Composite seal for semiconductor manufacturing device

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Description

1. Composite seal for semiconductor manufacturing device

1.1 : Perspective

1.2 : Top

1.3 : Front

1.4 : Cross section taken along line 1.4-1.4 in view 1.2

1.5 : Enlarged portion view taken from encircled portion labeled, “1.5,” in view 1.4

1.6 : Right

1.7 : Bottom

1.8 : Back

1.9 : Left

The dot-dashed lines show the boundary of the enlarged view of 1.5 in views 1.4 and 1.5 and form no part of the claimed design.

Claims

The ornamental design for a composite seal for semiconductor manufacturing device as shown and described.

Referenced Cited
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Foreign Patent Documents
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Other references
  • Evolve™ Semiconductor Sealing Solution,https://www.parker.com/us/en/divisions/composite-sealing-systems-division/industries/semiconductor/evolve-semiconductor-sealing-solution.html, 2024. (Year: 2024).
  • Omniseal® Rotary Lip Seals Rotary Shaft Seals with Polymer Lips,https://www.omniseal-solutions.com/components/omniseal-polymers/omniseal-rotary-lip-seals, 2024. (Year: 2024).
  • Black Nbr Pneumatic Rubber Seal, Round, Size: 80 Mm,https://www.indiamart.com/proddetail/pneumatic-rubber-seal-23176462497.html?pos=1&pla=n, 2024. (Year: 2024).
  • Japanese Search Report dated May 23, 2023, which issued in the corresponding Japanese Design Patent Application No. 2023-001603, including English translation.
  • Taiwanese Notice of Allowance dated Mar. 21, 2024, which issued in the corresponding Taiwanese Design Application No. 112303824, including English translation.
Patent History
Patent number: D1071887
Type: Grant
Filed: Jul 25, 2023
Date of Patent: Apr 22, 2025
Inventors: Nobuhiro Yoshida (Gojo), Tamotsu Matsumura (Gojo)
Primary Examiner: Elizabeth J Oswecki
Application Number: 35/518,613