Process shield for a substrate processing chamber
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Claims
The ornamental design for a process shield for a substrate processing chamber, as shown and described.
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Type: Grant
Filed: Feb 8, 2019
Date of Patent: Feb 1, 2022
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Manjunatha P. Koppa (Bengaluru), Aravind Kamath (Santa Clara, CA), Cheng-Hsiung Matt Tsai (Cupertino, CA), Manjunath H. Venkataswamappa (Bangalore), Steven V. Sansoni (Livermore, CA), David Or (Santa Clara, CA)
Primary Examiner: Sheryl Lane
Assistant Examiner: Mark T. Philipps
Application Number: 29/679,734