Abstract: A substrate processing apparatus includes a reactor; at least two boat conveying devices configured to convey at least two boats; at least one boat support table configured to support the at least two boats, the boat support table being movable to a position below the reactor; and a control unit configured to control the boat conveying devices such that when a first boat of the at least two boats supported by a first boat conveying device of the plurality of boat conveying devices holds a processed substrate processed by the reactor and is moved back to a position spaced apart from the reactor, a second boat of the at least two boats holding an unprocessed substrate is loaded into the reactor using a second boat conveying device of the at least two boat conveying devices.

Abstract: According to an example embodiment a substrate processing apparatus includes a supporting unit, a lifting unit on at least a side of the supporting unit, a tray supported by the lifting unit, and a transfer unit configured to transfer a substrate to the tray such that the substrate is positioned on the tray. The lifting unit moves the tray up and down to load or unload the substrate located on the tray on or from the supporting unit.

Abstract: A substrate processing apparatus including a transport chamber having an end and defining more than one substantially linear substrate transport zone where each transport zone extends longitudinally along the transport chamber between opposing walls of the transport chamber and at least one of the more than one substantially linear substrate transport zones is configured as a supply zone for enabling transport of substrates from the end and at least one of the more than one substantially linear substrate transport zones is configured as a return zone for enabling transport of substrates to the end, and at least one substrate transport located in and movably mounted to the transport chamber for transporting substrates along the more than one substantially linear substrate transport zone, where each substrate transport zone is configured to allow the at least one substrate transport to move from one transport zone to another transport zone.

Abstract: An apparatus configured to handle an object in a contactless manner, the apparatus includes a carrying body having a carrying surface which is configured to be directed towards the object, the carrying surface being provided with a plurality of traction members and a plurality of overpressure members, each overpressure member being provided with at least one exhaust opening, each traction member being provided with an indentation and at least two suction openings that are arranged in the indentation, the at least two suction openings of each traction member being configured to generate a pressure gradient between them so as to create a traction fluid flow in the indentation in a direction substantially parallel to the carrying surface; and a pressure controller configured to control the pressure gradient between the at least two suction openings of each traction member

Abstract: Provided is a work conveying system for sequentially conveying a workpiece to multiple working apparatuses constituting a production line, including: a rail track disposed along the multiple working apparatuses; and conveyor robots, which are disposed adjacent to each other on the rail track and move on the rail track independently, in which delivery of the workpiece is performed between the adjacent conveyor robots on the rail track between adjacent working apparatuses. This enables formation of a work conveying system having a simple structure and a high productivity.

Abstract: The invention relates to an analysis apparatus with an analysis device for analyzing body fluids, and a magazine for test elements with a fresh supply container and a transfer unit that comprises a transfer element. At least one aperture for receiving a test element is formed in the circumferential surface of the transfer element. A waste container is provided in which used test elements are stored again after use.

Abstract: To correct any positional misalignment of a substrate manifesting along the horizontal direction by utilizing a substrate transfer device alone without engaging a transfer arm in operation. A substrate transfer device comprises a plurality of support pins disposed at positions set apart from one another around a support shaft of a stage, which support a substrate, e.g., a wafer W, on the bottom surface thereof, a base at which the support pins are mounted, a vertical drive means (Z-direction drive means) for raising/lowering the substrate by driving the support pins up/down via the base and a horizontal drive means (X-direction drive means, Y-direction drive means) for adjusting the position of the substrate along the horizontal direction (X and Y directions) by horizontally driving the support pins via the base.

Abstract: Methods correcting wafer position error are provided. The methods involve measuring wafer position error on a robot, e.g. a dual side-by-side end effector robot, during transfer to an intermediate station. This measurement data is then used by a second robot to perform wafer pick moves from the intermediate station with corrections to center the wafer. Wafer position correction may be performed at only one location during the transfer process. Also provided are systems and apparatuses for transferring wafers using an intermediate station.

Abstract: Disclosed examples relate to loading devices for loading bars for machining in machine tools. A disclosed example loading device is adapted to move a bar from a starting position to an end position and to feed the bar from the end position to the machine tool, comprising a rest portion for supplying the loading device with at least one bar lying on the rest portion in the starting position, and a movable transport for transporting the bar from the starting position to the end position. The transport is adapted to transport the bar downward in a downward movement due to its gravity along a downwardly inclined guiding portion, the bar being supported by a first support portion of the transport.

Abstract: The present invention provides a plate material stocker facility with a simplified pallet loading and unloading mechanism. The plate material stocker facility includes a plate material stocker 4 in which pallets 9 each allowing a plate material to be stacked thereon are stored, and a pallet slide device 2. The plate material stocker 4 has a plurality of pallet support portions 10 arranged in stages in a vertical direction, the pallet support portions slidably moving the respective pallets 9 in a front-back direction, and supporting the respective pallets 9 and switchably moving the pallets 9 between a first position 4a and a second position 4b, and a plurality of posts 11, 12 supporting the pallet support portions 10. A gap is present between the adjacent pallet support portions 10. The posts 12 located at a rear end are arranged inside respective lateral ends of the pallet support portions 10.

Abstract: Systems and methods that process a plurality of surgical instruments for cleaning and/or packaging. A device identifies a robot-ready insert having a predetermined configuration for accepting at least one type of surgical instrument. The surgical instruments are identified and oriented according to type using an automated apparatus. Specialized tools are also provided for automatically opening and closing surgical instruments, flipping instruments and assisting in the processing and maintenance of surgical instruments. The automated apparatus then places each of the surgical instrument types in one or more predetermined areas of the insert, configured to accept a predetermined set of surgical instrument types.

Abstract: A substrate treatment apparatus is disclosed. The substrate treatment apparatus includes: a cassette loading portion on which a cassette for containing a substrate is loaded when the cassette is carried to/from outside of the substrate treatment apparatus; a substrate treatment portion for performing a treatment on the substrate; a substrate carrying portion for carrying the substrate in the cassette loaded on the cassette loading portion to the substrate treatment portion, and carrying the substrate that has been subjected to the treatment by the substrate treatment portion to the cassette on the cassette loading portion; a vacant cassette loading portion on which the cassette caused to be vacant by carrying the substrate to the substrate treatment portion is temporarily loaded; and a vacant cassette transfer mechanism for transferring the vacant cassette between the vacant cassette loading portion and the cassette loading portion.

Abstract: The invention relates to a modular carrier for receiving, storing and transporting thin planar workpieces/semi-finished products, such as wafers for photovoltaic elements, in vertical positions that are parallel to each other and uniformly spaced. This problem is solved by a modular design of the carrier. The required components are combined into three modules. The first module is the groove plate having the horizontal support arranged beneath in an angled shape. The second module is formed by the two U-shaped end plates. The third module comprises the spacer rods, which are arranged between said two U-shaped end plates and of which two in each case receive a groove plate at the top and the bottom. The groove plates and the spacer rods are used at the length L, wherein the length L is uniformly graduated. In this way, the carrier can be produced in the length L or n×L, with n always being an integer.

Abstract: A substrate treatment apparatus includes a container holder which holds a container for containing multiple substrates vertically stacked in horizontal postures, a substrate treatment section which collectively applies treatment to multiple substrates horizontally stacked in vertical postures, a main conveyance mechanism which conveys multiple substrates horizontally stacked in vertical postures between a substrate delivery position and the substrate treatment section, a carrying in/out mechanism which carries in/out the multiple substrates with respect to the container and changes postures of the multiple substrates between the horizontal postures and the vertical postures, and a sub conveyance mechanism which receives and delivers multiple substrates in vertical postures from and to the carrying in/out mechanism at a transfer position, receives and delivers multiple substrates in vertical postures from and to the main conveyance mechanism at the substrate delivery position, and conveys multiple substrates i

Abstract: There is provided a substrate processing system having high maintainability by widening a gap between various processing apparatuses connected with side surfaces of transfer modules and capable of achieving sufficient productivity by avoiding deterioration in throughput. The substrate processing system for manufacturing an organic EL device by forming a multiple number of layers including, e.g., an organic layer on a substrate includes at least one transfer module configured to be evacuable and arranged along a straight transfer route. Within the transfer module, a multiple number of loading/unloading areas for loading/unloading the substrate with respect to a processing apparatus and at least one stocking area positioned between the loading/unloading areas are alternately arranged along the transfer route in series, and the processing apparatus is connected with a side surface of the transfer module at a position facing each of the loading/unloading areas.

Abstract: The invention relates to a method and to an apparatus for the rapid transport of glass sheets between different manufacturing stations in a spacious manufacturing plant for producing photovoltaic elements, wherein said manufacturing plant is subject to clean room conditions, comprising the following features: a) a freely movable mounting for conveying a lifting portal, b) at least one vertical lifting carriage for vertically transporting a glass sheet by means of a telescoping jack plate, wherein said plate can be extended in two opposite directions, has a local lowering and raising function and can transport a glass sheet continuously from one side of the vertical lifting carriage to the other side, c) for operation, the mechanically moved parts are encapsulated free of emissions in a clean room and made of abrasion-proof material, d) a cordless energy supply unit for operating the mounting.

Abstract: This substrate transport hand includes a first receiving portion and a second receiving portion capable of receiving a first substrate and a second substrate thereon respectively, a third receiving portion supporting the first substrate received on the first receiving portion along with the first receiving portion, and a fourth receiving portion movably provided on a hand body portion for supporting the second substrate received on the second receiving portion along with the second receiving portion when moved to a first position of the hand body portion.

Abstract: A storage device transfer station includes a first slot, a second slot, and a conveyor assembly. The conveyor assembly is configured to receive and support a plurality of storage devices such that the storage devices are vertically stacked and in spaced relation to each other. The conveyor assembly is operable to convey the storage devices between the first slot and the second slot.

Abstract: Embodiments of the present invention provide apparatus and methods for loading and unloading a multiple-substrate processing chamber segment by segment. One embodiment of the present invention provides an apparatus for processing multiple substrates. The apparatus includes a substrate supporting tray having a plurality of substrate pockets forming a plurality of segments, and a substrate handling assembly configured to pick up and drop off substrates from and to a segment of substrate pockets of the substrate supporting tray.

Abstract: A processing-object-supporting mechanism includes at least three devices each including a lift pin, a motor, and a drive controller. The lift pin contacts a processing object to support the processing object. The processing object is transferred between a conveying arm and the processing-object-supporting mechanism. The motor lifts and lowers the lift pin. The drive controller is configured to control the motor. The drive controller of each of the at least three devices is configured to control the motor of each of the at least three devices independently.

Abstract: A pick-and-place machine, comprising: a pick station; a place station; a pick/place head for transporting a die from the pick station along a transport path to the place station; wherein the machine further comprises a die-face processing means, comprising an inspection unit and/or a cleaning unit, operable to process a face of the die on the transport path.

Abstract: Described is a correlator for introducing vehicle tires into a conveyor of a vehicle washing system. The correlator includes a frame with two laterally and freely rotatable belts. A set of angled curb rails resides over one of the belts to direct the vehicle's tires into a set of guide rails. As a roller pushes the rear tire of the vehicle onto the belts, the angled curb rails provide a lateral force to the tires. Because the belts are free-rolling, they are capable of rotating to move the tire laterally and shift the position of the vehicle to align the vehicle with the conveyor.

Abstract: A transfer assembly for transferring first and second groups of electronic components simultaneously comprises a holding plate containing first and second sets of suction holes. The respective first and second sets of suction holes are operative to hold the first and second groups of electronic components respectively against the holding plate during transfer of the electronic components. A first vacuum chamber located next to the holding plate is connected only to the first set of suction holes. A vacuum compartment located within the first vacuum chamber encloses a second vacuum chamber. The vacuum compartment includes a sealing sheet in contact with the holding plate which has vacuum holes connecting the second vacuum chamber to the second set of suction holes. First and second vacuum sources are provided for applying vacuum suction forces separately in the first and second vacuum chambers.

Abstract: A lift device for personalization machine(s) for cards, in particular chip cards, placed at the output of a first transfer device and at the input of a second transfer device, the first transfer device being located at a height greater than the height of the second transfer device. At least one pair of shafts are spaced apart by a distance greater than the dimensions of the cards transversally to their direction of movement, each of the shafts being parallel to the direction of movement and equipped with a plurality of flaps oriented parallel to the shafts and having dimensions arranged to support at least a part of the cards and radially distributed around the shaft. The shafts of a pair being driven synchronously inward in rotation by at least one driving mechanism, so that two flaps guide a card during its descent in the lift device.

Abstract: This core plugging station relates generally to preparing rolls of previously wound material for an unwinding machine. The core plugging station improves the automation of moving rolls of sheet form material and the like to be loaded in preparation for unwinding. When a previously loaded roll has been unwound a spent core station disposes of the remaining core. The process sequentially moves rolls of material having cores from a core plugging station to an unwinding station and sequentially moves spent rolls of material from the unwinding station back to a spent core station.

Abstract: In the present invention, through a provision of a relay stand including a first relaying point, a second relaying point and a plurality of work mounting bases, a discharge/feed process of works between the relay stand and the work feed container and the work accommodation container is performed at the first relaying point and a load/unload process of works between the relay stand and the plurality of work inspection machines is performed at the second relaying point.

Abstract: The invention relates to an apparatus for handling capsules in a capsule processing equipment. The invention also relates to capsule processing equipment, such as an inspection equipment or a capsule printing equipment that includes such an apparatus.

Abstract: A marker plate embossing system is provided having an improved loading device, and improved chute and hopper systems. The loading device reduces the likelihood of marker plate misfeed. The chute and hopper systems allow the embossing of varying sized embossing plates, while reducing the likelihood of embossed marker plates being delivered in an incorrect stacked-order. A marker plate removal system is also provided for removing embossed marker plates from the hopper system without the marker plates falling out of the stacked-order.

Abstract: Only a wafer for QC check may be transferred and a production wafer may prevent from being transferred into an assigned process chamber whose QC check is not completed after a maintenance task, and the production wafer may be processed the assigned process chamber after the completion of the QC check. The wafer for QC check is transferred while inhibiting a transfer of the production wafer into the assigned process chamber, and the production wafer is transferred into each of the process chambers of the plurality except the assigned process chamber.

Abstract: An insert containing apparatus for a semiconductor package. The insert containing apparatus for a semiconductor package includes: a tray; an insert that is disposed in the tray, wherein at least one semiconductor package is seated on the insert and a through hole is formed around the semiconductor package; and an adapter including at least one finger of which an end portion passes through the through hole of the insert and guides the semiconductor package to a predetermined position so as to arrange the semiconductor package seated on the insert. The insert containing apparatus for a semiconductor package can be applied to semiconductor packages having any of various sizes by using a size-free insert. Thus, an investment cost of an instrument infrastructure can be greatly reduced, and an exchanging time of an insert can be reduced, and thus human power and time can be reduced.

Abstract: In various exemplary embodiments described herein, a system includes a plurality of carrier arms each having concentrically mounted midpoints between opposing ends of the carrier arms with a wafer carrier mounted on each of the opposing ends of the carrier arms. A hub includes a plurality of concentrically mounted drives where each of the plurality of drives is coupled near the midpoint of a respective one of the plurality of carrier arms. Each of the plurality of drives is configured to be controlled independently of the remaining plurality of concentrically mounted drives. A respective motor is coupled to each of the concentrically mounted drives and is configured to move the coupled carrier arm in a rotary manner. A linear wafer transport mechanism moves wafers to or from select ones of the wafer carriers on the plurality of carrier arms to an easy handoff location for a load/unload robot.

Abstract: Systems and methods that process a plurality of surgical instruments for cleaning and/or packaging. A device identifies a robot-ready insert having a predetermined configuration for accepting at least one type of surgical instrument. The surgical instruments are identified and oriented according to type using an automated apparatus. Specialized tools are also provided for automatically opening and closing surgical instruments, flipping instruments and assisting in the processing and maintenance of surgical instruments. The automated apparatus then places each of the surgical instrument types in one or more predetermined areas of the insert, configured to accept a predetermined set of surgical instrument types.

Abstract: The invention relates to a service machine (3) for a series of electrolysis cells (2) for the production of aluminium by igneous electrolysis, which includes: a) a bridge crane (4) capable of translation above said electrolysis cells; a tool-bearing carriage (6) on which is attached a service module including tools (10); c) a casting winch (13) connected to said bridge crane and for gripping and positioning near the cell (2) a casting assembly including a ladle (40), a casting tube (41) and a pressure reduction device; and an independent device (50, 50?) capable of generating pressurised air.

Abstract: A transfer point of a transfer arm is detected accurately and stably by using a position detecting wafer having an electrostatic capacitance sensor. A position detecting wafer S is formed in a wafer shape transferable by a transfer arm 20 and includes an electrostatic capacitance sensor 50 for detecting a relative position with respect to a reference object by detecting an electrostatic capacitance in relation with the reference object for a position detection. The electrostatic capacitance sensor 50 includes a detection electrode 52 for forming the electrostatic capacitance in relation with the reference object, and the detection electrode 52 is installed on a rear surface of a main body of the wafer shape. Installed on the main body is a guard electrode 100 covering the detecting electrode 52 when viewed from a front surface thereof, for blocking an electric field oriented toward the detection electrode 52 from the front surface.

Abstract: A substrate carrying device decides whether or not a substrate received from a substrate supporting device is supported therein in a correct position. A support arm provided with support lugs and strain gages attached to the support lugs, respectively, is advanced to a forward position, and then the support arm is raised relative to lifting pins supporting a wafer to receive the wafer from the lifting pins. The strain gages measure strains produced in the support lugs, respectively, when load is placed on the support lugs. Decision about whether or not the wafer is supported in a correct position on the support lugs is made on the basis of strains measured by the strain gages. When it is decided that the wafer is supported in an incorrect position on the support lugs, the retraction of the support arm is inhibited.

Abstract: A vial conveyance device which includes, in order to hold and release a vial, at least two arms that can be opened and closed, an urging member that urges the arms in an opening direction, a frame body for opening and closing the arms, and a frame body stopper that stops the frame body in a state in which the arms are closed.

Abstract: Disclosed herein is a method for transferring die from a wafer that includes picking two or more die from a wafer using a multi-spindle picking head, wherein the multi-spindle picking head is rotatable. The method includes moving the multi-spindle picking head from the wafer feeder to a placement machine, and presenting the two or more picked die to the placement machine for subsequent placement. Further disclosed herein is an apparatus for transferring die from a wafer that includes a picking head with a plurality of spindles. Each spindle is configured to pick a die from a wafer of die. The multi-spindle picking head is rotatable and moveable in at least one direction.

Abstract: The aim of the invention is to create an inspection system (1) for rolled products (2) of a milling station, which is to reliably prevent the texture of the substrate from being impressed and/or pressing through during processing of the rolled product (2), especially during grinding. Said aim is achieved by disposing a number of vertically adjustable rolled product clamps (6, 8) on a conveyor belt (4) for rolled products (2) in the inspection system (1).

Abstract: A storage device testing system includes one or more test racks, and one or more test slots housed by the one or more test racks, each test slot being configured to receive a storage device for testing. The storage device testing system also includes a transfer station for supplying storage devices to be tested. The one or more test racks and the transfer station at least partially define an operating area. The storage device testing system can also include automated machinery that is disposed within the operating area and is configured to transfer storage devices between the transfer station and the one or more test slots, and a cover at least partially enclosing the operating area, thereby at least partially inhibiting air exchange between the operating area and an environment surrounding the test racks.

Abstract: A sorter, method, and software product are provided for sorting mail pieces. The mail pieces are fed into a sorter, sorted, and then deposited into mail trays. The mail trays are then moved from the deposit area to a dispatch area, in the order they will be loaded into a truck. That order is preferably the same as the order in which the containers received the mail pieces.

Abstract: An apparatus for transferring and securing a substrate is shown. A pressure source is provided that is adapted to provide positive and negative pressure. A vacuum chuck is provided having a top side with a plurality of vacuum chuck portals formed therein. Each vacuum chuck portal is in fluid communication with the pressure source. The substrate is secured to the top side of the vacuum chuck when the pressure source provides negative pressure to the vacuum chuck portals. An intermediate member that selectively cooperates with the vacuum chuck to support and transfer the substrate between the vacuum chuck and the intermediate member is provided. The intermediate member has a plurality of receiving spaces and a plurality of transfer members. The receiving spaces and transfer members are adjacent to one another in an alternating pattern, and each transfer member has a top side with a plurality of transfer member portals formed therein.

Abstract: A work handling apparatus includes a pair of traveling guides (20, 20?) provided so as to extend in a front-and-rear direction X at right and left sides, and a pair of direct-acting arms (30, 30?) provided so as to travel independently on the pair of traveling guides. The direct-acting arms are extendable from contracted positions, at which the arms oppose each other and avoid mutual interference in a right-and-left direction Y, to extended positions at which the arms overlap with each other. An operation spot (41) is arranged in an operation area (40) sandwiched between the pair of traveling guides for performing a predetermined operation to a work. Also, work tools (60, 60?) are attached to the pair of direct-acting arms (30, 30?), respectively, for transferring the work between a work storage area (50) and the operation spot (41) or performing an operation after transfer.

Abstract: The present invention relates generally to assembly techniques. According to the present invention, the alignment and probing techniques to improve the accuracy of component placement in assembly are described. More particularly, the invention includes methods and structures to detect and improve the component placement accuracy on a target platform by incorporating alignment marks on component and reference marks on target platform under various probing techniques. A set of sensors grouped in any array to form a multiple-sensor probe can detect the deviation of displaced components in assembly.

Abstract: Provided is a method of adjusting a velocity of a transfer arm in a transfer member. The method includes, accelerating the transfer arm from a start point to a first point where a movement velocity reaches a preset reference velocity, dividing a division from the first point to a second point into movement divisions to move the transfer arm in any one of a deceleration motion, an acceleration motion, and a uniform motion according to the respective movement divisions, and decelerating the transfer arm from the second point to a target point. The motion of the transfer arm in the current movement division is different from that in the movement division just before the current movement division. Thus, a different impulse from that in the precedent movement division is applied to a substrate loaded on the transfer arm. Accordingly, the impulse response superposition cancels residual vibration of the substrate, so as to improve transfer efficiency of the transfer member.

Abstract: In one embodiment, a transfer robot for transferring a substrate includes a supporting means, a transfer robot arm including a first sub-robot arm and a second sub-robot arm arranged over the supporting means, an inner rail and an outer rail adjacent to the inner rail overlying the supporting means. The first sub-robot arm is adapted to move in a straight line motion along the inner rail and the second sub-robot arm is adapted to move in a straight line motion along the outer rail. The second sub-robot arm surrounds the first sub-robot arm.

Abstract: A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier so the at least one substrate transport carrier is capable of being coupled to the load port interface without lifting the at least one substrate transport carrier off the carrier holding station. The carrier holding station is arranged to provide a substantially simultaneous swap section for substantially simultaneous replacement of the substrate transport carrier from the carrier holding station.

Abstract: A sample conveying mechanism minimizes a risk of damage to a sample typified particularly by a photomask, and the sample conveying mechanism provides the sample retention mechanism for holding the sample so as to be suspended and is configured such that a portion close to a pattern surface of the sample is separated from a projection section of a flange for suspending the sample, thereby inhibiting a contact between the pattern surface and members configuring the conveying mechanism.

Abstract: A wafer manufacturing factory manufacturing semiconductor wafers and a device manufacturing factory manufacturing semiconductor devices are provided abutting each other via a conveying zone including a clean room, and the wafers are held by a conveying apparatus to be conveyed from the wafer manufacturing factory to the device manufacturing factory without being stored in a carrying case.

Abstract: A substrate carry-out device carries out an exposed substrate mounted on a substrate stage from a substrate holder by moving the substrate in one axis direction (X-axis direction) parallel to a horizontal plane in a state where the substrate is mounted on a substrate tray housed in the substrate holder. Meanwhile, a substrate carry-in device makes an unexposed substrate to be carried into the substrate stage wait at a substrate exchange position in a state where the unexposed substrate is mounted on another substrate tray, and after the exposed substrate is carried out from the substrate stage, lowers the another substrate tray, thereby mounting the unexposed substrate onto the substrate holder.

Abstract: In a processing system of a linear tool in which plural carrying robots are arranged in carrying mechanical units to which processing modules are coupled and a processing target is delivered and received between the plural carrying robots, in the case where there are plural carrying routes on which the processing target is carried, the present invention provides a technique for determining the carrying route on which the highest throughput can be obtained. In the processing system of a linear tool, in the case where there are plural carrying routes on which the processing target is carried, the throughputs of the respective carrying routes are compared to each other, and the carrying route is determined by a unit for selecting the carrying route with the highest throughput.