is disclosed and which includes a processing chamber having an internal cavity, and which has a plurality of rotatable processing stations positioned therein and wherein the rotatable processing stations each process a semiconductor work piece.

Abstract: Container filling plant, such as a beverage bottling plant, for filling containers with a liquid beverage and for closing filled containers. The abstract of the disclosure is submitted herewith as required by 37 C.F.R. §1.72(b). As stated in 37 C.F.R. §1.72(b): “A brief abstract of the technical disclosure in the specification must commence on a separate sheet, preferably following the claims, under the heading “Abstract of the Disclosure.” The purpose of the abstract is to enable the Patent and Trademark Office and the public generally to determine quickly from a cursory inspection the nature and gist of the technical disclosure. The abstract shall not be used for interpreting the scope of the claims.” Therefore, any statements made relating to the abstract are not intended to limit the claims in any manner and should not be interpreted as limiting the claims in any manner.